JP2008047915A - 表面処理装置 - Google Patents
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/452—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
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Abstract
【解決手段】基板の表面処理で使用するための表面処理装置が提供される。この表面処理装置は、プラズマソースと、使用の際に基板を取り付ける処理チャンバとを備え、処理チャンバはプラズマソースに作動的に接続され、表面処理装置はプラズマソースと処理チャンバとの間で使用するプラズマを透過するための透過プレートを有する。この透過プレートは、1つ以上の開口部を備え、1つ以上の開口部の物理的形状および/または1つ以上の開口部の分布で基板の表面で所定の処理パターンを形成するようになっている。一般に開口部の形状は、ウェーハの基板を横断して実質的に均一なデポジットを行うようになっている。
【選択図】図1
Description
a)プラズマソースと透過プレートを有しない処理チャンバとを使用し、前記基板の半径rに対する前記基板上の表面処理の処理レートを測定するステップと、
b)前記測定されたプロセスレートにプロセスレート関数d(r)を適合するステップと、
c)d(r)×T(r)が定数となるように、前記透過プレートの中心からの半径の関数としてプラズマ透過関数T(r)を計算するステップと、
d)前記透過プレートに対して測定されたプラズマ透過関数が、プラズマ透過関数T(r)に対して最良に適合するように、1つ以上の開口部の物理的形状および/または1つ以上の開口部の分布に対する開口部の構造を定めるステップと、
e)前記ステップd)で定義された開口部の構造を使用して、透過プレートを製造するステップとを備える、透過プレートを製造するための方法が提供される。
本発明の第3の様相によれば、
a)前記透過プレートの一方の側で、第1ガスまたはガス混合物を前記プラズマソース内に注入するステップと、
b)前記透過プレートの反対側の前記処理チャンバ内に第2ガスまたはガス混合物を注入するステップと、
c)測定された処理レートに応答し、前記2つの注入されるガスのガスフロー比を調節するステップとを備えた上記装置を作動させる方法が提供される。
・新しい透過分布に変更するために、透過プレート12を容易に取り外し可能となっていること。
・SiOxまたはSiNx膜をデポジットするときに、フッ素を含むプラズマにより、現場で透過プレート12をクリーニングできること。
・取り付けプレート12の取り付けポイントで外部チャンバに良好に熱接続するだけで、透過プレート12の温度を制御できること。
・本発明を使用すると、透過プレート12からの膜フレーキングを生じることなく、少なくとも5ミクロン、多くて20ミクロンの全デポジット厚みが得られることが実証されていること。
・従来の複雑なガスノズルおよびRFコイル構造と比較して、透過プレート12をより簡単かつ経済的にできること。
2 処理チャンバ−
3 ウェーハ基板
4 基板テーブル
7 RFコイル
8 プラズマチャンバ
9 ガスの入口
11 ポンピングポート
14 検査ポート
15 カバーポート
16 頂部プレート
17 ベースプレート
21 開口部
30〜35 リング
Claims (34)
- プラズマソースと、
前記プラズマソースに作動的に接続されており、使用時に基板を取り付ける処理チャンバとを備えた、基板の表面処理に使用するための表面処理装置において、
前記プラズマソースと前記処理チャンバとの間で使用するプラズマを透過するための透過プレートを有し、この透過プレートは1つ以上の開口部を備え、前記1つ以上の開口部の物理的形状および/または1つ以上の開口部の分布は、基板の表面での所定の処理パターンを形成するようになっていることを特徴とする表面処理装置。 - 前記透過プレートは、複数の円形開口部を備える請求項1記載の表面処理装置。
- 各円形開口部の直径は、前記透過プレートの厚みより大である請求項2記載の表面処理装置。
- 透過プレートの厚みに対する開口部の直径の比は、3対1より大である請求項3記載の表面処理装置。
- 各円形開口部の直径は、5mmより大である請求項2乃至4の何れか1項に記載の表面処理装置。
- 各円形開口部の直径は、9mmより大である請求項5記載の表面処理装置。
- 前記透過プレートは、形状が円形である請求項1乃至6の何れか1項に記載の表面処理装置。
- 前記透過プレート上の1つ以上の同心開口部のリング内に複数の開口部が分布しており、前記1つ以上の同心状開口部のリングの中心は、透過プレートの中心となっている請求項7記載の表面処理装置。
- 各同心開口部のリング内の複数の開口部の同心状スペースは、前記基板の表面に所定の処理パターンを形成するようになっている請求項8記載の表面処理装置。
- 前記透過プレートには複数の同心状開口部のリングが配置されており、同心状開口部のリングの各ペアの間の径方向のスペースは、前記基板の表面に所定の処理パターンを形成するようになっている請求項8又は9に記載の表面処理装置。
- 前記プラズマソースは、誘導結合されたプラズマである請求項1乃至10の何れか1項に記載の表面処理装置。
- 前記プラズマソースは、プラズマチャンバと、誘導結合されたコイルとを備える請求項11記載の表面処理装置。
- 前記誘導結合されたコイルは、無線周波数(RF)ソースに接続されている請求項12記載の表面処理装置。
- 前記RFソースは、13.56MHzでRF電流を供給する請求項13記載の表面処理装置。
- 前記プラズマソースへの第1ガス供給部と、前記処理チャンバへの第2ガス供給部とを更に備える請求項1乃至14の何れか1項に記載の表面処理装置。
- 前記基板の表面処理は、前記基板の表面に材料をデポジットすることを含む請求項1乃至15の何れか1項に記載の表面処理装置。
- 前記1つ以上の開口部の物理的形状および/または前記1つ以上の開口部の分布は、前記基板の幅にわたってデポジットレートを実質的に均一にするようになっている請求項16記載の表面処理装置。
- 前記基板の前記表面処理は、前記基板の表面から材料を除去することを含む請求項1乃至17の何れか1項に記載の表面処理装置。
- 前記1つ以上の開口部の物理的形状および/または前記1つ以上の開口部の分布は、前記基板の幅にわたって材料の除去レートを実質的に均一にするようになっている請求項18記載の表面処理装置。
- 前記透過プレートの前記熱伝導率は、100Wm−1K−1より大である請求項1乃至19の何れか1項に記載の表面処理装置。
- 前記透過プレートは、低熱抵抗路を介して前記処理チャンバに熱接続されている請求項1乃至20の何れか1項に記載の表面処理装置。
- 前記透過プレートは、金属または金属合金プレートを含む請求項1乃至21の何れか1項に記載の表面処理装置。
- 前記透過プレートは、プラズマによる攻撃に耐えることができる層でコーティングされた金属または金属合金プレートを備える請求項22記載の表面処理装置。
- 前記透過プレートは、セラミックプレートを備える請求項1乃至20の何れか1項に記載の表面処理装置。
- 前記透過プレートは、アルミナプレートを備える請求項24記載の表面処理装置。
- 前記プラズマチャンバおよび前記処理チャンバは、実質的に円筒形のチャンバを備える請求項12乃至14の何れか1項に記載の表面処理装置。
- 前記プラズマチャンバと前記処理チャンバとは軸方向に整合している請求項26記載の表面処理装置。
- 前記処理チャンバの上方に前記プラズマソースが取り付けられている請求項1乃至27の何れか1項に記載の表面処理装置。
- 使用時に透過プレートがプラズマソースと処理チャンバとの間に取り付けられ、前記プラズマソースから前記処理チャンバへのプラズマの透過を可能にする1つ以上の開口部を備えた、前記処理チャンバ内に取り付けられた基板の表面処理に使用するための透過プレートを製造するための方法であって、
a)プラズマソースと透過プレートを有しない処理チャンバとを使用し、前記基板の半径rに対する前記基板上の表面処理の処理レートを測定するステップと、
b)前記測定されたプロセスレートにプロセスレート関数d(r)を適合するステップと、
c)d(r)×T(r)が定数となるように、前記透過プレートの中心からの半径の関数としてプラズマ透過関数T(r)を計算するステップと、
d)前記透過プレートに対して測定されたプラズマ透過関数が、プラズマ透過関数T(r)に対して最良に適合するように、1つ以上の開口部の物理的形状および/または1つ以上の開口部の分布に対する開口部の構造を定めるステップと、
e)前記ステップd)で定義された開口部の構造を使用して、透過プレートを製造するステップとを有することを特徴とする透過プレートを製造するための方法。 - 前記ステップd)で定義された前記開口部は、厚みに対する所定の幅の比を有する請求項29記載の方法。
- a)前記透過プレートの一方の側で、第1ガスまたはガス混合物を前記プラズマソース内に注入するステップと、
b)前記透過プレートの反対側の前記処理チャンバ内に第2ガスまたはガス混合物を注入するステップと、
c)測定された処理レートに応答し、前記2つの注入されるガスのガスフロー比を調節するステップとを有することを特徴とする請求項1に記載の装置を作動させる方法。 - 前記第1混合ガスと前記第2混合ガスは、貴ガスを含む請求項31記載の方法。
- 前記第1混合ガスと前記第2混合ガスは、同一の貴ガスを含む請求項32記載の方法。
- 前記透過プレートの温度を外部チャンバの温度の20℃の範囲内に維持する請求項31乃至33の何れか1項に記載の方法。
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