JP2002206914A5 - - Google Patents
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- Publication number
- JP2002206914A5 JP2002206914A5 JP2001003635A JP2001003635A JP2002206914A5 JP 2002206914 A5 JP2002206914 A5 JP 2002206914A5 JP 2001003635 A JP2001003635 A JP 2001003635A JP 2001003635 A JP2001003635 A JP 2001003635A JP 2002206914 A5 JP2002206914 A5 JP 2002206914A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001003635A JP4583611B2 (ja) | 2001-01-11 | 2001-01-11 | 斜入射干渉計装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001003635A JP4583611B2 (ja) | 2001-01-11 | 2001-01-11 | 斜入射干渉計装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002206914A JP2002206914A (ja) | 2002-07-26 |
| JP2002206914A5 true JP2002206914A5 (ja) | 2007-12-06 |
| JP4583611B2 JP4583611B2 (ja) | 2010-11-17 |
Family
ID=18871951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001003635A Expired - Fee Related JP4583611B2 (ja) | 2001-01-11 | 2001-01-11 | 斜入射干渉計装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4583611B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7276987B2 (ja) | 2017-06-06 | 2023-05-18 | アールディー シナジー リミテッド | ホログラフィ干渉測定分野の方法およびシステム |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE421716T1 (de) * | 2003-09-15 | 2009-02-15 | Zygo Corp | Oberflächen-triangulation und -profilierung |
| JP5137526B2 (ja) * | 2006-12-22 | 2013-02-06 | キヤノン株式会社 | 形状測定装置、形状測定方法、および露光装置 |
| US7684050B2 (en) * | 2006-12-22 | 2010-03-23 | Canon Kabushiki Kaisha | Shape measuring apparatus, shape measuring method, and exposure apparatus |
| JP4810693B2 (ja) * | 2007-02-09 | 2011-11-09 | 富士フイルム株式会社 | 光波干渉測定装置 |
| US11892292B2 (en) | 2017-06-06 | 2024-02-06 | RD Synergy Ltd. | Methods and systems of holographic interferometry |
| US11719531B2 (en) | 2018-10-30 | 2023-08-08 | RD Synergy Ltd. | Methods and systems of holographic interferometry |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57182604A (en) * | 1981-05-07 | 1982-11-10 | Canon Inc | Interference measuring device |
| JPH0617787B2 (ja) * | 1987-09-04 | 1994-03-09 | 株式会社溝尻光学工業所 | 平面度測定用干渉計 |
| JP3436407B2 (ja) * | 1994-03-24 | 2003-08-11 | 富士写真光機株式会社 | 斜入射干渉計装置 |
| JP2000105113A (ja) * | 1998-09-29 | 2000-04-11 | Fuji Photo Optical Co Ltd | 斜入射干渉計装置 |
| JP2000105114A (ja) * | 1998-09-29 | 2000-04-11 | Fuji Photo Optical Co Ltd | 斜入射干渉計装置 |
-
2001
- 2001-01-11 JP JP2001003635A patent/JP4583611B2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7276987B2 (ja) | 2017-06-06 | 2023-05-18 | アールディー シナジー リミテッド | ホログラフィ干渉測定分野の方法およびシステム |