JP2004146533A - Desmear method of printed circuit board - Google Patents

Desmear method of printed circuit board Download PDF

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Publication number
JP2004146533A
JP2004146533A JP2002308857A JP2002308857A JP2004146533A JP 2004146533 A JP2004146533 A JP 2004146533A JP 2002308857 A JP2002308857 A JP 2002308857A JP 2002308857 A JP2002308857 A JP 2002308857A JP 2004146533 A JP2004146533 A JP 2004146533A
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JP
Japan
Prior art keywords
hole
desmear
printed wiring
wiring board
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002308857A
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Japanese (ja)
Inventor
Masaru Nishinaka
西中賢
Taku Ito
伊藤卓
Mutsuaki Murakami
村上睦明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanegafuchi Chemical Industry Co Ltd
Original Assignee
Kanegafuchi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanegafuchi Chemical Industry Co Ltd filed Critical Kanegafuchi Chemical Industry Co Ltd
Priority to JP2002308857A priority Critical patent/JP2004146533A/en
Publication of JP2004146533A publication Critical patent/JP2004146533A/en
Pending legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To solve the problems wherein sufficient desmear effect cannot be obtained with the existing desmear process using permanganate or an insulating resin is excessively damaged if the processing condition is intensified in order to obtain the sufficient desmear effect, because the smear different from that of the existing epoxy resin is attached, in the desmear process of a through-hole or a hole with bottom in the process to obtain the both-side printed circuit board and multilayer printed circuit board from a printed circuit board using the polyimide resin. <P>SOLUTION: Even in the manufacture of the printed circuit board, smear splashed to the area near an aperture of hole and to the wall of hole is removed with the solution including oxyalkylamine and alkali metal compound. As a result, a copper layer is peeled in the existing desmear process using permanganate and, moreover, the desmear process of the insulating substrate using the polyimide-system resin which has been considered difficult for the desmear process is realized. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
本発明は、プリント配線板に穿設される非貫通孔や貫通孔のデスミア方法に関する。
【0002】
【従来の技術】
近年の電気機器の小型化、軽量化、高機能化に伴い、プリント配線板の多層化が進んでいる。多層プリント配線板を製造する為には、配線板にドリルや炭酸ガスレーザー,UVレーザーなどで貫通孔は非貫通孔を穿説し開口部周辺や孔壁、底面に付着したスミアを過マンガン酸塩溶液で酸化して除去して孔内を洗浄した後無電解めっき、電解めっきを施して層間の接続を取る。(例えば特許文献1参照)あるいはプリント配線板の高密度化に対応する技術として導体層の厚みを薄くする技術が開示されている(例えば特許文献2参照)。
また、高機能化、高速化のためにプリント配線板に対する低誘電率化、低誘電正接化の要求が高まっており従来のエポキシ樹脂ではこれらの要求を満足できないため、これに対応する技術として誘電率の低いポリイミド樹脂を絶縁層に用いたプリント配線板が開示されている(例えば特許文献3参照)。
【0003】
【特許文献1】特開2002−217536
【0004】
【特許文献2】特開平11−240106
【0005】
【特許文献3】特開2000−143734
【0006】
【発明が解決しようとする課題】
しかし、ポリイミド樹脂を用いたプリント配線板を両面プリント配線板や多層プリント配線板に加工する際の貫通孔や非貫通孔のデスミア工程において、従来のエポキシ樹脂によるものとは異なるスミアが付着する為に従来の過マンガン酸塩を用いたデスミア処理では十分なデスミアの効果が得られない、あるいは十分なデスミア効果を得るために処理条件を強くすると絶縁樹脂を過度に損傷してしまう、などの問題があった。
また、高密度化のために形成された厚みの薄い導体層、特に蒸着やスパッタリング、イオンプレーティングなどの方法で形成した導体層は従来の過マンガン酸塩のデスミア液の強い酸化力の影響で導体層にクラックやピンホールが発生したり導体層が剥れたりするという問題もあった。
【0007】
【課題を解決するための手段】
本発明は上記不具合を解消するためになされたもので、その目的とするところは、高密度、低誘電率の要求に対応したプリント配線板に穿設された非貫通孔や貫通孔のデスミア処理を確実に行うことによって、後のプリント配線板の製造工程でのパターン剥れ等の不具合が発生することのない、プリント配線板の非貫通孔や貫通孔へのデスミア方法を提供することにある。
【0008】
【発明の実施の形態】
本発明の第1は、少なくとも一方の面に導体を備えた絶縁基板の前記導体に穿設された貫通孔または非貫通孔へのデスミア方法であって、孔の開口周辺や導体層の孔壁面および下面導体層表面等に溶融付着した溶着樹脂(スミア)をオキシアルキルアミンおよびアルカリ金属化合物を含有する溶液を用いてデスミアすることを特徴とするプリント配線板の非貫通孔へのデスミア方法である。該溶液を用いることにより、導体層は樹脂層に過度の損傷を与えることなく効率的にデスミア処理ができる。
【0009】
本発明の第2は、前記絶縁基板がポリイミド樹脂を主成分とすることを特徴とするプリント配線板の貫通孔または非貫通孔へのデスミア方法である。前記溶液は、ポリイミド樹脂由来のスミアに対して効果的なデスミア性能を発揮する。
【0010】
本発明の第3は、前記オキシアルキルアミンが2−エタノールアミンであることを特徴とするプリント配線板のデスミア方法である。2−エタノールアミンは入手が容易であり、かつ安定したデスミア性能を発揮する。
【0011】
本発明の第4は、前記アルカリ金属化合物が水酸化カリウムまたは水酸化ナトリウムであることを特徴とするプリント配線板のデスミア方法である。水酸化カリウムや水酸化ナトリウムは入手や取り扱いが容易であり、かつこれを用いた溶液は安定したデスミア性能を発揮する。
【0012】
本発明の第5は、貫通孔または非貫通孔が導体に直接UVレーザーを照射することによって穿説されたものであることを特徴とするプリント配線板の貫通孔または非貫通孔へのデスミア方法である。配線板の高密度化と生産性のバランスからUVレーザーが最も優れている。
【0013】
本発明の第6は、前記絶縁基板の少なくとも表裏に設けられた導体層厚みがそれぞれ1μm以下であることを特徴とするプリント配線板の貫通孔または非貫通孔へのデスミア方法である。プリント配線板の高密度化のために薄く設けられた導体層に対し、本発明の溶液は不要な損傷を与えないために特に本発明の効果が顕著に現れる。
【0014】
【実施例】
本発明の実施の形態について説明する。
絶縁層の両面に導体が積層された絶縁基板の所望とする位置の導体及び絶縁層を除去して貫通孔または非貫通孔を形成する。
【0015】
次いで、孔の開口周辺や孔壁に飛び散ったスミアをオキシアルキルアミンおよびアルカリ金属化合物を含有する溶液によって除去する。その後、積層板全体に無電解導体めっき及び電解導体めっきを施すことによって、両面を電気的に接続し、次いで、外層に回路形成を施すことによって、プリント配線板の非貫通孔を得る。
【0016】
絶縁層を形成する樹脂はポリイミド樹脂が、電気絶縁性、誘電特性、耐熱性などの観点から好適である。ポリイミド樹脂としては、鐘淵化学工業社製のアピカルなどの非熱可塑性ポリイミドフィルムや溶液状の可溶性ポリイミド樹脂、熱可塑性ポリイミド樹脂が使用しうる。また、これらの材料を任意に組合わせて混合体、積層体等にしてもよく、ポリイミド樹脂中にエポキシ樹脂やシアナート樹脂などを混合することも可能である。その他、無機あるいは有機のフィラーの添加、コロナやプラズマなど各種表面処理を施しても良い。
【0017】
これらの絶縁基板に導体層を形成する方法としては、熱可塑性ポリイミド樹脂等を接着剤層として非熱可塑性ポリイミドフィルムと銅箔を貼り合わせる方法、ポリイミド樹脂表面に蒸着、スパッタ、イオンプレーティングなどの方法で薄膜の導体層を形成する方法、あるいは銅箔に溶液状のポリイミド樹脂を塗布乾燥する方法などが利用できる。
【0018】
耐熱性、電気絶縁性や高密度パターンの形成性の観点から、非熱可塑性ポリイミドフィルムにスパッタによって薄膜の導体層を形成した構成が最も好適である。あるいは非熱可塑性ポリイミドフィルム表面に耐アルカリ性に優れた熱可塑性ポリイミド樹脂を塗布した上にスパッタによって薄膜導体層を形成したものも、デスミア用工程や、無電解銅めっき工程に対して優れた特性を発揮する。
【0019】
本発明の絶縁基板に貫通孔または非貫通孔を穿設する方法としては公知の任意の方法を適用できる。すなわちドリル、導体層をエッチング除去した後に樹脂を炭酸ガスレーザーで穴開けする方法、UVレーザーで導体層、樹脂層を同時に穴開けする方法などが例示される。これらの方法による貫通孔や非貫通孔は穴形状や均一性の点で優れているので好ましい。特にUVレーザーによる方法は、小径の穴開けが可能であることから特に好ましい。これらの方法は貫通孔ないし非貫通孔の開口部付近や孔壁、孔底などにスミアが付着するために本発明によるデスミアの効果が顕著にあられる。
【0020】
また、絶縁基板の片側の面に導体層を設け、他方の面に接着剤層を設けた積層体を回路を作製したプリント配線板にプレスやラミネートなどの方法で積層した多層プリント配線板において、層間接続のために穿設した貫通孔あるいは非貫通孔をデスミア処理することももちろん可能である。
【0021】
本発明でデスミアに用いる薬液は特開平10−97081に開示されている、ポリイミド樹脂の溶解性に優れたものであり、かつポリイミドフィルムを異方的に侵食する特性を持つ。すなわちポリイミドフィルムを厚み方向(Z方向)に選択的に溶解し、XY方向には溶解しない。したがってデスミア液として孔径を広げる、絶縁樹脂と導体層の界面を侵食して導体層を引き剥がすなどの問題を引き起こすことなく孔壁をクリーニングできる。
【0022】
特に水酸化カリウム/エタノールアミン/水からなる水溶液が経済性、デスミア特性などの点で好ましい。水酸化カリウムの濃度は10〜50重量%が好ましく、20〜40重量%がより好ましい。エタノールアミンの濃度は10〜90重量%が好ましく、40〜70重量%がより好ましい。処理温度は20〜80℃程度まで可能であるが、処理の安定性、均一性の観点から20〜50℃がより好適である。
以下実施例及び比較例を挙げて本発明方法を更に説明する。
【0023】
(実施例1)ポリイミドフィルム(鐘淵化学工業株式会社製アピカルNPI、25μm厚み)の両面にスパッタリングにより銅を形成した絶縁基板にUVレーザーを用いて貫通孔を形成した。開口部の周辺は樹脂状のものがうっすらと堆積していた。このサンプルを水酸化カリウム/エタノールアミン/水を重量比2/5/1で混合した混合液に30℃5分間浸漬し、十分水洗したところ、開口部周辺の樹脂状堆積物は除去されていた。一方、銅スパッタ層やポリイミドフィルム層、貫通孔壁面は何ら損傷を受けていなかった。
【0024】
(実施例2)ポリイミドフィルム(鐘淵化学工業株式会社製アピカルNPI、12.5μm厚み)の一方の面にスパッタリングにより銅を形成し、他方の面にポリイミド樹脂接着剤層を形成した積層体を回路を形成したBTレジン基板に積層した後UVレーザーを用いて非貫通孔を形成した。開口部の周辺は樹脂状のものがうっすらと堆積していた。また非貫通孔の孔底(BTレジン基板の銅箔部が露出)にはレーザーのエネルギーによって変性した樹脂スミアが付着していた。このサンプルを水酸化カリウム/エタノールアミン/水を重量比2/5/1で混合した混合液に30℃5分間浸漬し、十分水洗したところ、開口部周辺、および孔底の樹脂状堆積物やスミアは除去されていた。一方、銅スパッタ層やポリイミドフィルム層、非貫通孔壁面は何ら損傷を受けていなかった。
【0025】
(比較例1)実施例1と同様の貫通孔を穿設したサンプルを過マンガン酸カリウム50g/l、水酸化ナトリウム40g/lのデスミア溶液に70℃10分間浸漬したところ、過マンガン酸カリウムの強い酸化力の影響で銅スパッタ膜にクラックが入り、1部銅が剥離した。一方開口部周辺の堆積物は十分に除去できなかった。また、孔壁などポリイミドが露出した部分はポリイミドが溶解するなどして損傷がはげしかった。
【0026】
【発明の効果】以上のように、本発明のプリント配線板製造において、孔の開口周辺や孔壁に飛び散ったスミアをオキシアルキルアミンおよびアルカリ金属化合物を含有する溶液によって除去することにより従来の過マンガン酸カリウムを用いたデスミア工程での銅層のはがれや従来デスミアしにくかったポリイミド系樹脂を用いた絶縁基板のデスミア処理が可能になった。
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for desmearing non-through holes and through holes formed in a printed wiring board.
[0002]
[Prior art]
2. Description of the Related Art In recent years, with the miniaturization, weight reduction, and enhancement of functions of electric devices, multilayer printed wiring boards have been developed. In order to manufacture multilayer printed wiring boards, drill holes, carbon dioxide gas lasers, UV lasers, etc. are used to drill non-through holes in the wiring board, and remove smear adhering to the periphery of the opening, the wall of the hole, and the bottom surface with permanganic acid. After removing by oxidizing with a salt solution and washing the inside of the hole, electroless plating and electrolytic plating are performed to establish connection between layers. (See, for example, Patent Document 1) or a technique for reducing the thickness of a conductor layer has been disclosed as a technique for responding to a higher density of a printed wiring board (see, for example, Patent Document 2).
In addition, there is an increasing demand for low dielectric constant and low dielectric loss tangent for printed wiring boards for higher functions and higher speeds, and conventional epoxy resins cannot meet these requirements. A printed wiring board using a polyimide resin having a low ratio for an insulating layer is disclosed (for example, see Patent Document 3).
[0003]
[Patent Document 1] JP-A-2002-217536
[0004]
[Patent Document 2] JP-A-11-240106
[0005]
[Patent Document 3] JP-A-2000-143734
[0006]
[Problems to be solved by the invention]
However, when processing a printed wiring board using a polyimide resin into a double-sided printed wiring board or a multilayer printed wiring board, in the desmear process of through holes and non-through holes, smear different from that of conventional epoxy resin adheres However, conventional desmear treatment using permanganate does not provide sufficient desmear effect, or excessively damaging the insulating resin if the treatment conditions are increased to obtain a sufficient desmear effect. was there.
In addition, thin conductor layers formed for high density, especially conductor layers formed by vapor deposition, sputtering, ion plating, etc., are affected by the strong oxidizing power of the conventional permanganate desmear solution. There has been a problem that cracks and pinholes occur in the conductor layer and the conductor layer peels off.
[0007]
[Means for Solving the Problems]
The present invention has been made in order to solve the above-mentioned problems, and an object thereof is to desmear a non-through hole or a through hole formed in a printed wiring board corresponding to a demand for high density and a low dielectric constant. The present invention provides a desmearing method for non-through holes and through holes in a printed wiring board, which does not cause a problem such as pattern peeling in a later manufacturing process of the printed wiring board. .
[0008]
BEST MODE FOR CARRYING OUT THE INVENTION
A first aspect of the present invention is a method for desmearing a through hole or a non-through hole formed in a conductor of an insulating substrate having a conductor on at least one surface, the method comprising: And desmearing a welding resin (smear) melt-adhered to the surface of a lower conductor layer using a solution containing an oxyalkylamine and an alkali metal compound. . By using the solution, the conductor layer can be desmeared efficiently without excessively damaging the resin layer.
[0009]
A second aspect of the present invention is a method for desmearing a through-hole or a non-through-hole of a printed wiring board, wherein the insulating substrate is mainly composed of a polyimide resin. The solution exhibits effective desmear performance against smear derived from a polyimide resin.
[0010]
A third aspect of the present invention is a desmearing method for a printed wiring board, wherein the oxyalkylamine is 2-ethanolamine. 2-Ethanolamine is easily available and exhibits stable desmear performance.
[0011]
A fourth aspect of the present invention is the desmearing method for a printed wiring board, wherein the alkali metal compound is potassium hydroxide or sodium hydroxide. Potassium hydroxide and sodium hydroxide are easy to obtain and handle, and solutions using them exhibit stable desmear performance.
[0012]
A fifth aspect of the present invention is a method for desmearing a through-hole or a non-through-hole of a printed wiring board, wherein the through-hole or the non-through-hole is formed by directly irradiating a conductor with a UV laser. It is. The UV laser is the most excellent in terms of the balance between high density of wiring boards and productivity.
[0013]
A sixth aspect of the present invention is a desmearing method for a through hole or a non-through hole of a printed wiring board, wherein a thickness of a conductor layer provided on at least the front and back of the insulating substrate is 1 μm or less. Since the solution of the present invention does not cause unnecessary damage to the conductor layer provided thinly for increasing the density of the printed wiring board, the effect of the present invention is particularly remarkable.
[0014]
【Example】
An embodiment of the present invention will be described.
The conductor and the insulating layer at desired positions on the insulating substrate having the conductor laminated on both surfaces of the insulating layer are removed to form through holes or non-through holes.
[0015]
Next, smear scattered around the opening of the hole or on the hole wall is removed by a solution containing an oxyalkylamine and an alkali metal compound. Thereafter, both surfaces are electrically connected by applying electroless conductor plating and electrolytic conductor plating to the entire laminate, and then a circuit is formed in the outer layer to obtain a non-through hole in the printed wiring board.
[0016]
As the resin for forming the insulating layer, a polyimide resin is preferable from the viewpoint of electrical insulation, dielectric properties, heat resistance, and the like. As the polyimide resin, a non-thermoplastic polyimide film such as Apical manufactured by Kaneka Chemical Industry Co., Ltd., a soluble polyimide resin in a solution state, or a thermoplastic polyimide resin can be used. These materials may be arbitrarily combined to form a mixture, a laminate, or the like, and an epoxy resin, a cyanate resin, or the like may be mixed in the polyimide resin. In addition, various surface treatments such as addition of an inorganic or organic filler and corona or plasma may be performed.
[0017]
As a method of forming a conductor layer on these insulating substrates, a method of bonding a non-thermoplastic polyimide film and a copper foil with a thermoplastic polyimide resin or the like as an adhesive layer, vapor deposition, sputtering, ion plating, etc. on the polyimide resin surface A method of forming a thin conductor layer by a method, a method of applying a polyimide resin in solution to a copper foil, and drying the same can be used.
[0018]
From the viewpoints of heat resistance, electrical insulation and the formation of a high-density pattern, a configuration in which a thin conductive layer is formed on a non-thermoplastic polyimide film by sputtering is most preferable. Alternatively, a non-thermoplastic polyimide film surface coated with a thermoplastic polyimide resin with excellent alkali resistance and a thin film conductor layer formed by sputtering also have excellent characteristics for the desmearing process and the electroless copper plating process. Demonstrate.
[0019]
As a method for forming a through hole or a non-through hole in the insulating substrate of the present invention, any known method can be applied. That is, a drill, a method of drilling a resin with a carbon dioxide laser after etching and removing a conductive layer, a method of simultaneously drilling a conductive layer and a resin layer with a UV laser, and the like are exemplified. Through holes and non-through holes formed by these methods are preferable because they are excellent in terms of hole shape and uniformity. In particular, a method using a UV laser is particularly preferable because a small-diameter hole can be formed. In these methods, smear adheres to the vicinity of an opening of a through hole or a non-through hole, a hole wall, a hole bottom, and the like, so that the effect of desmear according to the present invention is remarkable.
[0020]
Further, a multilayer printed wiring board in which a conductor layer is provided on one surface of an insulating substrate, and a laminate having an adhesive layer provided on the other surface is laminated on a printed wiring board on which a circuit is manufactured by a method such as press or lamination. Of course, it is also possible to desmear a through-hole or a non-through-hole formed for interlayer connection.
[0021]
The chemical solution used for desmear in the present invention is excellent in solubility of a polyimide resin and has a property of anisotropically eroding a polyimide film as disclosed in JP-A-10-97081. That is, the polyimide film is selectively dissolved in the thickness direction (Z direction) but not in the XY directions. Therefore, the pore wall can be cleaned without causing problems such as increasing the pore diameter as a desmear liquid, eroding the interface between the insulating resin and the conductor layer, and peeling the conductor layer.
[0022]
In particular, an aqueous solution composed of potassium hydroxide / ethanolamine / water is preferred in terms of economy, desmear characteristics, and the like. The concentration of potassium hydroxide is preferably from 10 to 50% by weight, and more preferably from 20 to 40% by weight. The concentration of ethanolamine is preferably from 10 to 90% by weight, more preferably from 40 to 70% by weight. The processing temperature can be up to about 20 to 80 ° C, but 20 to 50 ° C is more preferable from the viewpoint of processing stability and uniformity.
Hereinafter, the method of the present invention will be further described with reference to Examples and Comparative Examples.
[0023]
(Example 1) Through holes were formed by using a UV laser on an insulating substrate having copper formed on both sides of a polyimide film (Apical NPI, manufactured by Kanegabuchi Chemical Industry Co., Ltd., 25 μm thickness) by sputtering. Resin-like material was slightly deposited around the opening. This sample was immersed in a mixed solution of potassium hydroxide / ethanolamine / water at a weight ratio of 2/5/1 at 30 ° C. for 5 minutes, and sufficiently washed with water. As a result, resinous deposits around the opening were removed. . On the other hand, the copper sputter layer, the polyimide film layer, and the wall surfaces of the through holes were not damaged at all.
[0024]
(Example 2) A laminate in which copper was formed on one surface of a polyimide film (Apical NPI manufactured by Kaneka Chemical Industry Co., Ltd., 12.5 μm thickness) by sputtering, and a polyimide resin adhesive layer was formed on the other surface. After laminating on a BT resin substrate on which a circuit was formed, a non-through hole was formed using a UV laser. Resin-like material was slightly deposited around the opening. In addition, resin smear modified by laser energy adhered to the bottom of the non-through hole (the copper foil portion of the BT resin substrate was exposed). This sample was immersed in a mixed solution of potassium hydroxide / ethanolamine / water at a weight ratio of 2/5/1 at 30 ° C. for 5 minutes, and washed sufficiently with water to obtain resinous deposits around the opening and the bottom of the hole. The smear had been removed. On the other hand, the copper sputter layer, the polyimide film layer, and the non-through hole wall surface were not damaged at all.
[0025]
Comparative Example 1 A sample having the same through-hole as in Example 1 was immersed in a desmear solution of 50 g / l of potassium permanganate and 40 g / l of sodium hydroxide at 70 ° C. for 10 minutes. Cracks occurred in the copper sputtered film under the influence of strong oxidizing power, and one part of copper was peeled off. On the other hand, the deposits around the opening could not be sufficiently removed. In addition, the portions where the polyimide was exposed, such as the hole walls, were severely damaged due to the dissolution of the polyimide.
[0026]
As described above, in the production of the printed wiring board of the present invention, the smear scattered around the opening of the hole or the hole wall is removed by a solution containing an oxyalkylamine and an alkali metal compound. It has become possible to remove the copper layer in the desmear process using potassium manganate or to perform desmear treatment on an insulating substrate using a polyimide resin that has been conventionally difficult to be desmeared.

Claims (6)

少なくとも一方の面に導体を備えた絶縁基板の前記導体に穿設された貫通孔または非貫通孔へのデスミア方法であって、孔の開口周辺や導体層の孔壁面および下面導体層表面等に溶融付着した溶着樹脂あるいは樹脂分解物(スミア)をオキシアルキルアミンおよびアルカリ金属化合物を含有する溶液を用いてデスミアすることを特徴とするプリント配線板のデスミア方法。A desmear method for a through-hole or a non-through-hole formed in the conductor of an insulating substrate having a conductor on at least one surface, the method comprising: A desmearing method for a printed wiring board, which comprises desmearing a melt-adhered welding resin or a resin decomposition product (smear) using a solution containing an oxyalkylamine and an alkali metal compound. 請求項1記載の絶縁基板がポリイミド樹脂を主成分とすることを特徴とするプリント配線板のデスミア方法。A desmearing method for a printed wiring board, wherein the insulating substrate according to claim 1 is mainly composed of a polyimide resin. 請求項1記載のオキシアルキルアミンが2−エタノールアミンであることを特徴とする請求項1または2に記載のプリント配線板のデスミア方法。3. The desmearing method for a printed wiring board according to claim 1, wherein the oxyalkylamine according to claim 1 is 2-ethanolamine. 請求項1記載のアルカリ金属化合物が水酸化カリウムまたは水酸化ナトリウムであることを特徴とする請求項1から3のいずれかに記載のプリント配線板のデスミア方法。4. The desmearing method for a printed wiring board according to claim 1, wherein the alkali metal compound according to claim 1 is potassium hydroxide or sodium hydroxide. 貫通孔または非貫通孔が導体に直接UVレーザーを照射することによって穿説されたものであることを特徴とする請求項1から4のいずれかに記載のプリント配線板の貫通孔または非貫通孔へのデスミア方法。The through-hole or the non-through-hole of the printed wiring board according to any one of claims 1 to 4, wherein the through-hole or the non-through-hole is perforated by directly irradiating the conductor with a UV laser. Desmear way to. 前記絶縁基板の少なくとも表裏に設けられた導体層厚みがそれぞれ1μm以下であることを特徴とする請求項1から5のいずれかに記載のプリント配線板の貫通孔または非貫通孔へのデスミア方法。The method for desmearing a through hole or a non-through hole in a printed wiring board according to any one of claims 1 to 5, wherein the thickness of the conductor layers provided on at least the front and back surfaces of the insulating substrate is 1 µm or less.
JP2002308857A 2002-10-23 2002-10-23 Desmear method of printed circuit board Pending JP2004146533A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006050398A2 (en) * 2004-10-28 2006-05-11 Intel Corporation Assessing micro-via formation in a pcb substrate manufacturing process
WO2007060824A1 (en) * 2005-11-22 2007-05-31 Toray Engineering Co., Ltd. Etching solution for thermoplastic polyimide resin
CN117412496A (en) * 2023-11-08 2024-01-16 安徽省鹏捷智能科技有限公司 Gumming residue removing device for high-density printed circuit board processing

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006050398A2 (en) * 2004-10-28 2006-05-11 Intel Corporation Assessing micro-via formation in a pcb substrate manufacturing process
WO2006050398A3 (en) * 2004-10-28 2006-08-03 Intel Corp Assessing micro-via formation in a pcb substrate manufacturing process
WO2007060824A1 (en) * 2005-11-22 2007-05-31 Toray Engineering Co., Ltd. Etching solution for thermoplastic polyimide resin
JPWO2007060824A1 (en) * 2005-11-22 2009-05-07 東レエンジニアリング株式会社 Etching solution for thermoplastic polyimide resin
CN117412496A (en) * 2023-11-08 2024-01-16 安徽省鹏捷智能科技有限公司 Gumming residue removing device for high-density printed circuit board processing

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