JP2007092974A - スラスト気体軸受機構 - Google Patents
スラスト気体軸受機構 Download PDFInfo
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- JP2007092974A JP2007092974A JP2005286986A JP2005286986A JP2007092974A JP 2007092974 A JP2007092974 A JP 2007092974A JP 2005286986 A JP2005286986 A JP 2005286986A JP 2005286986 A JP2005286986 A JP 2005286986A JP 2007092974 A JP2007092974 A JP 2007092974A
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- 230000007246 mechanism Effects 0.000 title claims abstract description 45
- 230000002093 peripheral effect Effects 0.000 claims description 13
- 230000009467 reduction Effects 0.000 abstract description 5
- 239000012530 fluid Substances 0.000 description 28
- 230000008859 change Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000007480 spreading Effects 0.000 description 3
- 238000003892 spreading Methods 0.000 description 3
- 230000008602 contraction Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
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- 238000005480 shot peening Methods 0.000 description 1
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Abstract
【解決手段】中間軸受体20とベース50と、それらが向かい合う軸受隙間40とでスラスト気体軸受機構10が構成される。中間軸受体20の底面部には、気体供給口24、気体供給口24より大きな直径を有する減速用くぼみ26、複数の気体流路浅溝28が設けられる。気体供給口24から噴出する気体は減速用くぼみ26で減速された後、複数の気体流路浅溝28のそれぞれに導かれ、その細い浅溝に案内されて径方向に沿って流れ、終端部30で行き止まりとなった気体は、軸受隙間40に絞られながら漏れ出て、ベース50に対し中間軸受体20を浮上させる。
【選択図】図1
Description
Claims (3)
- ベースの気体受壁と、軸の底面部の気体受面との間の軸受隙間に気体を供給して軸をベースに対して浮上させ保持するスラスト気体軸受機構であって、
気体受壁又は気体受面に設けられる気体供給口と、
気体受壁又は気体受面に設けられ、気体供給口を囲む減速用くぼみと、
減速用くぼみを越えて軸受隙間の外周方向に向かって延び終端部を備える気体流路浅溝と、
を含むことを特徴とするスラスト気体軸受機構。 - 請求項1に記載のスラスト気体軸受機構において、
気体供給口は円形開口であり、
減速用くぼみは気体供給口の円形開口と同心で、円形開口の直径より大きな直径を有し、
気体流路浅溝は、気体供給口を中心として放射状に外周方向に向かって延びる複数の浅溝であり、
各気体流路浅溝の終端部は、浅溝の幅よりも円周方向に広がる形状を有することを特徴とするスラスト気体軸受機構。 - 請求項1に記載のスラスト気体軸受機構において、
減速用くぼみの深さと気体流路浅溝の深さとが同じであることを特徴とするスラスト気体軸受機構。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2005286986A JP4875878B2 (ja) | 2005-09-30 | 2005-09-30 | スラスト気体軸受機構 |
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JP2005286986A JP4875878B2 (ja) | 2005-09-30 | 2005-09-30 | スラスト気体軸受機構 |
Publications (2)
Publication Number | Publication Date |
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JP2007092974A true JP2007092974A (ja) | 2007-04-12 |
JP4875878B2 JP4875878B2 (ja) | 2012-02-15 |
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JP2005286986A Active JP4875878B2 (ja) | 2005-09-30 | 2005-09-30 | スラスト気体軸受機構 |
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JP (1) | JP4875878B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107269701A (zh) * | 2017-07-12 | 2017-10-20 | 哈尔滨工业大学 | 一种带气槽的平面气浮轴承 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03223519A (ja) * | 1990-01-29 | 1991-10-02 | Ind Technol Res Inst | 静圧軸受 |
JP2004144188A (ja) * | 2002-10-24 | 2004-05-20 | Nippon Steel Corp | 静圧気体軸受 |
JP2004169784A (ja) * | 2002-11-19 | 2004-06-17 | Nikon Corp | 軸受装置、ステージ装置及び露光装置 |
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2005
- 2005-09-30 JP JP2005286986A patent/JP4875878B2/ja active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03223519A (ja) * | 1990-01-29 | 1991-10-02 | Ind Technol Res Inst | 静圧軸受 |
JP2004144188A (ja) * | 2002-10-24 | 2004-05-20 | Nippon Steel Corp | 静圧気体軸受 |
JP2004169784A (ja) * | 2002-11-19 | 2004-06-17 | Nikon Corp | 軸受装置、ステージ装置及び露光装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107269701A (zh) * | 2017-07-12 | 2017-10-20 | 哈尔滨工业大学 | 一种带气槽的平面气浮轴承 |
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