JP2006066294A - 電子装置の製造方法およびこの製造に用いる非晶質薄膜形成用インク組成物 - Google Patents
電子装置の製造方法およびこの製造に用いる非晶質薄膜形成用インク組成物 Download PDFInfo
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- JP2006066294A JP2006066294A JP2004249050A JP2004249050A JP2006066294A JP 2006066294 A JP2006066294 A JP 2006066294A JP 2004249050 A JP2004249050 A JP 2004249050A JP 2004249050 A JP2004249050 A JP 2004249050A JP 2006066294 A JP2006066294 A JP 2006066294A
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- H10K85/113—Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
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Abstract
【解決手段】 2種類の溶剤を混合し、最適インク粘度の確保と、乾燥過程におけるインクの表面張力並びに上記有機材料の溶解限を増加させることによって、隔壁層で区画された凹領域のみに選択的に、インクジェット法で有機材料の非晶質膜形成する。2種類の溶剤の第一の溶剤は溶解度が0.5wt%以上の第1溶媒で、第二の溶剤は溶解度が0.1wt%以下の第2溶媒である。第1溶媒の沸点は第2溶媒の沸点よりも高い方が望ましく、このインク溶剤系を用いることによって、インク中の第1溶媒の比率が乾燥と共に増加することから、結晶核や凝集の発生を抑制でき、均一な非晶質薄膜形成が可能となる。
【選択図】 なし
Description
前記複数の活性層の少なくとも一層を、蒸留または昇華精製可能な有機材料を含むインク組成物をインクジェット法で塗布して、非晶質薄膜を形成することを特徴とする。
[第1溶媒]
[芳香族化合物]
[アニソール誘導体]
[第2溶媒]
[発光材料]
[青色ドーパント]
,C2]ピコリネート(Firpic)。
[緑色ドーパント]
[赤色ドーパント]
ネート(Btp2Iracac)、白金−オクタエチルポルフィリン錯体(PtOEP)。
[高分子バインダー]
[ホール注入層・輸送層]
[電子輸送層]
[陰極]
[基板]
[陽極]
その後、バンクPSBに撥インク性を付与するためにフッ素プラズマ処理を行った。
以下に、図5の有機薄膜トランジスタをガラス基板からなる基板SUBの主面上に形成する例を説明する。この有機薄膜トランジスタにおける基板SUB以外の部材は、有機材料により形成される。まず、ガラス基板SUBの主面(一方の主面)に塗布されたアクリル系ポジ型レジスト(JSR社製)の膜をフォトリソグラフィー法でパターニングすることにより、アクリル樹脂からなるセパレータ(分離層,その機能は後述される)PSBが形成される。
Claims (13)
- 複数の活性層の積層又は並設、あるいはそれらの積層と並設とで所定の機能構造を実現する電子装置の製造方法であって、
前記複数の活性層の少なくとも一層を、蒸留又は昇華により精製される有機材料を含むインク組成物をインクジェット法で塗布して、非晶質薄膜を形成することを特徴とする電子装置の製造方法。 - 前記電子装置は有機ELパネルであり、基板上に形成された隔壁層で区画された凹領域内に、蒸留又は昇華により精製される有機材料を含むインク組成物を印刷法で塗布して非晶質薄膜を形成することを特徴とする請求項1に記載の電子装置の製造方法。
- 前記電子装置は有機ELパネルであり、薄膜トランジスタ付基板上に形成された隔壁層で区画された画素部に、蒸留又は昇華により精製される有機半導体材料を含むインク組成物をインクジェット法で塗布して有機半導体の非晶質薄膜を形成することを特徴とする請求項1に記載の電子装置の製造方法。
- 前記電子装置は薄膜トランジスタであり、基板上に形成されたソース電極とドレイン電極で区画された部分に、蒸留又は昇華により精製される有機半導体を含むインク組成物をインクジェット法で塗布して有機半導体の非晶質薄膜を形成することを特徴とする請求項1に記載の電子装置の製造方法。
- 溶解度が0.5wt%以上の第1溶媒と、溶解度が0.1wt%以下の第2溶媒との溶解度が異なる2種の有機溶媒の混合物から構成された非晶質薄膜形成用インク組成物。
- 前記第1溶媒の沸点が、前記第2溶媒の沸点よりも高いことを特徴とする請求項5に記載の非晶質薄膜形成用インク組成物。
- 前記第1溶媒の表面張力が、前記第2溶媒の表面張力よりも高いことを特徴とする請求項5に記載の非晶質薄膜形成用インク組成物。
- 前記第2溶媒の粘度が、前記第1溶媒の粘度よりも高いことを特徴とする請求項5に記載の非晶質薄膜形成用インク組成物。
- 前記2種の有機溶媒の混合物の沸点が、蒸留又は昇華により精製される有機材料を含むインク組成物の昇華温度よりも低いことを特徴とする請求項5に記載の非晶質薄膜形成用インク組成物。
- 前記第1溶媒が、沸点140℃以上の芳香族化合物であることを特徴とする請求項5に記載の非晶質薄膜形成用インク組成物。
- 前記芳香族化合物が、アニソール誘導体であることを特徴とする請求項10に記載の非晶質薄膜形成用インク組成物。
- 前記第2溶媒が、沸点120℃以上のアルコール化合物であることを特徴とする請求項5に記載の非晶質薄膜形成用インク組成物。
- 前記第1溶媒に対する前記第2溶媒の比率が60wt%以下であることを特徴とする請求項5に記載の非晶質薄膜形成用インク組成物。
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JP4616596B2 (ja) | 2011-01-19 |
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