JP2007033240A - Flaw detecting method of sheet and flaw detector - Google Patents

Flaw detecting method of sheet and flaw detector Download PDF

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JP2007033240A
JP2007033240A JP2005217160A JP2005217160A JP2007033240A JP 2007033240 A JP2007033240 A JP 2007033240A JP 2005217160 A JP2005217160 A JP 2005217160A JP 2005217160 A JP2005217160 A JP 2005217160A JP 2007033240 A JP2007033240 A JP 2007033240A
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axis
light projecting
angle
plate
light
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Takayuki Hatanaka
孝行 畑中
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Canon Chemicals Inc
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Canon Chemicals Inc
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<P>PROBLEM TO BE SOLVED: To provide a flaw detecting method of a sheet capable of performing accurate visual inspection regardless of the cutting angle of the side surface of the sheet and the flatness of a cutting surface. <P>SOLUTION: The angle θ1 formed by the floodlight projecting axis 15a of a floodlight projector 15 with respect to the side surface part (observation surface 12a) including the measuring point of an electrophotograpahic blade 12 within a plane containing an XY axis is set to a range from above 25° to 45° or below with respect to one floodlight projector 15 and the angle θ2 formed by the floodlight projecting axis 15a of a floodlight projector 15 with respect to the observation surface is set to a range from above 80° to 110° or below with respect to one another floodlight projector 15. Further, the angle θ3 inclined in the direction on a Z-axis of the floodlight projection angle 15a of the floodlight projector 15 with respect to the horizontal surface including the measuring point of the electrophotographic blade 12 is set to a range from 1° to below 10° with respect to one floodlight projector 15 and the angle θ4 inclined in the downward direction of the Z-axis of the floodlight projection axis 15a of the floodlight projector 15 with respect to the horizontal surface is set to a range from above 1° to below 10° with respect to one another floodlight projection 15. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、透明または半透明の板状体（例えば電子写真用ブレード）に光を照射して行なう欠陥検出方法及び欠陥検出装置に関する。   The present invention relates to a defect detection method and a defect detection apparatus that are performed by irradiating a transparent or translucent plate-like body (for example, an electrophotographic blade) with light.

板状体の側面の状態を検査する方法として、一般に数々の方法が知られているが、ＣＣＤカメラにより、板状体側面部を撮影し、その画像を演算処理することによって板状体側面の状態を検査する方法が採用されている。この場合、例えばＣＣＤカメラで、撮影した画像中において被検査面を示している画素から、１０点程度選択してそれら輝度の平均値を算出し、標準値として定め、測定対象点の画素の輝度をこの標準値と比較して、板状体側面の状態を検査する方法が行なわれている（例えば特許文献１参照。）。   As a method for inspecting the state of the side surface of the plate-like body, a number of methods are generally known. However, the side surface portion of the plate-like body is photographed by a CCD camera, and the image is processed. A method for inspecting the condition is adopted. In this case, for example, with a CCD camera, about 10 points are selected from the pixels indicating the surface to be inspected in the photographed image, an average value of these luminances is calculated, set as a standard value, and the luminance of the pixel at the measurement target point Is compared with this standard value, and a method for inspecting the state of the side surface of the plate-like body has been performed (see, for example, Patent Document 1).

また、検査装置を用いて行なう方法に関しては、ＣＣＤカメラを用いた電子撮像装置による外観検査手法も明らかにされている（例えば特許文献２参照。）。これらは、被検査物に照射した光が、被検査物に欠陥があった場合には、その欠陥部分で光の乱反射が起こることを利用し、それら乱反射を撮像装置により撮影し、映像信号化し、その映像信号を２値化処理することにより、欠陥部分を検出する方法である。
特開2003-222595号公報 特開平4-305144号公報 In addition, regarding a method performed using an inspection apparatus, an appearance inspection method using an electronic imaging apparatus using a CCD camera has also been clarified (for example, see Patent Document 2). These are based on the fact that the light irradiated to the inspection object has a defect in the inspection object, and the irregular reflection of the light takes place at the defective portion. In this method, a defective portion is detected by binarizing the video signal.
JP 2003-222595 A Japanese Unexamined Patent Publication No. 4-305144

しかしながら、上記のような検査方法によると、室内照明、太陽光などといった外部環境の変化、画像を照明する為の照明の光量のムラにより、検査結果が一定しないという課題がある。また、厚みのある透明または半透明の板状体側面部に対して、正確に検査が出来るのは板状体側面部の切断角度が板状体平面部に対して垂直なときで、且つ板状体側面部が均一に平面なときのみであり、板状体側面部の切断状況の違い、つまり板状体側面部の切断角度の違い、切断面の平面度の違いなどがあると、板状体に照射し反射した光がカメラに届かず、十分な光量が得られない為、正確な外観検査が出来ないという課題があった。   However, according to the inspection method as described above, there is a problem that the inspection result is not constant due to changes in the external environment such as indoor lighting and sunlight, and unevenness in the amount of light for illuminating the image. In addition, it is possible to accurately inspect a thick transparent or translucent plate-like body side portion when the cutting angle of the plate-like body side surface portion is perpendicular to the plate-like body plane portion and the plate. Only when the side surface of the body is uniformly flat, and there is a difference in the cutting situation of the side surface of the plate body, that is, a difference in the cutting angle of the side surface of the plate body, a difference in the flatness of the cutting surface, etc. There is a problem in that an accurate appearance inspection cannot be performed because the light that is irradiated and reflected on the body does not reach the camera and a sufficient amount of light cannot be obtained.

そこで本発明は、板状体側面に対して、板状体側面部の切断角の違い、板状体側面部の切断した側面の平面度の違いに対しても、反射する光量を一定化させ正確な外観検査を可能にした板状体板状体欠陥検出方法及び板状体欠陥検出装置を提供することを目的とする。   Therefore, the present invention makes the amount of light reflected constant even with respect to the difference in the cutting angle of the plate-like body side surface and the flatness of the cut side surface of the plate-like body side surface with respect to the plate-like body side surface. It is an object of the present invention to provide a plate-like body defect detection method and a plate-like body defect detection apparatus that enable accurate appearance inspection.

上記目的を達成するための本発明は、投光手段と、撮像手段とを少なくとも有し、該投光手段にて板状体に投光し該板状体の側面部で反射させ、反射した光を撮像手段で撮像して得られた画像を用い、画像処理により板状体の側面部における欠陥部を検出する、板状体の欠陥検出方法および装置を前提としている。このような方法および装置において、板状体の測定点を含む水平面に対して直交する軸をＺ軸とし、該板状体の測定点を含む水平面で該Ｚ軸と直交する２軸をＸ軸、Ｙ軸としたときに、投光手段を２つ以上用い、このうち１つの投光手段が、Ｘ軸とＹ軸を含む平面内において板状体の測定点を含む検出面に対して該１つの投光手段の投光軸がなす角度θ１が鋭角になり、かつ、１つの投光手段の投光軸がＺ軸方向へ傾斜する角度θ３が１度を超え１０度以下になるように配置されている。さらに、もう１つの投光手段が、Ｘ軸とＹ軸を含む平面内において前記板状体の測定点を含む検出面に対して該もう１つの投光手段の光軸がなす角度θ２が８０度を超え１１０度以下になり、かつ、もう１つの投光手段の投光軸がＺ軸方向へ傾斜する角度θ４が１度を超え１０度以下になるように配置されている。   In order to achieve the above object, the present invention has at least a light projecting unit and an image capturing unit. The light projecting unit projects the light onto a plate-like body, reflects it on the side surface of the plate-like body, and reflects the light. It is premised on a defect detection method and apparatus for a plate-like body that uses an image obtained by imaging light with an image pickup means and detects a defective portion in a side surface portion of the plate-like body by image processing. In such a method and apparatus, the axis orthogonal to the horizontal plane including the measurement point of the plate-like body is defined as the Z axis, and the two axes orthogonal to the Z axis in the horizontal plane including the measurement point of the plate-like body are defined as the X axis. , When using the Y axis, two or more light projecting means are used, and one of the light projecting means is connected to the detection surface including the measurement point of the plate-like body in the plane including the X axis and the Y axis. The angle θ1 formed by the light projecting axis of one light projecting means is an acute angle, and the angle θ3 at which the light projecting axis of one light projecting means is inclined in the Z-axis direction is greater than 1 degree and less than 10 degrees. Has been placed. Furthermore, the angle θ2 formed by the optical axis of the other light projecting unit with respect to the detection surface including the measurement point of the plate-like body in the plane including the X axis and the Y axis is 80. The angle θ4 at which the light projecting axis of the other light projecting means tilts in the Z-axis direction is more than 1 degree and 10 degrees or less.

このように投光手段を設置することにより、板状体側面部の切断角の違い、板状体側面部の切断した側面の平面度の違いがあっても、反射する光量がムラを生じず、正確な外観検査を行うことができる。   By installing the light projecting means in this way, even if there is a difference in the cutting angle of the side surface of the plate-like body and a difference in the flatness of the cut side surface of the plate-like body side surface, the amount of reflected light will not be uneven. Accurate appearance inspection can be performed.

以上のように本発明によれば、電子写真用クリーニングブレード、電子写真用ワイパーブレードなどの透明または半透明の板状体の側面の切断角度、切断面の平面度に関わらず、外観を検査することができる。   As described above, according to the present invention, the appearance is inspected regardless of the cutting angle and the flatness of the cut surface of a transparent or translucent plate-like body such as an electrophotographic cleaning blade or an electrophotographic wiper blade. be able to.

以下に好ましい実施の形態を挙げて本発明を更に詳しく説明する。   Hereinafter, the present invention will be described in more detail with reference to preferred embodiments.

本実施形態においては、撮影手段としてCCDカメラを使用し、撮像手段の撮影範囲を板状体側面の検査対象範囲内に設置する。なお、本発明における撮像手段としてはCCDカメラに限定されない。   In the present embodiment, a CCD camera is used as the imaging unit, and the imaging range of the imaging unit is set within the inspection target range on the side surface of the plate-like body. The imaging means in the present invention is not limited to a CCD camera.

本実施形態の検査対象物である板状体としては、電子写真用ブレードを用いたが、板状体のものであれば、本発明はこれに限定されるものではない。   Although the electrophotographic blade is used as the plate-like body that is the inspection object of the present embodiment, the present invention is not limited to this as long as it is a plate-like body.

検査時には電子写真用ブレードを移動ステージにより移動させることにより、撮像手段が電子写真用ブレードの検査対象範囲場所に対し逐次撮影を行い、検査対象範囲全域を撮影する。   At the time of inspection, the electrophotographic blade is moved by the moving stage, so that the imaging unit sequentially captures the inspection target area of the electrophotographic blade, and images the entire inspection target area.

その撮像手段で撮像された複数の画像において、欠陥がある場合には、移動ステージより出されているトリガより、取り込み画像番号、及び欠陥が発見された画像における位置情報を算出し、検査物における不良箇所の位置情報を得る。同時に、欠陥の大きさ、１回の検査における欠陥の数等も記憶して表示可能としておく。   If there are defects in the plurality of images captured by the imaging means, the captured image number and position information in the image where the defect is found are calculated from the trigger issued from the moving stage, Obtain the location information of the defective part. At the same time, the size of the defect, the number of defects in one inspection, and the like are stored and displayed.

本発明の特徴的なところは、電子写真用ブレードの測定点を含む水平面に対して直交する軸をＺ軸とし、該電子写真用ブレードの測定点を含む水平面で該Ｚ軸と直交する２軸をＸ軸、Ｙ軸としたときに、該投光手段を２つ以上用い、このうち１つの投光手段を、Ｘ軸とＹ軸を含む平面内において該１つの投光手段の光軸と前記電子写真用ブレードの測定点を含む側面部とがなす角度θ１が鋭角になり、かつ、前記１つの投光手段の光軸のＺ軸方向へ傾斜する角度θ３が１度を超え１０度以下になるように配置し、さらに、もう１つの投光手段を、Ｘ軸とＹ軸を含む平面内において該もう１つの投光手段の光軸と前記電子写真用ブレードの測定点を含む側面部とがなす角度θ２が８０度を超え１１０度以下になり、かつ、前記もう１つの投光手段のＺ軸方向へ傾斜する角度θ４が１度を超え１０度以下になるように配置することにより、電子写真用ブレード側面に対して、切断角の違い、厚みの違いに関わらず、反射する光量を一定化させ、電子写真用ブレード側面の外観を検査可能にした要素を導入した点にある。   A characteristic feature of the present invention is that an axis orthogonal to a horizontal plane including the measurement point of the electrophotographic blade is a Z axis, and two axes orthogonal to the Z axis are a horizontal plane including the measurement point of the electrophotographic blade. Are two or more of the light projecting means, and one of the light projecting means is defined as an optical axis of the one light projecting means in a plane including the X axis and the Y axis. An angle θ1 formed by the side surface portion including the measurement point of the electrophotographic blade is an acute angle, and an angle θ3 inclined in the Z-axis direction of the optical axis of the one light projecting unit is more than 1 degree and less than 10 degrees. Further, the other light projecting means is disposed in a plane including the X axis and the Y axis, and the side surface portion includes the optical axis of the other light projecting means and the measurement point of the electrophotographic blade. The angle θ2 formed by the angle is greater than 80 degrees and equal to or less than 110 degrees, and the other light projecting means. By arranging the angle θ4 inclined in the Z-axis direction to be more than 1 degree and not more than 10 degrees, the amount of light reflected can be reduced regardless of the difference in cutting angle and thickness with respect to the side surface of the electrophotographic blade. It is in the point which introduced the element which made it constant and inspected the external appearance of the blade for electrophotography.

本発明においては、対象となる透明ないしは半透明の電子写真用ブレードの持つ製品としての公差の観点から、撮像した画像において、透明ないしは半透明の電子写真用ブレード側面よりの反射光が電子写真用ブレードの切断角度の違いによっても撮像手段に入射可能な撮像手段の傾斜配置角度、及び撮像手段の被写界深度を設定し、各々の特徴的な欠陥画像を取り込めるよう、レンズ倍率及び、レンズ光量絞り、投光手段の光量、投光手段の照射範囲との合体構成に苦慮した。   In the present invention, from the viewpoint of tolerance as a product possessed by the target transparent or translucent electrophotographic blade, reflected light from the side surface of the transparent or translucent electrophotographic blade is used for electrophotography in the captured image. The lens magnification and lens light quantity are set so that the characteristic angle of the image pickup means can be captured by setting the tilting angle of the image pickup means that can enter the image pickup means and the depth of field of the image pickup means depending on the blade cutting angle. We struggled with the combined structure of the aperture, the light quantity of the light projecting means, and the irradiation range of the light projecting means.

すなわち、単に、電子写真用ブレードに対して投光手段の光軸と撮像手段の傾斜配置角度を合わせればよいのではなく、適合配置があった。   That is, it is not only necessary to match the optical axis of the light projecting unit and the inclination arrangement angle of the image pickup unit with respect to the electrophotographic blade, but there is an appropriate arrangement.

投光手段の傾斜配置角度は単に設定すればよいのではなく、撮像した画像において、十分な光量が得られるような角度になるように配置する必要がある。なお、投光手段の光軸と撮像手段の傾斜配置角度の関係は実験的に最適値は得られる。   The inclination arrangement angle of the light projecting means is not simply set, but it is necessary to arrange it so that a sufficient amount of light is obtained in the captured image. Note that an optimum value is experimentally obtained for the relationship between the optical axis of the light projecting means and the inclination arrangement angle of the imaging means.

電子写真用ブレード測定点を含む側面部（検出面）とそれぞれの投光手段のなす角度θ１，θ２については、透明または半透明の電子写真用ブレード側面部に投光し反射した光が十分撮像手段に入るような角度にする必要があり、また同時に、電子写真用ブレード側面部の切断角度の違い、切断面の平面度の違いなどによって側面方向に変化が生じる場合においても撮像手段に十分な光量が入ることを要する。   With respect to the angles θ1 and θ2 between the side surface portion (detection surface) including the electrophotographic blade measurement point and each light projecting means, the light projected and reflected on the side surface portion of the transparent or translucent electrophotographic blade is sufficiently imaged. It is necessary to set the angle so as to enter the means, and at the same time, it is sufficient for the imaging means even when there is a change in the side direction due to the difference in the cutting angle of the side surface part of the electrophotographic blade, the difference in flatness of the cutting surface, etc. It requires light to enter.

１つの投光手段については電子写真用ブレード測定点を含む側面部（検出面）と該投光手段のなす角θ１が鋭角になるように、また、他の１つの投光手段については電子写真用ブレード測定点を含む側面部（検出面）と該投光手段のなす角θ２が４５度を超え１３５度以下になるように設定することが出来るが、透明または半透明の電子写真用ブレード側面部に投光し反射した光が十分撮像手段に入るようにするという観点、及び、検出対象としている欠陥の高さ方向の検出分解能の観点より、１つの投光手段については電子写真用ブレード測定点を含む側面部（検出面）と該投光手段のなす角θ１を２５度を超え４５度以下の範囲に設定し、他の１つの投光手段については電子写真用ブレード測定点を含む側面部（検出面）と該投光手段のなす角θ２を８０度を超え１１０度以下の範囲に設定することが好ましい。   As for one light projecting means, an angle θ1 formed by the side surface portion (detection surface) including the electrophotographic blade measurement point and the light projecting means becomes an acute angle, and for another light projecting means, electrophotography The angle θ2 formed by the side surface portion (detection surface) including the blade measurement point and the light projecting means can be set to be more than 45 degrees and not more than 135 degrees, but the side surface of the transparent or translucent electrophotographic blade From the viewpoint of ensuring that the light reflected and reflected on the part sufficiently enters the imaging means and the detection resolution in the height direction of the defect that is the detection target, the measurement of the electrophotographic blade is performed for one projection means. The angle θ1 formed between the side surface portion (detection surface) including the point and the light projecting unit is set in a range of more than 25 degrees and 45 degrees or less, and the other one light projecting unit includes the side surface including the electrophotographic blade measurement point. Part (detection surface) and the light projecting means It is preferable to set the angular θ2 in the range below 110 degrees above 80 degrees.

それぞれの投光手段のＺ軸方向についての傾斜配置角度については、透明または半透明の電子写真用ブレード側面部に投光し反射した光が十分撮像手段に入るような角度にする必要があり、また同時に、電子写真用ブレード側面部の切断角度の違い、切断面の平面度の違いなどによって側面方向に変化が生じる場合においても撮像手段に十分な光量が入ることを要する。   About the inclination arrangement angle in the Z-axis direction of each light projecting means, it is necessary to set the angle so that the light projected and reflected on the side surface of the transparent or translucent electrophotographic blade sufficiently enters the imaging means, At the same time, it is necessary that a sufficient amount of light enters the imaging means even when a change occurs in the side direction due to a difference in the cutting angle of the side surface portion of the electrophotographic blade or a difference in flatness of the cutting surface.

このＺ軸方向についての傾斜配置角度について、１つの投光手段については、Ｚ軸下方向に１度を超え１０度未満、他の１つの投光手段についてはＺ軸上方向に１度を超え１０度未満に設定することができるが、透明または半透明の電子写真用ブレード側面部に投光し反射した光が十分撮像装置に入るようにするという観点から、１つの投光装置については、Ｚ軸下方向に０．５度を超え３度未満の範囲に設定し、他の１つの投光装置についてはＺ軸上方向に０．５度を超え３度未満の範囲に設定することが好ましい。   With respect to the inclined arrangement angle in the Z-axis direction, one light projecting means exceeds 1 degree in the Z-axis downward direction and less than 10 degrees, and the other light projecting means exceeds 1 degree in the Z-axis upward direction. Although it can be set to less than 10 degrees, from the standpoint that the light reflected and reflected on the side surface of the transparent or translucent electrophotographic blade sufficiently enters the imaging device, The range may be set in the range of more than 0.5 degrees and less than 3 degrees in the lower direction of the Z axis, and the other one projector may be set in the range of more than 0.5 degrees and less than 3 degrees in the upward direction of the Z axis. preferable.

投光手段においては、透明または半透明の電子写真用ブレード側面部に投光し反射した光が十分撮像手段に入るような光量にする必要があり、また同時に、検査においてハロゲン光を用いたが、投光手段の光源は経年劣化するため、安定した輝度を維持できるよう、光量を絶えずフィードバックできるように制御されている。   In the light projecting means, it is necessary to make the light quantity so that the light reflected and reflected on the side surface portion of the transparent or translucent electrophotographic blade sufficiently enters the imaging means, and at the same time, halogen light is used in the inspection. Since the light source of the light projecting means deteriorates with age, the light quantity is controlled so that the light quantity can be continuously fed back so as to maintain a stable luminance.

撮像手段の傾斜配置角度は、Ｚ軸上方向に−５°を超え４５°未満に設定することができるが、好ましくは、撮像手段の角度により変化する分解能と被写界深度、照射する投光手段の配置の関係、製品の持つ切断角度の公差の関係から、Ｚ軸上方向に０．５°以上１５°以下の範囲が好ましい。   The inclination arrangement angle of the image pickup means can be set to be more than −5 ° and less than 45 ° in the Z-axis upward direction. Preferably, the resolution and the depth of field change depending on the angle of the image pickup means, and the light projection to be irradiated. The range of 0.5 ° or more and 15 ° or less in the Z-axis upward direction is preferable from the relationship of arrangement of means and the relationship of tolerance of the cutting angle of the product.

撮像手段の撮像可能範囲について、撮像手段の撮像可能範囲の位置は、被検査物の電子写真用ブレード側面が、撮像可能範囲内に入るような位置に設定する必要があり、被検査物の公差などによって側面幅方向に変化が生じる場合においても撮像可能範囲内に入ることを要する。   Regarding the imageable range of the imaging means, the position of the imageable range of the imaging means must be set so that the side surface of the electrophotographic blade of the object to be inspected is within the imageable range, and the tolerance of the object to be inspected Even in the case where a change occurs in the side surface width direction due to the above, it is necessary to enter the imaging range.

本発明では、撮像手段はレンズ倍率の調節ができ、そのレンズ倍率が０．７５倍〜３．０倍まで調節可能なレンズを備えていることにより、被検査物の側面部を製品の公差に関わり無く取込むことが可能になった。レンズ倍率については本実施形態においては、２．０倍としたが、被測定物の撮影が可能であれば、この数値に限定するものではない。   In the present invention, the imaging means can adjust the lens magnification, and the lens magnification can be adjusted from 0.75 to 3.0 times, so that the side surface of the object to be inspected can be within the tolerance of the product. It became possible to take in regardless. The lens magnification is 2.0 in the present embodiment, but is not limited to this value as long as the object to be measured can be photographed.

撮像手段の被写界深度について、撮影手段に撮影される被検査物の電子写真用ブレード側面部が撮像手段の被写界深度内に入る位置に設定する必要があり、また同時に、被検査物の歪みなどによって側面幅方向に変化が生じる場合においても被写界深度内に入ることを要する。   The depth of field of the image pickup means must be set at a position where the side surface portion of the electrophotographic blade of the inspection object photographed by the imaging means falls within the depth of field of the image pickup means. Even when a change occurs in the width direction of the side surface due to distortion or the like, it is necessary to enter the depth of field.

本発明では、撮像手段はアイリス絞りの調節ができ、被写界深度の調節が可能で、その被写界深度が０．３〜０．５［mm］まで調節可能なレンズを備えていることにより、被検査物の欠陥を画像データとして取込むことが可能になった。被写界深度については本実施形態においては０．５［mm］としたが、被検査物の撮影が可能であれば、この数値に限定するものではない。   In the present invention, the image pickup means is provided with a lens capable of adjusting the iris diaphragm, adjusting the depth of field, and adjusting the depth of field from 0.3 to 0.5 [mm]. Thus, it becomes possible to capture the defect of the inspection object as image data. Although the depth of field is set to 0.5 [mm] in the present embodiment, the depth of field is not limited to this value as long as the object can be photographed.

以下、実施例に基づき、本発明のより具体的な実施の形態を説明する。   Hereinafter, more specific embodiments of the present invention will be described based on examples.

本発明の欠陥検査方法の実施例について、図１を用いて以下に説明する。   An embodiment of the defect inspection method of the present invention will be described below with reference to FIG.

図１は本発明の実施例による欠陥検査装置を上から見た装置構成図である。   FIG. 1 is an apparatus configuration diagram of a defect inspection apparatus according to an embodiment of the present invention as viewed from above.

図１において、本実施例の欠陥検査装置は、板状体の検査対象物である電子写真用ブレード１２を保持し移動させることができる検査ステージ１１を備えている。電子写真用ブレードはその平面部が、直交するＸＹ軸を含む平面と略平行となり、かつ、欠陥を検査される側面部がＹ軸と略垂直となるように検査ステージ１１に保持されている。検査ステージ１１はＸ軸方向にステージ駆動装置１３によって移動自在である。   In FIG. 1, the defect inspection apparatus of the present embodiment includes an inspection stage 11 that can hold and move an electrophotographic blade 12 that is an inspection object of a plate-like body. The electrophotographic blade is held on the inspection stage 11 so that the plane portion thereof is substantially parallel to a plane including the orthogonal XY axes, and the side surface portion to be inspected for defects is substantially perpendicular to the Y axis. The inspection stage 11 is movable in the X axis direction by a stage driving device 13.

電子写真用ブレード１２の側面部の前には、電子写真用ブレード１２の側面部の測定点に光を投光する２つの投光装置１５と、その測定点を撮像する１つの撮像装置１４とが設置されている。   In front of the side surface portion of the electrophotographic blade 12, there are two light projecting devices 15 that project light onto the measurement points on the side surface portion of the electrophotographic blade 12, and one image capturing device 14 that images the measurement points. Is installed.

各投光装置１５は、光源制御装置１６により光源の輝度が一定になるように制御されている。光源制御装置１６により、輝度が一定となるように制御された光が、各投光装置１５より電子写真用ブレード１２の側面に照射され、電子写真用ブレード１２の側面より反射した光が撮像装置１４に撮像される。   Each light projecting device 15 is controlled by the light source control device 16 so that the luminance of the light source becomes constant. The light controlled by the light source control device 16 to have a constant brightness is irradiated from the light projecting devices 15 onto the side surface of the electrophotographic blade 12, and the light reflected from the side surface of the electrophotographic blade 12 is captured by the imaging device. 14 is imaged.

撮像装置１４は制御/画像処理/記憶装置２０より、画像ボード１９を介して撮像する為の命令を受け、初めて動作するものである。撮像装置１４で撮像された画像は画像ボード１９を経由し、DMS伝送することにより高速に制御/画像処理/記憶装置２０へデータ転送が行なわれる。その際、転送された画像番号は制御/画像処理/記憶装置２０に記憶しておくようにしておく。また、制御/画像処理/記憶装置２０はＰＩＯボード（入出力ボード）を介してステージ駆動装置１３を制御している。   The imaging device 14 operates for the first time upon receiving a command for imaging via the image board 19 from the control / image processing / storage device 20. The image captured by the imaging device 14 is transferred to the control / image processing / storage device 20 at high speed by DMS transmission via the image board 19. At this time, the transferred image number is stored in the control / image processing / storage device 20. The control / image processing / storage device 20 controls the stage driving device 13 via a PIO board (input / output board).

制御/画像処理/記憶装置２０には、欠陥について判別された結果を表示する表示装置２１が付属している。   The control / image processing / storage device 20 is attached with a display device 21 for displaying the result determined for the defect.

光源制御装置１６と制御/画像処理/記憶装置２０と表示装置２１の各々は電力を供給する電源装置１７に接続されている。   Each of the light source control device 16, the control / image processing / storage device 20, and the display device 21 is connected to a power supply device 17 that supplies power.

また、電子写真用ブレード１２の測定点を含む側面部（観察面１２ａ）に対して各投光装置１５の投光軸１５ａがなす角度については、電子写真用ブレード１２の側面部に投光し反射した光が十分撮像装置１４に入るようにするという観点、及び、検出対象としている欠陥の高さ方向の検出分解能の観点より、１つの投光装置１５については、ＸＹ軸を含む平面内における、電子写真用ブレード１２の測定点を含む側面部（観察面１２ａ）に対して投光装置１５の投光軸１５ａのなす角度θ１（図２）が２５度を超え４５度以下に設定され、他の１つの投光装置１５については、電子写真用ブレード１２の測定点を含む側面部（観察面）に対して投光装置１５の投光軸１５ａのなす角θ２（図２）が８０度を超え１１０度以下の範囲に設定されていることが好ましい。   The angle formed by the light projecting axis 15a of each light projecting device 15 with respect to the side surface portion (observation surface 12a) including the measurement point of the electrophotographic blade 12 is projected onto the side surface portion of the electrophotographic blade 12. From the viewpoint of ensuring that the reflected light sufficiently enters the imaging device 14 and the detection resolution in the height direction of the defect to be detected, one light projecting device 15 is within a plane including the XY axes. The angle θ1 (FIG. 2) formed by the light projecting axis 15a of the light projecting device 15 with respect to the side surface portion (observation surface 12a) including the measurement point of the electrophotographic blade 12 is set to be more than 25 degrees and 45 degrees or less, For the other light projecting device 15, the angle θ2 (FIG. 2) formed by the light projecting axis 15a of the light projecting device 15 with respect to the side surface portion (observation surface) including the measurement point of the electrophotographic blade 12 is 80 degrees. Over 110 degrees and below It is preferable.

各投光装置１５のＺ軸方向についての傾斜配置角度については、電子写真用ブレード１２の側面部に投光し反射した光が十分撮像装置１４に入るようにするという観点から、１つの投光装置１５については、電子写真用ブレード１２の測定点を含む水平面に対して投光装置１５の投光軸１５ａがＺ軸上方向へ傾斜する角度θ３（図３）が１度を超え１０度未満の範囲に設定され、他の１つの投光装置１５については、電子写真用ブレード１２の測定点を含む水平面に対して投光装置１５の投光軸１５ａがＺ軸下方向へ傾斜する角度θ４（図３）が１度を超え１０度未満の範囲に設定されていることが好ましい。   With respect to the inclined arrangement angle in the Z-axis direction of each light projecting device 15, one light projecting from the viewpoint that the light projected and reflected on the side surface portion of the electrophotographic blade 12 enters the imaging device 14 sufficiently. As for the device 15, the angle θ3 (FIG. 3) at which the light projecting axis 15a of the light projecting device 15 is inclined in the Z-axis upward direction with respect to the horizontal plane including the measurement point of the electrophotographic blade 12 is more than 1 degree and less than 10 degrees. For the other one light projecting device 15, the angle θ4 at which the light projecting axis 15a of the light projecting device 15 is inclined downward in the Z axis with respect to the horizontal plane including the measurement point of the electrophotographic blade 12. (FIG. 3) is preferably set in the range of more than 1 degree and less than 10 degrees.

また、撮像装置１４の設置角度については、電子写真用ブレード１２の側面より反射した光が撮像装置１４に入射可能な角度に設定する必要がある。したがって、撮像装置１４の撮像可能範囲の位置は、画像を撮像する際に電子写真用ブレード１２の側面が映る任意点でよい。なお、本実施形態では撮像装置１４の被写界深度が、電子写真用ブレード１２の側面部を十分にカバーできる幅とする為に、電子写真用ブレード側面側の表層に設定してある。   Further, the installation angle of the imaging device 14 needs to be set to an angle at which the light reflected from the side surface of the electrophotographic blade 12 can enter the imaging device 14. Therefore, the position of the imageable range of the imaging device 14 may be an arbitrary point at which the side surface of the electrophotographic blade 12 is reflected when an image is captured. In the present embodiment, the depth of field of the imaging device 14 is set to the surface layer on the side surface of the electrophotographic blade so that the side surface of the electrophotographic blade 12 can be sufficiently covered.

次に、欠陥検出装置の動作について説明する。   Next, the operation of the defect detection apparatus will be described.

図４によれば、欠陥部の画像判定処理を開始すると、電子写真用ブレード１２の側面部の任意の測定点に向けて２つの投光装置１５が光を照射する。投光装置１５は電源装置１７によって電源を供給された、光源制御装置１６によって、ランプの経年劣化の影響を受けずに均一化された輝度の可視光を発光する。   According to FIG. 4, when the image determination process of the defective portion is started, the two light projecting devices 15 irradiate light toward an arbitrary measurement point on the side surface portion of the electrophotographic blade 12. The light projecting device 15 emits visible light with uniform brightness without being affected by the aging of the lamp by the light source control device 16 supplied with power from the power supply device 17.

次に、制御/画像処理/記憶装置２０は、撮像装置１４により画像取り込みを開始させる事と同時に、ＰＩＯボード１８及びステージ駆動装置１３を介して、検査ステージ１１をＸ軸方向に目的のスピード、目的の範囲において移動させる事により、電子写真用ブレード１２の側面部全体を検査する。検査ステージ１１の移動スピードに関しては、１５ｍｍ/ｓｅｃ以上３５０ｍｍ/ｓｅｃ以下に設定することが可能であるが、撮像装置１４の画像取り込みスピード、及び検査を行なう為に必要な電子写真用ブレード１２に対しての撮像枚数を合わせるという観点より、４０ｍｍ/ｓｅｃ以上、２４０ｍｍ/ｓｅｃ以下が好ましい。   Next, the control / image processing / storage device 20 causes the imaging stage 14 to start capturing an image, and simultaneously moves the inspection stage 11 in the X-axis direction through the PIO board 18 and the stage driving device 13. The entire side surface portion of the electrophotographic blade 12 is inspected by moving within the target range. The moving speed of the inspection stage 11 can be set to 15 mm / sec or more and 350 mm / sec or less. However, the image capturing speed of the imaging device 14 and the electrophotographic blade 12 necessary for performing the inspection can be set. 40 mm / sec or more and 240 mm / sec or less is preferable from the viewpoint of matching the number of all images.

投光装置１５により投光される光源のスポットの大きさは、投光装置１５の先端に装着させている投光レンズによりスポット光の径、光束の分布形状を変化させることが可能である。撮像装置１４における、レンズ倍率と撮像装置視野の関係、及び均一な輝度での取り込みを可能にさせるという観点からスポット光の径はφ１５ｍｍ程度とした。このスポット光は電子写真用ブレード１２の側面部に照射される。   The size of the spot of the light source projected by the light projecting device 15 can change the diameter of the spot light and the distribution shape of the light beam by the light projecting lens attached to the tip of the light projecting device 15. In view of the relationship between the lens magnification and the field of view of the image pickup device in the image pickup device 14 and the capturing with uniform brightness, the diameter of the spot light is set to about 15 mm. This spot light is applied to the side surface of the electrophotographic blade 12.

このスポット光は電子写真用ブレード１２の側面部に照射され、側面部の表面で反射したスポット光は、撮像装置１４にて結像され画像データとして画像ボード１９を介して制御/画像処理/記憶装置２０に取込まれる。この中で、電子写真用ブレード１２の側面部上に欠陥がある場合、該スポット光は欠陥によって影となり、その欠陥によって形成された影付きのスポット光は、撮像装置１４にて結像され画像データとして画像ボード１９を介して制御/画像処理/記憶装置２０に取込まれる。   The spot light is applied to the side surface of the electrophotographic blade 12, and the spot light reflected on the surface of the side surface is imaged by the imaging device 14 and is controlled / image processed / stored as image data via the image board 19. It is taken into the device 20. Among these, if there is a defect on the side surface portion of the electrophotographic blade 12, the spot light becomes a shadow due to the defect, and the shaded spot light formed by the defect is imaged by the imaging device 14 and imaged. Data is taken into the control / image processing / storage device 20 via the image board 19.

制御/画像処理/記憶装置２０において、前記２条件の画像に対して、画像処理加工をほどこし、前記２条件の画像を比較することにより、欠陥部分の有無を判定し、結果を表示装置２１にて表示させると同時に、装置内における記憶部分に結果を記憶させるようにしている。また、欠陥がある画像に関しては、撮像装置１４に撮像した画像、欠陥が発見された画像における欠陥の位置情報（重心位置）、大きさ、形状等も記録可能なようにしておく。   In the control / image processing / storage device 20, image processing is applied to the image of the two conditions, and the presence or absence of a defective portion is determined by comparing the images of the two conditions, and the result is displayed on the display device 21. At the same time, the result is stored in a storage part in the apparatus. In addition, regarding an image having a defect, the position information (center of gravity position), the size, the shape, and the like of the defect in the image captured by the imaging device 14 and the image in which the defect is found are recorded.

また、制御/画像処理/記憶装置２０には、撮像装置１４に装着されているレンズの倍率、撮像装置１４の設置角度、撮像可能範囲の位置、及び、各々の投光装置１５の設置角度、投光可能範囲などがあらかじめ設定、登録されており、画像処理を行う際にこれらが使用される。   Further, the control / image processing / storage device 20 includes a magnification of a lens mounted on the imaging device 14, an installation angle of the imaging device 14, a position of an imageable range, and an installation angle of each light projecting device 15. A floodlightable range or the like is set and registered in advance, and these are used when performing image processing.

（比較例）
比較例として、上記実施例のように１つの撮像装置を用い、２つの投光装置を用いたが、２つの投光装置ついてはＺ軸方向へ傾斜角を設定せずに配置して検査を行なった。 (Comparative example)
As a comparative example, one imaging device is used as in the above embodiment and two projectors are used. However, the two projectors are arranged and inspected in the Z-axis direction without setting an inclination angle. It was.

このときに用いた電子写真用ブレードのサンプルは、製品の側面側に欠陥がある物で、欠陥部の大きさは拡大顕微鏡による測定により、８０〜１５０［μｍ］程度ものを１０本選択した。同時に、電子写真用ブレード側面側の切断角度、切断面の平面度の違いに対しては、無作為に選定した。   The electrophotographic blade sample used at this time had defects on the side surface of the product, and the size of the defective portion was selected from about 10 to about 80 to 150 [μm] by measurement with a magnifying microscope. At the same time, the difference in the cutting angle on the side surface side of the electrophotographic blade and the flatness of the cutting surface was selected at random.

その際、電子写真用ブレード側面側の切断角度、切断面の平面度の違いに関わらず１０本中７本のサンプルの欠陥箇所の検出が可能であった。同時に、１０本中２本が良品部分にも関わらず、電子写真用ブレード側面側の切断角度、切断面の平面度の違いより発生した、光量のムラより欠陥部分として誤判定をした。   At that time, it was possible to detect a defective portion of 7 out of 10 samples regardless of the difference in the cutting angle on the side surface side of the electrophotographic blade and the flatness of the cutting surface. At the same time, although 2 out of 10 were non-defective parts, they were misjudged as defective parts due to unevenness in the amount of light caused by differences in the cutting angle on the side surface of the electrophotographic blade and the flatness of the cutting surface.

これに対し、上述した実施例においては、１つの撮像装置と、２つの投光装置を用い、それぞれの投光装置のＺ軸方向へなす角度を１つは、Ｚ軸上方向への傾斜角を２°に設定し、１つは、Ｚ軸下方向への傾斜角を３°に設定し、同一のサンプル、同一の検出アルゴリズムを用い検査を行なった。   In contrast, in the above-described embodiment, one imaging device and two light projecting devices are used, and one angle formed in the Z-axis direction of each light projecting device is an inclination angle in the Z-axis upward direction. Was set to 2 °, and one set the inclination angle in the Z-axis downward direction to 3 °, and the same sample and the same detection algorithm were used for inspection.

その際、電子写真用ブレードの側面側の切断角度、切断面の平面度の違いに関わらず１０本中全てのサンプルの欠陥部分の検出が可能であった。   At that time, it was possible to detect defective portions of all 10 samples regardless of differences in the cutting angle on the side surface of the electrophotographic blade and the flatness of the cutting surface.

このことより、上述した実施例における電子写真用ブレードの欠陥検出方法は本比較例における検出方法よりも正確に検査が可能であるということがいえた。   From this, it can be said that the defect detection method of the electrophotographic blade in the above-described embodiment can be inspected more accurately than the detection method in this comparative example.

本発明の実施例１による欠陥検査装置を上方向から見た装置構成図である。It is the apparatus block diagram which looked at the defect inspection apparatus by Example 1 of this invention from the upper direction. 図１に示す投光装置と撮像装置のＸ-Ｙ平面における装置配置概略図である。FIG. 2 is a schematic view of device arrangement in an XY plane of a light projecting device and an imaging device shown in FIG. 1. 図１に示す投光装置と撮像装置のＹ-Ｚ平面における装置配置概略図である。FIG. 2 is a schematic view of device arrangement in a YZ plane of the light projecting device and the imaging device shown in FIG. 1. 図１に示した欠陥検査装置を用いて電子写真用ブレードの欠陥を検出する流れを示したフローチャートである。It is the flowchart which showed the flow which detects the defect of the blade for electrophotography using the defect inspection apparatus shown in FIG.

符号の説明Explanation of symbols

１２ 電子写真用ブレード
１４ 撮像装置
１５ 投光装置 12 blade for electrophotography 14 imaging device 15 projector

Claims (6)

投光手段にて板状体に投光し該板状体の側面部で反射させ、反射した光を撮像手段で撮像して得られた画像を用い、画像処理により前記板状体の側面部における欠陥部を検出する、板状体の欠陥検出方法において、
前記板状体の測定点を含む水平面に対して直交する軸をＺ軸とし、該板状体の測定点を含む水平面で該Ｚ軸と直交する２軸をＸ軸、Ｙ軸としたときに、前記投光手段を２つ以上用い、このうち１つの投光手段を、Ｘ軸とＹ軸を含む平面内において前記板状体の測定点を含む検出面に対して該１つの投光手段の投光軸がなす角度θ１が鋭角になり、かつ、前記１つの投光手段の投光軸がＺ軸方向へ傾斜する角度θ３が１度を超え１０度以下になるように配置し、さらに、もう１つの投光手段を、Ｘ軸とＹ軸を含む平面内において前記板状体の測定点を含む検出面に対して該もう１つの投光手段の光軸がなす角度θ２が８０度を超え１１０度以下になり、かつ、前記もう１つの投光手段の投光軸がＺ軸方向へ傾斜する角度θ４が１度を超え１０度以下になるように配置することを特徴とする欠陥検出方法。 The side surface portion of the plate-like body is projected by image processing using an image obtained by projecting light onto the plate-like body by the light projecting means, reflecting the light from the side surface portion of the plate-like body, and imaging the reflected light by the imaging means. In the defect detection method of the plate-like body for detecting a defect portion in
When the axis perpendicular to the horizontal plane including the measurement point of the plate-like body is the Z-axis, and the two planes orthogonal to the Z-axis in the horizontal plane including the measurement point of the plate-like body are the X-axis and Y-axis Two or more of the light projecting means are used, and one of the light projecting means is used with respect to the detection surface including the measurement point of the plate-like body in a plane including the X axis and the Y axis. The angle θ1 formed by the light projecting axis is an acute angle, and the angle θ3 at which the light projecting axis of the one light projecting means is inclined in the Z-axis direction is more than 1 degree and 10 degrees or less, and The angle θ2 formed by the optical axis of the other light projecting unit with respect to the detection surface including the measurement point of the plate-like body in the plane including the X axis and the Y axis is 80 degrees. And the angle θ4 at which the light projecting axis of the other light projecting means is inclined in the Z-axis direction exceeds 1 degree and is 10 degrees or less. Defect detection method characterized in that arranged to run. それぞれの投光手段のＺ軸方向への配置角度を、１つはＺ軸上方向へ０．５度〜３度、もう１つはＺ軸下方向へ０．５度〜３度に設定したことを特徴とする、請求項１に記載の欠陥検出方法。   The arrangement angle of each light projecting means in the Z-axis direction is set to 0.5 to 3 degrees in the Z-axis upward direction, and the other is set to 0.5 to 3 degrees in the Z-axis downward direction. The defect detection method according to claim 1, wherein: 前記板状体が電子写真用ブレードであることを特徴とする請求項１に記載の欠陥検出方法。   The defect detection method according to claim 1, wherein the plate-like body is an electrophotographic blade. 投光手段と、撮像手段とを少なくとも有し、該投光手段にて板状体に投光し該板状体の側面部で反射させ、反射した光を前記撮像手段で撮像して得られた画像を用い、画像処理により前記板状体の側面部における欠陥部を検出する、板状体の欠陥検出装置において、
該投光手段が２つ以上備えられており、
前記板状体の測定点を含む水平面に対して直交する軸をＺ軸とし、該板状体の測定点を含む水平面で該Ｚ軸と直交する２軸をＸ軸、Ｙ軸としたときに、該２つの投光手段のうちの１つが、Ｘ軸とＹ軸を含む平面内において前記板状体の測定点を含む検出面に対して該１つの投光手段の投光軸がなす角度θ１が鋭角になり、かつ、前記１つの投光手段の投光軸がＺ軸方向へ傾斜する角度θ３が１度を超え１０度以下になるように配置され、さらに、該２つ投光手段のうちのもう１つが、Ｘ軸とＹ軸を含む平面内において前記板状体の測定点を含む検出面に対して該もう１つの投光手段の光軸がなす角度θ２が８０度を超え１１０度以下になり、かつ、前記もう１つの投光手段の投光軸がＺ軸方向へ傾斜する角度θ４が１度を超え１０度以下になるように配置されていることを特徴とする欠陥検出装置。 It is obtained by projecting at least a light projecting unit and an image capturing unit, projecting light onto a plate-like body by the light projecting unit, reflecting the light from the side surface of the plate-like body, and capturing the reflected light by the image capturing unit. In the defect detection apparatus for a plate-like body, which detects a defect portion in the side surface portion of the plate-like body by image processing using the obtained image,
Two or more light projecting means are provided,
When the axis perpendicular to the horizontal plane including the measurement point of the plate-like body is the Z-axis, and the two planes orthogonal to the Z-axis in the horizontal plane including the measurement point of the plate-like body are the X-axis and Y-axis The angle formed by the light projecting axis of the one light projecting unit with respect to the detection surface including the measurement point of the plate-like body in a plane including the X axis and the Y axis. The angle θ1 is an acute angle, and the angle θ3 at which the light projection axis of the one light projecting unit is inclined in the Z-axis direction is more than 1 degree and 10 degrees or less, and the two light projecting units The angle θ2 formed by the optical axis of the other light projecting unit with respect to the detection surface including the measurement point of the plate-like body in a plane including the X axis and the Y axis exceeds 80 degrees. The angle θ4 at which the light projecting axis of the other light projecting means tilts in the Z-axis direction exceeds 1 degree and is 10 degrees or less. Defect detection apparatus characterized by being urchin arranged. それぞれの投光手段のＺ軸方向への配置角度が、１つはＺ軸上方向へ０．５度〜３度、もう１つはＺ軸下方向へ０．５度〜３度に設定されていることを特徴とする、請求項４に記載の欠陥検出装置。   The arrangement angle of each light projecting means in the Z-axis direction is set to 0.5 to 3 degrees in the Z-axis upward direction, and the other is set to 0.5 to 3 degrees in the Z-axis downward direction. The defect detection apparatus according to claim 4, wherein: 前記板状体が電子写真用ブレードであることを特徴とする請求項５に記載の欠陥検出装置。   6. The defect detection apparatus according to claim 5, wherein the plate-like body is an electrophotographic blade.
JP2005217160A 2005-07-27 2005-07-27 Flaw detecting method of sheet and flaw detector Pending JP2007033240A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101452781B1 (en) 2013-06-13 2014-10-22 주식회사 라미넥스 Inspection method of cutting plane for display panel
CN110220915A (en) * 2019-06-21 2019-09-10 银河水滴科技（北京）有限公司 Glass detection machine
US11692944B2 (en) 2019-02-28 2023-07-04 Yoshino Gypsum Co., Ltd. Apparatus for inspecting plate-like bodies

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101452781B1 (en) 2013-06-13 2014-10-22 주식회사 라미넥스 Inspection method of cutting plane for display panel
US11692944B2 (en) 2019-02-28 2023-07-04 Yoshino Gypsum Co., Ltd. Apparatus for inspecting plate-like bodies
CN110220915A (en) * 2019-06-21 2019-09-10 银河水滴科技（北京）有限公司 Glass detection machine

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