JP2002182479A - Liquid developing method or printing circuit board and liquid developing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid developing method and a liquid developing device by which a stable toner image is obtained by making a difference between the surface potential of an unexposed part and that of an exposed part (a potential gap) at the time of supplying a body to be developed to which an image pattern is exposed to a liquid developing process constant by controlling time required for the body to be developed to pass through an electrification process and the liquid development process by an electrophotographic method when a printed circuit board using a photomemory photosensitive layer is manufactured. SOLUTION: Control is performed for the time required to supply the printed circuit board to the liquid developing process after an electrifying means to electrify the photomemory photosensitive layer surface of the body to be developed passes through the electrification process by the liquid developing device provided nearly just before a developing electrode at the liquid developing device by the electrophotographic method.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明の属する技術分野】本発明は、フォトメモリー性
感光層を利用したプリント配線板の製造に関し、より詳
しくは、画像パターン露光によりフォトメモリー性感光
層に画像に応じた帯電特性の差を誘起させた被現像体
の、該フォトメモリー性感光層表面を帯電し静電潜像を
形成させる帯電行程と、電子写真法によりフォトメモリ
ー性感光層上にトナー画像を形成させる液体現像行程と
の間の時間を制御することを特徴とするプリント配線板
の液体現像方法及び液体現像装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the production of a printed wiring board using a photo-memory photosensitive layer, and more particularly, to the induction of a difference in charging characteristics in a photo-memory photosensitive layer by image pattern exposure. Between the charging process of charging the surface of the photo-memory photosensitive layer of the developed object to form an electrostatic latent image and the liquid developing process of forming a toner image on the photo-memory photosensitive layer by electrophotography. The present invention relates to a liquid developing method and a liquid developing apparatus for a printed wiring board, wherein the time is controlled.

【０００２】[0002]

【従来の技術】従来、プリント配線板を作製するには、
一般に絶縁性基板に銅箔を張った積層板上に感光性フィ
ルムをラミネートし、写真ネガを重ねて露光、現像した
後、回路パターン以外の不要の銅箔をエッチング処理し
て除き、しかる後に感光性フィルムを脱膜することによ
り絶縁性基板上にプリント回路を作製していた。この感
光性フィルムを用いた方法では、感光性フィルムの厚み
が一般に約５０μｍと厚いため、露光及び現像して形成
される回路パターンがシャープにならず、しかも銅箔表
面に均一にラミネートすることが困難であった。2. Description of the Related Art Conventionally, to manufacture a printed wiring board,
Generally, after laminating a photosensitive film on a laminated board with copper foil on an insulating substrate, overlaying a photographic negative, exposing and developing, unnecessary copper foil other than the circuit pattern is etched away, and then exposed A printed circuit was formed on an insulating substrate by removing the conductive film. In the method using this photosensitive film, since the thickness of the photosensitive film is generally as large as about 50 μm, the circuit pattern formed by exposure and development is not sharp, and it is possible to laminate the film uniformly on the copper foil surface. It was difficult.

【０００３】そこで、感光性フィルムの解像度等を向上
させるため、特開昭６２−２６２８５５号、同６４−４
６７２号公報等に記載の如く、電着法による基材への感
光性レジストの形成方法が開示されている。しかしなが
ら、電着用フォトレジストはメンテナンス性に優れず、
また一般に感度が低く問題とされていた。特に、スルー
ホール内部には光を照射することが困難で、光照射部が
処理液に可溶化するいわゆるポジ型の場合、十分な溶解
性を得るには数１００ｍＪ／ｃｍ²程度のエネルギーが
必要とされ、光照射をレーザー等を用いて行うには不適
当であった。In order to improve the resolution and the like of a photosensitive film, Japanese Patent Application Laid-Open Nos. 62-262855 and 64-4
No. 672 discloses a method for forming a photosensitive resist on a substrate by an electrodeposition method. However, the electrodeposition photoresist is not excellent in maintainability,
In addition, the sensitivity is generally low, which has been regarded as a problem. In particular, in the case of a so-called positive type in which it is difficult to irradiate the inside of the through hole with light and the light irradiating part is solubilized in the processing liquid, energy of several hundred mJ / cm ² is required to obtain sufficient solubility. It was not suitable for performing light irradiation using a laser or the like.

【０００４】更に、感光性のレジスト以外の方法による
プリント配線板の作製方法として、電子写真法を利用し
た方法が***特許第１１１７３９１号、同第２５２６７
２０号、同第３２１０５７７号、特開昭５２−２４３７
号、同５７−４８７３６号、同５９−１６８４６２号公
報等に提案されており、特開昭６３−１２９６８９号公
報では特にレーザーの波長に感度を有する電子写真感光
体を利用したプリント配線板作製法が提案されている。
電子写真法を利用して基板上にレーザー直接描画し画像
を形成する例は、電子写真平版印刷版等に使用されてい
る電子写真感光体で既に実用化されており、レーザー走
査露光によりフォトマスクを使用せずにコンピューター
から直接画像データを送り、高密度の画像を形成するこ
とが実用化されている。Further, as a method for manufacturing a printed wiring board by a method other than a photosensitive resist, a method utilizing electrophotography is disclosed in West German Patent Nos. 1117391 and 25267.
No. 20,310,577, JP-A-52-2437
And JP-A-57-48736, and JP-A-59-168462, and JP-A-63-129689 discloses a method of manufacturing a printed wiring board using an electrophotographic photosensitive member having sensitivity to a laser wavelength. Has been proposed.
An example of forming an image by directly drawing a laser on a substrate by using an electrophotographic method has already been put to practical use in an electrophotographic photosensitive member used for an electrophotographic lithographic printing plate, and a photomask by laser scanning exposure. It has been practically used to send image data directly from a computer without using a computer to form a high-density image.

【０００５】電子写真法を利用したプリント配線板（以
下、電子写真プリント配線板という）では、感光性フィ
ルムや液状フォトポリマーと異なり、レジスト膜厚を少
なく設定することが可能なことから、塗布乾燥条件、ア
ルカリ現像条件、エッチング液の液まわり等に有利であ
り、細線再現性、生産性に優れている。また液状レジス
トであるためレジスト膜が基板の凹凸に追従し断線やク
ワレ等の欠陥を少なくすることが可能である。また、ア
ルカリ現像液のメンテナンス性、塗布後基板の取り扱い
性、スルーホール一括保護可能等々、他のレジスト材料
に比べ優れた特性が多いため、実用化への期待が注がれ
ている。[0005] A printed wiring board utilizing an electrophotographic method (hereinafter referred to as an electrophotographic printed wiring board) is different from a photosensitive film or a liquid photopolymer in that the resist film thickness can be set to be small. This is advantageous for the conditions, alkali developing conditions, the surroundings of the etching solution, etc., and is excellent in thin line reproducibility and productivity. In addition, since the resist is a liquid resist, the resist film can follow irregularities on the substrate and reduce defects such as disconnection and cracking. In addition, there are many characteristics superior to other resist materials, such as maintainability of an alkali developer, handleability of a substrate after coating, simultaneous protection of through-holes, etc., and therefore, expectation for practical use has been focused.

【０００６】電子写真プリント配線板の作製は、次の様
にしてなされる。絶縁性基板上に金属導電層を設けた導
電性基板上に感光層を設け、感光層表面の帯電と配線パ
ターンに従った露光を行うことにより、露光部分に沿っ
た静電潜像が形成される。この静電潜像をトナー現像処
理を行ってトナー画像を形成し、このトナー画像をレジ
ストとして、トナー画像部以外の感光層を溶解除去する
ことによって、金属導電層上にトナー画像と感光層とか
らなるレジスト画像が作製される。金属導電層の不要部
の溶解除去及びそれ以降のプリント配線板の作製工程
は、従来と同様にして行うことができる。The production of an electrophotographic printed wiring board is performed as follows. A photosensitive layer is provided on a conductive substrate in which a metal conductive layer is provided on an insulative substrate, and an electrostatic latent image is formed along the exposed portion by performing charging according to the surface of the photosensitive layer and exposure according to a wiring pattern. You. The electrostatic latent image is subjected to a toner developing process to form a toner image, and the toner image is used as a resist to dissolve and remove the photosensitive layer other than the toner image portion, thereby forming the toner image and the photosensitive layer on the metal conductive layer. Is formed. Dissolution and removal of the unnecessary portion of the metal conductive layer and the subsequent steps of manufacturing the printed wiring board can be performed in the same manner as in the related art.

【０００７】また、基板の両面に配線パターンを形成す
る場合の電子写真プリント配線板の作製方法に関して
は、特開平１０−２０９６０６号公報にある様に、絶縁
性基板の両面に少なくとも金属導電層及び感光層をこの
順に設け、露光機の定盤上に載置して位置合わせ及び帯
電を施した後、露光して一方の感光層面に静電潜像を設
け、更に反転して再び位置合わせ及び帯電を施し、反対
面の感光層面を露光して静電潜像を設けた後、トナー現
像処理し、それ以降の工程は上述と同様に処理を行っ
て、両面に回路パターンを形成したプリント配線板が作
製される。As for a method of manufacturing an electrophotographic printed wiring board when wiring patterns are formed on both surfaces of a substrate, as disclosed in Japanese Patent Application Laid-Open No. Hei 10-209606, at least a metal conductive layer and a metal conductive layer are formed on both surfaces of an insulating substrate. A photosensitive layer is provided in this order, placed on a surface plate of an exposing machine, subjected to alignment and charging, exposed, and provided with an electrostatic latent image on one photosensitive layer surface, and further inverted to align and re-align. After applying a charge, the opposite photosensitive layer surface is exposed to form an electrostatic latent image, and then a toner development process is performed. The subsequent processes are performed in the same manner as described above to form a circuit pattern on both surfaces. A board is made.

【０００８】しかし、この方法によると、露光終了後に
基板を定盤上で反転させることにより、最初に帯電露光
を行ったことによって形成された静電潜像を有する面
が、次に反対面を位置合わせならびに露光する際、吸引
密着等により定盤面と機械的な強い接触をし、接触した
面の静電潜像の電位分布が乱れてしまう問題があった。
同様に、両面共に静電潜像形成後においてもトナー現像
工程前までの搬送系部材との接触において、静電潜像が
乱れてしまう問題があった。トナー画像の画質は静電潜
像の電位分布に大きく影響を受けるので、生じた静電潜
像の乱れがそのままトナー画像に反映され、結果として
回路の短絡や断線等の問題が生ずる。However, according to this method, the surface having the electrostatic latent image formed by first performing the charging exposure is changed to the opposite surface by inverting the substrate on the surface plate after the completion of the exposure. At the time of alignment and exposure, there is a problem that a strong mechanical contact is made with the surface of the platen due to suction contact, and the potential distribution of the electrostatic latent image on the contacted surface is disturbed.
Similarly, even after both surfaces have formed an electrostatic latent image, there has been a problem in that the electrostatic latent image is disturbed by contact with the conveyance system member before the toner developing step. Since the image quality of the toner image is greatly affected by the potential distribution of the electrostatic latent image, the disturbance of the generated electrostatic latent image is directly reflected on the toner image, and as a result, a problem such as a short circuit or disconnection of a circuit occurs.

【０００９】また、この電子写真法を利用したレーザー
による直接回路描画では、必要露光量が５０〜１μＪ／
ｃｍ²と低く、従って使用するレーザーも低価格で低出
力の半導体レーザーの使用が可能であるが、感光層が５
００〜９００ｎｍに高い光感度を有するため、画像形成
プロセス中のプリント配線板の位置合わせに使用される
赤色レーザーダイオードセンサーで感光層に画像カブリ
を生じること、感光層の帯電プロセスから画像露光プロ
セス、静電潜像のトナー現像プロセスまでを作業性の良
い明室下で行うことが不可能であること等の問題点があ
った。Further, in direct circuit drawing by a laser utilizing the electrophotography, the required exposure amount is 50 to 1 μJ /
cm ² , so that the laser used can be a low-cost, low-power semiconductor laser.
Since it has a high light sensitivity in the range of 00 to 900 nm, image fogging occurs in the photosensitive layer with a red laser diode sensor used for alignment of a printed wiring board during an image forming process. There have been problems such as the fact that it is impossible to perform the toner development process of an electrostatic latent image in a bright room with good workability.

【００１０】そこで、上記の問題点を解決するため、出
願人は特願平２０００−２６９５４３号に記載の如く、
電気絶縁性基板に金属導電層を設けた導電性基板上に、
フォトメモリー性感光層を作製後、画像パターン露光に
より該フォトメモリー性感光層に画像パターンに応じた
帯電特性の差を誘起させておき、次いで該フォトメモリ
ー性感光層表面を帯電させることにより静電潜像を形成
し、ただちに電子写真法により該フォトメモリー性感光
層上にトナー画像を形成させ、トナー付着部以外の該フ
ォトメモリー性感光層を溶出除去してレジスト画像を形
成し、レジスト画像部以外の金属導電層をエッチング除
去することにより、プリント配線板を作製する方法を提
案した。これによれば、露光時にはフォトメモリー性感
光層表面は帯電されておらず、露光機の定盤面との接触
による電位分布の乱れは生じないため、残銅、短絡、断
線等の欠陥が少ないプリント配線板が作製できる。[0010] In order to solve the above problems, the applicant has disclosed in Japanese Patent Application No. 2000-269543,
On a conductive substrate provided with a metal conductive layer on an electrically insulating substrate,
After preparing the photo-memory photosensitive layer, a difference in charging characteristics according to the image pattern is induced in the photo-memory photosensitive layer by image pattern exposure, and then the surface of the photo-memory photosensitive layer is charged to charge the electrostatic. Forming a latent image, immediately forming a toner image on the photo-memory photosensitive layer by electrophotography, eluting and removing the photo-memory photosensitive layer other than the toner-attached portion to form a resist image, A method of fabricating a printed wiring board by etching and removing metal conductive layers other than the above was proposed. According to this method, the surface of the photo-memory photosensitive layer is not charged at the time of exposure, and the potential distribution does not disturb due to contact with the surface of the exposure machine, so that there are few defects such as residual copper, short circuit, and disconnection. A wiring board can be manufactured.

【００１１】しかし、上記のフォトメモリー性感光層を
用いたプリント配線板の作製方法に於いて、該フォトメ
モリー性感光層表面を帯電した後で、露光部はほとんど
帯電されず表面電位は一定であるのに対して、未露光部
の表面電位は帯電直後から暗減衰によって次第に低下す
るため、帯電行程を経た後液体現像行程に供されるまで
の時間が長くなると未露光部にカブリが生ずるという問
題がある。また、このカブリをなくすために現像電極に
印加する現像バイアス電圧を下げると、露光部のトナー
画像の膜厚が薄くなり、耐溶出性が低下し、最終的には
断線やピンホール等の欠陥が生ずるという問題がある。However, in the above-mentioned method for manufacturing a printed wiring board using the photo-memory photosensitive layer, after the photo-memory photosensitive layer surface is charged, the exposed portion is hardly charged and the surface potential is constant. On the other hand, since the surface potential of the unexposed portion gradually decreases due to dark decay immediately after charging, fogging occurs in the unexposed portion if the time required for the liquid development process after the charging process becomes longer. There's a problem. Also, if the developing bias voltage applied to the developing electrode is reduced to eliminate the fog, the thickness of the toner image in the exposed area becomes thinner, the elution resistance decreases, and finally, defects such as disconnection and pinholes are caused. There is a problem that occurs.

【００１２】上記の未露光部の暗減衰を改善するには、
フォトメモリー性感光層の組成や膜厚などを変えること
で実現できるが、この場合には露光部の表面電位が帯電
直後は高く、その後徐々に減衰するため、現像バイアス
電圧より十分に低い表面電位に達するまでには一定の時
間がかかる。そのため、フォトメモリー性感光体の特性
に応じて、帯電行程を経た後、被現像体を液体現像行程
に供するまでの時間を制御する必要がある。In order to improve the dark decay of the unexposed part,
This can be achieved by changing the composition and thickness of the photo-memory photosensitive layer. In this case, however, the surface potential of the exposed portion is high immediately after charging, and then gradually attenuates, so that the surface potential is sufficiently lower than the developing bias voltage. It takes a certain amount of time to reach. Therefore, it is necessary to control the time from the charging step to the time when the object to be developed is subjected to the liquid developing step, according to the characteristics of the photomemory photosensitive member.

【００１３】[0013]

【発明が解決しようとする課題】本発明の目的は、上記
のフォトメモリー性感光層を用いたプリント配線板を製
造する際に、画像パターン露光によりフォトメモリー性
感光層に画像に応じた帯電特性の差を誘起させた被現像
体の、該フォトメモリー性感光層表面を帯電し静電潜像
を形成させる帯電行程と、静電潜像を形成された該フォ
トメモリー性感光層上に電子写真法によりトナー画像を
形成させる液体現像行程との間の時間を、フォトメモリ
ー性感光層の特性に応じて制御して、被現像体が液体現
像行程に供される時の未露光部と露光部の表面電位の差
（電位ギャップ）をフォトメモリー性感光層に依らず一
定とすることにより、安定なトナー画像を得ることがで
きる液体現像方法及び液体現像装置を提供することにあ
る。SUMMARY OF THE INVENTION An object of the present invention is to provide a photosensitive layer having a photo-memory property by image pattern exposure when manufacturing a printed wiring board using the above-mentioned photo-memory property photosensitive layer. A charging process of charging the surface of the photo-memory photosensitive layer of the developing object inducing a difference between the two and forming an electrostatic latent image, and an electrophotographic process on the photo-memory photosensitive layer on which the electrostatic latent image is formed. The time between the liquid developing step for forming a toner image by the method is controlled according to the characteristics of the photo-memory photosensitive layer, so that the unexposed portion and the exposed portion when the object is subjected to the liquid developing step. It is an object of the present invention to provide a liquid developing method and a liquid developing apparatus capable of obtaining a stable toner image by making the difference (potential gap) between the surface potentials of the photoconductive layer and the photoconductive layer constant.

【００１４】[0014]

【課題を解決するための手段】本発明者らは上記課題を
達成するため鋭意検討した結果、電気絶縁性基板に金属
導電層を設けた導電性基板上にフォトメモリー性感光層
を設けたプリント配線板用基板を用いたプリント配線板
を製造するに際して、画像パターン露光された被現像体
のフォトメモリー性感光層表面を帯電し静電潜像を形成
させる帯電行程と、静電潜像を形成された該フォトメモ
リー性感光層上に電子写真法によりトナー画像を形成さ
せる液体現像行程との間の時間を、該フォトメモリー性
感光層の特性に応じて制御すれば良いことを見い出し
た。Means for Solving the Problems The inventors of the present invention have made intensive studies to achieve the above-mentioned object, and as a result, have found that a printing method in which a photo-memory photosensitive layer is provided on a conductive substrate having an electrically insulating substrate provided with a metal conductive layer. In manufacturing a printed wiring board using a wiring board substrate, a charging process for charging a surface of a photo-memory photosensitive layer of a developing object exposed to an image pattern to form an electrostatic latent image, and forming an electrostatic latent image. It has been found that it is sufficient to control the time until the liquid developing process for forming a toner image on the photo-memory photosensitive layer by electrophotography according to the characteristics of the photo-memory photosensitive layer.

【００１５】また、上記の方法によるプリント配線板の
作製は、電気絶縁性基板に金属導電層を設けた導電性基
板上にフォトメモリー性感光層を作製後、該フォトメモ
リー性感光層上に画像パターンを露光した被現像体の該
フォトメモリー性感光層表面を帯電し静電潜像を形成さ
せる帯電手段を、電子写真法により液体現像して該フォ
トメモリー性感光層上にトナー画像を形成させる液体現
像装置における現像電極の略直前に設けたプリント配線
板の液体現像装置によって達成された。In the production of a printed wiring board by the above method, a photo-memory photosensitive layer is formed on a conductive substrate having a metal conductive layer provided on an electrically insulating substrate, and then an image is formed on the photo-memory photosensitive layer. The charging means for charging the surface of the photo-memory photosensitive layer of the developing object exposed with the pattern to form an electrostatic latent image is liquid-developed by electrophotography to form a toner image on the photo-memory photosensitive layer. This has been achieved by a liquid developing device for a printed wiring board provided almost immediately before a developing electrode in the liquid developing device.

【００１６】更には、上記の液体現像装置に於いて、該
帯電手段と該現像電極の間に、被現像体が該帯電手段と
該現像電極の間を通過する時間を可変できる手段を有す
る液体現像装置によって、フォトメモリ性感光層の特性
が大きく変化しても未露光部と露光部の表面電位の差
（電位ギャップ）をフォトメモリー性感光層に依らず一
定とすることができ、安定したトナー画像を得ることが
できることを見い出した。Further, in the above-mentioned liquid developing apparatus, a liquid having a means for varying the time for which an object passes between the charging means and the developing electrode is provided between the charging means and the developing electrode. By the developing device, even if the characteristics of the photo-memory photosensitive layer greatly change, the difference (potential gap) between the surface potentials of the unexposed portion and the exposed portion can be kept constant irrespective of the photo-memory photosensitive layer. It has been found that a toner image can be obtained.

【００１７】[0017]

【発明の実施の形態】以下に本発明のプリント配線板の
液体現像方法及び液体現像装置について詳細に説明する
が、本発明のプリント配線板液体現像装置は、基本的に
は本発明のプリント配線板液体現像方法が適用でき、ま
た本発明のプリント配線板液体現像方法は、本発明のプ
リント配線板液体現像装置を用いることで優位になされ
る。よって、以下は本発明のプリント配線板液体現像装
置を説明しながら、本発明のプリント配線板液体現像方
法を説明する。BEST MODE FOR CARRYING OUT THE INVENTION A liquid developing method and a liquid developing apparatus for a printed wiring board according to the present invention will be described in detail below. The liquid developing apparatus for a printed wiring board according to the present invention basically includes a printed wiring board according to the present invention. A board liquid developing method can be applied, and the printed wiring board liquid developing method of the present invention can be made superior by using the printed wiring board liquid developing apparatus of the present invention. Therefore, hereinafter, the printed wiring board liquid developing method of the present invention will be described while describing the printed wiring board liquid developing apparatus of the present invention.

【００１８】本発明のプリント配線板の液体現像装置
は、基本的にはフォトメモリー性感光層を設けたプリン
ト配線板用基板を用いたプリント配線板を製造する際の
帯電と液体現像処理を施す装置であり、銅張積層板に少
なくともフォトメモリー性感光層を有する被現像体から
回路を有するプリント配線板を作製する行程の内、画像
パターン露光後の被現像体の帯電と配線パターンに対応
するトナー画像の形成を担う。The liquid developing apparatus for a printed wiring board according to the present invention basically performs charging and liquid development processing when manufacturing a printed wiring board using a printed wiring board substrate provided with a photo-memory photosensitive layer. An apparatus for producing a printed wiring board having a circuit from a developing object having at least a photo-memory photosensitive layer on a copper-clad laminate, the method corresponding to the charging and the wiring pattern of the developing object after image pattern exposure. Responsible for forming a toner image.

【００１９】具体的には本発明の液体現像装置として
は、基本的な構成としては以下の様な方式の装置を用い
ることができる。従来より用いられている静電潜像形成
面を上下方向に向けて略水平に搬送し、その上面または
下面から片面に液体トナーを供給する横水平現像、特開
平２−９１６４９号公報等に記載の様な基板を立てて略
鉛直に搬送し、その片面にトナー供給する片面縦水平現
像、特開平６−２２４５４１号公報等に記載の様な基板
を寝かせて略水平に搬送し、その上下両面から基板両面
にトナー供給する両面横水平現像、特願平８−２９８３
６３号に記載の様に基板を立てて略鉛直に搬送し、その
両面にトナー供給する両面縦水平現像等の方式が挙げら
れ、トナー画像形成方法の基本的な部分は、これらに挙
げられる電子写真反転現像法による液体現像方法に従
う。Specifically, as the liquid developing device of the present invention, a device of the following system can be used as a basic configuration. Japanese Patent Application Laid-Open No. 2-91649 discloses a conventional horizontal / horizontal developing method in which a conventionally used electrostatic latent image forming surface is conveyed substantially horizontally in the vertical direction and liquid toner is supplied to one surface from the upper or lower surface. , A substrate such as that described in Japanese Patent Application Laid-Open No. HEI 6-224541 lays down a substrate such that it is transported substantially vertically, and supplies toner to one side thereof. -Side horizontal and horizontal development that supplies toner to both sides of a substrate from Japanese Patent Application No. 8-2983
As described in No. 63, there is a method such as double-sided vertical and horizontal development in which a substrate is set up and conveyed substantially vertically, and toner is supplied to both sides thereof. The liquid development method by the photo reversal development method is followed.

【００２０】図１は本発明のプリント配線板の液体現像
装置の一実施例の構成断面図である。図１に於いて、液
体現像装置は基本的には上記の両面横水平現像方式と同
様の構成であり、これに加えて新たに液体トナー現像行
程の略直前部位に帯電手段１１を設ける。該帯電手段１
１は、液体トナー現像行程前に被現像体１の表面を均一
に帯電することを可能とする。更に具体的には、液体ト
ナーを供給すると同時にバイアス電圧Ｖａ、Ｖｂを印加
する現像電極１３と、送りロール対１２と、絞液ロール
対１４とから成り、前行程の帯電行程により得られた静
電潜像上にトナー画像を形成する。FIG. 1 is a sectional view showing the structure of an embodiment of the liquid developing apparatus for a printed wiring board according to the present invention. In FIG. 1, the liquid developing apparatus has basically the same configuration as the above-described two-sided horizontal and horizontal developing method, and additionally, a charging unit 11 is newly provided substantially immediately before the liquid toner developing process. The charging means 1
1 enables the surface of the developing object 1 to be uniformly charged before the liquid toner developing process. More specifically, it comprises a developing electrode 13 for applying the bias voltages Va and Vb at the same time as supplying the liquid toner, a pair of feed rolls 12, and a pair of squeeze rolls 14. A toner image is formed on the latent image.

【００２１】本発明の液体現像装置の帯電手段として
は、コロトロン方式およびスコロトロン方式等の非接触
帯電方法、また導電ブラシ帯電や導電ロール帯電等の接
触帯電方法等の公知の技術を用いることができ、本発明
に係わるフォトメモリー性感光層が一様に帯電できれば
何れの方式を採用しても良い。As the charging means of the liquid developing apparatus of the present invention, known techniques such as a non-contact charging method such as a corotron method and a scorotron method, and a contact charging method such as a conductive brush charging and a conductive roll charging can be used. Any method may be employed as long as the photo-memory photosensitive layer according to the present invention can be uniformly charged.

【００２２】また、本発明に係わる未露光部の暗減衰を
抑制したフォトメモリー性感光層の場合には、露光部の
表面電位が十分に低下し液体現像に必要な電位ギャップ
が得られるまでに一定の時間を要するが、このようなフ
ォトメモリー性感光層を用いた被現像体を処理する液体
現像装置の一例としては図２のように、帯電手段と現像
電極の間を被現像体が通過する時間を可変できる手段を
有する液体現像装置がある。In the case of the photo-memory layer according to the present invention, in which the dark decay of the unexposed area is suppressed, the surface potential of the exposed area is sufficiently reduced until the potential gap required for liquid development is obtained. Although a certain period of time is required, as an example of a liquid developing apparatus for processing a developing object using such a photo-memory photosensitive layer, the developing object passes between a charging unit and a developing electrode as shown in FIG. There is a liquid developing device having means for changing the time for performing the operation.

【００２３】上記の帯電手段と現像電極の間を被現像体
が通過する時間を可変できる手段としては、例えば該帯
電手段を該現像電極の手前で任意の距離に設置できるよ
うにする方法や、バッファ部を設ける方法等があるが、
帯電手段と現像電極の間を被現像体が通過する時間を可
変できる手段であれば何れの方式を採用しても良い。As means for varying the time for the object to be developed to pass between the charging means and the developing electrode, for example, a method of setting the charging means at an arbitrary distance before the developing electrode, There is a method of providing a buffer part, etc.
Any method may be employed as long as the time required for the developing object to pass between the charging means and the developing electrode can be varied.

【００２４】本発明に係わるプリント配線板の作製行程
は、まず電気絶縁性基板に金属導電層を設けた導電性基
板上にフォトメモリー性感光層を作製後、該フォトメモ
リー性感光層上に画像パターンを露光しフォトメモリー
性感光層に画像に応じた帯電特性の差を誘起させた後、
上記液体現像装置を用いて、まず帯電手段１１によって
該フォトメモリー性感光層表面を帯電し静電潜像を形成
させ、次いで該静電潜像を液体トナーを供給しながら同
時にバイアス電圧を印加し液体トナー現像を行う。その
後、乾燥工程、定着行程を経て配線パターンに対応する
トナー画像を形成する。このようにしてトナー画像を形
成させた被現像体は、トナー付着部以外のフォトメモリ
ー性感光層を溶出除去してレジスト画像が形成され、レ
ジスト画像以外の金属導電層のエッチング除去及びそれ
以降のプリント配線板の作製行程は従来と同様にして行
うことで、プリント配線板が作製できる。In the process of manufacturing a printed wiring board according to the present invention, a photo-memory photosensitive layer is first formed on a conductive substrate having a metal conductive layer provided on an electrically insulating substrate, and then an image is formed on the photo-memory photosensitive layer. After exposing the pattern to induce a difference in the charging characteristics according to the image in the photo-memory photosensitive layer,
Using the liquid developing device, first, the charging means 11 charges the surface of the photo-memory photosensitive layer to form an electrostatic latent image, and then applies a bias voltage to the electrostatic latent image while supplying liquid toner. Perform liquid toner development. After that, a toner image corresponding to the wiring pattern is formed through a drying process and a fixing process. The developing object on which the toner image has been formed in this way, the resist image is formed by eluting and removing the photomemory photosensitive layer other than the toner adhering portion, and the metal conductive layer other than the resist image is removed by etching and thereafter. A printed wiring board can be manufactured by performing the manufacturing process of the printed wiring board in the same manner as in the related art.

【００２５】また、本発明に係わる未露光部の暗減衰を
抑制したフォトメモリー性感光層を利用した被現像体の
場合には、図２のような液体現像装置を用いて、帯電手
段を経た後、露光部の電位が低下するのに必要な時間だ
け、帯電手段と現像電極の間を被現像体が通過する時間
を可変できる手段を用いて、被現像体が液体現像行程に
供するまでの時間を遅らせることによって、液体現像条
件を一定にすることができ、安定したトナー画像を得る
ことができる。Further, in the case of the developing object using the photo-memory type photosensitive layer in which the dark decay of the unexposed portion according to the present invention is suppressed, the liquid developing device as shown in FIG. After that, the time required for the potential of the exposed portion to decrease, the time required for the developed object to pass between the charging means and the developing electrode by using a means that can be varied, until the developed object is subjected to the liquid development process By delaying the time, the liquid development conditions can be kept constant, and a stable toner image can be obtained.

【００２６】[0026]

【実施例】以下、本発明の実施例を図１または図２を参
照にしながら更に具体的に説明するが、本発明はその趣
旨を越えない限り、下記の実施例に限定されるものでは
ない。なお、実施例中の「部」および「％」はそれぞれ
「重量部」および「重量％」を示す。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below in more detail with reference to FIG. 1 or FIG. 2, but the present invention is not limited to the following embodiments without departing from the gist thereof. . In the examples, "parts" and "%" indicate "parts by weight" and "% by weight", respectively.

【００２７】実施例１フォトメモリー性感光層の作製 下記の処方１に基づいた塗液を調液し、両面銅張積層板
（三菱ガス化学製、ＣＣＬ−Ｅ１７０）を使用し、１７
０ｍｍ×２５５ｍｍ（厚み０．８ｍｍ）の長方形状基板
にディップ塗布法により銅張積層板両面に調整済み塗液
を塗布した。フォトメモリー性感光層塗布済みの銅張積
層板を、１２０℃３０分間加熱乾燥して、フォトメモリ
ー性感光層の厚みが４μｍの塗膜を作製した。Example 1 Preparation of Photo-Memory Photosensitive Layer A coating solution based on the following prescription 1 was prepared , and a double-sided copper-clad laminate (CCL-E170 manufactured by Mitsubishi Gas Chemical Co., Ltd.) was used.
The adjusted coating liquid was applied to both sides of the copper-clad laminate by a dip coating method on a rectangular substrate of 0 mm × 255 mm (0.8 mm in thickness). The copper-clad laminate coated with the photo-memory photosensitive layer was dried by heating at 120 ° C. for 30 minutes to prepare a coating film having a thickness of 4 μm.

【００２８】 [0028]

【００２９】[0029]

【化１】 Embedded image

【００３０】フォトメモリー性感光層の露光 フォトメモリー性感光層上に画像パターンを描画したフ
ィルムマスクを乗せ、吸引密着機構を有する焼付用高圧
水銀灯光源装置；ユニレックＵＲＭ３００（ウシオ電機
（株）製）を用いて３０秒間紫外線露光を行った。さら
に、基板を反転し、非露光面を同様にして、３０秒間露
光を行い、両面のフォトメモリー性感光層上に帯電特性
の差を誘起させた。 Exposure of Photo-Memory Photosensitive Layer A high-pressure mercury lamp light source device for printing having a suction and adhesion mechanism mounted thereon with a film mask on which an image pattern is drawn on the photo-memory photo-sensitive layer; UV exposure for 30 seconds. Further, the substrate was inverted, and the non-exposed surface was exposed in the same manner for 30 seconds to induce a difference in charging characteristics on the photosensitive memory layers on both surfaces.

【００３１】レジスト画像の形成 上記の被現像体は、帯電直後の露光部の表面電位は３０
Ｖで、未露光部の表面電位は２５０Ｖであったが、帯電
１０秒後には未露光部の表面電位が１９０Ｖにまで低下
してしまうため、フォトメモリー性感光層を図１の本発
明の液体現像装置を用いて帯電手段１１によって電荷を
与えて静電潜像を形成させた後、引き続き静電潜像を該
帯電手段の直後に位置する現像電極１３により、三菱Ｏ
ＰＣプリンティングシステム用正電荷トナー（三菱製紙
（株）製、「ＯＤＰ−ＴＷ」）を用いて、バイアス電圧
＋２００Ｖを印加して反転現像を行い、トナー画像を得
た。この際、被現像体が現像電極１３に到達した時の未
露光部の電位は２４０Ｖで、露光部の電位は３０Ｖであ
った。次いで被現像体表面に残留している不要溶媒を乾
燥除去した後、９０℃で１０分間加熱してトナー画像を
定着させた。同様の作業を１０枚の被現像体で連続して
行ったところ、何れの被現像体に於いても、パターン欠
陥やカブリの無い、線幅５０±２μｍを含む良好なトナ
ー画像を得た。 Formation of Resist Image In the above-mentioned developing object, the surface potential of the exposed portion immediately after charging is 30
V, the surface potential of the unexposed portion was 250 V. However, the surface potential of the unexposed portion decreased to 190 V after 10 seconds of charging. After the electrostatic latent image is formed by applying a charge by the charging means 11 using a developing device, the electrostatic latent image is successively transferred to the developing device 13 by the developing electrode 13 located immediately after the charging means.
Using a positively charged toner for a PC printing system ("ODP-TW", manufactured by Mitsubishi Paper Mills, Inc.), reverse bias development was performed by applying a bias voltage of +200 V to obtain a toner image. At this time, the potential of the unexposed portion when the object reached the developing electrode 13 was 240 V, and the potential of the exposed portion was 30 V. Next, after removing the unnecessary solvent remaining on the surface of the developing member by drying, the toner image was fixed by heating at 90 ° C. for 10 minutes. When the same operation was continuously performed on ten developing objects, a good toner image having a line width of 50 ± 2 μm without any pattern defect or fog was obtained in any of the developing objects.

【００３２】実施例２ 下記の処方２に基づいた塗液を調液し、実施例１と同様
にして０．１ｍｍ厚の基板にフォトメモリー性感光層の
厚みが４μｍの電子写真積層板を作製した。このフォト
メモリー性感光層では、帯電後の露光部の電位が３０Ｖ
になるまでに１分必要であった。この間に未露光部の電
位は２６０Ｖから２４０Ｖに低下した。図２の本発明の
液体現像装置に於いて帯電手段と現像電極の間を通過す
る時間が１分になるように設定し、液体現像処理を行っ
たところ、パターン欠陥の無い、線幅５０±２μｍを含
む良好なトナー画像を得た。同様の作業を１０枚の被現
像体で連続して行ったところ、何れの被現像体に於いて
も、パターン欠陥やカブリの無い、線幅５０±２μｍを
含む良好なトナー画像を得た。Example 2 A coating solution based on the following prescription 2 was prepared, and an electrophotographic laminate having a photo-memory photosensitive layer having a thickness of 4 μm was prepared on a substrate having a thickness of 0.1 mm in the same manner as in Example 1. did. In this photomemory photosensitive layer, the potential of the exposed portion after charging is 30 V
It took one minute to become. During this time, the potential of the unexposed portion dropped from 260 V to 240 V. In the liquid developing apparatus of the present invention shown in FIG. 2, the time required to pass between the charging means and the developing electrode was set to be 1 minute, and the liquid developing process was performed. A good toner image containing 2 μm was obtained. When the same operation was continuously performed on ten developing objects, a good toner image including a line width of 50 ± 2 μm without any pattern defect or fog was obtained in any of the developing objects.

【００３３】 [0033]

【００３４】[0034]

【化２】 Embedded image

【００３５】比較例１ 実施例１と同じフォトメモリー性感光層を設けたプリン
ト配線板用基板を用い、同様の露光を行った後、帯電装
置にてフォトメモリー性感光層を帯電し静電潜像を形成
させた。次に、静電潜像を形成させた被現像体を手で搬
送して液体現像装置に投入し、被現像体にトナー画像を
形成させた。同様の作業を１０枚の被現像体に於いて液
体現像装置の設定は変更せずに連続して行ったところ、
処理基板によって帯電行程から液体現像行程までの時間
に差違が生じたため、未露光部にカブリが生じたり、露
光部のトナー画像の膜厚が薄く、次の溶出行程で断線や
ピンホールの生じる基板があった。また、線幅も基板毎
にふれが大きく、最大１５μｍの差がみられた。COMPARATIVE EXAMPLE 1 Using a printed wiring board substrate provided with the same photo-memory photosensitive layer as in Example 1, the same exposure was performed. An image was formed. Next, the developing object on which the electrostatic latent image was formed was conveyed by hand and put into a liquid developing device to form a toner image on the developing object. When the same operation was continuously performed without changing the setting of the liquid developing device for the ten developing objects,
The difference in the time from the charging process to the liquid development process depending on the processing substrate, causing fogging in the unexposed area, thinning of the toner image in the exposed area, and disconnection or pinholes in the next elution process was there. Also, the line width greatly fluctuated for each substrate, and a difference of 15 μm at the maximum was observed.

【００３６】[0036]

【発明の効果】以上説明した如く、本発明のプリント配
線板の液体現像装置による液体現像方法によれば、フォ
トメモリー性感光層を用いたプリント配線板を製造する
際に、画像パターン露光によりフォトメモリー性感光層
に画像に応じた帯電特性の差を誘起させた被現像体の、
該フォトメモリー性感光層表面を帯電し静電潜像を形成
させる帯電行程と、静電潜像を形成された該フォトメモ
リー性感光層上に電子写真法によりトナー画像を形成さ
せる液体現像行程との間の時間を、フォトメモリー性感
光層の特性に応じて制御して、被現像体が液体現像行程
に供される時の未露光部と露光部の表面電位の差（電位
ギャップ）をフォトメモリー性感光層に依らず一定とす
ることにより、安定なトナー画像を得ることが可能とな
る。As described above, according to the liquid developing method of the present invention using a liquid developing apparatus for a printed wiring board, when a printed wiring board using a photo-memory photosensitive layer is manufactured, photolithography is performed by image pattern exposure. Of the object to be developed in which a difference in charging characteristics according to an image is induced in the memory-type photosensitive layer,
A charging step of charging the surface of the photo-memory photosensitive layer to form an electrostatic latent image, and a liquid developing step of forming a toner image by electrophotography on the photo-memory photosensitive layer on which the electrostatic latent image has been formed. Is controlled according to the characteristics of the photo-memory photosensitive layer, and the difference (potential gap) between the surface potential of the unexposed portion and the exposed portion when the object is subjected to the liquid development process is determined by photo-exposure. By making the value constant regardless of the memory type photosensitive layer, a stable toner image can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明の請求項２に記載のプリント配線板の液
体現像装置の構成断面図。FIG. 1 is a sectional view showing the configuration of a liquid developing device for a printed wiring board according to a second embodiment of the present invention.

【図２】本発明の請求項３に記載のプリント配線板の液
体現像装置の一実施例の構成断面図。FIG. 2 is a sectional view showing the configuration of an embodiment of a liquid developing device for a printed wiring board according to claim 3 of the present invention.

【符号の説明】[Explanation of symbols]

１ 被現像体 １１ 帯電手段 １２ 送りロール対 １３ 現像電極対 １４ 絞りロール対 １５ 被現像体が帯電手段と現像電極の間を通過する時
間を可変できる手段 ２１ 液体現像剤 ２２ 液体現像剤供給配管 ２３ 送液ポンプ ２４ フィルターDESCRIPTION OF SYMBOLS 1 Developing body 11 Charging means 12 Feed roll pair 13 Developing electrode pair 14 Squeezing roll pair 15 Means which can change the time for a developing body to pass between a charging means and a developing electrode 21 Liquid developer 22 Liquid developer supply pipe 23 Liquid pump 24 Filter

───────────────────────────────────────────────────── フロントページの続き (72)発明者 兵頭 建二 東京都千代田区丸の内３丁目４番２号三菱 製紙株式会社内 Ｆターム(参考） 2H074 AA31 AA45 BB02 BB14 BB44 BB54 CC33 5E339 AB02 AD03 BE11 CC01 CD05 CD10 CE13 CE18 CF16 CF17 CF18 CG01 DD02 GG02  ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Kenji Hyodo 3-4-2 Marunouchi, Chiyoda-ku, Tokyo F-term in Mitsubishi Paper Mills (reference) 2H074 AA31 AA45 BB02 BB14 BB44 BB54 CC33 5E339 AB02 AD03 BE11 CC01 CD05 CD10 CE13 CE18 CF16 CF17 CF18 CG01 DD02 GG02

Claims (3)

【特許請求の範囲】[Claims] 【請求項１】 電気絶縁性基板に金属導電層を設けた導
電性基板上にフォトメモリー性感光層を作製後、該フォ
トメモリー性感光層上に画像パターンを露光し、次いで
該フォトメモリー性感光層表面を帯電させることにより
静電潜像を形成し、電子写真法により液体現像して該フ
ォトメモリー性感光層上にトナー画像を形成させ、トナ
ー付着部以外のフォトメモリー性感光層を溶出除去して
レジスト画像を形成し、レジスト画像以外の金属導電層
をエッチング除去するプリント配線板に於いて、前記帯
電行程を経た後、当該基板を液体現像行程に供するまで
の時間を変えることを特徴とするプリント配線板の液体
現像方法。1. A photo-memory photosensitive layer is formed on a conductive substrate having a metal conductive layer provided on an electrically insulating substrate, and then an image pattern is exposed on the photo-memory photosensitive layer. An electrostatic latent image is formed by charging the surface of the layer, and a liquid image is developed by electrophotography to form a toner image on the photomemory photosensitive layer. Forming a resist image, and in a printed wiring board for etching away a metal conductive layer other than the resist image, after passing through the charging step, changing the time until the substrate is subjected to a liquid developing step. Liquid development method for printed wiring boards. 【請求項２】 電気絶縁性基板に金属導電層を設けた導
電性基板上にフォトメモリー性感光層を作製後、該フォ
トメモリー性感光層上に画像パターンを露光した被現像
体の該フォトメモリー性感光層表面を帯電し静電潜像を
形成させる帯電手段を、電子写真法により液体現像して
該フォトメモリー性感光層上にトナー画像を形成させる
液体現像装置における現像電極の略直前に設けることを
特徴とするプリント配線板の液体現像装置。2. A photo memory of a developing object, comprising: forming a photo memory photosensitive layer on a conductive substrate having a metal conductive layer provided on an electrically insulating substrate; and exposing an image pattern on the photo memory photosensitive layer. Charging means for charging the surface of the photosensitive layer to form an electrostatic latent image is provided almost immediately before a developing electrode in a liquid developing device for developing a liquid image by electrophotography and forming a toner image on the photosensitive layer. A liquid developing device for a printed wiring board. 【請求項３】 該帯電手段と該現像電極の間に、該被現
像体が該帯電手段と該現像電極の間を通過する時間を可
変できる手段を有する請求項２記載のプリント配線板の
液体現像装置。3. The liquid for a printed wiring board according to claim 2, further comprising means for varying the time that the object passes between the charging means and the developing electrode between the charging means and the developing electrode. Developing device.