JP2007184615A - 複合波長の光を発生する発光ダイオード素子 - Google Patents
複合波長の光を発生する発光ダイオード素子 Download PDFInfo
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- 239000000463 material Substances 0.000 claims abstract description 20
- 239000000126 substance Substances 0.000 claims abstract description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract 6
- 229910052681 coesite Inorganic materials 0.000 claims abstract 3
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract 3
- 239000000377 silicon dioxide Substances 0.000 claims abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract 3
- 229910052682 stishovite Inorganic materials 0.000 claims abstract 3
- 229910052905 tridymite Inorganic materials 0.000 claims abstract 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 74
- 239000000758 substrate Substances 0.000 claims description 22
- 150000004767 nitrides Chemical class 0.000 claims description 18
- 229920005989 resin Polymers 0.000 claims description 13
- 239000011347 resin Substances 0.000 claims description 13
- 229910052791 calcium Inorganic materials 0.000 claims description 12
- 229910052712 strontium Inorganic materials 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 7
- 239000003822 epoxy resin Substances 0.000 claims description 7
- 229920000647 polyepoxide Polymers 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 229910052788 barium Inorganic materials 0.000 claims description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 5
- 239000002223 garnet Substances 0.000 claims description 5
- 229910052746 lanthanum Inorganic materials 0.000 claims description 5
- 229910052749 magnesium Inorganic materials 0.000 claims description 5
- 229910052706 scandium Inorganic materials 0.000 claims description 5
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 5
- 229910052727 yttrium Inorganic materials 0.000 claims description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 5
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical group [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims description 4
- 229910052793 cadmium Inorganic materials 0.000 claims description 4
- 229910052748 manganese Inorganic materials 0.000 claims description 4
- 150000004760 silicates Chemical class 0.000 claims description 4
- 229910052725 zinc Inorganic materials 0.000 claims description 4
- 229910052796 boron Inorganic materials 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 229910052717 sulfur Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims 4
- 238000004383 yellowing Methods 0.000 claims 3
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 claims 2
- 229910052758 niobium Inorganic materials 0.000 claims 2
- 229910052715 tantalum Inorganic materials 0.000 claims 2
- -1 Y 2 O 2 S Chemical class 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- NHYCGSASNAIGLD-UHFFFAOYSA-N chlorine monoxide Inorganic materials Cl[O] NHYCGSASNAIGLD-UHFFFAOYSA-N 0.000 claims 1
- 229910052593 corundum Inorganic materials 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 229920002050 silicone resin Polymers 0.000 claims 1
- 229910001845 yogo sapphire Inorganic materials 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 27
- 238000000034 method Methods 0.000 abstract description 27
- 238000004544 sputter deposition Methods 0.000 abstract description 11
- 239000000853 adhesive Substances 0.000 abstract description 6
- 230000001070 adhesive effect Effects 0.000 abstract description 6
- 238000000151 deposition Methods 0.000 abstract description 2
- 238000001552 radio frequency sputter deposition Methods 0.000 abstract 1
- 239000002131 composite material Substances 0.000 description 15
- 238000000465 moulding Methods 0.000 description 8
- 238000004549 pulsed laser deposition Methods 0.000 description 6
- 239000013077 target material Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 229910002704 AlGaN Inorganic materials 0.000 description 2
- 229910052693 Europium Inorganic materials 0.000 description 2
- 239000011149 active material Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- 229910017083 AlN Inorganic materials 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
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Abstract
【解決手段】LEDチップの上の電極パッドをマスクするマスクパターンを形成して、Pulsed DCまたはRFスパッタリング法、或いはPLD法を使用してLEDチップ上に蛍光膜を薄くて均一に蒸着する。スパッタリング法やPLD法はSiO2またはSiOに蛍光体が混ざり合った物質を使用してスパッタリング工程などのターゲットを作って蛍光膜を蒸着するのに使用する。蛍光膜を蒸着させた後に前記のマスクパターンを除去することによって複合波長の光を発生するLED素子を製造する。
【選択図】図4a
Description
本発明の実施例は添付した図面に示した構造を持つLEDチップだけに限定して適用したものではない。図示したLEDチップは単に一つの例を表しているだけである。すなわち、本発明に適用されることができるLEDチップは、所定の構造を持つ発光構造物と、この発光構造物を外部に連結するための電極パッドとを具備していれば十分である。
310 LEDチップ
320a、320b 電極パッド
325 マスクパターン
330 蛍光体膜
Claims (20)
- LEDチップから放出される主光を一つ以上の他の光波長に変換させる蛍光体が具備されたLED素子において、
前記蛍光体は青色光、緑色光、黄色光または赤色光の少なくとも一つまたは二つ以上を含んでおり、
前記蛍光体は電極パッドを除いたLEDチップ上に分布形成されており、
前記分布層はSiO2またはSiOを含む酸化物系、窒化物系、エポキシ(epoxy)樹脂またはシリコン(silicone)樹脂の中の少なくとも一つの物質を含んでおり、
前記分布は前記電極パッドを含む電極層の全体の厚さより小さいことを特徴とするLED素子。 - 前記窒化物系はSiN、AlN、GaN、InNまたはこれらの混合物の中の少なくとも一つを含むことを特徴とする請求項1に記載のLED素子。
- 基板上に形成されたLEDチップ構造物を含むLEDチップから放出される主光を一つ以上の他の光波長に変換させる蛍光体が具備されたLED素子において、
前記蛍光体は青色光、緑色光、黄色光または赤色光の少なくとも一つまたは二つ以上を含んでおり、
前記蛍光体は電極パッドを除いたLEDチップ上に分布形成されており、
前記分布層はSiO2またはSiOを含む酸化物系、窒化物系、エポキシ樹脂またはシリコン樹脂の中の少なくとも一つの物質を含むことを特徴とするLED素子。 - 前記窒化物系はSiN、AlN、GaN、InNまたはこれらの混合物の中の少なくとも一つを含むことを特徴とする請求項3に記載のLED素子。
- 基板上に形成された構造物が下に向かうように前記LEDチップをひっくり返したフリップチップ(flip chip)構造において、
青色光、緑色光、黄色光または赤色光の少なくとも一つまたは二つ以上を含む蛍光体が前記基板上に分布形成されており、
前記蛍光体分布はSiO2、SiOを含む酸化物系、窒化物系、エポキシ樹脂またはシリコン樹脂の中の少なくとも一つの物質を含むことを特徴とするLED素子。 - 前記窒化物系はSiN、AlN、GaN、InNまたはこれらの混合物の中の少なくとも一つを含むことを特徴とする請求項5に記載のLED素子。
- 前記青色光の蛍光体物質はBaMgAl10O17:Eu、Sr5(PO4)3Cl:Eu、ZnS:Agの中の少なくとも一つ以上を含むことを特徴とする請求項1ないし6に記載のLED素子。
- 前記緑色光の蛍光体物質はZnS:Cu、(Ca、Sr)S:Eu等の黄化物系、(Sr、Ba、Ca、Mg、Zn、Cd、Y、Sc、La)xSiyOz:(Eu、F、Mn、Ce、Pb)のシリケート(silicate)系またはBaMgAl10O17:Eu、Mnの中の少なくとも一つ以上を含むことを特徴とする請求項1ないし6に記載のLED素子。
(但し、ここでX、Y、Zは0から1まで変えることが可能で、括弧の中の元素は一つ以上で組合可能である。) - 前記黄色光の蛍光体物質はYAG系、TAG系を含むガーネット(garnet)系列、シリケート系列の中の少なくとも一つ以上を含むことを特徴とする請求項1ないし6に記載のLED素子。
- 前記赤色光の蛍光体物質は窒化物系、Y2O2S等の黄化物系、Y(V、P、B、Nb、Ta)O4:Eu3+の中の少なくとも一つ以上を含むことを特徴とする請求項1ないし6に記載のLED素子。
- 前記酸化物系はSiO2、SiO、Al2O3、ZnO、ClO、ITO、InOの中の一つ以上の物質を含むことを特徴とする請求項1ないし6に記載のLED素子。
- LEDチップから放出される主光を一つ以上の他の光波長に変換させる蛍光体が具備されたLED素子において、
n型あるいはp型の多層膜層(310)、発光層(313)、電極層(315)から成る発光構造物;
前記発光構造物の下に位置する支持基板(305):
前記発光構造物または基板の一側の下に配置される第1電極パッド;
前記電極層(315)の一側の上に配置される第2電極パッド;
前記発光構造物または基板の少なくとも一側に発光効率を向上させるための凹凸または散乱の構造;
前記発光構造物または基板の上に位置して、蛍光体として青色光、緑色光、黄色光または赤色光の少なくとも一つあるいは二つ以上を含めて、電極パッドを除外したLEDチップ上に分布形成されている蛍光体膜(330a);
を具備し、
前記蛍光体膜はSiO2,SiOを含む酸化物系、窒化物系、エポキシ樹脂またはシリコン樹脂の中の少なくとも一つの物質を含むことを特徴とするLED素子。 - 前記蛍光体膜はSiO2、SiO、Al2O3、ZnO、CIO、ITO、InOの中の一つ以上の物質を含むことを特徴とする請求項12に記載のLED素子。
- 前記蛍光体膜はSiN、AlN、GaN、InNまたはこれらの混合物の中の少なくとも一つを含むことを特徴とする請求項12に記載のLED素子。
- LEDチップから放出される主光を一つ以上の他の光波長に変換させる蛍光体が具備されたLED素子において、
透明電極層(315)、n型またはp型物質の多層膜層(310)、発光層(313)から成る発光構造物;
前記発光構造物の下に位置する支持基板(305);
前記LEDチップの一側の上に配置される第1電極パッド;
前記LEDチップの一側の下に配置される第2電極パッド;
前記LEDチップの上に位置して、蛍光体として青色光、緑色光、黄色光または赤色光の少なくとも一つまたは二つ以上を含めて、LEDチップ上に分布形成されている蛍光体膜(330a);
を具備し、
前記蛍光体膜はSiO2,SiOを含む酸化物系、窒化物系、エポキシ樹脂またはシリコン樹脂の中の少なくとも一つの物質を含むことを特徴とするLED素子。 - 前記蛍光体膜はSiO2、SiO、Al2O3、ZnO、CIO、ITO、InOの中の一つ以上の物質を含むことを特徴とする請求項15に記載のLED素子。
- 前記蛍光体膜はBaMgAl10O17:Eu、Sr5(PO4)3Cl:Eu、ZnS:Agの中の少なくとも一つ以上を含むことを特徴とする請求項12ないし16に記載のLED素子。
- 前記蛍光体膜はZnS:Cu、(Ca、Sr)S:Eu等の黄化物系、(Sr、Ba、Ca、Mg、Zn、Cd、Y、Sc、La)xSiyOz:(Eu、F、Mn、Ce、Pb)のシリケート系、またはBaMgAl10O17:Eu、Mnの中の少なくとも一つ以上を含むことを特徴とする請求項12ないし16に記載のLED素子。
(但し、ここでX、Y、Zは0から1まで変えることが可能で、括弧の中の元素は一つ以上で組合可能である。) - 前記蛍光体膜はYAG系、TAG系を含むガーネット系列、シリケート系列の中の少なくとも一つ以上を含むことを特徴とする請求項12ないし16に記載のLED素子。
- 前記蛍光体膜は窒化物系、Y2O2S等の黄化物系、Y(V、P、B、Nb、Ta)O4:Eu3+の中の少なくとも一つ以上を含むことを特徴とする請求項12ないし16に記載のLED素子。
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