JP2007003129A - Carbon heater for heat treatment furnace - Google Patents

Carbon heater for heat treatment furnace Download PDF

Info

Publication number
JP2007003129A
JP2007003129A JP2005185629A JP2005185629A JP2007003129A JP 2007003129 A JP2007003129 A JP 2007003129A JP 2005185629 A JP2005185629 A JP 2005185629A JP 2005185629 A JP2005185629 A JP 2005185629A JP 2007003129 A JP2007003129 A JP 2007003129A
Authority
JP
Japan
Prior art keywords
heater
heat treatment
terminal
treatment furnace
terminal side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005185629A
Other languages
Japanese (ja)
Other versions
JP4941802B2 (en
Inventor
Shinichi Takahashi
愼一 高橋
Kiyoshi Kobayashi
清 小林
Tsutomu Ino
勉 井野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanto Yakin Kogyo Co Ltd
Original Assignee
Kanto Yakin Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanto Yakin Kogyo Co Ltd filed Critical Kanto Yakin Kogyo Co Ltd
Priority to JP2005185629A priority Critical patent/JP4941802B2/en
Publication of JP2007003129A publication Critical patent/JP2007003129A/en
Application granted granted Critical
Publication of JP4941802B2 publication Critical patent/JP4941802B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Furnace Details (AREA)
  • Resistance Heating (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a new carbon heater for a heat treatment furnace with an improved use characteristic by uniforming temperature distribution of a whole heating part in a heat treatment furnace. <P>SOLUTION: By providing a stepped structure part 10 thinning a terminal side portion of a heater body and thickening a U-shaped tip fold back portion in a continuous part 9 of a middle portion 7 and the terminal side portion 8 of the heater bodies 2 and 3, a function part is formed, reducing a cross-sectional area of the terminal side portion of the heater body and increasing a resistance value. A terminal part is formed by a material with a specific resistance of 1,500-1,900 μΩcm. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、熱処理炉用のカーボンヒーターに関するもので、具体的にはヒーター全体の温度分布を均一化して使用特性を改善した熱処理炉用カーボンヒーターに関するものである。   The present invention relates to a carbon heater for a heat treatment furnace, and more specifically to a carbon heater for a heat treatment furnace in which the temperature distribution of the entire heater is made uniform to improve the use characteristics.

従前知られているUターン型ヒーターの発熱部は、当該発熱部の中心軸線に直交する向きの何処を切ってもその切断端面の形状が同じで、同一の断面積になっているものであった。   The heat generating part of the U-turn type heater that has been known so far has the same cross-sectional area and the same cross-sectional area regardless of where it is cut in the direction perpendicular to the central axis of the heat generating part. It was.

このため、上記Uターン型ヒーターの発熱部は、次に述べるような理由によって、発熱部の端子側に位置する個所の温度が同発熱部の中間に位置する個所より低くなり、また先端折り返し側に位置するU型先端部近傍の温度は高くなるという使用特性、すなわち部位によって温度分布が不均一になる使用特性を有していた。   For this reason, the heating part of the U-turn heater has a lower temperature at the part located on the terminal side of the heating part than the part located in the middle of the heating part for the following reasons, and the tip folding side The use characteristic that the temperature in the vicinity of the U-shaped tip located in the region becomes high, that is, the use characteristic that the temperature distribution becomes uneven depending on the part.

上記端子側個所の温度が低くなる原因としては、端子接続部の銅製クランプが水冷されているために低くなることを挙げることができる。また、U型先端部近傍は逆に放熱要素が少なく、温度が上昇する傾向にあることが挙げることができる。   The reason why the temperature at the terminal-side portion is lowered is that the copper clamp at the terminal connection portion is water-cooled, so that the temperature is lowered. In addition, it can be mentioned that the vicinity of the U-shaped front end portion has fewer heat dissipation elements and the temperature tends to rise.

そこで、本発明者は、温度分布を均一化して、使用特性を改善することを課題として鋭意研究を行った結果、ヒーター本体の端子側個所が細く、折り返しのU型先端部側が太くなるように、その中間部を段付き構造にすることが有効であり、また端子部の材質を従来の端子材質よりも熱伝導率が低くかつ固有抵抗が大きな材質とすることが有効であることを見出した。   Therefore, as a result of intensive research aimed at improving the usage characteristics by making the temperature distribution uniform, the present inventors have made the terminal part of the heater body thinner and the folded U-shaped tip end side thicker. It has been found that it is effective to have a stepped structure in the middle part, and it is effective to use a material having a lower thermal conductivity and a higher specific resistance than the conventional terminal material. .

そして、上記知見に基づく実施により、段付き構造にしたことで端子側個所の断面積を減らして抵抗値を増加させ得たこと、当該抵抗値の増加により端子側個所の発熱温度を高くして同端子側からの放熱分を補い得たことが確認できた。また併せて、端子部の材質を変更したことで発熱部の熱量が端子側に放散することを防ぎ得たこと、端子部も僅かの発熱をすることが確認できた。   And by implementing based on the above knowledge, it was possible to increase the resistance value by reducing the cross-sectional area of the terminal side part by making the stepped structure, and by increasing the resistance value, the heating temperature of the terminal side part was increased. It was confirmed that the heat radiation from the terminal side could be compensated. In addition, it was confirmed that changing the material of the terminal portion could prevent the heat amount of the heat generating portion from being diffused to the terminal side, and that the terminal portion also generated a slight amount of heat.

なお、本出願人は、ヒーター本体の端子側個所が細く、U型先端部側が太くなるような中間段付き構造をもつ熱処理炉用カーボンヒーターについて、先行技術文献を調査したが、これらに関連する先行技術文献は見出すことができなかった。   In addition, although this applicant investigated the prior art literature about the carbon heater for heat treatment furnaces which has the intermediate stepped structure where the terminal side part of the heater main body is thin and the U-shaped tip end side is thick, it relates to these. Prior art documents could not be found.

図4(イ)は、従来の熱処理炉用U型カーボンヒーターを炉内に挿入設置した状態の断面的な正面説明図で、被加熱品の進行方法正面から見た図であり、図4(ロ)は図4(イ)の位置関係に対応した炉内の温度分布を示すグラフであり、図4(ロ)には従来のカーボンヒーターを使用した場合と本発明に係るカーボンヒーターを使用した場合の炉内温度分布の両方を比較表示してある。   FIG. 4 (a) is a cross-sectional front view of a state in which a conventional U-shaped carbon heater for a heat treatment furnace is inserted and installed in the furnace, and is a view seen from the front of the method of proceeding with the article to be heated. (B) is a graph showing the temperature distribution in the furnace corresponding to the positional relationship of FIG. 4 (a), and FIG. 4 (b) uses the conventional carbon heater and the carbon heater according to the present invention. Both furnace temperature distributions in the case are shown in comparison.

図4(イ)において、符号1はカーボンヒーター、2及び3は該ヒーター1を構成するヒーター本体、4はヒーター1の折り返しのU型先端部、5及び6はヒーター端子部、11は炉体、12は断熱材、13はグラファイトマッフル、14は端子ボックスである。   In FIG. 4 (a), reference numeral 1 is a carbon heater, 2 and 3 are heater bodies constituting the heater 1, 4 is a U-shaped front end portion of the heater 1, 5 and 6 are heater terminal portions, and 11 is a furnace body. , 12 is a heat insulating material, 13 is a graphite muffle, and 14 is a terminal box.

図4(ロ)において、従来品を示す点線の折れ線グラフでは、端子5,6側とU型先端部4側とでは略50℃の差があり、被加熱品が通過する有効加熱帯(A〜Bの部分)ではU型先端部4側に向って温度が漸増する傾斜カーブ状態を呈している。これに対し、本発明品を示す実線の折れ線グラフは、端子5,6側とU型先端部4側(折り返し側)とでは略同じ温度であり、有効加熱帯(A〜B)では略同じ温度の横ばい状態を示していることが分かる。従って、これらのことから、本発明を実施することによって、温度の均一化が達成された発明品を確実に提供し得ることが容易に理解できる。   In FIG. 4 (b), in the dotted line graph showing the conventional product, there is a difference of about 50 ° C. between the terminals 5 and 6 side and the U-shaped tip 4 side, and the effective heating zone (A (Part B) shows an inclined curve state in which the temperature gradually increases toward the U-shaped tip 4 side. On the other hand, the solid line graph indicating the product of the present invention has substantially the same temperature on the terminals 5 and 6 side and the U-shaped tip portion 4 side (turned side), and substantially the same in the effective heating zone (A to B). It can be seen that the temperature is flat. Therefore, from these, it can be easily understood that by implementing the present invention, it is possible to reliably provide an invention product in which the temperature is uniformized.

ここで、発熱部の発熱について述べる。すなわち、発熱部の単位長さの発熱量は、当該発熱部の中心軸線に直交する向きで切った断面積により決まる。つまり、同じ電流が流れる場合、狭い断面積部分の方が広い断面積部分の方よりも発熱量が多くなるので、端子側個所の方が高い温度になり易いのである。   Here, the heat generation of the heat generating portion will be described. That is, the heat generation amount of the unit length of the heat generating portion is determined by a cross-sectional area cut in a direction perpendicular to the central axis of the heat generating portion. That is, when the same current flows, the heat generation amount is larger in the narrow cross-sectional area portion than in the wide cross-sectional area portion, so that the temperature at the terminal side portion is likely to be higher.

本発明は、発熱部全体の温度分布を均一化して使用特性の改善ができた新規の熱処理炉用カーボンヒーターを提供することを目的とする。   An object of the present invention is to provide a novel carbon heater for a heat treatment furnace in which the temperature distribution of the entire heat generating part is made uniform to improve the use characteristics.

上記目的を達成するために、請求項1に係る熱処理炉用カーボンヒーターは、ヒーター本体と端子部を備えた熱処理炉用カーボンヒーターに関し、ヒーター本体の端子側個所の断面積を減らして同端子側個所の抵抗値を大きくしたものである。   In order to achieve the above object, a carbon heater for a heat treatment furnace according to claim 1 relates to a carbon heater for a heat treatment furnace having a heater main body and a terminal portion, and the cross-sectional area of the terminal side portion of the heater main body is reduced to the same terminal side. The resistance value at the location is increased.

そして、端子側個所の断面積を減らす方法としては、例えばUターン型ヒーターでは、ヒーター本体の中間個所と端子側個所の連続部に、ヒーター本体の端子側個所を細く、U型の先端折り返し側個所を太くする段付き構造部を設ける。   As a method of reducing the cross-sectional area of the terminal side portion, for example, in a U-turn type heater, the terminal side portion of the heater body is narrowed at the intermediate portion of the heater body and the terminal side portion, and the U-shaped tip folding side Provide a stepped structure that thickens the location.

従って、請求項1に係る熱処理炉用カーボンヒーターにあっては、端子側個所の発熱温度が上記抵抗値の増大により高くなる。その結果、同端子側からの放熱ロスは補填され、上記温度分布の均一化の達成を可能にする。   Therefore, in the carbon heater for a heat treatment furnace according to claim 1, the heat generation temperature at the terminal side portion becomes higher due to the increase in the resistance value. As a result, the heat dissipation loss from the terminal side is compensated, and the temperature distribution can be made uniform.

請求項2に係る熱処理炉用カーボンヒーターは、上記端子部はその固有抵抗を1500〜1900μΩ・cmである材質としたことを特徴とする。   The carbon heater for a heat treatment furnace according to claim 2 is characterized in that the terminal portion is made of a material having a specific resistance of 1500 to 1900 μΩ · cm.

すなわち、請求項2に係る熱処理炉用カーボンヒーターは、端子部も僅かに発熱して発熱部の熱量が端子側に放散することを防ぎ得るので、結果として、均一な温度分布の実現が可能になる。   In other words, the carbon heater for a heat treatment furnace according to claim 2 can prevent the terminal portion from slightly generating heat and dissipating the amount of heat from the heat generating portion to the terminal side. As a result, a uniform temperature distribution can be realized. Become.

なお、本発明に係る熱処理炉用カーボンヒーターは、端子接続部側が低くなり、U型の先端折り返し側が上昇するような傾向にある温度環境において主に使用される。   Note that the carbon heater for a heat treatment furnace according to the present invention is mainly used in a temperature environment in which the terminal connecting portion side tends to be low and the U-shaped tip folding side tends to rise.

請求項1に係る熱処理炉用カーボンヒーターは、ヒーター本体の端子側個所の断面積を減らして抵抗値を大きくしたので、端子側個所の発熱温度を高くすることができ、結果として、同端子側からの放熱ロスを補填でき、上記温度分布の均一化を達成することができる。   The carbon heater for a heat treatment furnace according to claim 1 has a resistance value increased by reducing a cross-sectional area of the terminal side portion of the heater body, so that the heat generation temperature at the terminal side portion can be increased. The heat dissipation loss from can be compensated, and the temperature distribution can be made uniform.

請求項2に係る熱処理炉用カーボンヒーターは、端子部を固有抵抗が1500〜1900μΩ・cmである材質としたので、端子側に放散する熱量を減少させることができるのみならず、上記材質の端子部は使用時には発熱する熱量が減少するので、結果として、均一な温度分布の実現が容易にできるのである。   In the carbon heater for a heat treatment furnace according to claim 2, since the terminal portion is made of a material having a specific resistance of 1500 to 1900 μΩ · cm, not only can the amount of heat dissipated to the terminal side be reduced, but also the terminal made of the above material. Since the amount of heat generated in the part decreases during use, as a result, a uniform temperature distribution can be easily realized.

実施例1.
以下、本発明に係る実施例を図1〜図3に基づいて説明する。なお、図1はカーボンヒーター全体を示す一部断面正面図であり、図2は同じく一部断面側面図であり、図3は図1のA部分を示す拡大図である。
Example 1.
Embodiments according to the present invention will be described below with reference to FIGS. 1 is a partially sectional front view showing the entire carbon heater, FIG. 2 is also a partially sectional side view, and FIG. 3 is an enlarged view showing a portion A in FIG.

この実施例に係る熱処理炉用カーボンヒーター1は、2本のグラファイト製ヒーター本体2、3を構成し、これらヒーター本体2、3の一方端をU型先端部(連結部)4により連結すると共に、各ヒーター本体2、3の他方端にヒーター端子5,6を装着することにより得たUターン型ヒーターである。   A carbon heater 1 for a heat treatment furnace according to this embodiment comprises two graphite heater bodies 2 and 3, and one end of the heater bodies 2 and 3 is connected by a U-shaped tip (connecting portion) 4. A U-turn heater obtained by attaching heater terminals 5 and 6 to the other ends of the heater bodies 2 and 3.

上記ヒーター本体2、3は、固有抵抗1100μΩ・cmのカーボンであり、外径φ51mm/内径φ38mmの管体である。そして、これら各ヒーター本体2、3において完成後に端子側個所8として機能する部分の外周面を切削加工により切除して外径φ49mmとして、ヒーター本体2、3の中間個所7と端子側個所8との連続部9に段付き構造部10を設け、よって端子側個所8の中心線に直交する切断端面の断面積を減らして、当該端子側個所8の抵抗値を大きくなるようにしてある。   The heater bodies 2 and 3 are carbon having a specific resistance of 1100 μΩ · cm, and are tubular bodies having an outer diameter of φ51 mm / an inner diameter of φ38 mm. Then, the outer peripheral surface of the portion functioning as the terminal side portion 8 after completion in each of the heater bodies 2 and 3 is cut by cutting to have an outer diameter of 49 mm, and the intermediate portion 7 and the terminal side portion 8 of the heater bodies 2 and 3 are The stepped structure portion 10 is provided in the continuous portion 9, so that the cross-sectional area of the cut end surface perpendicular to the center line of the terminal side portion 8 is reduced, and the resistance value of the terminal side portion 8 is increased.

また、上記U型先端部4は、固有抵抗800μΩ・cmのカーボンであり、ヒーター本体2、3に連結装着してあるものである。   The U-shaped tip 4 is carbon having a specific resistance of 800 μΩ · cm, and is connected to the heater bodies 2 and 3.

なお、上記実施例1はUターン型ヒーターについて述べたが、本発明はカーボンヒーター本体の左右両端にヒーター端子を装着したストレート型ヒーターを上下に並列配置したものにも適用することができ、この場合には、ヒーター本体の左右両側の端子側に寄せたヒーター本体中間部の外周面を切削加工により切除して外径を細くした前記と同様の段付き構造部を設けるようにする。   In addition, although the said Example 1 described the U-turn type heater, this invention can be applied also to what arrange | positioned the straight type heater which attached the heater terminal to the right and left both ends of a carbon heater main body in parallel up and down, In this case, a stepped structure similar to the above is provided in which the outer peripheral surface of the intermediate part of the heater body brought close to the terminal sides on the left and right sides of the heater body is cut by cutting to reduce the outer diameter.

実施例2.
また、上記ヒーター端子5,6は、例えば固有抵抗1700μΩ・cmのカーボンであり、各ヒーター本体2、3にはネジ込み(図示せず)により装着してある。なお、当該ヒーター端子5,6の固有抵抗は、1500〜1900μΩ・cmであることが望ましく、1500μΩ・cm以下である場合、あるいは1900μΩ・cm以上である場合には、前記したような効果が得られない。
Example 2
The heater terminals 5 and 6 are made of carbon having a specific resistance of 1700 μΩ · cm, for example, and are attached to the heater bodies 2 and 3 by screwing (not shown). The specific resistance of the heater terminals 5 and 6 is preferably 1500 to 1900 μΩ · cm, and if it is 1500 μΩ · cm or less, or 1900 μΩ · cm or more, the above-described effects can be obtained. I can't.

ちなみに、炉温1300℃で、Uターン型のヒーター端子5,6に固有抵抗が850μΩ・cmの従来品と、固有抵抗が1700μΩ・cmの本発明品に関して、それぞれその端子損失熱量を測定した結果、従来品では損失熱量2840Kcal/時・本に対し、本発明品では損失熱量2220Kcal/時・本と、損失熱量が明らかに少ないことが分かった。   By the way, the results of measuring the heat loss of the terminal for the conventional product having a specific resistance of 850 μΩ · cm and the product of the present invention having a specific resistance of 1700 μΩ · cm at the furnace temperature of 1300 ° C. and the U-turn type heater terminals 5 and 6 respectively. In the conventional product, it was found that the heat loss was 2840 Kcal / hour.

本発明の第1実施例を示す一部断面正面図である。It is a partial cross section front view which shows 1st Example of this invention. 同じく一部断面側面図である。It is a partial cross section side view similarly. 図1のA部分を示す拡大図である。It is an enlarged view which shows A part of FIG. 従来のUターン型カーボンヒーターを炉内に挿入設置した状態の断面的な正面説明図(イ)とその位置関係に対応した炉内の温度分布を示すグラフ(ロ)であり、図4(ロ)には従来のカーボンヒーターを使用した場合(点線で表示)と本発明に係るカーボンヒーターを使用した場合(実線で表示)の炉内温度分布の両方を比較表示してある。FIG. 4 is a cross-sectional front view (A) of a state where a conventional U-turn type carbon heater is inserted and installed in the furnace, and a graph (B) showing temperature distribution in the furnace corresponding to the positional relationship. ) Shows a comparative display of both the furnace temperature distribution when using a conventional carbon heater (indicated by a dotted line) and when using the carbon heater according to the present invention (indicated by a solid line).

符号の説明Explanation of symbols

1−熱処理炉用カーボンヒーター
2、3−ヒーター本体
4−U型先端部
5、6−ヒーター端子
7−中間個所
8−端子側個所
9−連続部
10−段付き構造部
11−炉体
12−断熱材
13−グラファイトマッフル
14−端子ボックス
1-Carbon heater 2 for heat treatment furnace, 3-Heater main body 4-U-type tip 5, 6-Heater terminal 7-Intermediate part 8-Terminal side part 9-Continuous part 10-Stepped structure part 11-Furnace body 12- Insulation 13-Graphite muffle 14-Terminal box

Claims (2)

ヒーター本体と端子部を備えた熱処理炉用カーボンヒーターにおいて、ヒーター本体の端子部側個所の断面積を減らして同端子部側個所の抵抗値を大きくしたことを特徴とする熱処理炉用カーボンヒーター。 A carbon heater for a heat treatment furnace having a heater body and a terminal portion, wherein the resistance value of the terminal portion side portion is increased by reducing the cross-sectional area of the terminal portion side portion of the heater body. 請求項1記載の端子部は、その固有抵抗を1500〜1900μΩ・cmである材質としたことを特徴とする熱処理炉用カーボンヒーター。
The carbon heater for a heat treatment furnace characterized in that the terminal portion according to claim 1 is made of a material having a specific resistance of 1500 to 1900 μΩ · cm.
JP2005185629A 2005-06-24 2005-06-24 Carbon heater for heat treatment furnace Active JP4941802B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005185629A JP4941802B2 (en) 2005-06-24 2005-06-24 Carbon heater for heat treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005185629A JP4941802B2 (en) 2005-06-24 2005-06-24 Carbon heater for heat treatment furnace

Publications (2)

Publication Number Publication Date
JP2007003129A true JP2007003129A (en) 2007-01-11
JP4941802B2 JP4941802B2 (en) 2012-05-30

Family

ID=37688928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005185629A Active JP4941802B2 (en) 2005-06-24 2005-06-24 Carbon heater for heat treatment furnace

Country Status (1)

Country Link
JP (1) JP4941802B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2364772A1 (en) 2010-03-04 2011-09-14 Mitsubishi Materials Corporation Apparatus for producing trichlorosilane and method for producing trichlorosilane

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4822750Y1 (en) * 1968-08-08 1973-07-02
JPS5988921A (en) * 1982-11-05 1984-05-23 Toray Ind Inc Tammann electric furnace for producing graphitized fiber
JPS61138186A (en) * 1984-12-10 1986-06-25 Furuno Electric Co Ltd Land shore video signal generator in radar simulator
JP2000329475A (en) * 1999-05-19 2000-11-30 Hitachi Cable Ltd Heater furnace
JP2001031473A (en) * 1999-07-21 2001-02-06 Toyo Tanso Kk Graphite heater
JP2001167862A (en) * 1999-12-10 2001-06-22 Murata Mfg Co Ltd Heater and structure of heater terminal
JP2002031975A (en) * 2000-07-14 2002-01-31 Konica Corp Fixing device and image forming device
JP2003215965A (en) * 2002-01-23 2003-07-30 Fuji Xerox Co Ltd Fixation device, carbon lamp, and manufacture of carbon- based heat generating body

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4822750Y1 (en) * 1968-08-08 1973-07-02
JPS5988921A (en) * 1982-11-05 1984-05-23 Toray Ind Inc Tammann electric furnace for producing graphitized fiber
JPS61138186A (en) * 1984-12-10 1986-06-25 Furuno Electric Co Ltd Land shore video signal generator in radar simulator
JP2000329475A (en) * 1999-05-19 2000-11-30 Hitachi Cable Ltd Heater furnace
JP2001031473A (en) * 1999-07-21 2001-02-06 Toyo Tanso Kk Graphite heater
JP2001167862A (en) * 1999-12-10 2001-06-22 Murata Mfg Co Ltd Heater and structure of heater terminal
JP2002031975A (en) * 2000-07-14 2002-01-31 Konica Corp Fixing device and image forming device
JP2003215965A (en) * 2002-01-23 2003-07-30 Fuji Xerox Co Ltd Fixation device, carbon lamp, and manufacture of carbon- based heat generating body

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2364772A1 (en) 2010-03-04 2011-09-14 Mitsubishi Materials Corporation Apparatus for producing trichlorosilane and method for producing trichlorosilane
JP2011201767A (en) * 2010-03-04 2011-10-13 Mitsubishi Materials Corp Apparatus for producing trichlorosilane and method for producing trichlorosilane
US8809746B2 (en) 2010-03-04 2014-08-19 Mitsubishi Materials Corporation Apparatus for producing trichlorosilane and method for producing trichlorosilane

Also Published As

Publication number Publication date
JP4941802B2 (en) 2012-05-30

Similar Documents

Publication Publication Date Title
TW200803593A (en) Planar heater
JP4990230B2 (en) Glass conduit
JP4614267B2 (en) Infrared heater
US11758944B2 (en) Heating wire and electronic atomizing device having the same
JP2005294267A (en) Ignition plug
JPH05505278A (en) Improved electrodes for metal halide discharge lamps
JP4941802B2 (en) Carbon heater for heat treatment furnace
JP4690297B2 (en) heater
JP6371275B2 (en) Discharge lamp
WO2016185624A1 (en) Molten metal holding furnace
JP2003142239A (en) Infrared radiator equipped with twin cladding tube
JP4310563B2 (en) Heater and terminal structure of heater
JP6603321B2 (en) Heater and glow plug equipped with the same
JP2014212045A (en) Planar heating element
JP2018129211A (en) Ceramic heater and glow plug
JP2006310076A (en) Tubular incandescent lamp
JP6931566B2 (en) Glow plug
JP4209933B2 (en) Electrode for discharge lamp, method for producing the same, and discharge lamp
EP1180435A3 (en) Thermal printer and method of designing hot cathode fluorescent tube for thermal printer
JP7199448B2 (en) Heater and glow plug with same
JPS642855B2 (en)
JP2018124030A (en) Glow plug
JP7437097B1 (en) Heater for electric melting furnace
WO2023019752A1 (en) Heating assembly of atomizer, and atomizer
JPS62194117A (en) Sheathed glow plug used for diesel engine

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080606

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110311

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110405

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110603

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111206

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111222

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120207

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120216

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

Ref document number: 4941802

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150309

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250