JP2002100953A5 - - Google Patents

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JP2002100953A5
JP2002100953A5 JP2001234288A JP2001234288A JP2002100953A5 JP 2002100953 A5 JP2002100953 A5 JP 2002100953A5 JP 2001234288 A JP2001234288 A JP 2001234288A JP 2001234288 A JP2001234288 A JP 2001234288A JP 2002100953 A5 JP2002100953 A5 JP 2002100953A5
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JP2001234288A
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JP2002100953A (ja
JP5127014B2 (ja
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JP2001234288A 2000-08-11 2001-08-01 前面放出により作成した膜上に加工した薄膜共振器 Expired - Fee Related JP5127014B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/637,069 US6355498B1 (en) 2000-08-11 2000-08-11 Thin film resonators fabricated on membranes created by front side releasing
US09/637,069 2000-08-11

Publications (3)

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JP2002100953A JP2002100953A (ja) 2002-04-05
JP2002100953A5 true JP2002100953A5 (ja) 2008-09-04
JP5127014B2 JP5127014B2 (ja) 2013-01-23

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JP2001234288A Expired - Fee Related JP5127014B2 (ja) 2000-08-11 2001-08-01 前面放出により作成した膜上に加工した薄膜共振器

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US (1) US6355498B1 (ja)
EP (1) EP1180494B1 (ja)
JP (1) JP5127014B2 (ja)
DE (1) DE60125660T2 (ja)

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