JP2003002756A - Method for producing fiber reinforced ceramics member - Google Patents
Method for producing fiber reinforced ceramics memberInfo
- Publication number
- JP2003002756A JP2003002756A JP2001191705A JP2001191705A JP2003002756A JP 2003002756 A JP2003002756 A JP 2003002756A JP 2001191705 A JP2001191705 A JP 2001191705A JP 2001191705 A JP2001191705 A JP 2001191705A JP 2003002756 A JP2003002756 A JP 2003002756A
- Authority
- JP
- Japan
- Prior art keywords
- fiber
- vapor deposition
- reinforced ceramic
- heat
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Chemical Or Physical Treatment Of Fibers (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、気相蒸着法によ
り繊維強化セラミックス部材を製造する方法に関するも
のである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a fiber reinforced ceramic member by a vapor deposition method.
【０００２】[0002]
【従来の技術】従来は、蒸着装置の内部或いは外部に設
置した抵抗発熱体に通電して発熱させ、前記蒸着装置内
に収容されている耐熱繊維製の繊維成型体を間接的に蒸
着温度に加熱するとともに、蒸着装置内に原料ガスを供
給して耐熱繊維製の繊維成型体の表面へセラミックスを
析出させていた。2. Description of the Related Art Conventionally, a resistance heating element installed inside or outside a vapor deposition apparatus is energized to generate heat, and a fiber molding made of heat-resistant fibers contained in the vapor deposition apparatus is indirectly heated to a vapor deposition temperature. While heating, the raw material gas was supplied into the vapor deposition device to deposit the ceramics on the surface of the fiber molded body made of the heat resistant fiber.
【０００３】[0003]
【発明が解決しようとする課題】しかし、従来の方法
は、蒸着装置内に設置されている色々な構成部材も加熱
するために、大電力を必要とし、使用電力費が高くな
る。また、蒸着温度までの昇温および内容物（被処理
物）が取り出せる温度に降温するまでに長時間を要する
ために、蒸着装置の稼働率が低く、装置の使用コストが
高くなった。However, the conventional method requires a large amount of power in order to heat various components installed in the vapor deposition apparatus, resulting in high power consumption. Further, since it takes a long time to elevate the temperature to the vapor deposition temperature and lower the temperature to a temperature at which the content (object to be processed) can be taken out, the operation rate of the vapor deposition apparatus is low and the cost of using the apparatus is high.
【０００４】従って、従来の方法で製造された繊維強化
セラミックス部材は、高価なものとなり、種々の用途へ
の普及が遅れる要因の一つになっている。Therefore, the fiber-reinforced ceramic member manufactured by the conventional method becomes expensive, which is one of the factors that delay its widespread use in various applications.
【０００５】この発明は、このような従来の技術の問題
に鑑みてなされたものであり、その目的とするところ
は、使用電力の低減、および蒸着装置の稼働率の向上を
計ることができる繊維強化セラミックス部材の製造方法
を提供することにある。The present invention has been made in view of the problems of the prior art described above, and an object of the present invention is to reduce the power consumption and improve the operating rate of the vapor deposition apparatus. It is to provide a method for manufacturing a reinforced ceramic member.
【０００６】[0006]
【課題を解決するための手段】上記の課題を解決するた
め、この発明は、次のように構成されている。In order to solve the above problems, the present invention is configured as follows.
【０００７】すなわち、（１） 蒸着装置内に収容さ
れ、通電により発熱する耐熱繊維製の不織布又は織布か
ら成る部材へ直接通電して該部材を析出物質の蒸着温度
に加熱するとともに、前記蒸着装置内に原料ガスを供給
し、前記部材を構成している繊維の表面へ、気相蒸着法
により被覆材を析出させることを特徴とする繊維強化セ
ラミックス部材の製造方法。That is, (1) a member made of a heat-resistant fiber non-woven fabric or a woven fabric which is housed in a vapor deposition apparatus and generates heat when energized is directly energized to heat the member to the vapor deposition temperature of the deposited substance, and the vapor deposition is performed. A method for producing a fiber-reinforced ceramic member, which comprises supplying a raw material gas into an apparatus and depositing a coating material on the surface of fibers constituting the member by a vapor deposition method.
【０００８】（２） 前記部材の端部を、被覆材の蒸着
条件下で使用可能な電極で挟持し、該電極を前記部材の
端部に圧着して通電することを特徴とする（１）記載の
繊維強化セラミックス部材の製造方法。(2) An end of the member is sandwiched by electrodes that can be used under the vapor deposition condition of the coating material, and the electrode is pressure-bonded to the end of the member to conduct electricity. A method for producing the fiber-reinforced ceramic member as described.
【０００９】（３） 前記部材と、該部材の端部へ圧着
する電極との界面へ導電性物質を介在させて通電するこ
とを特徴とする（１）又は（２）記載の繊維強化セラミ
ックス部材の製造方法。(3) The fiber-reinforced ceramic member according to (1) or (2), characterized in that the interface between the member and the electrode that is crimped to the end of the member is energized by interposing a conductive substance. Manufacturing method.
【００１０】（４） 前記部材に張力を作用させた状態
で被覆材を析出させることを特徴とする（１）、（２）
又は（３）記載の繊維強化セラミックス部材の製造方
法。(4) The coating material is deposited while tension is applied to the member (1), (2)
Alternatively, the method for producing a fiber-reinforced ceramic member according to (3).
【００１１】（５） 前記部材の周縁部を非導電性の枠
で挟み込んで固定し、前記枠の外に出ている前記部材よ
り通電することを特徴とする（１）、（２）、（３）又
は（４）記載の繊維強化セラミックス部材の製造方法。(5) A peripheral portion of the member is sandwiched and fixed by a non-conductive frame, and electricity is supplied from the member outside the frame (1), (2), ( 3) The method for producing a fiber-reinforced ceramic member according to 4).
【００１２】（６） 前記部材の周縁部を導電性の枠で
挟み込んで固定するとともに、前記枠と前記部材との間
に非導電性の絶縁材料を介在させ、前記枠の外に出てい
る前記部材より通電することを特徴とする（１）、
（２）、（３）又は（４）記載の繊維強化セラミックス
部材の製造方法。(6) The peripheral portion of the member is sandwiched and fixed by a conductive frame, and a non-conductive insulating material is interposed between the frame and the member so that the member is exposed to the outside of the frame. (1) characterized by being energized from the member,
The method for producing a fiber-reinforced ceramic member according to (2), (3) or (4).
【００１３】（７） 前記部材と該部材に圧着させる電
極との境界部へ、粒子状物質を付着させることを特徴と
する（１）、（２）、（３）、（４）、（５）又は
（６）記載の繊維強化セラミックス部材の製造方法。(7) The particulate matter is adhered to the boundary between the member and the electrode to be pressure-bonded to the member (1), (2), (3), (4), (5). ) Or (6), the method for producing a fiber-reinforced ceramic member.
【００１４】ここで、耐熱繊維としては、炭化珪素繊
維、炭素繊維などの繊維で、交流電力或いは直流電力を
供給することにより発熱し、気相蒸着法により被覆材を
析出させる温度にまで加熱することが可能なものであれ
ばよい。また、繊維の形態としては、連続繊維から構成
される織布、或いはペーパ、マット、フエルトなどの不
織布が使用できる。Here, the heat-resistant fiber is a fiber such as silicon carbide fiber or carbon fiber, which is heated by supplying AC power or DC power, and is heated to a temperature at which the coating material is deposited by the vapor deposition method. Anything is possible as long as it is possible. Further, as the form of the fiber, a woven fabric composed of continuous fibers or a non-woven fabric such as paper, mat or felt can be used.
【００１５】また、耐熱繊維製の部材の端部へ圧着する
電極材としては、黒鉛、タングステン、モリブデンなど
の耐熱性に優れ、且つ、耐食性が優れている材料が好ま
しい。Further, as the electrode material to be pressure-bonded to the end portion of the heat resistant fiber member, a material having excellent heat resistance and excellent corrosion resistance such as graphite, tungsten and molybdenum is preferable.
【００１６】また、耐熱繊維製の部材と、該部材の端部
へ圧着する電極との界面へ介在させる導電性物質として
は、黒鉛粉末、銀粉末、タングステン粉末などの耐熱・
耐食性に優れている粉末、或いはこれらの粉末をペース
ト状にしたものなどが好ましい。Further, as the conductive substance to be interposed at the interface between the member made of heat resistant fiber and the electrode crimped to the end of the member, heat resistant materials such as graphite powder, silver powder and tungsten powder can be used.
Powders having excellent corrosion resistance, or pastes of these powders are preferable.
【００１７】また、耐熱繊維製の部材の周縁部を挟み込
む非導電性の枠の材料としては、ムライト、アルミナ、
窒化珪素などの耐熱・耐食性に優れているセラミックス
が好ましい。The material of the non-conductive frame for sandwiching the peripheral portion of the heat resistant fiber member is mullite, alumina,
Ceramics having excellent heat resistance and corrosion resistance such as silicon nitride are preferable.
【００１８】また、耐熱繊維製の部材の周縁部と導電性
の枠との間に介在させる非導電性の絶縁材料としては、
アルミナ・シリカ繊維のペーパ、ジルコニアペーパなど
の耐熱・耐食性に優れているセラミックスペーパが好ま
しい。As the non-conductive insulating material to be interposed between the peripheral edge of the heat resistant fiber member and the conductive frame,
Ceramic paper having excellent heat resistance and corrosion resistance such as alumina / silica fiber paper and zirconia paper is preferable.
【００１９】また、耐熱繊維製の部材と、該部材に圧着
させる電極との境界部へ付着させる粒子状物質として
は、黒鉛、タングステン、モリブデン、アルミナ、ムラ
イトなどの耐熱性に優れ、且つ、耐食性が優れている材
料が好ましい。Further, as the particulate matter attached to the boundary between the member made of heat-resistant fiber and the electrode to be pressure-bonded to the member, graphite, tungsten, molybdenum, alumina, mullite, etc. are excellent in heat resistance and corrosion resistance. Are preferred.
【００２０】また、耐熱繊維製の部材に引張り力を作用
させる方法としては、前記部材に対向する両端部に圧着
した電極間に長さが調整できる棒体を挿入し、前記部材
に所定の引張り力を作用させる方法、或いは、両端部の
電極に重錘を吊るす方法などが好ましい。As a method of applying a pulling force to a member made of heat-resistant fiber, a rod body whose length can be adjusted is inserted between electrodes crimped to both ends facing the member, and a predetermined pulling force is applied to the member. A method of applying a force or a method of suspending a weight on the electrodes at both ends is preferable.
【００２１】[0021]
【発明の実施の形態】以下、この発明の実施の形態を図
面を用いて説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.
【００２２】図１及び図２において、１は、蒸着装置で
あり、該蒸着装置１は、上部容器１ａと下部容器１ｂか
ら構成されている。２は、蒸着装置１の内面に装着させ
た断熱材、３ａは、原料ガスｇの供給ノズル、３ｂは、
余分な原料ガスｇ及び生成ガスｇ′の排出ノズル、４及
び４は、断熱材２の上に設置させた一対の支持台、５
は、炭化珪素繊維の不織布を成型して製造した板状の基
材（以下、基材と称する）、６ａ及び６ｂは、基材５の
周縁部を支持する額縁形状の一対の枠、７ａ及び７ｂ
は、基材５の両端部の両面に圧着させた電極、１２ａ及
び１２ｂは、電極７ａ，７ｂへ電力を供給する電極棒で
ある。In FIGS. 1 and 2, reference numeral 1 is a vapor deposition apparatus, and the vapor deposition apparatus 1 is composed of an upper container 1a and a lower container 1b. 2 is a heat insulating material attached to the inner surface of the vapor deposition device 1, 3a is a supply nozzle for the raw material gas g, 3b is
Exhaust nozzles 4 and 4 for discharging the extra raw material gas g and the generated gas g ′ are a pair of support bases 5 installed on the heat insulating material 2.
Is a plate-shaped base material (hereinafter referred to as a base material) manufactured by molding a non-woven fabric of silicon carbide fibers, 6a and 6b are a pair of frame-shaped frames for supporting the peripheral edge portion of the base material 5, 7a and 7b
Is an electrode that is pressure-bonded to both sides of the base material 5, and 12a and 12b are electrode rods that supply electric power to the electrodes 7a and 7b.
【００２３】そして、電極棒１２ａ，１２ｂ及び電極７
ａ，７ｂから基材５に電力を供給し、蒸着用基材５を蒸
着温度まで加熱保持するようになっている。一方、原料
ガスｇをノズル３ａから蒸着装置１内へ供給して基材５
の繊維表面へ所定の膜厚の被膜を析出させ、余分な原料
ガスｇ及び生成ガスｇ′は、排ガスノズル３ｂから真空
ポンプ（図示せず）で排出されるようになっている。Then, the electrode rods 12a and 12b and the electrode 7
Power is supplied to the substrate 5 from a and 7b, and the substrate 5 for vapor deposition is heated and held up to the vapor deposition temperature. On the other hand, the raw material gas g is supplied from the nozzle 3a into the vapor deposition device 1 to supply the base material 5
A film having a predetermined film thickness is deposited on the surface of the fiber, and the excess source gas g and the generated gas g'are discharged from the exhaust gas nozzle 3b by a vacuum pump (not shown).
【００２４】上記のように、基材５の周縁部は、額縁形
状の非導電性の２枚の枠６ａ，６ｂによって挟まれ、こ
れらの枠６ａ，６ｂは、図示されていないボルト・ナッ
トによって基材５に圧着され、基材５の平面性を保持す
るようになっている。基材５の両端部には、黒鉛粉末８
を介して電極７ａ，７ｂが設置されており、これらの電
極７ａ，７ｂは、図示されていないクランプで基材５に
圧着されている。As described above, the peripheral portion of the base material 5 is sandwiched between the two frame-shaped non-conductive frames 6a and 6b, and these frames 6a and 6b are formed by bolts and nuts (not shown). The base material 5 is pressure bonded to the base material 5 so that the flatness of the base material 5 is maintained. Graphite powder 8 is provided on both ends of the base material 5.
The electrodes 7a and 7b are installed via the electrodes, and these electrodes 7a and 7b are pressure-bonded to the base material 5 by a clamp (not shown).
【００２５】図３に示すように、基材５と一対の電極７
ａ（電極７ｂ）との境界部に黒鉛粒子９が圧密すること
により付着されている。As shown in FIG. 3, the base material 5 and the pair of electrodes 7 are provided.
Graphite particles 9 are adhered to the boundary with a (electrode 7b) by being compacted.
【００２６】上記のように、基材５の両端部には、図示
されていないクランプにより電極７ａ，７ｂが圧着され
ているが、これらの電極７ａ，７ｂ間には、図４に示す
ように、基材５に引張り力を付加するためのムライト製
のボルト部材１０，１０が設けられている。各ボルト部
材１０は、メネジ部１０ａに、オネジ部１０ｂが取り付
けらており、オネジ部１０ｂをメネジ部１０ａへねじ込
み、そのねじ込み長さを調整することによって基材５に
引張り力を付加できるようになっている。As described above, the electrodes 7a and 7b are pressure-bonded to the both ends of the base material 5 by the clamps (not shown), but between the electrodes 7a and 7b, as shown in FIG. Bolt members 10, 10 made of mullite for applying a tensile force to the base material 5 are provided. Each bolt member 10 has a male screw portion 10a attached to a female screw portion 10a. The male screw portion 10b is screwed into the female screw portion 10a, and a tensile force can be applied to the base material 5 by adjusting the screwing length. Has become.
【００２７】図５は、上記以外の引張り力付加装置を示
しており、炭化珪素繊維の朱子織布（基材）５の両端部
に電極７ａ，７ｂが圧着されており、この状態で朱子織
布５を、一対の円形断面の支持部材１１ａ，１１ｂの上
に設置し、電極７ａ，７ｂの重さによって朱子織布５に
引張り力が付加されている。FIG. 5 shows a tensile force applying device other than the above, in which electrodes 7a and 7b are pressure-bonded to both ends of a satin woven cloth (base material) 5 of silicon carbide fiber. The cloth 5 is placed on the pair of support members 11a and 11b having a circular cross section, and a tensile force is applied to the satin woven cloth 5 by the weight of the electrodes 7a and 7b.
【００２８】次に、上記蒸着装置の作用について説明す
る。Next, the operation of the vapor deposition device will be described.
【００２９】図１において、板状の基材５に電極７ａ，
７ｂを介して電力を供給すると、板状の基材５が所定の
温度に加熱される。そこで、ガス供給ノズル３ａから蒸
着装置１内へ原料ガスｇを供給すると、前記基材５を構
成している繊維の表面に所定の膜厚の被膜が析出し、余
分な原料ガスｇ及び生成ガスｇ′は、排ガスノズル３ｂ
から図示しない真空ポンプによって排出される。In FIG. 1, the electrodes 7a,
When electric power is supplied via 7b, the plate-shaped substrate 5 is heated to a predetermined temperature. Therefore, when the raw material gas g is supplied from the gas supply nozzle 3a into the vapor deposition apparatus 1, a film having a predetermined film thickness is deposited on the surface of the fibers forming the base material 5, and the extra raw material gas g and the generated gas are generated. g'is the exhaust gas nozzle 3b
Is discharged by a vacuum pump (not shown).
【００３０】上記のように、この発明は、基材５へ直接
通電し、基材５自体を直接加熱し、蒸着装置１の内部に
設置されている断熱材２や支持台４などの付帯設備を加
熱する必要がないので、基材５を蒸着温度に昇温保持す
るために要する電力が少なくなる。また、昇温及び降温
に要する時間が短時間であるため、蒸着装置１の稼働率
が向上する。As described above, according to the present invention, the base material 5 is directly energized to directly heat the base material 5 itself, and the auxiliary equipment such as the heat insulating material 2 and the support base 4 installed inside the vapor deposition apparatus 1 is installed. Since it is not necessary to heat the substrate, the power required to maintain the substrate 5 at the vapor deposition temperature is reduced. Further, since the time required for raising and lowering the temperature is short, the operation rate of the vapor deposition device 1 is improved.
【００３１】従って、気相蒸着法による繊維強化セラミ
ックス部材を低コストで製造することができる。また、
電極７ａ，７ｂと基材５との界面には、導電性の物質が
介在しているので、基材５と電極７ａ，７ｂとの間の接
触抵抗が小さい。Therefore, the fiber reinforced ceramic member can be manufactured at low cost by the vapor deposition method. Also,
Since a conductive substance is present at the interface between the electrodes 7a, 7b and the base material 5, the contact resistance between the base material 5 and the electrodes 7a, 7b is small.
【００３２】また、基材５と電極７ａ，７ｂとの境界部
に粒子を付着させているので、電極７ａ，７ｂと基材５
との境界面に存在する空隙に被覆材が析出するのを防ぐ
ことができる。その結果、電極７ａ，７ｂと基材５との
接触抵抗の増大を防止でき、蒸着に要する電力の増大を
防ぐことができる。Further, since particles are attached to the boundaries between the base material 5 and the electrodes 7a, 7b, the electrodes 7a, 7b and the base material 5 are
It is possible to prevent the coating material from precipitating in the voids existing on the boundary surface of the. As a result, it is possible to prevent an increase in contact resistance between the electrodes 7a and 7b and the base material 5, and prevent an increase in power required for vapor deposition.
【００３３】また、基材５に引張力が付加されているの
で、蒸着による基材５の変形を防ぐことができる。な
お、部材の形状は、平板のみならず、波板形状、あるい
は管状部材でもよい。また、基材５は、濾過材へ適用す
ることができる。Further, since a tensile force is applied to the base material 5, it is possible to prevent the base material 5 from being deformed by vapor deposition. The shape of the member is not limited to a flat plate, and may be a corrugated plate shape or a tubular member. Moreover, the base material 5 can be applied to a filtering material.
【００３４】次に、この発明を実施例により更に詳しく
説明する。Next, the present invention will be described in more detail with reference to examples.
【００３５】[0035]
【実施例】（実施例）
（１）薄板の成型・蒸着
（イ）ＳｉＣ（チラノＬｏｘＭ（繊維径１１μｍ））の
平織布（目付重量１５０ｇ／ｍ2 ）に下記の繊維結合剤
を含浸
・繊維結合剤：四塩化炭素で希釈したフェノール樹脂
（重量濃度２０％）
（ロ）上記（イ）の薄板１枚で大きさ１００ｍｍ×２０
００ｍｍ、厚さ０．３ｍｍの板を成型
（ハ）離型布・余分の樹脂を含浸するための綿状布を表
面へ張り付け、プラスチックフィルムで覆い、オートク
レープ中で樹脂を硬化
（ニ）上記成型品を、８００℃のアルゴンガス中で無機
化
（ホ）無機化後の板を厚さ０．５ｍｍのアルミナ・シリ
カ繊維製ペーパを介して、黒鉛製の枠に挟み、ボルト・
ナットで圧着
（ヘ）黒鉛製の枠の外にはみ出させた薄板両端部に、 黒
鉛粉末を介在させてモリブデン製の電極をクランプで圧
着
（ト）電極にモリブデン製の電力供給棒を接続
（チ）上述の基材を４０組蒸着装置内へ設置
（リ）ＣＶＤ法（化学気相蒸着法）によりＳｉＣをコー
ティング（平織布の表面の５０カ所での平均膜厚１０μ
ｍ）
（２）製造コスト
比較例におけるコストを１とした時の比で示す。Examples (Example) (1) Molding and vapor deposition of thin plate (a) Impregnation of the following fiber binder into a plain woven cloth (weight per unit area weight 150 g / m 2 ) of SiC (Tyranno LoxM (fiber diameter 11 μm)) Fiber binder: Phenolic resin diluted with carbon tetrachloride (weight concentration 20%) (b) One thin plate of (a) above, size 100 mm x 20
A plate of 00 mm and a thickness of 0.3 mm is molded (c) Release cloth ・ A cotton-like cloth for impregnating excess resin is attached to the surface, covered with a plastic film, and the resin is cured in an autoclave (d) Above The molded product is mineralized in argon gas at 800 ° C. (e) The plate after mineralization is sandwiched with a 0.5 mm-thick alumina / silica fiber paper in a graphite frame and bolted.
Crimping with nuts (f) Crimping molybdenum electrodes with graphite powder on both ends of the thin plate protruding to the outside of the graphite frame, and connecting a molybdenum power supply rod to the crimping (g) electrodes. ) 40 sets of the above-mentioned base materials are installed in a vapor deposition apparatus (i) SiC is coated by the CVD method (chemical vapor deposition method) (average film thickness at 50 points on the surface of a plain woven fabric is 10μ)
m) (2) Manufacturing cost It is shown as a ratio when the cost in the comparative example is 1.
【００３６】（イ）電力：０．０８
（ロ）稼働率：３
（ハ）製造原価：０．２８
（比較例）
（１）基 材：上記実施例と同一材質、同一寸法、同一
処理枚数
（２）蒸 着：上記実施例と同一条件
（３）処理装置：黒鉛ヒータを使用した間接加熱方式の
蒸着装置(A) Electric power: 0.08 (b) Operating rate: 3 (c) Manufacturing cost: 0.28 (Comparative example) (1) Base material: same material, same size, same number of processed sheets as the above embodiment (2) Evaporation: Same conditions as in the above embodiment (3) Treatment device: Indirect heating type vapor deposition device using graphite heater
【００３７】[0037]
【発明の効果】上記のように、本発明の気相蒸着法によ
る繊維強化セラミックス部材の製造方法によれば、従来
より少ない電力で耐熱繊維への蒸着が可能である。ま
た、従来に比べて蒸着装置の稼働率が高いので、低コス
トで繊維強化セラミックス部材を製造することができ
る。As described above, according to the method for producing a fiber-reinforced ceramic member by the vapor phase vapor deposition method of the present invention, vapor deposition on heat-resistant fibers can be performed with less electric power than before. In addition, since the operation rate of the vapor deposition apparatus is higher than in the conventional case, the fiber-reinforced ceramic member can be manufactured at low cost.
【図１】本発明の方法を実施する蒸着装置の概略図であ
る。FIG. 1 is a schematic view of a vapor deposition apparatus for carrying out the method of the present invention.
【図２】基材の枠及び電極の取り付け方法を示す概略図
である。FIG. 2 is a schematic view showing a method of attaching a frame of a base material and electrodes.
【図３】図２の電極部の詳細図である。FIG. 3 is a detailed view of an electrode unit of FIG.
【図４】基材に引張り力を付加する方法を示す概略図で
ある。FIG. 4 is a schematic view showing a method for applying a tensile force to a base material.
【図５】基材に引張り力を付加する別の方法を示す概略
図である。FIG. 5 is a schematic view showing another method of applying a tensile force to a substrate.
ｇ 原料ガス ｇ′生成ガス １ 蒸着装置 ３ａ 原料ガス供給ノズル ３ｂ 原料ガス排出ノズル ４ 支持台 ５ 基板 ６ 蒸着用の枠 ７ 電極 ８ 導電性物質 ９ 粒子状物質 １０ 引張り力付加用部材 １１ 支持部材 １２ 電力供給部材 g Raw material gas g'produced gas 1 Vapor deposition equipment 3a Raw material gas supply nozzle 3b Raw material gas discharge nozzle 4 support 5 substrates 6 Frame for vapor deposition 7 electrodes 8 Conductive substance 9 Particulate matter 10 Tensile force application member 11 Support member 12 Power supply member
Claims (7)
する耐熱繊維製の不織布又は織布から成る部材へ直接通
電して該部材を析出物質の蒸着温度に加熱するととも
に、前記蒸着装置内に原料ガスを供給し、前記部材を構
成している繊維の表面へ、気相蒸着法により被覆材を析
出させることを特徴とする繊維強化セラミックス部材の
製造方法。1. A member, which is housed in a vapor deposition apparatus and is made of heat-resistant fiber non-woven fabric or woven cloth, which generates heat when energized, is directly energized to heat the member to the vapor deposition temperature of the deposited substance, A method for producing a fiber-reinforced ceramic member, which comprises supplying a raw material gas and depositing a coating material on the surface of fibers constituting the member by a vapor deposition method.
で使用可能な電極で挟持し、該電極を前記部材の端部に
圧着して通電することを特徴とする請求項１記載の繊維
強化セラミックス部材の製造方法。2. The end portion of the member is sandwiched by electrodes that can be used under the vapor deposition condition of the coating material, and the electrode is pressure-bonded to the end portion of the member to conduct electricity. For manufacturing a fiber-reinforced ceramic member of.
極との界面へ導電性物質を介在させて通電することを特
徴とする請求項１又は２記載の繊維強化セラミックス部
材の製造方法。3. The method for producing a fiber-reinforced ceramic member according to claim 1, wherein the interface between the member and an electrode that is crimped to the end of the member is energized with a conductive substance interposed. .
材を析出させることを特徴とする請求項１、２又は３記
載の繊維強化セラミックス部材の製造方法。4. The method for producing a fiber-reinforced ceramic member according to claim 1, wherein the coating material is deposited in a state where tension is applied to the member.
込んで固定し、前記枠の外に出ている前記部材より通電
することを特徴とする請求項１、２、３又は４記載の繊
維強化セラミックス部材の製造方法。5. A peripheral portion of the member is sandwiched and fixed by a non-conductive frame, and electricity is supplied from the member outside the frame. For manufacturing a fiber-reinforced ceramic member of.
んで固定するとともに、前記枠と前記部材との間に非導
電性の絶縁材料を介在させ、前記枠の外に出ている前記
部材より通電することを特徴とする請求項１、２、３又
は４記載の繊維強化セラミックス部材の製造方法。6. The peripheral portion of the member is sandwiched and fixed by a conductive frame, and a non-conductive insulating material is interposed between the frame and the member, and the member is exposed outside the frame. The method for producing a fiber-reinforced ceramics member according to claim 1, 2, 3 or 4, wherein electricity is applied from the member.
境界部へ、粒子状物質を付着させることを特徴とする請
求項１、２、３、４、５又は６記載の繊維強化セラミッ
クス部材の製造方法。7. The fiber-reinforced ceramic member according to claim 1, wherein the particulate matter is attached to a boundary portion between the member and an electrode to be pressure-bonded to the member. Manufacturing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001191705A JP2003002756A (en) | 2001-06-25 | 2001-06-25 | Method for producing fiber reinforced ceramics member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001191705A JP2003002756A (en) | 2001-06-25 | 2001-06-25 | Method for producing fiber reinforced ceramics member |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003002756A true JP2003002756A (en) | 2003-01-08 |
Family
ID=19030288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001191705A Pending JP2003002756A (en) | 2001-06-25 | 2001-06-25 | Method for producing fiber reinforced ceramics member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003002756A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013035747A (en) * | 2011-08-04 | 2013-02-21 | Commissariat A L'energie Atomique & Aux Energies Alternatives | Improved method for producing tubular geometry part made from ceramic matrix composite material |
| CN109279908A (en) * | 2018-10-30 | 2019-01-29 | 中南大学 | A kind of fixture preparing ultra-thin carbon/carbon compound material panel |
| KR20220040991A (en) * | 2020-09-24 | 2022-03-31 | 가부시키가이샤 스크린 홀딩스 | Substrate treating apparatus and insulation member |
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|---|---|---|---|---|
| JPS536299A (en) * | 1976-07-07 | 1978-01-20 | Hitachi Ltd | Production of silicon nitride |
| JPS62182179A (en) * | 1986-02-06 | 1987-08-10 | 東芝セラミツクス株式会社 | Method of coating non-metal heater |
| JPH0492860A (en) * | 1990-08-07 | 1992-03-25 | Nippon Oil Co Ltd | Production of fiber-reinforced ceramic composite material |
| JPH06218278A (en) * | 1992-10-09 | 1994-08-09 | Avco Corp | Method and apparatus for densifying porous billet |
-
2001
- 2001-06-25 JP JP2001191705A patent/JP2003002756A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS536299A (en) * | 1976-07-07 | 1978-01-20 | Hitachi Ltd | Production of silicon nitride |
| JPS62182179A (en) * | 1986-02-06 | 1987-08-10 | 東芝セラミツクス株式会社 | Method of coating non-metal heater |
| JPH0492860A (en) * | 1990-08-07 | 1992-03-25 | Nippon Oil Co Ltd | Production of fiber-reinforced ceramic composite material |
| JPH06218278A (en) * | 1992-10-09 | 1994-08-09 | Avco Corp | Method and apparatus for densifying porous billet |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013035747A (en) * | 2011-08-04 | 2013-02-21 | Commissariat A L'energie Atomique & Aux Energies Alternatives | Improved method for producing tubular geometry part made from ceramic matrix composite material |
| CN109279908A (en) * | 2018-10-30 | 2019-01-29 | 中南大学 | A kind of fixture preparing ultra-thin carbon/carbon compound material panel |
| KR20220040991A (en) * | 2020-09-24 | 2022-03-31 | 가부시키가이샤 스크린 홀딩스 | Substrate treating apparatus and insulation member |
| KR102670745B1 (en) | 2020-09-24 | 2024-05-30 | 가부시키가이샤 스크린 홀딩스 | Substrate treating apparatus and insulation member |
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