JP2005316166A5 - - Google Patents
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- Publication number
- JP2005316166A5 JP2005316166A5 JP2004134440A JP2004134440A JP2005316166A5 JP 2005316166 A5 JP2005316166 A5 JP 2005316166A5 JP 2004134440 A JP2004134440 A JP 2004134440A JP 2004134440 A JP2004134440 A JP 2004134440A JP 2005316166 A5 JP2005316166 A5 JP 2005316166A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004134440A JP4338577B2 (ja) | 2004-04-28 | 2004-04-28 | 露光装置 |
| TW94113744A TWI394007B (zh) | 2004-04-28 | 2005-04-28 | 曝光裝置 |
| PCT/JP2005/008114 WO2005106590A1 (ja) | 2004-04-28 | 2005-04-28 | 露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004134440A JP4338577B2 (ja) | 2004-04-28 | 2004-04-28 | 露光装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005316166A JP2005316166A (ja) | 2005-11-10 |
| JP2005316166A5 true JP2005316166A5 (ja) | 2007-05-24 |
| JP4338577B2 JP4338577B2 (ja) | 2009-10-07 |
Family
ID=35241829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004134440A Expired - Fee Related JP4338577B2 (ja) | 2004-04-28 | 2004-04-28 | 露光装置 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4338577B2 (ja) |
| TW (1) | TWI394007B (ja) |
| WO (1) | WO2005106590A1 (ja) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI386762B (zh) * | 2005-05-24 | 2013-02-21 | V Technology Co Ltd | 曝光裝置及圖形形成方法 |
| DE102006014380A1 (de) * | 2006-03-27 | 2007-10-11 | Carl Zeiss Smt Ag | Projektionsobjektiv und Projektionsbelichtungsanlage mit negativer Schnittweite der Eintrittspupille |
| JP5133239B2 (ja) * | 2006-04-05 | 2013-01-30 | シャープ株式会社 | 露光方法および露光装置 |
| JP2008076709A (ja) * | 2006-09-21 | 2008-04-03 | V Technology Co Ltd | 露光装置 |
| JP4997908B2 (ja) * | 2006-10-11 | 2012-08-15 | 大日本印刷株式会社 | カラーフィルタの製造装置および製造方法 |
| JP2009188012A (ja) * | 2008-02-04 | 2009-08-20 | Nsk Ltd | 露光装置 |
| JP5489050B2 (ja) * | 2008-02-04 | 2014-05-14 | 日本精工株式会社 | 露光装置 |
| JP2009251290A (ja) * | 2008-04-07 | 2009-10-29 | V Technology Co Ltd | 露光装置 |
| JP5510317B2 (ja) | 2008-05-28 | 2014-06-04 | 凸版印刷株式会社 | カラーフィルタの製造方法及びパターン付き基板の製造方法 |
| JP6708217B2 (ja) * | 2015-12-17 | 2020-06-10 | 株式会社ニコン | パターン描画装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09320939A (ja) * | 1996-05-29 | 1997-12-12 | Nikon Corp | 位置検出方法及び装置 |
| FR2800565B1 (fr) * | 1999-11-03 | 2002-10-25 | Automa Tech Sa | Dispositif de mesure d'erreur de position relative |
| BR0002187A (pt) * | 2000-03-30 | 2001-11-13 | Brasil Compressores Sa | Processo de formação de pacote anelar delâminas metálicas de estator de motor linear e opacote anelar de lâminas metálicas formado |
| JP2002040669A (ja) * | 2000-07-19 | 2002-02-06 | Toray Eng Co Ltd | 描画装置 |
| JP2004012903A (ja) * | 2002-06-07 | 2004-01-15 | Fuji Photo Film Co Ltd | 露光装置 |
-
2004
- 2004-04-28 JP JP2004134440A patent/JP4338577B2/ja not_active Expired - Fee Related
-
2005
- 2005-04-28 WO PCT/JP2005/008114 patent/WO2005106590A1/ja active Application Filing
- 2005-04-28 TW TW94113744A patent/TWI394007B/zh not_active IP Right Cessation