CN110187066B - Water-oxygen particle analysis and detection system and detection method thereof - Google Patents
Water-oxygen particle analysis and detection system and detection method thereof Download PDFInfo
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- CN110187066B CN110187066B CN201910544366.8A CN201910544366A CN110187066B CN 110187066 B CN110187066 B CN 110187066B CN 201910544366 A CN201910544366 A CN 201910544366A CN 110187066 B CN110187066 B CN 110187066B
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- 239000001301 oxygen Substances 0.000 title claims abstract description 90
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 90
- 239000002245 particle Substances 0.000 title claims abstract description 87
- 238000001514 detection method Methods 0.000 title claims abstract description 72
- 238000004458 analytical method Methods 0.000 title claims abstract description 41
- 238000012360 testing method Methods 0.000 claims abstract description 222
- 238000010926 purge Methods 0.000 claims description 107
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 66
- 238000012423 maintenance Methods 0.000 claims description 55
- 239000007789 gas Substances 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 4
- 239000002912 waste gas Substances 0.000 claims description 2
- 239000001307 helium Substances 0.000 description 6
- 229910052734 helium Inorganic materials 0.000 description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 6
- 238000007664 blowing Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000011076 safety test Methods 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0016—Sample conditioning by regulating a physical variable, e.g. pressure or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0022—General constructional details of gas analysers, e.g. portable test equipment using a number of analysing channels
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0062—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display
- G01N33/0063—General constructional details of gas analysers, e.g. portable test equipment concerning the measuring method or the display, e.g. intermittent measurement or digital display using a threshold to release an alarm or displaying means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0073—Control unit therefor
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
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- Combustion & Propulsion (AREA)
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- Dispersion Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The invention discloses a water-oxygen particle analysis and detection system and a detection method thereof. The invention can improve the passing rate of the whole system test, shorten the test time and reduce the test cost.
Description
Technical Field
The invention relates to the technical field of safety detection of special gas equipment, in particular to a water-oxygen particle analysis and detection system and a detection method thereof.
Background
With the continuous expansion of market demands of industries such as semiconductor integrated circuits, photovoltaics and the like at home and abroad, the consumption of special gas is also continuously increased, so that the demand on special gas equipment is also increased, and the quality requirement on the special gas equipment is also increased. In order to ensure that special gas equipment safely, stably and reliably stores and conveys special gas, safety test is required to be carried out on the equipment in the production process of the special gas equipment besides comprehensively considering the safety problem when designing a special gas conveying system.
The main safety test items of the prior special gas equipment are as follows: pressure maintaining test, helium test, moisture test, oxygen test and particle test.
The purpose of the dwell test is to ensure that the piping system has no significant leakage in order to perform helium leak detection on the piping system. Test tool: a pressure gauge.
The purpose of the helium test is to sense the trace of helium gas leaking into the system with a helium mass spectrometer and determine the size of the leak rate based on the amount of helium gas detected.
The purpose of moisture detection is mainly to avoid chemical reaction when the water content in the pipeline is too high, and the influence on the manufacturing process is caused. Test instrument: and (5) a moisture meter.
The purpose of oxygen detection is mainly to avoid chemical reaction when the oxygen content in the pipeline is too high, which affects the manufacturing process. Test instrument: oxygen analyzer
Particle detection is mainly used for detecting the particle size and the number of the microparticles in a pipeline. Too many particles in the pipe have a great influence on Wafer yield. Test instrument: particle instrument
When safety test is carried out on special gas equipment at present, a purging gas source is directly connected to the gas inlet end of a pipeline system, all valves are in an open state, after 2H is continuously purged, the gas outlet end of the pipeline system is connected with one of three test instruments (a moisture meter, an oxygen analyzer and a particle meter), so that gas is introduced into the test instruments, a power supply is turned on after 10 minutes, test is started after various parameters of the test instruments are set, test data to be tested meet standard requirements are recorded, valves of the gas inlet end and the gas outlet end are closed, positive pressure is kept in a pipeline, then the test instruments are powered off, and the test instruments are separated from the system. And then repeating the steps, and sequentially connecting the air outlet end of the pipeline system to the other two testing instruments to test.
The current test mode has low passing rate and long time requirement, cannot meet the requirement of large-scale equipment, and mainly has the following points:
1. and testing the pipeline cleanliness of the equipment and checking deviation.
The test equipment needs to be self-checked after being started every day, and the test of the special gas equipment can be performed after the test equipment reaches the qualified value, and as the cleanliness of the connecting pipeline part cannot be kept at the qualified value at any time, a certain time is required to be spent for performing the self-check of the instrument. Each time the test instrument is connected with and separated from the special gas equipment, a certain degree of pollution is caused to the connecting pipeline, and time is required for cleaning and checking.
2. The existing test process only sweeps the equipment, original water-oxygen particles in the equipment cannot be effectively and rapidly removed, and meanwhile, the existing test process is too much disturbed by human factors, for example, the test fails due to improper operation, and more time is required to reach qualified test results.
3. Systematic purge-if the purity enhancement mode is incorrect, not a large number of purges.
The system purging is a key point in the whole water, oxygen and particle detection process, special gas equipment has various pollution sources in the whole production process, purge gas is required to be connected to carry out system purging on the equipment before the test is carried out, and the equipment is difficult to quickly reach the test condition in the artificial purging process, wherein the control of the purging times, the control of the purging time and the like are included. Is the main factor of longest time consumption and low passing rate in the whole test process.
4. The current whole set of test system has low passing rate, long time requirement and high test cost.
Disclosure of Invention
In view of the above, the invention provides a water-oxygen particle analysis and detection system and a detection method thereof, which are used for solving the problems of low passing rate, long time requirement and high test cost of the existing test system.
A water oxygen particle analysis and detection system comprises
An analysis and detection cabinet;
a device under test;
an equipment rack for placing equipment to be tested;
wherein the analysis and detection cabinet comprises a cabinet body, a testing disk surface, a testing instrument, a vacuum tank and a controller, the testing disk surface, the testing instrument, the vacuum tank and the controller are all arranged in the cabinet body,
the test panel comprises an air inlet pipeline, a maintenance pipeline, a test pipeline, a purge pipeline and a vacuumizing pipeline, wherein the air inlet end of the air inlet pipeline is connected with an air source, the air outlet end of the air inlet pipeline is connected with an air inlet of equipment to be tested, the air outlet of the equipment to be tested is respectively connected with the purge pipeline, the vacuumizing pipeline and the test pipeline, the test pipeline is connected with the air inlet end of a test instrument, and the air outlet end of the test instrument is connected with an exhaust pipeline;
the air inlet end of the maintenance pipeline is connected with an air source, and the air outlet end of the maintenance pipeline is connected to the air inlet end of the test instrument.
Preferably, the vacuumizing tube is composed of a vacuum main tube and a plurality of vacuum branch tubes which are arranged on the vacuum main tube in parallel, and each vacuum branch tube is respectively connected with one device to be tested;
each vacuum branch pipe is provided with a first pressure control valve, the vacuum main pipe is sequentially provided with a second pressure control valve, a vacuum tank, a third pressure control valve and a vacuum pump, the vacuum tank is provided with a first pressure sensor for detecting the pressure in the vacuum tank body, and the first pressure control valve, the third pressure control valve and the first pressure sensor are electrically connected with the controller.
Preferably, the testing instrument comprises a moisture meter, an oxygen analyzer and a particle meter, and the air inlet end of the moisture meter, the air inlet end of the oxygen analyzer and the air inlet end of the particle meter are connected with the testing pipeline.
Preferably, the air inlet pipeline and the test pipeline are all provided with multiple paths, the number of the air inlet pipeline and the number of the test pipeline are equal to that of the devices to be tested, and each device to be tested is connected with one air inlet pipeline and one test pipeline.
Preferably, the test pipeline is composed of a test main pipe and three test branch pipes which are arranged at the air outlet end of the test main pipe in parallel, and the three test branch pipes are sequentially connected to the air inlet ends of the moisture meter, the oxygen analyzer and the particle meter;
the test main pipe is provided with a first test control valve, the test branch pipe is sequentially connected with a second test control valve and a third test control valve in series, the connection point of the second test control valve and the third test control valve is sequentially connected with a first check valve and an exhaust valve, and the first test control valve, the second test control valve, the third test control valve and the exhaust valve are all electrically connected with the controller.
Preferably, the purging pipeline is composed of a purging main pipe and a plurality of purging branch pipes which are arranged at the air inlet end of the purging main pipe in parallel, and each purging branch pipe is respectively connected with one device to be tested;
the purging main pipe is provided with a second one-way valve, each path of purging branch pipe is provided with a purging control valve, and the purging control valves are electrically connected with the controller.
Preferably, the maintenance pipe is composed of a maintenance main pipe and three maintenance branch pipes which are arranged in parallel at the air outlet end of the maintenance main pipe, and the three maintenance branch pipes are sequentially connected to the air inlet ends of the moisture meter, the oxygen analyzer and the particle meter;
the maintenance main pipe is provided with micro-leakage valves, each maintenance branch pipe is provided with a maintenance control valve, and the maintenance control valves are electrically connected with the controller.
Preferably, a second pressure sensor for detecting the pressure of the air source is arranged at the air source, and the second pressure sensor is electrically connected with the controller.
The detection method of the water-oxygen particle analysis detection system specifically comprises the following steps:
step 1: connecting an ith device to be tested to a water-oxygen particle analysis and detection system, wherein i is a positive integer;
step 2: the second pressure sensor detects the air source pressure in real time, when the air source pressure meets the set requirement, a maintenance pipeline is opened, GN2 gas is introduced into the moisture meter, the oxygen analyzer and the particle meter through the maintenance pipeline, and the moisture meter, the oxygen analyzer and the particle meter are maintained;
step 3: the device to be tested which is newly connected into the system is purged through the purging pipeline and the vacuumizing pipeline, and moisture, oxygen and particles can be detected after the purging is completed;
step 4: the (i) th equipment to be tested is connected to a water-oxygen particle analysis and detection system while moisture, oxygen and particles are detected, and then the step (3) is repeated to enable the (i+1) th equipment to be tested to be queued for moisture, oxygen or particle detection;
the specific steps of detecting moisture, oxygen or particles of the single device to be detected are as follows: firstly, closing a purging branch pipe connected with equipment to be tested, simultaneously opening a testing main pipe on a testing tube connected with the equipment to be tested, a second testing control valve and an exhaust valve on one testing branch pipe, exhausting waste gas in the testing tube through GN2 gas, closing the exhaust valve on the testing branch pipe after GN2 gas is introduced into the testing tube for a set time, closing a maintenance control valve, opening a third testing control valve on the testing branch pipe, introducing GN2 gas into a moisture meter or an oxygen analyzer or a particle meter for moisture, oxygen or particle detection, transmitting a detection result to a controller by the moisture meter or the oxygen analyzer or the particle meter, analyzing and processing received data by the controller, if the test result meets the set requirement, testing the equipment to be tested to be qualified, otherwise, re-executing the step 2;
step 5: and 4, testing all the equipment to be tested, and maintaining the moisture meter, the oxygen analyzer and the particle meter in the step 2.
Preferably, the specific steps of purging the single device to be tested through the purging pipeline and the vacuum pumping pipeline in the step 3 are as follows:
step 3.1: opening an air inlet valve of an air inlet pipeline, detecting the internal pressure of the equipment to be detected in real time by a third pressure sensor, closing the air inlet valve and opening a purging control valve when the internal pressure of the equipment to be detected is larger than a third set value, and alternately and circularly opening the air inlet valve and closing the purging control valve after the purging set time, closing the air inlet valve and opening the purging control valve to carry out disc surface pulse purging on the equipment to be detected;
step 3.2: after the disc surface pulse purging times reach a set value, closing an air inlet valve, opening a purging control valve, detecting the internal pressure of the equipment to be detected in real time by a third pressure sensor, and when the internal pressure of the equipment to be detected is smaller than a fourth set value, closing the purging control valve, and opening a first pressure control valve on an vacuumizing pipe; when the internal pressure of the equipment to be tested is smaller than a fifth set value, closing the first pressure control valve and opening the air inlet valve; when the internal pressure of the equipment to be tested is larger than a sixth set value, closing the air inlet valve, and carrying out deep purging on the equipment to be tested;
step 3.3: and 3.2, repeating the step, and completing the purging when the depth purging times of the equipment to be tested reach the set value.
The beneficial effects of the invention are as follows:
the method and the device improve the passing rate of the whole set of system test, shorten the test time, reduce the test cost, greatly improve the qualification rate of the test, and carry out disc surface pulse blowing on the equipment to be tested through the matching of the blowing pipeline and the vacuumizing pipeline, so that the problem of insufficient blowing of the original system can be solved, and the effectiveness of blowing of the system is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a circuit diagram of a water oxygen particle analysis and detection system of the present invention.
Fig. 2 is a schematic perspective view of an analysis and detection cabinet.
Fig. 3 is an interior view of the analytical test cabinet.
Fig. 4 is a schematic perspective view of the apparatus rack.
The meaning of the reference numerals in the figures is:
1 is an analysis and detection cabinet, 2 is an equipment placing rack, 3 is a cabinet body, 4 is a test panel, 5 is a controller, 6 is a test instrument, 7 is a vacuum tank, 8 is an air inlet pipeline, 10 is an exhaust pipeline, 11 is a vacuum main pipe, 12 is a vacuum branch pipe, 13 is a test main pipe, 14 is a test branch pipe, 15 is a purging main pipe, 16 is a purging main pipe, 17 is a maintenance main pipe, and 18 is a maintenance branch pipe;
G i is an air inlet valve; v (V) i Is a purge control valve;
B i for the first pressure control valve, TIN is the second pressure control valveTOUT is a third pressure control valve;
T i for the first test control valve H i 、o i And r i Are all second test control valves, HA, oA and rA are all third test control valves, CV i The valve is a first one-way valve, HV, oV and rV are exhaust valves, and HB, oB and rB are maintenance control valves;
PT1 is a first pressure sensor, PT2 is a second pressure sensor, and PT3-PT7 are all third pressure sensors.
Detailed Description
For a better understanding of the technical solution of the present invention, the following detailed description of the embodiments of the present invention refers to the accompanying drawings.
It should be understood that the described embodiments are merely some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The present application is described in further detail below by way of specific embodiments and with reference to the accompanying drawings.
In the description of the present application, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance unless explicitly specified or limited otherwise; the term "plurality" means two or more, unless specified or indicated otherwise; the term "coupled" may be either a fixed connection or a removable connection; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the description of the present specification, it will be understood that when an element is referred to as being "on" or "under" another element, it can be directly on the other element or be indirectly on the other element through intervening elements.
The embodiment of the invention provides a water oxygen particle analysis and detection system which comprises an analysis and detection cabinet 1, equipment to be detected and an equipment placing frame 2 for placing the equipment to be detected.
Specifically, equipment to be measured is placed in equipment rack 2, has placed a plurality of baffles in the support body of equipment rack 2, and equipment to be measured can be placed on the baffle, all is fixed with three status indicator lamps on every layer of baffle: yellow light, red light and green light, these three status indication lamps are connected with the controller electricity respectively. If the yellow light is on, the corresponding equipment to be tested is in test; the red light is on, and the corresponding equipment to be tested is unqualified in test; and when the green light is on, the corresponding equipment to be tested is qualified. Therefore, the current test state of the corresponding equipment to be tested can be known in real time according to the on-off states of the different state indicating lamps on each layer of partition plates, and the reasonable and orderly test work is ensured.
The analysis detection cabinet 1 comprises a cabinet body 3, a test panel surface 4, a test instrument 6, a vacuum tank 7 and a controller, wherein the test panel surface 4, the test instrument 6, the vacuum tank 7 and the controller are all arranged in the cabinet body 1.
The test panel surface 4 comprises an air inlet pipeline, a maintenance pipeline, a test pipeline, a purging pipeline and a vacuumizing pipeline.
The air inlet end of the maintenance pipeline is connected with an air source, and the air outlet end of the maintenance pipeline is connected to the air inlet end of the test instrument 6. The test instrument 6 includes a moisture meter, an oxygen analyzer, and a particle meter.
The maintenance pipeline is composed of a maintenance main pipe 17 and three maintenance branch pipes 18 which are arranged at the air outlet end of the maintenance main pipe 17 in parallel, wherein the three maintenance branch pipes 18 are sequentially connected to the air inlet ends of the moisture meter, the oxygen analyzer and the particle meter. The maintenance main pipe 18 is provided with a micro leakage valve PNBV, each maintenance branch pipe 18 is provided with a maintenance control valve (the maintenance control valves on the three maintenance branches are rB, oB and HB respectively), and the maintenance control valves are electrically connected with the controller.
The air inlet end of the air inlet pipeline 8 is connected with an air source, and the air outlet end of the air inlet pipeline is connected with an air inlet of the equipment to be tested. The number of the air inlet pipelines is equal to the number of the equipment to be tested, and each equipment to be tested is connected with one air inlet pipeline.
And the air outlet of the equipment to be tested is respectively connected with the purging pipeline, the vacuumizing pipeline and the testing pipeline.
The purging pipeline is composed of a purging main pipe 15 and a plurality of purging branch pipes 16 which are arranged at the air inlet end of the purging main pipe 15 in parallel, and each purging branch pipe 16 is respectively connected with one device to be tested. The main purging pipe 15 is provided with a second check valve CV9, and each purging branch pipe 16 is provided with a purging control valve (V i I=1, 2,3,4 or 5), and the purge control valve is electrically connected to the controller.
The vacuumizing tube is composed of a vacuum main tube 11 and a plurality of vacuum branch tubes 12 which are arranged on the vacuum main tube 11 in parallel, each vacuum branch tube 12 is respectively connected with a device to be tested, and each vacuum branch tube 12 is provided with a first pressure control valve (B i I=1, 2,3,4 or 5). The vacuum main pipe 11 is sequentially provided with a second pressure control valve TIN, a vacuum tank 7, a third pressure control valve TOUT and a vacuum PUMP, the vacuum tank 7 is provided with a first pressure sensor PT1 for detecting the pressure in the tank body of the vacuum tank 7, and the first pressure control valve B i The third pressure control valve TOUT, the first pressure sensor PT1 are all electrically connected to the controller.
The air inlet end of the test pipeline is connected with the equipment to be tested, and the air outlet end of the test pipeline is connected with the air inlet end of the test instrument. The number of the test pipelines is equal to the number of the devices to be tested, and each device to be tested is connected with one path of test pipeline.
The test pipeline is composed of a main test pipe 13 and three branch test pipes 14 which are arranged at the air outlet end of the main test pipe 13 in parallel, and the three branch test pipes 14 are sequentially connected to the air inlet ends of the moisture meter, the oxygen analyzer and the particle meter. The test main pipe 13 is provided with a first test control valve (T i I=1, 2,3,4 or 5), and the test branch pipe 14 is sequentially connected in series with a second test control valve (H i 、o i Or r i I=1, 2,3,4 or 5) and a third test control valve (HA, oA or rA) connected to the test instrument, the second test control valve (H i 、o i Or r i The connection points of the i=1, 2,3,4 or 5 and the third test control valve (HA, oA or rA) are connected withFirst Check Valve (CV) i I=1, 2 or 3) and an exhaust valve (HV, oV or rV), said first test control valve (T i I=1, 2,3,4 or 5), a second test control valve (H i 、o i Or r i I=1, 2,3,4 or 5), the third test control valve (HA, oA or rA), the exhaust valve (HV, oV or rV) are all electrically connected to the controller.
The air outlet end of the testing instrument is connected with an air exhaust pipeline 10, and a manual valve (RMV, OMV, HMV) is arranged on the air exhaust pipeline 10.
When the water-oxygen particle analysis and detection system is adopted to carry out safety test on equipment to be tested, the method specifically comprises the following analysis steps:
step 1: connecting an ith device to be tested to a water-oxygen particle analysis and detection system, wherein i is a positive integer;
step 2: the second pressure sensor PT2 detects the air source pressure in real time, when the air source pressure meets the set requirement, a maintenance pipeline is opened (a valve MIV is manually opened, a controller controls maintenance control valves rB, oB and HB to be opened, and a valve RMV, OMV, HMV is manually opened), GN2 gas is introduced into a moisture meter, an oxygen analyzer and a particle meter through the maintenance pipeline, and the moisture meter, the oxygen analyzer and the particle meter are maintained;
step 3: purging the equipment to be tested which is newly connected into the system by a purging pipeline and a vacuum pumping pipeline;
specifically, step 3.1: intake valve G for opening an intake line i The third pressure sensor PT3 detects the internal pressure of the device to be detected in real time, and when the internal pressure of the device to be detected is greater than a third set value, the air inlet valve G is closed i Opening the purge control valve V i After the purging set time, alternately and circularly opening the air inlet valve G i Closing the purge control valve V i Closing the inlet valve G i Opening the purge control valve V i Carrying out disc surface pulse purging on the equipment to be tested;
step 3.2: after the number of disc pulse purging reaches a set value, closing the air inlet valve G i Opening the purge control valve V i The third pressure sensor PT3 detects the internal pressure of the device under test in real time, and when the internal pressure of the device under test is smaller than the fourth setting valueAfter the value, the purge control valve V is closed i Opening the first pressure control valve B i The method comprises the steps of carrying out a first treatment on the surface of the When the internal pressure of the equipment to be tested is smaller than the fifth set value, the first pressure control valve B is closed i Open the air inlet valve G i The method comprises the steps of carrying out a first treatment on the surface of the When the internal pressure of the equipment to be tested is greater than the sixth set value, closing the air inlet valve G i Deep purging is carried out on the equipment to be tested;
step 3.3: repeating the step 3.2, and completing the purging when the depth purging times of the equipment to be tested reach the set times;
after purging is completed, the air inlet valve G is opened i Opening the purge control valve V i Entering a test waiting stage;
step 4: the (i) th equipment to be tested is connected to a water-oxygen particle analysis and detection system while moisture, oxygen and particles are detected, and then the step (3) is repeated to enable the (i+1) th equipment to be tested to be queued for moisture, oxygen or particle detection;
the specific steps of detecting moisture, oxygen or particles of the single device to be detected are as follows: first, the purge branch pipe connected to the device under test is closed (purge control valve V is closed i ) Simultaneously opening a test main on a test tube connected to the device under test (opening a first test control valve T i ) A second test control valve (H) on one of the test branches i 、o i Or r i ) And an exhaust valve (HV, oV or rV), exhaust the exhaust gas in the test pipeline through GN2 gas, closing the exhaust valve on the test branch pipe after the GN2 gas is introduced into the test pipeline for a set time, closing a maintenance control valve (HB, oB or rB), opening a third test control valve (HA, oA or rA) on the test branch pipe, introducing the GN2 gas into a moisture meter or an oxygen analyzer or a particle meter for moisture, oxygen or particle detection, transmitting the detection result to a controller by the moisture meter or the oxygen analyzer or the particle meter, analyzing and processing the received data by the controller, if the test result meets the set requirement, testing the equipment to be tested to be qualified, otherwise, re-executing the step 2;
step 5: and (4) repeating the step (2) to maintain the moisture meter, the oxygen analyzer and the particle meter after all the equipment to be tested are tested.
The water-oxygen particle analysis and detection system of the present application can test a plurality of devices to be tested simultaneously, as shown in fig. 1, five devices to be tested (devices S1, S2, S3, S4, S5) are provided in the water-oxygen particle analysis and detection system of the present embodiment, and the five devices to be tested can perform security detection simultaneously, but in the same time, the media detected by different devices to be tested are different, for example, if the device to be tested S1 is currently performing moisture detection, the device S2 or other devices can only perform oxygen or particle detection, and the moisture detection needs to be queued.
The following specifically illustrates, by way of example, the specific analysis steps for security analysis of a device under test using the system of the present application:
step 1: the 1 st equipment to be tested is connected to a water-oxygen particle analysis and detection system, the air inlet end of each equipment to be tested is connected with one air inlet pipeline, and the air outlet end is connected with one test pipeline, one purging branch pipe of the purging pipeline and one vacuum branch pipe of the vacuumizing pipeline.
Step 2: the second pressure sensor PT2 detects the air source pressure in real time, when the air source pressure meets the set requirement, a maintenance pipeline is opened (a valve MIV is manually opened, a controller controls maintenance control valves rB, oB and HB to be opened, and a valve RMV, OMV, HMV is manually opened), GN2 gas is introduced into the moisture meter, the oxygen analyzer and the particle meter through the maintenance pipeline, and the moisture meter, the oxygen analyzer and the particle meter are maintained.
Step 3: purging the 1 st equipment to be tested through the purging pipeline and the vacuumizing pipeline, and opening the second air inlet valve P after purging is completed 1 Opening the purge control valve V 1 Entering a test waiting stage, and detecting moisture, oxygen and particles on the 1 st equipment to be tested;
the purging process is described above and will not be described in detail herein.
Step 4: and (3) connecting the 2 nd equipment to be tested to the water-oxygen particle analysis and detection system while the 1 st equipment to be tested detects moisture, oxygen and particles, and then repeating the purging and detection processes of the step (3) to enable the 2 nd equipment to be tested to be in line for moisture, oxygen or particle detection. Assuming that the moisture and oxygen of the 1 st equipment to be detected are tested, and the particle detection is not completed, the 2 nd equipment to be detected can be subjected to moisture and oxygen detection, the 2 nd equipment to be detected is in line for waiting until the 1 st equipment to be detected is completed, and the 2 nd equipment to be detected starts particle detection again.
And (3) while the second equipment to be tested performs purging and detecting operation, connecting the third equipment to be tested to the water-oxygen particle analysis and detection system, repeating the purging and detecting processes, and queuing the third equipment to be tested for moisture, oxygen or particle detection.
And by analogy, detecting moisture, oxygen or particles to be detected.
The specific steps of moisture detection for the 1 st device to be detected S1 are as follows: first, the purge branch pipe connected to the device under test S1 is closed (purge control valve V is closed 1 ) Simultaneously opening a test main on a test tube connected to the device under test (opening a first test control valve T 1 ) The method comprises the steps that one of the test branch pipes is provided with a second test control valve H1 and an exhaust valve HV, exhaust gas in a test pipeline is exhausted through GN2 gas, after the GN2 gas is introduced into the test branch pipe for a set time, the exhaust valve HV on the test branch pipe is closed, a maintenance control valve HB is closed, a third test control valve HA on the test branch pipe is opened, the GN2 gas is introduced into a moisture meter for moisture detection, the moisture meter transmits detection results to a controller, the controller analyzes and processes received data, if the test results meet the set requirements, the test of equipment to be tested is qualified, and otherwise, the step 2 is executed again;
the specific steps of oxygen detection for the 1 st equipment S1 to be detected are as follows: first, the purge branch pipe connected to the device under test S1 is closed (purge control valve V is closed 1 ) Simultaneously opening a test main on a test tube connected to the device under test (opening a first test control valve T 1 ) The second test control valve o1 and the exhaust valve oV on one of the test branch pipes, exhaust gas in the test pipeline is exhausted through GN2 gas, and after the GN2 gas is introduced for a set time, the exhaust valve oV on the test branch pipe is closed, and then the exhaust valve oV on the test branch pipe is closedAnd (2) opening a third test control valve oA on the test branch pipe to enable GN2 gas to be introduced into an oxygen analyzer for oxygen analysis, transmitting a detection result to a controller by the oxygen analyzer, analyzing and processing the received data by the controller, and if the test result meets a set requirement, testing the equipment to be tested to be qualified, otherwise, re-executing the step (2).
Step 5: and (3) after all the equipment to be tested is tested, repeating the step (2) to maintain the moisture meter, the oxygen analyzer and the particle meter.
The foregoing description of the preferred embodiments of the invention is not intended to be limiting, but rather to enable any modification, equivalent replacement, improvement or the like to be made within the spirit and principles of the invention.
Claims (7)
1. A water oxygen particle analysis and detection system is characterized by comprising
An analysis and detection cabinet;
the equipment to be tested is special gas equipment and is used for storing and conveying special gas;
an equipment rack for placing equipment to be tested;
wherein the analysis and detection cabinet comprises a cabinet body, a testing disk surface, a testing instrument, a vacuum tank and a controller, the testing disk surface, the testing instrument, the vacuum tank and the controller are all arranged in the cabinet body,
the test panel comprises an air inlet pipeline, a maintenance pipeline, a test pipeline, a purge pipeline and a vacuumizing pipeline, wherein the air inlet end of the air inlet pipeline is connected with an air source, the air outlet end of the air inlet pipeline is connected with an air inlet of equipment to be tested, the air outlet of the equipment to be tested is respectively connected with the purge pipeline, the vacuumizing pipeline and the test pipeline, the test pipeline is connected with the air inlet end of a test instrument, and the air outlet end of the test instrument is connected with an exhaust pipeline;
the air inlet pipelines and the test pipelines are respectively provided with a plurality of paths, the number of the air inlet pipelines and the number of the test pipelines are equal to that of the equipment to be tested, and each equipment to be tested is connected with one air inlet pipeline and one test pipeline; the testing instrument comprises a moisture meter, an oxygen analyzer and a particle meter, wherein the air inlet end of the moisture meter, the air inlet end of the oxygen analyzer and the air inlet end of the particle meter are connected with the testing pipeline;
the air inlet end of the maintenance pipeline is connected with an air source, and the air outlet end of the maintenance pipeline is connected to the air inlet end of the test instrument;
the maintenance pipeline consists of a maintenance main pipe and three maintenance branch pipes which are arranged at the air outlet end of the maintenance main pipe in parallel, and the three maintenance branch pipes are sequentially connected to the air inlet ends of the moisture meter, the oxygen analyzer and the particle meter; the maintenance main pipe is provided with micro-leakage valves, each maintenance branch pipe is provided with a maintenance control valve, and the maintenance control valves are electrically connected with the controller.
2. The water-oxygen particle analysis and detection system according to claim 1, wherein the vacuumizing tube is composed of a vacuum main tube and a plurality of vacuum branch tubes arranged on the vacuum main tube in parallel, and each vacuum branch tube is respectively connected with one device to be detected;
each vacuum branch pipe is provided with a first pressure control valve, the vacuum main pipe is sequentially provided with a second pressure control valve, a vacuum tank, a third pressure control valve and a vacuum pump, the vacuum tank is provided with a first pressure sensor for detecting the pressure in the vacuum tank body, and the first pressure control valve, the third pressure control valve and the first pressure sensor are electrically connected with the controller.
3. The water-oxygen particle analysis and detection system according to claim 2, wherein the test pipeline is composed of a test main pipe and three test branch pipes which are arranged in parallel at the air outlet end of the test main pipe, and the three test branch pipes are sequentially connected to the air inlet ends of the moisture meter, the oxygen analyzer and the particle meter;
the test main pipe is provided with a first test control valve, the test branch pipe is sequentially connected with a second test control valve and a third test control valve in series, the connection point of the second test control valve and the third test control valve is sequentially connected with a first check valve and an exhaust valve, and the first test control valve, the second test control valve, the third test control valve and the exhaust valve are all electrically connected with the controller.
4. The water-oxygen particle analysis and detection system according to claim 3, wherein the purging pipeline is composed of a purging main pipe and a plurality of purging branch pipes which are arranged at the air inlet end of the purging main pipe in parallel, and each purging branch pipe is respectively connected with one device to be detected;
the purging main pipe is provided with a second one-way valve, each path of purging branch pipe is provided with a purging control valve, and the purging control valves are electrically connected with the controller.
5. The water-oxygen particle analysis detection system of claim 4, wherein a second pressure sensor is provided at the gas source for detecting the pressure of the gas source, and the second pressure sensor is electrically connected to the controller.
6. A method of detecting a water oxygen particle analysis detection system according to claim 5, comprising the steps of:
step 1: connecting an ith device to be tested to a water-oxygen particle analysis and detection system, wherein i is a positive integer;
step 2: the second pressure sensor detects the air source pressure in real time, when the air source pressure meets the set requirement, a maintenance pipeline is opened, GN2 gas is introduced into the moisture meter, the oxygen analyzer and the particle meter through the maintenance pipeline, and the moisture meter, the oxygen analyzer and the particle meter are maintained;
step 3: the device to be tested which is newly connected into the system is purged through the purging pipeline and the vacuumizing pipeline, and moisture, oxygen and particles can be detected after the purging is completed;
step 4: the (i) th equipment to be tested is connected to a water-oxygen particle analysis and detection system while moisture, oxygen and particles are detected, and then the step (3) is repeated to enable the (i+1) th equipment to be tested to be queued for moisture, oxygen or particle detection;
the specific steps of detecting moisture, oxygen or particles of the single device to be detected are as follows: firstly, closing a purging branch pipe connected with equipment to be tested, simultaneously opening a testing main pipe on a testing tube connected with the equipment to be tested, a second testing control valve and an exhaust valve on one testing branch pipe, exhausting waste gas in the testing tube through GN2 gas, closing the exhaust valve on the testing branch pipe after GN2 gas is introduced into the testing tube for a set time, closing a maintenance control valve, opening a third testing control valve on the testing branch pipe, introducing GN2 gas into a moisture meter or an oxygen analyzer or a particle meter for moisture, oxygen or particle detection, transmitting a detection result to a controller by the moisture meter or the oxygen analyzer or the particle meter, analyzing and processing received data by the controller, if the test result meets the set requirement, testing the equipment to be tested to be qualified, otherwise, re-executing the step 2;
step 5: and 4, testing all the equipment to be tested, and maintaining the moisture meter, the oxygen analyzer and the particle meter in the step 2.
7. The method for detecting the water-oxygen particle analysis and detection system according to claim 6, wherein the specific steps of purging the single equipment to be detected through the purging pipeline and the vacuumizing pipeline in the step 3 are as follows:
step 3.1: opening an air inlet valve of an air inlet pipeline, detecting the internal pressure of the equipment to be detected in real time by a third pressure sensor, closing the air inlet valve and opening a purging control valve when the internal pressure of the equipment to be detected is larger than a third set value, and alternately and circularly opening the air inlet valve and closing the purging control valve after the purging set time, closing the air inlet valve and opening the purging control valve to carry out disc surface pulse purging on the equipment to be detected;
step 3.2: after the disc surface pulse purging times reach a set value, closing an air inlet valve, opening a purging control valve, detecting the internal pressure of the equipment to be detected in real time by a third pressure sensor, and when the internal pressure of the equipment to be detected is smaller than a fourth set value, closing the purging control valve, and opening a first pressure control valve on an vacuumizing pipe; when the internal pressure of the equipment to be tested is smaller than a fifth set value, closing the first pressure control valve and opening the air inlet valve; when the internal pressure of the equipment to be tested is larger than a sixth set value, closing the air inlet valve, and carrying out deep purging on the equipment to be tested;
step 3.3: and 3.2, repeating the step, and completing the purging when the depth purging times of the equipment to be tested reach the set value.
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| CN113607776B (en) * | 2021-07-21 | 2023-03-10 | 广州德芯半导体科技有限公司 | Method for realizing array type MEMS multi-gas sensor |
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