JP2006051574A - Installing method for nanometer-size material - Google Patents

Installing method for nanometer-size material Download PDF

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JP2006051574A
JP2006051574A JP2004235040A JP2004235040A JP2006051574A JP 2006051574 A JP2006051574 A JP 2006051574A JP 2004235040 A JP2004235040 A JP 2004235040A JP 2004235040 A JP2004235040 A JP 2004235040A JP 2006051574 A JP2006051574 A JP 2006051574A
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nano
tube
nanotube
sized
nanometer
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JP4517071B2 (en
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Hidekazu Abe
秀和 阿部
Tetsuo Shimizu
哲夫 清水
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National Institute of Advanced Industrial Science and Technology AIST
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National Institute of Advanced Industrial Science and Technology AIST
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Abstract

<P>PROBLEM TO BE SOLVED: To establish possibility of controlling the disposition of a nano-tube any place as desired which is required in order to draw out sufficiently the properties and characteristics of nano-tube, for example its size, compared with the conventional technique in which disposing a nano-tube in any desired place has been difficult. <P>SOLUTION: For disposing the nano-tube in a desired place, the precise disposition control using an electron microscope is conducted with the same focal depth used on the stage, in which a base board installing table having an angle is installed and the nano-tube is moved in the horizontal direction, and therefore, the situation of the movement can be observed through the microscope owing to the same focal depth. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本願発明は、カーボンナノチューブ及びナノベルト等のナノサイズ材料（以下ナノチューブ）を任意の場所へナノスケール精度で設置する技術である。   The present invention is a technique for installing nano-sized materials (hereinafter referred to as nanotubes) such as carbon nanotubes and nanobelts at an arbitrary place with nanoscale accuracy.

これまでに行われているナノチューブを設置する方法は、乱雑に置かれたナノチューブを偶発的に電極間等に接触させる（下記特許文献１参照）、あるいはナノチューブの成長触媒を設置した箇所より制御されることなくある箇所へナノチューブを設置させる方法など任意の位置ではない箇所へナノチューブを配置することが報告されている。
特開２００３−３３２２６６号公報 The conventional method of installing nanotubes is controlled by the location where the randomly placed nanotubes are accidentally brought into contact with electrodes (see Patent Document 1 below) or the nanotube growth catalyst is installed. It has been reported that nanotubes are arranged at a location other than an arbitrary position, such as a method of installing a nanotube at a certain location without any problem.
JP 2003-332266 A

ナノチューブのサイズ等の性質及び特性を十分に引き出すにためには、ナノチューブを自由に配置制御する必要があるが、従来は、ナノチューブを任意の場所に自由に配置することが困難であった。   In order to sufficiently extract properties and characteristics such as the size of the nanotube, it is necessary to freely control the arrangement of the nanotube. Conventionally, however, it has been difficult to freely arrange the nanotube in an arbitrary place.

任意の場所へナノチューブを配置するには、電子顕微鏡を利用する。電子顕微鏡内部には、２つ以上のステージが備えられており、それぞれが独立して少なくとも3方向（X,Y,Z方向以外に回転や傾き自由度を考慮すると３軸以上になる。）に移動可能である。   An electron microscope is used to place the nanotubes at an arbitrary location. Two or more stages are provided inside the electron microscope, and each of them is independently in at least three directions (more than three axes in consideration of degrees of freedom of rotation and tilt in addition to the X, Y, and Z directions). It is movable.

第１のステージにはナノチューブを配置する基板を、第２のステージには、ナノチューブを設置する。それぞれを接近させた後、ナノチューブの一端を基板上の配置させる箇所（電極等）に接触させ、その後、もう一端を水平方向に引きながら、他の接触させる箇所へ接触させ、ブリッジ構造の作製を行う。   A substrate on which nanotubes are arranged is placed on the first stage, and nanotubes are placed on the second stage. After approaching each other, one end of the nanotube is brought into contact with the place (electrode, etc.) on the substrate, and then the other end is brought into contact with another place while being pulled in the horizontal direction to produce a bridge structure. Do.

ナノチューブは、先端を尖鋭化した針状体に1本のみ取り付けたものを使用する。ここで、該針状体とは、材料としては、金属あるいは金属類似の硬い物質であり、先端が細くされたものであればよく、例えば、電界研磨又は異方性エッチング等により先端を先鋭化した探針あるいはカッター・ニッパー等の切断器具により切断された細線等である。金属としては、タングステン又は金等が用いられる。   For the nanotube, use only one nanotube attached to a needle-like body with a sharp tip. Here, the needle-shaped body may be a metal or a metal-like hard substance and may have a thin tip, for example, sharpening the tip by electropolishing or anisotropic etching. Or a fine wire cut by a cutting tool such as a probe or a cutter / nipper. As the metal, tungsten or gold is used.

ステージには、焦点深度を利用した精密配置制御を行うために、角度をつけた基板設置台を設け、該基板設置台上に基板を固定する。   In order to perform precise placement control using the depth of focus, the stage is provided with an angled substrate mounting table, and the substrate is fixed on the substrate mounting table.

これにより配置材料の物理的熱的特性評価、電極配線、電子デバイスおよび電子線バイプリズムへの利用、その小型化が可能になり、小型、高性能機器が実現できる。   This makes it possible to evaluate the physical and thermal characteristics of the arrangement material, use it for electrode wiring, electronic devices and electron biprisms, and to reduce the size thereof, thereby realizing a compact and high-performance device.

図面を用いて本願発明の実施例を説明する。   Embodiments of the present invention will be described with reference to the drawings.

図1に、使用する走査型電子顕微鏡（SEM）内ステージを示す。第１ステージ１には基板を設置するため、基板設置台３を設置し、その基板設置台上に基板４を固定する。第２ステージ２にはカーボンナノチューブを取り付けたプローブ５を固定する。   FIG. 1 shows the scanning electron microscope (SEM) stage used. In order to install a substrate on the first stage 1, a substrate installation table 3 is installed, and the substrate 4 is fixed on the substrate installation table. A probe 5 attached with a carbon nanotube is fixed to the second stage 2.

図２において、使用するナノチューブ６はSEM中において静電気又は電子線により針状体上に固定したナノチューブであり、一方のステージに設置した基板上の金属台７にナノチューブ先端を静電気にて接触させ、高さがほぼ均等な横方向に針状体を移動させることにより、焦点深度を一定に保ったまま、もう一方の金属台８へ静電気にて接触させることにより架橋構造を作製する。その後、電気的、機械的熱的等の使用目的に応じて、接合部分は、特性を引き出すことのできる接合を行う。   In FIG. 2, the nanotube 6 to be used is a nanotube fixed on the needle-like body by static electricity or electron beam in SEM, and the tip of the nanotube is brought into contact with the metal base 7 on the substrate placed on one stage by static electricity. By moving the needle-like body in the lateral direction with almost the same height, the cross-linked structure is produced by bringing the other metal base 8 into contact with static electricity while keeping the depth of focus constant. Thereafter, depending on the purpose of use, such as electrical and mechanical thermal, the joining portion performs joining that can bring out characteristics.

図４に、ナノチューブの配置が完成した状況を撮影した電子顕微鏡写真を示す。この写真に示すように、特定の選択されたナノチューブが所定の場所（この写真の場合には、２つの金属台に対して垂直）に配置されている。   FIG. 4 shows an electron micrograph of the situation where the arrangement of the nanotubes is completed. As shown in this photo, certain selected nanotubes are placed in place (in this photo, perpendicular to the two metal platforms).

走査型電子顕微鏡内使用環境概略図Schematic diagram of usage environment in a scanning electron microscope ナノチューブと電極間の配置図Arrangement between nanotube and electrode ナノチューブ設置の工程図Nanotube installation process diagram ナノチューブ設置完成写真Nanotube installation complete photo

符号の説明Explanation of symbols

１ 基板配置用ステー
２ 設置基板
３ ナノチューブ付き金属探針
1 Substrate placement stay 2 Installed substrate 3 Nanotube metal probe

Claims (3)

走査型電子線顕微鏡の観察可能な領域において、ナノサイズ材料を設置する方法であって、先端を先鋭化にした針状体に該材料の一端を取り付け、他端を一方の金属台に接触させて固着し、次いで、該針状体を水平方向に移動させ、該材料の該一端を他方の金属台に接触させ固着することを特徴とするナノサイズ材料を設置する方法。 A method of installing a nano-sized material in an observable region of a scanning electron microscope, wherein one end of the material is attached to a needle-like body with a sharpened tip, and the other end is brought into contact with one metal base. Then, the needle-shaped body is moved in the horizontal direction, and the one end of the material is brought into contact with and fixed to the other metal base to fix the nanosize material. 上記ナノサイズ材料は、ナノメータサイズの直径を有するナノチューブ又はナノメータサイズの厚さを有するナノベルトであることを特徴とする請求項１記載のナノサイズ材料を設置する方法。 The method according to claim 1, wherein the nano-sized material is a nanotube having a nanometer-sized diameter or a nano-belt having a nanometer-sized thickness. 上記顕微鏡の内部には、上記ナノサイズ材料を載置する移動可能なステージを備えていることを特徴とする請求項１記載のナノサイズ材料を設置する方法。

The method for placing a nano-sized material according to claim 1, further comprising a movable stage on which the nano-sized material is placed.

JP2004235040A 2004-08-12 2004-08-12 How to install nano-sized materials Expired - Fee Related JP4517071B2 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009196041A (en) * 2008-02-22 2009-09-03 National Institute Of Advanced Industrial & Technology Capture method of microparticle, arrangement method thereof, and probe used for the same
JP2010540263A (en) * 2007-10-02 2010-12-24 プレジデント アンド フェロウズ オブ ハーバード カレッジ Carbon nanotube synthesis for nanopore devices
CN102757033A (en) * 2012-07-03 2012-10-31 清华大学 Method for preparing carbon nanotube with specific quantities of walls and specific diameters

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JP2003045370A (en) * 2001-08-01 2003-02-14 Hitachi Ltd Scanning electron microscope
JP2003231074A (en) * 2002-02-12 2003-08-19 Daiken Kagaku Kogyo Kk Operation method of nanotweezer
JP2003332266A (en) * 2002-05-13 2003-11-21 Kansai Tlo Kk Wiring method for nanotube and control circuit for nanotube wiring
JP2004071654A (en) * 2002-08-01 2004-03-04 Semiconductor Energy Lab Co Ltd Method of manufacturing carbon nanotube semiconductor device
JP2004217456A (en) * 2003-01-14 2004-08-05 Nippon Telegr & Teleph Corp <Ntt> Method of forming carbon nano-thread
WO2004076049A2 (en) * 2003-02-28 2004-09-10 University Of Surrey Method and apparatus for fabricating nanoscale structures
JP2004325428A (en) * 2003-04-24 2004-11-18 Korea Inst Of Machinery & Metals Signal detecting probe having rod-shaped nanostructure adhering thereto, and manufacturing method thereof
JP2005111583A (en) * 2003-10-03 2005-04-28 Sii Nanotechnology Inc Method of manufacturing structure of nanometer scale
JP2005186175A (en) * 2003-12-24 2005-07-14 National Institute Of Advanced Industrial & Technology Carbon nanotube structure

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003045370A (en) * 2001-08-01 2003-02-14 Hitachi Ltd Scanning electron microscope
JP2003231074A (en) * 2002-02-12 2003-08-19 Daiken Kagaku Kogyo Kk Operation method of nanotweezer
JP2003332266A (en) * 2002-05-13 2003-11-21 Kansai Tlo Kk Wiring method for nanotube and control circuit for nanotube wiring
JP2004071654A (en) * 2002-08-01 2004-03-04 Semiconductor Energy Lab Co Ltd Method of manufacturing carbon nanotube semiconductor device
JP2004217456A (en) * 2003-01-14 2004-08-05 Nippon Telegr & Teleph Corp <Ntt> Method of forming carbon nano-thread
WO2004076049A2 (en) * 2003-02-28 2004-09-10 University Of Surrey Method and apparatus for fabricating nanoscale structures
JP2004325428A (en) * 2003-04-24 2004-11-18 Korea Inst Of Machinery & Metals Signal detecting probe having rod-shaped nanostructure adhering thereto, and manufacturing method thereof
JP2005111583A (en) * 2003-10-03 2005-04-28 Sii Nanotechnology Inc Method of manufacturing structure of nanometer scale
JP2005186175A (en) * 2003-12-24 2005-07-14 National Institute Of Advanced Industrial & Technology Carbon nanotube structure

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010540263A (en) * 2007-10-02 2010-12-24 プレジデント アンド フェロウズ オブ ハーバード カレッジ Carbon nanotube synthesis for nanopore devices
JP2009196041A (en) * 2008-02-22 2009-09-03 National Institute Of Advanced Industrial & Technology Capture method of microparticle, arrangement method thereof, and probe used for the same
CN102757033A (en) * 2012-07-03 2012-10-31 清华大学 Method for preparing carbon nanotube with specific quantities of walls and specific diameters

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