JP2006522934A - 欠陥に関する透明な基板の検査 - Google Patents
欠陥に関する透明な基板の検査 Download PDFInfo
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- JP2006522934A JP2006522934A JP2006507051A JP2006507051A JP2006522934A JP 2006522934 A JP2006522934 A JP 2006522934A JP 2006507051 A JP2006507051 A JP 2006507051A JP 2006507051 A JP2006507051 A JP 2006507051A JP 2006522934 A JP2006522934 A JP 2006522934A
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- 239000000758 substrate Substances 0.000 title claims abstract description 46
- 230000007547 defect Effects 0.000 title claims abstract description 41
- 238000007689 inspection Methods 0.000 title description 4
- 230000003287 optical effect Effects 0.000 claims abstract description 31
- 239000013307 optical fiber Substances 0.000 claims description 6
- 230000001427 coherent effect Effects 0.000 claims description 4
- 239000011521 glass Substances 0.000 abstract description 26
- 238000000034 method Methods 0.000 abstract description 14
- 239000000835 fiber Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 238000001914 filtration Methods 0.000 description 7
- 239000000428 dust Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 230000004044 response Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052724 xenon Inorganic materials 0.000 description 2
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Liquid Crystal (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
Claims (10)
- 透明な平面基板における欠陥を測定するための装置において、
前記基板の主面にわたって異なる位置で前記基板で光を指向するための第1の空間的に可干渉かつ空間的に調整される光源、および
異なる位置でシートによって透過される光または前記シートから反射される光の位相歪みを検出するようになされたレンズおよび第1のセンサを具備する光学系であって、前記位相歪みが異なる位置における位置対光強度のコントラストに関連付けられ、前記レンズが前記光源と前記センサとの間の光路に沿って位置され、前記レンズが光強度のコントラストを選択的に強化するように動作可能である光学系を有してなることを特徴とする装置。 - 前記第1のセンサは、前記センサまたはその後に位置される仮想平面で光強度を測定するように動作可能であることを特徴とする請求項1に記載の装置。
- 前記装置は、約10nmの1次元の光路長の変動を測定することができることを特徴とする請求項2に記載の装置。
- 前記空間的に可干渉性の光源は光源および空間フィルタを具備し、前記空間フィルタはシングルモード光ファイバを具備することを特徴とする請求項1に記載の装置。
- 前記光源の干渉長は、前記基板を通る前記光路長より小さいことを特徴とする請求項4に記載の装置。
- 前記光源は、スーパールミネッセントダイオードを具備することを特徴とする請求項5に記載の装置。
- 光源およびセンサが、前記基板の前記平面にわたって並進されることを特徴とする請求項1に記載の装置。
- 前記第1の光源から離隔される第2の光源と、前記第1のセンサから離隔される第2のセンサと、をさらに具備することを特徴とする請求項1に記載の装置。
- 前記基板で指向される光を空間的にフィルタリングするために、前記光源に連結される光ファイバと、
前記シートによって透過される光の前記ビームをコリメートするために、前記光ファイバと前記シートとの間に配置されるコリメートレンズと、
コリメートレンズと前記センサとの間に配置されるスリットと、をさらに具備し、前記コリメートレンズが前記シートと前記センサとの間に配置されることを特徴とする請求項1に記載の装置。 - 前記第1の光源から離隔される第2の光源と、前記第1のセンサから離隔される第2のセンサと、をさらに具備することを特徴とする請求項9に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/382,689 US7142295B2 (en) | 2003-03-05 | 2003-03-05 | Inspection of transparent substrates for defects |
PCT/US2004/007343 WO2004079406A2 (en) | 2003-03-05 | 2004-03-04 | Inspection apparatus for detecting defects in transparent substrates |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006522934A true JP2006522934A (ja) | 2006-10-05 |
Family
ID=32926942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006507051A Pending JP2006522934A (ja) | 2003-03-05 | 2004-03-04 | 欠陥に関する透明な基板の検査 |
Country Status (7)
Country | Link |
---|---|
US (2) | US7142295B2 (ja) |
EP (1) | EP1599722A2 (ja) |
JP (1) | JP2006522934A (ja) |
KR (1) | KR101161881B1 (ja) |
CN (1) | CN100565193C (ja) |
TW (1) | TWI285737B (ja) |
WO (1) | WO2004079406A2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009118952A1 (ja) * | 2008-03-27 | 2009-10-01 | 日本電気硝子株式会社 | ガラス基板検査装置およびガラス基板検査方法 |
TWI465711B (zh) * | 2006-12-14 | 2014-12-21 | Nippon Electric Glass Co | 板玻璃缺陷檢測裝置、板玻璃製造方法、板玻璃物品、板玻璃良否判斷裝置以及板玻璃檢查方法 |
Families Citing this family (36)
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GB0307345D0 (en) * | 2003-03-29 | 2003-05-07 | Pilkington Plc | Glazing inspection |
WO2005064321A1 (en) * | 2003-12-30 | 2005-07-14 | Agency For Science, Technology And Research | Method and apparatus for detection of inclusions in glass |
WO2006022014A1 (ja) * | 2004-08-27 | 2006-03-02 | Tsukuba Seiko Ltd. | 搬送検査装置及び搬送装置 |
WO2006029536A1 (en) * | 2004-09-17 | 2006-03-23 | De.Vice Scientific Incorporated | Optical inspection of flat media using direct image technology |
US20060066846A1 (en) * | 2004-09-29 | 2006-03-30 | Telco Testing Systems, Llc | Apparatus and method for detection of contaminant particles or component defects |
KR100642500B1 (ko) * | 2005-03-02 | 2006-11-06 | (주)쎄미시스코 | 유리기판의 에지 결함 및 디스컬러 검사장치 |
KR20070121820A (ko) * | 2005-04-06 | 2007-12-27 | 코닝 인코포레이티드 | 유리 검사 시스템 및 이를 이용한 유리 검사 방법 |
CA2675456C (en) * | 2007-01-12 | 2017-03-07 | Synergx Technologies Inc. | Bright field and dark field channels, used for automotive glass inspection systems |
GB0702937D0 (en) * | 2007-02-15 | 2007-03-28 | Pilkington Group Ltd | Glazing inspection |
WO2008100683A1 (en) * | 2007-02-16 | 2008-08-21 | 3M Innovative Properties Company | Method and apparatus for illuminating material for automated inspection |
CN101663574B (zh) * | 2007-02-27 | 2011-09-28 | 康宁股份有限公司 | 一种用于量化透明基板中的缺陷的方法 |
KR101275731B1 (ko) * | 2007-03-28 | 2013-06-14 | 엘지디스플레이 주식회사 | 글래스 기판용 외관 검사 장치 |
US7764382B2 (en) * | 2008-01-15 | 2010-07-27 | Xerox Corporation | Illuminator for specular measurements |
US20100195096A1 (en) * | 2009-02-04 | 2010-08-05 | Applied Materials, Inc. | High efficiency multi wavelength line light source |
US7929129B2 (en) * | 2009-05-22 | 2011-04-19 | Corning Incorporated | Inspection systems for glass sheets |
JP2011117951A (ja) * | 2009-11-05 | 2011-06-16 | Ohara Inc | 光学材料の内部状態の検査方法及び光学素子の製造方法 |
DE102012002174B4 (de) * | 2012-02-07 | 2014-05-15 | Schott Ag | Vorrichtung und Verfahren zum Erkennen von Fehlstellen innerhalb des Volumens einer transparenten Scheibe und Verwendung der Vorrichtung |
FR2988474B1 (fr) * | 2012-03-21 | 2015-02-06 | Commissariat Energie Atomique | Systeme de mesure de la propagation d'une zone d'ecartement dans un substrat |
US10024790B2 (en) | 2012-10-05 | 2018-07-17 | Seagate Technology Llc | Imaging a transparent article |
CN103034043B (zh) * | 2012-12-21 | 2015-04-22 | 中国科学院长春光学精密机械与物理研究所 | 帘幕式快门曝光均匀性检测装置 |
CN103076093A (zh) * | 2012-12-31 | 2013-05-01 | 上海汉谱光电科技有限公司 | 一种色温照度计的有色玻璃匹配方法和*** |
EP2941633B1 (en) * | 2013-01-04 | 2024-02-28 | Meso Scale Technologies, LLC | Assay apparatuses, methods and reagents |
WO2014129359A1 (ja) | 2013-02-19 | 2014-08-28 | 旭硝子株式会社 | 光学装置 |
CN105378569A (zh) * | 2013-07-22 | 2016-03-02 | 应用材料公司 | 通过测量光性质来进行的闭环控制 |
CN105358959A (zh) * | 2013-07-22 | 2016-02-24 | 应用材料公司 | 用于处理大面积基板的设备和方法 |
TWI700473B (zh) * | 2014-06-04 | 2020-08-01 | 美商康寧公司 | 用於量測玻璃物品厚度的方法及系統 |
CN104865271A (zh) * | 2015-04-15 | 2015-08-26 | 浙江工业大学 | 一种区分透明薄板上下表面图像的检测方法 |
CN104777131B (zh) * | 2015-04-17 | 2018-01-30 | 蓝思科技(长沙)有限公司 | 一种玻璃品质检测装置 |
KR20180033186A (ko) * | 2015-06-19 | 2018-04-02 | 코닝 인코포레이티드 | 결함들을 위해 기판을 검사하고 광학 기술을 이용하여 3차원으로 그러한 결함들의 위치를 찾아내는 방법 및 장치 |
JP6622646B2 (ja) * | 2016-04-26 | 2019-12-18 | 株式会社ミツトヨ | 透明体の欠陥検出方法及び装置 |
CN107024488B (zh) * | 2017-02-27 | 2019-08-13 | 杭州电子科技大学 | 一种玻璃缺陷检测方法 |
CN108281120B (zh) * | 2018-01-27 | 2020-04-10 | 深圳市华星光电半导体显示技术有限公司 | 显示面板的Mura修补方法 |
CN108896516B (zh) * | 2018-05-19 | 2021-04-16 | 芜湖新利德玻璃制品有限公司 | 一种基于透光率的有机玻璃银纹检测装置 |
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-
2003
- 2003-03-05 US US10/382,689 patent/US7142295B2/en not_active Expired - Lifetime
-
2004
- 2004-03-04 WO PCT/US2004/007343 patent/WO2004079406A2/en active Application Filing
- 2004-03-04 KR KR1020057016173A patent/KR101161881B1/ko active IP Right Grant
- 2004-03-04 CN CNB2004800057593A patent/CN100565193C/zh not_active Expired - Lifetime
- 2004-03-04 EP EP04717517A patent/EP1599722A2/en not_active Withdrawn
- 2004-03-04 JP JP2006507051A patent/JP2006522934A/ja active Pending
- 2004-03-05 TW TW093106085A patent/TWI285737B/zh not_active IP Right Cessation
-
2006
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI465711B (zh) * | 2006-12-14 | 2014-12-21 | Nippon Electric Glass Co | 板玻璃缺陷檢測裝置、板玻璃製造方法、板玻璃物品、板玻璃良否判斷裝置以及板玻璃檢查方法 |
WO2009118952A1 (ja) * | 2008-03-27 | 2009-10-01 | 日本電気硝子株式会社 | ガラス基板検査装置およびガラス基板検査方法 |
JP2009236771A (ja) * | 2008-03-27 | 2009-10-15 | Nippon Electric Glass Co Ltd | ガラス基板検査装置およびガラス基板検査方法 |
Also Published As
Publication number | Publication date |
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WO2004079406A2 (en) | 2004-09-16 |
KR20060007003A (ko) | 2006-01-23 |
TWI285737B (en) | 2007-08-21 |
US7142295B2 (en) | 2006-11-28 |
CN100565193C (zh) | 2009-12-02 |
TW200506350A (en) | 2005-02-16 |
US20060192952A1 (en) | 2006-08-31 |
CN1756949A (zh) | 2006-04-05 |
EP1599722A2 (en) | 2005-11-30 |
WO2004079406A3 (en) | 2004-10-21 |
KR101161881B1 (ko) | 2012-07-03 |
US7215418B2 (en) | 2007-05-08 |
US20040174519A1 (en) | 2004-09-09 |
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