JP2007073503A - 表示装置、及び表示装置の作製方法 - Google Patents
表示装置、及び表示装置の作製方法 Download PDFInfo
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- JP2007073503A JP2007073503A JP2006216399A JP2006216399A JP2007073503A JP 2007073503 A JP2007073503 A JP 2007073503A JP 2006216399 A JP2006216399 A JP 2006216399A JP 2006216399 A JP2006216399 A JP 2006216399A JP 2007073503 A JP2007073503 A JP 2007073503A
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Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
【解決手段】半導体層を形成し、半導体層上にゲート絶縁層を形成し、ゲート絶縁層上にゲート電極層を形成し、半導体層に接するソース電極層及びドレイン電極層を形成し、ソース電極層又はドレイン電極層に電気的に接続する第1の電極層を形成し、第1の電極層の一部、ゲート電極層、ソース電極層、ドレイン電極層上に無機絶縁層を形成し、無機絶縁層及び第1の電極層にプラズマ処理を行い、プラズマ処理を行った無機絶縁層及び第1の電極層上に電界発光層を形成し、電界発光層上に第2の電極層を形成し、半導体装置を作製する。
【選択図】図1
Description
本実施の形態における表示装置の作製方法を、図1を用いて詳細に説明する。
本実施の形態における表示装置の作製方法を、図2を用いて詳細に説明する。本実施の形態では、実施の形態1と隔壁となる絶縁層の構造が異なる例を示す。よって、同一部分又は同様な機能を有する部分の繰り返しの説明は省略する。
本実施の形態における表示装置の作製方法を、図5乃至図10、図16、図17を用いて詳細に説明する。
本発明の実施の形態を、図8乃至図10を用いて説明する。本実施の形態は、実施の形態3で作製した表示装置において、第2の層間絶縁層(絶縁膜181及び絶縁膜182)を形成しない例を示す。よって、同一部分又は同様な機能を有する部分の繰り返しの説明は省略する。
本発明を適用して発光素子を有する表示装置を形成することができるが、該発光素子から発せられる光は、下方放射、上方放射、両方放射のいずれかを行う。本実施の形態では、両方放射型、上方放射型の例を、図14及び図15を用いて説明する。
本発明の実施の形態を、図13を用いて説明する。本実施の形態は、実施の形態1で作製した表示装置において、薄膜トランジスタのゲート電極層の構造が異なる例を示す。よって、同一部分又は同様な機能を有する部分の繰り返しの説明は省略する。
本発明の実施の形態を、図11を用いて説明する。本実施の形態は、実施の形態3で作製した表示装置において、薄膜トランジスタをチャネルエッチ型逆スタガ型薄膜トランジスタを用い、第1の層間絶縁層及び第2の層間絶縁層を形成しない例を示す。よって、同一部分又は同様な機能を有する部分の繰り返しの説明は省略する。
走査線側入力端子部と信号線側入力端子部とに保護ダイオードを設けた一態様について図24を参照して説明する。図24において画素2702にはTFT501、TFT502、容量素子504、画素電極層503が設けられている。
本発明によって形成される表示装置によって、テレビジョン装置を完成させることができる。図25はテレビジョン装置(本実施の形態ではELテレビジョン装置)の主要な構成を示すブロック図を示している。表示パネルには、図16(A)で示すような構成として画素部のみが形成されて走査線側駆動回路と信号線側駆動回路とが、図17(B)のようなTAB方式により実装される場合と、図17(A)のようなCOG方式により実装される場合と、図16(B)に示すようにSASでTFTを形成し、画素部と走査線側駆動回路を基板上に一体形成し信号線側駆動回路を別途ドライバICとして実装する場合、また図16(C)のように画素部と信号線側駆動回路と走査線側駆動回路を基板上に一体形成する場合などがあるが、どのような形態としても良い。
本実施の形態を図21を用いて説明する。本実施の形態は、実施の形態3乃至7で作製する表示装置を有するパネルを用いたモジュールの例を示す。
本実施の形態を図22を用いて説明する。図22は、この実施の形態10で作製するモジュールを含む無線を用いた持ち運び可能な小型電話機(携帯電話)の一態様を示している。パネル900はハウジング981に脱着自在に組み込んでモジュール999と容易に組み合わせできるようにしている。ハウジング981は組み入れる電子機器に合わせて、形状や寸法を適宜変更することができる。
本発明を適用して、様々な表示装置を作製することができる。即ち、それら表示装置を表示部に組み込んだ様々な電子機器に本発明を適用できる。
本発明の発光素子には本実施の形態では、本発明の発光素子に適用することのできる他の構成を、図28及び図29を用いて説明する。
Claims (11)
- 半導体層を形成し、
前記半導体層上にゲート絶縁層を形成し、
前記ゲート絶縁層上にゲート電極層を形成し、
前記半導体層に接するソース電極層及びドレイン電極層を形成し、
前記ソース電極層又は前記ドレイン電極層に電気的に接続する第1の電極層を形成し、
前記第1の電極層の一部、前記ゲート電極層、前記ソース電極層、前記ドレイン電極層上に無機絶縁層を形成し、
前記無機絶縁層及び前記第1の電極層にプラズマ処理を行い、
前記プラズマ処理を行った無機絶縁層及び第1の電極層上に電界発光層を形成し、
前記電界発光層上に第2の電極層を形成することを特徴とする表示装置の作製方法。 - 半導体層を形成し、
前記半導体層上にゲート絶縁層を形成し、
前記ゲート絶縁層上にゲート電極層を形成し、
前記半導体層に接するソース電極層及びドレイン電極層を形成し、
前記ソース電極層又は前記ドレイン電極層に電気的に接続する第1の電極層を形成し、
前記第1の電極層、前記ゲート電極層、前記ソース電極層、前記ドレイン電極層上に無機絶縁膜を形成し、
前記無機絶縁膜をエッチングし、前記第1の電極層に達する開口有する無機絶縁層を形成し、
前記無機絶縁層及び前記第1の電極層にプラズマ処理を行い、
前記プラズマ処理を行った無機絶縁層及び第1の電極層上に電界発光層を形成し、
前記電界発光層上に第2の電極層を形成することを特徴とする表示装置の作製方法。 - 半導体層を形成し、
前記半導体層上にゲート絶縁層を形成し、
前記ゲート絶縁層上にゲート電極層を形成し、
前記半導体層に接するソース電極層及びドレイン電極層を形成し、
前記ソース電極層又は前記ドレイン電極層に電気的に接続する第1の電極層を形成し、
前記第1の電極層の一部、前記ゲート電極層、前記ソース電極層、前記ドレイン電極層上に第1の無機絶縁層及び第2の無機絶縁層を積層して形成し、
前記第1の無機絶縁層、前記第2の無機絶縁層及び前記第1の電極層にプラズマ処理を行い、
前記プラズマ処理を行った前記第1の無機絶縁層、前記第2の無機絶縁層及び前記第1の電極層上に電界発光層を形成し、
前記電界発光層上に第2の電極層を形成することを特徴とする表示装置の作製方法。 - 半導体層を形成し、
前記半導体層上にゲート絶縁層を形成し、
前記ゲート絶縁層上にゲート電極層を形成し、
前記半導体層に接するソース電極層及びドレイン電極層を形成し、
前記ソース電極層又は前記ドレイン電極層に電気的に接続する第1の電極層を形成し、
前記第1の電極層、前記ゲート電極層、前記ソース電極層、前記ドレイン電極層上に第1の無機絶縁膜及び第2の無機絶縁膜を積層して形成し、
前記第1の無機絶縁膜及び前記第2の無機絶縁膜をエッチングし、前記第1の電極層に達する開口を有する第1の無機絶縁層及び第2の無機絶縁層を形成し、
前記第1の無機絶縁層、前記第2の無機絶縁層及び前記第1の電極層にプラズマ処理を行い、
前記プラズマ処理を行った前記第1の無機絶縁膜、前記第2の無機絶縁膜及び前記第1の電極層上に電界発光層を形成し、
前記電界発光層上に第2の電極層を形成することを特徴とする表示装置の作製方法。 - 請求項1または請求項2において、前記プラズマ処理は、窒素雰囲気又は酸素雰囲気下で行い、前記無機絶縁層及び前記第1の電極層表面を窒化又は酸化することを特徴とする表示装置の作製方法。
- 請求項3または請求項4において、前記プラズマ処理は、窒素雰囲気又は酸素雰囲気下で行い、前記第1の無機絶縁層、前記第2の無機絶縁層及び前記第1の電極層表面を窒化又は酸化することを特徴とする表示装置の作製方法。
- 請求項1乃至6いずれか一項において、前記ゲート絶縁層を形成後、前記ゲート絶縁層及び前記ゲート絶縁層にプラズマ処理を行うことを特徴とする表示装置の作製方法。
- 請求項1乃至7いずれか一項において、前記ゲート電極層を形成後、前記ゲート絶縁層にプラズマ処理を行うことを特徴とする表示装置の作製方法。
- 請求項7または請求項8において、前記プラズマ処理は、窒素雰囲気又は酸素雰囲気下で行い、前記ゲート絶縁層表面を窒化又は酸化することを特徴とする表示装置の作製方法。
- 半導体層と、ゲート絶縁層と、ゲート電極層と、
前記半導体層と接するソース電極層及びドレイン電極層と、
前記ソース電極層又は前記ドレイン電極層に電気的に接続する第1の電極層と、
前記第1の電極層の一部、前記ゲート電極層、前記ソース電極層及び前記ドレイン電極層上に第1の無機絶縁層と、
前記第1の無機絶縁層上に第2の無機絶縁層とを有し、
前記第1の無機絶縁層の上端の位置と前記第2の無機絶縁層の下端の位置とは一致することを特徴とする表示装置。 - 請求項10において、前記第1の無機絶縁層及び前記第2の無機絶縁層の端部はテーパー形状を有し、そのテーパー角は40度以上であることを特徴とする表示装置。
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