JP2007512541A - 三次元分光的符号化撮像のための方法と装置 - Google Patents
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2509—Color coding
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
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- G—PHYSICS
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- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B1/00—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor
- A61B1/04—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances
- A61B1/042—Instruments for performing medical examinations of the interior of cavities or tubes of the body by visual or photographical inspection, e.g. endoscopes; Illuminating arrangements therefor combined with photographic or television appliances characterised by a proximal camera, e.g. a CCD camera
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/103—Detecting, measuring or recording devices for testing the shape, pattern, colour, size or movement of the body or parts thereof, for diagnostic purposes
- A61B5/107—Measuring physical dimensions, e.g. size of the entire body or parts thereof
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Abstract
Description
ここにおいて、E(ω)=A(ω)exp(iφ(ω))およびE0(ω)=A0(ω)exp(iφ0(ω))はそれぞれ、サンプルおよび基準アームから反射されたスペクトルである。簡略化のため、サンプルおよび基準アームからのスペクトル振幅は実数で等しく、A(ω)=A0(ω)とする。連続かつ滑らかな位相を有する二波の間のスペクトル干渉信号から位相差を抽出するアルゴリズムはよく知られている。スペクトル位相測定は、広帯域ソースおよび白色光を使用する分散測定のために主に実行された。基準および信号フィールド間の与えられた遅延τを有するフーリエ限界基準フィールド(φ0(ω)=0)を使用すると、式(1)における干渉項は、単にcos[φ(ω)−ωτ]となる。端的なアルゴリズムを使用すると、スペクトル位相は、干渉パターンI(ω)から明瞭に抽出することができる。一つの構成においては、各点における深度または表面の高さhは、h=c・φ(ω)/(2ω)により与えられ、ここにおいてcは光の速度である。
ここにおいて、Nはx軸に沿う解像可能な点の数(波長)であり、Δωは、ソース帯域幅の合計である。コヒーレンス長が、CL=c/Δωで与えられ、数ミクロンと短くてもよい白色干渉法と異なり、各分光的符号化スポットのスペクトル幅によってのみ決定されるので、ここではコヒーレンス長はN倍長い。この作業を通して、コヒーレンス長(310μm)は、共焦点パラメータ(2.7mm)よりも小さく、従って、軸方向の解像度を決定していた。焦点の大きな深度により、基準アームの光学経路長を走査するだけで、共焦点パラメータと等価な範囲に渡る撮像が可能になる。
Claims (17)
- 表面の三次元撮像方法であって、前記表面の横方向位置を決定するために波長を符号化し、前記表面上の少なくとも一つの点の深度座標を決定するために位相を符号化することを含む方法。
- 前記表面上の少なくとも一つの点の深度座標を決定するために位相を符号化することは、前記表面に対して、および第1位相長を有する基準経路に信号を送信し、前記表面から反射された位相コヒーレント信号を収集し、前記第1位相長を有する基準経路からの位相コヒーレント信号を収集し、前記表面から収集された前記コヒーレント信号の位相と、前記第1位相長を有する前記基準経路からの前記基準信号の位相の間の干渉により生成される干渉信号を検出し、前記表面の深度情報を決定するために前記干渉信号を処理することを含む請求項1に記載の方法。
- 前記基準経路の前記位相長を第2位相長に変更し、前記第2位相長を有する基準経路からの位相コヒーレント信号を収集し、前記表面から収集された前記コヒーレント信号の位相と、前記第2位相長を有する前記基準経路からの前記基準信号の位相の間の干渉により生成される干渉信号を検出し、前記表面の深度情報を決定するために前記干渉信号を処理することを更に含む請求項2に記載の方法。
- 前記基準経路の前記位相長を複数の異なる位相長に繰り返し変更し、前記異なる位相長のそれぞれにおける基準経路からの位相コヒーレント信号を収集し、前記異なる基準経路位相長のそれぞれにおいて、前記表面から収集された前記コヒーレント信号の位相と、前記基準経路からの前記基準信号の位相の間の干渉により生成される干渉信号を検出し、前記表面の深度情報を決定するためにそれぞれの干渉信号を処理することを更に含む請求項2に記載の方法。
- 対象物の三次元表面測定の方法であって、
(a)波長を符号化することにより、サンプルの表面の横方向位置を決定し、
(b)位相を符号化することにより、前記表面上の少なくとも一つの点の深度座標を決定することを含む方法。 - 位相を符号化することにより前記表面上の少なくとも一つの点の深度座標を決定することは、基準信号の位相と、前記対象物の表面から反射された信号の位相との間の干渉により生成された干渉信号を測定することを含む請求項5に記載の方法。
- 複数の異なる位相を有する前記基準信号を提供し、前記表面上の複数の位置において高さを決定するために前記異なる基準信号位相を使用することを更に含む請求項6に記載の方法。
- 試料の表面を測定する方法であって、前記方法は、
(a)スペクトルの分光的符号化された点として提供されるビームを操作し、
(b)前記ビームを、サンプルアーム内に配置された試料上合焦し、
(c)二次元像を作成するために、前記ビームを、前記試料全体に渡り第1方向に走査し、
(d)基準経路の経路長を変更し、
(e)前記サンプルおよび基準アームからの光からの反射により干渉パターンを生成し、
(f)前記サンプルおよび基準アームからの前記信号を検知アームに向け、
(g)前記検知アームにおいて、前記サンプルおよび基準アームからの信号を結合することを含む方法。 - 基準アームの経路長を変更することは、前記基準アームにおける反射表面を移動することを含む請求項8に記載の方法。
- 基準アームの経路長を変更することは、前記基準経路における光の伝播方向と同じ方向にミラーを移動することを含む請求項8に記載の方法。
- 前記検知アームにおいて、前記サンプルおよび基準アームからの前記信号を結合することは、前記信号を結合し、分散要素を使用して前記信号を空間的に分散することを含む請求項8に記載の方法。
- 前記分散された信号を、撮像システム上に合焦することを更に含む請求項11に記載の方法。
- 前記分散された信号を、撮像システム上に合焦することは、レンズを使用して、前記分散された信号を、電荷結合素子上に合焦することを更に含む請求項12に記載の方法。
- 表面の三次元撮像システムであって、前記表面の横方向位置を決定するために波長を符号化する手段と、前記表面上の少なくとも一つの点の深度座標を決定するために位相を符号化する手段を備えるシステム。
- 前記表面上の少なくとも一つの点の深度座標を決定するために位相を符号化する前記手段は、前記表面に対して、および第1位相長を有する基準経路へ信号を送信するソースと、前記表面から反射される位相コヒーレント信号を収集する手段と、前記第1位相長を有する前記基準経路からの位相コヒーレント信号を収集する手段と、前記表面から収集された前記コヒーレント信号の位相と、前記第1位相長を有する前記基準経路からの前記基準信号の位相を検出する手段と、前記表面の深度情報を決定するために、前記表面から収集された前記コヒーレント信号の前記位相と、前記基準信号の前記位相を処理する手段とを備える請求項14に記載の方法。
- 前記基準経路の前記位相長を第2位相長に変更し、前記第2位相長を有する基準経路からの位相コヒーレント信号を収集し、前記表面から収集された前記コヒーレント信号の位相と、前記第2位相長を有する前記基準経路からの前記基準信号の位相の間の干渉により生成される干渉信号を検出し、前記表面の深度情報を決定するために、前記基準信号を処理することを更に含む請求項2に記載の方法。
- 前記基準経路の前記位相長を複数の異なる位相長に変更する手段を更に備える請求項16に記載のシステム方法。
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PCT/US2004/039454 WO2005054780A1 (en) | 2003-11-28 | 2004-11-24 | Method and apparatus for three-dimensional spectrally encoded imaging |
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WO2005054780A1 (en) | 2005-06-16 |
EP1687587A1 (en) | 2006-08-09 |
EP1687587B1 (en) | 2020-01-08 |
US7551293B2 (en) | 2009-06-23 |
JP2013068636A (ja) | 2013-04-18 |
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US20050128488A1 (en) | 2005-06-16 |
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