JP2008031517A - 被覆部材 - Google Patents
被覆部材 Download PDFInfo
- Publication number
- JP2008031517A JP2008031517A JP2006205769A JP2006205769A JP2008031517A JP 2008031517 A JP2008031517 A JP 2008031517A JP 2006205769 A JP2006205769 A JP 2006205769A JP 2006205769 A JP2006205769 A JP 2006205769A JP 2008031517 A JP2008031517 A JP 2008031517A
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- cutting
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- 239000000463 material Substances 0.000 claims abstract description 18
- 229910052751 metal Inorganic materials 0.000 claims abstract description 11
- 239000002184 metal Substances 0.000 claims abstract description 8
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 8
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 7
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 7
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 6
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 5
- 229910052802 copper Inorganic materials 0.000 claims abstract description 5
- 229910052735 hafnium Inorganic materials 0.000 claims abstract description 5
- 229910052748 manganese Inorganic materials 0.000 claims abstract description 5
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 5
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 5
- 229910052721 tungsten Inorganic materials 0.000 claims abstract description 5
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 5
- 229910052726 zirconium Inorganic materials 0.000 claims abstract description 5
- 239000000654 additive Substances 0.000 claims description 7
- 230000000996 additive effect Effects 0.000 claims description 7
- 238000000576 coating method Methods 0.000 abstract description 24
- 239000011248 coating agent Substances 0.000 abstract description 23
- 238000005520 cutting process Methods 0.000 abstract description 23
- 229910052727 yttrium Inorganic materials 0.000 abstract description 4
- 230000000052 comparative effect Effects 0.000 description 15
- 230000003647 oxidation Effects 0.000 description 13
- 238000007254 oxidation reaction Methods 0.000 description 13
- 239000000758 substrate Substances 0.000 description 10
- 239000010410 layer Substances 0.000 description 8
- 239000013078 crystal Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000002441 X-ray diffraction Methods 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 238000003917 TEM image Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 150000002500 ions Chemical group 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910019590 Cr-N Inorganic materials 0.000 description 1
- 229910019588 Cr—N Inorganic materials 0.000 description 1
- 229910010038 TiAl Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000005513 bias potential Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009837 dry grinding Methods 0.000 description 1
- 238000000635 electron micrograph Methods 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- -1 wear resistance Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Landscapes
- Drilling Tools (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
Abstract
高速度切削、高送り切削、被削材の高硬度化などの厳しい切削加工条件において長寿命を実現できる切削工具用の被覆部材の提供を目的とする。
【解決手段】
基材の表面に被膜を被覆した被覆部材において、被膜の少なくとも1層は、(MaLb)Xc(但し、MはCr,Al,Ti,Hf,V,Zr,Ta,Mo,W,Yの中から選ばれた少なくとも1種の金属元素を示し、LはMn,Cu,Ni,Co,B,Si,Sの中から選ばれた少なくとも1種の添加元素を示し、XはC,N,Oの中から選ばれた少なくとも1種の非金属元素を示し、aはMとLとの合計に対するMの原子比を示し、bはMとLとの合計に対するLの原子比を示し、cはMとLとの合計に対するXの原子比を示す。)と表され、a,b,cは、それぞれ0.85≦a≦0.99、0.01≦b≦0.15、a+b=1、1.00<c≦1.20を満足する硬質膜からなる被覆部材。
【選択図】図1
Description
本発明の被膜および硬質膜は、アークイオンプレーティング装置(以下、AIP装置という。)、スパッタリング装置などを用いて作製することができる。具体的には、基材の表面に、たとえばアークイオンプレーティングを使って基材温度273〜973K及び圧力0.5〜2.8Paの雰囲気中で、アーク放電電圧20〜100V、基板バイアス−30〜−200Vという条件で硬質膜を被覆すると本発明の被覆部材が得られる。なお、硬質膜の膜質を向上させるためには、アーク電圧を高くして多価イオンを多く発生させることが有効である。アーク放電の制御方法としては、定電流制御と定電圧制御がある。定電流制御はアーク電圧を高くするとアーク電流も増加するため電源が大きくなるという問題がある。そのためアーク放電の制御方法は、定電圧制御が好ましい。
Claims (2)
- 基材の表面に被膜を被覆した被覆部材において、被膜の少なくとも1層は、(MaLb)Xc(但し、MはCr,Al,Ti,Hf,V,Zr,Ta,Mo,W,Yの中から選ばれた少なくとも1種の金属元素を示し、LはMn,Cu,Ni,Co,B,Si,Sの中から選ばれた少なくとも1種の添加元素を示し、XはC,N,Oの中から選ばれた少なくとも1種の非金属元素を示し、aはMとLとの合計に対するMの原子比を示し、bはMとLとの合計に対するLの原子比を示し、cはMとLとの合計に対するXの原子比を示す。)と表され、a,b,cは、それぞれ0.85≦a≦0.99、0.01≦b≦0.15、a+b=1、1.00<c≦1.20を満足する硬質膜からなる被覆部材。
- 硬質膜の結晶子の大きさが5〜15nmである請求項1に記載の被覆部材。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006205769A JP4967505B2 (ja) | 2006-07-28 | 2006-07-28 | 被覆部材 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006205769A JP4967505B2 (ja) | 2006-07-28 | 2006-07-28 | 被覆部材 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008031517A true JP2008031517A (ja) | 2008-02-14 |
JP4967505B2 JP4967505B2 (ja) | 2012-07-04 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006205769A Active JP4967505B2 (ja) | 2006-07-28 | 2006-07-28 | 被覆部材 |
Country Status (1)
Country | Link |
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JP (1) | JP4967505B2 (ja) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009262288A (ja) * | 2008-04-25 | 2009-11-12 | Kobe Steel Ltd | 硬質皮膜およびその形成方法ならびに硬質皮膜被覆部材 |
WO2012078151A1 (en) * | 2010-12-08 | 2012-06-14 | Galleon International Corporation | Hard and low friction nitride coatings |
JP2013032578A (ja) * | 2011-06-29 | 2013-02-14 | Daido Steel Co Ltd | ターゲット及び硬質被膜被覆切削工具 |
US8557405B2 (en) | 2009-08-04 | 2013-10-15 | Tungaloy Corporation | Coated member |
US20150030406A1 (en) * | 2012-03-07 | 2015-01-29 | Seco Tools Ab | Body with a metal based nitride layer and a method for coating the body |
JP2016124086A (ja) * | 2015-01-07 | 2016-07-11 | 日立金属株式会社 | 被覆工具 |
WO2017150550A1 (ja) | 2016-02-29 | 2017-09-08 | 三菱マテリアル株式会社 | 表面被覆切削工具 |
KR20180072690A (ko) | 2015-10-28 | 2018-06-29 | 미쓰비시 마테리알 가부시키가이샤 | 표면 피복 절삭 공구 |
KR20180073572A (ko) | 2015-10-28 | 2018-07-02 | 미쓰비시 마테리알 가부시키가이샤 | 표면 피복 절삭 공구 |
KR20180123029A (ko) | 2016-03-11 | 2018-11-14 | 미쓰비시 마테리알 가부시키가이샤 | 내치핑성과 내마모성이 우수한 표면 피복 절삭 공구 |
US10751804B2 (en) | 2016-02-29 | 2020-08-25 | Mitsubishi Materials Corporation | Surface-coated cutting tool |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06220608A (ja) * | 1993-01-28 | 1994-08-09 | Sumitomo Electric Ind Ltd | 表面被覆硬質部材及びその製造方法 |
JPH0911004A (ja) * | 1995-06-23 | 1997-01-14 | Mitsubishi Materials Corp | 硬質層被覆切削工具 |
JPH09104965A (ja) * | 1995-10-06 | 1997-04-22 | Toshiba Tungaloy Co Ltd | 高靭性被覆部材 |
JP2004034186A (ja) * | 2002-07-01 | 2004-02-05 | Hitachi Tool Engineering Ltd | 被覆切削工具及びその被覆方法 |
JP2004238736A (ja) * | 2003-01-17 | 2004-08-26 | Hitachi Tool Engineering Ltd | 硬質皮膜及び硬質皮膜被覆工具 |
JP2004256914A (ja) * | 2003-02-07 | 2004-09-16 | Kobe Steel Ltd | 硬質皮膜及びその製造方法並びに硬質皮膜形成用ターゲット |
JP2005126736A (ja) * | 2003-10-21 | 2005-05-19 | Hitachi Tool Engineering Ltd | 硬質皮膜 |
JP2005232503A (ja) * | 2004-02-18 | 2005-09-02 | Nachi Fujikoshi Corp | 耐焼き付き被膜 |
-
2006
- 2006-07-28 JP JP2006205769A patent/JP4967505B2/ja active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06220608A (ja) * | 1993-01-28 | 1994-08-09 | Sumitomo Electric Ind Ltd | 表面被覆硬質部材及びその製造方法 |
JPH0911004A (ja) * | 1995-06-23 | 1997-01-14 | Mitsubishi Materials Corp | 硬質層被覆切削工具 |
JPH09104965A (ja) * | 1995-10-06 | 1997-04-22 | Toshiba Tungaloy Co Ltd | 高靭性被覆部材 |
JP2004034186A (ja) * | 2002-07-01 | 2004-02-05 | Hitachi Tool Engineering Ltd | 被覆切削工具及びその被覆方法 |
JP2004238736A (ja) * | 2003-01-17 | 2004-08-26 | Hitachi Tool Engineering Ltd | 硬質皮膜及び硬質皮膜被覆工具 |
JP2004256914A (ja) * | 2003-02-07 | 2004-09-16 | Kobe Steel Ltd | 硬質皮膜及びその製造方法並びに硬質皮膜形成用ターゲット |
JP2005126736A (ja) * | 2003-10-21 | 2005-05-19 | Hitachi Tool Engineering Ltd | 硬質皮膜 |
JP2005232503A (ja) * | 2004-02-18 | 2005-09-02 | Nachi Fujikoshi Corp | 耐焼き付き被膜 |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009262288A (ja) * | 2008-04-25 | 2009-11-12 | Kobe Steel Ltd | 硬質皮膜およびその形成方法ならびに硬質皮膜被覆部材 |
US8557405B2 (en) | 2009-08-04 | 2013-10-15 | Tungaloy Corporation | Coated member |
US10450647B2 (en) | 2010-12-08 | 2019-10-22 | Galleon International Corporation | Hard and low friction nitride coatings |
WO2012078151A1 (en) * | 2010-12-08 | 2012-06-14 | Galleon International Corporation | Hard and low friction nitride coatings |
KR101807341B1 (ko) | 2010-12-08 | 2017-12-08 | 갈레온 인터내셔널 코퍼레이션 | 마찰 저항이 작은 경질의 질화물 코팅 |
JP2013032578A (ja) * | 2011-06-29 | 2013-02-14 | Daido Steel Co Ltd | ターゲット及び硬質被膜被覆切削工具 |
US9540722B2 (en) * | 2012-03-07 | 2017-01-10 | Seco Tools Ab | Body with a metal based nitride layer and a method for coating the body |
US20150030406A1 (en) * | 2012-03-07 | 2015-01-29 | Seco Tools Ab | Body with a metal based nitride layer and a method for coating the body |
JP2016124086A (ja) * | 2015-01-07 | 2016-07-11 | 日立金属株式会社 | 被覆工具 |
KR20180072690A (ko) | 2015-10-28 | 2018-06-29 | 미쓰비시 마테리알 가부시키가이샤 | 표면 피복 절삭 공구 |
KR20180073572A (ko) | 2015-10-28 | 2018-07-02 | 미쓰비시 마테리알 가부시키가이샤 | 표면 피복 절삭 공구 |
US10618113B2 (en) | 2015-10-28 | 2020-04-14 | Mitsubishi Materials Corporation | Surface-coated cutting tool |
US10618114B2 (en) | 2015-10-28 | 2020-04-14 | Mitsubishi Materials Corporation | Surface-coated cutting tool |
KR102523236B1 (ko) | 2015-10-28 | 2023-04-18 | 미쓰비시 마테리알 가부시키가이샤 | 표면 피복 절삭 공구 |
WO2017150550A1 (ja) | 2016-02-29 | 2017-09-08 | 三菱マテリアル株式会社 | 表面被覆切削工具 |
US10751804B2 (en) | 2016-02-29 | 2020-08-25 | Mitsubishi Materials Corporation | Surface-coated cutting tool |
KR20180123029A (ko) | 2016-03-11 | 2018-11-14 | 미쓰비시 마테리알 가부시키가이샤 | 내치핑성과 내마모성이 우수한 표면 피복 절삭 공구 |
US10751806B2 (en) | 2016-03-11 | 2020-08-25 | Mitsubishi Materials Corporation | Surface-coated cutting tool having excellent chipping resistance and wear resistance |
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