JP2007271558A - Leakage testing apparatus - Google Patents

Leakage testing apparatus Download PDF

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JP2007271558A
JP2007271558A JP2006100288A JP2006100288A JP2007271558A JP 2007271558 A JP2007271558 A JP 2007271558A JP 2006100288 A JP2006100288 A JP 2006100288A JP 2006100288 A JP2006100288 A JP 2006100288A JP 2007271558 A JP2007271558 A JP 2007271558A
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chamber
internal space
pressure
gas
seal member
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Teruhiko Kameoka
輝彦 亀岡
Hiroshi Uejima
啓史 上嶋
Katsuki Itagaki
勝樹 板垣
Shinjiro Shimizu
伸二郎 清水
Hiroaki Sasaki
宏明 佐々木
Yasutaka Kamiya
康孝 神谷
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Denso Corp
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Denso Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a leakage testing apparatus capable of testing occurring of leakage with high accuracy. <P>SOLUTION: The leakage testing apparatus comprises: a first chamber 4 in which helium exists; a second chamber 5 having a space between itself and the first chamber 4 in which a member to be tested S is disposed; a first sealing member 6 for sealing the first chamber side; a second sealing member 7 for sealing the second chamber side; an exhaust pump for reducing the pressure in the second chamber 5 and producing a pressure difference between the first chamber 4 and the second chamber 5; a leakage detecting means 15 for analyzing a gas in the second chamber 5, detecting the helium and judging as to whether or not the leakage occurs; and an intermediate chamber 11 which is disposed between the first and second sealing members 6, 7. In the apparatus for detecting the leakage occurring through the member to be tested from the second chamber to the first chamber, a seal member which is used for fixing the member to be tested, is disposed doubly so as to form a space (intermediate space) therebetween in order to prevent the leakage out of the seal member. Since the intermediate space intervenes which includes no trace gas inside, the leakage of the trace gas through the first and second sealing members can be prevented. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は気密を確保する必要がある部材について気密性を検査する漏れ検査装置に関する。   The present invention relates to a leak inspection apparatus for inspecting airtightness of a member that needs to ensure airtightness.

近年、リチウム二次電池あるいはニッケル水素二次電池などの高エネルギー密度を実現した二次電池が携帯機器用の電源として広く普及している。また、これら二次電池は自動車用の駆動電源としても注目され既に実用化されている。このような電池は電池性能を長期に亘り維持する観点から密閉型の構造が通常採られている。   In recent years, secondary batteries that achieve high energy density, such as lithium secondary batteries or nickel hydride secondary batteries, are widely used as power sources for portable devices. Further, these secondary batteries have been noticed as driving power sources for automobiles and have already been put into practical use. Such a battery usually has a sealed structure from the viewpoint of maintaining the battery performance over a long period of time.

ところが、電池端子部には正極と負極とがあり、密閉構造をとりながら端子間を絶縁する必要がある。   However, the battery terminal portion has a positive electrode and a negative electrode, and it is necessary to insulate the terminals while taking a sealed structure.

このように密閉構造を維持しながら絶縁を確保する方法として、従来の例では、容器と端子との間を絶縁ガスケットを介して構成することで気密性と絶縁性を確保する構造が示されている（特許文献１）。   As a method of ensuring insulation while maintaining a sealed structure in this way, in the conventional example, a structure that ensures airtightness and insulation by configuring an insulating gasket between the container and the terminal is shown. (Patent Document 1).

また、気密性を検査する方法としては、内部に所定圧力のトレースガスが注入される中空被試験品と、それを収容する真空室と、該真空室を所定の真空圧まで掃引する真空室排気ポンプと、前記真空室中のトレースガスを検出するガスセンサなどを備え、中空試験品から漏れ出るトレースガスを検出することで気密性を判断する漏れ検査装置が開示されている（特許文献２）。
特許３５５２４５４号 特許２８１７４９８号 In addition, as a method for inspecting the airtightness, there are a hollow DUT into which a trace gas of a predetermined pressure is injected, a vacuum chamber for housing it, and a vacuum chamber exhaust for sweeping the vacuum chamber to a predetermined vacuum pressure. There has been disclosed a leak inspection apparatus that includes a pump and a gas sensor that detects trace gas in the vacuum chamber, and judges airtightness by detecting trace gas leaking from a hollow test product (Patent Document 2).
Japanese Patent No. 3552454 Japanese Patent No. 2817498

しかしながら、二次電池に要求される気密性は非常に高度であり、特許文献２に記載された漏れ検査装置を使用して漏れを検出することは困難であった。すなわち、気密性を検査する被試験部材を漏れ検査装置に固定する場合に、エラストマーなどの弾性体をシール部材として採用しているが、高度な気密性を要求される製品を検査する場合、シール材を透過するトレースガスの方が正常状態の被試験部材を透過するトレースガスの量よりも多くなり、被試験品の漏れ検査が阻害されてしまう問題があった。   However, the hermeticity required for the secondary battery is very high, and it has been difficult to detect a leak using the leak inspection apparatus described in Patent Document 2. That is, when fixing a member to be tested for airtightness to a leak inspection device, an elastic body such as an elastomer is employed as a seal member, but when inspecting a product that requires high airtightness, There is a problem that the amount of trace gas that permeates the material is larger than the amount of trace gas that permeates the member under test in a normal state, which hinders leakage inspection of the device under test.

また、シール部材に起因するシール不良がある場合や、被試験部材に大きな漏れがある場合に、トレースガスを検出する検出器は大量のトレースガスに汚染され、その後、検出器から完全にトレースガスを取り除くまでの間は使用できなくなるという問題があった。   Also, when there is a seal failure due to the seal member or when there is a large leak in the member under test, the detector that detects the trace gas is contaminated with a large amount of trace gas, and then the trace gas is completely removed from the detector. There was a problem that it could not be used until it was removed.

本発明は上記実情に鑑み完成されたものであり、高い精度で漏れの発生を検査できる漏れ検査装置を提供することを解決すべき課題とする。   The present invention has been completed in view of the above circumstances, and it is an object to be solved to provide a leak inspection apparatus capable of inspecting the occurrence of leaks with high accuracy.

上記課題を解決する本発明の漏れ検査装置は、内部空間に所定圧のトレースガスが存在する第１室と、
該第１室に隣接し、該第１室の内部空間との間に被試験部材を隔壁として配置可能な内部空間をもつ第２室と、
該被試験部材及び該第１室の内部空間を区画する内壁及び該被試験部材の間に介装され気密を保つ弾性体である第１シール部材と、
該被試験部材該第２室の内部空間を区画する内壁及び該被試験部材の間に介装され気密を保つ弾性体である第２シール部材と、
ガスを排気することで該第２室の内部空間内を減圧し該第１室との間で圧力差を生じさせる第２室排気ポンプと、
該第２室内のガスを分析して該トレースガスを検出し、該トレースガスの量が所定値以上である場合に漏れが発生していると判断する漏れ検出手段と、
該第１シール部材及び該第２シール部材の間に配設され、実質的に該トレースガスを含まない内部空間を持つ中間室と、
を有することを特徴とする。 The leak inspection apparatus of the present invention that solves the above problems includes a first chamber in which a trace gas of a predetermined pressure exists in the internal space,
A second chamber having an internal space adjacent to the first chamber and in which a member to be tested can be disposed as a partition wall between the internal space of the first chamber;
A first seal member that is interposed between the member to be tested and an inner space of the first chamber and an elastic body that is interposed between the member to be tested and is airtight;
A second seal member that is an elastic body that is interposed between the inner wall defining the internal space of the second chamber and the member to be tested and is kept airtight;
A second chamber exhaust pump that depressurizes the internal space of the second chamber by exhausting gas and creates a pressure difference with the first chamber;
A leak detection means for analyzing the gas in the second chamber to detect the trace gas and determining that a leak has occurred when the amount of the trace gas is equal to or greater than a predetermined value;
An intermediate chamber disposed between the first seal member and the second seal member and having an internal space substantially free of the trace gas;
It is characterized by having.

第２室から第１室へ被試験部材を通じて発生する漏れを検出する装置において、被試験部材を固定するために用いるシール部材からの漏れを防止するために、間に空間（中間室）を設けた状態でシール部材を二重に配設した。内部空間にトレースガスを含まない中間室を介在させることで第１及び第２シール部材を通じたトレースガスのもれを防止することができる。   In the apparatus for detecting leakage generated from the second chamber to the first chamber through the member under test, a space (intermediate chamber) is provided between the second chamber and the chamber to prevent leakage from the seal member used to fix the member under test. In this state, the seal member was doubled. By interposing an intermediate chamber that does not contain trace gas in the internal space, it is possible to prevent leakage of trace gas through the first and second seal members.

特に、中間室の内部空間の圧力を第１室の内部空間の圧力以上とすることで、第１室から中間室へのトレースガスが流れることを確実に防止できる。同様に、中間室の内部空間の圧力を第２室の内部空間の圧力以下とすることで、中間室から第２室へのトレースガスが流れることを確実に防止できる。   In particular, by setting the pressure in the internal space of the intermediate chamber to be equal to or higher than the pressure in the internal space of the first chamber, it is possible to reliably prevent the trace gas from flowing from the first chamber to the intermediate chamber. Similarly, by setting the pressure in the internal space of the intermediate chamber to be equal to or lower than the pressure in the internal space of the second chamber, it is possible to reliably prevent the trace gas from flowing from the intermediate chamber to the second chamber.

そして、前記第１シール部材と前記第２シール部材とはトレースガスがシール部材中を通じて漏れることを確実に防止するために離隔されていることが望ましい。   Preferably, the first seal member and the second seal member are separated from each other in order to reliably prevent the trace gas from leaking through the seal member.

更に、前記中間室の内部空間には、外部から前記トレースガスを含まない洗浄ガスを導入する手段と、外部へ該洗浄ガスを排出する手段とが接続されていることが望ましい。たとえ、中間室の内部空間にトレースガスが侵入しても洗浄ガスにより洗浄を行うことで第２室への影響をなくすことができる。   Further, it is desirable that a means for introducing a cleaning gas not containing the trace gas from the outside and a means for discharging the cleaning gas to the outside are connected to the internal space of the intermediate chamber. Even if the trace gas enters the internal space of the intermediate chamber, the influence on the second chamber can be eliminated by cleaning with the cleaning gas.

また、前記漏れ検出手段は、前記第２室との間に設けられた開閉弁と、検査開始時に該開閉弁を瞬間的に開き、測定した前記トレースガスの量が前記所定値未満の場合に該開閉弁を継続的に開く開閉弁制御手段と、を備えることができる。何らかの原因（例えば、被試験部材の破壊やシール部材の破壊・ずれなど）により、大量のトレースガスが第１室から第２室に漏れ出した場合に、漏れ検出手段が大量のトレースガスで汚染されないようにするためである。   In addition, the leakage detection means includes an on-off valve provided between the second chamber and the on-off valve at the start of inspection, and the measured amount of the trace gas is less than the predetermined value. And an opening / closing valve control means for continuously opening the opening / closing valve. When a large amount of trace gas leaks from the first chamber to the second chamber due to some cause (for example, destruction of the member under test or destruction / displacement of the seal member), the leak detection means is contaminated with a large amount of trace gas. This is to prevent it from being done.

つまり、漏れ検出手段に至る流路に開閉弁を設け、最初は僅かなガスだけ通過するように瞬間的に開閉弁を開いて第２室の内部空間内のガスを分析し、大量のトレースガスが漏れていないことを確認した後に開閉弁を開けて漏れ検出手段にガスを導入するものである。 同様の目的を実現するために、前記漏れ検出手段として、前記第２室と前記漏れ検出手段との間に設けられた開閉弁と、該開閉弁の開時間をＰＷＭ制御する手段であって、測定した前記トレースガスの量が前記所定値以上になるまで該ＰＷＭ制御におけるデューティ比を検査開始時から漸増させる開閉弁制御手段と、を備えるものを採用することもできる。   In other words, an on-off valve is provided in the flow path leading to the leak detection means, and at first, the on-off valve is opened momentarily so that only a small amount of gas passes through to analyze the gas in the internal space of the second chamber. After confirming that there is no leak, the on-off valve is opened to introduce gas into the leak detection means. In order to achieve the same purpose, as the leak detection means, an on-off valve provided between the second chamber and the leak detection means, and means for PWM controlling the open time of the on-off valve, It is also possible to employ one provided with on-off valve control means for gradually increasing the duty ratio in the PWM control from the start of the inspection until the measured amount of the trace gas becomes equal to or greater than the predetermined value.

そして、前記中間室の内部空間から排気を行う中間室排気ポンプと、該中間室排気ポンプから排気される排気ガスを分析して前記トレースガスを検出し、該トレースガスの量が所定値以上である場合に前記第一シール部材に漏れが発生していると判断する中間室漏れ検出手段と、を有することが望ましい。中間室の内部空間におけるトレースガスの量を測定することで、シール部材に発生した不具合により第１室と中間室とが連通した場合に、速やかに検知することができる。この中間室漏れ検出手段は前記漏れ検出手段が兼ねることができる。   Then, an intermediate chamber exhaust pump that exhausts air from the internal space of the intermediate chamber, and the exhaust gas exhausted from the intermediate chamber exhaust pump is analyzed to detect the trace gas, and the amount of the trace gas is equal to or greater than a predetermined value. In some cases, it is desirable to have an intermediate chamber leak detection means for determining that a leak has occurred in the first seal member. By measuring the amount of the trace gas in the internal space of the intermediate chamber, it is possible to quickly detect when the first chamber and the intermediate chamber communicate with each other due to a problem occurring in the seal member. This intermediate chamber leak detection means can also serve as the leak detection means.

更に、前記中間室の内部空間から排気を行う中間室排気ポンプを備えている場合、第１シール部材に不具合が発生して大量のガスが中間室に流れ込んだことを圧力の値により検知する目的で、該中間室内の圧力を測定する中間室圧力検出手段と前記第２室内の圧力を測定する第２室圧力検出手段とそれぞれ検出した圧力が所定値よりも高い場合に漏れが発生していると判断する圧力判断手段と、を有することができる。   Further, when an intermediate chamber exhaust pump for exhausting air from the internal space of the intermediate chamber is provided, the purpose is to detect from a pressure value that a problem has occurred in the first seal member and a large amount of gas has flowed into the intermediate chamber. Thus, a leak has occurred when the detected pressure is higher than a predetermined value by the intermediate chamber pressure detecting means for measuring the pressure in the intermediate chamber and the second chamber pressure detecting means for measuring the pressure in the second chamber. Pressure judging means for judging that.

本発明の漏れ検査装置は上記構成を有することで以下の作用効果を発揮する。すなわち、第１シール部材と第２シール部材との２つのシール部材を設け、その間に中間室を設けることでシール部材を通じて発生する漏れを効果的に抑制できる。   The leak inspection apparatus of the present invention exhibits the following operational effects by having the above configuration. That is, by providing two seal members, the first seal member and the second seal member, and providing an intermediate chamber therebetween, leakage generated through the seal member can be effectively suppressed.

本発明の漏れ検査装置について以下実施形態に基づき詳細に説明を行う。   The leak inspection apparatus of the present invention will be described in detail based on the following embodiments.

（構成）
本実施形態の漏れ検査装置は第１室と第２室と第１シール部材と第２シール部材と第２室排気ポンプと漏れ検出手段と中間室とをもつ。本実施形態の漏れ検査装置では被試験部材の一面側に第１室が配置され、他面側に第２室が配置され第１室の内部空間に存在するトレースガスが第１室から第２室に通過するかどうかを検出することで被試験部材の気密性を検査する装置である。被試験部材としては気密性が要求される部材であればどのような部材にでも適用することができる。本実施例ではリチウム二次電池用ケースの蓋体の気密性を検査している。トレースガスとしては特に限定しないが、一般的な自然環境下では存在量が極めて少なく、検出が容易で、僅かな隙間からも漏れやすいガスであるヘリウムを採用することが望ましい。 (Constitution)
The leak inspection apparatus of the present embodiment includes a first chamber, a second chamber, a first seal member, a second seal member, a second chamber exhaust pump, a leak detection means, and an intermediate chamber. In the leakage inspection apparatus of this embodiment, the first chamber is disposed on one surface side of the member to be tested, the second chamber is disposed on the other surface side, and the trace gas existing in the internal space of the first chamber is second to second. It is an apparatus for inspecting the airtightness of a member under test by detecting whether or not it passes through a chamber. The member to be tested can be applied to any member that requires airtightness. In this embodiment, the airtightness of the lid of the case for the lithium secondary battery is inspected. Although it does not specifically limit as trace gas, It is desirable to employ | adopt helium which is gas which is very small in general natural environment, is easy to detect, and leaks easily from a slight gap.

第１室と第２室とは被試験部材が配置されていない状態で内部空間が連通するような構成をもつ。内部空間が連通する部分に被試験部材が配置されることで第１室と第２室との間を離隔する。   The first chamber and the second chamber have a configuration in which the internal space communicates in a state where the member to be tested is not disposed. The member to be tested is arranged at a portion where the internal space communicates, thereby separating the first chamber and the second chamber.

第１シール部材は第１室の内部空間を区画する内壁及び被試験部材の間に介装され気密を保つ弾性体である。第２シール部材は第２室の内部空間を区画する内壁及び被試験部材の間に介装され気密を保つ弾性体である。第１及び第２シール部材は併せて第１室の内部空間と第２室の内部空間との間を分離する部材である。第１シール部材と第２シール部材とは離隔していることが望ましい。両者が接触していると、その接触部分からトレースガスが漏れ出す可能性があるからである。ここで、両者の間が「離隔されている」とは両者の間に中間室が存在する場合と金属などのトレースガスの透過量が問題にならない部材が介設されているような場合とを挙げることができる。   The first seal member is an elastic body that is interposed between the inner wall that defines the internal space of the first chamber and the member to be tested and is kept airtight. The second seal member is an elastic body that is interposed between the inner wall that defines the internal space of the second chamber and the member to be tested and is kept airtight. The first and second seal members are members that separate the space between the internal space of the first chamber and the internal space of the second chamber. It is desirable that the first seal member and the second seal member are separated from each other. This is because if both are in contact, the trace gas may leak from the contact portion. Here, the “separated” between the two means a case where an intermediate chamber exists between the two and a case where a member such as a metal whose trace gas permeation amount does not matter is interposed. Can be mentioned.

中間室は、第１シール部材と第２シール部材との間に設けられた空間である。中間室の内部空間はトレースガスを含まない。中間室と第１室との間は第１シール部材にて気密が保たれ、中間室と第２室との間は第２シール部材にて気密が保たれている。中間室の内部空間の圧力を制御することが望ましい。圧力の制御は内部のガスを排出する中間室排気ポンプや、外部からガスを供給する加圧手段を採用することができる。   The intermediate chamber is a space provided between the first seal member and the second seal member. The internal space of the intermediate chamber does not contain trace gas. Airtightness is maintained between the intermediate chamber and the first chamber by the first seal member, and airtightness is maintained between the intermediate chamber and the second chamber by the second seal member. It is desirable to control the pressure in the interior space of the intermediate chamber. The pressure can be controlled by using an intermediate chamber exhaust pump that discharges internal gas or a pressurizing means that supplies gas from the outside.

中間室の内部区間の圧力は第１室の内部空間の圧力以上とすることが望ましい。ガスの漏れは２つの空間の圧力差に比例するので、圧力差が無い（中間室と第１室との圧力が同じ）か圧力が反転（中間室の方が第１室よりも圧力が高い）させることで、第１室から中間室への漏れが原理的に発生しなくなる。   It is desirable that the pressure in the inner section of the intermediate chamber be equal to or higher than the pressure in the inner space of the first chamber. Since gas leakage is proportional to the pressure difference between the two spaces, there is no pressure difference (the pressure in the intermediate chamber and the first chamber is the same) or the pressure is reversed (the intermediate chamber is higher in pressure than the first chamber) ) In principle, no leakage from the first chamber to the intermediate chamber occurs.

同様の理由で中間室の内部区間の圧力は第２室の内部空間の圧力以下とすることが望ましい。ガスの漏れは２つの空間の圧力差に比例するので、圧力差が無い（中間室と第２室との圧力が同じ）か圧力が反転（中間室の方が第２室よりも圧力が低い）させることで、中間室から第１室への漏れが原理的に発生しなくなる。   For the same reason, it is desirable that the pressure in the inner section of the intermediate chamber is not more than the pressure in the inner space of the second chamber. Since gas leakage is proportional to the pressure difference between the two spaces, there is no pressure difference (the pressure in the intermediate chamber and the second chamber are the same) or the pressure is reversed (the pressure in the intermediate chamber is lower than that in the second chamber) ) In principle, no leakage from the intermediate chamber to the first chamber occurs.

また、中間室の内部空間にはトレースガスを含まない洗浄ガスにて洗浄を続けることが望ましい。そのためには洗浄ガスを導入する手段と、外部へ洗浄ガスを排出する手段とが接続されることが望ましい。洗浄ガスとしては窒素ガスや空気など通常のガスをそのまま採用したり、シリコンオイル、水などの液体を採用しても良い。   In addition, it is desirable that the internal space of the intermediate chamber is continuously cleaned with a cleaning gas that does not contain a trace gas. For this purpose, it is desirable to connect a means for introducing the cleaning gas and a means for discharging the cleaning gas to the outside. As the cleaning gas, a normal gas such as nitrogen gas or air may be employed as it is, or a liquid such as silicon oil or water may be employed.

第２室排気ポンプはガスを排気することで第２室の内部空間内を減圧し第１室との間で圧力差を生じさせる手段である。第１室との間に圧力差を生じさせることで、被試験部材に欠陥がある場合にはその欠陥を通してトレースガスが第２室の内部空間に移行する。   The second chamber exhaust pump is a means for reducing the pressure in the internal space of the second chamber by exhausting gas to generate a pressure difference with the first chamber. By creating a pressure difference between the first chamber and the member to be tested, if there is a defect, the trace gas moves to the internal space of the second chamber through the defect.

漏れ検出手段は第２室の内部空間内のガスに含まれるトレースガスを検出し、含まれる量が所定量以上である場合に漏れが発生しているもの判断する手段である。トレースガスの検出は質量分析や、分光学的手法などの一般的な方法が採用できる。第２室の内部空間内のガスを取り出す手法としては特に限定しないが、前述した第２室排気ポンプにより排気される排気ガスをそのまま分析したり、サンプリング用のポンプを独立して設けることもできる。   The leak detection means is means for detecting a trace gas contained in the gas in the internal space of the second chamber and determining whether a leak has occurred when the contained amount is a predetermined amount or more. For the detection of the trace gas, general methods such as mass spectrometry and spectroscopic techniques can be adopted. The method for extracting the gas in the internal space of the second chamber is not particularly limited, but the exhaust gas exhausted by the above-described second chamber exhaust pump can be analyzed as it is, or a sampling pump can be provided independently. .

漏れ検出手段には開閉弁と開閉弁制御手段とを設けることができる。開閉弁は第２室から漏れ検出手段にガスを導入する流路の開閉を行うことができる弁である。開閉弁制御手段はその開閉弁を制御する手段である。開閉弁制御手段が開閉弁を制御する手法を以下の(i)及び(ii)に例示して説明する。   The leak detection means can be provided with an on-off valve and an on-off valve control means. The on-off valve is a valve that can open and close the flow path for introducing gas from the second chamber to the leak detection means. The on-off valve control means is means for controlling the on-off valve. A method in which the on-off valve control means controls the on-off valve will be described with reference to the following (i) and (ii).

(i)検査開始時に開閉弁を瞬間的に開いてガス中のトレースガス量を測定した後、測定したトレースガスの量が前述した所定値未満の場合に開閉弁を更に継続的に開く方法が挙げられる。検査開始時に瞬間的に開閉弁を開くことで僅かな量のガスを漏れ検出手段に導入でき、何らかの不都合によって第２室内に大量のトレースガスが漏れだした場合であっても漏れ検出手段が高濃度のトレースガスで汚染されることがなくなる。最初の瞬間的な開弁時に測定したトレースガスの量が少ない場合には開閉弁を継続的に開弁することで通常の検査を行うことができる。   (i) There is a method of opening the on-off valve instantaneously at the start of inspection and measuring the amount of trace gas in the gas, and then further opening the on-off valve when the measured amount of trace gas is less than the predetermined value described above. Can be mentioned. By opening the on-off valve instantaneously at the start of the inspection, a small amount of gas can be introduced into the leak detection means, and even if a large amount of trace gas leaks into the second chamber due to some inconvenience, the leak detection means is high. No contamination with trace gas concentration. When the amount of trace gas measured at the first momentary valve opening is small, a normal inspection can be performed by continuously opening the on-off valve.

(ii)開閉弁の開時間をＰＷＭ制御する手段であって、測定したトレースガスの量が前述した所定値以上になるまでＰＷＭ制御におけるデューティ比を検査開始時から漸増させる方法が挙げられる。(i)で説明した方法と同様に最初は開弁時間を短くして第２室内のガスを導入する量を少なくし、漏れ検出手段により測定されたトレースガスの量が少ない場合に徐々に開弁する時間を長くして通常の検査を行う方法である。   (ii) A means for performing PWM control of the opening time of the on-off valve, and includes a method of gradually increasing the duty ratio in PWM control from the start of inspection until the measured amount of trace gas becomes equal to or greater than the predetermined value described above. Similar to the method described in (i), the valve opening time is initially shortened to reduce the amount of gas introduced into the second chamber and gradually open when the amount of trace gas measured by the leak detection means is small. This is a method of performing a normal inspection by extending the valve time.

中間室の内部空間に存在するガスについてもトレースガスの量を検査する中間室漏れ検出手段を設けることが望ましい。中間室漏れ検出手段は前述した漏れ検出手段と同様の構成を採用することができ、実際に兼用することもできる。   It is desirable to provide an intermediate chamber leak detection means for inspecting the amount of trace gas for the gas present in the internal space of the intermediate chamber. The intermediate chamber leak detection means can adopt the same configuration as the leak detection means described above, and can also be used in practice.

第２室の内部空間の圧力を測定する第２室圧力検出手段と中間室の内部空間の圧力を測定する中間室圧力検出手段とを設け、それぞれ検出した圧力が所定値よりも高い場合に大量の漏れが発生しているものと判断する圧力判断手段とを設けることが望ましい。被試験部材に大きな欠陥が存在したり、第１シール部材や第２シール部材に大きな欠陥や位置のずれなどが発生した場合には大量のガスが漏れだして圧力変動が生じるものと考えられるので圧力変動を測定することで測定条件に発生した不具合を速やかに検出できる。   A second chamber pressure detecting means for measuring the pressure in the internal space of the second chamber and an intermediate chamber pressure detecting means for measuring the pressure in the internal space of the intermediate chamber are provided, and a large amount is detected when the detected pressure is higher than a predetermined value. It is desirable to provide pressure judgment means for judging that the leakage of the gas is occurring. If there is a large defect in the member under test or if a large defect or misalignment occurs in the first seal member or the second seal member, it is considered that a large amount of gas leaks and pressure fluctuations occur. By measuring the pressure fluctuation, it is possible to quickly detect a failure occurring in the measurement condition.

（作用効果）
本実施形態の漏れ検査装置は以上の構成を有することから以下の作用効果を発揮する。すなわち、第１室と第２室との間を区画する隔壁として被試験部材を配設した上で、第１室と第２室との間に圧力差を生じさせ、被試験部材を通じて第１室から第２室に漏れ出すトレースガスの量を評価することで漏れの発生の程度を検査している。ここで、被試験部材を気密状態で固定する必要があるが、被試験部材の固定を第１シール部材及び第２シール部材にて行い、第１シール部材及び第２シール部材の間に漏れを抑制する中間室を配設していることで、シール部材を介したトレースガスの漏れは実用上問題がない程度にまで低減させることができる。 (Function and effect)
Since the leak inspection apparatus of the present embodiment has the above-described configuration, it exhibits the following operational effects. That is, after the member to be tested is disposed as a partition wall that partitions the first chamber and the second chamber, a pressure difference is generated between the first chamber and the second chamber, and the first chamber is tested through the member to be tested. The degree of leakage is inspected by evaluating the amount of trace gas that leaks from the chamber into the second chamber. Here, the member to be tested needs to be fixed in an airtight state, but the member to be tested is fixed by the first seal member and the second seal member, and leakage occurs between the first seal member and the second seal member. By providing the intermediate chamber to be suppressed, the leakage of the trace gas through the seal member can be reduced to such an extent that there is no practical problem.

特に中間室の圧力を第１室や第２室と同じ程度にまで制御することで漏れの発生を確実に低減させることができる。   In particular, the occurrence of leakage can be reliably reduced by controlling the pressure in the intermediate chamber to the same level as in the first chamber and the second chamber.

また、中間室内のガスを常に排出し続けたり、洗浄ガスを導入することで洗浄を行い続けることで、トレースガスが第１室から中間室内に一旦漏れ出したとしても、中間室から第２室へ漏れ出すおそれを大幅に低減することができ、純粋に被試験部材を通じて漏れ出したトレースガスの量のみを評価することが可能になる。   Moreover, even if the trace gas leaks from the first chamber into the intermediate chamber once by continuously discharging the gas in the intermediate chamber or by continuously performing the cleaning by introducing the cleaning gas, the second chamber is discharged from the intermediate chamber. It is possible to greatly reduce the risk of leaking into the chamber, and it is possible to evaluate only the amount of trace gas that has leaked purely through the member under test.

更に、第２室内や中間室内の圧力を常に検出し、検出した圧力が所定値以上である場合にはシール部材に不都合が発生して圧力変動が生じたものと判断することが可能になり、トレースガスが高濃度に含まれるガスを漏れ検出手段に導入して汚染する可能性をなくすことができる。   Furthermore, it is possible to always detect the pressure in the second chamber and the intermediate chamber, and when the detected pressure is equal to or higher than a predetermined value, it is possible to determine that a problem has occurred in the seal member and pressure fluctuation has occurred. It is possible to eliminate the possibility of contamination by introducing a gas containing a high concentration of trace gas into the leak detection means.

（構成）
以下、実施例を用いて本発明を説明する。本実施例の漏れ検査装置は第１室２と第２室３と中間室１１と第１シール部材６と第２シール部材７と第３シール部材８と加圧側流路１２と第２室排気流路９と中間室排気流路１０と漏れ検出手段としてのディテクタ１５とその他の構成要素とを有する。トレースガスとしてはヘリウムを採用する。 (Constitution)
Hereinafter, the present invention will be described using examples. The leak inspection apparatus of the present embodiment includes a first chamber 2, a second chamber 3, an intermediate chamber 11, a first seal member 6, a second seal member 7, a third seal member 8, a pressure side flow path 12, and a second chamber exhaust. It has a flow path 9, an intermediate chamber exhaust flow path 10, a detector 15 as leak detection means, and other components. Helium is adopted as the trace gas.

第１室２は内部空間４をもつ。第２室３は内部空間５をもつ。第１室２の内部空間４と第２室３の内部空間５との間は被試験部材としてのワークＳにて区画されている。ワークＳと第１室２の内壁との間に第１シール部材６を挟持することで第１室２の内部空間４の気密を確保している。ワークＳと第２室３の内壁との間に第２シール部材７を挟持することで第２室３の内部空間５の気密を確保している。   The first chamber 2 has an internal space 4. The second chamber 3 has an internal space 5. A space between the internal space 4 of the first chamber 2 and the internal space 5 of the second chamber 3 is partitioned by a work S as a member to be tested. The first seal member 6 is sandwiched between the workpiece S and the inner wall of the first chamber 2 to ensure the airtightness of the internal space 4 of the first chamber 2. The second seal member 7 is sandwiched between the workpiece S and the inner wall of the second chamber 3 to ensure the airtightness of the internal space 5 of the second chamber 3.

第１シール部材６と第２シール部材７との間は離隔されており、その間に中間室１１が配置されている。中間室１１は第１室２及び第２室３のそれぞれの接続部分にて内側に向けてフランジ状に形成された隔壁２１及び３１と第３シール部材８と第１シール部材６と第２シール部材７とワークＳとを組み合わせることで気密を確保している。中間室１１はワークＳの全周を囲むように構成される。   The first seal member 6 and the second seal member 7 are separated from each other, and an intermediate chamber 11 is disposed therebetween. The intermediate chamber 11 has partition walls 21 and 31 formed in a flange shape toward the inside at respective connecting portions of the first chamber 2 and the second chamber 3, the third seal member 8, the first seal member 6, and the second seal. The combination of the member 7 and the workpiece S ensures airtightness. The intermediate chamber 11 is configured to surround the entire circumference of the workpiece S.

従って、第１室２の内部空間４から第２室３の内部空間５に気体が漏れる場合にはワークＳを通過する経路と、第１シール部材６、中間室１１、そして第２シール部材７の順で通過する経路との２つの経路が存在する。   Therefore, when gas leaks from the internal space 4 of the first chamber 2 to the internal space 5 of the second chamber 3, the path through the workpiece S, the first seal member 6, the intermediate chamber 11, and the second seal member 7 are used. There are two paths: a path that passes in the order of

本実施例の漏れ検査装置について、より詳細な回路構成を図２に示す。図２には２つのワークＳに対して漏れ検査を行うことができる装置が記載されている。   FIG. 2 shows a more detailed circuit configuration of the leakage inspection apparatus of this embodiment. FIG. 2 shows an apparatus capable of performing a leakage inspection on two workpieces S.

（作用効果）
本実施例の漏れ検査装置は以上の構成を有することから以下の作用効果を発揮する。検査のシーケンスについてシーケンス図（図３）に基づいて説明を行う。まず、ワークＳを第１シール部材６及び第２シール部材７にて固定して第１室２、第２室３及び中間室１１からなるチャンバが閉じられる。その後、弁３０を開くことで粗びきポンプにより第２室３の内部空間５内が減圧される。減圧終了後、置換ポンプ接続バルブ２６を開くと共に切替弁である予備配管バルブ３３を置換ポンプ１７側に切り替えることで第１室２の内部空間４と中間室１１とについて内部が減圧される。内部空間４及び５の減圧度を真空計にてチェックし、所定の圧力にまで減圧されたことを確認する。 (Function and effect)
Since the leak inspection apparatus of the present embodiment has the above-described configuration, it exhibits the following operational effects. The inspection sequence will be described based on the sequence diagram (FIG. 3). First, the workpiece S is fixed by the first seal member 6 and the second seal member 7, and the chamber composed of the first chamber 2, the second chamber 3, and the intermediate chamber 11 is closed. Thereafter, by opening the valve 30, the inside space 5 of the second chamber 3 is depressurized by the coarse pump. After completion of the decompression, the interior of the internal space 4 and the intermediate chamber 11 of the first chamber 2 is decompressed by opening the replacement pump connection valve 26 and switching the spare piping valve 33 as a switching valve to the replacement pump 17 side. The degree of decompression of the internal spaces 4 and 5 is checked with a vacuum gauge to confirm that the pressure has been reduced to a predetermined pressure.

その後、ディテクタ１５を作動させてバックグランドのヘリウム量を測定する。次いで加圧バルブ２５を開いて内部空間４内に所定圧のヘリウムを導入する。ここで、内部空間４へのヘリウムの導入量は圧力計にてチェックする。ある程度ヘリウムを内部空間４内に導入した後に瞬間的に開閉弁としてのディテクタ接続バルブ２９を開き、内部空間５とディテクタ１５とを連通させる。ここでシール部材６及び７などの大きな問題が発生している場合は内部空間５側に大量のヘリウムガスが漏れだしているのでディテクタ１５により検出することができ、大量の漏れを判断することができる。   Thereafter, the detector 15 is operated to measure the amount of background helium. Next, the pressurization valve 25 is opened to introduce helium having a predetermined pressure into the internal space 4. Here, the amount of helium introduced into the internal space 4 is checked with a pressure gauge. After a certain amount of helium is introduced into the internal space 4, the detector connection valve 29 as an on-off valve is instantaneously opened to connect the internal space 5 and the detector 15. Here, when a major problem such as the seal members 6 and 7 occurs, a large amount of helium gas is leaking to the inner space 5 side, so that it can be detected by the detector 15 and a large amount of leakage can be determined. it can.

圧力計により所定圧に達したことが判った後に、再度、ディテクタ接続バルブ２９を開く。もし、ワークＳに不具合があり漏れが発生する場合には内部空間５に所定値以上のヘリウムが漏れ出しており、ディテクタ１５により検出することができる。これまでの間、中間室１１はずっと、減圧され続けている。従って、第１シール部材６を通過したヘリウムはそのまま排気されることになる。また、中間室１１と内部空間５との圧力差は殆どないので第２シール部材７を通過してヘリウムが第２室３の内部空間５に移行することはなく、測定精度の低下が抑制される。   After the pressure gauge shows that the predetermined pressure has been reached, the detector connection valve 29 is opened again. If the work S has a defect and a leak occurs, helium having a predetermined value or more leaks into the internal space 5 and can be detected by the detector 15. So far, the intermediate chamber 11 has been continuously decompressed. Therefore, the helium that has passed through the first seal member 6 is exhausted as it is. Further, since there is almost no pressure difference between the intermediate chamber 11 and the internal space 5, helium does not pass through the second seal member 7 and migrate to the internal space 5 of the second chamber 3, and a decrease in measurement accuracy is suppressed. The

測定が終了した後、粗びきポンプ接続バルブ３０と大気開放バルブ２８とを開く。粗びきポンプ２１により内部空間５内のガスが排出される。また、内部空間４内の加圧されたヘリウムガスが大気中に排出される。その後、大気開放バルブ２８を閉じ、置換ポンプ接続バルブ２６を開くことで、内部空間４内のヘリウムガスを確実に排出する。   After the measurement is completed, the coarse pump connection valve 30 and the air release valve 28 are opened. The gas in the internal space 5 is discharged by the coarse pump 21. Further, the pressurized helium gas in the internal space 4 is discharged into the atmosphere. Thereafter, the atmosphere release valve 28 is closed and the replacement pump connection valve 26 is opened, so that the helium gas in the internal space 4 is reliably discharged.

その後、内部空間４に大気を導入する大気導入バルブ２７と、内部空間５に大気を導入する大気開放バルブ３１とを開くことで、内部空間４及び５内を大気雰囲気に戻す。その後、チャンバを開き、内部に配置してあるワークＳを取り出す。ワークＳについて漏れが検出されない場合にはそのまま二次電池の蓋体として用いられる。   Thereafter, the atmosphere introduction valve 27 for introducing the atmosphere into the internal space 4 and the atmosphere release valve 31 for introducing the atmosphere into the internal space 5 are opened, thereby returning the interior spaces 4 and 5 to the atmosphere. Thereafter, the chamber is opened, and the workpiece S arranged inside is taken out. When no leakage is detected for the workpiece S, it is used as it is as a lid of a secondary battery.

以上説明したように、ワークＳを固定するシール部材６及び７を通過するヘリウムガスの影響はシール部材６及び７の間に設けられる中間室１１により防ぐことができる。従って、高い精度で漏れ発生の有無を評価することができる。   As described above, the influence of the helium gas passing through the seal members 6 and 7 that fix the workpiece S can be prevented by the intermediate chamber 11 provided between the seal members 6 and 7. Therefore, it is possible to evaluate the presence or absence of leakage with high accuracy.

本実施例の漏れ検査装置におけるワークの固定構造を示す断面概略図である。It is the cross-sectional schematic which shows the fixing structure of the workpiece | work in the leak test | inspection apparatus of a present Example. 実施例の漏れ検査装置の概略回路図である。It is a schematic circuit diagram of the leak test | inspection apparatus of an Example. 実施例の漏れ検査装置におけるシーケンス図である。It is a sequence diagram in the leak test | inspection apparatus of an Example.

符号の説明Explanation of symbols

２…第１室 ３…第２室 ４…内部空間（第１室） ５…内部空間（第２室） ６…第１シール部材 ７…第２シール部材 ８…第３シール部材 ９…第２室排気流路 １０…中間室排気流路 １１…中間室 １２…加圧流路 １５…ディテクタ     DESCRIPTION OF SYMBOLS 2 ... 1st chamber 3 ... 2nd chamber 4 ... Internal space (1st chamber) 5 ... Internal space (2nd chamber) 6 ... 1st seal member 7 ... 2nd seal member 8 ... 3rd seal member 9 ... 2nd Chamber exhaust passage 10 ... Intermediate chamber exhaust passage 11 ... Intermediate chamber 12 ... Pressure passage 15 ... Detector

Claims (9)

内部空間に所定圧のトレースガスが存在する第１室と、
該第１室に隣接し、該第１室の内部空間との間に被試験部材を隔壁として配置可能な内部空間をもつ第２室と、
該第１室の内部空間を区画する内壁及び該被試験部材の間に介装され気密を保つ弾性体である第１シール部材と、
該第２室の内部空間を区画する内壁及び該被試験部材の間に介装され気密を保つ弾性体である第２シール部材と、
ガスを排気することで該第２室の内部空間内を減圧し該第１室との間で圧力差を生じさせる第２室排気ポンプと、
該第２室内のガスを分析して該トレースガスを検出し、該トレースガスの量が所定値以上である場合に漏れが発生していると判断する漏れ検出手段と、
該第１シール部材及び該第２シール部材の間に配設され、実質的に該トレースガスを含まない内部空間を持つ中間室と、
を有することを特徴とする漏れ検査装置。 A first chamber in which a trace gas of a predetermined pressure exists in the internal space;
A second chamber having an internal space adjacent to the first chamber and in which a member to be tested can be disposed as a partition wall between the internal space of the first chamber;
A first seal member that is an elastic body that is interposed between the inner wall that defines the internal space of the first chamber and the member to be tested and is airtight;
A second seal member that is an elastic body that is interposed between the inner wall that defines the internal space of the second chamber and the member to be tested and is airtight;
A second chamber exhaust pump that depressurizes the internal space of the second chamber by exhausting gas and creates a pressure difference with the first chamber;
A leak detection means for analyzing the gas in the second chamber to detect the trace gas and determining that a leak has occurred when the amount of the trace gas is equal to or greater than a predetermined value;
An intermediate chamber disposed between the first seal member and the second seal member and having an internal space substantially free of the trace gas;
A leak inspection apparatus characterized by comprising: 前記中間室の内部空間の圧力は前記第１室の内部空間の圧力以上又は前記第２室の内部空間の圧力以下である請求項１に記載の漏れ検査装置。   The leak inspection apparatus according to claim 1, wherein the pressure in the internal space of the intermediate chamber is equal to or higher than the pressure of the internal space of the first chamber or equal to or lower than the pressure of the internal space of the second chamber. 前記第１シール部材と前記第２シール部材とは離隔している請求項１又は２に記載の漏れ検査装置。   The leak inspection apparatus according to claim 1 or 2, wherein the first seal member and the second seal member are separated from each other. 前記中間室の内部空間には、外部から前記トレースガスを含まない洗浄ガスを導入する手段と、外部へ該洗浄ガスを排出する手段とが接続されている請求項１〜３のいずれかに記載の漏れ検査装置。   The means for introducing the cleaning gas not containing the trace gas from the outside and the means for discharging the cleaning gas to the outside are connected to the internal space of the intermediate chamber. Leak inspection device. 前記漏れ検出手段は、
前記第２室との間に設けられた開閉弁と、
検査開始時に該開閉弁を瞬間的に開き、測定した前記トレースガスの量が前記所定値未満の場合に該開閉弁を継続的に開く開閉弁制御手段と、
を備える請求項１〜４のいずれかに記載の漏れ検査装置。 The leak detection means includes
An on-off valve provided between the second chamber;
An on-off valve control means for opening the on-off valve instantaneously at the start of inspection and continuously opening the on-off valve when the measured amount of the trace gas is less than the predetermined value;
The leak inspection apparatus according to any one of claims 1 to 4. 前記漏れ検出手段は、
前記第２室と前記漏れ検出手段との間に設けられた開閉弁と、
該開閉弁の開時間をＰＷＭ制御する手段であって、測定した前記トレースガスの量が前記所定値以上になるまで該ＰＷＭ制御におけるデューティ比を検査開始時から漸増させる開閉弁制御手段と、
を備える請求項１〜４のいずれかに記載の漏れ検査装置。 The leak detection means includes
An on-off valve provided between the second chamber and the leak detection means;
A means for PWM controlling the opening time of the on-off valve, the on-off valve control means for gradually increasing the duty ratio in the PWM control from the start of the inspection until the measured amount of the trace gas becomes equal to or greater than the predetermined value;
The leak inspection apparatus according to any one of claims 1 to 4. 前記中間室の内部空間から排気を行う中間室排気ポンプと、
該中間室排気ポンプから排気される排気ガスを分析して前記トレースガスを検出し、該トレースガスの量が所定値以上である場合に前記第一シール部材に漏れが発生していると判断する中間室漏れ検出手段と、
を有する請求項１〜６のいずれかに記載の漏れ検査装置。 An intermediate chamber exhaust pump for exhausting air from the internal space of the intermediate chamber;
The exhaust gas exhausted from the intermediate chamber exhaust pump is analyzed to detect the trace gas, and when the amount of the trace gas is equal to or greater than a predetermined value, it is determined that a leak has occurred in the first seal member. Intermediate chamber leakage detection means;
The leak inspection apparatus according to any one of claims 1 to 6. 前記中間室漏れ検出手段は前記漏れ検出手段が兼ねる請求項７に記載の漏れ検査装置。   The leak inspection apparatus according to claim 7, wherein the intermediate chamber leak detection unit also serves as the leak detection unit. 前記中間室の内部空間から排気を行う中間室排気ポンプと、
該中間室内の圧力を測定する中間室圧力検出手段と前記第２室内の圧力を測定する第２室圧力検出手段とそれぞれ検出した圧力が所定値よりも高い場合に漏れが発生していると判断する圧力判断手段と、
を有する請求項１〜８のいずれかに記載の漏れ検査装置。 An intermediate chamber exhaust pump for exhausting air from the internal space of the intermediate chamber;
The intermediate chamber pressure detecting means for measuring the pressure in the intermediate chamber, the second chamber pressure detecting means for measuring the pressure in the second chamber, and a determination that leakage has occurred when the detected pressure is higher than a predetermined value. Pressure judging means to
The leak inspection apparatus according to any one of claims 1 to 8.
JP2006100288A 2006-03-31 2006-03-31 Leakage testing apparatus Pending JP2007271558A (en)

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KR102549628B1 (en) * 2022-10-27 2023-06-30 (주)성우 Unit for inspecting cap assembly for secondary battery
KR102549629B1 (en) * 2022-10-27 2023-06-30 (주)성우 Apparatus for inspecting cap assembly for secondary battery

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