JP2007218691A - 光電式エンコーダ - Google Patents
光電式エンコーダ Download PDFInfo
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- JP2007218691A JP2007218691A JP2006038457A JP2006038457A JP2007218691A JP 2007218691 A JP2007218691 A JP 2007218691A JP 2006038457 A JP2006038457 A JP 2006038457A JP 2006038457 A JP2006038457 A JP 2006038457A JP 2007218691 A JP2007218691 A JP 2007218691A
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- 238000001514 detection method Methods 0.000 claims abstract description 109
- 230000003287 optical effect Effects 0.000 claims abstract description 55
- 238000004364 calculation method Methods 0.000 claims description 29
- 238000003384 imaging method Methods 0.000 claims description 21
- 238000011109 contamination Methods 0.000 claims description 12
- 238000012935 Averaging Methods 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 16
- 238000012545 processing Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 6
- 230000000875 corresponding effect Effects 0.000 description 5
- 238000003491 array Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000002596 correlated effect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2454—Encoders incorporating incremental and absolute signals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/24476—Signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
【解決手段】所定のパターン(インクリメンタルパターン100や擬似ランダムパターン200)が形成されたスケールに対して相対変位可能な検出器を有する光電式エンコーダ(インクリメンタルエンコーダやアブソリュートエンコーダ)において、前記パターン(100、200)の同時に検出すべき検出範囲を少なくとも検出方向に分割して、それぞれの検出領域120毎に検出するための、複数の受光系(130、132)を備える。
【選択図】図3
Description
110…結像光学系
112…片側テレセントリック光学系
114…絞り板
116…両側テレセントリック光学系
120…検出領域
130…1次元受光アレイ素子
132…2次元受光アレイ素子
140…平均化処理回路
150…汚染検出回路
160…姿勢検出回路
170、172、174…遮光板
200…擬似ランダムパターン
210…相関器
220…ピーク高さ判定部
230…相関ピーク順序判定部
240…相関ピーク間隔判定部
250…絶対位置演算部
Claims (14)
- 所定のパターンが形成されたスケールに対して相対変位可能な検出器を有する光電式エンコーダにおいて、
前記パターンの同時に検出すべき検出範囲を少なくとも検出方向に分割して、それぞれ検出するための、複数の受光系を備えたことを特徴とする光電式エンコーダ。 - 前記受光系間に遮光板が配設されていることを特徴とする請求項1に記載の光電式エンコーダ。
- 前記受光系毎に結像光学系が設けられていることを特徴とする請求項1又は2に記載の光電式エンコーダ。
- 前記結像光学系が片側又は両側テレセントリック光学系であることを特徴とする請求項1又は2に記載の光電式エンコーダ。
- 前記検出範囲が、検出方向と垂直な方向にも分割されていることを特徴とする請求項1乃至4のいずれかに記載の光電式エンコーダ。
- 前記分割して検出した個所の出力の振幅により、検出範囲の部分的な汚染を検出するようにされていることを特徴とする請求項1乃至5のいずれかに記載の光電式エンコーダ。
- 前記汚染が検出された個所以外の出力を変位検出に用いるようにされていることを特徴とする請求項6に記載の光電式エンコーダ。
- 前記パターンがインクリメンタルパターンであることを特徴とする請求項1乃至7のいずれかに記載の光電式エンコーダ。
- 前記分割して検出した個所の出力を平均化することで移動量を検出するようにされていることを特徴とする請求項8に記載の光電式エンコーダ。
- 前記分割して検出した個所の出力の相対比較により、検出器の姿勢検出を行なうようにされていることを特徴とする請求項8に記載の光電式エンコーダ。
- 前記パターンが擬似ランダムパターンであることを特徴とする請求項1乃至7のいずれかに記載の光電式エンコーダ。
- 前記分割して検出されたパターンを個別に相関演算して、各相関ピークの順序が正しく、且つ、各相関ピークの間隔が所定範囲内である位置を絶対位置と判定するようにされていることを特徴とする請求項11に記載の光電式エンコーダ。
- 前記相関ピークの高さが閾値より低い場合は、該当する個別検出パターンを相関演算に用いないようにされていることを特徴とする請求項12に記載の光電式エンコーダ。
- 複数の個別検出パターンのうちの一つについて循環周期全域で相関演算を行なって一番高い相関ピークを求め、その周辺でのみ相関演算を行うようにされていることを特徴とする請求項12又は13に記載の光電式エンコーダ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006038457A JP4953653B2 (ja) | 2006-02-15 | 2006-02-15 | 光電式エンコーダ |
EP07002939.2A EP1821075B1 (en) | 2006-02-15 | 2007-02-12 | Photoelectric encoder |
CN2007100059255A CN101021425B (zh) | 2006-02-15 | 2007-02-15 | 光电式编码器 |
US11/675,257 US7446306B2 (en) | 2006-02-15 | 2007-02-15 | Photoelectric encoder having multiple light-receiving elements |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006038457A JP4953653B2 (ja) | 2006-02-15 | 2006-02-15 | 光電式エンコーダ |
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Publication Number | Publication Date |
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JP2007218691A true JP2007218691A (ja) | 2007-08-30 |
JP4953653B2 JP4953653B2 (ja) | 2012-06-13 |
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JP2006038457A Active JP4953653B2 (ja) | 2006-02-15 | 2006-02-15 | 光電式エンコーダ |
Country Status (4)
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US (1) | US7446306B2 (ja) |
EP (1) | EP1821075B1 (ja) |
JP (1) | JP4953653B2 (ja) |
CN (1) | CN101021425B (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009257891A (ja) * | 2008-04-15 | 2009-11-05 | Mitsutoyo Corp | 絶対位置測長型エンコーダ |
EP2131158A2 (en) | 2008-06-02 | 2009-12-09 | Mitutoyo Corporation | Absolute Position Detection Type Photoelectric Encoder |
JP2011237429A (ja) * | 2010-05-05 | 2011-11-24 | Mitsutoyo Corp | 光学式エンコーダおよび位置測定方法 |
JP2011247879A (ja) * | 2010-04-28 | 2011-12-08 | Mitsutoyo Corp | 光学式エンコーダ |
JP2012083153A (ja) * | 2010-10-08 | 2012-04-26 | Mitsutoyo Corp | エンコーダ |
JP2017116307A (ja) * | 2015-12-22 | 2017-06-29 | 株式会社ミツトヨ | エンコーダ |
CN111795713A (zh) * | 2019-04-03 | 2020-10-20 | 株式会社三丰 | 光编码器 |
Families Citing this family (14)
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JP5087239B2 (ja) * | 2006-06-26 | 2012-12-05 | 株式会社ミツトヨ | 光電式エンコーダ |
JP5103267B2 (ja) * | 2008-05-13 | 2012-12-19 | 株式会社ミツトヨ | 絶対位置測長型エンコーダ |
CN101769766B (zh) * | 2010-02-11 | 2011-10-26 | 长春理工大学 | 增量式光电编码器用狭缝光电池 |
US8739424B2 (en) * | 2011-06-24 | 2014-06-03 | Mitutoyo Corporation | Structure for protecting scale graduations |
EP2863185B1 (de) * | 2013-10-15 | 2017-08-16 | Siemens Aktiengesellschaft | Messwertgeber zum Erhalt einer Lageinformation |
DE102015216268A1 (de) * | 2015-08-26 | 2017-03-02 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
JP6634249B2 (ja) * | 2015-09-14 | 2020-01-22 | 株式会社ミツトヨ | 絶対位置検出型光電式エンコーダ |
JP6664211B2 (ja) * | 2015-12-22 | 2020-03-13 | 株式会社ミツトヨ | エンコーダ |
CN113091779A (zh) * | 2016-01-18 | 2021-07-09 | 株式会社尼康 | 编码器装置、驱动装置、载物台装置及机器人装置 |
JP6744066B2 (ja) * | 2016-03-25 | 2020-08-19 | 株式会社ミツトヨ | 光電式エンコーダ |
US10295648B2 (en) * | 2017-06-29 | 2019-05-21 | Mitutoyo Corporation | Contamination and defect resistant optical encoder configuration including a normal of readhead plane at a non-zero pitch angle relative to measuring axis for providing displacement signals |
US10168189B1 (en) * | 2017-06-29 | 2019-01-01 | Mitutoyo Corporation | Contamination and defect resistant optical encoder configuration for providing displacement signal having a plurality of spatial phase detectors arranged in a spatial phase sequence along a direction transverse to the measuring axis |
JP7114371B2 (ja) * | 2018-07-03 | 2022-08-08 | 株式会社ミツトヨ | 光電式エンコーダの信号処理方法 |
JP7513510B2 (ja) * | 2020-11-24 | 2024-07-09 | 株式会社ミツトヨ | 変位センサ及び形状測定装置 |
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2007
- 2007-02-12 EP EP07002939.2A patent/EP1821075B1/en active Active
- 2007-02-15 US US11/675,257 patent/US7446306B2/en active Active
- 2007-02-15 CN CN2007100059255A patent/CN101021425B/zh active Active
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2009257891A (ja) * | 2008-04-15 | 2009-11-05 | Mitsutoyo Corp | 絶対位置測長型エンコーダ |
US8227744B2 (en) | 2008-04-15 | 2012-07-24 | Mitutoyo Corporation | Absolute position length measurement type encoder |
EP2131158A2 (en) | 2008-06-02 | 2009-12-09 | Mitutoyo Corporation | Absolute Position Detection Type Photoelectric Encoder |
US8039786B2 (en) | 2008-06-02 | 2011-10-18 | Mitutoyo Corporation | Absolute position encoder obtains signals corresponding to individual imaging ranges of imaging optical systems |
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JP2012083153A (ja) * | 2010-10-08 | 2012-04-26 | Mitsutoyo Corp | エンコーダ |
JP2017116307A (ja) * | 2015-12-22 | 2017-06-29 | 株式会社ミツトヨ | エンコーダ |
CN111795713A (zh) * | 2019-04-03 | 2020-10-20 | 株式会社三丰 | 光编码器 |
Also Published As
Publication number | Publication date |
---|---|
US20070187583A1 (en) | 2007-08-16 |
EP1821075A2 (en) | 2007-08-22 |
US7446306B2 (en) | 2008-11-04 |
CN101021425A (zh) | 2007-08-22 |
EP1821075A3 (en) | 2014-12-31 |
JP4953653B2 (ja) | 2012-06-13 |
CN101021425B (zh) | 2011-08-03 |
EP1821075B1 (en) | 2017-11-29 |
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