JP2005345832A - Aligner for belt-like work - Google Patents

Aligner for belt-like work Download PDF

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JP2005345832A
JP2005345832A JP2004166383A JP2004166383A JP2005345832A JP 2005345832 A JP2005345832 A JP 2005345832A JP 2004166383 A JP2004166383 A JP 2004166383A JP 2004166383 A JP2004166383 A JP 2004166383A JP 2005345832 A JP2005345832 A JP 2005345832A
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workpiece
belt
work
strip
shaped workpiece
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JP4499482B2 (en
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Takamasa Nogami
高正 野上
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Toray Engineering Co Ltd
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Toray Engineering Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an aligner for a belt-like work, in which a plurality of lines of belt-like works can be efficiently exposed in shorter tact time, without having to increase the scale of the apparatus as a whole. <P>SOLUTION: The aligner for a belt-like wok comprises a work releasing machine 10, first and second tension devices 20, 60, first and second conveying and fixing devices 30, 50, an exposure unit 40, and a work winding machine 70, and it also has a work stage 46 having a work suction table 45 in the upper side, with the stage fixed on the system mount 2 below the exposure unit 40. The first and second conveying and fixing devices 30, 50, the work suction table 45 and so on are attached integrally to a moving unit 80. A plurality of lines of belt-like works are exposed, by repeatedly moving the unit 80 in the width direction of the belt-like work 1 and conveying in the longitudinal direction of the belt-like work. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明はＴＡＢ、ＣＯＦ（Ｃｈｉｐ Ｏｎ Ｆｉｌｍ）フィルム等の連続帯状ワークに、レチクルに形成されたパターンを複数列露光する帯状ワークの露光装置に関するものである。   The present invention relates to an exposure apparatus for a strip-shaped workpiece that exposes a pattern formed on a reticle in a plurality of rows on a continuous strip-shaped workpiece such as a TAB or COF (Chip On Film) film.

従来、帯状ワークへの露光において、レチクル（マスク）に形成されたパターンを帯状ワークの複数列に露光を行う場合、ワーク巻出し部の巻出しリールから巻出されたワークに第１列目の露光を行ってワーク巻取り部の巻取りリールに巻取り、次に第２列目の露光を行うのに第１列目の露光が終わった巻取りリールを巻出し部に、同じく巻出しリールを巻取り部にそれぞれ付け替えて第２列目の露光を行っていた。この方法は人為的なリールの付け替えが必要であり、非常に効率の悪いものであった。   Conventionally, when exposing a pattern formed on a reticle (mask) to a plurality of rows of a strip-shaped workpiece in exposure of the strip-shaped workpiece, the first row is applied to the workpiece unwound from the unwinding reel of the workpiece unwinding unit. The exposure reel is wound on the take-up reel of the work take-up portion, and then the second reel is exposed to the take-up reel. The second row exposure was carried out by replacing each with a winding part. This method requires artificial replacement of the reels and is very inefficient.

そこで、前記リールの付け替えを行わなくてもよい露光装置として、例えば、特許文献１に、ワークを搬送するワーク搬送機構とワークステージ上のワークをワークの幅方向に移動させるワーク移動機構によって、ワークの搬送と移動を繰り返すと共に、ワークの搬送開始前に送り出しロール部と巻取りロール部をワークの幅方向に移動させてワークに複数列の露光を行う露光装置が開示されている。   Therefore, as an exposure apparatus that does not need to replace the reel, for example, Patent Document 1 discloses a work transfer mechanism and a work moving mechanism that moves a work on a work stage in the width direction of the work. An exposure apparatus is disclosed in which a plurality of rows of exposure are performed by repeatedly moving and moving the feed roll unit and the winding roll unit in the width direction of the workpiece before starting the workpiece conveyance.

しかし、この場合、送り出しロール部と巻取りロール部の移動に際しては慣性の力が大きく、移動時に大きな動力を必要とするので、そのため移動機構が大きくなり、また、移動時間も長くなることから装置全体が大型化しタクトタイムも大きくなるなどの問題がある。   However, in this case, since the inertial force is large when moving the feed roll unit and the take-up roll unit, and a large amount of power is required at the time of movement, the movement mechanism becomes large and the movement time becomes long. There are problems such as an increase in the overall size and an increase in tact time.

また、ワークへ複数列の露光を行う方法として他に、特許文献２に記載されているようなワークの搬送路に少なくとも２台の露光部を配設して、これらの露光部でもってワークに少なくとも２列の露光を行う露光機等もある。   In addition, as a method of exposing a plurality of rows to a workpiece, at least two exposure units are arranged on a workpiece conveyance path as described in Patent Document 2, and these workpieces are exposed to these workpieces. There are exposure machines that perform at least two rows of exposure.

しかし、複数台の露光部を設けるということは高価な露光ユニットを同等数必要とし、露光部そのものが非常に高価なものとなり露光機のコスト競争に逆行するという問題がある。   However, the provision of a plurality of exposure units requires the same number of expensive exposure units, and the exposure units themselves are very expensive, which is a problem against the cost competition of exposure machines.

特開２０００−２１４５９５号公報JP 2000-214595 A 特開２００４−９４１４２号公報JP 2004-94142 A

そこで、本発明の課題とするところは、装置全体が大型化することがなく、また、タクトタイムが小さくできて効率よく帯状ワークの複数列に露光が行える帯状ワークの露光装置を提供することである。   Accordingly, the object of the present invention is to provide an apparatus for exposing a strip-shaped workpiece that does not increase the size of the entire apparatus and that can reduce the tact time and can efficiently expose a plurality of rows of strip-shaped workpieces. is there.

本発明は、少なくとも帯状ワークの長手方向に帯状ワークを搬送して固定する第１、第２搬送固定装置と、帯状ワークへの露光の際帯状ワークを載置するワーク吸引テーブルとが帯状ワークの幅方向に移動する移動ユニットに一体的に取り付けられて、前記第１、第２搬送固定装置と移動ユニットによる帯状ワークの搬送と移動を繰り返し、帯状ワークの搬送方向における前記移動ユニットの上流側、下流側にそれぞれ設けられた第１、第２緊張装置によって、帯状ワークの搬送と移動時の前記ワーク巻出機及びワーク巻取機と前記移動ユニット間での帯状ワークの捻れを吸収しながら、帯状ワークに複数列のパターンを露光することを特徴としている。   According to the present invention, the first and second transport and fixing devices that transport and fix the belt-shaped workpiece at least in the longitudinal direction of the belt-shaped workpiece, and the workpiece suction table on which the belt-shaped workpiece is placed during exposure to the belt-shaped workpiece It is integrally attached to a moving unit that moves in the width direction, and repeats the transfer and movement of the belt-like work by the first and second transfer fixing devices and the moving unit, the upstream side of the moving unit in the transfer direction of the belt-like work, While absorbing the twist of the belt-like work between the moving unit and the work unwinding machine and the work winder during the transportation and movement of the belt-like work by the first and second tensioning devices respectively provided on the downstream side, It is characterized by exposing a plurality of rows of patterns to a strip-shaped workpiece.

また、本発明は、帯状ワークの長手方向に帯状ワークを搬送して固定する第１、第２搬送固定装置が帯状ワークの幅方向に移動する移動ユニットに一体的に取り付けられて、前記第１、第２搬送固定装置と移動ユニットによる帯状ワークの搬送と移動を繰り返し、帯状ワークの搬送方向における前記移動ユニットの上流側、下流側にそれぞれ設けられた第１、第２緊張装置によって、帯状ワークの搬送と移動時の前記ワーク巻出機及びワーク巻取機と前記移動ユニット間での帯状ワークの捻れを吸収しながら、帯状ワークに複数列のパターンを露光するようにすることもできる。   In the present invention, the first and second conveying and fixing devices for conveying and fixing the belt-like workpiece in the longitudinal direction of the belt-like workpiece are integrally attached to a moving unit that moves in the width direction of the belt-like workpiece, and the first The belt-like work is repeatedly transported and moved by the second transport fixing device and the moving unit, and the belt-like work is provided by the first and second tensioning devices respectively provided on the upstream side and the downstream side of the moving unit in the belt-working direction. It is also possible to expose a plurality of rows of patterns on the belt-like workpiece while absorbing the twist of the belt-like workpiece between the workpiece unwinder and workpiece winder and the moving unit during the transfer and movement of the workpiece.

前記第１、第２緊張装置は、ブロアーが設けられた排気ダクトが吸引箱に接続されて吸引箱の雰囲気が吸引されるようになっており、その吸引箱内の雰囲気の吸引により吸引箱内を走行する帯状ワークに垂れ下がりが生じ、その垂れ下がりによる前記帯状ワークの弛みによって前記帯状ワークの捻れを吸収するようになっている。   The first and second tensioning devices are configured such that an exhaust duct provided with a blower is connected to a suction box so that the atmosphere of the suction box is sucked, and the suction box atmosphere is sucked by suction of the atmosphere in the suction box. The belt-like work that runs on the belt hangs down, and the twist of the belt-like work is absorbed by the slackness of the belt-like work caused by the sag.

本発明によれば、帯状ワークを搬送して固定する搬送固定と帯状ワークを載置するワーク吸引テーブルのみを帯状ワークの幅方向に移動させると共に、ワーク巻出機とワーク巻取機からのワークの捻れをワークに弛みを持たせる緊張装置で吸収してワークの複数列に露光を行うので、ワーク巻出機とワーク巻取機のワーク幅方向への移動が不要となり、そのためワーク巻出機とワーク巻取機の移動に伴うスペースや移動機構が必要でなくなるので、露光装置が格段に大型化することがなく、タクトタイムも小さくなるので複数列の露光が効率よく行える。   According to the present invention, only the workpiece fixing table for transporting and fixing the belt-like workpiece and the workpiece suction table on which the belt-like workpiece is placed are moved in the width direction of the belt-like workpiece, and the workpiece from the workpiece unwinder and the workpiece winder is used. Since the twisting of the workpiece is absorbed by a tensioning device that gives the workpiece slack and exposure is performed on multiple rows of workpieces, it is not necessary to move the workpiece unwinder and workpiece winder in the workpiece width direction. In addition, since the space and the movement mechanism associated with the movement of the work winder are not required, the exposure apparatus is not significantly increased in size and the tact time is reduced, so that multiple rows of exposure can be performed efficiently.

また、複数台の露光部を設ける必要もないので、必要とする高価な露光ユニットも最小限の数ですむのでコストダウンも図れる。   In addition, since it is not necessary to provide a plurality of exposure units, the required number of expensive exposure units can be minimized, so that the cost can be reduced.

本発明の帯状ワーク露光装置は図１に示されるように、ワーク巻出機１０と、第１緊張装置２０と、第１搬送固定装置３０と、露光部４０と、第２搬送固定装置５０と、第２緊張装置６０と、ワーク巻取機７０から成っている。   As shown in FIG. 1, the strip-shaped workpiece exposure apparatus of the present invention includes a workpiece unwinding machine 10, a first tensioning device 20, a first transport fixing device 30, an exposure unit 40, and a second transport fixing device 50. The second tensioning device 60 and the work winding machine 70 are included.

ワーク巻出機１０は露光すべき帯状ワーク１を巻出す巻出しリール１１を取付け得るように構成されており、ワーク巻取機７０は露光された帯状ワーク１を巻取る巻取りリール７１が取付け得るように構成されている。   The work unwinding machine 10 is configured so as to be able to attach an unwinding reel 11 for unwinding the belt-like work 1 to be exposed, and the work winder 70 is attached with a winding reel 71 for winding the exposed belt-like work 1. Configured to get.

第１緊張装置２０は下部に排気ダクト２１が接続された吸引箱２２と、この吸引箱２２の入口部と出口部に配設されたガイドローラ２３、２４とから成り、前記排気ダクト２１にはブロア２５が設けられて吸引箱２２内の雰囲気が吸引されて外部へ排気されるようになっている。帯状ワークはこの吸引箱２２内を走行し、雰囲気が吸引排気されることでＵ字状に垂れ下がり、弛みがもたらされる。   The first tensioning device 20 includes a suction box 22 having an exhaust duct 21 connected to a lower portion thereof, and guide rollers 23 and 24 disposed at an inlet portion and an outlet portion of the suction box 22. A blower 25 is provided so that the atmosphere in the suction box 22 is sucked and exhausted to the outside. The belt-shaped workpiece travels in the suction box 22 and hangs down in a U-shape when the atmosphere is sucked and exhausted, resulting in slack.

なお、図示していないが、吸引箱２２の側部には帯状ワーク１の垂下部分の下端位置を検知して前記垂下部分の下端が一定の範囲内にあるようコントロールするため少なくとも２個の位置基準センサーが設けられている。   Although not shown, at least two positions are provided on the side of the suction box 22 in order to detect the lower end position of the hanging portion of the strip-shaped workpiece 1 and to control the lower end of the hanging portion within a certain range. A reference sensor is provided.

第１搬送固定装置３０は、固定グリップ３１と移動グリップ３２とから成り、移動グリップ３２は駆動モータ３３に接続された送り螺子３４で上下動する。   The first transport fixing device 30 includes a fixed grip 31 and a moving grip 32, and the moving grip 32 moves up and down by a feed screw 34 connected to a drive motor 33.

露光部４０は、光照射手段４１と、アライメント機構付きのレチクル台４９と、その上面に載置されるレチクル４２と、投影レンズ４４とから成っており、レチクル４２と帯状ワーク１との露光位置のアライメントを行うときには、帯状ワーク１への露光光の照射を遮断するための遮光版４３を光照射手段４１とレチクル４２の間に装入する。露光部４０の下方には上部にワーク吸引テーブル４５を有するワークステージ４６が装置架台２上に固定されている。また、ワーク吸引テーブル４５の前後には昇降ローラ４７、４８が配設されている。   The exposure unit 40 includes a light irradiation means 41, a reticle base 49 with an alignment mechanism, a reticle 42 placed on the top surface thereof, and a projection lens 44. The exposure position of the reticle 42 and the belt-like workpiece 1 is exposed. When the alignment is performed, a light-shielding plate 43 for blocking exposure light exposure to the belt-like workpiece 1 is inserted between the light irradiation means 41 and the reticle 42. Below the exposure unit 40, a work stage 46 having a work suction table 45 at the top is fixed on the apparatus base 2. In addition, elevating rollers 47 and 48 are disposed before and after the work suction table 45.

第２搬送固定装置５０は、固定グリップ５１と移動グリップ５２とから成り、移動グリップ５２は駆動モータ５３に接続された送り螺子５４で上下動する。     The second transport fixing device 50 includes a fixed grip 51 and a moving grip 52, and the moving grip 52 moves up and down by a feed screw 54 connected to a drive motor 53.

第２緊張装置６０は下部に排気ダクト６１が接続された吸引箱６２と、この吸引箱６２の入口部と出口部に配設されたガイドローラ６３、６４とから成り、前記排気ダクト６１にはブロア６５が設けられて吸引箱６２内の雰囲気が吸引されて外部へ排気されるようになっている。帯状ワークはこの吸引箱６２内を走行し、雰囲気が吸引排気されることでＵ字状に垂れ下がり、弛みがもたらされる。   The second tensioning device 60 includes a suction box 62 having an exhaust duct 61 connected to a lower portion thereof, and guide rollers 63 and 64 disposed at an inlet portion and an outlet portion of the suction box 62. A blower 65 is provided so that the atmosphere in the suction box 62 is sucked and exhausted to the outside. The belt-like workpiece travels in the suction box 62, and the atmosphere is sucked and exhausted to hang down in a U shape, thereby causing slack.

なお、図示していないが、吸引箱６２の側部には帯状ワーク１の垂下部分の下端位置を検知して前記垂下部分の下端が一定の範囲内にあるようコントロールするため少なくとも２個の位置基準センサーが設けられている。   Although not shown, at least two positions are provided on the side portion of the suction box 62 in order to detect the lower end position of the hanging portion of the strip-shaped workpiece 1 and to control the lower end of the hanging portion within a certain range. A reference sensor is provided.

また、上述の第１搬送固定装置３０、第２搬送固定装置５０及びワーク吸引テーブル４５並びにガイドローラ２４、６３及び昇降ローラ４７、４８は、コの字形に枠組みされた移動ユニット８０の枠内に収納されるように一体的に取り付けられている。   Further, the above-described first conveyance fixing device 30, the second conveyance fixing device 50, the work suction table 45, the guide rollers 24, 63, and the lifting rollers 47, 48 are within the frame of the moving unit 80 framed in a U-shape. It is integrally attached so that it can be stored.

この移動ユニット８０は、帯状ワーク１の幅方向に複数箇所敷かれた公知である一対の摺動レール８１上を帯状ワークの幅方向に移動するように構成されている。つまり、移動ユニット８０に一体的に取り付けられている第１搬送固定装置３０、第２搬送固定装置５０及びワーク吸引テーブル４５並びにガイドローラ２４、６３及び昇降ローラ４７、４８が同時に帯状ワーク１の幅方向に移動するようになっている。   The moving unit 80 is configured to move in the width direction of the belt-like workpiece on a pair of known slide rails 81 laid at a plurality of positions in the width direction of the belt-like workpiece 1. That is, the first conveyance fixing device 30, the second conveyance fixing device 50, the workpiece suction table 45, the guide rollers 24 and 63, and the lifting rollers 47 and 48 that are integrally attached to the moving unit 80 are simultaneously formed in the width of the belt-shaped workpiece 1. It is designed to move in the direction.

なお、この移動の際ワーク吸引テーブル４５は、ワークステージ４６上を移動できるように構成される。この場合、ワーク吸引テーブル４５とワークステージ４６間に上述の摺動レール８１を敷いた構成としてもよい。   During this movement, the work suction table 45 is configured to be able to move on the work stage 46. In this case, the above-described sliding rail 81 may be laid between the work suction table 45 and the work stage 46.

移動ユニット８０の駆動は、図示していないがエアーシリンダを用いても良いし、駆動モータに接続された送り螺子によっても良い。   The moving unit 80 may be driven by an air cylinder (not shown) or by a feed screw connected to a drive motor.

以上から成る露光装置によれば、帯状ワーク１に複数列の露光パターンを露光する場合、帯状ワーク１の１列目の露光に際しては、帯状ワーク１の１列目の露光場所が露光部４０の投影レンズ４４の下方に位置するように移動ユニット８０を帯状ワークの幅方向に移動させて行い、２列目の露光に際しては、帯状ワーク１の２列目の露光場所が露光部４０の投影レンズ４４の下方に位置するように移動ユニット８０を帯状ワークの幅方向に移動させて行う。そして、所定の露光パターンに応じて帯状ワーク１がその長手方向に搬送される。   According to the above-described exposure apparatus, when a plurality of rows of exposure patterns are exposed on the belt-like workpiece 1, when the first row of the belt-like workpiece 1 is exposed, the exposure position of the first row of the belt-like workpiece 1 is the exposure unit 40. The moving unit 80 is moved in the width direction of the belt-like workpiece so as to be positioned below the projection lens 44, and when exposing the second row, the exposure position of the second row of the belt-like workpiece 1 is the projection lens of the exposure unit 40. The moving unit 80 is moved in the width direction of the belt-like workpiece so as to be positioned below the upper portion 44. And according to a predetermined exposure pattern, the strip | belt-shaped workpiece | work 1 is conveyed in the longitudinal direction.

また、帯状ワーク１に３列以上の露光を行う場合は、前述の移動ユニット８０の露光列場所への移動をその列数分行うようにする。   When the strip-shaped workpiece 1 is exposed in three or more rows, the movement unit 80 is moved to the exposure row location by the number of rows.

なお、ここまで述べてきた移動ユニット８０において、ワーク吸引テーブル４５を移動ユニット８０へ取り付けず、ワーク吸引テーブル４５をワークテーブル４６上に固定しておくことも可能である。   In the moving unit 80 described so far, the work suction table 45 can be fixed on the work table 46 without attaching the work suction table 45 to the movement unit 80.

この場合、帯状ワーク１への複数列の露光は次のように行われる。まず、移動ユニット８０の帯状ワーク１の幅方向への移動時はワーク吸引テーブル４５のワーク吸引が止められ、昇降ローラ４７、４８が上昇されて帯状ワーク１が移動される。そして、移動後に昇降ローラ４７、４８が下降されてワーク吸引テーブル４５でワークが吸引されて１列目の露光が行われる。２列目の露光に際しては２列目の露光場所に移動ユニット８０を前述の要領で移動させて行い、所定の露光パターンに応じて帯状ワーク１がその長手方向に搬送される。   In this case, multiple rows of exposure to the strip-shaped workpiece 1 are performed as follows. First, when the moving unit 80 moves in the width direction of the belt-like workpiece 1, the workpiece suction of the workpiece suction table 45 is stopped, and the lifting rollers 47 and 48 are raised to move the belt-like workpiece 1. After the movement, the elevating rollers 47 and 48 are lowered, the work is sucked by the work suction table 45, and the first row exposure is performed. The exposure of the second row is performed by moving the moving unit 80 to the exposure position of the second row as described above, and the belt-like workpiece 1 is conveyed in the longitudinal direction according to a predetermined exposure pattern.

このように、移動ユニット８０と一体でワーク吸引テーブル４５の移動がない場合は、移動部分の慣性が小さくなり、そのため高速移動が可能になる。   As described above, when the workpiece suction table 45 is not moved integrally with the moving unit 80, the inertia of the moving portion is reduced, so that high speed movement is possible.

なお、前述のワーク吸引テーブル４５が固定で移動ユニットが移動するような場合、ワーク吸引テーブル４５においてはワーク幅方向寸法が、帯状ワーク１の幅方向への移動にともなって帯状ワーク１がワーク吸引テーブル４５からはみ出す事のない十分な大きさであり、ワーク吸引部が帯状ワーク１の移動に対応した位置に設けられると共に、吸引、吸引停止のタイミングも帯状ワーク１の移動に対応させる必要がある。   When the workpiece suction table 45 is fixed and the moving unit moves, the workpiece suction direction of the workpiece suction table 45 is the same as that of the belt-like workpiece 1 in the width direction. It is sufficiently large so as not to protrude from the table 45, and the workpiece suction portion is provided at a position corresponding to the movement of the belt-like workpiece 1, and the timing of suction and suction stop needs to correspond to the movement of the belt-like workpiece 1. .

つづいて、本発明の帯状ワークの露光装置による帯状ワークへの複数列の露光処理行程について説明する。   Next, a plurality of rows of exposure processing steps for the belt-like workpiece by the belt-like workpiece exposure apparatus of the present invention will be described.

ワーク巻出機１０から巻出された帯状ワーク１は、ガイドローラ２３を介して第１緊張装置２０の吸引箱２２に入り、吸引箱２２に接続された排気ダクト２１に設けられたブロアー２５によって吸引箱２２内の雰囲気が吸引されて外部へ排気されることでＵ字状に垂れ下がる。   The belt-like work 1 unwound from the work unwinding machine 10 enters the suction box 22 of the first tensioning device 20 through the guide roller 23 and is blown by the blower 25 provided in the exhaust duct 21 connected to the suction box 22. When the atmosphere in the suction box 22 is sucked and exhausted to the outside, it hangs down in a U shape.

そして、帯状ワーク１は、ガイドローラ２４、６３と昇降ローラ４７、４８を介して、第１、第２搬送固定装置３０、５０の移動グリップ３２、５２により搬送されて第２緊張装置６０の吸引箱６２に入り、吸引箱６２に接続された排気ダクト６１に設けられたブロアー６５によって吸引箱６２内の雰囲気が吸引されて外部へ排気されることでＵ字状に垂れ下がり、ガイドローラ６４を介してワーク巻取機７０に巻掛けられる。   The belt-like workpiece 1 is conveyed by the moving grips 32 and 52 of the first and second conveying and fixing devices 30 and 50 via the guide rollers 24 and 63 and the elevating rollers 47 and 48 and sucked by the second tensioning device 60. The atmosphere in the suction box 62 enters the box 62 and is sucked out by the blower 65 provided in the exhaust duct 61 connected to the suction box 62 and exhausted to the outside. Is wound around the work winder 70.

次に、例えば、図２に示される露光パターンの露光処理の場合、まず、移動ユニット８０を帯状ワーク１の１列目の露光パターン部（ｎｏ．１）が露光部４０の投影レンズ４４の下方に位置する所まで移動させ、昇降ローラ４７、４８を下降させてワーク吸引テーブル４５上にワーク吸引テーブル４５の吸引作用によって帯状ワーク１を吸着固定する。   Next, for example, in the exposure process of the exposure pattern shown in FIG. 2, first, the moving unit 80 is moved under the projection lens 44 of the exposure unit 40 where the exposure pattern portion (no.1) in the first row of the strip-like workpiece 1 is positioned. The belt-like workpiece 1 is sucked and fixed on the workpiece suction table 45 by the suction action of the workpiece suction table 45 by moving the lift rollers 47 and 48 down to the position located at the position.

そして、第１、第２搬送固定装置３０、５０の固定グリップ３１、５１で帯状ワーク１を固定し、レチクル４２の位置を前記露光パターン部（ｎｏ．１）にアライメントして露光部４０の光照射部４１で所定の露光を行う。   Then, the belt-like workpiece 1 is fixed by the fixing grips 31 and 51 of the first and second transport fixing devices 30 and 50, the position of the reticle 42 is aligned with the exposure pattern portion (no. 1), and the light of the exposure portion 40 is obtained. The irradiation unit 41 performs predetermined exposure.

次に、その状態から移動ユニット８０を帯状ワーク１の２列目の露光パターン部（ｎｏ．２）が露光部４０の投影レンズ４４の下方に位置する所まで移動させる。そして、レチクル４２の位置を前記露光パターン部（ｎｏ．２）にアライメントして露光部４０の光照射部４１で所定の露光を行って、再度帯状ワーク１の１列目の露光パターン部（ｎｏ．１）が露光部４０の投影レンズ４４の下方に位置する所まで移動ユニット８０を移動させる。   Next, the moving unit 80 is moved from that state to a position where the exposure pattern portion (no. 2) in the second row of the belt-like workpiece 1 is positioned below the projection lens 44 of the exposure portion 40. Then, the position of the reticle 42 is aligned with the exposure pattern portion (no. 2), predetermined exposure is performed by the light irradiation portion 41 of the exposure portion 40, and the exposure pattern portion (no) of the first row of the belt-like workpiece 1 is again formed. .1) move the moving unit 80 to a position below the projection lens 44 of the exposure unit 40.

次に、ワーク吸引テーブル４５の帯状ワーク１の吸引を停止し、昇降ローラ４７、４８を上昇させると共に、第１、第２搬送固定装置３０、５０の固定グリップ３１、５１による帯状ワーク１の固定を解除する。   Next, the suction of the belt-like workpiece 1 on the workpiece suction table 45 is stopped, the lifting rollers 47 and 48 are raised, and the belt-like workpiece 1 is fixed by the fixing grips 31 and 51 of the first and second transport fixing devices 30 and 50. Is released.

そして、帯状ワーク１を、第１、第２搬送固定装置３０、５０の移動グリップ３２、５２によって１ピッチ、つまり、帯状ワーク１の１列目の次の露光パターン部（ｎｏ．３）が露光部４０の投影レンズ４４の下方に位置する所まで搬送し、昇降ローラ４７、４８を下降させてワーク吸引テーブル４５上にワーク吸引テーブル４５の吸引作用によって帯状ワーク１を吸着固定する。   The belt-like workpiece 1 is exposed by one pitch by the moving grips 32 and 52 of the first and second transport fixing devices 30 and 50, that is, the next exposure pattern portion (no. 3) in the first row of the belt-like workpiece 1 is exposed. The belt 40 is conveyed to a position below the projection lens 44 of the unit 40, and the elevating rollers 47 and 48 are lowered to fix the belt-like workpiece 1 on the workpiece suction table 45 by the suction action of the workpiece suction table 45.

そして、第１、第２搬送固定装置３０、５０の固定グリップ３１、５１で帯状ワーク１を固定し、レチクル４２の位置を前記露光パターン部（ｎｏ．３）にアライメントして露光部４０の光照射部４１で所定の露光を行う。   Then, the belt-like workpiece 1 is fixed by the fixing grips 31 and 51 of the first and second transport fixing devices 30 and 50, the position of the reticle 42 is aligned with the exposure pattern portion (no. 3), and the light of the exposure portion 40 is obtained. The irradiation unit 41 performs predetermined exposure.

露光時における帯状ワーク１の搬送の際、ワーク巻取機７０は第２緊張装置６０での帯状ワーク１の垂れ下がりにより、帯状ワーク１に適当な弛みを持たせて帯状ワーク１を必要量巻き上げる。   When the belt-like workpiece 1 is conveyed during exposure, the work winder 70 winds the belt-like workpiece 1 by a necessary amount by causing the belt-like workpiece 1 to have an appropriate slack due to the hanging of the belt-like workpiece 1 by the second tensioning device 60.

このようにして、露光パターン部ｎｏ．４、ｎｏ．５---以降への露光に際しても、前記ｎｏ．１〜ｎｏ．３への露光行程と同様に、移動、露光、移動、搬送、露光、移動---の繰り返しによって帯状ワーク１へ複数列の露光パターンが露光される。   In this way, the exposure pattern portion no. 4, no. 5 --- also in the subsequent exposure, no. 1-no. Similar to the exposure process 3, a plurality of rows of exposure patterns are exposed on the strip-shaped workpiece 1 by repeating movement, exposure, movement, conveyance, exposure, and movement.

なお、帯状ワーク１の前記露光パターン列間の移動、つまり、移動ユニット８０の移動時における、ワーク巻出機１０及びワーク巻取機７０と移動ユニット８０間での帯状ワーク１の捻れは、前述の第１、第２緊張装置２０、６０での吸引作用による帯状ワーク１の垂れ下がり部での弛みによって吸収される。   The movement of the strip-shaped workpiece 1 between the exposure pattern rows, that is, the twist of the strip-shaped workpiece 1 between the workpiece unwinding machine 10 and the workpiece winder 70 and the moving unit 80 when the moving unit 80 is moved is described above. The first and second tensioning devices 20 and 60 are absorbed by the slack in the hanging portion of the belt-like workpiece 1 due to the suction action.

このとき、帯状ワーク１を、第１、第２搬送固定装置３０、５０によってスムーズに搬送させるために、第１、第２緊張装置２０、６０での帯状ワーク１の垂れ下がり高さ、つまり、ガイドローラ２３、２４、６３、６４から帯状ワーク１の垂れ下がりの最下端までの距離が帯状ワーク１幅の２．５倍以上であり、また、第１、第２緊張装置２０、６０での帯状ワーク１の垂れ下がり幅、つまり、ガイドローラ２３、２４間及びガイドローラ６３、６４間の距離が帯状ワーク１幅の２倍以上であるのが好ましい。   At this time, in order to smoothly convey the belt-like workpiece 1 by the first and second conveyance fixing devices 30 and 50, the hanging height of the belt-like workpiece 1 at the first and second tensioning devices 20 and 60, that is, a guide The distance from the rollers 23, 24, 63, 64 to the lowest lower end of the belt-shaped workpiece 1 is 2.5 times or more the width of the belt-shaped workpiece 1, and the belt-shaped workpiece in the first and second tensioning devices 20, 60 1, that is, the distance between the guide rollers 23 and 24 and the distance between the guide rollers 63 and 64 is preferably at least twice the width of the belt-like workpiece 1.

また、第１、第２緊張装置２０、６０での吸引量を搬送、移動などの状態に応じてコントロールすることによって、帯状ワーク１の搬送、移動状態のより安定化を図ることができる。   Further, by controlling the amount of suction by the first and second tensioning devices 20 and 60 according to the state of conveyance, movement, etc., the conveyance and movement state of the belt-like workpiece 1 can be further stabilized.

本発明の帯状ワークの全体構成を示す概略図である。It is the schematic which shows the whole structure of the strip | belt-shaped workpiece | work of this invention. 複数列の露光パターンを示す概略図である。It is the schematic which shows the exposure pattern of several rows.

符号の説明Explanation of symbols

１ 帯状ワーク
２０ 第１緊張装置
２２、６２ 吸引箱
２３、２４、６３、６４ ガイドローラ
３０ 第１搬送固定装置
３１、５１ 固定グリップ
３２、５２ 移動グリップ
４０ 露光部
４５ ワーク吸引テーブル
４７、４８ 昇降ローラ
５０ 第２搬送固定装置
６０ 第２緊張装置
８０ 移動ユニット
DESCRIPTION OF SYMBOLS 1 Strip | belt-shaped workpiece | work 20 1st tension device 22, 62 Suction box 23, 24, 63, 64 Guide roller 30 1st conveyance fixing device 31, 51 Fixed grip 32, 52 Moving grip 40 Exposure part 45 Work suction table 47, 48 Lift roller 50 Second transport fixing device 60 Second tension device 80 Moving unit

Claims (3)

ワーク巻出機から巻き出された帯状ワークに、レチクル（マスク）に形成されたパターンが複数列露光されてワーク巻取機に巻き取られる帯状ワークの露光装置において、少なくとも帯状ワークの長手方向に帯状ワークを搬送して固定する第１、第２搬送固定装置と、帯状ワークへの露光の際帯状ワークを載置するワーク吸引テーブルとが帯状ワークの幅方向に移動する移動ユニットに一体的に取り付けられて、前記第１、第２搬送固定装置と移動ユニットによる帯状ワークの搬送と移動を繰り返し、帯状ワークの搬送方向における前記移動ユニットの上流側、下流側にそれぞれ設けられた第１、第２緊張装置によって、帯状ワークの搬送と移動時の前記ワーク巻出機及びワーク巻取機と前記移動ユニット間での帯状ワークの捻れを吸収しながら、帯状ワークに複数列のパターンを露光することを特徴とする帯状ワークの露光装置。 In a strip-shaped workpiece exposure apparatus in which a plurality of rows of patterns formed on a reticle (mask) are exposed to a strip-shaped workpiece unwound from a workpiece unwinder and wound on a workpiece winder, at least in the longitudinal direction of the strip-shaped workpiece The first and second conveying and fixing devices that convey and fix the belt-like workpiece and the workpiece suction table on which the belt-like workpiece is placed during exposure to the belt-like workpiece are integrated with the moving unit that moves in the width direction of the belt-like workpiece. The first and second transport fixing devices and the moving unit are repeatedly transported and moved by the first and second transport fixing devices, and the first and second transport units are respectively provided on the upstream side and the downstream side of the moving unit in the transporting direction of the strip-shaped workpiece. 2 The tension device must not absorb the twist of the strip work between the moving unit and the work unwinder and the work winder during the transport and movement of the strip work. Et al., The exposure apparatus of the belt-like work, characterized by exposing a pattern of a plurality of rows in the strip-shaped workpiece. ワーク巻出機から巻き出された帯状ワークに、レチクル（マスク）に形成されたパターンが複数列露光されてワーク巻取機に巻き取られる帯状ワークの露光装置において、帯状ワークの長手方向に帯状ワークを搬送して固定する第１、第２搬送固定装置が帯状ワークの幅方向に移動する移動ユニットに一体的に取り付けられて、前記第１、第２搬送固定装置と移動ユニットによる帯状ワークの搬送と移動を繰り返し、帯状ワークの搬送方向における前記移動ユニットの上流側、下流側にそれぞれ設けられた第１、第２緊張装置によって、帯状ワークの搬送と移動時の前記ワーク巻出機及びワーク巻取機と前記移動ユニット間での帯状ワークの捻れを吸収しながら、帯状ワークに複数列のパターンを露光することを特徴とする帯状ワークの露光装置。 In a strip-shaped workpiece exposure apparatus in which a plurality of rows of patterns formed on a reticle (mask) are exposed to a strip-shaped workpiece unwound from a workpiece unwinder and wound on a workpiece winder, the strip-shaped workpiece is stripped in the longitudinal direction of the strip-shaped workpiece. First and second transport and fixing devices for transporting and fixing the workpiece are integrally attached to a moving unit that moves in the width direction of the strip-shaped workpiece, and the first and second transport and fixing devices and the movable unit The work unwinding machine and the work at the time of transporting and moving the belt-shaped workpiece by the first and second tensioning devices respectively provided on the upstream side and the downstream side of the moving unit in the transport direction of the belt-shaped workpiece by repeating the transport and movement. Exposing the strip-shaped workpiece to the strip-shaped workpiece while absorbing the twist of the strip-shaped workpiece between the winder and the moving unit. Location. 前記第１、第２緊張装置は、ブロアーが設けられた排気ダクトが吸引箱に接続されて吸引箱内の雰囲気が吸引されるようになっており、その吸引箱内の雰囲気の吸引により吸引箱内を走行する帯状ワークに垂れ下がりが生じ、その垂れ下がりによる前記帯状ワークの弛みによって前記帯状ワークの捻れを吸収することを特徴とする請求項１又は２に記載の帯状ワークの露光装置。

In the first and second tensioning devices, an exhaust duct provided with a blower is connected to a suction box so that the atmosphere in the suction box is sucked, and the suction box is sucked by suction of the atmosphere in the suction box. The belt-shaped workpiece exposure apparatus according to claim 1 or 2, wherein the belt-shaped workpiece traveling inside is drooped and the twist of the belt-shaped workpiece is absorbed by the slack of the belt-shaped workpiece due to the drooping.

JP2004166383A 2004-06-03 2004-06-03 Strip workpiece exposure system Expired - Lifetime JP4499482B2 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010217207A (en) * 2009-03-13 2010-09-30 Nikon Corp Transfer device, transfer method and method for manufacturing device
JP2021067717A (en) * 2019-10-18 2021-04-30 株式会社 ベアック Exposure device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09230610A (en) * 1996-02-22 1997-09-05 Ushio Inc Projective exposure method and device
JPH10187937A (en) * 1996-12-25 1998-07-21 Ushio Inc Projection and exposure apparatus for band-shaped work
JP2000214595A (en) * 1999-01-25 2000-08-04 Ushio Inc Aligner for belt-like work
JP2004094142A (en) * 2002-09-04 2004-03-25 Toray Eng Co Ltd Wide width exposing device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09230610A (en) * 1996-02-22 1997-09-05 Ushio Inc Projective exposure method and device
JPH10187937A (en) * 1996-12-25 1998-07-21 Ushio Inc Projection and exposure apparatus for band-shaped work
JP2000214595A (en) * 1999-01-25 2000-08-04 Ushio Inc Aligner for belt-like work
JP2004094142A (en) * 2002-09-04 2004-03-25 Toray Eng Co Ltd Wide width exposing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010217207A (en) * 2009-03-13 2010-09-30 Nikon Corp Transfer device, transfer method and method for manufacturing device
JP2021067717A (en) * 2019-10-18 2021-04-30 株式会社 ベアック Exposure device

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