JP2005236024A - 半導体レーザ素子 - Google Patents
半導体レーザ素子 Download PDFInfo
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- JP2005236024A JP2005236024A JP2004043135A JP2004043135A JP2005236024A JP 2005236024 A JP2005236024 A JP 2005236024A JP 2004043135 A JP2004043135 A JP 2004043135A JP 2004043135 A JP2004043135 A JP 2004043135A JP 2005236024 A JP2005236024 A JP 2005236024A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/3202—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures grown on specifically orientated substrates, or using orientation dependent growth
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/3434—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer comprising at least both As and P as V-compounds
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- Optics & Photonics (AREA)
- Biophysics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Semiconductor Lasers (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
【解決手段】 AlGaInP層あるいはGaInP層を積層するGaAs基板として、主面の結晶方位が(100)面を基準として(111)面方向に傾いた基板を採用する。傾きの度合いは、AlGaInP層やGaInP層の総層厚が1μm以下であれば8〜54.7度、1μm以上であれば13〜54.7度とする。このような基板上にAlGaInP層やGaInP層を形成した場合、結晶欠陥が生じにくいため、その層の上に形成されるInGaAsP量子井戸活性層が悪い影響を受けることもなく、高性能で長寿命な半導体レーザが得られる。
【選択図】 図2
Description
Japanese Journal of Applied Physics, Vol.34,No.9B,p.L1175(1995)
2 n型GaAsバッファ層
3 n型AlGaAs下部クラッド層
4 n型あるいはi型GaInP下部光導波層
5 InGaAsP量子井戸活性層
6 p型あるいはi型GaInP上部光導波層
7 p型AlGaAs上部クラッド層
8 p+型GaAsコンタクト層
9 SiO2絶縁膜
10 p側電極
11 n側電極
12 溝
13 リッジ形状部
14 n型GaAs基板
15 n型GaAsバッファ層
16 n型AlGaAs下部クラッド層
17 n型あるいはi型GaInP下部光導波層
18 InGaAsP量子井戸活性層
19 p型あるいはi型GaInP上部光導波層
20 p型AlGaAs上部第1クラッド層
21 p型GaInP第1エッチングストップ層
22 p型GaAs第2エッチングストップ層
23 n型AlGaInP電流ブロック層
24 n型GaInP第1キャップ層
25 p型GaAlAs上部第2クラッド層
26 p型GaAsコンタクト層
27 p側電極
28 n側電極
29 ストライプ形状部
Claims (7)
- 結晶方位が(100)面を基準として(111)面方向に8度以上54.7度以下傾いた面を主面とするGaAs基板と、
前記GaAs基板の前記主面の上に配置された少なくとも一層かつ総層厚が1μm以下の(AlaGa1−a)0.51In0.49P層(0≦a≦1)と、
前記(AlaGa1−a)0.51In0.49P層の上に配置されたInxGa1−xAs1−yPy活性層(x≒0.49y、0<y≦1.0)とを備えた半導体レーザ素子。 - 前記(AlaGa1−a)0.51In0.49P層の1つであるGa0.51In0.49P光導波層と、
AlbGa1−bAs(0.57≦b≦0.8)からなるクラッド層を備えたことを特徴とする請求項1記載の半導体レーザ素子。 - 前記InxGa1−xAs1−yPy活性層が圧縮歪みまたは引っ張り歪みを有する歪活性層であり、InxGa1−xAs1−yPy(0<x≦0.3)からなることを特徴とする請求項1または2記載の半導体レーザ素子。
- 結晶方位が(100)面を基準として(111)面方向に13度以上54.7度以下傾いた面を主面とするGaAs基板と、
前記GaAs基板の前記主面の上に配置された少なくとも一層かつ総層厚が1μm以上の(AlaGa1−a)0.51In0.49P層(0≦a≦1)と、
前記(AlaGa1−a)0.51In0.49P層の上に配置されたInxGa1−xAs1−yPy活性層(x≒0.49y、0<y≦1.0)とを備えた半導体レーザ素子。 - 前記(AlaGa1−a)0.51In0.49P層の1つであるGa0.51In0.49P光導波層、および(AlaGa1−a)0.51In0.49Pクラッド層(0.3≦a≦0.7)を備えたことを特徴とする請求項4記載の半導体レーザ素子。
- 前記InxGa1−xAs1−yPy活性層が圧縮歪みまたは引っ張り歪みを有する歪活性層であり、InxGa1−xAs1−yPy(0<x≦0.3)からなることを特徴とする請求項4または5記載の半導体レーザ素子。
- 請求項1から6のいずれか1項記載の半導体レーザ素子であって、発振波長が760nm以上840nm未満のレーザ素子。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004043135A JP2005236024A (ja) | 2004-02-19 | 2004-02-19 | 半導体レーザ素子 |
EP05003155A EP1566867A3 (en) | 2004-02-19 | 2005-02-15 | Semiconductor laser element formed on substrate having titled crystal orientation |
US11/060,559 US7366216B2 (en) | 2004-02-19 | 2005-02-18 | Semiconductor laser element formed on substrate having tilted crystal orientation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004043135A JP2005236024A (ja) | 2004-02-19 | 2004-02-19 | 半導体レーザ素子 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2005236024A true JP2005236024A (ja) | 2005-09-02 |
Family
ID=34709122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004043135A Pending JP2005236024A (ja) | 2004-02-19 | 2004-02-19 | 半導体レーザ素子 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7366216B2 (ja) |
EP (1) | EP1566867A3 (ja) |
JP (1) | JP2005236024A (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006245341A (ja) * | 2005-03-03 | 2006-09-14 | Mitsubishi Electric Corp | 半導体光素子 |
JP5206699B2 (ja) | 2010-01-18 | 2013-06-12 | 住友電気工業株式会社 | Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法 |
US7933303B2 (en) * | 2009-06-17 | 2011-04-26 | Sumitomo Electric Industries, Ltd. | Group-III nitride semiconductor laser device, and method for fabricating group-III nitride semiconductor laser device |
US7903711B1 (en) * | 2009-11-13 | 2011-03-08 | Coherent, Inc. | Separate confinement heterostructure with asymmetric structure and composition |
US9484211B2 (en) * | 2013-01-24 | 2016-11-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Etchant and etching process |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0325275B1 (en) * | 1988-01-20 | 1994-09-07 | Nec Corporation | A visible light semiconductor laser with (AlxGa1-x)0.5In0.5P crystal layers and a process for growing an (AlxGa1-x)0.5In0.5P crystal |
US5157679A (en) * | 1989-10-11 | 1992-10-20 | Hitachi-Ltd. | Optoelectronic devices |
EP0533197A3 (en) * | 1991-09-20 | 1993-11-03 | Fujitsu Ltd | Stripe laser diode having an improved efficiency for current confinement |
JPH05160515A (ja) * | 1991-12-04 | 1993-06-25 | Eastman Kodak Japan Kk | 量子井戸型レーザダイオード |
DE69406049T2 (de) * | 1993-06-04 | 1998-04-16 | Sharp Kk | Lichtmittierende Halbleitervorrichtung mit einer dritten Begrenzungsschicht |
US5684818A (en) * | 1993-12-28 | 1997-11-04 | Fujitsu Limited | Stepped substrate semiconductor laser for emitting light at slant portion |
US5465266A (en) * | 1994-06-28 | 1995-11-07 | Xerox Corporation | Index-guided laser on a ridged (001) substrate |
EP0872925B1 (en) * | 1995-09-29 | 2002-04-03 | Matsushita Electric Industrial Co., Ltd. | Semiconductor laser and optical disk device using the laser |
US5881086A (en) * | 1995-10-19 | 1999-03-09 | Canon Kabushiki Kaisha | Optical semiconductor device with quantum wires, fabrication method thereof, and light source apparatus, and optical communication system using the same |
JPH1075009A (ja) * | 1996-08-30 | 1998-03-17 | Nec Corp | 光半導体装置とその製造方法 |
JPH11274635A (ja) * | 1998-03-19 | 1999-10-08 | Hitachi Ltd | 半導体発光装置 |
US6639926B1 (en) * | 1998-03-25 | 2003-10-28 | Mitsubishi Chemical Corporation | Semiconductor light-emitting device |
US6219365B1 (en) * | 1998-11-03 | 2001-04-17 | Wisconsin Alumni Research Foundation | High performance aluminum free active region semiconductor lasers |
US6614059B1 (en) * | 1999-01-07 | 2003-09-02 | Matsushita Electric Industrial Co., Ltd. | Semiconductor light-emitting device with quantum well |
GB2351390A (en) * | 1999-06-16 | 2000-12-27 | Sharp Kk | A semiconductor material comprising two dopants |
JP3585817B2 (ja) * | 2000-09-04 | 2004-11-04 | ユーディナデバイス株式会社 | レーザダイオードおよびその製造方法 |
-
2004
- 2004-02-19 JP JP2004043135A patent/JP2005236024A/ja active Pending
-
2005
- 2005-02-15 EP EP05003155A patent/EP1566867A3/en not_active Withdrawn
- 2005-02-18 US US11/060,559 patent/US7366216B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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EP1566867A2 (en) | 2005-08-24 |
US20050185687A1 (en) | 2005-08-25 |
US7366216B2 (en) | 2008-04-29 |
EP1566867A3 (en) | 2006-03-22 |
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