WO2007139097A1 - Polishing roll and method for manufacturing the polishing roll - Google Patents

Polishing roll and method for manufacturing the polishing roll Download PDF

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Publication number
WO2007139097A1
WO2007139097A1 PCT/JP2007/060880 JP2007060880W WO2007139097A1 WO 2007139097 A1 WO2007139097 A1 WO 2007139097A1 JP 2007060880 W JP2007060880 W JP 2007060880W WO 2007139097 A1 WO2007139097 A1 WO 2007139097A1
Authority
WO
WIPO (PCT)
Prior art keywords
nonwoven fabric
abrasive
polishing roll
resin
polishing
Prior art date
Application number
PCT/JP2007/060880
Other languages
French (fr)
Japanese (ja)
Inventor
Junichiro Yamamoto
Ryo Kawamoto
Yu Shimizu
Yutaka Seto
Original Assignee
Kure Grinding Wheel Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kure Grinding Wheel Co., Ltd. filed Critical Kure Grinding Wheel Co., Ltd.
Priority to CN2007800199973A priority Critical patent/CN101454123B/en
Publication of WO2007139097A1 publication Critical patent/WO2007139097A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/02—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/02—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery
    • B24D13/12—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by their periphery comprising assemblies of felted or spongy material, e.g. felt, steel wool, foamed latex
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/26—Cleaning or polishing of the conductive pattern

Definitions

  • the present invention relates to a polishing roll using a nonwoven fabric abrasive and a method for producing the same, which is optimal for polishing an object to be polished having small through holes or non-through holes, such as a printed wiring board.
  • the present invention relates to a roll and a manufacturing method thereof.
  • a polishing roll such as that disclosed in Patent Document 1 has been used for polishing printed wiring boards, plate-like metal materials such as copper and aluminum.
  • These polishing rolls are made by arranging a large number of rectangular non-woven fabric abrasives, which are made of nylon non-woven fabric with abrasive particles fixed on the outer peripheral surface of a cylindrical core material, and integrating them using an adhesive.
  • a plurality of non-woven abrasives cut into a donut shape are pierced through a cylindrical core and integrated in a compressed state in the axial direction of the core, or a long non-woven abrasive is used as the core It is made by winding it on the outer peripheral surface and integrating it with a binder resin.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2003-175471
  • the present invention has been invented in view of the above problems, and is a printer provided with a through hole. It is an object of the present invention to reduce consumable debris generated when polishing an object to be polished that has small through holes or non-through holes such as a wiring board, and to reduce hole clogging due to consumable debris.
  • Abrasive grains are dispersed and mixed into a non-woven fabric substrate that is obtained by three-dimensionally entanglement of synthetic fibers and bonding the entanglement points of the synthetic fibers with a binder resin, and are fixed using a synthetic resin adhesive.
  • the non-woven fabric abrasive is rectangular, and a plurality of non-woven fabric abrasives are juxtaposed, compressed and fixed in the juxtaposed direction, wound around a cylindrical core material, and then the non-woven fabric abrasives compressed and fixed at that time are made of synthetic resin. Formed by impregnating and further fixing and integrating the nonwoven fabric abrasive
  • Compression in the juxtaposition direction is carried out at a rate of 95-20%, and the non-woven abrasive material impregnated with synthetic resin is allowed to stand for 3-24 hours at room temperature to 60 ° C, and then fixed and integrated (2 ) Manufacturing method of the polishing roll.
  • the nonwoven fabric abrasive material is doughnut-shaped, and the nonwoven fabric abrasive material is pierced into the core material and compressed and fixed in the axial direction of the core material. At that time, the nonwoven fabric abrasive material is impregnated with synthetic resin, and the nonwoven fabric abrasive material is fixed.
  • the core is compressed in the axial direction at a rate of 95 to 20%, and the nonwoven fabric impregnated with synthetic resin is fixed for 3 to 24 hours at room temperature to 60 ° C.
  • the nonwoven fabric abrasive is long, and the nonwoven fabric abrasive is applied to the core material to form a cylindrical core material.
  • the polishing roll according to (1) which is formed by compressing and fixing, impregnating a non-woven fabric abrasive with a synthetic resin, and fixing and integrating the non-woven fabric abrasive.
  • the compression is performed at a rate of 95 to 20%, and the nonwoven fabric abrasive material impregnated with the synthetic resin is fixed and integrated by leaving it at room temperature to 60 ° C for 3 to 24 hours. How to make a roll.
  • polishing roll according to any one of (1) to (7), wherein the synthetic resin is urethane resin or urethane foam resin.
  • the synthetic resin adhesive is an abrasive roll according to any one of (1) to (8), wherein the epoxy resin, phenol resin, or a mixture of epoxy resin and phenol resin.
  • the polishing roll according to the present invention generates less consumable debris even when an object to be polished having a small through hole or non-through hole is polished, such as a printed wiring board. As a result, the yield in the polishing process of the workpiece having holes is improved.
  • FIG. 1 is a perspective view showing an embodiment of a nonwoven fabric abrasive used in the present invention.
  • FIG. 2 is an enlarged illustrative view showing a part of the nonwoven fabric abrasive shown in FIG.
  • FIG. 3 is a partially enlarged perspective view illustrating an embodiment of a polishing roll according to the present invention.
  • FIG. 4 is an illustrative view showing a production procedure of an abrasive roll according to the present invention, in which (a) shows a state in which rectangular nonwoven fabric abrasives are juxtaposed, and (b) shows a juxtaposed nonwoven fabric abrasive material.
  • (C) is a diagram showing a state in which a nonwoven fabric abrasive that has been compressed and fixed is wound around a core material.
  • FIG. 5 is an illustrative view showing another embodiment of a polishing roll according to the present invention.
  • FIG. 6 is an illustrative view showing still another embodiment of a polishing roll according to the present invention. Explanation of symbols
  • FIG. 1 is a perspective view showing an embodiment of the nonwoven fabric abrasive used in the present invention
  • FIG. 2 is an enlarged view of a part of the nonwoven fabric abrasive shown in FIG.
  • the nonwoven fabric abrasive 10 includes a nonwoven fabric substrate 12.
  • the nonwoven fabric substrate 12 is a nonwoven fabric in which synthetic fibers 14 are entangled three-dimensionally and the entanglement points between the synthetic fibers 14 are bonded by a binder resin 16.
  • the synthetic fiber 14 constituting the nonwoven fabric substrate 12 is not particularly limited as long as it is a synthetic fiber having a certain strength, but specifically, polyamide fiber, aramid fiber, polyester fiber, and vinylon fiber are used alone. These can be used in combination.
  • polyamide fibers and vinylon fibers in consideration of the adhesiveness due to the binder resin 16.
  • the synthetic fiber 14 one having a fiber diameter in the range of 5 ⁇ m to 36 ⁇ m can be used.
  • the desired fiber diameter is 5 111 to 30 111, and the more desirable fiber diameter is 5 ⁇ m to 27 ⁇ m.
  • a single fiber diameter may be used, or a combination of fibers having different fiber diameters may be used.
  • the nonwoven fabric substrate 12 is produced using a cross web, a random web, a spunbond method, and a papermaking method.
  • the cross-web and the random web that can give a thickness to the web from the point that clogging due to polishing scraps of the object to be polished is small, the heat dissipation is high, and the density control at the time of creating the polishing roll can be easily performed.
  • it is made.
  • Web In order to control the density of the web, apply a one-punch punch force to the web produced by these methods.
  • Noinda resin 16 SBR resin, NBR resin, acrylic ester, melamine resin, phenol resin, etc. can be used alone or in combination. Further, among these, it is preferable to use SBR resin or acrylate ester in that a nonwoven fabric substrate 12 having high flexibility can be produced.
  • a method for applying the binder resin 16 a known spraying method, dipping method, or the like can be used alone or in combination.
  • the nonwoven fabric base 12 is fixed with a synthetic resin adhesive 20 in a state where abrasive grains 18 are dispersed and mixed therein.
  • the abrasive grains 18 may be those generally used as abrasive grains, such as silicon carbide, acid aluminum, silica, acid chromium, cerium oxide, synthetic diamond, CBN (cubic nitriding). Boron), garnet, etc. can be used.
  • the grain size of the abrasive grains 18 is within a range that can be applied to the nonwoven fabric substrate 12, it is sufficient to select abrasive grains having an appropriate grain size according to the purpose of polishing!
  • synthetic resin adhesive 20 synthetic resin adhesives such as phenol resin, epoxy resin, urethane resin, etc. can be used, but in terms of the fact that the abrasive grains 18 can sufficiently exhibit the polishing performance, It is preferable to use a resin alone, an epoxy resin alone, or a mixture of phenol resin and epoxy resin.
  • the synthetic resin adhesive 20 is applied to the nonwoven fabric substrate 12 in a state where the abrasive grains 18 are dispersed and mixed.
  • the dipping method or the dipping method and the spray method are used in combination. Is called.
  • the nonwoven fabric abrasive 10 that is effective in the present invention has the above-described configuration, and even when a polished object having a small through hole such as a printed wiring board is polished, consumable debris generated from the nonwoven fabric abrasive is generated. In addition, since the size of the consumable waste is small, there is little clogging in the through hole of the workpiece.
  • FIG. 3 is a partially enlarged perspective view showing an embodiment of a polishing roll according to the present invention.
  • the polishing roll 50 has a plurality of rectangular nonwoven fabric abrasives 10 arranged side by side, compressed and fixed in the juxtaposed direction, and the nonwoven fabric abrasive material 10a compressed and fixed is wound around a cylindrical core material 52. It is a polishing roll formed by impregnating a synthetic resin into a non-woven fabric abrasive material 10a that has been compression-fixed, and further fixing and unifying the non-woven fabric abrasive material 10 together.
  • the nonwoven fabric abrasive 10 is used by changing the number of sheets as appropriate according to the intended use.
  • the core material 52 a material formed in a cylindrical shape using a hard resin such as phenol resin is used.
  • phenol resin, epoxy resin, urethane resin, foamed urethane resin, etc. can be used, but they are more elastic than phenol resin and epoxy resin. Since the followability of the polishing roll 50 to the object to be polished is good, it is preferable to use urethane resin, more preferably urethane foam resin. It should be noted that a resin that exhibits the same characteristics as those of the urethane foam resin described above can be used in the same manner even with a resin other than the foamed urethane resin.
  • polishing roll 50 that is effective in the present invention, in addition to the effect exhibited by the nonwoven fabric abrasive 10, a new polishing layer comes out at the time of polishing, the polishing performance is sustained, and there is little scratch and uniform and constant roughness. It is possible to polish, and the clogging due to scraping of the work piece is less clogged. It has the effect of releasing the generated heat of polishing, so the work to be polished is provided with small through holes such as printed circuit boards. An object can be efficiently polished.
  • the manufacturing method of the polishing roll according to the present invention includes cutting the nonwoven fabric abrasive material 10 described in paragraphs 0009 to 0013 into a rectangular shape as shown in FIG. 4 As shown in (b), 95 to 20% compression-fixed in the juxtaposition direction (assuming that the dimension before compression is 100%), and as shown in Fig. 4 (c), the non-woven abrasive 10a is compressed into a cylinder. It is wound around a core material 52 and impregnated with a synthetic resin. Specifically, it is impregnated until the synthetic resin such as urethane rosin used in the above-mentioned embodiment penetrates uniformly.
  • the impregnation operation may be performed either after compressing and fixing the nonwoven fabric abrasive material 10 cut into a rectangular shape or after pressing the nonwoven fabric abrasive material 10 compressed and fixed on the core material 52.
  • the impregnation method the nonwoven fabric abrasive 10 is compressed and fixed, or the nonwoven fabric abrasive 10 is rubbed on the core material 52 and immersed in the resin solution or dropped from the top of the impregnated material. The work to be done is mentioned.
  • the nonwoven fabric abrasive material 10 impregnated with synthetic resin can be released at room temperature to 60 ° C for 3 to 24 hours. It is formed by placing, fixing and integrating. If manufactured in such a procedure, the non-woven fabric abrasive 10 can be fixed and integrated with little density unevenness on the outer periphery of the core material 52, and the polishing unevenness of the object to be polished can be eliminated.
  • the synthetic resin that has penetrated into the non-woven fabric abrasive 10 (specifically, the urethane foam used in the above embodiment) uniformly penetrates into the non-woven fabric abrasive so that the object to be polished can follow.
  • the nonwoven fabric polishing material 10 of the present invention it is possible to improve the properties of the polishing roll using the nonwoven fabric polishing material 10 of the present invention.
  • the polishing roll according to the present invention is not limited to the above-described manufacturing method, and may be manufactured by other manufacturing methods.
  • a plurality of nonwoven fabric abrasives 10 cut into a dough shape are pierced through the core material 52 and compressed 95 to 20% in the axial direction of the core material 52 (size before compression) To 100%) to form a roll.
  • synthetic resin is impregnated. Specifically, it is impregnated until the synthetic resin such as urethane resin used in the above-mentioned embodiment penetrates uniformly.
  • the impregnation operation is performed by inserting a plurality of non-woven abrasive materials 10 cut into donuts into the core material 52, or compressing and fixing 95 to 20% in the axial direction (with the uncompressed dimensions as 100%) and rolled. After forming, it may be done either way.
  • a plurality of nonwoven fabric abrasives 10 cut into a donut shape are immersed in a resin solution in a state where they are pierced in 52 or 95 to 20% compressed and fixed in the axial direction of the core material 52. For example, the resin solution is dropped / spreaded from the top of the impregnated material.
  • the non-woven abrasive material compressed and fixed is uniformly impregnated with the resin, and the resin to be impregnated can be uniformly applied to the object to be impregnated other than the above-described work procedure or method. If impregnated, work procedures or work methods other than those mentioned above can be applied. Further, it is formed by leaving the nonwoven fabric abrasive at room temperature to 60 ° C. for 3 to 24 hours, and fixing and uniting. As another specific example, a long nonwoven fabric abrasive is rubbed onto the outer peripheral surface of the core material 52, and it is formed into a roll by 95 to 20% compression fixation (with the dimension before compression being 100%).
  • a synthetic resin which is one example of a specific embodiment, is impregnated with urethane resin until the resin uniformly penetrates.
  • the impregnation work can be performed after either a long non-woven fabric abrasive is applied on the outer peripheral surface of the core 52 or after it is formed into a roll by 95 to 20% compression fixation (size before compression is 100%). You may go on.
  • the impregnation operation is performed by winding a long non-woven cloth abrasive material on the outer peripheral surface of the core material 52 or compressing and fixing 95 to 20% (before compression) In this state, the resin is immersed in a resin solution in a state of being formed into a roll, or the resin solution is dropped from the top of the impregnated material. In this operation, it is sufficient that the non-woven abrasive material that has been compression-fixed is uniformly impregnated with the resin, and the object to be impregnated is uniformly impregnated with the resin other than the above-described work procedure or method. Then, work procedures or work methods other than those listed above can be applied.
  • the nonwoven fabric abrasive is formed by standing at room temperature to 60 ° C for 3 to 24 hours, and fixing and integrally bonding (see Fig. 6).
  • fineness 6. 6 dtex (thickness 27 mu m) nylon 6 fiber 50 weight 0/0, the proportion of 50 wt% nylon 6 fiber having a single fiber fineness 3. 3dte X (thickness 19 m) And a cross web having a basis weight of 115 gZ m 2 was prepared. SBR resin as a binder resin was sprayed and adhered from both sides by a spray method. At this time, the SBR resin was sprayed so as to have a dry solid content of 30 g / m 2 . Thereafter, the cloth web was subjected to a drying treatment to produce a nonwoven fabric substrate 12.
  • a non-woven fabric substrate 12 having a dry solid content of 275 gZm 2 is prepared by mixing a slurry of phenol resin, which is a synthetic resin adhesive 20, and # 700 silicon carbide, which is an abrasive barrel 18, with a solid ratio of 100 Z230.
  • the nonwoven fabric abrasive 10 was obtained by dipping so as to adhere.
  • 165 sheets of this nonwoven fabric abrasive material 10 cut into a 40 x 640 mm rectangle were compressed and fixed 24%, and the nonwoven fabric abrasive material 10a compressed and fixed was foamed urethane foam, which is a synthetic resin.
  • a polishing roll 50 was prepared.
  • This non-woven abrasive material 10 was cut into a 40 X 640 mm rectangular shape using 136 sheets 26 % Compressed and fixed core material 52 Adhesive is applied on the outer peripheral surface, and the non-woven fabric abrasive material 53 compressed and fixed is radially disposed thereon, and a 150 x 610 x 76.2 mm abrasive roll 50 was made.
  • Example 1 Using Example 1 and Comparative Example 1, the printed wiring board was polished under the following conditions, the particle size distribution measurement of consumable waste generated from each of them and the confirmation of hole clogging generated in the printed wiring board were performed. Confirmed.
  • Polishing machine Flat grinding machine Polishing wheel rotation speed: 18000rpm
  • the amount of collected consumable waste is reduced to about 1Z3 in the example compared to Comparative Example 1.
  • the peak of the residual weight of the collected consumable residue is about 212 m, whereas in Example 1, the peak is around 125 m. From this, it was confirmed that in Example 1, the size of the consumable residue was smaller than that of the conventional polishing roll. Further, as is clear from Table 2, it was confirmed that the hole clogging location was reduced by 50% or more in both the polished object 1 and the polished object 2 as compared with Comparative Example 1.
  • the polishing roll of the present invention reduces non-woven fabric abrasives and consumable debris generated by polishing roll force when polishing an object having a small hole such as a through hole of a printed wiring board, thereby reducing hole clogging. By doing so, it can be expected to improve the yield.

Abstract

This invention provides a polishing roll that can reduce the occurrence of consumption waste produced upon polishing of an object having a small throughhole such as a printed wiring board with a throughhole and can reduce clogging of the hole with consumption waste. The polishing roll (50) comprises a base material formed of an nonwoven fabric (12) formed by three-dimensionarily crossing synthetic fibers (14) having a fiber diameter of 10 µm to 36 µm and bonding cross points among the synthetic fibers (14) with a binder resin (16). The nonwoven fabric (12) is fixed with a synthetic resin-based adhesive (20) into which abrasive grains (18) have been dispersed and mixed. The nonwoven polishing material (10) is shaped into a rectangular form, for example, by cutting, is fixed by compressing, and is then integrally provided on the outer periphery surface of a core material (52) with a synthetic resin.

Description

明 細 書  Specification
研磨ロール及びその製造方法  Polishing roll and method for producing the same
技術分野  Technical field
[0001] 本発明は、不織布研磨材を用いた研磨ロール及びその製造方法であって、プリント 配線板などのように小さい貫通穴又は非貫通穴がある被研磨物を研磨するのに最適 な研磨ロール及びその製造方法に関する。  [0001] The present invention relates to a polishing roll using a nonwoven fabric abrasive and a method for producing the same, which is optimal for polishing an object to be polished having small through holes or non-through holes, such as a printed wiring board. The present invention relates to a roll and a manufacturing method thereof.
背景技術  Background art
[0002] 従来から、プリント配線板や銅、アルミニウム等の板状金属材料の研磨には、特許 文献 1に開示されて 、るような研磨ロールが用いられて 、る。これらの研磨ロールは、 ナイロン不織布に研磨砲粒を固着させた矩形状の不織布研磨材を、円筒状の芯材 の外周面上に多数枚放射線状に配置し接着剤を用いて一体化させたり、ドーナツ状 に裁断した不織布研磨材を円筒状の芯材に複数枚刺し通して、芯材の軸方向に圧 縮した状態で一体化させたり、あるいは、長尺状の不織布研磨材を芯材外周面上に 巻きつけてバインダ榭脂を用いて一体ィ匕させて作製されて 、る。これらの研磨ロール は、不織布研磨材が消耗するのに伴い次々と新しい研磨層が出てきて研磨性能が 持続する点と、オープンな三次元構造による柔軟性に起因して被研磨物表面へのな じみ性がよくスクラッチの少な 、均一かつ一定粗さの加工表面を得られる点と、また そのオープンな三次元構造に起因して、被研磨物の削りカスによる目詰まりが少なく 、発生する研磨熱を逃がす点力 多用されている。  Conventionally, a polishing roll such as that disclosed in Patent Document 1 has been used for polishing printed wiring boards, plate-like metal materials such as copper and aluminum. These polishing rolls are made by arranging a large number of rectangular non-woven fabric abrasives, which are made of nylon non-woven fabric with abrasive particles fixed on the outer peripheral surface of a cylindrical core material, and integrating them using an adhesive. A plurality of non-woven abrasives cut into a donut shape are pierced through a cylindrical core and integrated in a compressed state in the axial direction of the core, or a long non-woven abrasive is used as the core It is made by winding it on the outer peripheral surface and integrating it with a binder resin. With these abrasive rolls, new abrasive layers come out one after another as the non-woven abrasive is consumed, and the polishing performance is sustained. Polishing that occurs with less fouling due to shavings of the work piece due to the fact that it is possible to obtain a uniform and constant roughness processed surface with good compatibility and little scratches, and due to its open three-dimensional structure Point power to release heat is often used.
特許文献 1 :特開 2003— 175471号公報  Patent Document 1: Japanese Patent Application Laid-Open No. 2003-175471
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0003] し力しながら、これら従来の研磨ロールでは、プリント配線板などのように小さ 、貫 通穴が設けられている被研磨物を研磨したときに、研磨ロール力も発生した消耗カス が穴に詰まり、これがめっき不良ゃ通電不良を生じさせ歩留りを低下させる原因とな つている。 [0003] However, in these conventional polishing rolls, when a workpiece to be polished such as a printed wiring board that is small and provided with a through hole is polished, consumable debris that has generated a polishing roll force is generated in the hole. This leads to poor energization and poor yield when the plating is defective.
[0004] 本発明は、上記問題を鑑みて発明されたもので、スルーホールが設けられたプリン ト配線板のように、小さな貫通穴又は非貫通穴が設けられて ヽる被研磨物を研磨す るときに発生する消耗カスを減少し、消耗カスによる穴づまりを減少させることを課題 とする。 [0004] The present invention has been invented in view of the above problems, and is a printer provided with a through hole. It is an object of the present invention to reduce consumable debris generated when polishing an object to be polished that has small through holes or non-through holes such as a wiring board, and to reduce hole clogging due to consumable debris.
課題を解決するための手段 Means for solving the problem
(1) (1)
合成繊維を三次元的に交絡させて合成繊維同士の交絡点をバインダ榭脂により接 着してなる不織布基材に研磨砥粒を分散'混入して合成樹脂系接着剤を用いて固 着させた不織布研磨材を用いた研磨ロールであって、合成繊維の繊維径が、 5 m 〜36 μ mである不織布研磨材を用いた研磨ロール。  Abrasive grains are dispersed and mixed into a non-woven fabric substrate that is obtained by three-dimensionally entanglement of synthetic fibers and bonding the entanglement points of the synthetic fibers with a binder resin, and are fixed using a synthetic resin adhesive. A polishing roll using a non-woven fabric abrasive, wherein the synthetic fiber has a fiber diameter of 5 m to 36 μm.
(2) (2)
不織布研磨材は矩形状であり、不織布研磨材を複数枚並置し、並置した方向に圧 縮固定ィ匕し、円筒状の芯材に巻き付け、その際圧縮固定化された不織布研磨材に 合成樹脂を含浸し、さらに不織布研磨材を固定化し一体化することにより形成された The non-woven fabric abrasive is rectangular, and a plurality of non-woven fabric abrasives are juxtaposed, compressed and fixed in the juxtaposed direction, wound around a cylindrical core material, and then the non-woven fabric abrasives compressed and fixed at that time are made of synthetic resin. Formed by impregnating and further fixing and integrating the nonwoven fabric abrasive
(1)記載の研磨ロール。 (1) The polishing roll as described.
(3)  (3)
並置方向への圧縮を 95〜20%の割合で行 ヽ、合成樹脂を含浸した不織布研磨 材を常温〜 60°Cで 3〜24時間放置することにより固定ィ匕し一体ィ匕する、（2)記載の 研磨ロールの製造方法。  Compression in the juxtaposition direction is carried out at a rate of 95-20%, and the non-woven abrasive material impregnated with synthetic resin is allowed to stand for 3-24 hours at room temperature to 60 ° C, and then fixed and integrated (2 ) Manufacturing method of the polishing roll.
(4)  (Four)
不織布研磨材はドーナツ状であり、不織布研磨材を複数枚芯材に刺し通し、芯材 の軸方向に圧縮固定化し、その際不織布研磨材に合成樹脂を含浸し、さらに不織布 研磨材を固定ィ匕し一体ィ匕することにより形成された（1)記載の研磨ロール。  The nonwoven fabric abrasive material is doughnut-shaped, and the nonwoven fabric abrasive material is pierced into the core material and compressed and fixed in the axial direction of the core material. At that time, the nonwoven fabric abrasive material is impregnated with synthetic resin, and the nonwoven fabric abrasive material is fixed. The polishing roll according to (1), wherein the polishing roll is formed by wrinkling and uniting.
(5) (Five)
芯材の軸方向への圧縮は 95〜20%の割合で行 ヽ、合成樹脂を含浸した不織布 研磨材を常温〜 60°Cで 3〜24時問放置することにより固定ィ匕し一体ィ匕する、（4)記 載の研磨ロールの製造方法。  The core is compressed in the axial direction at a rate of 95 to 20%, and the nonwoven fabric impregnated with synthetic resin is fixed for 3 to 24 hours at room temperature to 60 ° C. (4) The method for producing a polishing roll according to (4).
(6) (6)
不織布研磨材は長尺状であり、不織布研磨材を芯材に卷きつけ、円筒状の芯材に 圧縮固定ィ匕し、その際不織布研磨材に合成樹脂を含浸し、さらに不織布研磨材を固 定化し一体化することにより形成された（1)記載の研磨ロール。 The nonwoven fabric abrasive is long, and the nonwoven fabric abrasive is applied to the core material to form a cylindrical core material. The polishing roll according to (1), which is formed by compressing and fixing, impregnating a non-woven fabric abrasive with a synthetic resin, and fixing and integrating the non-woven fabric abrasive.
(7)  (7)
圧縮は 95〜20%の割合で行 ヽ、合成樹脂を含浸した不織布研磨材を常温〜 60 °Cで 3〜24時間放置することにより固定ィ匕し一体ィ匕する、（6)記載の研磨ロールの製 造方法。  The compression is performed at a rate of 95 to 20%, and the nonwoven fabric abrasive material impregnated with the synthetic resin is fixed and integrated by leaving it at room temperature to 60 ° C for 3 to 24 hours. How to make a roll.
(8)  (8)
合成樹脂は、ウレタン榭脂又は発泡ウレタン榭脂である（1)〜（7)のいずれか〖こ記 載の研磨ロール。  The polishing roll according to any one of (1) to (7), wherein the synthetic resin is urethane resin or urethane foam resin.
(9)  (9)
合成樹脂系接着剤は、エポキシ榭脂、フエノール榭脂、あるいはエポキシ榭脂とフ エノール榭脂とを混合したものである（1)〜（8)の 、ずれか〖こ記載の研磨ロール。 発明の効果  The synthetic resin adhesive is an abrasive roll according to any one of (1) to (8), wherein the epoxy resin, phenol resin, or a mixture of epoxy resin and phenol resin. The invention's effect
[0006] 本発明に力かる研磨ロールでは、プリント配線板のように小さ 、貫通穴又は非貫通 穴がある被研磨物を研磨した場合でも、発生する消耗カスが少ないうえに、その消耗 カスが穴に詰まりにくぐその結果、穴の開いた被研磨物の研磨工程における歩留り が向上する。  [0006] The polishing roll according to the present invention generates less consumable debris even when an object to be polished having a small through hole or non-through hole is polished, such as a printed wiring board. As a result, the yield in the polishing process of the workpiece having holes is improved.
図面の簡単な説明  Brief Description of Drawings
[0007] [図 1]本発明に使用される不織布研磨材の一実施の形態を示す斜視図解図である。  [0007] FIG. 1 is a perspective view showing an embodiment of a nonwoven fabric abrasive used in the present invention.
[図 2]図 1に示す不織布研磨材の一部を拡大した拡大図解図である。  FIG. 2 is an enlarged illustrative view showing a part of the nonwoven fabric abrasive shown in FIG.
[図 3]本発明にかかる研磨ロールの一実施の形態を示す一部を拡大した斜視図解図 である。  FIG. 3 is a partially enlarged perspective view illustrating an embodiment of a polishing roll according to the present invention.
[図 4]本発明にかかる研磨ロールの製造手順を示した図解図であって、（a)は、矩形 状の不織布研磨材を並置した状態を示し、（b)は、並置した不織布研磨材を並置方 向に圧縮する状態を示し、（c)は、圧縮固定化した不織布研磨材を芯材に巻き付け る状態を示した図である。  FIG. 4 is an illustrative view showing a production procedure of an abrasive roll according to the present invention, in which (a) shows a state in which rectangular nonwoven fabric abrasives are juxtaposed, and (b) shows a juxtaposed nonwoven fabric abrasive material. (C) is a diagram showing a state in which a nonwoven fabric abrasive that has been compressed and fixed is wound around a core material.
[図 5]本発明にかかる研磨ロールの別の実施形態を示す図解図である。  FIG. 5 is an illustrative view showing another embodiment of a polishing roll according to the present invention.
[図 6]本発明にかかる研磨ロールのさらに別の実施形態を示す図解図である。 符号の説明 FIG. 6 is an illustrative view showing still another embodiment of a polishing roll according to the present invention. Explanation of symbols
[0008] 10 不織布研磨材  [0008] 10 Nonwoven abrasive
10a 圧縮固定化された不織布研磨材  10a Non-woven abrasive material compression-fixed
12 不織布基材  12 Nonwoven substrate
14 合成繊維  14 Synthetic fiber
16 バインダ榭脂  16 Binder resin
18 研磨砥粒  18 abrasive grains
20 合成樹脂系接着剤  20 Synthetic resin adhesive
50 研磨ロール  50 Abrasive roll
52 芯材  52 Core
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0009] 図 1は、本発明に使用される不織布研磨材の一実施の形態を示す斜視図解図で あり、図 2は、図 1に示す不織布研磨材の一部を拡大した図解図である。不織布研磨 材 10は、不織布基材 12を含む。不織布基材 12は、合成繊維 14を三次元的に交絡 させて合成繊維 14同士の交絡点をバインダ榭脂 16により接着した不織布である。不 織布基材 12を構成する合成繊維 14としては、一定の強度を有する合成繊維であれ ば特に限定はされないが、具体的にはポリアミド繊維、ァラミド繊維、ポリエステル繊 維、ビニロン繊維を単独で、あるいはこれらを組み合わせて使用することができる。さ らに、これらの繊維の中でもバインダ榭脂 16による接着性を考慮するとポリアミド繊維 、ビニロン繊維を用いるのが好ましい。合成繊維 14には、繊維径が 5 μ m〜36 μ m の範囲にあるものが使用できる。ょり望ましぃ繊維径は5 111〜30 111で、さらに望ま しい繊維径は、 5 μ m〜27 μ mである。合成繊維 14は、繊維径がこの範囲内のもの であればよぐ繊維径を単一にして、あるいは異なる繊維径のものを複数種組み合わ せて使用されてもよい。 FIG. 1 is a perspective view showing an embodiment of the nonwoven fabric abrasive used in the present invention, and FIG. 2 is an enlarged view of a part of the nonwoven fabric abrasive shown in FIG. . The nonwoven fabric abrasive 10 includes a nonwoven fabric substrate 12. The nonwoven fabric substrate 12 is a nonwoven fabric in which synthetic fibers 14 are entangled three-dimensionally and the entanglement points between the synthetic fibers 14 are bonded by a binder resin 16. The synthetic fiber 14 constituting the nonwoven fabric substrate 12 is not particularly limited as long as it is a synthetic fiber having a certain strength, but specifically, polyamide fiber, aramid fiber, polyester fiber, and vinylon fiber are used alone. These can be used in combination. Further, among these fibers, it is preferable to use polyamide fibers and vinylon fibers in consideration of the adhesiveness due to the binder resin 16. As the synthetic fiber 14, one having a fiber diameter in the range of 5 μm to 36 μm can be used. The desired fiber diameter is 5 111 to 30 111, and the more desirable fiber diameter is 5 μm to 27 μm. As long as the synthetic fiber 14 has a fiber diameter within this range, a single fiber diameter may be used, or a combination of fibers having different fiber diameters may be used.
[0010] 不織布基材 12は、クロスウェブ、ランダムウェブ、スパンボンド法、抄紙式を用いて 作製される。その中でも、被研磨物の研磨クズによる目詰まりが少なぐ放熱性も高く 、且つ研磨ロール作成時の密度制御を容易に行うことができる点から、ウェブに厚み を付与できるクロスウェブ、ランダムウェブにより作製されるのが好ましい。また、ウェブ の密度を制御するために、これらの方法で作製されたウェブに-一ドルパンチ力卩ェを 施してちょい。 [0010] The nonwoven fabric substrate 12 is produced using a cross web, a random web, a spunbond method, and a papermaking method. Among them, the cross-web and the random web that can give a thickness to the web from the point that clogging due to polishing scraps of the object to be polished is small, the heat dissipation is high, and the density control at the time of creating the polishing roll can be easily performed. Preferably it is made. Web In order to control the density of the web, apply a one-punch punch force to the web produced by these methods.
[0011] ノインダ榭脂 16としては、 SBR榭脂、 NBR榭脂、アクリル酸エステル、メラミン榭脂 、フエノール榭脂等を単独で、あるいはこれらを組み合わせて使用することができる。 さら〖こ、これらの中でも柔軟性に富む不織布基材 12を作製できる点で、 SBR榭脂、 アクリル酸エステルを用いるのが好ましい。バインダ榭脂 16の塗布方法として、公知 のスプレー法、浸漬法などを単独であるいは組み合わせて用いることができる。  [0011] As Noinda resin 16, SBR resin, NBR resin, acrylic ester, melamine resin, phenol resin, etc. can be used alone or in combination. Further, among these, it is preferable to use SBR resin or acrylate ester in that a nonwoven fabric substrate 12 having high flexibility can be produced. As a method for applying the binder resin 16, a known spraying method, dipping method, or the like can be used alone or in combination.
[0012] 不織布基材 12には、その内部に研磨砥粒 18が分散 '混入された状態で合成樹脂 系接着剤 20により固着されている。研磨砥粒 18としては、一般的に研磨砥粒として 使用されるものであればよぐ例えばシリコンカーバイド、酸ィ匕アルミニウム、シリカ、 酸ィ匕クロム、酸化セリウム、合成ダイアモンド、 CBN (立方晶窒化ホウ素）、ざくろ石な どが使用できる。研磨砥粒 18の粒径は、不織布基材 12に塗布カ卩ェできる範囲のも のであればよぐ研磨用途に応じて適宜な粒径の研磨砲粒が選択されればよ!、。  [0012] The nonwoven fabric base 12 is fixed with a synthetic resin adhesive 20 in a state where abrasive grains 18 are dispersed and mixed therein. The abrasive grains 18 may be those generally used as abrasive grains, such as silicon carbide, acid aluminum, silica, acid chromium, cerium oxide, synthetic diamond, CBN (cubic nitriding). Boron), garnet, etc. can be used. As long as the grain size of the abrasive grains 18 is within a range that can be applied to the nonwoven fabric substrate 12, it is sufficient to select abrasive grains having an appropriate grain size according to the purpose of polishing!
[0013] 合成樹脂系接着剤 20としては、フエノール榭脂、エポキシ榭脂、ウレタン榭脂等の 合成樹脂系接着剤が使用できるが、研磨砥粒 18が研磨性能を十分発揮できる点で 、フエノール榭脂単独、エポキシ榭脂単独、あるいはフエノール榭脂とエポキシ榭脂と を混合したものを用いるのが好ましい。合成樹脂系接着剤 20は、研磨砥粒 18が分 散 ·混入された状態で不織布基材 12に塗布されるが、塗布には、浸漬法、あるいは 浸漬法とスプレー法とが併用して行われる。  [0013] As the synthetic resin adhesive 20, synthetic resin adhesives such as phenol resin, epoxy resin, urethane resin, etc. can be used, but in terms of the fact that the abrasive grains 18 can sufficiently exhibit the polishing performance, It is preferable to use a resin alone, an epoxy resin alone, or a mixture of phenol resin and epoxy resin. The synthetic resin adhesive 20 is applied to the nonwoven fabric substrate 12 in a state where the abrasive grains 18 are dispersed and mixed. For the application, the dipping method or the dipping method and the spray method are used in combination. Is called.
[0014] 本発明に力かる不織布研磨材 10は、上述した構成により、プリント配線板などのよ うな小さ 、貫通穴を備えた被研磨物を研磨した場合でも、不織布研磨材から生ずる 消耗クズが少なぐまた消耗クズの大きさが小さいため被研磨物の貫通穴に穴づまり を生じさせることが少ない。  [0014] The nonwoven fabric abrasive 10 that is effective in the present invention has the above-described configuration, and even when a polished object having a small through hole such as a printed wiring board is polished, consumable debris generated from the nonwoven fabric abrasive is generated. In addition, since the size of the consumable waste is small, there is little clogging in the through hole of the workpiece.
[0015] 図 3は、本発明にかかる研磨ロールの一実施の形態を示す一部を拡大した斜視図 解図である。研磨ロール 50は、矩形状の不織布研磨材 10を複数枚並置し、並置し た方向に圧縮固定ィ匕し、圧縮固定した不織布研磨材 10aを円筒状の芯材 52に巻き 付け、巻き付けの際圧縮固定化された不織布研磨材 10aに合成樹脂を含浸し、さら に不織布研磨材 10を固定ィ匕し一体ィ匕することにより形成された研磨ロールである。 なお、不織布研磨材 10は、使用用途に応じ、適宜枚数を変えて使用される。 FIG. 3 is a partially enlarged perspective view showing an embodiment of a polishing roll according to the present invention. The polishing roll 50 has a plurality of rectangular nonwoven fabric abrasives 10 arranged side by side, compressed and fixed in the juxtaposed direction, and the nonwoven fabric abrasive material 10a compressed and fixed is wound around a cylindrical core material 52. It is a polishing roll formed by impregnating a synthetic resin into a non-woven fabric abrasive material 10a that has been compression-fixed, and further fixing and unifying the non-woven fabric abrasive material 10 together. The nonwoven fabric abrasive 10 is used by changing the number of sheets as appropriate according to the intended use.
[0016] 芯材 52には、フエノール榭脂などの硬質榭脂を用いて円筒状に形成されたものが 使用される。 [0016] As the core material 52, a material formed in a cylindrical shape using a hard resin such as phenol resin is used.
[0017] 不織布研磨材 10同士を接着する合成樹脂としては、フエノール榭脂、エポキシ榭 脂、ウレタン榭脂、発泡ウレタン榭脂等が使用できるが、フエノール榭脂及びエポキシ 榭脂より弾力性に富み研磨ロール 50の被研磨物への追従性が良いことから、ウレタ ン榭脂を使用し、より望ましくは発泡ウレタン榭脂を用いるのが好ましい。尚、発泡ゥ レタン樹脂以外の榭脂でも前記に記載した発泡ウレタン榭脂の特性と同様な特性が 発揮される榭脂も同様に使用できる。  [0017] As the synthetic resin for bonding the nonwoven fabric abrasives 10, phenol resin, epoxy resin, urethane resin, foamed urethane resin, etc. can be used, but they are more elastic than phenol resin and epoxy resin. Since the followability of the polishing roll 50 to the object to be polished is good, it is preferable to use urethane resin, more preferably urethane foam resin. It should be noted that a resin that exhibits the same characteristics as those of the urethane foam resin described above can be used in the same manner even with a resin other than the foamed urethane resin.
[0018] 本発明に力かる研磨ロール 50では、不織布研磨材 10が奏する効果に併せて、研 磨時に新しい研磨層が出てきて研磨性能が持続し、スクラッチが少なく均一かつ一 定粗さの研磨をすることができ、さらに、被研磨物の削りカスによる目詰まりが少なぐ 発生する研磨熱を逃がす効果を備えていることから、プリント配線板等の小さい貫通 穴が設けられている被研磨物を効率的に研磨することができる。  [0018] In the polishing roll 50 that is effective in the present invention, in addition to the effect exhibited by the nonwoven fabric abrasive 10, a new polishing layer comes out at the time of polishing, the polishing performance is sustained, and there is little scratch and uniform and constant roughness. It is possible to polish, and the clogging due to scraping of the work piece is less clogged. It has the effect of releasing the generated heat of polishing, so the work to be polished is provided with small through holes such as printed circuit boards. An object can be efficiently polished.
[0019] 本発明に力かる研磨ロールの製造方法は、段落 0009〜段落 0013に記載された 不織布研磨材 10を図 4 (a)に示すように矩形状に裁断して複数枚並置し、図 4 (b)に 示すように並置方向に 95〜20%圧縮固定化 (圧縮前の寸法を 100%として）し、図 4 (c)に示すように圧縮固定ィ匕した不織布研磨材 10aを円筒状の芯材 52に巻き付けて 、その際合成樹脂を含浸させる。具体的には、上述の実施の形態に用いたウレタン 榭脂などの合成樹脂が均一に浸透するまで含浸する。含浸作業は、矩形状に裁断さ れた不織布研磨材 10を圧縮固定ィ匕した後又は圧縮固定化された不織布研磨材 10 を芯材 52に卷きつけた後、どちらで行ってもよい。含浸方法としては不織布研磨材 1 0を圧縮固定化させた状態、又は芯材 52に不織布研磨材 10を卷きつけた状態で榭 脂溶液に浸漬又は前記被含浸物の上部から榭脂溶液を落としていく作業が挙げら れる。本作業は圧縮固定化された不織布研磨材に均一に榭脂が含浸すればよく前 述した作業手順又は作業方法以外でも当該作業の目的である前記被含浸物に均一 に榭脂が含浸すれば前述した以外の作業手順又は作業方法を適用することができ る。さらに合成樹脂が含浸された不織布研磨材 10は、常温〜 60°Cで 3〜24時間放 置して固定化し一体化することにより形成される。このような手順で製造すれば不織 布研磨材 10が芯材 52の外周に密度ムラが少なく固定ィ匕一体ィ匕することが可能で被 研磨物の研磨ムラが解消され、さらに前記に記載した不織布研磨材 10に浸透させた 合成樹脂が (具体的には上述の実施の形態で用いた発泡ウレタン榭脂など)、不織 布研磨材に均一に浸透することで、被研磨物の追従性が向上し本発明の不織布研 磨材 10を用いた研磨ロールの効果をより引き出すことが可能である。 [0019] The manufacturing method of the polishing roll according to the present invention includes cutting the nonwoven fabric abrasive material 10 described in paragraphs 0009 to 0013 into a rectangular shape as shown in FIG. 4 As shown in (b), 95 to 20% compression-fixed in the juxtaposition direction (assuming that the dimension before compression is 100%), and as shown in Fig. 4 (c), the non-woven abrasive 10a is compressed into a cylinder. It is wound around a core material 52 and impregnated with a synthetic resin. Specifically, it is impregnated until the synthetic resin such as urethane rosin used in the above-mentioned embodiment penetrates uniformly. The impregnation operation may be performed either after compressing and fixing the nonwoven fabric abrasive material 10 cut into a rectangular shape or after pressing the nonwoven fabric abrasive material 10 compressed and fixed on the core material 52. As the impregnation method, the nonwoven fabric abrasive 10 is compressed and fixed, or the nonwoven fabric abrasive 10 is rubbed on the core material 52 and immersed in the resin solution or dropped from the top of the impregnated material. The work to be done is mentioned. In this operation, it is only necessary to uniformly impregnate the non-woven abrasive material that has been compression-fixed, and if the impregnated material that is the purpose of the operation is uniformly impregnated with the resin other than the work procedure or method described above. Work procedures or work methods other than those described above can be applied. Furthermore, the nonwoven fabric abrasive material 10 impregnated with synthetic resin can be released at room temperature to 60 ° C for 3 to 24 hours. It is formed by placing, fixing and integrating. If manufactured in such a procedure, the non-woven fabric abrasive 10 can be fixed and integrated with little density unevenness on the outer periphery of the core material 52, and the polishing unevenness of the object to be polished can be eliminated. The synthetic resin that has penetrated into the non-woven fabric abrasive 10 (specifically, the urethane foam used in the above embodiment) uniformly penetrates into the non-woven fabric abrasive so that the object to be polished can follow. Thus, it is possible to improve the properties of the polishing roll using the nonwoven fabric polishing material 10 of the present invention.
なお、本発明に力かる研磨ロールは、上述の作製方法に限らず、その他の作製方 法により作製されてもよい。例えば、図 5に示すように、ドーナヅッ状に裁断した複数 枚の不織布研磨材 10を芯材 52に刺し通して、芯材 52の軸方向に 95〜20%圧縮 固定ィ匕 (圧縮前の寸法を 100%として)しロール状に形成する。その際合成樹脂を含 浸させる。具体的には上述の実施の形態に用いたウレタン榭脂などの合成樹脂が均 一に浸透するまで含浸する。含浸作業は、ドーナッツ状に裁断した複数枚の不織布 研磨材 10を芯材 52に刺し通した後、又は軸方向に 95〜20%圧縮固定化 (圧縮前 の寸法を 100%として）しロール状に形成する後、どちらで行ってもよい。含浸方法と してはドーナッツ状に裁断した複数枚の不織布研磨材 10を 52に刺し通した状態で 又は芯材 52の軸方向に 95〜20%圧縮固定ィ匕状態で榭脂溶液に浸漬又は前記被 含浸物の上部から榭脂溶液を落として!/ヽく作業が挙げられる。本作業は圧縮固定ィ匕 された不織布研磨材に均一に榭脂が含浸すればよく前記で挙げた作業手順又は作 業方法以外でも当該作業の目的である前記被含浸物に均一に榭脂が含浸すれば 前記で挙げた以外の作業手順又は作業方法を適用することができる。さらに前記不 織布研磨材を常温〜 60°Cで 3〜24時間放置して固定ィ匕し一体ィ匕することにより形 成される。また別の具体例としては、長尺状の不織布研磨材を芯材 52外周面上に卷 きつけ、 95〜20%圧縮固定ィ匕 (圧縮前の寸法を 100%として）しロール状に形成す る。その際合成樹脂、具体的な実施形態 1例としてウレタン榭脂に、当該樹脂が均一 に浸透するまで含浸する。含浸作業は、長尺状の不織布研磨材を芯材 52外周面上 に卷きつけた後又は 95〜20%圧縮固定ィ匕 (圧縮前の寸法を 100%として）しロール 状に形成した後どちらで行ってもよい。含浸方法としては含浸作業は、長尺状の不織 布研磨材を芯材 52外周面上に巻きつけた状態又は 95〜20%圧縮固定化 (圧縮前 の寸法を 100%として)しロール状に形成した状態で榭脂溶液に浸漬又は前記被含 浸物の上部から榭脂溶液を落として!/ヽく作業が挙げられる。本作業は圧縮固定化さ れた不織布研磨材に均一に榭脂が含浸すればよく前記で挙げた作業手順又は作業 方法以外でも当該作業の目的である前記被含浸物に均一に榭脂が含浸すれば前 記で挙げた以外の作業手順又は作業方法を適用することができる。 Note that the polishing roll according to the present invention is not limited to the above-described manufacturing method, and may be manufactured by other manufacturing methods. For example, as shown in FIG. 5, a plurality of nonwoven fabric abrasives 10 cut into a dough shape are pierced through the core material 52 and compressed 95 to 20% in the axial direction of the core material 52 (size before compression) To 100%) to form a roll. At that time, synthetic resin is impregnated. Specifically, it is impregnated until the synthetic resin such as urethane resin used in the above-mentioned embodiment penetrates uniformly. The impregnation operation is performed by inserting a plurality of non-woven abrasive materials 10 cut into donuts into the core material 52, or compressing and fixing 95 to 20% in the axial direction (with the uncompressed dimensions as 100%) and rolled. After forming, it may be done either way. As the impregnation method, a plurality of nonwoven fabric abrasives 10 cut into a donut shape are immersed in a resin solution in a state where they are pierced in 52 or 95 to 20% compressed and fixed in the axial direction of the core material 52. For example, the resin solution is dropped / spreaded from the top of the impregnated material. In this operation, it is sufficient that the non-woven abrasive material compressed and fixed is uniformly impregnated with the resin, and the resin to be impregnated can be uniformly applied to the object to be impregnated other than the above-described work procedure or method. If impregnated, work procedures or work methods other than those mentioned above can be applied. Further, it is formed by leaving the nonwoven fabric abrasive at room temperature to 60 ° C. for 3 to 24 hours, and fixing and uniting. As another specific example, a long nonwoven fabric abrasive is rubbed onto the outer peripheral surface of the core material 52, and it is formed into a roll by 95 to 20% compression fixation (with the dimension before compression being 100%). The At that time, a synthetic resin, which is one example of a specific embodiment, is impregnated with urethane resin until the resin uniformly penetrates. The impregnation work can be performed after either a long non-woven fabric abrasive is applied on the outer peripheral surface of the core 52 or after it is formed into a roll by 95 to 20% compression fixation (size before compression is 100%). You may go on. As the impregnation method, the impregnation operation is performed by winding a long non-woven cloth abrasive material on the outer peripheral surface of the core material 52 or compressing and fixing 95 to 20% (before compression) In this state, the resin is immersed in a resin solution in a state of being formed into a roll, or the resin solution is dropped from the top of the impregnated material. In this operation, it is sufficient that the non-woven abrasive material that has been compression-fixed is uniformly impregnated with the resin, and the object to be impregnated is uniformly impregnated with the resin other than the above-described work procedure or method. Then, work procedures or work methods other than those listed above can be applied.
[0021] さらに前記不織布研磨材を常温〜 60°Cで 3〜24時間放置して固定ィ匕し一体ィ匕す ることにより形成される（図 6参照)。  [0021] Further, the nonwoven fabric abrasive is formed by standing at room temperature to 60 ° C for 3 to 24 hours, and fixing and integrally bonding (see Fig. 6).
実施例 1  Example 1
[0022] 単糸繊度 6. 6dtex (太さ 27 μ m)のナイロン 6繊維を 50重量0 /0、単糸繊度 3. 3dte X (太さ 19 m)のナイロン 6繊維を 50重量％の割合で配合し、繊維目付量 115gZ m2のクロスウェブを作製した。このクロスウェブにバインダ榭脂として SBR榭脂をスプ レー法により両面より噴霧'付着させた。なお、このとき SBR榭脂は、乾燥固形分 30g /m2となるように噴霧行った。その後このクロスウェブに乾燥処理を施し不織布基材 12を作製した。次に、不織布基材 12に、合成樹脂系接着剤 20であるフエノール榭 脂と、研磨砲粒 18である # 700のシリコンカーバイドとを固形比 100Z230に調整し たスラリーを乾燥固形分が 275gZm2で付着するように浸漬させ不織布研磨材 10を 得た。続いて、この不織布研磨材 10を 40 X 640mmの矩形状に裁断したものを 165 枚用いて 24%圧縮し固定ィ匕し、圧縮固定ィ匕した不織布研磨材 10aを合成樹脂であ る発泡ウレタン榭脂に含浸し、芯材 52外周面上に巻きつけて、常温にて 12時間放 置することにより不織布研磨材 10同士を固定ィ匕し一体ィ匕させて、 150 X 610 X 76. 2mmの研磨ロール 50を作製した。 [0022] fineness 6. 6 dtex (thickness 27 mu m) nylon 6 fiber 50 weight 0/0, the proportion of 50 wt% nylon 6 fiber having a single fiber fineness 3. 3dte X (thickness 19 m) And a cross web having a basis weight of 115 gZ m 2 was prepared. SBR resin as a binder resin was sprayed and adhered from both sides by a spray method. At this time, the SBR resin was sprayed so as to have a dry solid content of 30 g / m 2 . Thereafter, the cloth web was subjected to a drying treatment to produce a nonwoven fabric substrate 12. Next, a non-woven fabric substrate 12 having a dry solid content of 275 gZm 2 is prepared by mixing a slurry of phenol resin, which is a synthetic resin adhesive 20, and # 700 silicon carbide, which is an abrasive barrel 18, with a solid ratio of 100 Z230. The nonwoven fabric abrasive 10 was obtained by dipping so as to adhere. Next, 165 sheets of this nonwoven fabric abrasive material 10 cut into a 40 x 640 mm rectangle were compressed and fixed 24%, and the nonwoven fabric abrasive material 10a compressed and fixed was foamed urethane foam, which is a synthetic resin. 150 x 610 x 76.2mm, impregnated with resin, wound around the outer periphery of the core material 52, and allowed to stand at room temperature for 12 hours to fix the nonwoven fabric abrasives 10 together. A polishing roll 50 was prepared.
(比較例 1)  (Comparative Example 1)
単糸繊度 16dtex (太さ 42 μ m)のナイロン 6繊維を用いて繊維目付量 115gZm2 の繊維集合体 (ランダムウェブ）に、 SBR榭脂をスプレー法にて、両面合わせて乾燥 固形分 30g,m2を塗布し、不織布基材 12を作製した。次に、この不織布基材に、フ エノール榭脂と研磨砲粒 (シリコンカーバイド、 # 700)とを固形比 100Z230に調整 したスラリーを乾燥固形分 275gZm2付着させ不織布研磨材を得た。 Using a nylon 6 fiber with a single yarn fineness of 16dtex (thickness 42 μm) and a fiber aggregate (random web) with a basis weight of 115gZm 2 , SBR resin is sprayed on both sides and dried. Solid content 30g, m 2 was applied to prepare a nonwoven fabric substrate 12. Next, a slurry prepared by adjusting phenolic resin and abrasive powder (silicon carbide, # 700) to a solid ratio of 100Z230 was adhered to this nonwoven fabric substrate to a dry solid content of 275 gZm 2 to obtain a nonwoven fabric abrasive.
[0023] この不織布研磨材 10を 40 X 640mmの矩形状に裁断したものを 136枚用いて 26 %圧縮し固定ィ匕し芯材 52外周面上に接着剤を塗布し、そこに前記圧縮固定化され た不織布研磨材 53を放射線状に配置し、 150 X 610 X 76. 2mmの研磨ロール 50 を作製した。 [0023] This non-woven abrasive material 10 was cut into a 40 X 640 mm rectangular shape using 136 sheets 26 % Compressed and fixed core material 52 Adhesive is applied on the outer peripheral surface, and the non-woven fabric abrasive material 53 compressed and fixed is radially disposed thereon, and a 150 x 610 x 76.2 mm abrasive roll 50 Was made.
[0024] 実施例 1および比較例 1を用いて、下記条件によりプリント配線板の研磨を行 、、そ れぞれから発生する消耗カスの粒径分布測定とプリント配線板に生じた穴づまりの確 認を行った。  [0024] Using Example 1 and Comparative Example 1, the printed wiring board was polished under the following conditions, the particle size distribution measurement of consumable waste generated from each of them and the confirmation of hole clogging generated in the printed wiring board were performed. Confirmed.
[0025] <研磨条件 > [0025] <Polishing conditions>
被研磨物 1 :穴あき銅箔基板：幅 410 X奥行 510 X板厚 0. 8mm、スルーホール： φ Workpiece 1: Perforated copper foil substrate: Width 410 X Depth 510 X Thickness 0.8 mm, Through hole: φ
0. 3の貫通穴が 21316穴 0. 3 through holes are 21316 holes
被研磨物 2 :穴あき銅箔基板：幅 410 X奥行 510 X板厚 0. 8mm、スルーホール： φ 0. 25の貫通穴力 1316穴  Workpiece 2: Perforated copper foil substrate: Width 410 X Depth 510 X Thickness 0.8 mm, Through hole: φ 0.25 through hole force 1316 hole
研磨機：平面研磨機研磨ホイール回転数： 18000rpm  Polishing machine: Flat grinding machine Polishing wheel rotation speed: 18000rpm
送り量： 2mZmin  Feed amount: 2mZmin
オシユレーシヨン： 470cpm  Oscillation: 470cpm
消耗カスを採取するため、被研磨物 1の一端部力 反対側の他端部まで通過させ る動作を 1パスとして、 181パス目力も 200パス目の間、消耗カスを保留粒子平均 20 μ mのクーラントフィルタにて採取した。採取した消耗カスを各目開きのふるいにかけ 、各ふるいに残留した消耗カスの重量を測定した。計測結果を表 1に示す。また、消 耗カスによるスルーホールの穴づまりを確認するために、上述の条件と同一条件によ り研磨ロールを 1パスさせた後、目視により穴づまりを確認した。表 2に穴づまりの結 果を示す。  In order to collect consumable debris, the movement of one end of the work piece 1 to the other end on the opposite side is taken as one pass, and the consumable debris is retained 20 μm on average during the 181st pass force during the 200th pass. The sample was collected with a coolant filter. The collected consumable debris was passed through each sieve and the weight of the consumable debris remaining on each sieve was measured. Table 1 shows the measurement results. In addition, in order to confirm the clogging of the through hole due to the wear debris, the clogging was visually confirmed after passing the polishing roll for one pass under the same conditions as described above. Table 2 shows the results of hole clogging.
[0026] [表 1] 雄例 1 應列 1 [0026] [Table 1] Male example 1 Series 1
ふるい目開き  Sieve opening
皇里 に対する 軍暈 全体に対する  Against the imperial warrior
( m)  (m)
(mg) 割合 (%) (mg) 割合 (%)  (mg) ratio (%) (mg) ratio (%)
500 L h 22 3.3 36.4 17.8  500 L h 22 3.3 36.4 17.8
425 0.1 0.2 8.6 4.2 425 0.1 0.2 8.6 4.2
300 2.4 3.6 32.6 15.9300 2.4 3.6 32.6 15.9
212 10.4 15.7 50.6 24.7212 10.4 15.7 50.6 24.7
180 8.0 12.1 22.8 11.1180 8.0 12.1 22.8 11.1
150 11.5 17.4 20.8 10.2150 11.5 17.4 20.8 10.2
125 18.0 27.2 16.8 8.2125 18.0 27.2 16.8 8.2
106 9.9 15.0 11.7 5.7106 9.9 15.0 11.7 5.7
106以下 3.7 5.6 4.4 2.1 106 or less 3.7 5.6 4.4 2.1
口 66.2 100.0 204.7 100.0  Mouth 66.2 100.0 204.7 100.0
[0027] [表 2] [0027] [Table 2]
Figure imgf000012_0001
Figure imgf000012_0001
表 1の値を見て明らかなように、消耗カス採取重量は比較例 1と比べて実施例は約 1Z3に減少している。さらに比較例 1では、採取した消耗カスの残留重量のふるい 目開きのピークが 212 mにあるのに対し、実施例 1では、 125 m付近にピークが ある。このことから、実施例 1では、従来の研磨ロールより消耗カスの大きさが小さくな つていることが確認できた。また、表 2から明らかなように、穴づまり箇所が、被研磨物 1、被研磨物 2両方において、比較例 1と比べ 50%以上の減少されているのを確認 することができた。  As is apparent from the values in Table 1, the amount of collected consumable waste is reduced to about 1Z3 in the example compared to Comparative Example 1. Moreover, in Comparative Example 1, the peak of the residual weight of the collected consumable residue is about 212 m, whereas in Example 1, the peak is around 125 m. From this, it was confirmed that in Example 1, the size of the consumable residue was smaller than that of the conventional polishing roll. Further, as is clear from Table 2, it was confirmed that the hole clogging location was reduced by 50% or more in both the polished object 1 and the polished object 2 as compared with Comparative Example 1.
産業上の利用可能性  Industrial applicability
[0028] 本発明の研磨ロールは、プリント配線板のスルーホールのような小さな穴があいて いる被研磨物を研磨する時に不織布研磨材及び研磨ロール力 発生する消耗カス が抑制され、穴づまりが減少することにより、歩留り収率を向上させることが期待出来 る。 [0028] The polishing roll of the present invention reduces non-woven fabric abrasives and consumable debris generated by polishing roll force when polishing an object having a small hole such as a through hole of a printed wiring board, thereby reducing hole clogging. By doing so, it can be expected to improve the yield.

Claims

請求の範囲 The scope of the claims
[1] 合成繊維を三次元的に交絡させて前記合成繊維同士の交絡点をバインダ榭脂〖こ より接着してなる不織布基材に研磨砥粒を分散'混入して合成樹脂系接着剤を用い て固着させた不織布研磨材を用いた研磨ロールであって、  [1] Synthetic fibers are entangled in a three-dimensional manner, and abrasive grains are dispersed and mixed into a nonwoven fabric base material obtained by adhering the entanglement points of the synthetic fibers with a binder resin. It is a polishing roll using a nonwoven fabric abrasive fixed by using,
前記合成繊維の繊維径が、 5 μ m〜36 μ mである不織布研磨材を用いた研磨ロー ル。  A polishing roll using a nonwoven fabric abrasive in which the synthetic fiber has a fiber diameter of 5 μm to 36 μm.
[2] 前記不織布研磨材は矩形状であり、前記不織布研磨材を複数枚並置し、並置した 方向に圧縮固定ィ匕し、円筒状の芯材に巻き付け、その際前記圧縮固定化された不 織布研磨材に合成樹脂を含浸し、さらに前記不織布研磨材を固定ィ匕し一体ィ匕するこ とにより形成された請求項 1記載の研磨ロール。  [2] The nonwoven fabric abrasive has a rectangular shape, and a plurality of the nonwoven fabric abrasives are juxtaposed, compressed and fixed in the juxtaposed direction, and wound around a cylindrical core material. 2. The polishing roll according to claim 1, wherein the polishing roll is formed by impregnating a woven cloth abrasive with a synthetic resin, and further fixing and integrally bonding the non-woven cloth abrasive.
[3] 並置方向への圧縮を 95〜20%の割合で行 ヽ、前記合成樹脂を含浸した前記不 織布研磨材を常温〜 60°Cで 3〜24時間放置することにより固定ィ匕し一体ィ匕する、請 求項 2記載の研磨ロールの製造方法。  [3] Compress in the juxtaposition direction at a rate of 95-20%, and fix the non-woven cloth abrasive material impregnated with the synthetic resin by leaving it at room temperature to 60 ° C for 3-24 hours. The method for producing a polishing roll according to claim 2, which is integrated.
[4] 前記不織布研磨材はドーナツ状であり、前記不織布研磨材を複数枚芯材に刺し通 し、芯材の軸方向に圧縮固定化し、その際前記不織布研磨材に合成樹脂を含浸し、 さらに前記不織布研磨材を固定ィ匕し一体ィ匕することにより形成された請求項 1記載の 研磨ロール。  [4] The nonwoven fabric abrasive material is doughnut-shaped, and the nonwoven fabric abrasive material is pierced into a plurality of core materials and compressed and fixed in the axial direction of the core material, and the nonwoven fabric abrasive material is impregnated with a synthetic resin, 2. The polishing roll according to claim 1, wherein the polishing roll is formed by fixing and unifying the nonwoven fabric abrasive.
[5] 芯材の軸方向への圧縮は 95〜20%の割合で行 、、前記合成樹脂を含浸した不 織布研磨材を常温〜 60°Cで 3〜24時問放置することにより固定ィ匕し一体ィ匕する、請 求項 4記載の研磨ロールの製造方法。  [5] The core material is compressed in the axial direction at a rate of 95-20% and fixed by leaving the nonwoven fabric impregnated with the synthetic resin at room temperature to 60 ° C for 3-24 hours. 5. The method for producing a polishing roll according to claim 4, wherein the polishing rolls are integrated.
[6] 前記不織布研磨材は長尺状であり、前記不織布研磨材を芯材に卷きつけ、円筒状 の芯材に圧縮固定ィ匕し、その際前記不織布研磨材に合成樹脂を含浸し、さらに前記 不織布研磨材を固定ィ匕し一体ィ匕することにより形成された請求項 1記載の研磨ロー ル。  [6] The non-woven fabric abrasive is elongated, and the non-woven fabric abrasive is rubbed against a core and compressed and fixed to a cylindrical core, and the non-woven fabric abrasive is impregnated with a synthetic resin. 2. The polishing roll according to claim 1, wherein the polishing roll is formed by fixing and unifying the nonwoven fabric abrasive.
[7] 前記圧縮は 95〜20%の割合で行 ヽ、前記合成樹脂を含浸した不織布研磨材を 常温〜 60°Cで 3〜24時間放置することにより固定ィ匕し一体ィ匕する、請求項 6記載の 研磨ロールの製造方法。  [7] The compression is performed at a rate of 95 to 20%, and the nonwoven fabric abrasive material impregnated with the synthetic resin is allowed to stand for 3 to 24 hours at room temperature to 60 ° C to be fixed and integrated. Item 7. A method for producing a polishing roll according to Item 6.
[8] 前記合成樹脂は、ウレタン榭脂又は発泡ウレタン榭脂である請求項 1〜7のいずれ かに記載の研磨ロール。 [8] The synthetic resin is urethane resin or foamed urethane resin, any one of claims 1 to 7 A polishing roll according to claim 1.
前記合成樹脂系接着剤は、エポキシ榭脂、フエノール榭脂、あるいはエポキシ榭月 とフエノール榭脂とを混合したものである請求項 1〜8のいずれかに記載の研磨ロー ノレ  9. The polishing roll according to claim 1, wherein the synthetic resin adhesive is an epoxy resin, a phenol resin, or a mixture of an epoxy resin and a phenol resin.
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KR20090021187A (en) 2009-02-27

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