JP2007313621A - Polishing roll and its manufacturing method - Google Patents

Polishing roll and its manufacturing method Download PDF

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Publication number
JP2007313621A
JP2007313621A JP2006148601A JP2006148601A JP2007313621A JP 2007313621 A JP2007313621 A JP 2007313621A JP 2006148601 A JP2006148601 A JP 2006148601A JP 2006148601 A JP2006148601 A JP 2006148601A JP 2007313621 A JP2007313621 A JP 2007313621A
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JP
Japan
Prior art keywords
nonwoven fabric
polishing roll
abrasive
resin
polishing
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JP2006148601A
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Japanese (ja)
Inventor
Junichiro Yamamoto
淳一郎 山本
Ryo Kawamoto
涼 河本
Masaru Shimizu
優 清水
Yutaka Seto
豊 瀬戸
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Kanai Juyo Kogyo Co Ltd
Kure Norton KK
Original Assignee
Kanai Juyo Kogyo Co Ltd
Kure Norton KK
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Application filed by Kanai Juyo Kogyo Co Ltd, Kure Norton KK filed Critical Kanai Juyo Kogyo Co Ltd
Priority to JP2006148601A priority Critical patent/JP2007313621A/en
Priority to TW096118571A priority patent/TW200817137A/en
Priority to PCT/JP2007/060880 priority patent/WO2007139097A1/en
Priority to KR1020087031510A priority patent/KR20090021187A/en
Priority to CN2007800199973A priority patent/CN101454123B/en
Publication of JP2007313621A publication Critical patent/JP2007313621A/en
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/02—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/02—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery
    • B24D13/12—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery comprising assemblies of felted or spongy material, e.g. felt, steel wool, foamed latex
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/26—Cleaning or polishing of the conductive pattern

Abstract

<P>PROBLEM TO BE SOLVED: To decrease clogging of hole(s) caused by the waste object by decreasing the waste object produced when a work furnished with small through holes is polished, such as a printed circuit board furnished with through holes. <P>SOLUTION: The base material of a polishing roll 50 consists of a non-woven cloth 12 structured so that synthetic fibers 14 having fiber diameters as ranging between 10-36 μm are entangled three-dimensionally and the entangling points of fibers 14 with one another are stuck fast by a binder resin 16. Abrasive grains 18 are included in this non-woven cloth 12 dispersedly and secured fast by a synthetic resin bonding agent 20. The polishing material 10 consisting of non-woven cloth is shaped rectangularly by cutting etc., compressed and fixed, and then installed on the peripheral surface of a core 52 rigidly as in a single piece using a synthetic resin. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、不織布研磨材を用いた研磨ロール及びその製造方法であって、プリント配線板などのように小さい貫通穴又は非貫通穴がある被研磨物を研磨するのに最適な研磨ロール及びその製造方法に関する。   The present invention relates to a polishing roll using a nonwoven fabric abrasive and a method for manufacturing the same, and a polishing roll that is optimal for polishing an object to be polished having small through holes or non-through holes, such as a printed wiring board, and the like. It relates to a manufacturing method.

従来から、プリント配線板や銅、アルミニウム等の板状金属材料の研磨には、特許文献１に開示されているような研磨ロールが用いられている。これらの研磨ロールは、ナイロン不織布に研磨砥粒を固着させた矩形状の不織布研磨材を、円筒状の芯材の外周面上に多数枚放射線状に配置し接着剤を用いて一体化させたり、ドーナツ状に裁断した不織布研磨材を円筒状の芯材に複数枚刺し通して、芯材の軸方向に圧縮した状態で一体化させたり、あるいは、長尺状の不織布研磨材を芯材外周面上に巻きつけてバインダ樹脂を用いて一体化させて作製されている。これらの研磨ロールは、不織布研磨材が消耗するのに伴い次々と新しい研磨層が出てきて研磨性能が持続する点と、オープンな三次元構造による柔軟性に起因して被研磨物表面へのなじみ性がよくスクラッチの少ない均一かつ一定粗さの加工表面を得られる点と、またそのオープンな三次元構造に起因して、被研磨物の削りカスによる目詰まりが少なく、発生する研磨熱を逃がす点から多用されている。
特開２００３−１７５４７１号公報 Conventionally, a polishing roll as disclosed in Patent Document 1 is used for polishing a printed wiring board, or a plate-like metal material such as copper or aluminum. These polishing rolls are made by arranging a large number of rectangular nonwoven fabric abrasives in which abrasive grains are fixed to a nylon nonwoven fabric in a radial pattern on the outer peripheral surface of a cylindrical core material and using an adhesive. A plurality of non-woven abrasives cut into a donut shape are pierced through a cylindrical core and integrated in a compressed state in the axial direction of the core, or a long non-woven abrasive is It is produced by winding on a surface and integrating with a binder resin. These polishing rolls have a new polishing layer one after another as the non-woven abrasive material is consumed, and the polishing performance is maintained, and the open three-dimensional structure provides flexibility to the surface of the workpiece. Due to the fact that it is possible to obtain a uniform and constant-roughness processed surface with good conformability and low scratches, and due to its open three-dimensional structure, there is little clogging due to scraps of the work to be polished, and the generated polishing heat is reduced. Often used from the point of escape.
JP 2003-175471 A

しかしながら、これら従来の研磨ロールでは、プリント配線板などのように小さい貫通穴が設けられている被研磨物を研磨したときに、研磨ロールから発生した消耗カスが穴に詰まり、これがめっき不良や通電不良を生じさせ歩留りを低下させる原因となっている。   However, in these conventional polishing rolls, when an object to be polished having a small through hole such as a printed wiring board is polished, consumable debris generated from the polishing roll is clogged into the hole, which causes defective plating or energization. This causes defects and decreases the yield.

本発明は、上記問題を鑑みて発明されたもので、スルーホールが設けられたプリント配線板のように、小さな貫通穴又は非貫通穴が設けられている被研磨物を研磨するときに発生する消耗カスを減少し、消耗カスによる穴づまりを減少させることを課題とする。   The present invention has been invented in view of the above problems, and occurs when an object to be polished having a small through hole or a non-through hole is polished, such as a printed wiring board having a through hole. It is an object to reduce consumable debris and reduce hole clogging due to consumable debris.

（１）
合成繊維を三次元的に交絡させて合成繊維同士の交絡点をバインダ樹脂により接着してなる不織布基材に研磨砥粒を分散・混入して合成樹脂系接着剤を用いて固着させた不織布研磨材を用いた研磨ロールであって、合成繊維の繊維径が、５μｍ〜３６μｍである不織布研磨材を用いた研磨ロール。
（２）
不織布研磨材は矩形状であり、不織布研磨材を複数枚並置し、並置した方向に圧縮固定化し、円筒状の芯材に巻き付け、その際圧縮固定化された不織布研磨材に合成樹脂を含浸し、さらに不織布研磨材を固定化し一体化することにより形成された（１）記載の研磨ロール。
（３）
並置方向への圧縮を９５〜２０％の割合で行い、合成樹脂を含浸した不織布研磨材を常温〜６０℃で３〜２４時間放置することにより固定化し一体化する、（２）記載の研磨ロールの製造方法。
（４）
不織布研磨材はドーナツ状であり、不織布研磨材を複数枚芯材に刺し通し、芯材の軸方向に圧縮固定化し、その際不織布研磨材に合成樹脂を含浸し、さらに不織布研磨材を固定化し一体化することにより形成された（１）記載の研磨ロール。
（５）
芯材の軸方向への圧縮は９５〜２０％の割合で行い、合成樹脂を含浸しした不織布研磨材を常温〜６０℃で３〜２４時間放置することにより固定化し一体化する、（４）記載の研磨ロールの製造方法。
（６）
不織布研磨材は長尺状であり、不織布研磨材を芯材に巻きつけ、円筒状の芯材に圧縮固定化し、その際不織布研磨材に合成樹脂を含浸し、さらに不織布研磨材を固定化し一体化することにより形成された（１）記載の研磨ロール。
（７）
圧縮は９５〜２０％の割合で行い、合成樹脂を含浸した不織布研磨材を常温〜６０℃で３〜２４時間放置することにより固定化し一体化する、（６）記載の研磨ロールの製造方法。
（８）
合成樹脂は、ウレタン樹脂又は発泡ウレタン樹脂である（１）〜（７）のいずれかに記載の研磨ロール。
（９）
合成樹脂系接着剤は、エポキシ樹脂、フェノール樹脂、あるいはエポキシ樹脂とフェノール樹脂とを混合したものである（１）〜（８）のいずれかに記載の研磨ロール。 (1)
Non-woven fabric polishing in which synthetic fibers are entangled three-dimensionally, and abrasive grains are dispersed and mixed into a non-woven fabric base material obtained by bonding the entanglement points of synthetic fibers with a binder resin, and then fixed using a synthetic resin adhesive A polishing roll using a nonwoven fabric polishing material in which a fiber diameter of a synthetic fiber is 5 μm to 36 μm.
(2)
The nonwoven fabric abrasive is rectangular, and a plurality of nonwoven fabric abrasives are juxtaposed, compression-fixed in the juxtaposed direction, wound around a cylindrical core material, and impregnated with synthetic resin in the compression-fixed nonwoven fabric abrasive Further, the polishing roll according to (1), which is formed by fixing and integrating a nonwoven fabric abrasive.
(3)
The polishing roll according to (2), wherein compression in the juxtaposition direction is performed at a ratio of 95 to 20%, and the non-woven fabric abrasive material impregnated with the synthetic resin is fixed and integrated by leaving at room temperature to 60 ° C. for 3 to 24 hours. Manufacturing method.
(4)
The nonwoven fabric abrasive material is doughnut-shaped, and the nonwoven fabric abrasive material is pierced into the core material and compressed and fixed in the axial direction of the core material. At that time, the nonwoven fabric abrasive material is impregnated with synthetic resin, and further the nonwoven fabric abrasive material is immobilized. The polishing roll according to (1), which is formed by integrating.
(5)
The core material is compressed in the axial direction at a ratio of 95 to 20%, and the nonwoven fabric abrasive material impregnated with the synthetic resin is fixed and integrated by leaving it at room temperature to 60 ° C. for 3 to 24 hours, (4) The manufacturing method of the grinding | polishing roll of description.
(6)
The non-woven fabric abrasive is long, and the non-woven fabric abrasive is wound around the core material and compressed and fixed to the cylindrical core material. At that time, the non-woven fabric abrasive material is impregnated with synthetic resin, and the non-woven fabric abrasive material is fixed and integrated. The polishing roll as described in (1) formed by forming.
(7)
The method for producing a polishing roll according to (6), wherein the compression is performed at a ratio of 95 to 20%, and the nonwoven fabric abrasive material impregnated with the synthetic resin is fixed and integrated by leaving it at room temperature to 60 ° C. for 3 to 24 hours.
(8)
The synthetic resin is a polishing roll according to any one of (1) to (7), which is a urethane resin or a urethane foam resin.
(9)
The synthetic resin adhesive is an abrasive roll according to any one of (1) to (8), which is an epoxy resin, a phenol resin, or a mixture of an epoxy resin and a phenol resin.

本発明にかかる研磨ロールでは、プリント配線板のように小さい貫通穴又は非貫通穴がある被研磨物を研磨した場合でも、発生する消耗カスが少ないうえに、その消耗カスが穴に詰まりにくく、その結果、穴の開いた被研磨物の研磨工程における歩留りが向上する。   In the polishing roll according to the present invention, even when an object to be polished having small through holes or non-through holes, such as a printed wiring board, is polished, there is little consumable debris generated, and the consumable debris is less likely to clog the hole, As a result, the yield in the polishing process of the object to be polished with holes is improved.

図１は、本発明に使用される不織布研磨材の一実施の形態を示す斜視図解図であり、図２は、図１に示す不織布研磨材の一部を拡大した図解図である。不織布研磨材１０は、不織布基材１２を含む。不織布基材１２は、合成繊維１４を三次元的に交絡させて合成繊維１４同士の交絡点をバインダ樹脂１６により接着した不織布である。不織布基材１２を構成する合成繊維１４としては、一定の強度を有する合成繊維であれば特に限定はされないが、具体的にはポリアミド繊維、アラミド繊維、ポリエステル繊維、ビニロン繊維を単独で、あるいはこれらを組み合わせて使用することができる。さらに、これらの繊維の中でもバインダ樹脂１６による接着性を考慮するとポリアミド繊維、ビニロン繊維を用いるのが好ましい。合成繊維１４には、繊維径が５μｍ〜３６μｍの範囲にあるものが使用できる。より望ましい繊維径は５μｍ〜３０μｍで、さらに望ましい繊維径は、５μｍ〜２７μｍである。合成繊維１４は、繊維径がこの範囲内のものであればよく、繊維径を単一にして、あるいは異なる繊維径のものを複数種組み合わせて使用されてもよい。   FIG. 1 is a perspective view showing an embodiment of the nonwoven fabric abrasive used in the present invention, and FIG. 2 is an enlarged view of a part of the nonwoven fabric abrasive shown in FIG. The nonwoven fabric abrasive 10 includes a nonwoven fabric substrate 12. The nonwoven fabric substrate 12 is a nonwoven fabric in which the synthetic fibers 14 are entangled three-dimensionally and the entanglement points of the synthetic fibers 14 are bonded by the binder resin 16. The synthetic fiber 14 constituting the nonwoven fabric substrate 12 is not particularly limited as long as it is a synthetic fiber having a certain strength, but specifically, polyamide fiber, aramid fiber, polyester fiber, vinylon fiber alone or these Can be used in combination. Further, among these fibers, it is preferable to use polyamide fibers and vinylon fibers in consideration of the adhesiveness due to the binder resin 16. As the synthetic fiber 14, one having a fiber diameter in the range of 5 μm to 36 μm can be used. A more desirable fiber diameter is 5 μm to 30 μm, and a further desirable fiber diameter is 5 μm to 27 μm. The synthetic fiber 14 only needs to have a fiber diameter within this range, and may be used with a single fiber diameter or a combination of a plurality of fibers having different fiber diameters.

不織布基材１２は、クロスウェブ、ランダムウェブ、スパンボンド法、抄紙式を用いて作製される。その中でも、被研磨物の研磨クズによる目詰まりが少なく、放熱性も高く、且つ研磨ロール作成時の密度制御を容易に行うことができる点から、ウェブに厚みを付与できるクロスウェブ、ランダムウェブにより作製されるのが好ましい。また、ウェブの密度を制御するために、これらの方法で作製されたウェブにニードルパンチ加工を施してもよい。   The nonwoven fabric substrate 12 is produced using a cross web, a random web, a spunbond method, and a papermaking method. Among them, from the point that clogging due to polishing debris of the object to be polished is low, heat dissipation is high, and density control at the time of polishing roll creation can be easily performed. Preferably it is made. Moreover, in order to control the density of a web, you may give a needle punch process to the web produced by these methods.

バインダ樹脂１６としては、ＳＢＲ樹脂、ＮＢＲ樹脂、アクリル酸エステル、メラミン樹脂、フェノール樹脂等を単独で、あるいはこれらを組み合わせて使用することができる。さらに、これらの中でも柔軟性に富む不織布基材１２を作製できる点で、ＳＢＲ樹脂、アクリル酸エステルを用いるのが好ましい。バインダ樹脂１６の塗布方法として、公知のスプレー法、浸漬法などを単独であるいは組み合わせて用いることができる。   As the binder resin 16, an SBR resin, an NBR resin, an acrylic ester, a melamine resin, a phenol resin, or the like can be used alone or in combination. Furthermore, among these, it is preferable to use SBR resin and acrylate ester in that the non-woven fabric substrate 12 rich in flexibility can be produced. As a method for applying the binder resin 16, a known spray method, dipping method, or the like can be used alone or in combination.

不織布基材１２には、その内部に研磨砥粒１８が分散・混入された状態で合成樹脂系接着剤２０により固着されている。研磨砥粒１８としては、一般的に研磨砥粒として使用されるものであればよく、例えばシリコンカーバイド、酸化アルミニウム、シリカ、酸化クロム、酸化セリウム、合成ダイアモンド、ＣＢＮ（立方晶窒化ホウ素）、ざくろ石などが使用できる。研磨砥粒１８の粒径は、不織布基材１２に塗布加工できる範囲のものであればよく、研磨用途に応じて適宜な粒径の研磨砥粒が選択されればよい。   The nonwoven fabric base 12 is fixed by a synthetic resin adhesive 20 with abrasive grains 18 dispersed and mixed therein. The polishing abrasive grains 18 may be those generally used as polishing abrasive grains. For example, silicon carbide, aluminum oxide, silica, chromium oxide, cerium oxide, synthetic diamond, CBN (cubic boron nitride), pomegranate Stones can be used. The grain size of the abrasive grains 18 may be in a range that can be applied to the nonwoven fabric substrate 12, and abrasive grains having an appropriate grain size may be selected according to the polishing application.

合成樹脂系接着剤２０としては、フェノール樹脂、エポキシ樹脂、ウレタン樹脂等の合成樹脂系接着剤が使用できるが、研磨砥粒１８が研磨性能を十分発揮できる点で、フェノール樹脂単独、エポキシ樹脂単独、あるいはフェノール樹脂とエポキシ樹脂とを混合したものを用いるのが好ましい。合成樹脂系接着剤２０は、研磨砥粒１８が分散・混入された状態で不織布基材１２に塗布されるが、塗布には、浸漬法、あるいは浸漬法とスプレー法とが併用して行われる。   As the synthetic resin adhesive 20, a synthetic resin adhesive such as a phenol resin, an epoxy resin, or a urethane resin can be used. However, the phenol resin alone or the epoxy resin alone is used because the abrasive grains 18 can sufficiently exhibit the polishing performance. Alternatively, it is preferable to use a mixture of a phenol resin and an epoxy resin. The synthetic resin adhesive 20 is applied to the nonwoven fabric substrate 12 in a state where the abrasive grains 18 are dispersed and mixed. The application is performed by an immersion method or a combination of an immersion method and a spray method. .

本発明にかかる不織布研磨材１０は、上述した構成により、プリント配線板などのような小さい貫通穴を備えた被研磨物を研磨した場合でも、不織布研磨材から生ずる消耗クズが少なく、また消耗クズの大きさが小さいため被研磨物の貫通穴に穴づまりを生じさせることが少ない。   The non-woven fabric abrasive 10 according to the present invention has the above-described configuration, and even when an object to be polished having a small through hole such as a printed wiring board is polished, there is little consumable debris generated from the non-woven fabric abrasive. Because of the small size, there is little occurrence of clogging in the through-holes of the object to be polished.

図３は、本発明にかかる研磨ロールの一実施の形態を示す一部を拡大した斜視図解図である。研磨ロール５０は、矩形状の不織布研磨材１０を複数枚並置し、並置した方向に圧縮固定化し、圧縮固定した不織布研磨材１０ａを円筒状の芯材５２に巻き付け、巻き付けの際圧縮固定化された不織布研磨材１０ａに合成樹脂を含浸し、さらに不織布研磨材１０を固定化し一体化することにより形成された研磨ロールである。なお、不織布研磨材１０は、使用用途に応じ、適宜枚数を変えて使用される。   FIG. 3 is a partially enlarged perspective view illustrating an embodiment of the polishing roll according to the present invention. The polishing roll 50 includes a plurality of rectangular nonwoven fabric abrasives 10 juxtaposed, compression-fixed in the juxtaposed direction, the compressed nonwoven fabric 10a is wound around a cylindrical core member 52, and is compressed and fixed during winding. This is a polishing roll formed by impregnating the nonwoven fabric abrasive material 10a with a synthetic resin, and further fixing and integrating the nonwoven fabric abrasive material 10. In addition, the nonwoven fabric abrasive | polishing material 10 changes and uses a suitable number according to a use application.

芯材５２には、フェノール樹脂などの硬質樹脂を用いて円筒状に形成されたものが使用される。   The core material 52 is formed in a cylindrical shape using a hard resin such as a phenol resin.

不織布研磨材１０同士を接着する合成樹脂としては、フェノール樹脂、エポキシ樹脂、ウレタン樹脂、発泡ウレタン樹脂等が使用できるが、フェノール樹脂及びエポキシ樹脂より弾力性に富み研磨ロール５０の被研磨物への追従性が良いことから、ウレタン樹脂が使用し、より望ましくは発泡ウレタン樹脂を用いるのが好ましい。尚、発泡ウレタン樹脂以外の樹脂でも前記に記載した発泡ウレタン樹脂の特性と同様な特性が発揮される樹脂も同様に使用できる。   As the synthetic resin for bonding the nonwoven fabric abrasives 10 to each other, a phenol resin, an epoxy resin, a urethane resin, a foamed urethane resin, or the like can be used. Since followability is good, it is preferable to use a urethane resin, and more preferably to use a foamed urethane resin. In addition, a resin other than the foamed urethane resin that exhibits the same characteristics as the foamed urethane resin described above can be used as well.

本発明にかかる研磨ロール５０では、不織布研磨材１０が奏する効果に併せて、研磨時に新しい研磨層が出てきて研磨性能が持続し、スクラッチが少なく均一かつ一定粗さの研磨することができ、さらに、被研磨物の削りカスによる目詰まりが少なく、発生する研磨熱を逃がす効果を備えていることから、プリント配線板等の小さい貫通穴が設けられている被研磨物を効率的に研磨行うことができる。   In the polishing roll 50 according to the present invention, in addition to the effect that the nonwoven fabric abrasive 10 exhibits, a new polishing layer comes out at the time of polishing, the polishing performance is sustained, the scratch can be polished uniformly and with a constant roughness, In addition, since there is little clogging due to shavings of the object to be polished and the effect of releasing the generated polishing heat is provided, the object to be polished with small through holes such as a printed wiring board is efficiently polished. be able to.

本発明にかかる研磨ロールの製造方法は、段落０００７〜段落００１１に記載された不織布研磨材１０を図４（ａ）に示すように矩形状に裁断して複数枚並置し、図４（ｂ）に示すように並置方向に９５〜２０％圧縮固定化（圧縮前の寸法を１００％として）し、図４（ｃ）に示すように圧縮固定化した不織布研磨材１０ａを円筒状の芯材５２に巻き付けて、その際合成樹脂を含浸させる。具体的には、上述の実施の形態に用いたウレタン樹脂などの合成樹脂が均一に浸透するまで含浸する。含浸作業は、矩形状に裁断された不織布研磨材１０を圧縮固定化した後又は圧縮固定化された不織布研磨材１０を芯材５２に巻きつけた後、どちらで行ってもよい。含浸方法としては不織布研磨材１０を圧縮固定化させた状態、又は芯材５２に不織布研磨材１０を巻きつけた状態で樹脂溶液に浸漬又は前記被含浸物の上部から樹脂溶液を落としていく作業が挙げられる。本作業は圧縮固定化された不織布研磨材に均一に樹脂が含浸すればよく前述した作業手順又は作業方法以外でも当該作業の目的である前記被含浸物に均一に樹脂が含浸すれば前述した以外の作業手順又は作業方法を適用することができる。さらに合成樹脂が含浸された不織布研磨材１０は、常温〜６０℃で３〜２４時間放置して固定化し一体化することにより形成される。このような手順で製造すれば不織布研磨材１０が芯材５２の外周に密度ムラが少なく固定化一体化することが可能で被研磨物の研磨ムラが解消され、さらに前記に記載した不織布研磨材１０に浸透させた合成樹脂が（具体的には上述の実施の形態で用いた発泡ウレタン樹脂など）、不織布研磨材に均一に浸透することで、被研磨物の追従性が向上し本発明の不織布研磨材１０を用いた研磨ロールの効果をより引き出すことが可能である。   As shown in FIG. 4 (a), the abrasive roll manufacturing method according to the present invention is cut into a rectangular shape as shown in FIG. As shown in FIG. 4, 95 to 20% compression-fixed in the juxtaposition direction (with the dimension before compression being 100%), and the non-woven abrasive 10 a compressed and fixed as shown in FIG. And then impregnated with a synthetic resin. Specifically, the impregnation is performed until the synthetic resin such as the urethane resin used in the above-described embodiment penetrates uniformly. The impregnation operation may be performed either after compressing and fixing the nonwoven fabric abrasive material 10 cut into a rectangular shape or winding the compressed and fixed nonwoven fabric abrasive material 10 around the core material 52. As the impregnation method, the nonwoven fabric abrasive 10 is compressed and fixed, or the nonwoven fabric abrasive 10 is wound around the core 52 and immersed in the resin solution or the resin solution is dropped from above the impregnated material. Is mentioned. In this operation, it is only necessary to uniformly impregnate the non-woven abrasive material that has been compression-fixed, and if the resin to be impregnated uniformly is impregnated with the resin to be impregnated, which is the purpose of the operation other than the above-described operation procedure or operation method, The work procedure or work method can be applied. Furthermore, the nonwoven fabric abrasive material 10 impregnated with the synthetic resin is formed by leaving it at room temperature to 60 ° C. for 3 to 24 hours to fix and integrate. If manufactured by such a procedure, the nonwoven fabric abrasive 10 can be fixed and integrated on the outer periphery of the core material 52 with little density unevenness, and the polishing unevenness of the object to be polished can be eliminated. 10 (specifically, the urethane foam resin used in the above-described embodiment, etc.) penetrates into the nonwoven fabric abrasive material, so that the followability of the object to be polished is improved. The effect of the polishing roll using the nonwoven fabric abrasive 10 can be further extracted.

なお、本発明にかかる研磨ロールは、上述の作製方法に限らず、その他の作製方法により作製されてもよい。例えば、図５に示すように、ドーナッツ状に裁断した複数枚の不織布研磨材１０を芯材５２に刺し通して、芯材５２の軸方向に９５〜２０％圧縮固定化（圧縮前の寸法を１００％として）しロール状に形成する。その際合成樹脂を含浸させる。具体的には上述の実施の形態に用いたウレタン樹脂などの合成樹脂が均一に浸透するまで含浸する。含浸作業は、ドーナッツ状に裁断した複数枚の不織布研磨材１０を芯材５２に刺し通した後、又は軸方向に９５〜２０％圧縮固定化（圧縮前の寸法を１００％として）しロール状に形成する後、どちらで行ってもよい。含浸方法としてはドーナッツ状に裁断した複数枚の不織布研磨材１０を５２に刺し通した状態で又は芯材５２の軸方向に９５〜２０％圧縮固定化状態で樹脂溶液に浸漬又は前記被含浸物の上部から樹脂溶液を落としていく作業が挙げられる。本作業は圧縮固定化された不織布研磨材に均一に樹脂が含浸すればよく前記で挙げた作業手順又は作業方法以外でも当該作業の目的である前記被含浸物に均一に樹脂が含浸すれば前記で挙げた以外の作業手順又は作業方法を適用することができる。さらに前記不織布研磨材を常温〜６０℃で３〜２４時間放置して固定化し一体化することにより形成される。また別の具体例としては、長尺状の不織布研磨材を芯材５２外周面上に巻きつけ、９５〜２０％圧縮固定化（圧縮前の寸法を１００％として）しロール状に形成する。その際合成樹脂、具体的な実施形態１例としてウレタン樹脂に、当該樹脂が均一に浸透するまで含浸する。含浸作業は、長尺状の不織布研磨材を芯材５２外周面上に巻きつけた後又は９５〜２０％圧縮固定化（圧縮前の寸法を１００％として）しロール状に形成した後どちらで行ってもよい。含浸方法としては含浸作業は、長尺状の不織布研磨材を芯材５２外周面上に巻きつけた状態又は９５〜２０％圧縮固定化（圧縮前の寸法を１００％として）しロール状に形成した状態で樹脂溶液に浸漬又は前記被含浸物の上部から樹脂溶液を落としていく作業が挙げられる。本作業は圧縮固定化された不織布研磨材に均一に樹脂が含浸すればよく前記で挙げた作業手順又は作業方法以外でも当該作業の目的である前記被含浸物に均一に樹脂が含浸すれば前記で挙げた以外の作業手順又は作業方法を適用することができる。   The polishing roll according to the present invention is not limited to the above-described manufacturing method, and may be manufactured by other manufacturing methods. For example, as shown in FIG. 5, a plurality of nonwoven fabric abrasives 10 cut into a donut shape are pierced through the core material 52 and 95 to 20% compressed and fixed in the axial direction of the core material 52 (the dimensions before compression are reduced). 100%) to form a roll. At that time, a synthetic resin is impregnated. Specifically, the impregnation is performed until the synthetic resin such as the urethane resin used in the above-described embodiment penetrates uniformly. In the impregnation operation, a plurality of nonwoven fabric abrasives 10 cut into a donut shape are pierced through the core material 52, or are compressed and fixed 95 to 20% in the axial direction (the dimension before compression is 100%) and rolled. After forming, it may be done either way. As the impregnation method, a plurality of nonwoven fabric abrasives 10 cut into donuts are immersed in a resin solution in a state where they are pierced in 52 or 95 to 20% compressed and fixed in the axial direction of the core material 52 or the impregnated material. The operation of dropping the resin solution from the top of the can be mentioned. In this operation, it is only necessary to uniformly impregnate the non-woven abrasive material that has been compression-fixed, and if the resin to be impregnated uniformly is impregnated with the object to be impregnated other than the operation procedure or operation method mentioned above, It is possible to apply work procedures or work methods other than those mentioned above. Furthermore, the nonwoven fabric abrasive is formed by leaving it at room temperature to 60 ° C. for 3 to 24 hours to fix and integrate. As another specific example, a long non-woven fabric abrasive is wound around the outer peripheral surface of the core material 52 and is compressed and fixed by 95 to 20% (the dimension before compression is 100%) to form a roll. At that time, a synthetic resin, specifically, a urethane resin as one specific embodiment is impregnated until the resin uniformly penetrates. The impregnation operation is performed after winding a long nonwoven fabric abrasive on the outer peripheral surface of the core material 52 or after compressing and fixing 95 to 20% (the dimension before compression is 100%) to form a roll. You may go. As the impregnation method, the impregnation operation is performed by winding a long nonwoven fabric abrasive on the outer peripheral surface of the core material 52 or compressing and fixing 95 to 20% (with the dimension before compression being 100%) to form a roll. The operation | work which drops the resin solution from the upper part of the said to-be-impregnated material is immersed in the resin solution in the state made. In this operation, it is only necessary to uniformly impregnate the non-woven abrasive material that has been compression-fixed, and if the resin to be impregnated uniformly is impregnated with the object to be impregnated other than the operation procedure or operation method mentioned above, It is possible to apply work procedures or work methods other than those mentioned above.

さらに前記不織布研磨材を常温〜６０℃で３〜２４時間放置して固定化し一体化することにより形成される（図６参照）。   Further, the nonwoven fabric abrasive is formed by leaving it at room temperature to 60 ° C. for 3 to 24 hours to fix and integrate (see FIG. 6).

単糸繊度６．６ｄｔｅｘ（太さ２７μｍ）のナイロン６繊維を５０重量％、単糸繊度３．３ｄｔｅｘ（太さ１９μｍ）のナイロン６繊維を５０重量％の割合で配合し、繊維目付量１１５ｇ／ｍ2のクロスウェブを作製した。このクロスウェブにバインダ樹脂としてＳＢＲ樹脂をスプレー法により両面より噴霧・付着させた。なお、このときＳＢＲ樹脂は、乾燥固形分３０ｇ／ｍ2となるように噴霧行った。その後このクロスウェブに乾燥処理を施し不織布基材１２を作製した。次に、不織布基材１２に、合成樹脂系接着剤２０であるフェノール樹脂と、研磨砥粒１８である＃７００のシリコンカーバイドとを固形比１００／２３０に調整したスラリーを乾燥固形分が２７５ｇ／ｍ2で付着するように浸漬させ不織布研磨材１０を得た。続いて、この不織布研磨材１０を４０×６４０ｍｍの矩形状に裁断したものを１６５枚用いて２４％圧縮し固定化し、圧縮固定化した不織布研磨材１０ａを合成樹脂である発泡ウレタン樹脂に含浸し、芯材５２外周面上に巻きつけて、常温にて１２時間放置することにより不織布研磨材１０同士を固定化し一体化させて、１５０×６１０×７６．２ｍｍの研磨ロール５０を作製した。
（比較例１）
単糸繊度１６ｄｔｅｘ（太さ４２μｍ）のナイロン６繊維を用いて繊維目付量１１５ｇ／ｍ2の繊維集合体（ランダムウェブ）に、ＳＢＲ樹脂をスプレー法にて、両面合わせて乾燥固形分３０ｇ／ｍ2を塗布し、不織布基材１２を作製した。次に、この不織布基材に、フェノール樹脂と研磨砥粒（シリコンカーバイド、＃７００）とを固形比１００／２３０に調整したスラリーを乾燥固形分２７５ｇ／ｍ2付着させ不織布研磨材を得た。 50% by weight of nylon 6 fiber having a single yarn fineness of 6.6 dtex (thickness 27 μm) and 50% by weight of nylon 6 fiber having a single yarn fineness of 3.3 dtex (thickness 19 μm) are blended at a fiber basis weight of 115 g / An m 2 crossweb was prepared. An SBR resin as a binder resin was sprayed and adhered to the cross web from both sides by a spray method. At this time, the SBR resin was sprayed so as to have a dry solid content of 30 g / m 2 . Thereafter, this cloth web was subjected to a drying treatment to produce a nonwoven fabric substrate 12. Next, a slurry in which a phenol resin that is the synthetic resin adhesive 20 and # 700 silicon carbide that is the abrasive grains 18 is adjusted to a solid ratio of 100/230 on the nonwoven fabric substrate 12 has a dry solid content of 275 g / The nonwoven fabric abrasive 10 was obtained by dipping so as to adhere at m 2 . Subsequently, 165 sheets of this non-woven abrasive material 10 cut into a 40 × 640 mm rectangular shape were compressed and fixed by 24%, and the non-woven abrasive material 10a compressed and fixed was impregnated with a foamed urethane resin which is a synthetic resin. The nonwoven fabric abrasives 10 were fixed and integrated with each other by winding them around the outer peripheral surface of the core material 52 and leaving them at room temperature for 12 hours, thereby producing a 150 × 610 × 76.2 mm polishing roll 50.
(Comparative Example 1)
Nylon 6 with fiber fiber basis weight 115 g / m 2 of fiber assembly having a single fiber fineness of 16 dtex (thickness 42 .mu.m) (random webs), the SBR resin by spraying both sides combined dry solids 30 g / m 2 was applied to prepare a nonwoven fabric substrate 12. Next, a slurry in which phenol resin and abrasive grains (silicon carbide, # 700) were adjusted to a solid ratio of 100/230 was adhered to the nonwoven fabric base material to a dry solid content of 275 g / m 2 to obtain a nonwoven fabric abrasive.

この不織布研磨材１０を４０×６４０ｍｍの矩形状に裁断したものを１３６枚用いて２６％圧縮し固定化し芯材５２外周面上に接着剤を塗布し、そこに前記圧縮固定化された不織布研磨材５３を放射線状に配置し、１５０×６１０×７６．２ｍｍの研磨ロール５０を作製した。     This nonwoven fabric abrasive material 10 cut into a 40 × 640 mm rectangular shape is 136% compressed and fixed using 136 sheets, an adhesive is applied onto the outer peripheral surface of the core material 52, and the compression-fixed nonwoven fabric polishing is applied thereto. The material 53 was arrange | positioned radially and the grinding | polishing roll 50 of 150x610x76.2mm was produced.

実施例１および比較例１を用いて、下記条件によりプリント配線板の研磨を行い、それぞれから発生する消耗カスの粒径分布測定とプリント配線板に生じた穴づまりの確認を行った。   Using Example 1 and Comparative Example 1, the printed wiring board was polished under the following conditions, and the particle size distribution measurement of consumable debris generated from each was confirmed and the hole clogging generated in the printed wiring board was confirmed.

＜研磨条件＞
被研磨物１：穴あき銅箔基板：幅４１０×奥行５１０×板厚０．８ｍｍ、スルーホール：φ０．３の貫通穴が２１３１６穴
被研磨物２：穴あき銅箔基板：幅４１０×奥行５１０×板厚０．８ｍｍ、スルーホール：φ０．２５の貫通穴が２１３１６穴
研磨機：平面研磨機
研磨ホイール回転数：１８００ｒｐｍ
送り量：２ｍ／ｍｉｎ
オシュレーション：４７０ｃｐｍ
消耗カスの採取するため、被研磨物１の一端部から反対側の他端部まで通過させる動作を１パスとして、１８１パス目から２００パス目の間、消耗カスを保留粒子平均２０μｍのクーラントフィルタにて採取した。採取した消耗カスを各目開きのふるいにかけ、各ふるいに残留した消耗カスの重量を測定した。計測結果を表１に示す。また、消耗カスによるスルーホールの穴づまりを確認するために、上述の条件と同一条件により研磨ロールを１パスさせた後、目視により穴づまりを確認した。表２に穴づまりの結果を示す。 <Polishing conditions>
Workpiece 1: Perforated copper foil substrate: width 410 × depth 510 × plate thickness 0.8 mm, through hole: 210.3 through-hole of φ0.3 Workpiece 2: perforated copper foil substrate: width 410 × depth 510 × plate thickness 0.8 mm, through hole: φ0.25 through hole is 21316 hole Polishing machine: plane polishing machine polishing wheel rotation speed: 1800 rpm
Feed rate: 2m / min
Oscillation: 470 cpm
In order to collect consumable debris, the operation of passing from one end of the object to be polished 1 to the other end on the opposite side is taken as one pass, and the condensate debris is retained at an average particle size of 20 μm during the 181st to 200th passes. It was collected at. The collected consumable residue was passed through each sieve and the weight of the consumable residue remaining on each sieve was measured. Table 1 shows the measurement results. Further, in order to confirm the clogging of the through hole due to the consumable debris, the clogging of the hole was confirmed visually after passing the polishing roll for one pass under the same condition as described above. Table 2 shows the result of hole clogging.

Figure 2007313621
Figure 2007313621

Figure 2007313621
表１の値を見て明らかなように、消耗カス採取重量は比較例１と比べて実施例は約１／３に減少している。さらに比較例１では、採取した消耗カスの残留重量のふるい目開きのピークが２１２μｍにあるのに対し、実施例１では、１２５μｍ付近にピークがある。このことから、実施例１では、従来の研磨ロールより消耗カスの大きさが小さくなっていることが確認できた。また、表２から明らかなように、穴づまり箇所が、被研磨物１、被研磨物２両方において、比較例１と比べ５０％以上の減少されているのを確認することができた。
Figure 2007313621
 As is apparent from the values in Table 1, the amount of collected consumable waste is reduced to about 1/3 in the example compared to Comparative Example 1. Further, in Comparative Example 1, the peak of the sieve opening of the residual weight of the collected consumable residue is 212 μm, whereas in Example 1, there is a peak near 125 μm. From this, it was confirmed in Example 1 that the size of the consumable residue was smaller than that of the conventional polishing roll. Further, as is apparent from Table 2, it was confirmed that the hole clogging locations were reduced by 50% or more in both the object to be polished 1 and the object to be polished 2 as compared with Comparative Example 1.

本発明の研磨ロールは、プリント配線板のスルーホールのような小さな穴があいている被研磨物を研磨する時に不織布研磨材及び研磨ロールから発生する消耗カスが抑制され、穴づまりが減少することにより、歩留り収率を向上させることが期待出来る。   The polishing roll of the present invention suppresses consumable debris generated from the nonwoven fabric abrasive and the polishing roll when polishing an object to be polished having a small hole such as a through hole of a printed wiring board, thereby reducing hole clogging. It can be expected to improve the yield.

本発明に使用される不織布研磨材の一実施の形態を示す斜視図解図である。It is a perspective view solution figure which shows one Embodiment of the nonwoven fabric abrasive | polishing material used for this invention. 図１に示す不織布研磨材の一部を拡大した拡大図解図である。FIG. 2 is an enlarged illustrative view in which a part of the nonwoven fabric abrasive shown in FIG. 1 is enlarged. 本発明にかかる研磨ロールの一実施の形態を示す一部を拡大した斜視図解図である。It is the perspective view solution figure which expanded a part which shows one Embodiment of the grinding | polishing roll concerning this invention. 本発明にかかる研磨ロールの製造手順を示した図解図であって、（ａ）は、矩形状の不織布研磨材を並置した状態を示し、（ｂ）は、並置した不織布研磨材を並置方向に圧縮する状態を示し。（ｃ）は、圧縮固定化した不織布研磨材を芯材に巻き付ける状態を示した図である。It is the illustration which showed the manufacturing procedure of the polishing roll concerning this invention, Comprising: (a) shows the state which juxtaposed the rectangular nonwoven fabric abrasive material, (b) shows the juxtaposed nonwoven fabric abrasive material in juxtaposition direction. Indicates the state to be compressed. (C) is the figure which showed the state which winds the nonwoven fabric abrasive material fixed by compression around a core material. 本発明にかかる研磨ロールの別の実施形態を示す図解図である。It is an illustration figure which shows another embodiment of the grinding | polishing roll concerning this invention. 本発明にかかる研磨ロールのさらに別の実施形態を示す図解図である。It is an illustration figure which shows another embodiment of the grinding | polishing roll concerning this invention.

符号の説明Explanation of symbols

１０ 不織布研磨材
１０ａ 圧縮固定化された不織布研磨材
１２ 不織布基材
１４ 合成繊維
１６ バインダ樹脂
１８ 研磨砥粒
２０ 合成樹脂系接着剤
５０ 研磨ロール
５２ 芯材


DESCRIPTION OF SYMBOLS 10 Nonwoven fabric abrasive 10a Nonwoven fabric abrasive compressed and fixed 12 Nonwoven fabric substrate 14 Synthetic fiber 16 Binder resin 18 Abrasive grain 20 Synthetic resin adhesive 50 Polishing roll 52 Core material


Claims (9)

合成繊維を三次元的に交絡させて前記合成繊維同士の交絡点をバインダ樹脂により接着してなる不織布基材に研磨砥粒を分散・混入して合成樹脂系接着剤を用いて固着させた不織布研磨材を用いた研磨ロールであって、
前記合成繊維の繊維径が、５μｍ〜３６μｍである不織布研磨材を用いた研磨ロール。 Non-woven fabric in which synthetic fibers are entangled three-dimensionally, and abrasive grains are dispersed and mixed into a non-woven fabric substrate formed by bonding the entanglement points of the synthetic fibers with a binder resin, and fixed using a synthetic resin adhesive A polishing roll using an abrasive,
A polishing roll using a nonwoven fabric abrasive in which the synthetic fiber has a fiber diameter of 5 μm to 36 μm. 前記不織布研磨材は矩形状であり、前記不織布研磨材を複数枚並置し、並置した方向に圧縮固定化し、円筒状の芯材に巻き付け、その際前記圧縮固定化された不織布研磨材に合成樹脂を含浸し、さらに前記不織布研磨材を固定化し一体化することにより形成された請求項１記載の研磨ロール。   The non-woven fabric abrasive is rectangular, and a plurality of the non-woven fabric abrasives are juxtaposed, compression-fixed in the juxtaposed direction, and wound around a cylindrical core material. The polishing roll according to claim 1, wherein the polishing roll is formed by impregnating and further fixing and fixing the nonwoven fabric abrasive. 並置方向への圧縮を９５〜２０％の割合で行い、前記合成樹脂を含浸した前記不織布研磨材を常温〜６０℃で３〜２４時間放置することにより固定化し一体化する、請求項２記載の研磨ロールの製造方法。   The compression in the juxtaposition direction is performed at a ratio of 95 to 20%, and the nonwoven fabric abrasive material impregnated with the synthetic resin is fixed and integrated by leaving at room temperature to 60 ° C for 3 to 24 hours. A method for producing a polishing roll. 前記不織布研磨材はドーナツ状であり、前記不織布研磨材を複数枚芯材に刺し通し、芯材の軸方向に圧縮固定化し、その際前記不織布研磨材に合成樹脂を含浸し、さらに前記不織布研磨材を固定化し一体化することにより形成された請求項１記載の研磨ロール。 The nonwoven fabric abrasive is doughnut-shaped, and the nonwoven fabric abrasive is pierced into a plurality of core materials and compressed and fixed in the axial direction of the core material. At that time, the nonwoven fabric abrasive is impregnated with a synthetic resin, and the nonwoven fabric polishing is further performed. The polishing roll according to claim 1, which is formed by fixing and integrating the materials. 芯材の軸方向への圧縮は９５〜２０％の割合で行い、前記合成樹脂を含浸しした不織布研磨材を常温〜６０℃で３〜２４時間放置することにより固定化し一体化する、請求項４記載の研磨ロールの製造方法。 Compression of the core material in the axial direction is performed at a ratio of 95 to 20%, and the nonwoven fabric abrasive material impregnated with the synthetic resin is fixed and integrated by leaving it at room temperature to 60 ° C for 3 to 24 hours. 4. A method for producing a polishing roll according to 4. 前記不織布研磨材は長尺状であり、前記不織布研磨材を芯材に巻きつけ、円筒状の芯材に圧縮固定化し、その際前記不織布研磨材に合成樹脂を含浸し、さらに前記不織布研磨材を固定化し一体化することにより形成された請求項１記載の研磨ロール。   The nonwoven fabric abrasive is elongated, and the nonwoven fabric abrasive is wound around a core material and compressed and fixed to a cylindrical core material. At that time, the nonwoven fabric abrasive material is impregnated with a synthetic resin, and further the nonwoven fabric abrasive material The polishing roll according to claim 1, wherein the polishing roll is formed by fixing and integrating. 前記圧縮は９５〜２０％の割合で行い、前記合成樹脂を含浸した不織布研磨材を常温〜６０℃で３〜２４時間放置することにより固定化し一体化する、請求項６記載の研磨ロールの製造方法。   The polishing roll according to claim 6, wherein the compression is performed at a ratio of 95 to 20%, and the nonwoven fabric impregnated with the synthetic resin is fixed and integrated by standing at room temperature to 60 ° C for 3 to 24 hours. Method. 前記合成樹脂は、ウレタン樹脂又は発泡ウレタン樹脂である請求項１〜７のいずれかに記載の研磨ロール。   The polishing roll according to claim 1, wherein the synthetic resin is a urethane resin or a urethane foam resin. 前記合成樹脂系接着剤は、エポキシ樹脂、フェノール樹脂、あるいはエポキシ樹脂とフェノール樹脂とを混合したものである請求項１〜８のいずれかに記載の研磨ロール。

The polishing roll according to any one of claims 1 to 8, wherein the synthetic resin adhesive is an epoxy resin, a phenol resin, or a mixture of an epoxy resin and a phenol resin.

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