JP2007051862A - 冷媒中の水分除去装置及び検査装置 - Google Patents
冷媒中の水分除去装置及び検査装置 Download PDFInfo
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- JP2007051862A JP2007051862A JP2006120592A JP2006120592A JP2007051862A JP 2007051862 A JP2007051862 A JP 2007051862A JP 2006120592 A JP2006120592 A JP 2006120592A JP 2006120592 A JP2006120592 A JP 2006120592A JP 2007051862 A JP2007051862 A JP 2007051862A
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- refrigerant
- moisture
- pipe
- heat exchanger
- inspection apparatus
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- 239000003507 refrigerant Substances 0.000 title claims abstract description 174
- 238000007689 inspection Methods 0.000 title claims abstract description 42
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 28
- 239000002918 waste heat Substances 0.000 claims abstract description 8
- 239000003463 adsorbent Substances 0.000 claims description 15
- 238000011144 upstream manufacturing Methods 0.000 claims description 12
- 238000001179 sorption measurement Methods 0.000 abstract description 6
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 238000001816 cooling Methods 0.000 description 22
- 239000004065 semiconductor Substances 0.000 description 12
- 238000005057 refrigeration Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 239000002826 coolant Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 229910021536 Zeolite Inorganic materials 0.000 description 3
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000010457 zeolite Substances 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 239000000110 cooling liquid Substances 0.000 description 2
- 235000019441 ethanol Nutrition 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000012809 cooling fluid Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B43/00—Arrangements for separating or purifying gases or liquids; Arrangements for vaporising the residuum of liquid refrigerant, e.g. by heat
- F25B43/003—Filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
- F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B29/00—Combined heating and refrigeration systems, e.g. operating alternately or simultaneously
- F25B29/003—Combined heating and refrigeration systems, e.g. operating alternately or simultaneously of the compression type system
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Thermal Sciences (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Combustion & Propulsion (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Analytical Chemistry (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Gases (AREA)
Abstract
【解決手段】本発明の水分除去装置20は、循環配管12から冷媒の一部を取り出して迂回させる迂回配管21と、この迂回配管21に設けられ且つ冷凍機14の廃熱を利用して迂回配管21を流れる冷媒を加熱する第2熱交換器22と、この熱交換器22の下流側に配置され且つ冷媒中に混入した水分を吸着する水分吸着体23と、を備えている。
【選択図】図1
Description
本実施形態の検査装置10は、例えば図1に示すように、被処理体(例えば、半導体ウエハ)Wを載置する載置体11と、載置体11と循環配管12を介して接続され且つ載置体11内へ冷媒を循環させるポンプ13と、ポンプ13を介して載置体11から循環配管12を循環する昇温後の冷媒を元の温度まで冷却する冷凍機14の第1熱交換器14Aと、を備え、載置体11の内部へ冷媒を循環させて、載置体11上の半導体ウエハWを冷却して所定の温度で半導体ウエハWの電気的特性検査を行うように構成されている。載置体11は、検査の際に、半導体ウエハWとプローブカード(図示せず)とを接触させるために水平方向及び上下方向に移動するようになっている。
本実施形態の検査装置10Aは、例えば図2に示すように、循環配管12に配置された低温冷媒タンク15と、この低温冷媒タンク15の上流側及び下流側の双方に配置された第1、第2ポンプ13A、13Bと、を備えている以外は、第1の実施形態と実質的に同様に構成されている。従って、水分除去装置20は、図1に示すものと同一の機能を果たすため、第1の実施形態と同一部分または相当部分には同一符号を付し、その説明を省略する。
本実施形態の検査装置10Bは、例えば図3に示すように、載置体(図示せず)に冷媒を循環させる循環配管12と、循環配管12に配置された低温冷媒タンク15と、この低温冷媒タンク15の上流側及び下流側の双方に配置された第1、第2ポンプ13A、13Bと、第1ポンプ13Aと冷温冷媒タンク15の間に配置された冷凍機14及び水分除去装置20と、を備え、第2の実施形態に準じて構成されている。従って、第2の実施形態と同様に、第1ポンプ13Aによって低温冷媒タンク15内の冷媒を吸引して低温冷媒タンク15へ戻す間に、冷凍機14が冷媒を冷却すると共に水分除去装置20が冷媒の一部から水分を除去する。
11 載置体(被冷却体)
12 循環配管
14 冷凍機
20 水分除去装置
21 迂回配管
22 第2熱交換器
23 水分吸着体
24A 第1締切バルブ(第1バルブ)
24B 第2締切バルブ(第2バルブ)
25 キャピラリーチューブ(流量制限手段)
26 バイパスバルブ(第3バルブ)
Claims (8)
- 冷媒が被冷却体と冷凍機との間を、循環配管を介して循環する間に、上記冷媒中に混入した水分を除去する水分除去装置において、上記循環配管から上記冷媒の一部を取り出して迂回させる迂回配管と、この迂回配管に設けられ且つ上記冷凍機の廃熱を利用して上記迂回配管を流れる上記冷媒を加熱する熱交換器と、この熱交換器の下流側に配置され且つ上記冷媒中に混入した水分を吸着する水分吸着体と、を備えたことを特徴とする冷媒中の水分除去装置。
- 上記水分吸着体の上流側及び下流側それぞれに第1、第2バルブを設けたことを特徴とする請求項1に記載の冷媒中の水分除去装置。
- 上記第2バルブの下流側に上記冷媒の流量を制限する手段を設けたことを特徴とする請求項1または請求項2に記載の冷媒中の水分除去装置。
- 上記流量制限手段に第3バルブを併設したことを特徴とする請求項3に記載の冷媒中の水分除去装置。
- 被処理体を載置する載置体と、この載置体との間で循環配管を介して循環する間に昇温した冷媒を冷却する冷凍機と、上記冷媒が上記循環配管を循環する間に、上記冷媒中に混入した水分を除去する水分除去装置と、を備え、上記載置体上で上記被処理体を一定の温度に保持して、上記被処理体の検査を行う検査装置であって、上記水分除去装置は、上記循環配管から上記冷媒の一部を取り出して迂回させる迂回配管と、この迂回配管に設けられ且つ上記冷凍機の廃熱を利用して上記迂回配管を流れる上記冷媒を加熱する熱交換器と、この熱交換器の下流側に配置され且つ上記冷媒中に混入した水分を吸着する水分吸着体と、を備えたことを特徴とする検査装置。
- 上記水分吸着体の上流側及び下流側それぞれに第1、第2バルブを設けたことを特徴とする請求項5に記載の検査装置。
- 上記第2バルブの下流側に上記冷媒の流量を制限する流量手段を設けたことを特徴とする請求項5または請求項6に記載の検査装置。
- 上記流量制限手段に第3バルブを併設したことを特徴とする請求項7に記載の検査装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006120592A JP4828293B2 (ja) | 2005-07-19 | 2006-04-25 | 冷媒中の水分除去装置及び検査装置 |
KR1020060065669A KR100835018B1 (ko) | 2005-07-19 | 2006-07-13 | 맥동 경감 장치 및 검사 장치 |
KR1020060065635A KR100751603B1 (ko) | 2005-07-19 | 2006-07-13 | 냉매 중의 수분 제거 장치 및 검사 장치 |
US11/488,039 US7818972B2 (en) | 2005-07-19 | 2006-07-18 | Water removal apparatus and inspection apparatus including same |
TW095126267A TW200716927A (en) | 2005-07-19 | 2006-07-18 | Water removal apparatus and inspection apparatus including the same |
US11/488,134 US7641453B2 (en) | 2005-07-19 | 2006-07-18 | Pulsation reducing apparatus and inspection apparatus |
EP06015024.0A EP1746369B1 (en) | 2005-07-19 | 2006-07-19 | Water removal apparatus and inspection apparatus including same |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005208293 | 2005-07-19 | ||
JP2005208293 | 2005-07-19 | ||
JP2006120592A JP4828293B2 (ja) | 2005-07-19 | 2006-04-25 | 冷媒中の水分除去装置及び検査装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007051862A true JP2007051862A (ja) | 2007-03-01 |
JP2007051862A5 JP2007051862A5 (ja) | 2009-05-21 |
JP4828293B2 JP4828293B2 (ja) | 2011-11-30 |
Family
ID=37044062
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006120592A Active JP4828293B2 (ja) | 2005-07-19 | 2006-04-25 | 冷媒中の水分除去装置及び検査装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7818972B2 (ja) |
EP (1) | EP1746369B1 (ja) |
JP (1) | JP4828293B2 (ja) |
KR (1) | KR100751603B1 (ja) |
TW (1) | TW200716927A (ja) |
Cited By (2)
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JP5626820B1 (ja) * | 2014-06-16 | 2014-11-19 | 克延 村上 | 炭素化合物からの水分子除去方法 |
JP5938506B1 (ja) * | 2015-09-17 | 2016-06-22 | 株式会社日立国際電気 | 基板処理システム、半導体装置の製造方法、プログラム及び記録媒体 |
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2006
- 2006-04-25 JP JP2006120592A patent/JP4828293B2/ja active Active
- 2006-07-13 KR KR1020060065635A patent/KR100751603B1/ko active IP Right Grant
- 2006-07-18 US US11/488,039 patent/US7818972B2/en not_active Expired - Fee Related
- 2006-07-18 TW TW095126267A patent/TW200716927A/zh unknown
- 2006-07-19 EP EP06015024.0A patent/EP1746369B1/en active Active
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JPH0350481A (ja) * | 1989-07-17 | 1991-03-05 | Nec Corp | 冷却装置 |
JPH07235588A (ja) * | 1994-02-24 | 1995-09-05 | Hitachi Ltd | ウエハチャック及びそれを用いたプローブ検査方法 |
JPH08261575A (ja) * | 1995-03-22 | 1996-10-11 | Sanyo Electric Co Ltd | 非共沸冷媒混合物を用いた冷凍装置 |
JPH1130458A (ja) * | 1997-07-11 | 1999-02-02 | Matsushita Electric Ind Co Ltd | 空調機及びその使用方法 |
JP2001050624A (ja) * | 1999-06-02 | 2001-02-23 | Advantest Corp | 冷却装置 |
Cited By (5)
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JP5626820B1 (ja) * | 2014-06-16 | 2014-11-19 | 克延 村上 | 炭素化合物からの水分子除去方法 |
JP5938506B1 (ja) * | 2015-09-17 | 2016-06-22 | 株式会社日立国際電気 | 基板処理システム、半導体装置の製造方法、プログラム及び記録媒体 |
JP2017059714A (ja) * | 2015-09-17 | 2017-03-23 | 株式会社日立国際電気 | 基板処理システム、半導体装置の製造方法、プログラム及び記録媒体 |
KR20170033773A (ko) * | 2015-09-17 | 2017-03-27 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치, 반도체 장치의 제조 방법 및 기록 매체 |
KR101880516B1 (ko) * | 2015-09-17 | 2018-07-20 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치, 반도체 장치의 제조 방법 및 기록 매체 |
Also Published As
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US20070030879A1 (en) | 2007-02-08 |
KR100751603B1 (ko) | 2007-08-22 |
JP4828293B2 (ja) | 2011-11-30 |
TWI370232B (ja) | 2012-08-11 |
KR20070011109A (ko) | 2007-01-24 |
TW200716927A (en) | 2007-05-01 |
US7818972B2 (en) | 2010-10-26 |
EP1746369A2 (en) | 2007-01-24 |
EP1746369B1 (en) | 2017-08-30 |
EP1746369A3 (en) | 2014-05-07 |
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