JP2002148035A - Online film thickness measuring method and device thereof - Google Patents
Online film thickness measuring method and device thereofInfo
- Publication number
- JP2002148035A JP2002148035A JP2000341512A JP2000341512A JP2002148035A JP 2002148035 A JP2002148035 A JP 2002148035A JP 2000341512 A JP2000341512 A JP 2000341512A JP 2000341512 A JP2000341512 A JP 2000341512A JP 2002148035 A JP2002148035 A JP 2002148035A
- Authority
- JP
- Japan
- Prior art keywords
- film
- measuring
- band
- shaped
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、走行するベースフ
ィルム上に成膜装置により成膜した磁性体層等の帯状被
成膜物上に成膜する薄膜の膜厚をオンラインで測定する
オンライン膜厚測定方法とその装置に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an on-line film for online measurement of the thickness of a thin film formed on a belt-like material such as a magnetic layer formed on a running base film by a film forming apparatus. The present invention relates to a method and an apparatus for measuring a thickness.
【0002】[0002]
【従来の技術】一般に、デジタルビデオテープ等の磁気
テープを製造する場合、走行するベースフィルム上に成
膜装置により成膜した磁性体層の膜厚は均一性が要求さ
れ、そのためには、成膜工程において成膜された磁性体
層の膜厚を常に把握していることが必要である。2. Description of the Related Art In general, when a magnetic tape such as a digital video tape is manufactured, the thickness of a magnetic layer formed on a running base film by a film forming apparatus is required to be uniform. It is necessary to keep track of the thickness of the magnetic layer formed in the film process.
【0003】従来、成膜工程において、走行するベース
フィルム上に成膜される薄膜の膜厚をオンラインで測定
するには、図5の動作説明図に示すオンライン膜厚測定
装置で行われていた。Conventionally, in a film forming process, online measurement of a film thickness of a thin film formed on a running base film has been performed by an online film thickness measuring device shown in an operation explanatory view of FIG. .
【0004】図5において、1は送りローラ2、3によ
り300m/分程度の送り速度で走行し、成膜装置4を
通過する厚さ10μm程度のポリエチレンテレフタレー
トを基材とするベースフィルム、5は成膜装置4を通過
したベースフィルム1上に成膜された厚さ300nm程
度の酸化鉄の磁性体層、6は透過率や、厚さや、表面の
反射特性等の測定機により、膜生成後のベースフィルム
1の特性から成膜装置4を通過して磁性体層5が成膜さ
れたベースフィルム1上の磁性体層5の膜厚を求める測
定機である。In FIG. 5, reference numeral 1 denotes a base film made of polyethylene terephthalate having a thickness of about 10 μm, which is driven by feed rollers 2 and 3 at a feed speed of about 300 m / min and passes through a film forming apparatus 4. A magnetic layer of iron oxide having a thickness of about 300 nm formed on the base film 1 having passed through the film forming apparatus 4. This is a measuring device for determining the thickness of the magnetic layer 5 on the base film 1 on which the magnetic layer 5 has been formed by passing through the film forming apparatus 4 from the characteristics of the base film 1.
【0005】[0005]
【発明が解決しようとする課題】しかしながら、上記従
来のオンライン膜厚測定装置によると、ベースフィルム
等の帯状被成膜物にイレギュラーな変化がある場合に
は、それを検知しないため、その上に成膜された磁性体
層等の膜厚を正確に測定できなかった。However, according to the above-mentioned conventional on-line film thickness measuring apparatus, when there is an irregular change in a band-shaped film-forming object such as a base film, it is not detected, so that it is not detected. The film thickness of the magnetic layer and the like formed on the substrate could not be measured accurately.
【0006】本発明は、上記問題を解決して、成膜装置
の生成した薄膜の膜厚をオンラインで正確に測定するこ
とができるオンライン膜厚測定方法とその装置を提供す
ることを目的とするものである。SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned problems and to provide an online film thickness measuring method and an online film thickness measuring method capable of accurately measuring the thickness of a thin film generated by a film forming apparatus online. Things.
【0007】[0007]
【課題を解決するための手段】上記の課題を解決するた
めに、本発明は、成膜装置を通過する前における帯状被
成膜物の状態を測定し、帯状被成膜物を成膜装置に通過
させることにより、帯状被成膜物上に薄膜を成膜した後
における帯状被成膜物の前記測定箇所と同じ箇所の状態
を測定し、前記両測定値の変化量によって、帯状被成膜
物上に成膜した薄膜の膜厚をオンラインに求めるオンラ
イン膜厚測定方法であり、成膜装置の生成した膜の膜厚
をオンラインで正確に測定することができるものであ
る。In order to solve the above-mentioned problems, the present invention measures the state of a strip-shaped film-forming object before passing through a film-forming apparatus, and converts the state of the band-shaped film-forming object into a film-forming apparatus. After the thin film is formed on the band-shaped film-forming object, the state of the same place as that of the measurement point of the band-shaped film-forming object is measured. This is an online film thickness measurement method for online measuring the thickness of a thin film formed on a film object, and can accurately measure the film thickness of a film generated by a film forming apparatus online.
【0008】[0008]
【発明の実施の形態】本発明の請求項1に記載の発明
は、成膜装置を通過する前における帯状被成膜物の状態
を測定し、帯状被成膜物を成膜装置に通過させることに
より、帯状被成膜物上に薄膜を成膜した後における帯状
被成膜物の前記測定箇所と同じ箇所の状態を測定し、前
記両測定値の変化量によって、帯状被成膜物上に成膜し
た薄膜の膜厚をオンラインに求めるオンライン膜厚測定
方法であり、帯状被成膜物上への薄膜の成膜の前後で測
定した帯状被成膜物の状態の変化量から薄膜の膜厚を求
めることにより、帯状被成膜物のイレギュラーな変化に
対しても、薄膜の膜厚を正確に測定することができると
いう作用がある。DESCRIPTION OF THE PREFERRED EMBODIMENTS According to the first aspect of the present invention, a state of a band-shaped film-forming object before passing through a film-forming apparatus is measured, and the band-shaped film-forming object is passed through the film-forming apparatus. By measuring the state of the same location as the measurement point of the band-shaped film-forming object after forming a thin film on the band-shaped film-forming object, the amount of change in both the measured values, on the band-shaped film-forming object, This is an online film thickness measurement method for online determination of the thickness of a thin film formed on a thin film, based on the change in the state of the thin film before and after the thin film is formed on the thin film. Determining the film thickness has the effect that the film thickness of the thin film can be accurately measured even for irregular changes in the band-shaped film formation object.
【0009】本発明の請求項2に記載の発明は、成膜装
置を帯状被成膜物が通過する前と、通過した後に、それ
ぞれ帯状被成膜物の状態を測定する測定機と、成膜装置
を通過して走行する帯状被成膜物の送り量を測定する測
定機と、測定された帯状被成膜物の送り量から、成膜装
置通過前後の帯状被成膜物の状態を測定する測定機の測
定タイミングを制御する制御装置と、成膜装置通過前の
帯状被成膜物の状態の測定値を記憶する記憶装置と、前
記記憶装置に記憶された測定値と成膜装置通過後の帯状
被成膜物の状態の測定値とを比較演算して帯状被成膜物
上に成膜された薄膜の膜厚を算出する計算機とを設けた
請求項1に記載のオンライン膜厚測定方法を実施する装
置であり、帯状被成膜物の送り量を測定する測定機と、
測定機の測定タイミングを制御する制御装置とにより、
成膜装置通過前後の帯状被成膜物の同一箇所の状態を測
定し、比較するという作用を有する。According to a second aspect of the present invention, there is provided a measuring device for measuring a state of a strip-shaped film-forming object before and after the band-shaped film-forming object passes through the film-forming apparatus. A measuring machine for measuring the feed amount of the band-shaped film-forming object traveling through the film apparatus, and the state of the band-shaped film-formed object before and after passing through the film-forming device from the measured feed amount of the band-shaped film-formed object. A control device for controlling a measurement timing of a measuring device for measuring, a storage device for storing a measurement value of a state of the band-shaped film-forming object before passing through the film formation device, a measurement value stored in the storage device, and a film formation device 2. The online film according to claim 1, further comprising: a computer for comparing the measured value of the state of the band-shaped object after the passage and calculating the film thickness of the thin film formed on the band-shaped object. An apparatus for performing a thickness measurement method, and a measuring device for measuring a feed amount of the band-shaped film-forming object,
With the control device that controls the measurement timing of the measuring machine,
This has the effect of measuring and comparing the state of the same portion of the band-shaped film formation object before and after passing through the film formation apparatus.
【0010】以下、本発明の実施の形態について図面を
参照しながら説明する。Hereinafter, embodiments of the present invention will be described with reference to the drawings.
【0011】(実施の形態)図1は本発明の実施の形態
におけるオンライン膜厚測定方法を実施する装置におい
て、成膜前のベースフィルムの状態を測定する動作説明
図、図2は本発明の実施の形態におけるオンライン膜厚
測定方法を実施する装置において、ベースフィルム上に
磁性体層を成膜する動作説明図、図3は本発明の実施の
形態におけるオンライン膜厚測定方法を実施する装置に
おいて、成膜後のベースフィルムの状態を測定する動作
説明図、図4は本発明の実施の形態におけるオンライン
膜厚測定方法を実施する装置において、ベースフィルム
上に成膜した磁性体層の膜厚を測定する動作説明図であ
り、従来例を示す図5と同じ部分には同じ符号を付し説
明は省略する。(Embodiment) FIG. 1 is an explanatory view of an operation for measuring the state of a base film before film formation in an apparatus for performing an on-line film thickness measuring method according to an embodiment of the present invention, and FIG. FIG. 3 is an explanatory diagram illustrating an operation of forming a magnetic layer on a base film in an apparatus that performs the online film thickness measuring method according to the embodiment. FIG. 3 is a diagram illustrating an apparatus that performs the online film thickness measuring method according to the embodiment of the present invention. FIG. 4 is an explanatory view of an operation for measuring a state of a base film after film formation. FIG. 4 is a diagram showing a film thickness of a magnetic layer formed on a base film in an apparatus for performing an online film thickness measuring method according to an embodiment of the present invention. FIG. 5 is an operation explanatory diagram for measuring the same. The same reference numerals are given to the same portions as those in FIG.
【0012】図1、2、3、4において、7は成膜装置
4を通過する前のベースフィルム1の透過率や、厚さ
や、表面の反射特性等のベースフィルム1の状態からベ
ースフィルム1の状態を測定する測定機、8は前記測定
機7の測定値を記憶する記憶装置、9は前記記憶装置8
で記憶した測定機7の測定値と測定機6の測定値が入力
される計算機、10は送りローラ2の回転数から得たベ
ースフィルム1の送り量に基づき、成膜装置4通過前後
のベースフィルム1の状態を測定する測定機6、7の測
定タイミングを制御する制御装置であり、その動作は、
まず、図1に示すように、成膜装置4を通過する前の磁
性体層5の成膜前のベースフィルム1の光の透過度合を
測定機7で測定し、その測定値を記憶装置8で記憶す
る。次に、図2に示すように、送りローラ2、3によっ
て送られたベースフィルム1が成膜装置4を通過するこ
とにより、ベースフィルム1上に300nm程度の酸化
鉄よりなる磁性体層5が成膜される。次に、図3に示す
ように、測定機6、7間の距離とベースフィルム1の送
り速度から制御装置10により測定機6、7の測定タイ
ミングを制御し、成膜装置4を通過した後の磁性体層5
が成膜されたベースフィルム1上で、成膜装置4を通過
する前に測定した箇所と同じ箇所の光の透過度合を測定
機6で測定する。次に、図4に示すように、測定機6、
7の測定値を計算機9に入力し、両測定値の変化量によ
り、成膜された磁性体層5の膜厚を算出するものであ
る。In FIGS. 1, 2, 3, and 4, reference numeral 7 denotes the base film 1 from the state of the base film 1 such as the transmittance, the thickness, and the reflection characteristics of the surface before passing through the film forming apparatus 4. Is a measuring device for measuring the state of the measuring device, 8 is a storage device for storing the measured values of the measuring device 7, and 9 is the storage device 8
The computer 10 to which the measured value of the measuring device 7 and the measured value of the measuring device 6 stored in are input. The reference numeral 10 denotes the base before and after passing through the film forming apparatus 4 based on the feed amount of the base film 1 obtained from the rotation speed of the feed roller 2. The control device controls the measurement timing of the measuring devices 6 and 7 for measuring the state of the film 1.
First, as shown in FIG. 1, the degree of light transmission of the base film 1 before forming the magnetic layer 5 before passing through the film forming apparatus 4 is measured by the measuring device 7, and the measured value is stored in the storage device 8. Remember. Next, as shown in FIG. 2, when the base film 1 sent by the feed rollers 2 and 3 passes through the film forming apparatus 4, a magnetic layer 5 made of iron oxide of about 300 nm is formed on the base film 1. A film is formed. Next, as shown in FIG. 3, the control device 10 controls the measurement timing of the measuring devices 6 and 7 based on the distance between the measuring devices 6 and 7 and the feed speed of the base film 1, and after passing through the film forming device 4. Magnetic layer 5
On the base film 1 on which is formed a film, the degree of light transmission at the same position as that measured before passing through the film forming apparatus 4 is measured by the measuring device 6. Next, as shown in FIG.
The measured value of 7 is input to the computer 9 and the thickness of the formed magnetic layer 5 is calculated based on the amount of change in both measured values.
【0013】以上のように、本実施の形態のオンライン
膜厚測定方法を実施する装置によれば、ベースフィルム
1上に磁性体層5が成膜される前後のベースフィルム1
上の同一箇所を測定するように、制御装置10により、
測定機6、7の測定タイミングを制御しているので、ベ
ースフィルム1にイレギュラーな変化があっても、その
測定箇所におけるベースフィルム1上の磁性体層5の膜
厚は、測定機6、7の測定値を入力する計算機9が両測
定値を比較演算して、正確に算出するものである。As described above, according to the apparatus for performing the on-line film thickness measuring method of the present embodiment, the base film 1 before and after the magnetic layer 5 is formed on the base film 1 is formed.
By the control device 10 to measure the same location above
Since the measurement timing of the measuring devices 6 and 7 is controlled, even if the base film 1 has an irregular change, the film thickness of the magnetic layer 5 on the base film 1 at the measurement point is measured. The computer 9 that inputs the measured values of 7 compares the two measured values and calculates them accurately.
【0014】なお、本実施の形態では、磁気テープの例
で説明したが、磁気テープに限らず、他の帯状被成膜物
上に成膜した薄膜の膜厚を測定する場合にも同様の効果
あることは申す迄もない。Although the present embodiment has been described with reference to a magnetic tape as an example, the present invention is not limited to a magnetic tape, but is also applicable to the case of measuring the thickness of a thin film formed on another belt-shaped film-forming object. It goes without saying that it is effective.
【0015】また、ベースフィルム1の状態を測定する
のに、光の透過度合を測定した場合で説明したが、これ
もベースフィルム1の厚さや、表面の反射特性等のベー
スフィルム1の他の状態を測定することも可能である。In the above description, the state of the base film 1 is measured by measuring the degree of light transmission. However, this is also the case where the thickness of the base film 1 and the reflection characteristics of the surface of the base film 1 are measured. It is also possible to measure the condition.
【0016】[0016]
【発明の効果】以上のように、本発明のオンライン膜厚
測定方法とその装置によれば、その上に薄膜を成膜する
帯状被成膜物にイレギュラーな変化があっても、正確に
薄膜の膜厚を測定することができるという効果が得られ
る。As described above, according to the on-line film thickness measuring method and apparatus of the present invention, even if there is an irregular change in the strip-shaped film-forming object on which a thin film is formed, accurate measurement can be performed. The effect is obtained that the thickness of the thin film can be measured.
【図1】本発明の実施の形態におけるオンライン膜厚測
定方法を実施する装置において、成膜前のベースフィル
ムの状態を測定する動作説明図FIG. 1 is an explanatory diagram of an operation for measuring a state of a base film before film formation in an apparatus for performing an online film thickness measurement method according to an embodiment of the present invention.
【図2】本発明の実施の形態におけるオンライン膜厚測
定方法を実施する装置において、ベースフィルム上に磁
性体層を成膜する動作説明図FIG. 2 is an explanatory diagram of an operation of forming a magnetic layer on a base film in an apparatus for performing the online film thickness measuring method according to the embodiment of the present invention.
【図3】本発明の実施の形態におけるオンライン膜厚測
定方法を実施する装置において、成膜後のベースフィル
ムの状態を測定する動作説明図FIG. 3 is an operation explanatory diagram for measuring a state of a base film after film formation in an apparatus for performing an online film thickness measuring method according to an embodiment of the present invention.
【図4】本発明の実施の形態におけるオンライン膜厚測
定方法を実施する装置において、ベースフィルム上に成
膜した磁性体層の膜厚を測定する動作説明図FIG. 4 is an explanatory view of an operation for measuring the thickness of a magnetic layer formed on a base film in an apparatus for performing the online thickness measurement method according to the embodiment of the present invention.
【図5】従来のオンライン膜厚測定装置の動作説明図FIG. 5 is a diagram illustrating the operation of a conventional online film thickness measuring apparatus.
1 ベースフィルム 2,3 送りローラ 4 成膜装置 5 磁性体層 6,7 測定機 8 記憶装置 9 計算機 10 制御装置 REFERENCE SIGNS LIST 1 base film 2, 3 feed roller 4 film forming device 5 magnetic layer 6, 7 measuring device 8 storage device 9 computer 10 control device
Claims (2)
膜物の状態を測定し、帯状被成膜物を成膜装置に通過さ
せることにより、帯状被成膜物上に薄膜を成膜した後に
おける帯状被成膜物の前記測定箇所と同じ箇所の状態を
測定し、前記両測定値の変化量によって、帯状被成膜物
上に成膜した薄膜の膜厚をオンラインに求めるオンライ
ン膜厚測定方法。1. A thin film is formed on a band-shaped object by measuring a state of the band-shaped object before passing through the film-forming apparatus and passing the band-shaped object through a film-forming apparatus. An online film for measuring the state of the same place as the above-mentioned measurement point of the band-shaped film-formed object after the measurement, and obtaining the film thickness of the thin film formed on the band-shaped film-formed object online based on a change amount of both the measured values. Thickness measurement method.
と、通過した後に、それぞれ帯状被成膜物の状態を測定
する測定機と、成膜装置を通過して走行する帯状被成膜
物の送り量を測定する測定機と、測定された帯状被成膜
物の送り量から、成膜装置通過前後の帯状被成膜物の状
態を測定する測定機の測定タイミングを制御する制御装
置と、成膜装置通過前の帯状被成膜物の状態の測定値を
記憶する記憶装置と、前記記憶装置に記憶された測定値
と成膜装置通過後の帯状被成膜物の状態の測定値とを比
較演算して帯状被成膜物上に成膜された薄膜の膜厚を算
出する計算機とを設けた請求項1に記載のオンライン膜
厚測定方法を実施する装置。2. A measuring device for measuring a state of a band-shaped film-forming object before and after the band-shaped film-forming object passes through the film-forming apparatus, and a band-shaped film-forming object traveling through the film-forming apparatus. The measuring timing of the measuring machine for measuring the feed amount of the film-formed object and the measuring device for measuring the state of the band-shaped film-formed object before and after passing through the film forming apparatus are controlled from the measured feed amount of the band-shaped film-formed object. A control device, a storage device for storing a measured value of the state of the band-shaped film before passing through the film forming apparatus, and a measured value stored in the storage device and a state of the band-shaped film formed after passing the film forming device. 2. An apparatus for performing the on-line film thickness measuring method according to claim 1, further comprising a computer for calculating a thickness of the thin film formed on the belt-shaped film-forming object by performing a calculation operation by comparing the measured value with the measured value.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000341512A JP2002148035A (en) | 2000-11-09 | 2000-11-09 | Online film thickness measuring method and device thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000341512A JP2002148035A (en) | 2000-11-09 | 2000-11-09 | Online film thickness measuring method and device thereof |
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Publication Number | Publication Date |
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JP2002148035A true JP2002148035A (en) | 2002-05-22 |
Family
ID=18816241
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JP2000341512A Pending JP2002148035A (en) | 2000-11-09 | 2000-11-09 | Online film thickness measuring method and device thereof |
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JP (1) | JP2002148035A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100334427C (en) * | 2006-02-20 | 2007-08-29 | 南京航空航天大学 | Automatic measurement device and method for colloid layer of bitumite |
JP2011043392A (en) * | 2009-08-20 | 2011-03-03 | Toyota Motor Corp | Film thickness measuring device |
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2000
- 2000-11-09 JP JP2000341512A patent/JP2002148035A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100334427C (en) * | 2006-02-20 | 2007-08-29 | 南京航空航天大学 | Automatic measurement device and method for colloid layer of bitumite |
JP2011043392A (en) * | 2009-08-20 | 2011-03-03 | Toyota Motor Corp | Film thickness measuring device |
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