JP2005274292A - Leak inspection device for multipath workpiece - Google Patents

Leak inspection device for multipath workpiece Download PDF

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JP2005274292A
JP2005274292A JP2004086996A JP2004086996A JP2005274292A JP 2005274292 A JP2005274292 A JP 2005274292A JP 2004086996 A JP2004086996 A JP 2004086996A JP 2004086996 A JP2004086996 A JP 2004086996A JP 2005274292 A JP2005274292 A JP 2005274292A
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chamber
inspection
trace gas
gas
leak
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JP3790533B2 (en
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Kazunari Kubota
一成 久保田
Takeshi Kato
毅 加藤
Takeshi Kasahara
健 笠原
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Yamaha Fine Technologies Co Ltd
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Yamaha Fine Technologies Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a leak inspection device for a multipath workpiece for performing accurate leak inspection by reducing trace gas remaining in a pipe leading from a chamber under inspection to an inspection apparatus. <P>SOLUTION: This leak inspection device 10 comprises a chamber 11, connecting pipes 12a, 12b, and 12c, the inspection apparatus 24, and a gate valve 23a provided on the other end of the connecting pipe 12b. The workpiece 30, equipped with an outside chamber 31a and an inside chamber 31b, is placed in the chamber 11. One end part of the connecting pipe 12a is connected to the outside chamber 31a while one end part of the connecting pipe 12b is connected to the inside chamber 31b. Depressurized exhaust paths 15a and 15b, and trace gas sealing paths 16a and 16b are connected to the other end side of the connecting pipes 12a and 12b. The other end part of the connecting pipe 12b is connected to the inspection apparatus 24 via a gas leak detection path 22a. Further, the inspection apparatus 24 is connected to the chamber 11. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、複数の隔離された室を備え気体や液体の収容や移送等に使用される容器や配管等の装置からなる多経路ワークの漏れを検査するための多経路ワークの漏れ検査装置に関する。   The present invention relates to a multipath work leakage inspection apparatus for inspecting multipath work leakage including a plurality of isolated chambers and containers and pipes used for storing and transferring gas and liquid. .

従来から、気体や液体の収容や移送に使用する容器や配管等の中には気密性を要求されるものがあり、このような容器や配管等に生じる漏れをチェックするために、漏れ検査装置が用いられている（例えば、特許文献１参照。）。この漏れ検査装置では、ヘリウムガスからなるトレースガスを容器等からなる被検査体内に充填して、この被検査体を真空チャンバー内に入れ、被検査体内から真空チャンバー内に漏れてくるトレースガスを検査器で検出することにより被検査体の漏れ検査を行っている。   Conventionally, some containers and pipes used for the storage and transfer of gas and liquid require airtightness, and in order to check for leaks occurring in such containers and pipes, a leak inspection device Is used (for example, refer to Patent Document 1). In this leak inspection apparatus, a trace gas made of helium gas is filled into a body to be inspected made of a container or the like, and the object to be inspected is placed in a vacuum chamber, and trace gas leaking from the body to be inspected into the vacuum chamber is collected. A leak inspection is performed on the object to be inspected by detecting with an inspection device.

また、漏れ検査が行われる被検査体の中には、例えば、熱交換器のように、外部側部分と内部側部分とが隔離された状態で形成されたものがある。このような場合に、使用される漏れ検査装置として、図２に示したような装置がある。この漏れ検査装置４０は、外側室４１ａと内側室４１ｂとを備えた被検査体４１をチャンバー４２内に設置し、外側室４１ａに、大気導入路４３ａ、真空引き路４４ａ、減圧排気路４５ａおよびトレースガス封入路４６ａを接続している。また、内側室４１ｂに、大気導入路４３ｂ、真空引き路４４ｂ、減圧排気路４５ｂ、トレースガス封入路４６ｂおよびガス漏れ検査路４７を接続している。   In addition, some of the objects to be inspected that are inspected for leakage are formed in a state in which the outer side portion and the inner side portion are isolated, such as a heat exchanger. In such a case, there is a device as shown in FIG. 2 as a leakage inspection device to be used. This leak inspection apparatus 40 has an inspected object 41 having an outer chamber 41a and an inner chamber 41b installed in a chamber 42, and an air introduction path 43a, a vacuum suction path 44a, a reduced pressure exhaust path 45a, and an outer chamber 41a. The trace gas sealing passage 46a is connected. In addition, an atmospheric introduction passage 43b, a vacuum suction passage 44b, a decompression exhaust passage 45b, a trace gas sealing passage 46b, and a gas leakage inspection passage 47 are connected to the inner chamber 41b.

そして、チャンバー４２に、ガス漏れ検査路４８を接続し、このガス漏れ検査路４８とガス漏れ検査路４７とにガス漏れ検査用の検査器４９を接続している。このため、トレースガス封入路４６ａから外側室４１ａ内にトレースガスを送り、外部室４１ａから漏れて内側室４１ｂに入りガス漏れ検査路４７から出てくるトレースガスを検査器４９で検出することにより、外側室４１ａと内側室４１ｂとの間の漏れの有無を検査することができる。また、トレースガス封入路４６ｂから内側室４１ｂ内にトレースガスを送り、内側室４１ｂから外部に漏れてチャンバー４２内を介してガス漏れ検査路４８に出てくるトレースガスを検査器４９で検出することにより、内側室４１ｂと外部との間の漏れの有無を検査することができる。
特開２００１−３３３４３号公報 A gas leakage inspection path 48 is connected to the chamber 42, and an inspection device 49 for gas leakage inspection is connected to the gas leakage inspection path 48 and the gas leakage inspection path 47. For this reason, by sending the trace gas from the trace gas sealing passage 46a into the outer chamber 41a and detecting the trace gas leaking from the outer chamber 41a and entering the inner chamber 41b and exiting from the gas leak inspection passage 47 by the inspection device 49. The presence or absence of leakage between the outer chamber 41a and the inner chamber 41b can be inspected. Further, the trace gas is sent from the trace gas sealing passage 46b into the inner chamber 41b, and the trace gas leaking outside from the inner chamber 41b and coming out to the gas leak inspection passage 48 through the chamber 42 is detected by the inspection device 49. Thus, the presence or absence of leakage between the inner chamber 41b and the outside can be inspected.
JP 2001-33343 A

しかしながら、図２に示した従来の漏れ検査装置４０では、検査後に、減圧排気路４５ａ，４５ｂを介して検査に使用したトレースガスを外部に排出しているが、このトレースガスの充分な排出ができず、トレースガスが各配管内に残留してしまうことがある。このため、つぎの被検査体４１の漏れ検査の際に、トレースガスのバックグラウンド値が高くなって精度のよい漏れ検査ができなくなるという問題が生じている。特に、トレースガス封入路４６ｂから内側室４１ｂにトレースガスを供給して内側室４１ｂと外部との間の漏れ検査を行ったのちに、トレースガス封入路４６ｂ等の各配管内にトレースガスが残留し易くなる。   However, in the conventional leak inspection apparatus 40 shown in FIG. 2, the trace gas used for the inspection is discharged to the outside through the decompression exhaust passages 45a and 45b after the inspection. However, the trace gas is sufficiently discharged. The trace gas may remain in each pipe. For this reason, in the next leak inspection of the inspection object 41, the background value of the trace gas becomes high, and there is a problem that accurate leak inspection cannot be performed. In particular, after the trace gas is supplied from the trace gas sealing passage 46b to the inner chamber 41b and a leak inspection is performed between the inner chamber 41b and the outside, the trace gas remains in each pipe such as the trace gas sealing passage 46b. It becomes easy to do.

本発明は、前述した問題に対処するためになされたもので、その目的は、被検査室から検査器に通じる配管内に残留するトレースガスを少なくすることにより、精度のよい漏れ検査が可能になる多経路ワークの漏れ検査装置を提供することである。   The present invention has been made in order to cope with the above-described problems. The purpose of the present invention is to reduce the amount of trace gas remaining in the pipe from the room to be inspected to the inspector, thereby enabling accurate leak inspection. It is providing the leak test | inspection apparatus of the multipath workpiece | work which becomes.

前述した目的を達成するため、本発明に係る多経路ワークの漏れ検査装置の構成上の特徴は、互いに隔離された複数の被検査室を備えたワークを密閉状態で格納できる密閉チャンバーと、一端部が密閉チャンバーの壁部を貫通して密閉チャンバー内に設置されるワークの対応する被検査室に接続されるとともに、他端部側がそれぞれ対応するトレースガス供給管およびトレースガス排出管に接続された複数の接続管と、密閉チャンバーに接続されワークから密閉チャンバー内に漏れるトレースガスを検出する外部漏れ検査器と、複数の接続管のうちの所定の接続管の他端部側にガス漏れ検出路を介して接続され、所定の接続管の一端部が接続された被検査室に他の被検査室から漏れてくるトレースガスを検出する内部漏れ検査器と、所定の接続管の他端部側に設けられ、トレースガス供給管およびトレースガス排出管を、所定の接続管の一端部側部分およびガス漏れ検出路に対して開閉可能に仕切る仕切り弁とを備えたことにある。   In order to achieve the above-described object, the structural features of the multi-path workpiece leakage inspection apparatus according to the present invention include: a sealed chamber capable of storing a workpiece having a plurality of chambers to be inspected isolated from each other; The part passes through the wall of the sealed chamber and is connected to the corresponding chamber to be inspected of the workpiece installed in the sealed chamber, and the other end is connected to the corresponding trace gas supply pipe and trace gas discharge pipe, respectively. Multiple connection pipes, an external leak tester that detects trace gas that is connected to the sealed chamber and leaks from the workpiece into the sealed chamber, and gas leak detection at the other end of the predetermined connection pipe among the multiple connection pipes An internal leak tester for detecting trace gas leaking from other test chambers to a test chamber connected via a channel and connected to one end of a predetermined connection pipe; Provided with a partition valve provided on the other end side of the pipe and partitioning the trace gas supply pipe and the trace gas discharge pipe with respect to the one end side portion of the predetermined connection pipe and the gas leak detection path so as to be opened and closed. is there.

前述のように構成した本発明に係る多経路ワークの漏れ検査装置は、互に密閉状態で隔離された複数の被検査室を備えたワークにおける各被検査室間または被検査室と外部との間に漏れが生じているか否かを検査するための検査装置である。被検査室を１個だけ備えたワークの漏れを検査する際には、例えば、ワークをチャンバー内に密閉状態で設置して、ワークの一部にチャンバーの外部に連通する接続管を接続するとともにチャンバーにも外部に連通する接続管を接続する。   The multipath work leakage inspection apparatus according to the present invention configured as described above is provided between a plurality of inspection rooms in a work having a plurality of inspection rooms isolated from each other in a sealed state or between an inspection room and the outside. This is an inspection device for inspecting whether or not there is a leak in between. When inspecting leakage of a workpiece having only one chamber to be inspected, for example, the workpiece is placed in a sealed state in the chamber, and a connection pipe communicating with the outside of the chamber is connected to a part of the workpiece. A connecting pipe that communicates with the outside is also connected to the chamber.

そして、一方の接続管を介してワーク内にトレースガスを供給し、ワークからチャンバー側に漏れるトレースガスを他方の接続管から取り出して検出するか、または、チャンバー内に他方の接続管を介してトレースガスを供給し、チャンバーからワーク内に漏れるトレースガスを一方の接続管を介して取り出して検出することにより漏れ検査を行うことができる。このため、トレースガスを供給するための接続管と検査用のガスを取り出すための接続管とが異なるものになり、トレースガスが検査ガス取り出し用の接続管内に残存するといったことは生じにくい。   Then, the trace gas is supplied into the work through one connection pipe, and the trace gas leaking from the work to the chamber side is taken out from the other connection pipe and detected, or the other is connected to the chamber through the other connection pipe. Leak inspection can be performed by supplying the trace gas and detecting the trace gas leaking from the chamber into the work through one of the connecting pipes. For this reason, the connection pipe for supplying the trace gas is different from the connection pipe for taking out the inspection gas, and the trace gas hardly remains in the connection pipe for taking out the inspection gas.

しかしながら、ワークが複数の被検査室を備える場合には、各被検査室にトレースガスを供給するためのトレースガス供給管および検査後に各被検査室からトレースガスを排出するためのトレースガス排出管と、各被検査室とを接続する接続管のうちのいずれかの接続管に、各被検査室間における漏れを検出するための内部漏れ検査器を接続しなければならなくなる。このため、複数個のワークを取り換えながら順次漏れ検査を行っていくと、接続管内を何度もトレースガスが往復移動するようになり、接続管内にトレースガスが残留しやすくなる。   However, when the workpiece includes a plurality of chambers to be inspected, a trace gas supply pipe for supplying the trace gas to each chamber to be inspected and a trace gas discharge pipe for discharging the trace gas from each chamber to be inspected after the inspection In addition, an internal leak tester for detecting a leak between the test rooms must be connected to any one of the connection pipes connecting the test rooms. For this reason, when the leak inspection is performed sequentially while replacing a plurality of workpieces, the trace gas reciprocates in the connection pipe many times, and the trace gas tends to remain in the connection pipe.

本発明に係る多経路ワークの漏れ検査装置では、被検査室と内部漏れ検査器とを接続する所定の接続管に、仕切り弁を設けて、接続管におけるトレースガス供給管およびトレースガス排出管側の部分と、被検査室側および内部漏れ検査器側の部分との間を連通させたり遮断させたりできるようにしている。すなわち、トレースガスが供給される被検査室からの漏れを検出される被検査室内のガスを取り込んで、ガス漏れの検査を行う際には、仕切り弁を操作することによって、トレースガス供給管およびトレースガス排出管側を被検査室や内部漏れ検査器に対して遮断することができる。これによると、トレースガス供給管およびトレースガス排出管側にトレースガスが残留していても、漏れ検査に影響することがなくなる。   In the leak inspection apparatus for a multi-path work according to the present invention, a gate valve is provided in a predetermined connection pipe that connects the inspection room and the internal leak tester, and the trace gas supply pipe and the trace gas discharge pipe side of the connection pipe are provided. This part can be communicated with or blocked from the part to be inspected and the part on the side of the inspected room. That is, when taking in the gas in the room to be inspected to be detected from the room to be inspected supplied with the trace gas and inspecting for gas leakage, the trace gas supply pipe and The trace gas discharge pipe side can be shut off from the inspection room and the internal leak tester. According to this, even if trace gas remains on the trace gas supply pipe and the trace gas discharge pipe side, the leak inspection is not affected.

また、被検査室と内部漏れ検査器との間における接続管とガス漏れ検出路との長さを短く設定しておけば、この部分にトレースガスが残留していてもその量は僅かなものになるため、検査への影響は少なくなる。これによって、精度のよい漏れ検査を行える。また、この場合のワークが備える複数の被検査室は、外部側部分と、その内部に設けられる内部側部分とで構成されるものでもよいし、隣接して設けられる複数の容器状のものでもよい。互いの被検査室間での漏れと被検査室と外部との間での漏れ検査が必要なワークであればよい。また、本発明に係る多経路ワークの漏れ検査装置は、ワークから密閉チャンバー内に漏れるトレースガスを検出する外部漏れ検査器と、被検査室に他の被検査室から漏れてくるトレースガスを検出する内部漏れ検査器とを備えているが、この外部漏れ検査器と内部漏れ検査器とは一つの装置で構成してもよい。   Also, if the length of the connecting pipe and the gas leak detection path between the inspection room and the internal leak tester is set short, even if trace gas remains in this part, the amount is small. Therefore, the influence on the inspection is reduced. Thereby, it is possible to perform a leak inspection with high accuracy. Further, the plurality of chambers to be inspected in the workpiece in this case may be composed of an outer side portion and an inner side portion provided in the inside, or may be a plurality of container-like ones provided adjacent to each other. Good. Any work may be used as long as it requires leakage between the inspection rooms and a leakage inspection between the inspection room and the outside. In addition, the multipath work leak inspection apparatus according to the present invention detects an external leak tester that detects trace gas leaking from the work into the sealed chamber, and detects trace gas leaking from another test room to the test room. However, the external leak tester and the internal leak tester may be configured as a single device.

また、本発明に係る多経路ワークの漏れ検査装置の他の構成上の特徴は、ワークが、外部を構成する外部被検査室と、外部被検査室内に設けられ外部被検査室の外部に連通する開口部を備えた内部被検査室とで構成され、所定の接続管の一端部を、内部被検査室の開口部に接続するようにしたことにある。   In addition, another structural feature of the multi-path work leakage inspection apparatus according to the present invention is that the work is provided outside the external inspection room and communicates with the outside of the external inspection room. The internal inspection room is provided with an opening to be connected, and one end of a predetermined connection pipe is connected to the opening of the internal inspection room.

これによると、外部被検査室と内部被検査室との間の漏れの有無は、外部被検査室に接続された接続管を介して外部被検査室内にトレースガスを供給し、内部被検査室に接続された内部漏れ検査器で、外部被検査室から内部被検査室に漏れてくるトレースガスを検出することによって検査することができる。この場合、所定の接続管に接続されたトレースガス供給管およびトレースガス排出管側の部分は、仕切り弁によって、内部被検査室や内部漏れ検査器側から遮断しておく。   According to this, the presence or absence of leakage between the external inspection room and the internal inspection room is determined by supplying the trace gas into the external inspection room via the connecting pipe connected to the external inspection room. It is possible to inspect by detecting the trace gas leaking from the external inspection chamber to the internal inspection chamber with the internal leakage inspection device connected to the. In this case, the part on the trace gas supply pipe and trace gas discharge pipe side connected to the predetermined connection pipe is shut off from the internal inspection room and the internal leak tester side by the gate valve.

また、内部被検査室と外部との間の漏れの有無は、内部被検査室に接続された接続管を介して内部被検査室内にトレースガスを供給し、チャンバーに接続された外部漏れ検査器で、内部被検査室からチャンバー内に漏れてくるトレースガスを検出することによって検査することができる。この場合、内部漏れ検査器側は、仕切り弁または他の切り換え弁等によって、接続管から遮断しておく。また、外部被検査室と外部との間の漏れの有無は、外部被検査室に接続された接続管を介して外部被検査室内にトレースガスを供給し、チャンバーに接続された外部漏れ検査器で、外部被検査室からチャンバー内に漏れてくるトレースガスを検出することによって検査することができる。   In addition, the presence or absence of leakage between the internal chamber to be inspected is checked by supplying a trace gas into the internal chamber through a connecting pipe connected to the internal chamber to be inspected. Thus, the inspection can be performed by detecting the trace gas leaking from the internal inspection chamber into the chamber. In this case, the internal leak tester side is shut off from the connecting pipe by a gate valve or other switching valve. In addition, the presence or absence of leakage between the external inspection room and the outside is determined by supplying a trace gas into the external inspection room via a connecting pipe connected to the external inspection room and connecting the external leakage inspection device to the chamber. Thus, the inspection can be performed by detecting the trace gas leaking from the external inspection chamber into the chamber.

以下、本発明の一実施形態に係る多経路ワークの漏れ検査装置を図面を用いて説明する。図１は同実施形態に係る漏れ検査装置１０の概略配管図を示している。この漏れ検査装置１０は、ワーク３０を密閉状態で格納するチャンバー１１を備えている。このチャンバー１１は開閉可能な容器で構成されその所定部分に２個の挿入孔と１個の接続用孔が設けられている。そして、チャンバー１１内に、２個の挿入孔を介して、外部から接続管１２ａ，１２ｂの一端部側が挿し込まれ、接続用孔には接続管１２ｃが開口をチャンバー１１内に連通させて連結されている。また、チャンバー１１には、真空ポンプ（図示せず）が接続されており、この真空ポンプの作動により内部が減圧可能になっている。   Hereinafter, a multipath work leakage inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 shows a schematic piping diagram of a leak inspection apparatus 10 according to the embodiment. The leak inspection apparatus 10 includes a chamber 11 for storing the work 30 in a sealed state. The chamber 11 is composed of an openable and closable container, and two insertion holes and one connection hole are provided in a predetermined portion thereof. Then, one end side of the connection pipes 12a and 12b is inserted into the chamber 11 from the outside through two insertion holes, and the connection pipe 12c is connected to the connection hole by opening the opening in the chamber 11. Has been. The chamber 11 is connected to a vacuum pump (not shown), and the inside of the chamber 11 can be depressurized by the operation of the vacuum pump.

接続管１２ａの他端側には、それぞれ大気導入路１３ａ、真空引き路１４ａ、減圧排気路１５ａおよびトレースガス封入路１６ａの各配管が接続され、大気導入路１３ａ、真空引き路１４ａ、減圧排気路１５ａおよびトレースガス封入路１６ａに、それぞれ切り換え弁１７ａ，１８ａ，１９ａ，２１ａが設けられている。大気導入路１３ａは、コンプレッサー（図示せず）に接続されて大気中の空気をチャンバー１１内に設置されるワーク３０の後述する外側室３１ａ内に圧入可能になっており、真空引き路１４ａは真空ポンプ（図示せず）に接続されて外側室３１ａ内を排気することにより真空に近い状態まで減圧することができる。   Connected to the other end of the connecting pipe 12a are the atmospheric introduction passage 13a, the vacuum drawing passage 14a, the decompression exhaust passage 15a, and the trace gas sealing passage 16a, respectively, and the atmosphere introduction passage 13a, the vacuum drawing passage 14a, and the decompression exhaust passage. Switching valves 17a, 18a, 19a, and 21a are provided in the passage 15a and the trace gas sealing passage 16a, respectively. The air introduction path 13a is connected to a compressor (not shown) so that air in the atmosphere can be press-fitted into an outer chamber 31a, which will be described later, of the work 30 installed in the chamber 11, and the vacuum suction path 14a is By connecting to a vacuum pump (not shown) and exhausting the inside of the outer chamber 31a, the pressure can be reduced to a state close to a vacuum.

また、減圧排気路１５ａは減圧装置（図示せず）に接続されて外側室３１ａ内のガスを排気することができ、トレースガス封入路１６ａはヘリウムガスボンベ（図示せず）に接続されて、外側室３１ａ内にヘリウムガスからなるトレースガスを供給することができる。また、接続管１２ｂの他端側部分は、主配管２２とガス漏れ検査路２２ａとに分岐しており、主配管２２には、それぞれ大気導入路１３ｂ、真空引き路１４ｂ、減圧排気路１５ｂおよびトレースガス封入路１６ｂの各配管が接続されている。   The decompression exhaust passage 15a is connected to a decompression device (not shown) to exhaust the gas in the outer chamber 31a, and the trace gas sealing passage 16a is connected to a helium gas cylinder (not shown) to A trace gas made of helium gas can be supplied into the chamber 31a. The other end portion of the connection pipe 12b branches into a main pipe 22 and a gas leak inspection path 22a. The main pipe 22 has an air introduction path 13b, a vacuum suction path 14b, a decompression exhaust path 15b, and a decompression exhaust path 15b, respectively. Each pipe of the trace gas sealing passage 16b is connected.

そして、大気導入路１３ｂ、真空引き路１４ｂ、減圧排気路１５ｂおよびトレースガス封入路１６ｂに、それぞれ切り換え弁１７ｂ，１８ｂ，１９ｂ，２１ｂが設けられている。大気導入路１３ｂは、コンプレッサーに接続され、真空引き路１４ｂは真空ポンプに接続され、減圧排気路１５ｂは減圧装置に接続され、トレースガス封入路１６ｂはヘリウムガスボンベに接続されている。また、接続管１２ｂと主配管２２との間には仕切り弁２３ａが設けられており、この仕切り弁２３ａによって接続管１２ｂと主配管２２との間は連通されたり遮断されたりする。さらに、接続管１２ｂとガス漏れ検査路２２ａとの間にも切り換え弁２３ｂが設けられている。   Switching valves 17b, 18b, 19b, and 21b are provided in the atmosphere introduction path 13b, the vacuum suction path 14b, the decompression exhaust path 15b, and the trace gas sealing path 16b, respectively. The air introduction path 13b is connected to a compressor, the vacuum suction path 14b is connected to a vacuum pump, the decompression exhaust path 15b is connected to a decompression device, and the trace gas sealing path 16b is connected to a helium gas cylinder. Further, a partition valve 23a is provided between the connection pipe 12b and the main pipe 22, and the connection pipe 12b and the main pipe 22 are communicated or blocked by the partition valve 23a. Further, a switching valve 23b is also provided between the connection pipe 12b and the gas leak inspection path 22a.

ガス漏れ検査路２２ａは微量のトレースガスでも検出可能な検査器２４に接続されており、この検査器２４によって接続管１２ｂおよびガス漏れ検査路２２ａを介して送られてくるガス中のトレースガスが検出される。また、接続管１２ｃには、切り換え弁２５が設けられており、接続管１２ｃの他端部は検査器２４に接続されている。このため、検査器２４は、接続管１２ｃを介してチャンバー１１から送られるガス中のトレースガスの検出も行える。検査器２４は、ガス漏れ検査路２２ａを介して送られてくるガス中のトレースガスを検出する際には、本発明の内部漏れ検査器を構成し、接続管１２ｃを介して送られるガス中のトレースガスを検出する際には、本発明の外部漏れ検査器を構成する。   The gas leak inspection path 22a is connected to an inspector 24 that can detect even a trace amount of trace gas, and the trace gas in the gas sent by the inspector 24 via the connecting pipe 12b and the gas leak inspection path 22a. Detected. The connecting pipe 12c is provided with a switching valve 25, and the other end of the connecting pipe 12c is connected to the inspection device 24. For this reason, the test | inspection device 24 can also detect the trace gas in the gas sent from the chamber 11 via the connection pipe 12c. When detecting the trace gas in the gas sent via the gas leak test path 22a, the tester 24 constitutes the internal leak tester of the present invention, and in the gas sent via the connecting pipe 12c. When detecting this trace gas, the external leak tester of the present invention is configured.

チャンバー１１内に格納されるワーク３０は、外部被検査室としての外側室３１ａと内部被検査室としての内側室３１ｂとで構成されている。外側室３１ａは、円筒形のボンベ状の容器からなっており、両端に突出開口部３２ａ，３３ａが形成されている。そして、突出開口部３２ａに、栓体３４ａを介して接続管１２ａの一端部が接続され、突出開口部３３ａは蓋体３５ａによって閉塞されている。また、内側室３１ｂは、外側室３１ａの内部に位置する円筒状の本体３６と、本体３６の両端から突出し外側室３１ａの外側に延びる突出開口部３２ｂ，３３ｂとで構成されている。そして、突出開口部３２ｂは、栓体３４ｂを介して接続管１２ｂの一端部に接続され、突出開口部３３ｂは、蓋体３５ｂによって閉塞されている。   The work 30 stored in the chamber 11 is composed of an outer chamber 31a as an external inspection room and an inner chamber 31b as an internal inspection room. The outer chamber 31a is formed of a cylindrical cylinder-like container, and projecting openings 32a and 33a are formed at both ends. Then, one end of the connecting pipe 12a is connected to the protruding opening 32a via the plug 34a, and the protruding opening 33a is closed by the lid 35a. The inner chamber 31b includes a cylindrical main body 36 positioned inside the outer chamber 31a, and projecting openings 32b and 33b that protrude from both ends of the main body 36 and extend to the outside of the outer chamber 31a. The projecting opening 32b is connected to one end of the connection pipe 12b via the plug 34b, and the projecting opening 33b is closed by the lid 35b.

つぎに、前述したように構成された漏れ検査装置１０を用いて、ワーク３０の漏れ検査を行う場合について説明する。まず、ワーク３０の突出開口部３３ａを蓋体３５ａで閉塞するとともに、突出開口部３３ｂを蓋体３５ｂで閉塞する。ついで、各切り換え弁１７ａ等と仕切り弁２３ａとをすべて閉じた状態にして、チャンバー１１内の所定部分にワーク３０を設置する。そして、突出開口部３２ａに、接続管１２ａの一端部が接続された栓体３４ａを取り付け、突出開口部３２ｂに、接続管１２ｂの一端部が接続された栓体３４ｂを取り付ける。これによって、図１に示したように、外側室３１ａは、接続管１２ａを介してのみ外部に通じる状態になり、内側室３１ｂは、接続管１２ｂを介してのみ外部に通じる状態になる。   Next, a case where the leakage inspection of the workpiece 30 is performed using the leakage inspection apparatus 10 configured as described above will be described. First, the projecting opening 33a of the work 30 is closed with the lid 35a, and the projecting opening 33b is closed with the lid 35b. Next, with the switching valves 17 a and the like and the gate valve 23 a all closed, the work 30 is installed in a predetermined portion in the chamber 11. Then, the plug 34a to which one end of the connecting pipe 12a is connected is attached to the protruding opening 32a, and the plug 34b to which one end of the connecting pipe 12b is connected is attached to the protruding opening 32b. As a result, as shown in FIG. 1, the outer chamber 31a communicates with the outside only through the connecting pipe 12a, and the inner chamber 31b communicates with the outside only through the connecting pipe 12b.

つぎに、チャンバー１１に接続された真空ポンプを作動させて、チャンバー１１内の排気を行う。ついで、真空引き路１４ａに接続された真空ポンプを作動させるとともに、切り換え弁１８ａを開けることにより、真空引き路１４ａを介して外側室３１ａ内を排気して減圧する。そして、外側室３１ａの内圧が所定値になったときに、切り換え弁１８ａを閉じるとともに、切り換え弁２１ａを開いて、トレースガス封入路１６ａを介してヘリウムガスボンベから外側室３１ａ内にトレースガスを供給する。外側室３１ａ内にトレースガスが充填されると、切り換え弁２１ａを閉じる。この外側室３１ａ内の減圧および外側室３１ａ内へのトレースガスの供給に先行して、または並行して、仕切り弁２３ａと切り換え弁１８ｂとを開けるとともに、真空ポンプを作動させて、接続管１２ｂと主配管２２とを介して、内側室３１ｂ内を排気して減圧する。   Next, the vacuum pump connected to the chamber 11 is operated to evacuate the chamber 11. Next, the vacuum pump connected to the vacuum suction path 14a is operated, and the switching valve 18a is opened, whereby the inside of the outer chamber 31a is evacuated and decompressed via the vacuum suction path 14a. When the internal pressure of the outer chamber 31a reaches a predetermined value, the switching valve 18a is closed and the switching valve 21a is opened to supply the trace gas from the helium gas cylinder into the outer chamber 31a through the trace gas sealing passage 16a. To do. When the outer chamber 31a is filled with the trace gas, the switching valve 21a is closed. Prior to or in parallel with the decompression of the outer chamber 31a and the supply of the trace gas into the outer chamber 31a, the gate valve 23a and the switching valve 18b are opened and the vacuum pump is operated to connect the connecting pipe 12b. Then, the inside of the inner chamber 31b is evacuated and decompressed via the main pipe 22.

そして、内側室３１ｂの内圧が所定値になったときに、仕切り弁２３ａと切り換え弁１８ｂとを閉じる。ついで、切り換え弁２３ｂを開く。これによって、内側室３１ｂに接続された接続管１２ｂがガス漏れ検査路２２ａと連通して、内側室３１ｂから流れてくるガス中のトレースガスを検査器２４が検出する。この検査器２４が検出するトレースガスの量によって、外側室３１ａと内側室３１ｂとを仕切る壁部にガス漏れを生じさせるような欠陥があるか否かの検査が行われる。   When the internal pressure of the inner chamber 31b reaches a predetermined value, the gate valve 23a and the switching valve 18b are closed. Next, the switching valve 23b is opened. As a result, the connecting pipe 12b connected to the inner chamber 31b communicates with the gas leakage inspection path 22a, and the inspection device 24 detects the trace gas in the gas flowing from the inner chamber 31b. According to the amount of the trace gas detected by the inspector 24, an inspection is performed as to whether or not there is a defect that causes gas leakage in the wall portion that partitions the outer chamber 31a and the inner chamber 31b.

すなわち、外側室３１ａと内側室３１ｂとを仕切る壁部にガス漏れを生じさせるような欠陥等がある場合には、外側室３１ａ内のトレースガスは、その欠陥部分を通過して内側室３１ｂ内に浸入していき、これを検査器２４が検出する。また、ガス漏れを生じさすような欠陥がない場合は、トレースガスは外側室３１ａ内に充填された状態を維持するため、検査器２４はトレースガスを検出することができない。   That is, when there is a defect or the like that causes gas leakage in the wall portion that partitions the outer chamber 31a and the inner chamber 31b, the trace gas in the outer chamber 31a passes through the defective portion and passes through the inner chamber 31b. The inspection device 24 detects this. Further, when there is no defect that causes gas leakage, the trace gas is maintained in the outer chamber 31a, so that the inspector 24 cannot detect the trace gas.

この場合、検査器２４は、内側室３１ｂから流れてくるガス中のトレースガスの有無や量を検出し、検出値が所定の規定値（元々内側室３１ｂ、接続管１２ｂおよびガス漏れ検査路２２ａ内のガス中に含まれていたヘリウムガスの量）以上であれば、外側室３１ａと内側室３１ｂとの間に漏れがあると判定する。また、検出値が所定の規定値以下であれば、外側室３１ａと内側室３１ｂとの間には漏れはないと判定する。そして、漏れがあると判定した場合には、そのワーク３０は欠陥品であるとして、チャンバー１１から取り出して所定の場所に移送する。   In this case, the inspector 24 detects the presence or amount of trace gas in the gas flowing from the inner chamber 31b, and the detected value is a predetermined specified value (originally the inner chamber 31b, the connecting pipe 12b, and the gas leakage inspection path 22a). If it is equal to or greater than the amount of helium gas contained in the inner gas, it is determined that there is a leak between the outer chamber 31a and the inner chamber 31b. If the detected value is equal to or less than a predetermined specified value, it is determined that there is no leakage between the outer chamber 31a and the inner chamber 31b. If it is determined that there is a leak, the work 30 is taken as a defective product and is taken out of the chamber 11 and transferred to a predetermined location.

このとき、外側室３１ａと内側室３１ｂとの内部のトレースガスを除去したのちに、チャンバー１１を開けてワーク３０を取り出す。これには、まず、切り換え弁２３ｂを閉じる。つぎに、切り換え弁１７ｂおよび仕切り弁２３ａを開き、コンプレッサーを作動させて、内側室３１ｂ内に大気中の空気を送り込んだのちに、切り換え弁１７ｂを閉じる。ついで、切り換え弁１８ｂを開いて真空ポンプを作動させることにより内側室３１ｂや接続管１２ｂ等の配管内を排気して内側室３１ｂ等の内部のトレースガスを排除する。その後、切り換え弁１８ｂを閉じて、切り換え弁１７ｂを開け、内側室３１ｂ内に、大気中の空気を送る。つぎに、切り換え弁１７ｂおよび仕切り弁２３ａを閉じる。   At this time, after removing the trace gas inside the outer chamber 31a and the inner chamber 31b, the chamber 11 is opened and the workpiece 30 is taken out. First, the switching valve 23b is closed. Next, the switching valve 17b and the gate valve 23a are opened, the compressor is operated, air in the atmosphere is sent into the inner chamber 31b, and then the switching valve 17b is closed. Next, the switching valve 18b is opened and the vacuum pump is operated to exhaust the inside of the piping such as the inner chamber 31b and the connecting pipe 12b, thereby eliminating the trace gas inside the inner chamber 31b. Thereafter, the switching valve 18b is closed, the switching valve 17b is opened, and air in the atmosphere is sent into the inner chamber 31b. Next, the switching valve 17b and the gate valve 23a are closed.

外側室３１ａ内のトレースガスも外部に排除する処理を行う。この場合、まず、切り換え弁１９ａを開いて減圧装置を作動させることにより外側室３１ａ内のトレースガスを外部に排除したのちに、切り換え弁１９ａを閉じる。さらに、切り換え弁１８ａを開き、真空ポンプを作動させることにより、トレースガスをさらに排除し、切り換え弁１８ａを閉じる。つぎに、切り換え弁１７ａを開き、コンプレッサーを作動させることにより、外側室３１ａ内に大気中の空気を送り込んだのちに、切り換え弁１７ａを閉じる。この状態で、チャンバー１１を開けてその内部からワーク３０を取り出す。   The process which also excludes the trace gas in the outer side chamber 31a outside is performed. In this case, first, the switching valve 19a is opened and the decompression device is operated to remove the trace gas in the outer chamber 31a to the outside, and then the switching valve 19a is closed. Further, by opening the switching valve 18a and operating the vacuum pump, the trace gas is further eliminated and the switching valve 18a is closed. Next, the switching valve 17a is opened, and the compressor is operated to send air in the atmosphere into the outer chamber 31a, and then the switching valve 17a is closed. In this state, the chamber 11 is opened and the work 30 is taken out from the inside.

一方で、外側室３１ａと内側室３１ｂとの間に漏れがないと判定した場合には、内側室３１ｂと外部との間の漏れの有無を検査する。この場合、まず、切り換え弁２３ｂを閉じて、仕切り弁２３ａおよび切り換え弁２１ｂを開けて、トレースガス封入路１６ｂを介してヘリウムガスボンベから内側室３１ｂ内にトレースガスを供給する。つぎに、切り換え弁２１ｂと仕切り弁２３ａとを閉じる。そして、切り換え弁２５を開ける。   On the other hand, when it is determined that there is no leakage between the outer chamber 31a and the inner chamber 31b, the presence or absence of leakage between the inner chamber 31b and the outside is inspected. In this case, first, the switching valve 23b is closed, the gate valve 23a and the switching valve 21b are opened, and the trace gas is supplied from the helium gas cylinder into the inner chamber 31b through the trace gas sealing passage 16b. Next, the switching valve 21b and the gate valve 23a are closed. Then, the switching valve 25 is opened.

これによって、内側室３１ｂと外部とを仕切る壁部にガス漏れを生じさせる欠陥等がある場合には、内側室３１ｂ内のトレースガスは、その欠陥部分を通過して内側室３１ｂの外部に出て行く。また、ガス漏れを生じさすような欠陥がない場合は、トレースガスは内側室３１ｂ内に充填された状態を維持する。これによって、接続管１２ｃを介してチャンバー１１と検査器２４とが連通し、チャンバー１１から流れてくるガス中のトレースガスを検査器２４が検出する。これによって、内側室３１ｂと外部とを仕切る壁部にガス漏れを生じさせるような欠陥があるか否かの検査が行われる。   As a result, when there is a defect or the like that causes gas leakage in the wall portion that separates the inner chamber 31b from the outside, the trace gas in the inner chamber 31b passes through the defective portion and exits to the outside of the inner chamber 31b. Go. In addition, when there is no defect that causes gas leakage, the trace gas is maintained in the inner chamber 31b. As a result, the chamber 11 and the inspection device 24 communicate with each other via the connection pipe 12c, and the inspection device 24 detects the trace gas in the gas flowing from the chamber 11. As a result, it is inspected whether or not there is a defect that causes gas leakage in the wall portion that partitions the inner chamber 31b from the outside.

また、この際、外側室３１ａと外部との間の漏れの有無の検査も同時に行うことができる。すなわち、外側室３１ａと外部との間に漏れが生じていれば、外側室３１ａと内側室３１ｂとの間の漏れを検査した際に、外側室３１ａからチャンバー１１内にトレースガスが漏れている。したがって、この外側室３１ａから漏れたトレースガスも検査器２４によって検出される。   In addition, at this time, it is possible to simultaneously check whether there is a leak between the outer chamber 31a and the outside. That is, if a leak occurs between the outer chamber 31a and the outside, the trace gas leaks from the outer chamber 31a into the chamber 11 when the leak between the outer chamber 31a and the inner chamber 31b is inspected. . Therefore, the trace gas leaking from the outer chamber 31a is also detected by the inspection device 24.

そして、ワーク３０の漏れ検査が終了すると、前述した方法で検査済みのワーク３０をチャンバー１１から取り出し、次に検査する他のワーク３０をチャンバー１１に設置する。そして、前述した漏れ検査を順次行う。この場合、漏れ検査装置１０内には、トレースガスは殆ど残留していないため、繰り返し複数のワーク３０の漏れ検査を行っても精度のよい検査が行える。   When the leak inspection of the workpiece 30 is completed, the workpiece 30 that has been inspected by the above-described method is taken out from the chamber 11, and another workpiece 30 to be inspected next is placed in the chamber 11. Then, the above-described leakage inspection is sequentially performed. In this case, since the trace gas hardly remains in the leak inspection apparatus 10, it is possible to perform a high-precision inspection even if a plurality of workpieces 30 are repeatedly inspected for leaks.

以上のように、本実施形態による漏れ検査装置１０では、大気導入路１３ｂ、真空引き路１４ｂ、減圧排気路１５ｂおよびトレースガス封入路１６ｂが接続される主配管２２と接続管１２ｂとの間に仕切り弁２３ａを設けている。そして、外側室３１ａから内側室３１ｂに流れてくるガス中のトレースガスを検査器２４が検出する際には、仕切り弁２３ａを閉じて、内側室３１ｂから接続管１２ｂおよびガス漏れ検査路２２ａを介して検査器２４に通じる通路から主配管２２を遮断する。このため、主配管２２やトレースガス封入路１６ｂ等にトレースガスが残留していても検査器２４が検出する検出値には影響がないため、精度のよい漏れ検査を行える。   As described above, in the leakage inspection apparatus 10 according to the present embodiment, the connection between the main pipe 22 and the connection pipe 12b to which the atmosphere introduction path 13b, the vacuum suction path 14b, the decompression exhaust path 15b, and the trace gas sealing path 16b are connected. A gate valve 23a is provided. When the inspection device 24 detects the trace gas in the gas flowing from the outer chamber 31a to the inner chamber 31b, the gate valve 23a is closed, and the connection pipe 12b and the gas leakage inspection path 22a are connected from the inner chamber 31b. The main pipe 22 is cut off from the passage leading to the inspection device 24 via For this reason, even if trace gas remains in the main pipe 22, the trace gas sealing passage 16b, or the like, the detection value detected by the inspector 24 is not affected, and therefore, a highly accurate leak inspection can be performed.

また、本発明に係る多経路ワークの漏れ検査装置は、前述した実施形態に限定するものでなく、適宜変更実施が可能である。例えば、前述した実施形態では、接続管１２ｂと主配管２２との間に仕切り弁２３ａを設け、接続管１２ｂとガス漏れ検査路２２ａとの間に切り換え弁２３ｂを設けているが、接続管１２ｂが主配管２２およびガス漏れ検査路２２ａとに接続される部分に三方弁を設けることもできる。これによると、切り換え弁２３ｂが不要になる。   In addition, the multipath work leakage inspection apparatus according to the present invention is not limited to the above-described embodiment, and can be appropriately modified. For example, in the above-described embodiment, the gate valve 23a is provided between the connection pipe 12b and the main pipe 22, and the switching valve 23b is provided between the connection pipe 12b and the gas leakage inspection path 22a. However, it is also possible to provide a three-way valve at a portion connected to the main pipe 22 and the gas leakage inspection path 22a. According to this, the switching valve 23b becomes unnecessary.

また、前述した実施形態では、接続管１２ａを外側室３１ａに接続し、接続管１２ｂを内側室３１ｂに接続しているが、接続管１２ａを内側室３１ｂに接続し、接続管１２ｂを外側室３１ａに接続することもできる。これによっても同様の漏れ検査を行うことができる。さらに、前述した実施形態では、ワーク３０を、外側室３１ａと、外側室３１ａの内部に設けられた内側室３１ｂとで構成しているが、このワークとしては、箱状の被検査室を隣接させて形成したものでもよい。例えば、ラジエター、オイルクーラー、濾過器などのように複数の隔離された室を備えたものであればよい。   In the embodiment described above, the connecting pipe 12a is connected to the outer chamber 31a and the connecting pipe 12b is connected to the inner chamber 31b. However, the connecting pipe 12a is connected to the inner chamber 31b, and the connecting pipe 12b is connected to the outer chamber 31b. It can also be connected to 31a. This also makes it possible to perform a similar leak test. Further, in the above-described embodiment, the workpiece 30 is constituted by the outer chamber 31a and the inner chamber 31b provided inside the outer chamber 31a. As the workpiece, a box-shaped inspection chamber is adjacent. It may be formed. For example, what is necessary is just to be provided with several isolated chambers, such as a radiator, an oil cooler, a filter.

また、ワークが備える被検査室も２個に限らず、それ以上の複数個であってもよい。その場合、被検査室の数に応じて、接続管や仕切り弁等を設ける。例えば、２個の被検査室に対して１組の接続管や仕切り弁等をそれぞれ設ける。また、トレースガスとしては、ヘリウムガスに代えて、水素ガス、硫化水素ガス、二酸化炭素ガス、窒素ガス、アルゴンガス、一酸化炭素ガス、メタンガス等を用いることができる。   Further, the number of rooms to be inspected provided for the workpiece is not limited to two, but may be more than that. In that case, connecting pipes, gate valves and the like are provided according to the number of rooms to be inspected. For example, a set of connecting pipes, gate valves and the like are provided for each of two rooms to be inspected. As the trace gas, hydrogen gas, hydrogen sulfide gas, carbon dioxide gas, nitrogen gas, argon gas, carbon monoxide gas, methane gas, or the like can be used instead of helium gas.

本発明の一実施形態に係る漏れ検査装置の概略配管図である。It is a schematic piping diagram of the leak inspection apparatus concerning one embodiment of the present invention. 従来の漏れ検査装置の概略配管図である。It is a schematic piping diagram of the conventional leak inspection apparatus.

符号の説明Explanation of symbols

１０…漏れ検査装置、１１…チャンバー、１２ａ，１２ｂ，１２ｃ…接続管、１５ａ，１５ｂ…減圧排気路、１６ａ，１６ｂ…トレースガス封入路、２２…主配管、２２ａ…ガス漏れ検査路、２３ａ…仕切り弁、２４…検査器、３０…ワーク、３１ａ…外側室、３１ｂ…内側室、３２ｂ…突出開口部。
DESCRIPTION OF SYMBOLS 10 ... Leak inspection apparatus, 11 ... Chamber, 12a, 12b, 12c ... Connection pipe, 15a, 15b ... Depressurization exhaust path, 16a, 16b ... Trace gas enclosure path, 22 ... Main piping, 22a ... Gas leak inspection path, 23a ... Gate valve, 24 ... inspector, 30 ... workpiece, 31a ... outer chamber, 31b ... inner chamber, 32b ... projecting opening.

Claims (2)

互いに隔離された複数の被検査室を備えたワークを、密閉状態で格納できる密閉チャンバーと、
一端部が、前記密閉チャンバーの壁部を貫通して前記密閉チャンバー内に設置されるワークの対応する被検査室に接続されるとともに、他端部側が、それぞれ対応するトレースガス供給管およびトレースガス排出管に接続された複数の接続管と、
前記密閉チャンバーに接続され前記ワークから前記密閉チャンバー内に漏れるトレースガスを検出する外部漏れ検査器と、
前記複数の接続管のうちの所定の接続管の他端部側にガス漏れ検出路を介して接続され、前記所定の接続管の一端部が接続された被検査室に他の被検査室から漏れてくるトレースガスを検出する内部漏れ検査器と、
前記所定の接続管の他端部側に設けられ、前記トレースガス供給管および前記トレースガス排出管を、前記所定の接続管の一端部側部分および前記ガス漏れ検出路に対して開閉可能に仕切る仕切り弁と
を備えたことを特徴とする多経路ワークの漏れ検査装置。 A sealed chamber capable of storing a workpiece having a plurality of inspection rooms isolated from each other in a sealed state; and
One end portion is connected to a corresponding chamber to be inspected of a work installed in the sealed chamber through the wall portion of the sealed chamber, and the other end portion is connected to the corresponding trace gas supply pipe and trace gas, respectively. A plurality of connecting pipes connected to the discharge pipe;
An external leak tester for detecting trace gas connected to the sealed chamber and leaking from the workpiece into the sealed chamber;
Connected to the other end side of the predetermined connecting pipe among the plurality of connecting pipes via a gas leak detection path, and from the other test chamber to the test chamber to which one end of the predetermined connecting pipe is connected An internal leak tester that detects leaking trace gas,
Provided on the other end side of the predetermined connection pipe, and partitions the trace gas supply pipe and the trace gas discharge pipe with respect to one end side portion of the predetermined connection pipe and the gas leak detection path so as to be opened and closed A multipath work leak inspection apparatus comprising a gate valve. 前記ワークが、外部を構成する外部被検査室と、前記外部被検査室内に設けられ前記外部被検査室の外部に連通する開口部を備えた内部被検査室とで構成され、前記所定の接続管の一端部を、前記内部被検査室の開口部に接続するようにした請求項１に記載の多経路ワークの漏れ検査装置。
The workpiece is composed of an external inspection chamber constituting the outside and an internal inspection chamber provided in the external inspection chamber and having an opening communicating with the outside of the external inspection chamber, and the predetermined connection The leak inspection apparatus for a multi-path work according to claim 1, wherein one end of the pipe is connected to an opening of the internal inspection chamber.
JP2004086996A 2004-03-24 2004-03-24 Multipath workpiece leak inspection system Expired - Fee Related JP3790533B2 (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011506931A (en) * 2007-12-06 2011-03-03 エイピーヴィー ノース アメリカ インコーポレイテッド Heat exchanger leak inspection method and apparatus
KR101182821B1 (en) * 2010-08-05 2012-09-13 대우기공 주식회사 Leak testing apparatus and method
KR101182818B1 (en) * 2010-06-07 2012-09-13 대우기공 주식회사 Leak testing apparatus and method
JP2013134098A (en) * 2011-12-26 2013-07-08 Fukuda:Kk Leak test chamber and leak test device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011506931A (en) * 2007-12-06 2011-03-03 エイピーヴィー ノース アメリカ インコーポレイテッド Heat exchanger leak inspection method and apparatus
KR101182818B1 (en) * 2010-06-07 2012-09-13 대우기공 주식회사 Leak testing apparatus and method
KR101182821B1 (en) * 2010-08-05 2012-09-13 대우기공 주식회사 Leak testing apparatus and method
JP2013134098A (en) * 2011-12-26 2013-07-08 Fukuda:Kk Leak test chamber and leak test device

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