JP2001201476A - Acid densitometer and method for measuring acid concentration - Google Patents

Acid densitometer and method for measuring acid concentration

Info

Publication number
JP2001201476A
JP2001201476A JP2000011988A JP2000011988A JP2001201476A JP 2001201476 A JP2001201476 A JP 2001201476A JP 2000011988 A JP2000011988 A JP 2000011988A JP 2000011988 A JP2000011988 A JP 2000011988A JP 2001201476 A JP2001201476 A JP 2001201476A
Authority
JP
Japan
Prior art keywords
acid solution
acid
acid concentration
measurement
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000011988A
Other languages
Japanese (ja)
Other versions
JP3610858B2 (en
Inventor
Toshihiko Nonaka
俊彦 野中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP2000011988A priority Critical patent/JP3610858B2/en
Publication of JP2001201476A publication Critical patent/JP2001201476A/en
Application granted granted Critical
Publication of JP3610858B2 publication Critical patent/JP3610858B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide an acid densitometer which has satisfactory maintainability because of a small number of parts, can stably work for a long time because of the low frequency of setting failures and can be inexpensively manufactured. SOLUTION: This acid densitometer 1 has an electromagnetic densitometer 2 and a level difference type dilution device 3. The electromagnetic densitometer includes a measuring part 2a with an acid concentration measurement accuracy to secure region for measuring the electrical conductivity of a dilute acid solution 13a and an arithmetic part 2b for calculating the acid concentration of a measurement acid solution 9a from a measured value of the electrical conductivity and a dilution ratio of the dilute acid solution 13a. The diluting device includes a measurement acid solution-storing tank 5a, a dilute solution-storing tank 5b, pipelines 6a and 6b and a mixing tank 7 for diluting the measurement acid solution 9a to the measurement accuracy securing region. The acid concentration of the measurement acid solution 9 is obtained by measuring the acid concentration of the dilute acid solution 13a diluted to the measurement accuracy securing region by the diluting device 3, with the use of the electromagnetic densitometer 2.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、酸濃度計および酸
濃度測定法に関する。具体的には、本発明は、電磁濃度
計と希釈装置とを備え、酸液の酸濃度を正確に測定する
ことができる酸濃度計および酸濃度測定法に関する。
The present invention relates to an acid concentration meter and an acid concentration measuring method. Specifically, the present invention relates to an acid concentration meter and an acid concentration measurement method that include an electromagnetic densitometer and a diluting device and that can accurately measure the acid concentration of an acid solution.

【0002】[0002]

【従来の技術】例えば鋼帯の製造工程では、一般的に、
複数の酸洗槽にそれぞれ収容された酸液に鋼帯を連続的
に浸漬することにより、酸洗が行われる。この酸洗で
は、酸洗量の増加によって各酸洗槽にそれぞれ収容され
た酸液の酸濃度が徐々に低下するため、酸洗槽に酸液を
補給する必要がある。しかし、この補給量が多過ぎる
と、酸洗槽に収容された酸液の酸濃度が目標値よりも高
くなり過ぎて過酸洗が発生するとともに酸原単位が上昇
し、一方、補給量が少な過ぎると、酸洗槽に収容された
酸液の酸濃度が目標値よりも低くなり過ぎて酸洗不良が
発生する。そこで、酸洗槽に補給する酸液の酸濃度を正
確に測定して、酸洗槽への酸液の補給量を過不足ないよ
うに決定することが重要である。
2. Description of the Related Art In a steel strip manufacturing process, for example, generally,
Pickling is performed by continuously immersing the steel strip in an acid solution stored in each of a plurality of pickling tanks. In this pickling, it is necessary to replenish the pickling tank with the pickling tank because the acid concentration of the pickling tank contained in each pickling tank gradually decreases as the pickling amount increases. However, if the replenishment amount is too large, the acid concentration of the acid solution contained in the pickling tank becomes too high from the target value, causing over-acid cleaning and an increase in the basic unit of acid. If the amount is too small, the acid concentration of the acid solution contained in the pickling tank will be too low below the target value, resulting in poor pickling. Therefore, it is important to accurately measure the acid concentration of the acid solution to be supplied to the pickling tank and determine the amount of the acid solution to be supplied to the pickling tank so as not to be excessive or insufficient.

【0003】従来、酸洗槽に収容された酸液の酸濃度を
正確に測定することができる分析計として、微量のサン
プル液、試薬および洗浄液を交互に測定セル内に導入す
ることにより酸濃度を求める中和滴定式分析計が知られ
ている。しかし、この中和滴定式分析計は非常に高価で
ある。また、オフライン計器であるために連続測定を行
うことができず、酸洗槽に補給する酸液の酸濃度をオン
ライン制御するために用いる工業計器としては、適当で
ない。
Conventionally, as an analyzer capable of accurately measuring the acid concentration of an acid solution contained in a pickling tank, a small amount of a sample solution, a reagent and a washing solution are alternately introduced into a measuring cell to thereby obtain an acid concentration. Is known. However, this neutralization titration analyzer is very expensive. Moreover, since it is an off-line instrument, continuous measurement cannot be performed, and it is not suitable as an industrial instrument used for on-line control of the acid concentration of the acid solution supplied to the pickling tank.

【0004】酸液の濃度を測定することができる工業計
器として、電磁濃度計が知られている。この電磁濃度計
は、測定する酸液(本明細書では、測定対象であるこの
酸液を「測定酸液」という。)の導電率を測定し、この
測定値に基づいて酸濃度を求める濃度計であり、安価で
あって酸濃度を正確に求めることができる。しかし、こ
の電磁濃度計には、酸濃度の測定を正確に行うことがで
きる測定精度保証域がある。
[0004] As an industrial instrument capable of measuring the concentration of an acid solution, an electromagnetic densitometer is known. This electromagnetic densitometer measures the conductivity of an acid solution to be measured (this acid solution to be measured is referred to as a “measurement acid solution” in this specification), and determines the acid concentration based on the measured value. It is inexpensive and can accurately determine the acid concentration. However, this electromagnetic densitometer has a measurement accuracy guarantee region in which the acid concentration can be accurately measured.

【0005】図6は、酸液(塩酸)の酸濃度と導電率と
の関係の一例を示すグラフである。図6のグラフに実線
で示すように、測定する塩酸の酸濃度が0%(本明細書
では特にことわりがない限り「%」は「質量%」を意味
する。)以上20%未満の範囲では導電率は単調増加す
るが、酸濃度が20%になると導電率は最大となり、さ
らに酸濃度が20%超40%以下の範囲では導電率は単
調減少する。このため、例えば、電磁濃度計による導電
率の測定値が0.7s/cmである場合、酸濃度が約1
5%であるのか約28%であるのかを判定することがで
きない。また、このグラフにも示すように、酸濃度が1
5%超28%以下の範囲bは、電磁濃度計の分解精度が
低く測定精度保証範囲外である。このため、この電磁濃
度計では、15%超28%以下という範囲bの酸濃度は
測定できず、例えば、酸濃度が0%超15%以下である
測定精度保証域aと、酸濃度が28%超40%以下であ
る測定精度保証域cとを設定せざるを得なかった。この
ため、この電磁濃度計を、酸洗槽に供給する酸液の酸濃
度の測定に適用しようとすると、測定範囲が狭過ぎると
いう問題があった。
FIG. 6 is a graph showing an example of the relationship between the acid concentration of an acid solution (hydrochloric acid) and the electrical conductivity. As shown by the solid line in the graph of FIG. 6, when the acid concentration of the hydrochloric acid to be measured is in the range of 0% (in this specification, “%” means “% by mass” unless otherwise specified) or more and less than 20%. Although the conductivity monotonically increases, the conductivity becomes maximum when the acid concentration becomes 20%, and further decreases monotonically when the acid concentration is more than 20% and 40% or less. Therefore, for example, when the measured value of the conductivity by the electromagnetic densitometer is 0.7 s / cm, the acid concentration is about 1
It cannot be determined whether it is 5% or about 28%. Also, as shown in this graph, the acid concentration was 1
In the range b of more than 5% and 28% or less, the resolution of the electromagnetic densitometer is low and is out of the measurement accuracy guarantee range. Therefore, this electromagnetic densitometer cannot measure an acid concentration in a range b of more than 15% to 28% or less. For example, a measurement accuracy guaranteed area a in which the acid concentration is more than 0% and 15% or less, and an acid concentration of 28% or less. % Of the measurement accuracy assurance range c which is more than 40% or less. Therefore, when this electromagnetic densitometer is applied to the measurement of the acid concentration of the acid solution supplied to the pickling tank, there is a problem that the measurement range is too narrow.

【0006】図7は、塩酸以外の酸液について、酸濃度
と導電率との関係の一例を、塩化ナトリウムと対比させ
て示すグラフである。図7にグラフで示すように、硝酸
および硫酸等も、塩酸と同様の傾向を示すため、電磁濃
度計には、測定精度保証域を適宜設定せざるを得ない。
そこで、特開平9−26404号公報には、メインプロ
ーブを、水により希釈された酸液(本明細書では「希釈
酸液」という。)に浸漬してこの希釈酸液の導電率を検
出し、この希釈酸液の導電率対濃度の関係より、検出し
た導電率に対応する濃度を決定することにより、酸濃度
を求めることが記載されている。
FIG. 7 is a graph showing an example of the relationship between the acid concentration and the conductivity of an acid solution other than hydrochloric acid in comparison with sodium chloride. As shown in the graph of FIG. 7, nitric acid, sulfuric acid, and the like also show the same tendency as hydrochloric acid, so that the measurement accuracy assurance range must be set appropriately in the electromagnetic densitometer.
Japanese Patent Application Laid-Open No. 9-26404 discloses that the main probe is immersed in an acid solution diluted with water (referred to as “dilute acid solution” in this specification) to detect the conductivity of the diluted acid solution. It is described that the acid concentration is determined by determining the concentration corresponding to the detected conductivity from the relationship between the conductivity and the concentration of the diluted acid solution.

【0007】[0007]

【発明が解決しようとする課題】しかし、酸液の酸濃度
と導電率との間には、図6および図7を参照しながら前
述した関係が存在するため、特開平9−26404号公
報により提案された発明を実施するには、少なくとも2
基の導電率計や制御装置さらには記憶部等を設けて、酸
濃度が0〜20%未満の範囲にあるのか、あるいは20
〜40%の範囲にあるのかを判定する必要がある。この
ため、この発明によっても、装置が複雑化して高価にな
ってしまう。
However, since the relationship described above with reference to FIGS. 6 and 7 exists between the acid concentration and the conductivity of the acid solution, Japanese Patent Application Laid-Open No. 9-26404 discloses To implement the proposed invention, at least 2
A basic conductivity meter, a control device, and a storage unit are provided so that the acid concentration is in the range of 0 to less than 20%, or
It is necessary to determine whether it is within the range of 4040%. For this reason, according to the present invention, the apparatus is complicated and expensive.

【0008】本発明の目的は、部品点数が少ないために
保守性が良好であるとともに設備故障の頻度が少ないこ
とから長期間安定稼働でき、さらに極めて安価に製作す
ることができる酸濃度計および酸濃度測定法を提供する
ことである。
It is an object of the present invention to provide an acid concentration meter and an acid concentration meter which can be operated stably for a long period of time because the number of parts is small and the maintainability is good and the frequency of equipment failure is small, and which can be manufactured at extremely low cost. The purpose is to provide a method for measuring the concentration.

【0009】[0009]

【課題を解決するための手段】本発明は、測定酸液を電
磁濃度計の測定精度保証域の酸濃度に一旦希釈してから
酸濃度を測定し、この測定値とこの希釈の際の希釈比と
により、測定酸液の酸濃度を正確に求めることができる
こと、さらには、この希釈を水頭差式希釈装置を用いて
行うことが、設備コストの上昇を大幅に抑制できるとと
もに、測定精度を極めて容易かつ確実に所望の程度に設
定することができるために望ましいこと、という新規な
知見に基づくものである。
SUMMARY OF THE INVENTION According to the present invention, an acid solution is temporarily diluted to an acid concentration within a measurement accuracy guarantee range of an electromagnetic densitometer, and then the acid concentration is measured. By using the ratio, it is possible to accurately determine the acid concentration of the acid solution to be measured, and furthermore, performing this dilution using a head difference type diluter can greatly suppress the increase in equipment cost and improve the measurement accuracy. This is based on a novel finding that it is desirable to be able to set the desired degree extremely easily and reliably.

【0010】本発明は、酸液の酸濃度の測定精度保証域
を有する電磁濃度計と、測定対象である測定酸液を測定
精度保証域の酸濃度に希釈する希釈装置とを備え、電磁
濃度計を用いて、希釈装置により測定精度保証域の酸濃
度に希釈された希釈酸液の酸濃度を測定することによ
り、測定酸液の酸濃度を求めることを特徴とする酸濃度
計である。
The present invention comprises an electromagnetic densitometer having an area for guaranteeing the measurement accuracy of the acid concentration of an acid solution, and a diluting device for diluting the measured acid solution to be measured to an acid concentration within the measurement accuracy guarantee range. An acid concentration meter characterized in that an acid concentration of a measured acid solution is obtained by measuring an acid concentration of a diluted acid solution diluted to an acid concentration in a measurement accuracy assurance range by a diluter using a meter.

【0011】この本発明にかかる酸濃度計では、電磁濃
度計が、希釈酸液の導電率を測定する測定部と、希釈酸
液の導電率の測定値および希釈酸液の希釈比に基づい
て、測定酸液の酸濃度を算出する演算部とを有すること
が、例示される。
In the acid concentration meter according to the present invention, the electromagnetic concentration meter includes a measuring unit for measuring the conductivity of the diluted acid solution, and a measuring unit for measuring the conductivity of the diluted acid solution and a dilution ratio of the diluted acid solution. And an arithmetic unit for calculating the acid concentration of the measurement acid solution.

【0012】これらの本発明にかかる酸濃度計では、希
釈装置が、水頭差式希釈装置であることが、設備コスト
の上昇を大幅に抑制できるとともに、測定精度を極めて
容易かつ確実に所望の程度に設定することができるため
に望ましい。
In the acid concentration meter according to the present invention, since the diluting device is a head difference type diluting device, it is possible to greatly suppress an increase in equipment cost, and it is possible to extremely easily and surely measure the accuracy of measurement. Is desirable because it can be set to

【0013】この場合に、水頭差式希釈装置は、略同一
高さに設置された測定酸液収容槽および希釈液収容槽
と、該測定酸液収容槽および希釈液収容槽それぞれに下
方へ向けて接続された二本の配管と、該二本の配管の下
方に接続されて測定酸液および希釈液を混合する混合槽
とを有することが、例示される。
In this case, the head difference type diluting device includes a measuring acid solution storing tank and a diluting solution storing tank installed at substantially the same height, and a measuring acid solution storing tank and a diluting solution storing tank which are respectively directed downward. It is exemplified to have two pipes connected together and a mixing tank connected below the two pipes to mix the measuring acid solution and the diluting liquid.

【0014】この本発明にかかる酸濃度計では、電磁濃
度計の測定部が、混合槽に設けられることが、例示され
る。
In the acid concentration meter according to the present invention, it is exemplified that the measurement unit of the electromagnetic concentration meter is provided in the mixing tank.

【0015】これらの本発明にかかる酸濃度計では、混
合槽における測定酸液および希釈液それぞれの混合比
が、酸液収容槽に供給された測定酸液、および希釈液収
容槽に供給された希釈液それぞれの水頭位置を略同一と
すること、または、この水頭位置を異ならせることによ
り、調整されることが例示される。
In the acid concentration meter according to the present invention, the respective mixing ratios of the measuring acid solution and the diluting solution in the mixing tank are supplied to the measuring acid solution supplied to the acid solution storing tank and the diluting solution storing tank. The adjustment is made by making the head positions of the diluents substantially the same or by making the head positions different.

【0016】この本発明にかかる酸濃度計では、水頭位
置を略同一とすることは、二本の配管それぞれの内径を
異ならせること、および、二本の配管にそれぞれ設けら
れた二つの流量調整弁の開度をそれぞれ調整することの
うちの少なくとも一方により、行われることが例示され
る。
In the acid concentration meter according to the present invention, making the water head positions substantially the same means that the inner diameters of the two pipes are different from each other, and the two flow rate adjustments respectively provided on the two pipes. This is exemplified by at least one of adjusting the opening of the valve.

【0017】別の観点からは、本発明は、測定対象であ
る測定酸液を、電磁濃度計の測定精度保証域の酸濃度へ
希釈した後、測定精度保証域へ希釈された希釈酸液の酸
濃度を電磁濃度計を用いて測定し、電磁濃度計による希
釈酸液の酸濃度の測定値と希釈酸液の希釈比とに基づい
て、測定酸液の酸濃度を算出することを特徴とする酸濃
度測定法である。
From another viewpoint, the present invention provides a method for diluting an acid solution to be measured into an acid concentration in a measurement accuracy guarantee area of an electromagnetic densitometer, and then diluting the diluted acid solution into the measurement accuracy guarantee area. Measuring the acid concentration using an electromagnetic densitometer, and calculating the acid concentration of the measured acid solution based on the measured value of the acid concentration of the diluted acid solution by the electromagnetic densitometer and the dilution ratio of the diluted acid solution. This is an acid concentration measurement method.

【0018】この本発明にかかる酸濃度測定法では、測
定酸液の希釈が、水頭差式希釈装置を用いて、行われる
ことが、この酸濃度測定法の実施に要するコストの上昇
を大幅に抑制できるとともに、測定精度を極めて容易か
つ確実に所望の程度に設定することができるために望ま
しい。
In the acid concentration measuring method according to the present invention, the dilution of the acid solution to be measured is performed by using a head difference type diluting apparatus, which significantly increases the cost required for performing the acid concentration measuring method. This is desirable because the measurement accuracy can be set very easily and reliably to a desired degree, as well as being suppressed.

【0019】[0019]

【発明の実施の形態】(第1実施形態)以下、本発明に
かかる酸濃度計および酸濃度測定法の実施の形態を、添
付図面を参照しながら詳細に説明する。なお、以降の実
施の形態の説明では、酸液が塩酸である場合を例にと
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) Hereinafter, embodiments of an acid concentration meter and an acid concentration measuring method according to the present invention will be described in detail with reference to the accompanying drawings. In the following description of the embodiments, an example in which the acid solution is hydrochloric acid will be described.

【0020】図1は、本実施形態の酸濃度計1の構成の
一例を模式的に示す説明図である。また、図2は、図1
におけるA部の拡大図である。図1に示すように、この
酸濃度計1は、電磁濃度計2と、水頭差式希釈装置3と
を有する。以下、酸濃度計1のこれらの構成要素につい
て、順次説明する。
FIG. 1 is an explanatory view schematically showing an example of the configuration of the acid concentration meter 1 of the present embodiment. FIG. 2 is similar to FIG.
It is an enlarged view of the A section in. As shown in FIG. 1, the acid concentration meter 1 has an electromagnetic concentration meter 2 and a head difference type dilution device 3. Hereinafter, these components of the acid concentration meter 1 will be sequentially described.

【0021】〔電磁濃度計2〕本実施形態の酸濃度計1
は電磁濃度計2を有する。この電磁濃度計2は、図1に
示すように、測定部2aと演算部(アンプ)2bとを有
しており、図6のグラフを参照しながら前述した公知の
電磁濃度計である。すなわち、図6のグラフに示すよう
に、この電磁濃度計2は、酸濃度が0%以上15%以下
である測定精度保証域aと、酸濃度が28%超40%以
下である測定精度保証域cとを設定されている。
[Electromagnetic concentration meter 2] Acid concentration meter 1 of the present embodiment
Has an electromagnetic densitometer 2. As shown in FIG. 1, the electromagnetic densitometer 2 has a measuring unit 2a and a calculating unit (amplifier) 2b, and is a known electromagnetic densitometer described above with reference to the graph of FIG. That is, as shown in the graph of FIG. 6, the electromagnetic densitometer 2 has a measurement accuracy guarantee area a in which the acid concentration is 0% or more and 15% or less, and a measurement accuracy guarantee area in which the acid concentration is more than 28% and 40% or less. The area c is set.

【0022】測定部2aは、後述する混合槽7に設けら
れており、0%以上15%以下の酸濃度に希釈されて混
合槽7内に収容された希釈酸液13aの導電率(電気伝
導度)σを測定する。
The measuring section 2a is provided in a mixing tank 7 to be described later. The measuring section 2a is diluted to an acid concentration of 0% or more and 15% or less and stored in the mixing tank 7 with the conductivity (electric conductivity) of the diluted acid solution 13a. Degree) σ is measured.

【0023】一方、演算部2bは、測定部2aからの導
電率σの測定データを入力され、この測定データに基づ
いて、希釈酸液13aの酸濃度CHCl を算出する。
[0023] On the other hand, the calculation unit 2b is input to the measurement data of the conductivity σ of the measuring portion 2a, on the basis of the measured data, calculates the acid concentration C HCl in dilute acid solution 13a.

【0024】また、演算部2bの正面には、算出された
酸濃度CHCl がリアルタイムで表示される表示部4aが
設けられている。後述する微調整の際には、同じく後述
する測定酸液供給槽5aから供給された検定用酸液9
a’の酸濃度が、測定精度保証域aの上限値である15
%を指示するように、表示部4aの指示値を見ながら後
述する流量調整弁10a、10bの開度を手動で適宜設
定する。
In addition, a display unit 4a for displaying the calculated acid concentration CHCl in real time is provided in front of the calculation unit 2b. At the time of fine adjustment described later, the test acid solution 9 supplied from the measurement acid solution supply tank 5a also described later is used.
The acid concentration of a ′ is 15 which is the upper limit of the measurement accuracy guarantee area a.
The opening of the flow rate adjusting valves 10a and 10b, which will be described later, is manually set as appropriate while referring to the indicated value on the display unit 4a so as to indicate%.

【0025】また、演算部2bは、後述する粗調整およ
び微調整を経て設定された水頭差式希釈装置3の希釈比
x’を手動で入力する入力部4bが設けられる。入力部
4bから入力された希釈比x’は、演算部2bに記憶・
保持される。
The calculating section 2b is provided with an input section 4b for manually inputting the dilution ratio x 'of the head difference type dilution apparatus 3 set through coarse adjustment and fine adjustment described later. The dilution ratio x ′ input from the input unit 4b is stored in the arithmetic unit 2b.
Will be retained.

【0026】また、演算部2bは、記憶・保持された希
釈比x’に基づいて、測定酸液9aの酸濃度を算出す
る。すなわち、演算部2bは、測定酸液9aの酸濃度
を、自身が演算により求めた希釈酸液13aの酸濃度の
測定値CHCl と、水頭差式希釈装置3による希釈酸液1
3aの希釈比x’との積CHCl ・x’として算出し、表
示部4cに表示する。
The calculating section 2b calculates the acid concentration of the measured acid solution 9a based on the stored and retained dilution ratio x '. That is, the calculation unit 2b calculates the acid concentration of the measured acid solution 9a, the measured value C HCl of the acid concentration of the diluted acid solution 13a obtained by the calculation itself, and the diluted acid solution 1 by the head difference type dilution device 3.
The product is calculated as the product C HCl · x ′ of the dilution ratio x ′ of 3a and displayed on the display unit 4c.

【0027】本実施形態で用いる電磁濃度計2のこれら
以外の構成は、工業計器として周知慣用の電磁濃度計2
の構成と同じであるため、これ以上の説明は省略する。
The other components of the electromagnetic densitometer 2 used in the present embodiment are the same as those commonly used as industrial instruments.
Since the configuration is the same as that described above, further description is omitted.

【0028】本実施形態の電磁濃度計2は、以上のよう
に構成される。
The electromagnetic densitometer 2 of the present embodiment is configured as described above.

【0029】〔水頭差式希釈装置3〕本実施形態の酸濃
度計1は水頭差式希釈装置3を有する。本実施形態で
は、この水頭差式希釈装置3は、同一高さに設置された
測定酸液収容槽5aおよび希釈液収容槽5bと、この測
定酸液収容槽5aおよび希釈液収容槽5bそれぞれに、
下方へ向けて接続された二本の配管6a、6bと、この
二本の配管6a、6bの下方に接続されて測定酸液9a
および希釈液9bを混合する混合槽7とを有する。
[Hydraulic Head Type Dilution Apparatus 3] The acid concentration meter 1 of the present embodiment has a hydrohead type diluting apparatus 3. In the present embodiment, the head difference type diluting device 3 includes a measurement acid solution storage tank 5a and a diluent solution storage tank 5b installed at the same height, and a measurement acid solution storage tank 5a and a diluent solution storage tank 5b, respectively. ,
Two pipes 6a, 6b connected downward, and a measuring acid solution 9a connected below the two pipes 6a, 6b.
And a mixing tank 7 for mixing the diluent 9b.

【0030】この二本の配管6a、6bは、いずれも、
口径が例えば5〜30mm程度の大口径管を用いてお
り、測定酸液9aの詰まりが防止される。また、各部の
材質は、測定酸液収容槽5aおよび希釈液収容槽5b:
耐熱性塩化ビニルやPTFE製、配管6a、6b:耐熱
性塩化ビニルやPTFE製、混合槽7:耐熱性塩化ビニ
ルやPTFE製であり、塩酸による腐食にも長期間にわ
たって充分に耐えることができる材質により構成されて
いるため、本実施形態の水頭差式希釈装置3は、長期間
に渡って充分に安定して稼働することができる。
Each of the two pipes 6a and 6b is
A large-diameter tube having a diameter of, for example, about 5 to 30 mm is used, and clogging of the measuring acid solution 9a is prevented. The material of each part is as follows: the measuring acid solution storage tank 5a and the diluting solution storage tank 5b:
Made of heat-resistant vinyl chloride or PTFE, piping 6a, 6b: made of heat-resistant vinyl chloride or PTFE, mixing tank 7: made of heat-resistant vinyl chloride or PTFE, and can withstand corrosion by hydrochloric acid for a long time. Therefore, the head difference type dilution device 3 of the present embodiment can operate sufficiently stably for a long period of time.

【0031】また、本実施形態の水頭差式希釈装置3
は、簡素な構成であるために部品点数を最小限に抑制し
てあるとともに可動部が少なく、かつ電磁弁や流量セン
サ等の高価な部品を用いていない。このため、制作費は
最小限であり、極めて安価に構成される。
The head difference type dilution device 3 of the present embodiment
Has a simple structure, the number of parts is minimized, the number of movable parts is small, and expensive parts such as a solenoid valve and a flow sensor are not used. For this reason, the production cost is minimal and the construction is extremely inexpensive.

【0032】また、図1および図2に示すように、本実
施形態では、測定酸液収容槽5aおよび希釈液収容槽5
bそれぞれの上部に同じ設置高さで、流入液量を上回る
排出液量を確保できる口径を有するオーバーフロー配管
8a、8bがそれぞれ水平方向へ向けて設置されてい
る。
As shown in FIGS. 1 and 2, in this embodiment, the measuring acid solution storage tank 5a and the diluting solution storage tank 5
The overflow pipes 8a and 8b having the same installation height and having a diameter capable of securing a discharge liquid amount exceeding the inflow liquid amount are respectively installed in the upper part of each of the b.

【0033】図2に示すように、測定酸液収容槽5aの
内部中心にもオーバーフロー配管8a’が設置されてい
るとともに、希釈液収容槽5bの内部中心にもオーバー
フロー配管8b’(図示しない。)が設置されている。
これにより、充分な排出液量が確保される。
As shown in FIG. 2, an overflow pipe 8a 'is provided at the center of the measuring acid solution storage tank 5a, and an overflow pipe 8b' (not shown) is also provided at the center of the diluting liquid storage tank 5b. ) Is installed.
This ensures a sufficient amount of discharged liquid.

【0034】なお、オーバーフロー配管8a、8a’、
8b、8b’の設置形態は、図示例に限定されるもので
はなく、測定酸液収容槽5aに供給された測定酸液9
a、および希釈液収容槽5bに供給された希釈液9bそ
れぞれの水頭位置の変動をできるだけ抑制できるよう
に、設置されていればよい。
The overflow pipes 8a, 8a ',
The installation form of 8b, 8b 'is not limited to the illustrated example, but the measurement acid solution 9 supplied to the measurement acid solution storage tank 5a.
a and the diluent 9b supplied to the diluent storage tank 5b may be installed so that the fluctuation of the water head position of each diluent 9b can be suppressed as much as possible.

【0035】このため、測定酸液収容槽5aに供給され
た測定酸液9a、および希釈液収容槽5bに供給された
希釈液9bそれぞれの液面が上昇してくると、オーバー
フロー配管8a、8a’、8b、8b’を介して、過剰
な測定酸液9aおよび希釈液9bがそれぞれオーバーフ
ローする。これにより、測定酸液収容槽5aに供給され
た測定酸液9a、および希釈液収容槽5bに供給された
希釈液9bそれぞれの液面の変動は、オーバーフロー配
管8a、8a’、8b、8b’を測定酸液収容槽5aお
よび希釈液収容槽5bにそれぞれ設置可能な範囲で、測
定酸液収容槽5aおよび希釈液収容槽5bそれぞれの全
高さより限りなく低い範囲に最小限に抑制されて液面が
安定し、同一の水頭高さHが容易に維持される。この
際、配管6a、6bに作用する測定酸液9a、希釈液9
bそれぞれの水頭変動誤差はH' /Hとして求められる
が、この誤差H' /Hを適宜設定することにより希釈精
度および再現性をいずれも充分に確保することができ
る。例えば、高さH’を5mm、水頭高さHを300m
mとそれぞれ設定すれば、誤差H' /Hは約0.017
となり、工業計器として要求される精度であるFs±
0.25〜0.50を充分に満足することができる。こ
のため、本実施形態の水頭差式希釈装置3は、測定精度
(測定誤差)の設定の自由度が極めて高い。このよう
に、測定酸液収容槽5aおよび希釈液収容槽5bは、い
ずれも、水頭位置を一定に保つ役割を奏する。
Therefore, when the liquid levels of the measuring acid solution 9a supplied to the measuring acid solution storage tank 5a and the diluent 9b supplied to the diluting solution storage tank 5b rise, the overflow pipes 8a, 8a Excess measuring acid solution 9a and diluting solution 9b overflow through ', 8b and 8b', respectively. Thus, the fluctuations in the liquid levels of the measurement acid solution 9a supplied to the measurement acid solution storage tank 5a and the diluent 9b supplied to the diluent solution storage tank 5b are caused by the overflow pipes 8a, 8a ', 8b, 8b'. Is minimized to a range that can be set in the measuring acid solution storage tank 5a and the diluting solution storage tank 5b, respectively, to a level as low as possible without exceeding the total height of the measuring acid solution storage tank 5a and the diluting solution storage tank 5b. Is stable, and the same head height H is easily maintained. At this time, the measuring acid solution 9a and the diluting solution 9 acting on the pipes 6a and 6b
b Each head variation error is obtained as H '/ H. By appropriately setting the error H' / H, both dilution accuracy and reproducibility can be sufficiently ensured. For example, the height H 'is 5 mm, and the water head height H is 300 m
m, the error H '/ H is about 0.017
And the accuracy required for industrial instruments, Fs ±
0.25 to 0.50 can be sufficiently satisfied. For this reason, the head difference type dilution apparatus 3 of this embodiment has a very high degree of freedom in setting the measurement accuracy (measurement error). Thus, both the measuring acid solution storage tank 5a and the diluting liquid storage tank 5b play a role of keeping the water head position constant.

【0036】本実施形態では、配管6a、6bそれぞれ
に流量調整弁10a、10bが設けられており、これら
流量調整弁10a、10bの開度を、表示部4aに表示
された希釈酸液13aの酸濃度の測定値CHCl を見なが
ら手動で適宜設定することにより、後述する希釈比x’
への微調整が行われる。
In the present embodiment, the flow control valves 10a and 10b are provided in the pipes 6a and 6b, respectively, and the opening degree of the flow control valves 10a and 10b is changed according to the diluent acid solution 13a displayed on the display unit 4a. By manually setting the measured value of the acid concentration while viewing the measured value of the HCl , the dilution ratio x ′ described later is obtained.
Is fine-tuned.

【0037】さらに、測定酸液収容槽5a、希釈液収容
槽5bには、それぞれ、エアー抜き用配管11a、11
bが設置されているとともに、混合槽7には、エアー抜
き用配管12a、12bが設置されている。
Further, the measuring acid solution storage tank 5a and the diluent solution storage tank 5b are respectively provided with air vent pipes 11a and 11b.
b, and the mixing tank 7 is provided with air vent pipes 12a and 12b.

【0038】本実施形態では、この水頭差式希釈装置3
による希釈比x’、すなわち混合槽7における測定酸液
9aおよび希釈液9bそれぞれの混合比は、測定酸液収
容槽5aに供給された測定酸液9a、および希釈液収容
槽5bに供給された希釈液9bそれぞれの水頭位置を同
一とすること、または、この水頭位置を異ならせること
を行われることにより、適宜調整される。以下、この水
頭差式希釈装置3による希釈比x’の設定について、詳
細に説明する。
In this embodiment, the head difference type dilution device 3
, Ie, the respective mixing ratios of the measuring acid solution 9a and the diluting solution 9b in the mixing tank 7 were supplied to the measuring acid solution 9a and the diluting solution tank 5b supplied to the measuring acid solution storing tank 5a. The diluting solution 9b is appropriately adjusted by making the water head positions the same or making the water head positions different. Hereinafter, the setting of the dilution ratio x ′ by the head difference type dilution device 3 will be described in detail.

【0039】水頭差式希釈装置3による希釈比x’は、
測定酸液9aの酸濃度の測定を行う前に、粗調整と微調
整との2段階により調整される。
The dilution ratio x ′ by the head difference type dilution device 3 is:
Before the measurement of the acid concentration of the measurement acid solution 9a, the adjustment is performed in two steps of coarse adjustment and fine adjustment.

【0040】第1段階である粗調整は、測定酸液9aと
して酸濃度が既知である検定用酸液9a’を用いて行わ
れる。本実施形態では、酸濃度が40%である検定用酸
液9a’を用いた。
The first step, the rough adjustment, is performed using a test acid solution 9a 'having a known acid concentration as the measurement acid solution 9a. In the present embodiment, the acid solution for test 9a 'having an acid concentration of 40% was used.

【0041】図3は、塩酸の酸濃度と導電率との関係の
一例を示すグラフである。
FIG. 3 is a graph showing an example of the relationship between the acid concentration of hydrochloric acid and the electrical conductivity.

【0042】同図にグラフで示すように、本実施形態で
用いる電磁濃度計2は、図3にグラフで示す導電率の測
定特性を有するため、この検定用酸液9a’による測定
値が、電磁濃度計2の測定精度保証域aの上限値である
15%となるように、水頭差式希釈装置3の希釈比の検
定(調整)を行う。
As shown in the graph of FIG. 3, the electromagnetic densitometer 2 used in the present embodiment has the conductivity measurement characteristics shown in the graph of FIG. Verification (adjustment) of the dilution ratio of the head difference type dilution apparatus 3 is performed so that the upper limit of the measurement accuracy guarantee area a of the electromagnetic densitometer 2 is 15%.

【0043】まず、この検定用酸液9a’を測定酸液収
容槽5aに、検定用酸液9a’がオーバーフロー配管8
a、8a’からオーバーフローするまで供給するととも
に、希釈液9bを希釈液収容槽5bに、希釈液9bがオ
ーバーフロー配管8b、8b’からオーバーフローする
まで供給する。
First, the test acid solution 9a 'is placed in the measuring acid solution storage tank 5a, and the test acid solution 9a' is
The diluent 9b is supplied to the diluent storage tank 5b until the diluent 9b overflows from the overflow pipes 8b and 8b '.

【0044】そして、(a)測定酸液収容槽5aに供給
された検定用酸液9a’、および希釈液収容槽5bに供
給された希釈液9bそれぞれの水頭位置を同一とした場
合に、電磁濃度計2の表示部4aの指示値が、この電磁
濃度計2の測定精度保証域の上限値(本実施形態では1
5%)付近の値となるように、検定用酸液9a’を排出
する配管6aと、希釈液を排出する配管6bとのそれぞ
れの内径に差を設けること、または(b)測定酸液収容
槽5aに供給された検定用酸液9a’、および希釈液収
容槽5bに供給された希釈液9bそれぞれの水頭位置を
異ならせた場合に、電磁濃度計2の表示部4aの指示値
が、この電磁濃度計2の測定精度保証域の上限値である
15%付近の値となるように、オーバーフロー配管8
a、8bの設置高さを互いに異ならせることにより、粗
調整が行われる。この粗調整により、40%の酸濃度を
有する検定用酸液9a’が、例えば14〜16%程度の
酸濃度を有する希釈酸液13a’に薄められるのである
から、この際の希釈比xは、例えば2.50〜2.86
程度となる。
(A) When the head positions of the test acid solution 9a 'supplied to the measurement acid solution storage tank 5a and the diluting solution 9b supplied to the diluting solution storage tank 5b are the same, The indicated value on the display unit 4a of the densitometer 2 is equal to the upper limit value of the measurement accuracy assurance range of the electromagnetic densitometer 2 (1 in this embodiment).
5%), a difference is provided between the inner diameters of the pipe 6a for discharging the test acid solution 9a 'and the pipe 6b for discharging the diluting liquid, or (b) storing the measured acid solution. When the head positions of the test acid solution 9a ′ supplied to the tank 5a and the diluent 9b supplied to the diluent storage tank 5b are changed, the indicated value on the display unit 4a of the electromagnetic concentration meter 2 becomes The overflow pipe 8 is set so as to have a value in the vicinity of 15%, which is the upper limit of the measurement accuracy assurance range of the electromagnetic densitometer 2.
By making the installation heights of a and 8b different from each other, coarse adjustment is performed. As a result of this coarse adjustment, the test acid solution 9a 'having an acid concentration of 40% is diluted to a diluted acid solution 13a' having an acid concentration of, for example, about 14 to 16%. , For example, 2.50 to 2.86
About.

【0045】さらに、水頭差式希釈装置3による希釈比
は、第2段階である微調整を行われて、最終的な希釈比
x’として設定される。
Further, the dilution ratio by the head difference type dilution device 3 is finely adjusted in the second stage, and is set as a final dilution ratio x '.

【0046】この微調整は、配管6a、6bそれぞれに
設けられた流量調整弁10a、10bの開度を、表示部
4aに表示される希釈酸液13a’の酸濃度が正確に1
5%に一致するように、調整する「合わせ込み」を行う
ことにより、表示部4aの指示値を、この電磁濃度計2
の測定精度保証域の上限値である15%に可及的正確に
一致させる。そして、一致したときの流量調整弁10
a、10bの開度に固定して、微調整を終了する。この
微調整により、40%の酸濃度が15%に薄められるの
であるから、この際の希釈比x’は、40/15=2.
6666となる。この微調整を終了した後に、検定用酸
液9a’を排出する。
In this fine adjustment, the opening degree of the flow control valves 10a and 10b provided in the pipes 6a and 6b, respectively, is adjusted so that the acid concentration of the dilute acid solution 13a 'displayed on the display unit 4a is exactly 1.
By performing “adjustment” to adjust so as to coincide with 5%, the indicated value on the display unit 4 a is read from the electromagnetic densitometer 2.
As high as possible to the upper limit value of 15% of the measurement accuracy assurance range. Then, when the flow rate is matched, the flow control valve 10
The fine adjustment is finished by fixing the opening degrees of a and 10b. By this fine adjustment, the acid concentration of 40% is reduced to 15%, and the dilution ratio x 'at this time is 40/15 = 2.
6666. After finishing the fine adjustment, the test acid solution 9a 'is discharged.

【0047】これにより、希釈比x’の精度が、工業用
計器として要求される精度:Fs±0.25〜0.50
を充分に満足する程度に維持される。このため、混合槽
7に収容された希釈酸液13aの希釈比x’の設定精度
および再現性をいずれも充分に確保できる。
As a result, the precision of the dilution ratio x 'is the precision required for an industrial instrument: Fs ± 0.25 to 0.50
Is maintained to a satisfactory degree. Therefore, both the setting accuracy and the reproducibility of the dilution ratio x 'of the diluted acid solution 13a contained in the mixing tank 7 can be sufficiently ensured.

【0048】このようにして、混合槽7に収容される希
釈酸液13aの希釈比x’を所望の値に調整できる。
Thus, the dilution ratio x 'of the diluted acid solution 13a contained in the mixing tank 7 can be adjusted to a desired value.

【0049】そして、流量調整弁10a、10bの開度
を、「合わせ込み」により決定された開度に固定して、
測定酸液収容槽5aに酸液9aを供給し、この測定酸液
9a、および希釈液収容槽5bに供給された希釈液9b
の混合が行われる。これにより、混合槽7内に収容され
た希釈酸液13aの酸濃度は、0%以上15%以下に正
確に調整される。
Then, the openings of the flow control valves 10a and 10b are fixed to the openings determined by the “fitting”,
The acid solution 9a is supplied to the measurement acid solution storage tank 5a, and the measurement acid solution 9a and the diluent 9b supplied to the diluent solution storage tank 5b are supplied.
Is performed. Thereby, the acid concentration of the diluted acid solution 13a accommodated in the mixing tank 7 is accurately adjusted to 0% or more and 15% or less.

【0050】この際に、混合槽7に収容された、酸濃度
が0〜15%に希釈された希釈酸液13aは、電磁濃度
計2により正確に酸濃度が測定される。
At this time, the acid concentration of the diluted acid solution 13 a contained in the mixing tank 7 and diluted to an acid concentration of 0 to 15% is accurately measured by the electromagnetic densitometer 2.

【0051】すなわち、本実施形態では、図6のグラフ
に破線で示すように、測定酸液13aの酸濃度を、測定
精度保証域である0〜15%に一旦希釈することによっ
て測定不能範囲bと、測定精度保証域aにあるのか区別
できない測定精度保証域cとをともに測定精度保証域a
へシフトさせることにより、希釈酸液13aの酸濃度C
HCl を正確に測定する。そして、演算部2bにより、測
定酸液9aの酸濃度を、希釈酸液13aの測定値CHCl
および希釈比x’の積として、正確に算出する。
That is, in the present embodiment, as shown by the broken line in the graph of FIG. 6, the acid concentration of the measurement acid solution 13a is once diluted to 0 to 15%, which is the measurement accuracy guarantee range, so that the measurement impossible range b And the measurement accuracy assurance area c which cannot be distinguished from the measurement accuracy assurance area a.
To the acid concentration C of the diluted acid solution 13a.
Measure HCl accurately. Then, the arithmetic unit 2b calculates the acid concentration of the measured acid solution 9a by the measured value C HCl of the diluted acid solution 13a.
And the product of the dilution ratio x '.

【0052】このように、本実施形態では、測定酸液9
aの酸濃度を測定精度保証域である0%以上15%以下
に希釈する水頭差式希釈装置3を用いている。
As described above, in this embodiment, the measuring acid solution 9
A head difference type dilution device 3 for diluting the acid concentration of a to 0% or more and 15% or less, which is a measurement accuracy guarantee region, is used.

【0053】この本実施形態の酸濃度計1は、従来の希
釈装置よりも簡素な構造であって安価かつ高精度かつ調
整容易な水頭差式希釈装置3を、公知の完成された工業
計器である電磁濃度計2とともに組み合わせて用いて構
成されており、これにより、以下に列記する効果が奏せ
られる。
The acid concentration meter 1 according to the present embodiment is a simple and inexpensive, highly accurate and easily adjustable head-head type dilution device 3 that is simpler than a conventional dilution device, and is a known completed industrial instrument. It is configured to be used in combination with a certain electromagnetic densitometer 2, whereby the effects listed below can be obtained.

【0054】(1)電磁濃度計2の狭い測定可能な範囲
を拡大できる。すなわち、本実施形態では、水頭差式希
釈装置3により、測定酸液9aの酸濃度を電磁濃度計2
の測定精度保証域である0〜15%に調整して導電率を
測定し、この測定値CHCl と図6にグラフで示す関係と
から、測定酸液9aの酸濃度を正確に測定できる領域に
自由に制御する。これにより、本実施形態によれば、測
定酸液9aの測定領域を0〜15%という狭い範囲に限
定せざるを得なかった従来の電磁濃度計に比較して、電
磁濃度計2の測定可能範囲を拡大して、その能力を最大
限に拡大することができる。
(1) The narrow measurable range of the electromagnetic densitometer 2 can be expanded. That is, in the present embodiment, the acid concentration of the measurement acid solution 9a is measured by the head difference type dilution device 3 using the electromagnetic concentration meter 2.
The conductivity is measured by adjusting the measurement accuracy to 0 to 15%, which is the measurement accuracy guarantee range, and from the measured value C HCl and the relationship shown in the graph of FIG. 6, the acid concentration of the measurement acid solution 9a can be accurately measured. Control freely. Thus, according to the present embodiment, the measurement of the electromagnetic densitometer 2 can be performed in comparison with the conventional electromagnetic densitometer in which the measurement region of the measurement acid solution 9a has to be limited to a narrow range of 0 to 15%. The range can be expanded to maximize its capabilities.

【0055】本実施形態において、電磁濃度計2が測定
する0〜15%の酸濃度は、工業用計器として測定精度
が保証されている範囲であることから、電磁濃度計2の
測定精度が向上する。
In the present embodiment, the acid concentration of 0 to 15% measured by the electromagnetic densitometer 2 is within the range in which the measurement accuracy is guaranteed as an industrial instrument, so that the measurement accuracy of the electromagnetic densitometer 2 is improved. I do.

【0056】(2)前述した手段により、混合槽7に収
容された希釈酸液13aの希釈比x’を適宜調整するこ
とにより、酸濃度計1の測定レンジを可変に設定できる
ため、測定範囲の選択を自由に行うことができる。
(2) The measurement range of the acid concentration meter 1 can be variably set by appropriately adjusting the dilution ratio x ′ of the diluted acid solution 13a contained in the mixing tank 7 by the above-described means. Can be freely selected.

【0057】(3)著しく安価かつ簡素な水頭差式希釈
装置3を用いるため、酸濃度計1も大幅に安価に簡素化
できる。このため、既存の各種設備、例えば鋼帯の酸洗
工程へ容易に導入・適用することができる。
(3) Since the remarkably inexpensive and simple head difference type dilution device 3 is used, the acid concentration meter 1 can be simplified at a significantly low cost. For this reason, it can be easily introduced and applied to existing various facilities, for example, a pickling process of a steel strip.

【0058】(4)水頭差式希釈装置3を用いて測定酸
液9aを希釈するため、測定酸液9aによる各部の詰ま
りが著しく抑制される。すなわち、既存の分析計では、
塩化鉄結晶やゴミ等の不純物が多量に含有された測定酸
液9aによる配管各部の詰まりを防止するためにフィル
ターを設置する必要があった。しかし、本実施形態で
は、水頭差式希釈装置3を用いて測定酸液9aを希釈し
てから測定を行うため、不純物の濃度を半減または数1
0分の1程度に低減することができる。これにより、測
定酸液9aの詰まりによる故障頻度を最小限に低減する
ことができ、長期間にわたって安定して稼働することが
できる。
(4) Since the measuring acid solution 9a is diluted using the head difference type diluting device 3, clogging of each part by the measuring acid solution 9a is remarkably suppressed. That is, with existing analyzers,
It was necessary to install a filter in order to prevent the piping from being clogged with the measuring acid solution 9a containing a large amount of impurities such as iron chloride crystals and dust. However, in this embodiment, since the measurement is performed after diluting the measuring acid solution 9a using the head difference type diluting device 3, the concentration of the impurity is reduced by half or the number 1
It can be reduced to about 1/0. Thus, the frequency of failures due to clogging of the measuring acid solution 9a can be reduced to a minimum, and stable operation can be performed for a long period of time.

【0059】なお、本実施形態においても配管各部の詰
まりを防止するためのフィルターを設置してもよいが、
これにより、フィルターの寿命延長を図ることもでき
る。
In this embodiment, a filter for preventing clogging of each part of the pipe may be provided.
Thereby, the life of the filter can be extended.

【0060】(5)測定酸液収容槽5aおよび希釈液収
容槽5bにそれぞれオーバーフロー配管8a、8a’、
8b、8b’を設置して、測定酸液収容槽5aに供給さ
れた測定酸液9a、および希釈液収容槽5bに供給され
た希釈液9bそれぞれの水頭位置の変動を抑制するた
め、高い精度で希釈比x’を安定化させることができ
る。
(5) The overflow pipes 8a and 8a 'are provided in the measurement acid solution storage tank 5a and the diluent storage tank 5b, respectively.
8b and 8b 'are installed to suppress fluctuations in the water head position of each of the measurement acid solution 9a supplied to the measurement acid solution storage tank 5a and the diluent 9b supplied to the diluent solution storage tank 5b. Can stabilize the dilution ratio x ′.

【0061】(6)酸濃度計1の全体の測定を、電磁濃
度計2の測定精度よりも向上して、高精度の濃度計測が
可能となる。すなわち、本実施形態の酸濃度計1の総合
の測定精度は、√{(測定酸液収容槽5aにおける水頭
位置の変動量)2 +(希釈液収容槽5bにおける水頭位
置の変動量)2 +(電磁濃度計2の誤差)2 }として求
められるが、図2における高さH’、水頭高さHをいず
れも適宜設定することにより、この式における第1項〜
第3項は、いずれも、工業計器として要求される精度で
あるFs±0.025〜0.050を充分に満足する程
度に抑制されるため、極めて高精度で濃度計測が可能と
なる。例えば、H’=5mm、H=300mmと設定す
ると、上記の第1項および第2項はともに±5/300
≒±0.017となり、また第3項は±0.03であ
る。このため、総合の測定精度は、約0.038とな
る。これは、電磁濃度計2の誤差と略同程度である。
(6) The overall measurement of the acid concentration meter 1 is improved more than the measurement accuracy of the electromagnetic concentration meter 2, and high-accuracy concentration measurement becomes possible. That is, the total measurement accuracy of the acid concentration meter 1 of the present embodiment is as follows: Δ (fluctuation amount of the water head position in the measuring acid solution storage tank 5a) 2 + (fluctuation amount of the water head position in the diluting liquid storage tank 5b) 2 + (Error of the electromagnetic densitometer 2) It is obtained as 2 }. By appropriately setting the height H ′ and the head height H in FIG.
The third term is suppressed to a level that sufficiently satisfies Fs ± 0.025 to 0.050, which is the precision required for an industrial instrument, so that concentration measurement can be performed with extremely high precision. For example, if H ′ = 5 mm and H = 300 mm, both the first and second terms are ± 5/300
≒ ± 0.017, and the third term is ± 0.03. Therefore, the total measurement accuracy is about 0.038. This is substantially the same as the error of the electromagnetic densitometer 2.

【0062】すなわち、本実施形態の酸濃度計1は、測
定精度の設定の自由度が極めて高く、要求する測定精度
に応じて、測定精度の設定を変更できる。
That is, the acid concentration meter 1 of the present embodiment has a very high degree of freedom in setting the measurement accuracy, and the setting of the measurement accuracy can be changed according to the required measurement accuracy.

【0063】(第2実施形態)次に、第2実施形態を説
明する。なお、以降の各実施形態の説明は、前述した第
1実施形態と相違する部分について行うこととし、共通
する部分については同一の図中符号を付すことにより、
重複する説明を省略する。
(Second Embodiment) Next, a second embodiment will be described. In the following, each embodiment will be described with respect to portions different from the above-described first embodiment, and common portions will be denoted by the same reference numerals in the drawings.
A duplicate description will be omitted.

【0064】図4は、第1実施形態の水頭差式希釈装置
3に換えて用いた、いわゆる計量枡方式希釈装置20を
模式的に示す説明図である。
FIG. 4 is an explanatory view schematically showing a so-called measuring-basin type diluting device 20 used in place of the head difference type diluting device 3 of the first embodiment.

【0065】この計量枡方式希釈装置20は、電磁弁2
1aを介して酸液を計量枡22aに供給するとともに、
電磁弁21bを介して希釈液を計量枡22bに供給す
る。
The measuring basin type diluting device 20 comprises a solenoid valve 2
While supplying the acid solution to the measuring chamber 22a via 1a,
The diluent is supplied to the measuring chamber 22b via the solenoid valve 21b.

【0066】そして、計量枡22aが満杯になったこと
を電磁弁23aで検知して絞り弁24aを介して所定量
の酸液を排出するとともに、計量枡22bが満杯になっ
たことを電磁弁23bで検知して絞り弁24bを介して
所定量の希釈液を排出し、排出された所定量の酸液およ
び希釈液を混合槽25で充分に混合して、希釈酸液の酸
濃度を0〜15%として電磁濃度計26に送り、測定精
度保証域である0〜15%の希釈酸液の酸濃度を測定す
る。
The electromagnetic valve 23a detects that the measuring chamber 22a is full, discharges a predetermined amount of the acid solution through the throttle valve 24a, and detects that the measuring chamber 22b is full. A predetermined amount of the diluting liquid is discharged through the throttle valve 24b upon detection at 23b, and the discharged predetermined amount of the acid liquid and the diluting liquid are sufficiently mixed in the mixing tank 25 to reduce the acid concentration of the dilute acid liquid to 0. It is sent to the electromagnetic densitometer 26 as % 15%, and the acid concentration of the diluted acid solution of 0 to 15%, which is the measurement accuracy assurance area, is measured.

【0067】そして、電磁濃度計の図示しない演算部に
より、希釈酸液の酸濃度の測定値C HCl と希釈比x’と
により、測定酸液の酸濃度を求めるものである。この計
量枡方式希釈装置20は、工業的に既に確立された測定
機器を組み合わせて用いるものであるため、第1実施形
態の水頭差式希釈装置3と同様の精度で測定酸液と希釈
液とを混合することができ、第1実施形態と同様の効果
を得ることができる。
The calculation unit (not shown) of the electromagnetic densitometer
From the measured value C of the acid concentration of the diluted acid solution, HCl And the dilution ratio x '
Is used to determine the acid concentration of the measured acid solution. This meter
The volume measuring type dilution device 20 is a measurement system that has been established industrially.
The first embodiment because it uses a combination of devices
Acid solution and dilution with the same precision as the head difference type dilution device 3
Can be mixed with the liquid, and the same effect as in the first embodiment can be obtained.
Can be obtained.

【0068】しかし、この計量枡方式希釈装置20で
は、多数の電磁弁等を用いる必要から部品点数が多くな
り、かつ駆動部も多数存在するために、第1実施形態の
水頭差式希釈装置3に比較すると、装置故障が発生し易
い。さらに、これら多数の部品の動作を制御するための
専用の制御装置 (コントローラ) が必要となり、全体と
して相当に高価になる。
However, in this measuring basin type diluting apparatus 20, the number of parts is increased due to the necessity of using a large number of solenoid valves and the like, and there are also a large number of driving parts. In comparison with the above, device failure is more likely to occur. Furthermore, a dedicated control device (controller) for controlling the operation of these many components is required, and the overall cost is considerably high.

【0069】(第3実施形態)図5は、第1実施形態の
水頭差式希釈装置3に換えて用いた、いわゆる流量制御
方式希釈装置30を模式的に示す説明図である。
(Third Embodiment) FIG. 5 is an explanatory diagram schematically showing a so-called flow control type dilution device 30 used in place of the head difference type dilution device 3 of the first embodiment.

【0070】この流量制御方式希釈装置30は、減圧弁
31および弁32を介して測定酸液を収容槽33に供給
し、この測定酸液を、流量センサ34からの信号を受け
る流量コントローラ35により制御されるポンプ36に
より、混合槽37に送るとともに、弁38を介して収容
槽39に供給された希釈液を定量切り出しポンプ40に
より混合槽37に送り、攪拌ポンプ41により測定酸液
および希釈液を充分に攪拌して希釈酸液としてから、ミ
キサ42により希釈酸液の酸濃度を0〜15%としてか
らポンプ43を介して電磁濃度計44に送り、測定精度
保証域である0〜15%に希釈された希釈酸液の酸濃度
を測定する。
The flow control type diluting device 30 supplies the measured acid solution to the storage tank 33 via the pressure reducing valve 31 and the valve 32, and supplies the measured acid solution to the flow controller 35 which receives a signal from the flow sensor 34. The diluent supplied to the storage tank 39 via the valve 38 is sent to the mixing tank 37 by the fixed-rate cut-out pump 40 while being sent to the mixing tank 37 by the controlled pump 36, and the acid solution and the diluent measured by the stirring pump 41. Is sufficiently stirred to form a diluted acid solution, the acid concentration of the diluted acid solution is reduced to 0 to 15% by a mixer 42, and then sent to an electromagnetic densitometer 44 via a pump 43. The acid concentration of the diluted acid solution diluted to 1 is measured.

【0071】そして、電磁濃度計の図示しない演算部に
より、希釈酸液の酸濃度の測定値C HCl と希釈比x’と
により、測定酸液の酸濃度を求めるものである。この流
量制御方式希釈装置30は、工業的に既に確立された測
定機器を組み合わせて用いるものであるため、第1実施
形態の水頭差式希釈装置3と同様の精度で測定酸液と希
釈液とを混合することができ、第1実施形態と同様の効
果を得ることができる。
The calculation unit (not shown) of the electromagnetic densitometer
From the measured value C of the acid concentration of the diluted acid solution, HCl And the dilution ratio x '
Is used to determine the acid concentration of the measured acid solution. This style
The volume control type diluting device 30 is a measuring device that has been industrially established.
1st implementation
The measuring acid solution and the
And the same solution as in the first embodiment.
Fruit can be obtained.

【0072】しかし、この流量制御方式希釈装置30は
駆動部等の部品点数が多いために、第1実施形態の水頭
差式希釈装置3に比較すると、複雑化して保守性が悪化
するとともに、流量センサ34等の繊細な部品を多用す
るために精度を保つ調整が困難であるため、設備故障の
頻度が増加し、長期間安定して稼働することが難しい。
また、専用の制御装置 (コントローラ) や高価な流量セ
ンサ34および流量コントローラ35、さらには専用の
流量計用演算器等が必要となり、製作費が嵩む。
However, since the flow control type dilution apparatus 30 has a large number of parts such as a drive unit, the flow control type dilution apparatus 30 is complicated and deteriorates in maintainability as compared with the head difference type dilution apparatus 3 of the first embodiment. Since delicate components such as the sensor 34 are frequently used, it is difficult to adjust the accuracy to maintain the accuracy. Therefore, the frequency of equipment failure increases, and it is difficult to operate stably for a long period of time.
In addition, a dedicated control device (controller), expensive flow sensors 34 and flow controllers 35, and a dedicated flow meter calculator are required, which increases the manufacturing cost.

【0073】また、本実施形態の流量制御方式希釈装置
30を用いた酸濃度計の総合の測定精度は、√{(流量
コントローラ35および流量センサ34からなる流量制
御装置の精度)2 +(ポンプ40の精度)2 +(電磁濃
度計44の精度)2 }として求められるが、流量制御装
置の精度は±0.05、ポンプ40の精度は±0.0
3、電磁濃度計44の精度は±0.03であるため、総
合の測定精度は、約0.066%となる。このことか
ら、本実施形態では、電磁濃度計44と同程度の測定精
度は得られないことがわかる。
The total measurement accuracy of the acid concentration meter using the flow control type diluting device 30 of the present embodiment is as follows: √ {(accuracy of the flow control device including the flow controller 35 and the flow sensor 34) 2 + (pump 40) 2 + (accuracy of the electromagnetic densitometer 44) 2 、, but the accuracy of the flow controller is ± 0.05, and the accuracy of the pump 40 is ± 0.0.
3. Since the accuracy of the electromagnetic densitometer 44 is ± 0.03, the total measurement accuracy is about 0.066%. From this, it is understood that in this embodiment, the same measurement accuracy as that of the electromagnetic densitometer 44 cannot be obtained.

【0074】(変形形態)実施形態の説明では、酸液が
塩酸である場合を例にとった。しかし、本発明は塩酸に
は限定されず、例えば、図5のグラフに示す各種酸液
(硝酸および硫酸等)のいずれに対しても、同様に適用
される。また、本発明にかかる酸濃度計は、当然のこと
ながら、実施形態のように酸濃度計として用いることが
できるが、これとは異なり、複雑な機構を有する既存の
分析計の前処理装置の前段部位として適用することによ
り、フィルターの負荷を軽減して長期安定稼動を可能と
することもできる。具体的には、滴定式分析計の上流側
に、本発明にかかる酸濃度計を配置することにより、こ
の滴定式分析計による測定を、長期間にわたって安定し
て行うことも可能となる。
(Modification) In the description of the embodiment, the case where the acid solution is hydrochloric acid is taken as an example. However, the present invention is not limited to hydrochloric acid, and is similarly applied to any of various acid solutions (such as nitric acid and sulfuric acid) shown in the graph of FIG. In addition, the acid concentration meter according to the present invention can be used as an acid concentration meter as in the embodiment, as a matter of course. By applying the filter as a front part, the load on the filter can be reduced and long-term stable operation can be achieved. Specifically, by arranging the acid concentration meter according to the present invention on the upstream side of the titrimeter, the measurement by the titrimeter can be stably performed over a long period of time.

【0075】[0075]

【発明の効果】以上詳細に説明したように、本発明によ
り、部品点数が少ないために保守性が良好であるととも
に設備故障の頻度が少ないことから長期間安定稼働で
き、安価に製作できる酸濃度計と酸濃度測定法とを提供
することが可能となった。
As described in detail above, according to the present invention, the acid concentration which can be operated stably for a long period of time because the number of parts is small, the maintenance is good and the frequency of equipment failure is small, and which can be manufactured at low cost. It has become possible to provide a meter and an acid concentration measurement method.

【0076】特に、水頭差式希釈装置を用いて測定酸液
の希釈を行うことにより、設備コストの上昇を大幅に抑
制できるとともに、測定精度を極めて容易かつ確実に所
望の程度に設定することができる。
In particular, by diluting the acid solution to be measured using a head difference type diluting apparatus, it is possible to greatly suppress an increase in equipment cost, and to set the measurement accuracy to a desired degree extremely easily and reliably. it can.

【0077】かかる効果を有する本発明の意義は、極め
て著しい。
The significance of the present invention having such effects is extremely remarkable.

【図面の簡単な説明】[Brief description of the drawings]

【図1】第1実施形態の酸濃度計の構成の一例を模式的
に示す説明図である。
FIG. 1 is an explanatory diagram schematically illustrating an example of a configuration of an acid concentration meter according to a first embodiment.

【図2】図1におけるA部の拡大図である。FIG. 2 is an enlarged view of a portion A in FIG.

【図3】塩酸の酸濃度と導電率との関係の一例を示すグ
ラフである。
FIG. 3 is a graph showing an example of a relationship between an acid concentration of hydrochloric acid and electric conductivity.

【図4】第2実施形態で用いた、いわゆる計量枡方式希
釈装置を模式的に示す説明図である。
FIG. 4 is an explanatory view schematically showing a so-called measuring basin type dilution device used in the second embodiment.

【図5】第3実施形態で用いた、いわゆる流量制御方式
希釈装置を模式的に示す説明図である。
FIG. 5 is an explanatory view schematically showing a so-called flow control type dilution device used in the third embodiment.

【図6】塩酸の酸濃度と導電率との関係の一例を示すグ
ラフである。
FIG. 6 is a graph showing an example of the relationship between the acid concentration of hydrochloric acid and the electrical conductivity.

【図7】塩酸以外の酸液について、酸濃度と導電率との
関係の一例を、塩化ナトリウムと対比させて示すグラフ
である。
FIG. 7 is a graph showing an example of the relationship between the acid concentration and the electrical conductivity of an acid solution other than hydrochloric acid in comparison with sodium chloride.

【符号の説明】[Explanation of symbols]

1 酸濃度計 2 電磁濃度計 2a 測定部 2b 演算部 3 水頭差式希釈装置 4a、4c 表示部 4b 入力部 5a 測定酸液収容槽 5b 希釈液収容槽 6a、6b 配管 7 混合槽 8a、8b オーバーフロー配管 9a 測定酸液 9b 希釈液 10a、10b 流量調整弁 13a 希釈酸液 Reference Signs List 1 acid concentration meter 2 electromagnetic concentration meter 2a measuring unit 2b calculating unit 3 head difference type diluting device 4a, 4c display unit 4b input unit 5a measuring acid solution storage tank 5b diluent storage tank 6a, 6b piping 7 mixing tank 8a, 8b overflow Piping 9a Measured acid solution 9b Diluent 10a, 10b Flow control valve 13a Dilute acid solution

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】 酸液の酸濃度の測定精度保証域を有する
電磁濃度計と、 測定対象である測定酸液を前記測定精度保証域の酸濃度
に希釈する希釈装置とを備え、 前記電磁濃度計を用いて、前記希釈装置により前記測定
精度保証域の酸濃度に希釈された希釈酸液の酸濃度を測
定することにより、前記測定酸液の酸濃度を求めること
を特徴とする酸濃度計。
1. An electromagnetic densitometer having a measurement accuracy guarantee area for an acid concentration of an acid solution, and a diluting device for diluting a measurement acid solution to be measured to an acid concentration in the measurement accuracy guarantee area, Measuring the acid concentration of the diluted acid solution diluted to the acid concentration in the measurement accuracy assurance region by the diluting device using a diluter, thereby obtaining the acid concentration of the measured acid solution. .
【請求項2】 前記電磁濃度計は、前記希釈酸液の導電
率を測定する測定部と、該導電率の測定値および前記希
釈酸液の希釈比に基づいて、前記測定酸液の酸濃度を算
出する演算部とを有する請求項1に記載された酸濃度
計。
2. An electromagnetic densitometer comprising: a measuring unit for measuring the conductivity of the diluted acid solution; and an acid concentration of the measured acid solution based on a measured value of the conductivity and a dilution ratio of the diluted acid solution. The acid concentration meter according to claim 1, further comprising a calculation unit that calculates
【請求項3】 前記希釈装置は、水頭差式希釈装置であ
る請求項1または請求項2に記載された酸濃度計。
3. The acid concentration meter according to claim 1, wherein the diluting device is a head difference type diluting device.
【請求項4】 前記水頭差式希釈装置は、略同一高さに
設置された測定酸液収容槽および希釈液収容槽と、該測
定酸液収容槽および希釈液収容槽それぞれに下方へ向け
て接続された二本の配管と、該二本の配管の下方に接続
されて測定酸液および希釈液を混合する混合槽とを有す
る請求項3に記載された酸濃度計。
4. The head difference type diluting device according to claim 1, wherein the measuring acid solution storage tank and the diluting solution storage tank installed at substantially the same height, and the measurement acid solution storing tank and the diluting solution storage tank are respectively directed downward. The acid concentration meter according to claim 3, comprising: two connected pipes; and a mixing tank connected below the two pipes to mix the measurement acid solution and the diluent.
【請求項5】 前記測定部は、前記混合槽に設けられる
請求項4に記載された酸濃度計。
5. The acid concentration meter according to claim 4, wherein the measuring section is provided in the mixing tank.
【請求項6】 前記混合槽における前記測定酸液および
前記希釈液それぞれの混合比は、前記酸液収容槽に供給
された測定酸液、および前記希釈液収容槽に供給された
希釈液それぞれの水頭位置を略同一とすること、また
は、該水頭位置を異ならせることにより、調整される請
求項4または請求項5に記載された酸濃度計。
6. A mixing ratio of each of the measurement acid solution and the diluent in the mixing tank is determined based on the measurement acid solution supplied to the acid solution storage tank and the diluent supplied to the diluent storage tank. The acid concentration meter according to claim 4 or 5, wherein the acid concentration is adjusted by making the water head positions substantially the same or by making the water head positions different.
【請求項7】 前記水頭位置を略同一とすることは、前
記二本の配管それぞれの内径を異ならせること、および
/または、前記二本の配管にそれぞれ設けられた二つの
流量調整弁の開度をそれぞれ調整することにより、行わ
れる請求項6に記載された酸濃度計。
7. Making the water head positions substantially the same means that the inner diameters of the two pipes are different, and / or the opening of two flow control valves respectively provided in the two pipes. The acid concentration meter according to claim 6, wherein the measurement is performed by adjusting respective degrees.
【請求項8】 測定対象である測定酸液を、電磁濃度計
の測定精度保証域の酸濃度へ希釈した後、該測定精度保
証域へ希釈された希釈酸液の酸濃度を前記電磁濃度計を
用いて測定し、該電磁濃度計による測定値と前記希釈酸
液の希釈比とに基づいて、前記測定酸液の酸濃度を算出
することを特徴とする酸濃度測定法。
8. An electromagnetic densitometer wherein a measurement acid solution to be measured is diluted to an acid concentration in a measurement accuracy guarantee area of an electromagnetic densitometer, and the acid concentration of the diluted acid solution diluted to the measurement accuracy guarantee area is measured by the electromagnetic concentration meter. And measuring the acid concentration of the measured acid solution based on the value measured by the electromagnetic densitometer and the dilution ratio of the diluted acid solution.
【請求項9】 前記測定酸液の希釈は、水頭差式希釈装
置を用いて、行われる請求項8に記載された酸濃度測定
法。
9. The method for measuring an acid concentration according to claim 8, wherein the dilution of the measurement acid solution is performed using a head difference type dilution apparatus.
JP2000011988A 2000-01-20 2000-01-20 Acid concentration meter and acid concentration measurement method Expired - Fee Related JP3610858B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000011988A JP3610858B2 (en) 2000-01-20 2000-01-20 Acid concentration meter and acid concentration measurement method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000011988A JP3610858B2 (en) 2000-01-20 2000-01-20 Acid concentration meter and acid concentration measurement method

Publications (2)

Publication Number Publication Date
JP2001201476A true JP2001201476A (en) 2001-07-27
JP3610858B2 JP3610858B2 (en) 2005-01-19

Family

ID=18539772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000011988A Expired - Fee Related JP3610858B2 (en) 2000-01-20 2000-01-20 Acid concentration meter and acid concentration measurement method

Country Status (1)

Country Link
JP (1) JP3610858B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101567309A (en) * 2008-04-22 2009-10-28 株式会社平间理化研究所 Device for blending etching solution and device for determinating concetration of etching solution
CN102495024A (en) * 2010-07-26 2012-06-13 株式会社爱宕 Salinity concentration measuring device and salinity concentration measuring method
KR101248213B1 (en) * 2006-10-26 2013-03-28 가부시키가이샤 히라마 리카 켄큐쇼 Etchant managing device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0281628U (en) * 1988-12-07 1990-06-25
JPH07318600A (en) * 1994-05-25 1995-12-08 Natl Food Res Inst Non-contact conductivity measuring instrument
JPH10221229A (en) * 1997-02-06 1998-08-21 Nikkiso Co Ltd Diluting tank and diluting device using it
JPH11118680A (en) * 1997-10-20 1999-04-30 Tohoku Electric Power Co Inc Sample dilution analyzer
JPH11258191A (en) * 1998-03-09 1999-09-24 Japan Organo Co Ltd Method and apparatus for measurement of concentration of carbonic acid

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0281628U (en) * 1988-12-07 1990-06-25
JPH07318600A (en) * 1994-05-25 1995-12-08 Natl Food Res Inst Non-contact conductivity measuring instrument
JPH10221229A (en) * 1997-02-06 1998-08-21 Nikkiso Co Ltd Diluting tank and diluting device using it
JPH11118680A (en) * 1997-10-20 1999-04-30 Tohoku Electric Power Co Inc Sample dilution analyzer
JPH11258191A (en) * 1998-03-09 1999-09-24 Japan Organo Co Ltd Method and apparatus for measurement of concentration of carbonic acid

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101248213B1 (en) * 2006-10-26 2013-03-28 가부시키가이샤 히라마 리카 켄큐쇼 Etchant managing device
CN101567309A (en) * 2008-04-22 2009-10-28 株式会社平间理化研究所 Device for blending etching solution and device for determinating concetration of etching solution
KR101213108B1 (en) 2008-04-22 2012-12-18 가부시키가이샤 히라마 리카 켄큐쇼 Etching solution preparation apparatus and etching solution concentration measurement apparatus
CN102495024A (en) * 2010-07-26 2012-06-13 株式会社爱宕 Salinity concentration measuring device and salinity concentration measuring method
CN102495024B (en) * 2010-07-26 2015-03-11 株式会社爱宕 Salinity concentration measuring device and salinity concentration measuring method

Also Published As

Publication number Publication date
JP3610858B2 (en) 2005-01-19

Similar Documents

Publication Publication Date Title
KR100348853B1 (en) Method for detecting plugging of pressure flow-rate controller and sensor used therefor
KR101213108B1 (en) Etching solution preparation apparatus and etching solution concentration measurement apparatus
JPH05215703A (en) Method and device for controlling detergent concentration
KR100775915B1 (en) Method and apparatus for detecting concentration of solution, and method for diluting/compounding pharmaceutical
TWI650533B (en) Concentration detection method and pressure type flow control device
JP2001201476A (en) Acid densitometer and method for measuring acid concentration
JP4329921B2 (en) Inspection gas mixing apparatus and mixing method
JP2000039347A (en) Flowrate inspection device
US20230236048A1 (en) Substrate processing apparatus, abnormality detection method and non-transitory computer readable medium storing abnormality detection program
JP3805671B2 (en) Method for analyzing oxygen concentration in gas and oxygen concentration analyzer
KR20010072569A (en) Automated chemical process control system
JP2000221073A (en) In-tank liquid level detection device for substrate treating device
JP5559709B2 (en) Volatilization measuring apparatus and method
JPS6131959A (en) Method for measuring ph of electroplating liquid
JPH10274554A (en) Liquid level measuring device for pressure vessel
JP3347802B2 (en) Solution concentration control device
KR20000075032A (en) Level gauging apparatus for liquid materials
JP2002035566A (en) Mixing apparatus
JPS6131951A (en) Concentration meter with abnormality judging function
JP2000218143A (en) Chemical solution mixing equipment and supply quantity control method
US20040261818A1 (en) Method and apparatus for determining liquid flow rate
JPH11118680A (en) Sample dilution analyzer
JP2003527477A (en) Regular chemical replenishment system
JPH0331759A (en) Method for measuring total organic carbon
JPH0618274Y2 (en) Particle counter

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20031215

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20040309

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040506

A911 Transfer of reconsideration by examiner before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20040628

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20040727

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040830

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20040928

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20041011

R150 Certificate of patent or registration of utility model

Ref document number: 3610858

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20081029

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091029

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091029

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101029

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111029

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121029

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131029

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131029

Year of fee payment: 9

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131029

Year of fee payment: 9

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees