JP2006156668A - 発光装置及びその製造方法 - Google Patents
発光装置及びその製造方法 Download PDFInfo
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- JP2006156668A JP2006156668A JP2004344484A JP2004344484A JP2006156668A JP 2006156668 A JP2006156668 A JP 2006156668A JP 2004344484 A JP2004344484 A JP 2004344484A JP 2004344484 A JP2004344484 A JP 2004344484A JP 2006156668 A JP2006156668 A JP 2006156668A
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- light emitting
- substrate
- glass
- emitting element
- light
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/52—Encapsulations
- H01L33/56—Materials, e.g. epoxy or silicone resin
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
- C04B35/111—Fine ceramics
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
- C04B35/18—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay rich in aluminium oxide
- C04B35/185—Mullite 3Al2O3-2SiO2
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
- C04B35/18—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay rich in aluminium oxide
- C04B35/195—Alkaline earth aluminosilicates, e.g. cordierite or anorthite
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
- C04B35/20—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay rich in magnesium oxide, e.g. forsterite
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/44—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminates
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- C—CHEMISTRY; METALLURGY
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Abstract
【解決手段】 セラミックスの基板20に所定の導電パターンを配置した基板電極21を設け、同一面側にn側電極11とp側電極12とを有する発光素子10をこの基板電極21上にフェイスダウンでフリップチップ実装して電気的に接続しており、ガラス30をガラス転移温度以上融点以下の軟化状態を示す温度まで加熱した後、軟化状態のガラスを押圧により基板20に固定して、発光素子10をガラスで被覆する発光装置である。
【選択図】 図1
Description
<発光装置>
第1の実施の形態に係る発光装置について図面を用いて説明する。図1は、第1の実施の形態に係る発光装置を示す概略斜視図である。図2は、第1の実施の形態に係る発光装置を示す概略平面図である。
発光素子10は、基板上にGaAlN、ZnS、ZnSe、SiC、GaP、GaAlAs、AlN、InN、AlInGaP、InGaN、GaN、AlInGaN等の半導体を発光層として形成させたものが用いられる。半導体の構造としては、MIS接合、PIN接合やPN接合を有したホモ構造、ヘテロ構造あるいはダブルへテロ構成のものが挙げられる。半導体層の材料やその混晶度によって発光波長を紫外光から赤外光まで種々選択することができる。発光層は、量子効果が生ずる薄膜とした単一量子井戸構造や多重量子井戸構造としても良い。
基板20は所定の配線パターンを有する基板電極21を設けている。発光素子10の電極と基板電極21とを電気的に接続して、基板20上に発光素子10を載置している。発光素子10はフェイスダウンで配置する。基板20はガラス30を加熱して軟化状態にする温度で変質しない物質であればよい。例えば、セラミックス基板、GaN基板、ガラスエポキシ基板、金属基板、ガラス基板等である。そのうち特にセラミックスが好ましい。セラミックスは、耐熱性、耐光性に優れているからである。
セラミックスパッケージ20の外側の底面及び側面に電極30を設ける。この電極30は外部電極と電気的接続を取るためのものである。また電極30は、セラミックスパッケージ20の凹部内の配線パターンと電気的に接続されている。この接続は、グリーンシートを積層、焼成した後、載置部24に貫通孔を設け、該貫通孔を導電性部材で埋めるなどして載置部24の上面24aとセラミックスパッケージ20の底面との電気的接続を取っている。
発光素子10のn側電極11とp側電極12とは、バンプを介して基板電極21と電気的に接合する。バンプの材質は導電性である。また、ガラス30を加熱して軟化状態にする際にバンプ等の金属が軟化して短絡しないものを用いる。例えば、Au−Sn、Ag、Cu、Pb等の金属及び合金を用いることができる場合もあるが、好ましくはAuである。Auの融点は1064℃である。金バンプはガラス30を加熱して軟化状態にする温度では軟化せず、発光素子10の電極と基板電極21との短絡は生じない。バンプは、通常100から300μm径のボールのものである。
ガラス30は発光素子10からの光を透過するとともに、発光素子10を外部からの水や埃等から保護する。ガラス30は発光素子10を直接被覆している。ガラス30は押圧により基板20に固定する。ガラス30はセラミックスの基板20に固定する。これはガラス30と金属との固定力よりもガラス30とセラミックスとの固定力の方が強いためである。ガラス30は平板状であり、所定の厚さを有する。ガラス30の側面は切断機で切断した状態でもよい。鋸状の切断機でガラス30全体を切断している。若しくは切断機でガラス30の一部に傷を付け、この傷に沿って応力を加え、割った状態のものでもよい。さらに、この切断若しくは分割後、ガラス30の側面を研磨している。また、ガラス30の上面を研磨しなくても使用できる場合があるが、ガラス30の上面を研磨して凹凸を無くしたものも使用できる。ガラス30を切断機で切断するため、基板20よりもやや小型の径を有するが、割り溝を入れ分割する場合は、基板20とほぼ同様の径とすることもできる。
ガラス30には、蛍光物質を含有することもできる。蛍光物質を含有することにより発光素子10から射出された光が蛍光物質に吸収され、波長変換を行い発光素子10と異なる色を発光することができる。よって、蛍光物質は発光素子10からの光を吸収し異なる波長の光に波長変換するものであればよい。例えば、Eu、Ce等のランタノイド系元素で主に賦活される窒化物系蛍光体・酸窒化物系蛍光体、Eu等のランタノイド系、Mn等の遷移金属系の元素により主に付活されるアルカリ土類ハロゲンアパタイト蛍光体、アルカリ土類金属ホウ酸ハロゲン蛍光体、アルカリ土類金属アルミン酸塩蛍光体、アルカリ土類ケイ酸塩、アルカリ土類硫化物、アルカリ土類チオガレート、アルカリ土類窒化ケイ素、ゲルマン酸塩、又は、Ce等のランタノイド系元素で主に付活される希土類アルミン酸塩、希土類ケイ酸塩又はEu等のランタノイド系元素で主に賦活される有機及び有機錯体等から選ばれる少なくともいずれか1以上であることが好ましい。具体例として、下記の蛍光体を使用することができるが、これに限定されない。
上述の蛍光物質に代えて、若しくは蛍光物質と共に光拡散部材をガラスに含有させてもよい。具体的な光拡散部材としては、チタン酸バリウム、酸化チタン、酸化アルミニウム、酸化珪素等が好適に用いられる。
上述の蛍光物質に代えて、若しくは蛍光物質、光拡散部材と共にフィラーをガラスに含有させてもよい。具体的な材料は光拡散部材と同様であるが、光拡散部材と中心粒径が異なり、本明細書においてフィラーとは中心粒径が5μm以上100μm以下のものをいう。このような粒径のフィラーをガラス30中に含有させると、光拡散作用により発光装置の色度バラツキを改善することができる。ガラス30の流動性を一定に調整することが可能となり、歩留まり高く発光装置を量産することができる。また、ガラス30の流動性を一定に調整することができる。フィラーは、蛍光物質と同一若しくは類似の粒径及び/または形状を有することが好ましい。類似の粒径は、各粒子の真円との近似程度を表す円形度(円経度=粒子の投影面積に等しい真円の周囲長さ/粒子の投影の周囲長さ)の値の差が20%未満の場合をいう。このようなフィラーを用いることにより、蛍光物質とフィラーが互いに作用しあい、樹脂中にて蛍光物質を良好に分散させることができ色むらを抑制することができる。
上述の蛍光物質に代えて、若しくは蛍光物質、光拡散部材、フィラーと共にセラミックス粉をガラス30に含有させてもよい。セラミックス粉の材質はSiO2、Al2O3、AlN、SiC、ZrO2、TiO2、TiN、Si3N4、SnO2などであり、蛍光物質、光拡散部材、フィラーと材質が重複する場合がある。セラミックス粉の大きさは数μmから数十μmの大きさがあり、略球形、略楕円形、多角形などである。
ガラス30の表面に被膜を形成することが好ましい。被膜はガラス30の白濁を抑制することができる。ガラス30の白濁はガラスが結晶化することに起因する。また水分の透過を抑制することができる。被膜はフィラーなどを入れたものを使用することができる。例えば所定の波長の光(350nm以下の波長及び550nm以上の波長の光)を吸収する被膜を用いることにより、特定の波長の光(350nmから550nmまでの波長の光)を取り出すことができる発光装置を提供することができる。被膜は一層だけでなく、多層構造とすることもできる。多層構造とすることにより透過率を上げることもできる。
第1の実施の形態に係る発光装置について図面を参酌して説明する。図3乃至図9は、第1の実施の形態に係る発光装置の製造方法を示す概略断面図(1)〜(7)である。ただし、個々に割り出した基板20の側面部に相当する部分は基板電極21が形成されているが、便宜上省略している。
第2の実施の形態について説明する。図10は、第2の実施の形態に係る発光装置を示す概略断面図である。但し、第1の実施の形態とほぼ同様な構成を採る部分については説明を省略する。
第3の実施の形態について説明する。図11は、第3の実施の形態に係る発光装置を示す概略断面図である。但し、第1の実施の形態とほぼ同様な構成を採る部分については説明を省略する。
第4の実施の形態について説明する。図12は、第4の実施の形態に係る発光装置を示す概略断面図である。但し、第1の実施の形態とほぼ同様な構成を採る部分については説明を省略する。
第5の実施の形態について説明する。図13は、第5の実施の形態に係る発光装置を示す概略断面図である。但し、第1の実施の形態、第3の実施の形態とほぼ同様な構成を採る部分については説明を省略する。
第6の実施の形態について説明する。図14は、第6の実施の形態に係る発光装置を示す概略断面図である。但し、第2の実施の形態とほぼ同様な構成を採る部分については説明を省略する。
第7の実施の形態について説明する。図15は、第7の実施の形態に係る発光装置を示す概略断面図である。但し、第3の実施の形態とほぼ同様な構成を採る部分については説明を省略する。
第8の実施の形態について説明する。図16は、第8の実施の形態に係る発光装置を示す概略断面図である。但し、第4の実施の形態とほぼ同様な構成を採る部分については説明を省略する。
第9の実施の形態について説明する。図17は、第9の実施の形態に係る発光装置を示す概略断面図である。但し、第1の実施の形態、第3の実施の形態、第5の実施の形態とほぼ同様な構成を採る部分については説明を省略する。
第10の実施の形態について説明する。図18は、第10の実施の形態に係る発光装置を示す概略平面図である。図19は、第10の実施の形態に係る発光装置を示す概略断面図である。図19の概略断面図は、図18のXIX−XIXを切断した状態である。第1の実施の形態とほぼ同様な構成を採る部分については説明を省略する。
第11の実施の形態について説明する。図20は、第11の実施の形態に係る発光装置を示す概略平面図である。図21は、第11の実施の形態に係る発光装置を示す概略断面図である。図21の概略断面図は、図20のXXI−XXIを切断した状態である。第1の実施の形態とほぼ同様な構成を採る部分については説明を省略する。
第12の実施の形態について説明する。図22は、第12の実施の形態に係る発光装置を示す概略断面図である。第1の実施の形態とほぼ同様な構成を採る部分については説明を省略する。
実施例1について説明する。図1は、第1の実施の形態に係る発光装置を示す概略斜視図である。図2は、第1の実施の形態に係る発光装置を示す概略平面図である。適宜第1の実施の形態を参酌する。
11 n側電極
12 p側電極
20、120、220、320、420、520、620、720、820、920、1020、1120 基板
21、121、221、321、421、521、621、721、821、921、1021、1121 基板電極
30、130、230、330、430、530、630、730、830、930、1030、1130 ガラス
30a 上面
30b 側面
40、140 バンプ
50 気体層
480、880 被覆部材
915、1015 保護素子
1016、1116 ワイヤ
Claims (24)
- 同一面側に正負一対の電極を有する発光素子と、
該発光素子が載置される基板と、
該基板に設けられる基板電極と、
を有する発光装置であって、
該発光素子は該基板電極上にフェイスダウンされ、該発光素子が持つ電極と該基板電極とが電気的に接続されており、
該発光素子はガラスにより被覆されており、
該発光素子と該基板との間には気体が介在していることを特徴とする発光装置。 - 同一面側に正負一対の電極を有する発光素子と、
該発光素子が載置される基板と、
該基板に設けられる基板電極と、
を有する発光装置であって、
該発光素子は該基板電極上にフェイスダウンされ、該発光素子が持つ電極と該基板電極とがバンプを介して電気的に接続されており、
該発光素子はガラスにより被覆されており、
該発光素子と該基板との間には絶縁部材が設けられていることを特徴とする発光装置。 - 同一面側に正負一対の電極を有する発光素子と、
該発光素子が載置される基板と、
該基板に設けられる基板電極と、
を有する発光装置であって、
該発光素子は該基板電極上にフェイスダウンされ、該発光素子が持つ電極と該基板電極とが電気的に接続されており、
該発光素子はガラスにより被覆されており、
該ガラスは押圧により該基板に固定されていることを特徴とする発光装置。 - 同一面側に正負一対の電極を有する発光素子と、
該発光素子が載置される基板と、
該基板に設けられる基板電極と、
を有する発光装置であって、
該発光素子は該基板電極上にフェイスダウンされ、該発光素子が持つ電極と該基板電極とが電気的に接続されており、
該発光素子はガラスにより被覆されており、
該ガラスの材質は200℃以上700℃以下のガラス転移温度(Tg)を有していることを特徴とする発光装置。 - 同一面側に正負一対の電極を有する発光素子と、
該発光素子が載置される基板と、
該基板に設けられる基板電極と、
を有する発光装置であって、
該発光素子は該基板電極上にフェイスダウンされ、該発光素子が持つ電極と該基板電極とが電気的に接続されており、
該発光素子はガラスにより被覆されており、
該ガラスの材質は200℃以上700℃以下のガラス転移温度(Tg)を有しており、かつ、220℃以上の融点を有していることを特徴とする発光装置。 - 同一面側に正負一対の電極を有する発光素子と、
該発光素子が載置される基板と、
該基板に設けられる基板電極と、
を有する発光装置であって、
該発光素子は該基板電極上にフェイスダウンされ、該発光素子が持つ電極と該基板電極とが電気的に接続されており、
該発光素子はガラスにより被覆されており、
該ガラスの側面は研磨若しくは切断されていることを特徴とする発光装置。 - 同一面側に正負一対の電極を有する発光素子と、
該発光素子が載置される基板と、
該基板に設けられる基板電極と、
を有する発光装置であって、
該発光素子は該基板電極上にフェイスダウンされ、該発光素子が持つ電極と該基板電極とが電気的に接続されており、
該発光素子はガラスにより被覆されており、
該ガラスの上面は研磨されていることを特徴とする発光装置。 - 前記基板は、セラミックスであることを特徴とする請求項1乃至7の少なくともいずれか一項に記載の発光装置。
- 前記基板は、底面と側面とを持つ凹部が形成されており、該底面には基板電極が設けられていることを特徴とする請求項1乃至7の少なくともいずれか一項に記載の発光装置。
- 前記ガラスは、レンズ形状を有することを特徴とする請求項1乃至7の少なくともいずれか一項に記載の発光装置。
- 前記ガラスは、鉛の含有量が100ppm以下、若しくは実質的に含有されていないことを特徴とする請求項1乃至7の少なくともいずれか一項に記載の発光装置。
- 前記ガラスは、蛍光物質、顔料、フィラー、光拡散部材、セラミックス粉の少なくともいずれか1つが含有されていることを特徴とする請求項1乃至7の少なくともいずれか一項に記載の発光装置。
- 前記発光素子は、被覆部材で被覆され、該被覆部材をガラスにより被覆されていることを特徴とする請求項1乃至7の少なくともいずれか一項に記載の発光装置。
- 前記被覆部材は、蛍光物質、顔料、フィラー、光拡散部材、セラミックス粉の少なくともいずれか1つが含有されていることを特徴とする請求項12に記載の発光装置。
- 前記発光装置は、前記基板に保護素子が載置されていることを特徴とする請求項1乃至7の少なくともいずれか一項に記載の発光装置。
- 前記発光装置は、前記発光素子が載置されている側と反対の側に保護素子が載置されていることを特徴とする請求項1乃至7の少なくともいずれか一項に記載の発光装置。
- 前記ガラスは、さらに被膜が固着されていることを特徴とする請求項1乃至7の少なくともいずれか一項に記載の発光装置。
- 同一面側に正負一対の電極を有する発光素子と、該発光素子が載置される基板と、該基板に設けられる基板電極と、該発光素子が被覆されるガラスと、を有する発光装置の製造方法であって、
該発光素子が該基板電極上にフェイスダウンされ、該発光素子が持つ電極と該基板電極とが電気的に接続される、該発光素子がフリップチップ実装される第一の工程と、
該ガラスがガラス転移温度以上で、かつ、該ガラスの融点よりも低い温度に、該ガラスが加熱される第二の工程と、
該発光素子が載置された該基板に、該ガラスが押圧される第三の工程と、
該ガラスが冷却される第四の工程と、
を有する発光装置の製造方法。 - 前記発光装置の製造方法は、さらに該ガラスの側面が切断若しくは研磨される、又は、該ガラスの上面が研磨される第五の工程を有することを特徴とする請求項18に記載の発光装置の製造方法。
- 前記第二の工程は、200℃以上800℃以下の温度に前記ガラスが加熱されていることを特徴とする請求項18に記載の発光装置の製造方法。
- 前記第三の工程は、所定の形状を成す型枠が前記ガラスに接触されて押圧されることを特徴とする請求項18に記載の発光装置の製造方法。
- 正負一対の電極を有する発光素子と、
該発光素子が載置される基板と、
該基板に設けられる基板電極と、
該電極と該基板電極とが電気的に接続されるワイヤと、
を有する発光装置であって、
該発光素子はガラスにより被覆されており、
該ガラスの材質は200℃以上700℃以下のガラス転移温度(Tg)を有しており、かつ、220℃以上の融点を有していることを特徴とする発光装置。 - 正負一対の電極を有する発光素子と、
該発光素子が載置される基板と、
該基板に設けられる基板電極と、
該正負一対の電極の少なくとも1つと該基板電極とが電気的に接続されるワイヤと、
を有する発光装置であって、
該発光素子はガラスにより被覆されており、
該ガラスは押圧により該基板に固定されていることを特徴とする発光装置。 - 正負一対の電極を有する発光素子と、該発光素子が載置される基板と、該基板に設けられる基板電極と、該基板電極と該発光素子の電極とが電気的に接続されるワイヤと、該発光素子が被覆されるガラスと、を有する発光装置の製造方法であって、
該発光素子が該基板上に載置され、該発光素子が持つ電極と該基板電極とがワイヤを介して電気的に接続される、該発光素子が実装される第一の工程と、
該ガラスがガラス転移温度以上で、かつ、該ガラスの融点よりも低い温度に、該ガラスが加熱される第二の工程と、
該発光素子が載置された該基板に、該ガラスが押圧される第三の工程と、
該ガラスが冷却される第四の工程と、
を有する発光装置の製造方法。
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JP2016212311A (ja) * | 2015-05-12 | 2016-12-15 | 三菱電機株式会社 | 表示装置 |
JP2018206818A (ja) * | 2017-05-30 | 2018-12-27 | 豊田合成株式会社 | 発光素子及びその製造方法 |
CN110649458A (zh) * | 2019-09-26 | 2020-01-03 | 哈尔滨工程大学 | 一种钕离子掺杂的近红外微球激光器的制备方法 |
US11811009B2 (en) | 2020-06-11 | 2023-11-07 | Shinko Electric Industries Co., Ltd. | Light emitting device with wiring enclosed by ceramic substrate |
JP7431110B2 (ja) | 2020-06-11 | 2024-02-14 | 新光電気工業株式会社 | 発光装置 |
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US8531105B2 (en) | 2013-09-10 |
US20060113906A1 (en) | 2006-06-01 |
US20110057553A1 (en) | 2011-03-10 |
US7833073B2 (en) | 2010-11-16 |
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