JP2001181796A - Fe-Ni-Co ALLOY EXCELLENT IN ETCHING CHARACTERISTIC AND LOW THERMAL EXPANSION CHARACTERISTIC, AND SHADOW MASK EXCELLENT IN ETCHING PIT SHAPE CHARACTERISTIC - Google Patents

Fe-Ni-Co ALLOY EXCELLENT IN ETCHING CHARACTERISTIC AND LOW THERMAL EXPANSION CHARACTERISTIC, AND SHADOW MASK EXCELLENT IN ETCHING PIT SHAPE CHARACTERISTIC

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Publication number
JP2001181796A
JP2001181796A JP37275399A JP37275399A JP2001181796A JP 2001181796 A JP2001181796 A JP 2001181796A JP 37275399 A JP37275399 A JP 37275399A JP 37275399 A JP37275399 A JP 37275399A JP 2001181796 A JP2001181796 A JP 2001181796A
Authority
JP
Japan
Prior art keywords
etching
thermal expansion
characteristic
alloy
shadow mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP37275399A
Other languages
Japanese (ja)
Inventor
Ryoji Inoue
良二 井上
Takehisa Seo
武久 瀬尾
Shuichi Nakamura
秀一 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP37275399A priority Critical patent/JP2001181796A/en
Publication of JP2001181796A publication Critical patent/JP2001181796A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide an alloy having excellent etching characteristic and low thermal expansion characteristic and to provide a shadow mask excellent in etching pit shape characteristic. SOLUTION: This Fe-Ni-Co alloy has a composition consisting of, by mass, >2.5-7% Co, Ni in an amount satisfying (Ni+Co)=35.5 to 38%, <0.1%, preferably <=0.05%, of Mn, and the balance essentially Fe, and C is controlled to <0.005% and further S and Cr are controlled to <=0.0015% and <=0.1%, respectively. The shadow mask is composed of these Fe-Ni-Co alloys.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、カラ−ブラウン管
内で使用されるシャドウマスク用Fe−Ni−Co系合
金で、特に低熱膨張特性に優れた材料に関する。そし
て、その作製されたシャドウマスクに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an Fe--Ni--Co alloy for a shadow mask used in a color cathode ray tube, and more particularly to a material excellent in low thermal expansion characteristics. And, it relates to the produced shadow mask.

【0002】[0002]

【従来の技術】色識別を行なうべくブラウン管に組み込
まれているシャドウマスクには、そのブラウン管形式に
よって、製造工程中に所定の形状を得るべくプレス成形
工程が入るプレス成形型シャドウマスクに加え、張力を
付与した状態でマスクフレーム枠体に支持される架張型
シャドウマスクがある。テレビやパソコンに用いられる
ブラウン管の技術動向としては、最近、大型化・フラッ
ト化・高精細化の方向へ進んでいる。これに伴って、用
いられるシャドウマスク材に要求される特性としては、
現行の通常のFe−Ni系インバ−合金(Fe−36%
Ni)で得られる熱膨張特性よりも、さらに低熱膨張化
が要求されている。
2. Description of the Related Art A shadow mask incorporated in a cathode ray tube for performing color discrimination includes, in addition to a press-molding type shadow mask in which a press molding process is performed to obtain a predetermined shape during a manufacturing process, depending on the type of the cathode ray tube, tension is applied. There is a stretchable shadow mask that is supported by a mask frame frame in a state in which is provided. As for the technical trend of cathode ray tubes used in televisions and personal computers, recently, the trend is toward larger size, flatter and higher definition. Along with this, the characteristics required for the shadow mask material used are:
Current ordinary Fe-Ni based invar alloy (Fe-36%
There is a demand for lower thermal expansion than the thermal expansion characteristics obtained with Ni).

【0003】通常組成のFe−Ni系インバ−合金より
さらに低熱膨張化する手法として、下記の2通りの方法
が公表されている。1つは、主要成分がFe−36%N
iで、不純物を抑制することであり、あと1つは、Co
を添加してFe−Ni−Co系とすることである。これ
らの作用によって低熱膨張を図った公知例として、特開
昭61−76651、特開平7−3401、特開平8−
311622がある。また、Co量を最少限の添加量に
抑制したものとして、特開平8−209306、特開平
8−333638、特表平8−512363がある。
The following two methods have been disclosed as methods for further reducing the thermal expansion of Fe--Ni-based invar alloys having a normal composition. One is that the main component is Fe-36% N
i is to suppress impurities, and the other is Co
To form a Fe—Ni—Co system. Known examples in which low thermal expansion is achieved by these effects are disclosed in JP-A-61-76651, JP-A-7-3401, and JP-A-8-801.
There is 311622. JP-A-8-209306, JP-A-8-33338, and JP-T-8-512363 are examples of those in which the amount of Co is suppressed to the minimum addition amount.

【0004】[0004]

【発明が解決しようとする課題】上記の手段は、優れた
低熱膨張特性を得る方法として有効である。しかし、こ
とシャドウマスク用材料となると、高精細な電子ビーム
通過孔を正確な形状にてエッチング形成できることが求
められることから、それに対応できるだけの優れたエッ
チング性も兼備させる必要がある。従来の方法の場合、
この見地からCo量の検討や微量元素の検討が十分とは
言えず、結果として例えば、低熱膨張特性を得るべくC
oの含有にてある程度のコスト向上を犠牲に払うもの
の、微量元素の調整をしないとエッチング性が悪いた
め、必ずしも割に合うものとは言えなかった。
The above means is effective as a method for obtaining excellent low thermal expansion characteristics. However, in the case of a material for a shadow mask, it is required that a high-definition electron beam passage hole can be etched and formed in an accurate shape. With the traditional method,
From this viewpoint, the study of the amount of Co and the study of trace elements cannot be said to be sufficient. As a result, for example, in order to obtain low thermal expansion characteristics,
Although a certain cost improvement is sacrificed by the inclusion of o, the etching properties are poor unless the trace elements are adjusted.

【0005】そこで、本発明は、優れた低熱膨張特性に
合わせ、十分なエッチング性をも兼備した合金を提供す
ることを目的とし、その合金を薄板として、電子ビーム
通過孔を形成したシャドウマスクを提供することを目的
とする。
Accordingly, an object of the present invention is to provide an alloy which has an excellent low thermal expansion characteristic and also has a sufficient etching property. The purpose is to provide.

【0006】[0006]

【課題を解決するための手段】本発明は、上記問題点を
解決し、実用化を図るために低熱膨張特性とエッチング
性の点からCo量と微量元素の成分範囲を仔細に調査し
たところ、下記の成分を有す材料が有効であることをつ
きとめた。
In order to solve the above-mentioned problems and to put the invention into practical use, the present invention has conducted a detailed investigation on the amount of Co and the component range of trace elements from the viewpoint of low thermal expansion characteristics and etching properties. It has been found that a material having the following components is effective.

【0007】すなわち、質量%で、Co:2.5%を超
え7%以下、(Ni+Co):35.5〜38%、M
n:0.1%未満、好ましくは0.05%以下を含有
し、残部実質的にFeからなるFe−Ni−Co系合金
であって、Cを0.005%未満、さらにはSを0.0
015%以下、Crを0.1%以下に抑制したFe−N
i−Co系合金である。そして、これら本発明のFe−
Ni−Co系合金からなるシャドウマスクであって、優
れた低熱膨張特性に加え、エッチング孔の歪みが低減さ
れ、その内郭形状の円滑性にも優れたシャドウマスクで
ある。
That is, in mass%, Co: more than 2.5% and 7% or less, (Ni + Co): 35.5-38%, M
n: Fe-Ni-Co-based alloy containing less than 0.1%, preferably 0.05% or less, and the balance substantially consisting of Fe, wherein C is less than 0.005%, and S is 0% .0
Fe-N with 015% or less and Cr less than 0.1%
It is an i-Co alloy. And these Fe-
A shadow mask made of a Ni-Co alloy, which has excellent low thermal expansion characteristics, reduces distortion of etching holes, and is excellent in smoothness of its inner shape.

【0008】[0008]

【発明の実施の形態】本発明の最たる特徴は、優れたエ
ッチング性と低熱膨張特性を備えた合金を達成すべく、
そのインバー合金としてのCo量と微量元素の成分範囲
による各特性への影響、さらには、エッチングによって
形成されるエッチング孔の内郭形状に生じる現象をも詳
細に考慮した結果として、本発明の合金を見いだすに至
ったところにある。以下、本発明を構成する合金成分お
よびその限定理由について説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The most important feature of the present invention is to achieve an alloy having excellent etching properties and low thermal expansion properties.
As a result of taking into account in detail the effect of each of the Co content and the trace element range on the properties of the Invar alloy as well as the phenomenon occurring in the inner shape of the etching hole formed by etching, the alloy of the present invention It has been found. Hereinafter, the alloy components constituting the present invention and the reasons for the limitation will be described.

【0009】Co:Fe−Ni系インバ−合金において
熱膨張係数を下げる元素として知られている。本発明の
場合、後述するMn量の調整に加えて、その低Mn化に
よるエッチング性への支障をも解決することで、本発明
のCo含有量による効果を基本とする優れた低熱膨張特
性を達成でき、しかも優れたエッチング性をも達成でき
る手段を見いだしたのである。
Co: It is known as an element for lowering the coefficient of thermal expansion in an Fe-Ni-based invar alloy. In the case of the present invention, in addition to the adjustment of the amount of Mn to be described later, by solving the problem of the etching property due to the low Mn, the excellent low thermal expansion characteristic based on the effect of the Co content of the present invention is achieved. We have found a means that can achieve this and also achieve excellent etching properties.

【0010】特に本発明の合金をシャドウマスクに適用
した場合、例えばブラウン管の色ずれの改善効果として
通常のインバー合金によるものの熱膨張係数に対し30
%以上低下させることで、その有位差が得られる。具体
的には2.5%を超えるCo量にて優れた低熱膨張特性
を達成するものである。なお、Coは原料コストが非常
に高いことに加え、7%を超える含有量にてその低熱膨
張特性の向上効果も飽和することから、本発明において
は含有量を2.5%を超え7%以下とした。
[0010] In particular, when the alloy of the present invention is applied to a shadow mask, for example, the effect of improving the color shift of a cathode ray tube is 30% less than the thermal expansion coefficient of an ordinary Invar alloy.
%, The significant difference can be obtained. Specifically, excellent low thermal expansion characteristics are achieved with a Co content exceeding 2.5%. In addition, Co has a very high raw material cost and a content exceeding 7% saturates the effect of improving the low thermal expansion characteristic. Therefore, in the present invention, the content of Co exceeds 2.5% to 7%. It was as follows.

【0011】Mn:熱間加工性を改善する元素である
が、Fe−Ni系インバ−合金やFe−Ni−Co系イ
ンバ−合金の熱膨張係数を大きくする作用があり、本発
明のCo量とによる相互効果を十分に達成するために
も、本発明においてはその含有量を0.1%未満とし
た。好ましくは、0.05%以下とする。
Mn: an element that improves hot workability, but has an effect of increasing the thermal expansion coefficient of an Fe—Ni-based invar alloy or an Fe—Ni—Co-based invar alloy. In the present invention, the content is set to less than 0.1% in order to sufficiently achieve the mutual effect of the above. Preferably, it is 0.05% or less.

【0012】C:優れた低熱膨張特性を達成する上でC
oの適量添加を図る本発明のFe−Ni−Co系合金に
おいて、C含有量の調整はそのCo添加によるエッチン
グ性への支障を補うに有効である。つまり、Coの添加
によりエッチング速度が低下し、エッチング孔の歪み発
生が懸念される。そこで、この課題を改善するに検討し
たところ、本発明のCo含有量を有するFe−Ni−C
o系合金においては、そのC含有量の低減が有効である
ことが判明した。具体的には、C含有量を0.005%
未満とすることである。
C: To achieve excellent low thermal expansion characteristics, C:
In the Fe—Ni—Co-based alloy of the present invention in which an appropriate amount of o is added, the adjustment of the C content is effective in compensating for an obstacle to the etching property due to the Co addition. That is, the addition of Co lowers the etching rate, and there is a fear that distortion of the etching hole may occur. Then, when it examined in order to improve this subject, Fe-Ni-C which has Co content of this invention
In an o-based alloy, it was found that the reduction of the C content was effective. Specifically, the C content is 0.005%
Less than.

【0013】S:Mn量を従来の0.25%レベルから
0.1%未満に制限したことによって、エッチング孔の
内孔輪郭がギザギザ状に変形するという新たな問題(図
2)が発生し、この場合、高精細を要求されるシャドウ
マスク(特にパソコン用シャドウマスク)への適用に問
題を生じる恐れがある。この課題について調査したとこ
ろ、これは上記エッチング速度の低下といった原因によ
るエッチング孔の歪みとは、その問題の発生部位からし
て過程が異なるという知見を得た。そこで、種々微量元
素を調査したところ、S量を低く抑えることでこの問題
が解消でき、正常なエッチング孔を形成でき得ることを
突きとめた。
By limiting the S: Mn content from the conventional 0.25% level to less than 0.1%, a new problem (FIG. 2) arises that the contour of the inner hole of the etching hole is deformed jaggedly. In this case, there is a possibility that a problem may occur in application to a shadow mask requiring high definition (particularly, a shadow mask for a personal computer). When this problem was investigated, it was found that the process differs from the distortion of the etching hole due to the decrease in the etching rate in view of the site where the problem occurred. Then, when various trace elements were investigated, it was found that this problem could be solved by suppressing the amount of S to be low, and a normal etching hole could be formed.

【0014】つまり、上記エッチング孔の内孔輪郭がギ
ザギザに変形するという現象は、Mn量を減らすことに
よってマトリックス中のSが固定されなくなり、粒界に
存在するS量が増えるため、粒界腐食を受けやすくなっ
た結果として生じるものと考えられる。これを解消する
ためにS量の抑制が有効であり、本発明の場合、Sを
0.0015%以下に抑制することが、エッチング孔内
郭形状の円滑性に優れたシャドウマスクを得る上で好ま
しい。
That is, the phenomenon that the inner contour of the etching hole is jagged is caused by the fact that S in the matrix is not fixed by reducing the amount of Mn, and the amount of S existing in the grain boundary increases. It is thought to be the result of increased susceptibility. In order to solve this problem, it is effective to suppress the amount of S. In the case of the present invention, suppressing S to 0.0015% or less is necessary for obtaining a shadow mask having excellent smoothness of the inner shape of the etching hole. preferable.

【0015】Cr:Crは、本発明の合金の熱膨張係数
を増加させる元素であり、0.5%以下とする必要があ
るが、好ましくは0.1%以下にまで低減することで、
熱膨張係数の増加作用を十分に解消できる。
Cr: Cr is an element that increases the coefficient of thermal expansion of the alloy of the present invention and needs to be 0.5% or less, but is preferably reduced to 0.1% or less.
The effect of increasing the coefficient of thermal expansion can be sufficiently eliminated.

【0016】そして、本発明では、Coの含有量に加え
て(Ni+Co)量をも最適に調整することが、優れた
低熱膨張特性の達成に重要である。具体的には(Ni+
Co)量を35.5〜38%に調整することでシャドウ
マスクへの適用に十分な低熱膨張特性を維持することが
できる。好ましくは、Fe−36%Ni材よりも30%
以上低い熱膨張係数を達成するに有効な組成範囲とし
て、Co:3.3%の場合(Ni+Co)が35.5〜
37.5%、Co:5%の場合、(Ni+Co)が3
5.5〜38.0%である。
In the present invention, it is important to optimally adjust the (Ni + Co) amount in addition to the Co content in order to achieve excellent low thermal expansion characteristics. Specifically, (Ni +
By adjusting the Co) amount to 35.5 to 38%, it is possible to maintain low thermal expansion characteristics sufficient for application to a shadow mask. Preferably, 30% more than Fe-36% Ni material
As a composition range effective for achieving the above-mentioned low thermal expansion coefficient, the case where Co: 3.3% (Ni + Co) is 35.5 to 35.5%.
When 37.5% and Co: 5%, (Ni + Co) is 3
5.5-38.0%.

【0017】なお、本発明のFe−Ni−Co系合金の
場合、例えば溶製過程での脱酸剤として使用されるSi
の含有も可能であり、具体的には0.1%以下、好まし
くは0.05%以下のSiを含んでもよい。
In the case of the Fe—Ni—Co alloy of the present invention, for example, Si used as a deoxidizing agent in the melting process is used.
Is also possible, and specifically, may contain 0.1% or less, preferably 0.05% or less of Si.

【0018】以上に述べた本発明のFe−Ni−Co系
合金であれば、例えばシャドウマスクへ適用した場合、
その優れた低熱膨張特性に加えて、正確な孔形状を有し
た電子ビーム通過孔も形成されるので、シャドウマスク
材として最適である。
If the above-described Fe—Ni—Co alloy of the present invention is applied to, for example, a shadow mask,
In addition to its excellent low thermal expansion characteristics, an electron beam passage hole having an accurate hole shape is also formed, so that it is most suitable as a shadow mask material.

【0019】[0019]

【実施例】(実施例1)Fe−Ni−Co系合金を真空
誘導溶解炉で溶解−鋳造して、表1に記載の成分を有す
るインゴットを作製した。このインゴットを鍛造して、
厚さ10mmの板材とした。熱膨張係数の測定は、鍛造
後の板材から5mmφ×20mmLの試験片を作製した
後、800℃×30分、N雰囲気の条件で焼鈍したも
のを供試材とした。なお、熱膨張係数の測定温度範囲
は、30〜100℃とした。結果を表1にまとめて示
す。
EXAMPLES (Example 1) An Fe-Ni-Co alloy was melted and cast in a vacuum induction melting furnace to produce an ingot having the components shown in Table 1. Forging this ingot,
A plate material having a thickness of 10 mm was used. For the measurement of the coefficient of thermal expansion, a test piece of 5 mmφ × 20 mmL was prepared from the forged plate material, and then annealed at 800 ° C. for 30 minutes in a N 2 atmosphere condition. The measurement temperature range of the coefficient of thermal expansion was 30 to 100 ° C. The results are summarized in Table 1.

【0020】[0020]

【表1】 [Table 1]

【0021】表1の結果を、各Co量に応じた熱膨張係
数に及ぼす(Ni+Co)量の影響として図3に纏めて
示す。図3より、本発明のMn量を満たす合金であって
も、Coを含まないNi単独のFe−Ni系合金に比し
て、本発明のCo量を2.5%超〜7%かつ(Ni+C
o)量を35.5〜38%に調整した合金の方が熱膨張
係数が小さく、シャドウマスクとした場合の色ずれ改善
に有効な低熱膨張特性をも達成できる。そして、熱膨張
係数がFe−36%Ni材よりも30%以上低くなる組
成範囲として、Co:3.3%の場合(Ni+Co)が
35.5〜37.5%、Co:5%の場合、(Ni+C
o)が35.5〜38.0%であることが判る。
The results in Table 1 are summarized in FIG. 3 as the effect of the (Ni + Co) amount on the thermal expansion coefficient corresponding to each Co amount. From FIG. 3, even if the alloy satisfies the Mn content of the present invention, the Co content of the present invention is more than 2.5% to 7% and ( Ni + C
o) An alloy whose amount is adjusted to 35.5 to 38% has a smaller coefficient of thermal expansion, and can also achieve low thermal expansion characteristics effective for improving color misregistration when used as a shadow mask. The composition range in which the coefficient of thermal expansion is 30% or more lower than that of the Fe-36% Ni material is as follows: Co: 3.3% (Ni + Co): 35.5 to 37.5%, Co: 5% , (Ni + C
o) is 35.5-38.0%.

【0022】(実施例2)上記実施例1と同様の製法に
より、表2に記載の成分を有するインゴットを作製した
後、鍛造・熱間加工により、厚さ3mmの板材とした。
そして、冷間圧延と焼鈍を繰り返して厚さ0.12mm
の帯鋼とし、エッチング性評価用の薄板供試材とした。
エッチング性は、FeCl溶液を用いて濃度:47B
e度、温度:50℃、スプレ−圧力:2Kg/cm
条件で、シャドウマスクの形状にエッチング孔を形成し
た時のエッチング速度と、そのエッチング孔内孔輪郭形
状で判定した。
(Example 2) An ingot having the components shown in Table 2 was produced by the same manufacturing method as in Example 1 described above, and a plate material having a thickness of 3 mm was formed by forging and hot working.
Then, cold rolling and annealing are repeated to obtain a thickness of 0.12 mm.
And a thin plate test material for etching property evaluation.
The etching property is determined by using a FeCl 3 solution at a concentration of 47B.
Under conditions of e degree, temperature: 50 ° C., and spray pressure: 2 kg / cm 2 , a judgment was made based on an etching rate when an etching hole was formed in the shape of the shadow mask and a contour shape of the hole in the etching hole.

【0023】なお、エッチング孔内郭形状の判定におい
ては、孔内輪郭形状について滑らかものが○、多少のギ
ザギザ状変形が認められるもシャドウマスクとしての使
用に差し支えのないものを△、ギザギザ状変形が認めら
れシャドウマスクとしての使用に支障をきたす恐れのあ
るものを×とした。図1および図2は、上記判定に係る
エッチング孔を300倍、1000倍の電子顕微鏡にて
観察したものであり、エッチング孔内面形状が滑らかな
円形を呈している図1が評価○に、そして、図2が評価
×に相当する。それら結果を表2に併せて示す。
In the determination of the inner shape of the etching hole, if the inner shape of the hole is smooth, it is evaluated as ○. If the shape is slightly jagged but is not hindered in use as a shadow mask, Δ is indicated. Was evaluated as "poor" when there was a possibility that the use as a shadow mask might be hindered. 1 and 2 are observations of the etching hole according to the above determination by an electron microscope of 300 times and 1000 times, and FIG. 1 in which the inner surface shape of the etching hole has a smooth circle is evaluated as ○, and , FIG. 2 corresponds to the evaluation x. The results are shown in Table 2.

【0024】[0024]

【表2】 [Table 2]

【0025】表2より、Mn:0.1%未満のFe−N
i−Co系合金においては、Cを0.005%未満に抑
制し、さらにはSを0.0015%以下に抑制すること
で、エッチング速度の低下を抑制することができ、エッ
チング孔内面形状も改善できることが判る。
According to Table 2, Mn: Fe-N of less than 0.1%
In the i-Co alloy, C is suppressed to less than 0.005%, and S is further suppressed to 0.0015% or less, whereby a decrease in the etching rate can be suppressed, and the inner surface shape of the etching hole is also reduced. It can be seen that it can be improved.

【0026】[0026]

【発明の効果】本発明によれば、従来のFe−Ni系イ
ンバ−合金より低熱膨張材が得られ、しかも、コスト・
エッチング性についても、シャドウマスクの要求コスト
・性能を満たした材料が得られる。これにより、プレス
成形型や架張型といったシャドウマスクへの実用化が可
能となり、ブラウン管の画質の向上が達成できる。
According to the present invention, a material having a lower thermal expansion can be obtained than a conventional Fe-Ni-based invar alloy, and the cost and cost can be reduced.
As for the etching property, a material that satisfies the required cost and performance of the shadow mask can be obtained. As a result, it is possible to apply the invention to a shadow mask such as a press molding die or a stretch type, and to improve the image quality of a cathode ray tube.

【図面の簡単な説明】[Brief description of the drawings]

【図1】エッチング孔の内面形状を示す電子顕微鏡写真
である。
FIG. 1 is an electron micrograph showing an inner surface shape of an etching hole.

【図2】エッチング孔の内面形状を示す電子顕微鏡写真
である。
FIG. 2 is an electron micrograph showing an inner surface shape of an etching hole.

【図3】本発明の効果の一例を示す図である。FIG. 3 is a diagram showing an example of the effect of the present invention.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 質量%で、Co:2.5%を超え7%以
下、(Ni+Co):35.5〜38%、Mn:0.1
%未満を含有し、残部実質的にFeからなるFe−Ni
−Co系合金であって、Cを0.005%未満に抑制し
たことを特徴とするエッチング性および低熱膨張特性に
優れたFe−Ni−Co系合金。
1. A mass% of Co: more than 2.5% and 7% or less, (Ni + Co): 35.5-38%, Mn: 0.1
% Fe-Ni substantially less than Fe
-A Fe-Ni-Co-based alloy which is excellent in etching properties and low thermal expansion characteristics, characterized in that C is suppressed to less than 0.005%.
【請求項2】 質量%で、Mn:0.05%以下を含有
することを特徴とする請求項1に記載のエッチング性お
よび低熱膨張特性に優れたFe−Ni−Co系合金。
2. The Fe—Ni—Co alloy according to claim 1, wherein the Fe—Ni—Co alloy is excellent in etching properties and low thermal expansion properties in a content of Mn: 0.05% or less by mass.
【請求項3】 質量%で、Sを0.0015%以下に抑
制したことを特徴とする請求項1または2に記載のエッ
チング性および低熱膨張特性に優れたFe−Ni−Co
系合金。
3. The Fe—Ni—Co excellent in etching properties and low thermal expansion properties according to claim 1 or 2, wherein S is suppressed to 0.0015% or less by mass%.
System alloy.
【請求項4】 質量%で、Crを0.1%以下に抑制し
たことを特徴とする請求項1ないし3のいずれかに記載
のエッチング性および低熱膨張特性に優れたFe−Ni
−Co系合金。
4. The Fe—Ni excellent in etching properties and low thermal expansion characteristics according to claim 1, wherein Cr is suppressed to 0.1% or less by mass%.
-Co-based alloy.
【請求項5】 請求項1ないし4のいずれかに記載のF
e−Ni−Co系合金からなることを特徴とするエッチ
ング孔形状性に優れたシャドウマスク。
5. The F according to claim 1, wherein
A shadow mask having an excellent etching hole shape, comprising an e-Ni-Co alloy.
JP37275399A 1999-12-28 1999-12-28 Fe-Ni-Co ALLOY EXCELLENT IN ETCHING CHARACTERISTIC AND LOW THERMAL EXPANSION CHARACTERISTIC, AND SHADOW MASK EXCELLENT IN ETCHING PIT SHAPE CHARACTERISTIC Pending JP2001181796A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP37275399A JP2001181796A (en) 1999-12-28 1999-12-28 Fe-Ni-Co ALLOY EXCELLENT IN ETCHING CHARACTERISTIC AND LOW THERMAL EXPANSION CHARACTERISTIC, AND SHADOW MASK EXCELLENT IN ETCHING PIT SHAPE CHARACTERISTIC

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Publication Number Publication Date
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003035920A1 (en) * 2001-10-22 2003-05-01 Nippon Yakin Kogyo Co., Ltd. Fe-Ni BASE ALLOY FOR SHADOW MASK RAW MATERIAL EXCELLENT IN CORROSION RESISTANCE AND SHADOW MASK MATERIAL
WO2004053179A1 (en) * 2002-12-12 2004-06-24 Thyssenkrupp Vdm Gmbh Iron-nickel-cobalt alloy, method for the production and use thereof
WO2007087786A1 (en) * 2006-02-02 2007-08-09 Thyssenkrupp Vdm Gmbh Iron-nickel-cobalt alloy

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003035920A1 (en) * 2001-10-22 2003-05-01 Nippon Yakin Kogyo Co., Ltd. Fe-Ni BASE ALLOY FOR SHADOW MASK RAW MATERIAL EXCELLENT IN CORROSION RESISTANCE AND SHADOW MASK MATERIAL
JP2003129185A (en) * 2001-10-22 2003-05-08 Nippon Yakin Kogyo Co Ltd Fe-Ni-BASED ALLOY FOR SHADOW MASKING MATERIAL SUPERIOR IN CORROSION RESISTANCE, AND SHADOW MASKING MATERIAL
CN100343405C (en) * 2001-10-22 2007-10-17 日本冶金工业株式会社 Fe-Ni based alloy for shadow mask raw material excellent in corrosion resistance and shadow mask material
WO2004053179A1 (en) * 2002-12-12 2004-06-24 Thyssenkrupp Vdm Gmbh Iron-nickel-cobalt alloy, method for the production and use thereof
JP2006509906A (en) * 2002-12-12 2006-03-23 ティッセンクルップ ファオ デー エム ゲゼルシャフト ミット ベシュレンクテル ハフツング Iron-nickel-cobalt alloy, method for producing the same and use thereof
DE10262032B4 (en) * 2002-12-12 2006-08-24 Thyssenkrupp Vdm Gmbh Iron-nickel-cobalt alloy, method of making and using same
WO2007087786A1 (en) * 2006-02-02 2007-08-09 Thyssenkrupp Vdm Gmbh Iron-nickel-cobalt alloy
GB2447856A (en) * 2006-02-02 2008-10-01 Thyssenkrupp Vdm Gmbh Iron-nickel-cobalt alloy
ES2330186A1 (en) * 2006-02-02 2009-12-04 Thyssenkrupp Vdm Gmbh Iron-nickel-cobalt alloy
GB2447856B (en) * 2006-02-02 2011-09-07 Thyssenkrupp Vdm Gmbh Iron-nickel-cobalt alloy
CN101379210B (en) * 2006-02-02 2012-07-04 蒂森克鲁普德国联合金属制造有限公司 Iron-nickel-cobalt alloy

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