JP2006159003A - Heating and cooling method and apparatus for ultrapure water - Google Patents

Heating and cooling method and apparatus for ultrapure water Download PDF

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JP2006159003A
JP2006159003A JP2004350263A JP2004350263A JP2006159003A JP 2006159003 A JP2006159003 A JP 2006159003A JP 2004350263 A JP2004350263 A JP 2004350263A JP 2004350263 A JP2004350263 A JP 2004350263A JP 2006159003 A JP2006159003 A JP 2006159003A
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ultrapure water
brine
heat exchanger
cooling
heating
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Masanori Kanbe
雅範 神戸
Ryuichi Otomo
隆一 大友
Eno Osuga
延王 大須賀
Teruyuki Hino
輝幸 日野
Makoto Ebara
誠 江原
Takashi Hirota
崇 広田
Noriyasu Inaba
教泰 稲葉
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Mayekawa Manufacturing Co
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Abstract

<P>PROBLEM TO BE SOLVED: To prevent a deterioration in specific resistance of ultrapure water due to metal ion elution, and contamination of brine into the ultrapure water due to the breakage of tubes composing an ultrapure water passage when heating or cooling the ultrapure water for supplying it the terminal devices of a semiconductor production line or the like at optimum temperature. <P>SOLUTION: Heat exchange between the brine heated or cooled by a brine cooler 29 and first ultrapure water is performed indirectly through a circulation pipeline 36 of second ultrapure water, consisting of a closed circuit. An electric conductivity sensor 37 is installed in the circulation pipeline 36. A maintenance mechanism is installed, which monitors the electric conductivity of the second ultrapure water, and stops the heat exchange and replaces the second ultrapure water in the circulation pipeline with the first ultrapure water when the monitored electric conductivity exceeds a set value. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、半導体ウェハーやチップの洗浄用水等に使用される超純水の加熱冷却方法及び同方法を実施するための装置に関し、装置の稼働中に超純水の電気伝導率を低下させることなく、また熱交換器等を構成するチューブ等の破損等によっても超純水にブラインが混入することを防止できるようにしたものである。   The present invention relates to a method for heating and cooling ultrapure water used for cleaning water for semiconductor wafers and chips, and an apparatus for carrying out the method, and to reduce the electrical conductivity of ultrapure water during operation of the apparatus. In addition, it is possible to prevent the brine from being mixed into the ultrapure water even if the tube constituting the heat exchanger or the like is damaged.

近年ＬＳＩや超ＬＳＩを生産する電子工業における半導体ウェハー又はチップの洗浄用水として、微粒子、コロイダル物質、高分子有機物、発熱性物質を可及的に除去した超純水が用いられている。
洗浄に用いられる超純水は、脱イオン化した高比抵抗のもので、かつ水に溶解しない微粒子をフィルタで除去するとともに、バクテリアの除去も必要である。 In recent years, ultrapure water from which fine particles, colloidal substances, polymer organic substances, and exothermic substances are removed as much as possible has been used as cleaning water for semiconductor wafers or chips in the electronics industry that produces LSIs and VLSIs.
Ultrapure water used for washing is deionized and has a high specific resistance, and it is necessary to remove fine particles that do not dissolve in water with a filter and to remove bacteria.

超純水による洗浄は、例えば超純水の流れの中に被洗浄物を置き、常に新しい超純水に触れるように設計された水洗槽中で行う必要がある。超純水による必要な洗浄時間は水温、流量等により異なるが、水洗槽内の超純水の比抵抗が超純水本来の比抵抗値近くに回復する時間を目安とするのがよい。   The cleaning with ultrapure water needs to be performed in a water washing tank designed so that an object to be cleaned is placed in a flow of ultrapure water and is always in contact with new ultrapure water. The required cleaning time with ultrapure water varies depending on the water temperature, flow rate, etc., but it is preferable to use the time required for the specific resistance of ultrapure water in the washing tank to recover close to the original specific resistance value of ultrapure water.

特許文献１（特開昭６１−１０３５９２号公報）には、超純水の製造装置が開示されている。この装置を図３に基づいて説明する。図３において、タンク０１内の超純水はポンプ０２により高温殺菌用熱交換器０３、フィルタ０４及び冷却用熱交換器０６を経てタンク０１に戻る循環系を循環している。通常の超純水使用時には高温殺菌用熱交換器０３及び冷却用熱交換器０６で熱交換は行なわず、フィルタ０４及び冷却用熱交換器０６を通過した超純水はバルブ０７ａ，０７ｂ，０７ｃを介して末端装置０８ａ，０８ｂ，０８ｃへ送られ、使用後の排水が排水ライン０９へ流される。そして未使用の超純水はタンク０１に戻される。   Patent Document 1 (Japanese Patent Laid-Open No. 61-103592) discloses an apparatus for producing ultrapure water. This apparatus will be described with reference to FIG. In FIG. 3, ultrapure water in the tank 01 is circulated in a circulation system that returns to the tank 01 through the heat exchanger 03 for high-temperature sterilization, the filter 04, and the cooling heat exchanger 06 by the pump 02. When normal ultrapure water is used, heat exchange is not performed by the heat exchanger 03 for high-temperature sterilization and the heat exchanger 06 for cooling, and ultrapure water that has passed through the filter 04 and the heat exchanger 06 for cooling passes through the valves 07a, 07b, 07c. To the terminal devices 08a, 08b, and 08c, and the used waste water flows to the drain line 09. Unused ultrapure water is returned to the tank 01.

またタンク０１には一段前の超純水製造装置からバルブ０１０を介装した供給管０１１を経て、末端装置０８ａ，０８ｂ，０８ｃで使用された超純水量に相当する原水が供給される。一方前記循環系を流れる超純水の生菌の数が一定限度を超えた場合には、通常の運転と同様にポンプ０２により超純水を循環しながら、高温殺菌用熱交換器０３により超純水を循環し、高温殺菌用熱交換器０３により超純水を６０〜９０℃に昇温して殺菌を行い、フィルタ０４を通過した超純水をバルブ０５を介して冷却用熱交換器０６により冷却して通常使用されている超純水の温度に調整した後、バルブ０７ａ，０７ｂ，０７ｃを介して超純水を末端装置０８ａ，０８ｂ，０８ｃ（例えば半導体製造ライン）に供給する。   Further, raw water corresponding to the amount of ultrapure water used in the terminal devices 08a, 08b, and 08c is supplied to the tank 01 through a supply pipe 011 having a valve 010 interposed from the ultrapure water production apparatus in the previous stage. On the other hand, when the number of viable bacteria in the ultrapure water flowing through the circulation system exceeds a certain limit, the ultrapure water is circulated by the pump 02 as in the normal operation, while the superpure water is circulated by the heat exchanger 03 for high temperature sterilization. The pure water is circulated, the ultrapure water is heated to 60-90 ° C. by the heat exchanger 03 for high temperature sterilization, sterilized, and the ultrapure water that has passed through the filter 04 is cooled via the valve 05. After cooling to 06 and adjusting to the temperature of ultrapure water that is normally used, ultrapure water is supplied to the terminal devices 08a, 08b, and 08c (for example, a semiconductor manufacturing line) through valves 07a, 07b, and 07c.

このように高温殺菌用熱交換器０３で高温となった超純水を冷却用熱交換器０６によって末端装置に供給可能な温度、例えば１０℃以下に冷却することによって、超純水の高温殺菌作業中でも末端装置の稼動をストップすることなく、通常の温度の超純水を供給することができる。このことは、半導体製造ラインのように連続した工程となっており、しかもほとんどの工程で超純水を必要とする製造ラインでは極めて重要である。   The ultrapure water that has been heated to high temperature in the heat exchanger 03 for high temperature sterilization in this manner is cooled to a temperature that can be supplied to the terminal device by the heat exchanger 06 for cooling, for example, 10 ° C. Even during work, it is possible to supply ultrapure water at a normal temperature without stopping the operation of the terminal device. This is a continuous process like a semiconductor production line, and is extremely important in a production line that requires ultrapure water in most processes.

しかしながら超純水は、前述のように、脱イオン化された高比抵抗の性質を保つ必要があり、具体的には電気伝導率を１８ＭΩ以上に保持する必要がある。しかしながら超純水を熱交換器にて加熱又は冷却を行う場合、熱交換器部での熱媒体、例えばブラインなどから金属イオンの透過により熱交換器出口側で金属イオンの流出があり、これによって電気伝導率が次第に低下してくるという問題がある。運転後１ヶ月で０．７ＭΩ低下した事例もあった。
超純水の電気伝導率が低下してしまうと、半導体等の製造ラインをストップせざるを得ない事態となってしまう。
また従来の超純水の加熱又は冷却に用いられる熱交換器は、一般に公知のシェルアンドチューブ式等の熱交換器が使用されているが、熱交換器の溶着部から超純水を加熱又は冷却するブラインが混入するおそれがあり、そのため超純水として使用できなくなるという問題があった。 However, as described above, ultrapure water needs to maintain the property of deionized high specific resistance, and specifically, it needs to maintain the electrical conductivity at 18 MΩ or more. However, when heating or cooling ultrapure water with a heat exchanger, metal ions flow out from the heat exchanger outlet side due to permeation of metal ions from the heat medium in the heat exchanger section, for example, brine, etc. There is a problem that the electric conductivity gradually decreases. There was also a case where it decreased by 0.7 MΩ in one month after operation.
If the electrical conductivity of ultrapure water decreases, the production line for semiconductors or the like must be stopped.
In addition, as a conventional heat exchanger used for heating or cooling of ultrapure water, generally known shell and tube type heat exchangers are used. There is a possibility that the brine to be cooled may be mixed, so that there is a problem that it cannot be used as ultrapure water.

そこでこのような問題点に対処するために本発明者等が考えた、本発明の中間ステップとしての比較技術である超純水の冷却システムを図４に基づいて説明する（係る技術は新規である）。
図４において、０６は冷却用熱交換器であり、例えばシェルアンドチューブ型又はハニカム型が採用され、耐化学薬品性、耐熱性及び耐汚れ性等の優れた高純度フッ素樹脂製からなり、超純水への金属溶出を最小限に抑えるようにしている。 Therefore, a cooling system for ultrapure water, which is a comparative technique as an intermediate step of the present invention, considered by the present inventors in order to cope with such a problem, will be described with reference to FIG. is there).
In FIG. 4, reference numeral 06 denotes a cooling heat exchanger, for example, a shell and tube type or a honeycomb type, which is made of a high-purity fluororesin having excellent chemical resistance, heat resistance, dirt resistance, etc. We try to minimize metal elution into pure water.

冷却用熱交換器０６には超純水が流入する入口ライン０２１及び冷却された超純水が図示しない製造ラインに送られる出口ライン０２２が接続されているとともに、ブライン流入ライン０２３及びブライン戻りライン０２４が接続されている。０２５は三方弁であり、出口ライン０２２を流れる超純水の温度を検知する温度センサ０２７からの温度検出信号を得て、冷却用熱交換器０６へのブライン流入量とバイパスライン０２６へのブライン量とを調整可能な電動弁となっている。   The cooling heat exchanger 06 is connected to an inlet line 021 through which ultrapure water flows and an outlet line 022 through which cooled ultrapure water is sent to a production line (not shown), as well as a brine inflow line 023 and a brine return line. 024 is connected. Reference numeral 025 denotes a three-way valve, which obtains a temperature detection signal from a temperature sensor 027 that detects the temperature of the ultrapure water flowing through the outlet line 022, and introduces a brine inflow amount into the cooling heat exchanger 06 and a brine into the bypass line 026. It is an electric valve that can adjust the amount.

０２８は、ブラインタンクであり、貯留部０２８ａに貯留された温度０℃のブラインがポンプ０２９によって流入ライン０２３から冷却用熱交換器０６に供給される。冷却用熱交換器０６で超純水を冷却して温度が５℃になったブラインが戻りライン０２４から貯留部０２８ｂに戻される。貯留部０２８ｂに貯留された５℃のブラインはポンプ０３０によってブラインクーラ０２９に送られ０℃に冷却されて貯留部０２８ａに貯留される。   Reference numeral 028 denotes a brine tank, and the brine having a temperature of 0 ° C. stored in the storage unit 028a is supplied from the inflow line 023 to the cooling heat exchanger 06 by the pump 029. The brine whose temperature has become 5 ° C. by cooling the ultrapure water with the cooling heat exchanger 06 is returned from the return line 024 to the storage unit 028b. The 5 ° C. brine stored in the storage unit 028b is sent to the brine cooler 029 by the pump 030, cooled to 0 ° C., and stored in the storage unit 028a.

かかる超純水冷却装置において、超純水製造装置から入口ライン０２１に送られてきた高温の超純水は、冷却用熱交換器０６で流入ライン０２３から供給される０℃のブラインと熱交換して、例えば１０℃以下に冷却されて出口ライン０２２を経て図示しない製造ラインへ送られる。この場合出口ライン０２２の温度を温度センサ０２７で検知し、その検出値に基づいて三方弁０２５がバイパスライン０２６のブライン流量を調節することにより、出口ライン０２２を流れる超純水の温度を所望の温度に調節することができる。   In such an ultrapure water cooling apparatus, the high-temperature ultrapure water sent from the ultrapure water production apparatus to the inlet line 021 is heat-exchanged with 0 ° C. brine supplied from the inflow line 023 in the cooling heat exchanger 06. Then, it is cooled to, for example, 10 ° C. or less, and sent to a production line (not shown) via an outlet line 022. In this case, the temperature of the outlet line 022 is detected by the temperature sensor 027, and the three-way valve 025 adjusts the brine flow rate of the bypass line 026 based on the detected value, whereby the temperature of the ultrapure water flowing through the outlet line 022 is set to a desired value. Can be adjusted to temperature.

特開昭６１−１０３５９２号公報JP 61-103592 A

図４の冷却システムにおいて、冷却用熱交換器０６は、超純水への金属イオンの溶出を押え、かつ溶着部でのブラインの漏れに起因する超純水へのブラインの混入を防止する目的で、耐化学薬品性、耐熱性及び耐汚れ性等の優れたフッ素樹脂製からなるシェルアンドチューブ式又はハニカム構造の熱交換器を採用したが、この場合超純水が静電気を帯びて帯電した静電気は放電し、フッ素樹脂に微細ピンホールをつくり、場合によっては超純水の流路を構成するチューブを切断するに至るおそれが多分にあった。   In the cooling system of FIG. 4, the cooling heat exchanger 06 suppresses the elution of metal ions into the ultrapure water, and prevents the brine from being mixed into the ultrapure water due to the leakage of the brine at the welded portion. In this case, a shell-and-tube or honeycomb structure heat exchanger made of fluororesin with excellent chemical resistance, heat resistance and dirt resistance was adopted, but in this case, ultrapure water was charged with static electricity. The static electricity was discharged, creating fine pinholes in the fluororesin, possibly leading to the cutting of the tubes constituting the ultrapure water flow path.

チューブが切断した場合、超純水側にブラインが混入してしまい、半導体ラインを補修洗浄のため、１〜２ヶ月停止させなければならないという事態が起こる。
また前述のように、熱交換器からの金属イオンの流出により、熱交換器出口側における超純水の電気伝導率が次第に低下してくるという問題が依然として解決できない問題点として存在している。 When the tube is cut, brine is mixed into the ultrapure water side, and the semiconductor line needs to be stopped for 1 to 2 months for repair cleaning.
Further, as described above, the problem that the electrical conductivity of ultrapure water at the outlet side of the heat exchanger gradually decreases due to the outflow of metal ions from the heat exchanger still exists as a problem that cannot be solved.

本発明は、かかる従来技術の課題に鑑み、例えば半導体製造ライン等の末端装置に超純水を供給する際に、超純水の比抵抗の低下を防止するとともに、超純水の流路を構成するチューブの切断等による超純水へのブラインの混入を未然に防ぐことを目的とする。   In view of the problems of the prior art, the present invention prevents a decrease in the specific resistance of ultrapure water when supplying ultrapure water to a terminal device such as a semiconductor production line, for example. It aims at preventing the mixture of the brine into the ultrapure water by cutting the constituting tube.

本発明の超純水の加熱冷却方法は、かかる目的を達成するもので、ヒートポンプによって加熱又は冷却されたブラインと第１の超純水とを熱交換して同第１の超純水を加熱又は冷却する超純水の加熱冷却方法において、前記ブラインと前記第１の超純水との熱交換を閉回路からなる第２の超純水の循環管路を介して間接的に行なうことを特徴とする。
本発明方法においては、前記ブラインと半導体製造ライン等の末端装置に供給される第１の超純水とを熱交換するに際し、まずブラインと第２の超純水との熱交換を行なった後、第２の超純水と第１の超純水との熱交換を行なう。 The heating and cooling method of ultrapure water of the present invention achieves this object, and heats the first ultrapure water by exchanging heat between the brine heated or cooled by the heat pump and the first ultrapure water. Alternatively, in the heating and cooling method of the ultrapure water to be cooled, heat exchange between the brine and the first ultrapure water is performed indirectly via a second ultrapure water circulation line composed of a closed circuit. Features.
In the method of the present invention, when heat exchange is performed between the brine and the first ultrapure water supplied to a terminal device such as a semiconductor manufacturing line, first, heat exchange is performed between the brine and the second ultrapure water. Then, heat exchange between the second ultrapure water and the first ultrapure water is performed.

本発明方法において、好ましくは、前記循環管路内を流れる第２の超純水の電気伝導率を監視しながら前記ブラインと前記第１の超純水との熱交換を行い、同電気伝導率が設定値を超えたときに熱交換を停止して同循環管路内の第２の超純水を新規な超純水と入れ替える。   In the method of the present invention, preferably, the brine and the first ultrapure water are subjected to heat exchange while monitoring the electrical conductivity of the second ultrapure water flowing in the circulation pipe, and the same electrical conductivity is obtained. When the temperature exceeds the set value, the heat exchange is stopped, and the second ultrapure water in the circulation pipe is replaced with new ultrapure water.

また本発明の超純水の加熱冷却装置は、ブラインを加熱又は冷却するヒートポンプと、同ブラインと第１の超純水とを熱交換する熱交換器とを備えた超純水の加熱冷却装置において、前記ブラインと前記第１の超純水との間に閉回路からなる第２の超純水の循環管路を介在させ、前記ブラインと前記第２の超純水との熱交換を行なう第１の熱交換器と、前記第１の超純水と前記第２の超純水との熱交換を行なう第２の熱交換器とを設けたことを特徴とする。   The ultrapure water heating / cooling device of the present invention includes an ultrapure water heating / cooling device including a heat pump for heating or cooling the brine, and a heat exchanger for exchanging heat between the brine and the first ultrapure water. , A second ultrapure water circulation line comprising a closed circuit is interposed between the brine and the first ultrapure water, and heat exchange between the brine and the second ultrapure water is performed. A first heat exchanger and a second heat exchanger that performs heat exchange between the first ultra pure water and the second ultra pure water are provided.

本発明装置において、好ましくは、前記第２の超純水の循環管路に電気伝導率センサを設けるとともに、同循環管路に第２の超純水の排出口及び新規な超純水を供給する補給経路を設ける。この場合、第２の超純水の電気伝導率がある設定値、例えば１８ＭΩを下回ったら、前記排出口から第１の超純水を排出するとともに、前記補給経路から１８ＭΩを保持している第１の超純水を供給することによって、第２の超純水の入れ替えを行う。
さらに好ましくは、前記構成において、超純水の補助タンクを前記循環管路に接続するとともに、第１の超純水を前記第２の熱交換器に供給する経路から分岐し第１の超純水を前記補助タンクに供給する補給経路を設ける。この構成の場合は、新規な超純水として、第１の超純水を用いる。 In the apparatus of the present invention, preferably, an electrical conductivity sensor is provided in the second ultrapure water circulation line, and a second ultrapure water outlet and new ultrapure water are supplied to the circulation line. Provide a replenishment route. In this case, when the electric conductivity of the second ultrapure water falls below a certain set value, for example, 18 MΩ, the first ultrapure water is discharged from the discharge port and 18 MΩ is maintained from the replenishment path. By supplying 1 ultrapure water, the second ultrapure water is replaced.
More preferably, in the above configuration, an auxiliary tank of ultrapure water is connected to the circulation pipe, and the first ultrapure water is branched from a path for supplying the first ultrapure water to the second heat exchanger. A replenishment path for supplying water to the auxiliary tank is provided. In the case of this configuration, the first ultrapure water is used as the new ultrapure water.

また本発明装置において、好ましくは、前記第１の超純水を末端装置に供給する経路に前記第２の熱交換器を設け、同第２の熱交換器の出口側の前記経路に温度センサを設け、さらに前記ブラインを前記第１の熱交換器に供給する経路の途中で同第１の熱交換器からブラインを戻す戻り経路に接続するバイパス経路を分岐させ、同分岐部に前記温度センサの検出値に基づいて前記バイパス経路を流れる前記ブラインの流量を調節可能な三方弁を設ける。   In the apparatus of the present invention, preferably, the second heat exchanger is provided in a path for supplying the first ultrapure water to the terminal apparatus, and a temperature sensor is provided in the path on the outlet side of the second heat exchanger. And a bypass path connected to a return path for returning the brine from the first heat exchanger in the middle of a path for supplying the brine to the first heat exchanger, and the temperature sensor at the branch section A three-way valve capable of adjusting the flow rate of the brine flowing through the bypass path based on the detected value is provided.

この構成では、第２の熱交換器の出口側経路に設けた温度センサにより第１の超純水の温度を測定し、その測定値に基づき、前記三方弁によって前記バイパス経路を流れるブラインの流量を調整することにより、第１の超純水と熱交換を行う第２の超純水の温度を調整し、それによって末端装置に供給される第１の超純水の温度を制御する。   In this configuration, the temperature of the first ultrapure water is measured by the temperature sensor provided in the outlet side path of the second heat exchanger, and the flow rate of the brine flowing through the bypass path by the three-way valve based on the measured value. Is adjusted to adjust the temperature of the second ultrapure water that exchanges heat with the first ultrapure water, thereby controlling the temperature of the first ultrapure water supplied to the terminal device.

本発明方法によれば、ブラインと第１の超純水との熱交換を閉回路からなる第２の超純水の循環管路を介して間接的に行なうことにより、ブラインが半導体製造ライン等の末端装置に供給される第１の超純水に混入することがなくなる。   According to the method of the present invention, the heat exchange between the brine and the first ultrapure water is indirectly performed via the circulation line of the second ultrapure water made of a closed circuit, so that the brine becomes a semiconductor production line or the like. It will not be mixed in the first ultrapure water supplied to the terminal device.

本発明方法において、好ましくは、循環管路内を流れる第２の超純水の電気伝導率を監視しながら前記ブラインと前記第１の超純水との熱交換を行い、同電気伝導率が設定値を超えたときに熱交換を停止して同循環管路内の第２の超純水を第１の超純水と入れ替えることにより、第２の超純水の電気伝導率を許容値の範囲内に維持することができ、そのため第１の超純水の電気伝導率を常に許容値の範囲内に維持することができる。   In the method of the present invention, preferably, heat exchange is performed between the brine and the first ultrapure water while monitoring the electrical conductivity of the second ultrapure water flowing in the circulation pipe, and the electric conductivity is When the set value is exceeded, the heat exchange is stopped, and the second ultrapure water in the same circulation pipe is replaced with the first ultrapure water, whereby the electrical conductivity of the second ultrapure water is allowed. Therefore, the electrical conductivity of the first ultrapure water can always be kept within the allowable range.

また本発明装置によれば、ブラインと前記第１の超純水との間に閉回路からなる第２の超純水の循環管路を介在させ、前記ブラインと前記第２の超純水との熱交換を行なう第１の熱交換器と、前記第１の超純水と前記第２の超純水との熱交換を行なう第２の熱交換器とを設けたことにより、ブラインと第１の超純水とを直接熱交換させずに、その間に第２の超純水を介在させるため、第１の超純水にブラインが混入することがない。   Further, according to the apparatus of the present invention, a second ultrapure water circulation line consisting of a closed circuit is interposed between the brine and the first ultrapure water, and the brine, the second ultrapure water, Provided with a first heat exchanger that performs heat exchange of the first heat exchanger and a second heat exchanger that performs heat exchange between the first ultrapure water and the second ultrapure water. Since the second ultrapure water is interposed between the first ultrapure water and the first ultrapure water, the brine is not mixed into the first ultrapure water.

また本発明装置において、好ましくは、第２の超純水の循環管路に電気伝導率センサを設けるとともに、同循環管路に第２の超純水の排出口及び新規な第１の超純水を供給する補給経路を設けることにより、第２の超純水の電気伝導率が許容値を逸脱したら、速やかに第２の超純水を前記循環管から排出し、新規な超純水と入れ替えることができ、従って第２の超純水と熱交換を行う第１の超純水の電気伝導率を常に許容値の範囲内に維持することができる。
さらに前記構成において、超純水の補助タンクを前記循環管路に接続するとともに、第１の超純水を前記第２の熱交換器に供給する経路から分岐し第１の超純水を前記補助タンクに供給する補給経路を設けたことにより、新規な超純水として前記第２の熱交換器に流入する第１の超純水を用いることができ、補給経路も簡略化することができる。 In the apparatus of the present invention, preferably, an electrical conductivity sensor is provided in the second ultrapure water circulation line, and the second ultrapure water discharge port and the new first ultrapure water are provided in the circulation line. By providing a replenishment path for supplying water, if the electrical conductivity of the second ultrapure water deviates from the allowable value, the second ultrapure water is quickly discharged from the circulation pipe, and new ultrapure water and Therefore, the electrical conductivity of the first ultrapure water that exchanges heat with the second ultrapure water can always be maintained within the allowable range.
Furthermore, in the said structure, while connecting the auxiliary tank of an ultrapure water to the said circulation line, it branches from the path | route which supplies 1st ultrapure water to the said 2nd heat exchanger, and the 1st ultrapure water is the said By providing the replenishment path for supplying to the auxiliary tank, the first ultrapure water flowing into the second heat exchanger can be used as new ultrapure water, and the replenishment path can be simplified. .

また本発明装置において、好ましくは、第１の超純水を末端装置に供給する経路に第２の熱交換器を設け、同第２の熱交換器の出口側の前記経路に温度センサを設け、さらにブラインを第１の熱交換器に供給する経路の途中で同第１の熱交換器からブラインを戻す戻り経路に接続するバイパス経路を分岐させ、同分岐部に前記温度センサの検出値に基づいて前記バイパス経路を流れる前記ブラインの流量を調節可能な三方弁を設けたことにより、第２の熱交換器の出口側経路に設けた温度センサにより第１の超純水の温度を測定し、その測定値に基づき、前記三方弁によって前記バイパス経路を流れるブラインの流量を調整することにより、第１の超純水と熱交換を行う第２の超純水の温度を調整し、それによって末端装置に供給される第１の超純水の温度を制御することができる。   In the apparatus of the present invention, preferably, a second heat exchanger is provided in a path for supplying the first ultrapure water to the terminal apparatus, and a temperature sensor is provided in the path on the outlet side of the second heat exchanger. Further, a bypass path connected to a return path for returning the brine from the first heat exchanger is branched in the middle of a path for supplying the brine to the first heat exchanger, and the detected value of the temperature sensor is set to the branch section. The temperature of the first ultrapure water is measured by the temperature sensor provided in the outlet side path of the second heat exchanger by providing a three-way valve capable of adjusting the flow rate of the brine flowing through the bypass path based on Based on the measured value, the temperature of the second ultrapure water that exchanges heat with the first ultrapure water is adjusted by adjusting the flow rate of the brine flowing through the bypass path by the three-way valve, thereby First supplied to the end device It is possible to control the temperature of ultrapure water.

以下、本発明を図に示した実施例を用いて詳細に説明する。但し、この実施例に記載されている構成部品の寸法、材質、形状、その相対配置などは特に特定的な記載がない限り、この発明の範囲をそれのみに限定する趣旨ではなく、単なる説明例にすぎない。
図１は、本発明装置の第１実施例を示す系統図である。 Hereinafter, the present invention will be described in detail with reference to the embodiments shown in the drawings. However, the dimensions, materials, shapes, relative arrangements, and the like of the component parts described in this example are not intended to limit the scope of the present invention only to specific examples unless otherwise specified. Only.
FIG. 1 is a system diagram showing a first embodiment of the apparatus of the present invention.

本発明装置の第１実施例を示す図１において、図３及び図４と同一符号を付した部材及び機器は、同一の部材及び機器を示し、同一の機能を有するものであり、説明を省略する。図１において、３１は圧縮機、３２は蒸発器、３３は膨張弁、３４はコンデンサであり、これらの機器はブラインクーラを構成する。３５は、ブラインと循環管路３６をポンプ３９によって循環する第２の超純水とを熱交換する熱交換器であり、循環管路３６には電気伝導率センサ３７が設けられているとともに、超純水を貯留し、必要に応じ循環管路３６に超純水を供給する補助タンク３８が接続されている。   In FIG. 1 showing the first embodiment of the device of the present invention, the members and devices having the same reference numerals as those in FIGS. 3 and 4 indicate the same members and devices and have the same functions, and the description thereof is omitted. To do. In FIG. 1, 31 is a compressor, 32 is an evaporator, 33 is an expansion valve, and 34 is a condenser, and these devices constitute a brine cooler. 35 is a heat exchanger that exchanges heat between the brine and the second ultrapure water that circulates in the circulation line 36 by the pump 39. The circulation line 36 is provided with an electrical conductivity sensor 37, An auxiliary tank 38 for storing ultrapure water and supplying ultrapure water to the circulation pipe 36 as necessary is connected.

かかる第１実施例の装置において、ブラインタンク２８の貯留部２８ｂに貯留されているブラインはブラインクーラ２９によって冷却された後、貯留部２８ａに戻され、０．５℃の温度に保持される。貯留部２８ａに貯留された超純水はポンプ２８ｃによって流入ライン２３を経て熱交換器３５に供給されて、循環管路３６を循環する第２の超純水と熱交換された後、２℃の温度に昇温して戻りライン２４を経てブラインタンク２８の貯留部２８ｂに戻される。   In the apparatus of the first embodiment, the brine stored in the storage section 28b of the brine tank 28 is cooled by the brine cooler 29, then returned to the storage section 28a, and held at a temperature of 0.5 ° C. The ultrapure water stored in the storage unit 28a is supplied to the heat exchanger 35 via the inflow line 23 by the pump 28c, and is heat-exchanged with the second ultrapure water circulating in the circulation pipe 36. The temperature is raised to the above temperature and returned to the storage portion 28b of the brine tank 28 via the return line 24.

第２の超純水は補助タンク３８から循環管路３６に供給され、熱交換器３５でブラインと熱交換して６℃に冷却される。また第１の超純水は入口ライン２１から例えば２５℃の温度で熱交換器６に供給され、熱交換器６で第２の超純水と熱交換して冷却され、１０℃以下の温度で出口ライン２２に排出され、図示しない半導体製造ライン等の末端装置に供給される。   The second ultrapure water is supplied from the auxiliary tank 38 to the circulation line 36, and is heat-exchanged with brine in the heat exchanger 35 and cooled to 6 ° C. The first ultrapure water is supplied from the inlet line 21 to the heat exchanger 6 at a temperature of, for example, 25 ° C., and is cooled by exchanging heat with the second ultrapure water in the heat exchanger 6. Is discharged to the outlet line 22 and supplied to a terminal device such as a semiconductor manufacturing line (not shown).

循環管路３６には電気伝導率センサ３７が設けられ、絶えず電気伝導率をチェックするとともに、循環管路３６を循環する第２の超純水の電気伝導率が許容値を逸脱した場合には、補助タンク３８に貯留してある新規な超純水を供給し、第２の超純水を図示しない排出口から排出して新規な超純水と入れ替えることにより、電気伝導率を許容値の範囲に維持することができる。   An electrical conductivity sensor 37 is provided in the circulation line 36 to constantly check the electric conductivity, and when the electric conductivity of the second ultrapure water circulating in the circulation line 36 deviates from the allowable value. Then, the new ultrapure water stored in the auxiliary tank 38 is supplied, the second ultrapure water is discharged from a discharge port (not shown), and is replaced with the new ultrapure water. Can be kept in range.

また冷却用熱交換器６で循環管路３６を流れる第２の超純水と熱交換された超純水は、図示しない半導体製造ライン等に超純水を供給する出口ライン２２の温度を温度センサ２７で測定し、その検出信号を三方弁２５に送り、三方弁２５ではその温度検出値に基づいてバイパスライン２６を流れるブラインの流量を調整することにより、循環管路３６を循環する第２の超純水の温度を制御し、さらには第２の超純水と熱交換され末端装置に供給される第１の超純水の温度を所望の温度に制御することができる。   In addition, the ultrapure water heat-exchanged with the second ultrapure water flowing through the circulation pipe 36 in the cooling heat exchanger 6 has the temperature of the outlet line 22 for supplying ultrapure water to a semiconductor production line (not shown). The sensor 27 measures and sends the detection signal to the three-way valve 25. The three-way valve 25 adjusts the flow rate of the brine flowing through the bypass line 26 based on the detected temperature value, thereby circulating the second through the circulation line 36. In addition, the temperature of the first ultrapure water supplied to the terminal device after heat exchange with the second ultrapure water can be controlled to a desired temperature.

かかる第１実施例の装置によれば、ブラインと第２超純水とを熱交換する熱交換器３５において、チューブ切断等の事故が発生したとしても、製造ラインに接続された出口ライン２２を流れる第１の超純水にブラインが混入することを完全に防止できる。
また金属イオンが循環管路３６を循環する第２の超純水に透過したとしても、それを電気伝導率センサ３７で検知して、第２の超純水を新規な超純水と入れ替えるメンテナンス機構を具備することにより、製造ラインに流入する第１の超純水への金属イオンの透過を確実に防止することができる。 According to the apparatus of the first embodiment, in the heat exchanger 35 that exchanges heat between the brine and the second ultrapure water, the outlet line 22 connected to the production line can be connected even if an accident such as tube cutting occurs. It is possible to completely prevent the brine from being mixed into the flowing first ultrapure water.
Further, even if the metal ions permeate the second ultrapure water circulating through the circulation pipe 36, it is detected by the electrical conductivity sensor 37, and the second ultrapure water is replaced with new ultrapure water. By including the mechanism, it is possible to reliably prevent the transmission of metal ions to the first ultrapure water flowing into the production line.

次に本発明装置の第２実施例を図２に基づいて説明する。図２において、図１と同一符号を付した部材及び機器は、図１の部材及び機器と同一のものであり、同一の機能を有する。
図２において、電気伝導率センサ３７により測定される循環管路３６を循環する第２の超純水の電気伝導率が許容値の範囲を逸脱した場合には、入口ライン２１から分岐した補給ライン４１に設けられたバルブ４４が開放され、補助タンク３８に入口ライン２１から第１の超純水が補給されるとともに、循環管路３６に設けられたバルブ４３が閉鎖され、かつバルブ４５が開放される。 Next, a second embodiment of the device of the present invention will be described with reference to FIG. In FIG. 2, the members and devices denoted by the same reference numerals as those in FIG. 1 are the same as the members and devices in FIG. 1 and have the same functions.
In FIG. 2, when the electrical conductivity of the second ultrapure water circulating through the circulation line 36 measured by the electrical conductivity sensor 37 deviates from the allowable value range, the supply line branched from the inlet line 21. The valve 44 provided at 41 is opened, the first ultrapure water is supplied to the auxiliary tank 38 from the inlet line 21, the valve 43 provided at the circulation line 36 is closed, and the valve 45 is opened. Is done.

これによって電気伝導率が低下した第２の超純水が排水ライン４２から排水されるとともに、代わりに補助タンク３８から循環管路３６に電気伝導率が許容値の範囲内に維持された第１の超純水が供給され、これによって循環管路３６を流れる超純水の電気伝導率が許容値の範囲内に維持される。
本第２実施例においては、新規な超純水として入口ライン２１から第１の超純水を導入することにより、配管経路を簡便化することができる。 As a result, the second ultrapure water whose electrical conductivity has been lowered is drained from the drainage line 42 and, instead, the electrical conductivity is maintained within the allowable range from the auxiliary tank 38 to the circulation line 36. Thus, the electrical conductivity of the ultrapure water flowing through the circulation pipe 36 is maintained within the allowable range.
In the second embodiment, the piping route can be simplified by introducing the first ultrapure water from the inlet line 21 as new ultrapure water.

本発明によれば、半導体製造ライン等に洗浄用として供給される超純水の電気伝導率の低下の原因となる金属イオンの溶出やあるいは超純水を加熱又は冷却する際に熱媒体として使用されるブラインの超純水への混入を確実に防止することができる有益な超純水の加熱冷却方法及び装置を実現することができる。   According to the present invention, elution of metal ions that cause a decrease in the electrical conductivity of ultrapure water supplied for cleaning to a semiconductor production line or the like, or use as a heating medium when heating or cooling ultrapure water It is possible to realize a heating and cooling method and apparatus of beneficial ultrapure water that can surely prevent the brine from being mixed into the ultrapure water.

本発明装置の第１実施例を示す系統図である。It is a systematic diagram showing a first embodiment of the device of the present invention. 本発明装置の第２実施例を示す系統図である。It is a systematic diagram which shows 2nd Example of this invention apparatus. 従来の超純水製造装置を示す系統図である。It is a systematic diagram which shows the conventional ultrapure water manufacturing apparatus. 比較技術に係る超純水の冷却システムを示す系統図である。It is a systematic diagram which shows the cooling system of the ultrapure water which concerns on a comparison technique.

符号の説明Explanation of symbols

０１ 超純水タンク
０３ 高温殺菌用熱交換器
０４ フィルタ
０６ 冷却用熱交換器
０８ａ 末端装置
０９ 排水ライン
０１１ 供給管
０２１、２１ 超純水入口ライン
０２２、２２ 超純水出口ライン
０２３、２３ ブライン流入ライン
０２４、２４ ブライン戻りライン
０２５、２５ 三方切換弁
０２６、２６ バイパスライン
０２７、２７ 温度センサ
０２８、２８ ブラインタンク
０２８ａ、０２８ｂ、２８ａ、２８ｂ 貯留部
０２９、２９ ブラインクーラ
３１ 圧縮機
３２ 蒸発器
３３ 膨張弁
３４ コンデンサ
３５ 熱交換器
３６ 循環管路
３７ 電気伝導率センサ
３８ 補助タンク
４１ 補給ライン
４２ 排水ライン 01 Ultrapure water tank 03 Heat exchanger for high temperature sterilization 04 Filter 06 Heat exchanger for cooling 08a End device 09 Drain line 011 Supply pipe 021, 21 Ultrapure water inlet line 022, 22 Ultrapure water outlet line 023, 23 Brine inflow Lines 024, 24 Brine return lines 025, 25 Three-way selector valve
026, 26 Bypass lines 027, 27 Temperature sensors 028, 28 Brine tanks 028a, 028b, 28a, 28b Reservoirs 029, 29 Brine cooler 31 Compressor 32 Evaporator 33 Expansion valve 34 Capacitor 35 Heat exchanger 36 Circulation line 37 Electricity Conductivity sensor 38 Auxiliary tank 41 Supply line 42 Drain line

Claims (6)

ヒートポンプによって加熱又は冷却されたブラインと第１の超純水とを熱交換して同第１の超純水を加熱又は冷却する超純水の加熱冷却方法において、前記ブラインと前記第１の超純水との熱交換を閉回路からなる第２の超純水の循環管路を介して間接的に行なうことを特徴とする超純水の加熱冷却方法。   In the heating and cooling method of ultrapure water in which the brine heated or cooled by the heat pump is exchanged with the first ultrapure water to heat or cool the first ultrapure water, the brine and the first ultrapure water are heated. A method for heating and cooling ultrapure water, characterized in that heat exchange with pure water is indirectly performed through a circulation line of a second ultrapure water comprising a closed circuit. 前記循環管路内を流れる第２の超純水の電気伝導率を監視しながら前記ブラインと前記第１の超純水との熱交換を行い、同電気伝導率が設定値を超えたときに熱交換を停止して同循環管路内の第２の超純水を新規な超純水と入れ替えることを特徴とする請求項１記載の超純水の加熱冷却方法。   When the electrical conductivity of the brine and the first ultrapure water is monitored while monitoring the electrical conductivity of the second ultrapure water flowing in the circulation pipe, and the electrical conductivity exceeds a set value The method for heating and cooling ultrapure water according to claim 1, wherein the heat exchange is stopped and the second ultrapure water in the circulation pipe is replaced with new ultrapure water. ブラインを加熱又は冷却するヒートポンプと、同ブラインと第１の超純水とを熱交換する熱交換器とを備えた超純水の加熱冷却装置において、前記ブラインと前記第１の超純水との間に閉回路からなる第２の超純水の循環管路を介在させ、前記ブラインと前記第２の超純水との熱交換を行なう第１の熱交換器と、前記第１の超純水と前記第２の超純水との熱交換を行なう第２の熱交換器とを設けたことを特徴とする超純水の加熱冷却装置。   An ultrapure water heating / cooling device comprising: a heat pump for heating or cooling the brine; and a heat exchanger for exchanging heat between the brine and the first ultrapure water, wherein the brine and the first ultrapure water are A first heat exchanger for exchanging heat between the brine and the second ultrapure water by interposing a second ultrapure water circulation line formed of a closed circuit between the first ultrapure water and the first ultrapure water An apparatus for heating and cooling ultrapure water, comprising a second heat exchanger for exchanging heat between pure water and the second ultrapure water. 前記第２の超純水の循環管路に電気伝導率センサを設けるとともに、同循環管路に第２の超純水の排出口及び新規な超純水を供給する補給経路を設けたことを特徴とする請求項３記載の超純水の加熱冷却装置。   An electrical conductivity sensor is provided in the second ultrapure water circulation line, and a second ultrapure water outlet and a supply path for supplying new ultrapure water are provided in the circulation line. The apparatus for heating and cooling ultrapure water according to claim 3. 超純水の補助タンクを前記循環管路に接続するとともに、第１の超純水を前記第２の熱交換器に供給する経路から分岐し第１の超純水を前記補助タンクに供給する補給経路を設けたことを特徴とする請求項４記載の超純水の加熱冷却装置。   An auxiliary tank for ultrapure water is connected to the circulation pipe, and the first ultrapure water is branched from a path for supplying the first ultrapure water to the second heat exchanger, and the first ultrapure water is supplied to the auxiliary tank. The ultrapure water heating and cooling device according to claim 4, wherein a replenishment path is provided. 前記第１の超純水を末端装置に供給する経路に前記第２の熱交換器を設け、同第２の熱交換器の出口側の前記経路に温度センサを設け、さらに前記ブラインを前記第１の熱交換器に供給する経路の途中で同第１の熱交換器からブラインを戻す戻り経路に接続するバイパス経路を分岐させ、同分岐部に前記温度センサの検出値に基づいて前記バイパス経路を流れる前記ブラインの流量を調節可能な三方弁を設けたことを特徴とする請求項３記載の超純水の加熱冷却装置。   The second heat exchanger is provided in a path for supplying the first ultrapure water to the terminal device, a temperature sensor is provided in the path on the outlet side of the second heat exchanger, and the brine is further added to the first apparatus. A bypass path connected to a return path for returning brine from the first heat exchanger is branched in the middle of a path to be supplied to one heat exchanger, and the bypass path is based on the detection value of the temperature sensor at the branch section. The apparatus for heating and cooling ultrapure water according to claim 3, further comprising a three-way valve capable of adjusting a flow rate of the brine flowing through the water.
JP2004350263A 2004-12-02 2004-12-02 Heating and cooling method and apparatus for ultrapure water Pending JP2006159003A (en)

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CN103506333A (en) * 2013-09-28 2014-01-15 无锡荣能半导体材料有限公司 Silicone wafer degumming pre-washing device
TWI687374B (en) * 2016-09-14 2020-03-11 日商栗田工業股份有限公司 Ultrapure water manufacturing device
JP6149992B1 (en) * 2016-09-14 2017-06-21 栗田工業株式会社 Ultrapure water production equipment
JP6149993B1 (en) * 2016-09-14 2017-06-21 栗田工業株式会社 Ultrapure water production equipment
JP2018043190A (en) * 2016-09-14 2018-03-22 栗田工業株式会社 Ultrapure water manufacturing device
JP2018043191A (en) * 2016-09-14 2018-03-22 栗田工業株式会社 Ultrapure water manufacturing device
WO2018051552A1 (en) * 2016-09-14 2018-03-22 栗田工業株式会社 Ultrapure water manufacturing device
CN109476509B (en) * 2016-09-14 2020-06-26 栗田工业株式会社 Ultrapure water production apparatus
WO2018051551A1 (en) * 2016-09-14 2018-03-22 栗田工業株式会社 Ultrapure water manufacturing device
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JP2018043229A (en) * 2017-05-24 2018-03-22 栗田工業株式会社 Ultrapure water manufacturing device
JP2018043228A (en) * 2017-05-24 2018-03-22 栗田工業株式会社 Ultrapure water manufacturing device
WO2020008884A1 (en) * 2018-07-06 2020-01-09 栗田工業株式会社 Reverse osmosis treatment method and system
JPWO2020008884A1 (en) * 2018-07-06 2020-07-09 栗田工業株式会社 Reverse osmosis treatment method and system
CN111110047A (en) * 2018-10-30 2020-05-08 青岛海尔施特劳斯水设备有限公司 Warm water system and drinking water equipment
CN110642358A (en) * 2019-07-30 2020-01-03 三一重型装备有限公司 Underground pure water conveying system for coal mine

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