JPH1060525A - Production of low thermal expansion alloy thin sheet excellent in sheet shape and thermal shrinkage resistance - Google Patents
Production of low thermal expansion alloy thin sheet excellent in sheet shape and thermal shrinkage resistanceInfo
- Publication number
- JPH1060525A JPH1060525A JP22371996A JP22371996A JPH1060525A JP H1060525 A JPH1060525 A JP H1060525A JP 22371996 A JP22371996 A JP 22371996A JP 22371996 A JP22371996 A JP 22371996A JP H1060525 A JPH1060525 A JP H1060525A
- Authority
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- Japan
- Prior art keywords
- tension
- steel sheet
- temperature
- annealing
- thermal expansion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Heat Treatment Of Steel (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、シャドウマスク等
の微細なエッチング加工を施す電子部品用として使用さ
れるＦｅ−Ｎｉ系低熱膨張合金薄板に関するものであ
る。特に、テレビジョンやコンピュータディスプレイに
使用されるシャドウマスク用として好適な板形状や耐熱
収縮性およびエッチング性に優れた鋼板の製造方法に関
するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an Fe--Ni-based low thermal expansion alloy thin plate used for electronic parts subjected to fine etching such as a shadow mask. In particular, the present invention relates to a method for producing a steel sheet excellent in sheet shape, heat shrinkage resistance and etching properties suitable for a shadow mask used in a television or a computer display.
【０００２】[0002]
【従来の技術】シャドウマスクはテレビジョンおよびコ
ンピュータディスプレイのブラウン管に配設されてお
り、電子銃から発射された電子ビームをガラス体によっ
て支持された蛍光面上の所定の点に正確に照射して特定
の色調を与えるための細孔を有している。この時、発射
されたビームのうち蛍光体に照射される量は約２割で、
残りの約８割はシャドウマスクに衝突してしまうため、
シャドウマスクは蛍光面を支持するガラス体に比べて高
温になる。その上、シャドウマスク用素材として従来よ
り用いられてきた低炭素リムド鋼や低炭素アルミキルド
鋼等の軟鋼板は、蛍光面を支持するガラス体に比べて熱
膨張率がはるかに大きいため、発射されたビ−ムがシャ
ドウマスクに衝突し、シャドウマスク本体が高温になる
と、相互に位置ずれを生じて電子ビームを蛍光面上の所
定の点へ正確に照射することができなくなり、画像が不
鮮明になることが多かった。画像が不鮮明になることを
防止するために、シャドウマスクの懸架装置となる支持
体の構造を工夫して、相互の位置ずれを補償することも
試みられているが、必ずしも十分とはいえない。さらに
近年は、テレビジョン画面の大型化およびコンピュータ
のディスプレイへの適用拡大とともに画像のきめの細か
さや高輝度化への要求が一段と高まり、位置ずれ、色ず
れの問題が顕在化してきた。このために電子ビームの通
過孔をより微細で高精度に穿孔するようなエッチング加
工が必要になってきた。特に、コンピュータディスプレ
イに使用される高精細シャドウマスクでは主として板厚
０．１５mm以下の素材が使用され、例えば直径１２０μ
m の孔が２７０μm ピッチで穿孔されており、さらにフ
ァインピッチ化が試行されている。このような微細な孔
をエッチング面内において精度よく穿孔するために、今
まで以上のエッチング技術の向上とともに原板形状の向
上と、熱処理と加工を繰り返す製造過程における熱収縮
を低下させる検討が行われている。2. Description of the Related Art A shadow mask is arranged on a cathode ray tube of a television or a computer display, and precisely irradiates an electron beam emitted from an electron gun to a predetermined point on a phosphor screen supported by a glass body. It has pores for giving a specific color tone. At this time, about 20% of the emitted beam irradiates the phosphor,
About 80% of the rest will collide with the shadow mask,
The shadow mask has a higher temperature than the glass body supporting the phosphor screen. In addition, mild steel sheets such as low-carbon rimmed steel and low-carbon aluminum-killed steel, which have been conventionally used as shadow mask materials, have a much higher coefficient of thermal expansion than the glass body supporting the phosphor screen, so they are fired. When the beam hits the shadow mask and the temperature of the shadow mask body becomes high, mutual displacement occurs and it becomes impossible to accurately irradiate the electron beam to a predetermined point on the phosphor screen, and the image becomes unclear. Often became. In order to prevent the image from being blurred, attempts have been made to devise a structure of a support serving as a suspension device of the shadow mask to compensate for mutual displacement, but this is not necessarily sufficient. Further, in recent years, with the enlargement of television screens and the expansion of applications to computer displays, the demand for finer images and higher brightness has been further increased, and the problems of positional shift and color shift have become apparent. For this reason, it has become necessary to carry out an etching process for forming a finer and more accurate hole for passing an electron beam. In particular, a high-definition shadow mask used for a computer display mainly uses a material having a thickness of 0.15 mm or less.
m holes are drilled at a pitch of 270 μm, and a finer pitch is being tried. In order to accurately drill such fine holes in the etching surface, studies have been made to improve the shape of the original plate as well as to improve the etching technology more than ever, and to reduce the thermal shrinkage in the manufacturing process where heat treatment and processing are repeated. ing.
【０００３】そこで、シャドウマスク用素材として、３
６wt% のＮｉを含有するＦｅ−Ｎｉ系合金が検討され始
め、使用が拡大している。この合金は従来の低炭素鋼に
比べて熱膨張係数が約１／１０と小さく、高輝度型画面
における電子ビームによる加熱に対してもその低熱膨張
性は維持されるため、これを素材として作られたシャド
ウマスクでは、熱膨張による色ずれは生じにくい。Therefore, as a material for a shadow mask, 3
Fe-Ni-based alloys containing 6 wt% Ni have been studied and their use has been expanding. This alloy has a smaller coefficient of thermal expansion than conventional low-carbon steel, about 1/10, and maintains its low thermal expansion even when heated by an electron beam on a high-brightness screen. In the shadow mask thus obtained, color shift due to thermal expansion hardly occurs.
【０００４】シャドウマスク用Ｆｅ−Ｎｉ系合金薄板
は、通常、連続鋳造法または造塊法によって合金鋼塊を
調製し、次いで、分塊圧延、熱間圧延、冷間圧延、焼鈍
を施して製造される。さらに、この合金薄板にフォトエ
ッチング加工で電子ビームの通過孔を形成した後、焼
鈍、成形加工および黒化処理等の各工程を施してシャド
ウマスクが製造される。[0004] Fe-Ni alloy thin sheets for shadow masks are usually produced by preparing an alloy steel ingot by a continuous casting method or an ingot-making method, and then subjecting it to slab rolling, hot rolling, cold rolling and annealing. Is done. Further, after forming an electron beam passage hole in the alloy thin plate by photo-etching, the shadow mask is manufactured by performing various steps such as annealing, forming, and blackening.
【０００５】シャドウマスクのエッチング孔には高い精
度が必要とされるため、エッチング前の原板においても
良好な板形状すなわち平坦であることが要求される。ま
た、シャドウマスクのエッチング後、再結晶焼鈍されプ
レス成型される際の熱処理と加工を施す製造過程におい
て、寸法変化（熱収縮）が小さいことも必要とされる。
熱収縮が大きい場合にはプレス成型後におけるエッチン
グ孔の孔径の縦と横の比率が、エッチング段階での縦横
比からずれるため解像度不良の一因となる。また、図１
に示すようにプレス型とシャドウマスク側の位置決め穴
の位置がずれてがたつき生産性を損なう問題が生じる。[0005] Since high precision is required for the etching holes of the shadow mask, the original plate before etching must also have a good plate shape, that is, a flat shape. In addition, it is necessary that a dimensional change (heat shrinkage) is small in a manufacturing process in which heat treatment and processing are performed after recrystallization annealing and press molding after the shadow mask is etched.
If the heat shrinkage is large, the ratio between the length and width of the hole diameter of the etching hole after press molding is deviated from the ratio of the length and width in the etching stage, which contributes to poor resolution. FIG.
As shown in (1), the positions of the positioning holes on the press die and the shadow mask side are displaced, causing a problem that productivity is impaired.
【０００６】すなわち、エッチングの精度を高めるため
に、鋼板の平坦性を高め、加工と熱処理を繰り返す際の
熱収縮を抑えるシャドウマスク鋼板が求められていた。In other words, there has been a demand for a shadow mask steel sheet which increases the flatness of the steel sheet and suppresses thermal shrinkage when processing and heat treatment are repeated in order to increase the etching accuracy.
【０００７】これまで、板によるシャドウマスクの原板
の形状矯正については、Ｆｅ−Ｎｉ合金ではなく、アル
ミキルド鋼を対象としたものではあるが、特開平２−１
７５８２０号公報に、冷間圧延時の圧下率を７０〜８５
％とし、歪み取り焼鈍における焼鈍温度を４５０〜５０
０℃と規定することにより、冷間圧延後の板形状の改善
する技術が開示されている。Until now, the shape correction of an original plate of a shadow mask using a plate has been directed to aluminum-killed steel instead of an Fe-Ni alloy.
No. 75820, the rolling reduction at the time of cold rolling is 70-85.
%, And the annealing temperature in the strain relief annealing is 450 to 50.
A technique for improving the shape of a sheet after cold rolling by specifying 0 ° C. is disclosed.
【０００８】一方、熱収縮の低下と板形状の改善につい
ては、リードフレーム用素材を対象として、特開平６−
２７１９３６号公報に、炭素、窒素、クロム、ボロンな
どを微量含み、さらにニオブ、ジルコニウム、銅、チタ
ンなどを単独または複合で添加することで鋼板の硬度を
確保し、７２０〜９５０℃で再結晶焼鈍し、２０％以上
の圧下率で冷間圧延し０.３〜８.０ kgf/mm2の張力下で
６５０〜８００℃で１０秒以上のテンションアニールを
行い、板形状と耐熱収縮性を改善する技術が開示されて
いる。On the other hand, with respect to the reduction of heat shrinkage and the improvement of the plate shape, Japanese Unexamined Patent Publication No.
Japanese Patent No. 271936 discloses that the steel sheet contains a trace amount of carbon, nitrogen, chromium, boron and the like, and further adds niobium, zirconium, copper, titanium or the like alone or in combination to secure the hardness of the steel sheet, and is recrystallized at 720 to 950 ° C. And cold-rolled at a rolling reduction of 20% or more, and tension annealed at 650-800 ° C for 10 seconds or more under a tension of 0.3-8.0 kgf / mm 2 to improve the plate shape and heat shrink resistance. A technique for performing this is disclosed.
【０００９】また、特開平６−２１６３０４号公報で
は、薄板リードフレーム材において、最終の焼鈍を温度
５３０〜７００℃、好ましくは６３０〜６７０℃、張力
３kgf/mm2 以下、好ましくは１kgf/mm2 以下の条件でテ
ンションアニールすることで、歪みとバネ限界値を向上
させ二段プレスの中間で行う焼鈍による収縮を抑える技
術が開示されている。In Japanese Patent Application Laid-Open No. Hei 6-216304, in a thin lead frame material, the final annealing is performed at a temperature of 530 to 700 ° C., preferably 630 to 670 ° C., and a tension of 3 kgf / mm 2 or less, preferably 1 kgf / mm 2. A technique has been disclosed in which tension annealing is performed under the following conditions to improve distortion and a spring limit value and to suppress shrinkage due to annealing performed in the middle of two-stage pressing.
【００１０】[0010]
【発明が解決しようとする課題】ところがこれらの従来
技術を、高精度の微細エッチング孔が穿孔されるシャド
ウマスク用、熱膨張係数の低いＦｅ−Ｎｉ系合金薄板に
転用しても板形状と熱収縮性を改善するには不十分であ
った。However, even if these prior arts are diverted to a Fe--Ni alloy thin plate having a low coefficient of thermal expansion, which is used for a shadow mask having high-precision fine etching holes, the shape and heat of the plate are reduced. It was insufficient to improve shrinkage.
【００１１】例えば、特開平２−１７５８２０号公報で
は、鋼板形状の改善は歪み取り焼鈍条件を規定すること
により改善されるとしても熱収縮は全く考慮されていな
い。For example, in Japanese Patent Application Laid-Open No. 2-175820, even if the improvement of the shape of the steel sheet is improved by defining the conditions of the strain relief annealing, the heat shrinkage is not considered at all.
【００１２】また、特開平６−２７１９３６号公報で
は、板形状および熱収縮をともに改善する方策を示して
いるが、あくまでもリードフレーム用素材にのみ適用で
きる技術で、製品としての製造方法が異なるシャドウマ
スク用素材には適用できない問題があった。すなわち、
この技術では硬度を確保するために、ニオブやジルコニ
ウムなどの微量元素を単独または複合で添加している。
ところが、これらの元素はシャドウマスクでは黒化処理
性を損なうためシャドウマスク用素材として添加でき
ず、Ｈｖ１７０以下の低硬度となる問題がある。また、
この技術ではリードフレーム用素材としての６５０℃再
結晶温度以下での熱収縮の改善のみに着目し、シャドウ
マスク用素材に不可欠な再結晶温度域（８００℃以上）
での熱収縮について考慮していない問題がある。Japanese Patent Application Laid-Open No. Hei 6-271936 discloses a method for improving both the plate shape and the heat shrinkage. However, this technology can be applied only to the material for lead frames, and the method for manufacturing the product is different. There was a problem that could not be applied to mask materials. That is,
In this technique, a trace element such as niobium or zirconium is added alone or in combination to secure hardness.
However, these elements cannot be added as a material for a shadow mask because they impair the blackening property in a shadow mask, and there is a problem that the hardness becomes low at Hv 170 or less. Also,
This technology focuses only on the improvement of thermal shrinkage below 650 ° C recrystallization temperature as a lead frame material, and is a recrystallization temperature region (800 ° C or more) indispensable for a shadow mask material.
There is a problem that heat shrinkage is not taken into account.
【００１３】また特開平６−２１６３０４号公報もリー
ドフレーム素材に関するものであり、６００℃×５分間
と再結晶温度よりも低温での熱収縮のみに着目している
のみで、鋼板の平坦度を表す急峻度については考慮して
いない問題があった。Japanese Patent Application Laid-Open No. 6-216304 also relates to a lead frame material, and focuses only on thermal shrinkage at a temperature of 600 ° C. for 5 minutes lower than the recrystallization temperature. There is a problem that the steepness to be expressed is not considered.
【００１４】熱収縮について述べられたこれらの従来技
術についてさらに詳細にその問題を明らかにする。すな
わち、特開平６−２７１９３６号公報と特開平６−２１
６３０４号公報のいずれの従来技術もリードフレームの
未再結晶熱処理後の熱収縮を改善しようとしたものであ
る。従って、特開平６−２７１９３６号公報本文中の歪
み取り焼鈍（テンションアニール）の説明に示されるよ
うに、冷間圧延時に発生した残留歪みを張力付与によっ
て除去すると同時に、圧延方向の残留圧縮応力の減少を
通じて熱収縮を抑制している。このことは、張力がある
限度未満では残留圧縮応力を緩和できないため熱収縮を
防止できないと記載されていることを考慮すると、テン
ションアニールの張力を増加するほど熱収縮を抑制でき
ることを意味している。[0014] These prior arts described for heat shrinkage will elucidate the problem in more detail. That is, JP-A-6-271936 and JP-A-6-21
Any of the prior arts disclosed in Japanese Patent No. 6304 is intended to improve the heat shrinkage of the lead frame after the non-recrystallization heat treatment. Therefore, as described in the description of strain relief annealing (tension annealing) in the text of JP-A-6-271936, residual strain generated during cold rolling is removed by applying tension, and at the same time, residual compressive stress in the rolling direction is reduced. Thermal shrinkage is suppressed through reduction. This means that as the tension is less than a certain limit, the residual compressive stress cannot be alleviated, so that thermal shrinkage cannot be prevented, which means that the thermal shrinkage can be suppressed by increasing the tension of the tension annealing. .
【００１５】ところが、本願が対象とするシャドウマス
クでは再結晶焼鈍しプレス加工が容易なように軟化させ
る用途では、後述するようにテンションアニールにおけ
る張力を増加するほど再結晶焼鈍後の熱収縮が増加す
る。これは再結晶によって結晶粒およびそれらの粒界に
テンションアニール時導入されたミクロな残留応力が解
放されるため、大きな熱収縮が発生するためである。こ
のようなミクロな残留応力に起因する熱収縮は張力が高
いほど増加し、単に張力を高くするだけでは回避するこ
とができないのである。再結晶温度以上の温度に加熱す
ると、結晶粒の再配列によってミクロな残留応力が解放
されるために、熱収縮率は未再結晶温度以下のものより
も顕著に大きくなる問題がある。However, in the shadow mask to which the present invention is applied, in applications where recrystallization annealing and softening are performed so that press working is easy, as described later, the heat shrinkage after recrystallization annealing increases as the tension in tension annealing increases. I do. This is because the recrystallization releases micro residual stress introduced into the crystal grains and their grain boundaries during the tension annealing, thereby causing a large thermal shrinkage. The thermal shrinkage due to such micro residual stress increases as the tension increases, and cannot be avoided simply by increasing the tension. When heated to a temperature equal to or higher than the recrystallization temperature, micro-residual stress is released by the rearrangement of crystal grains, so that there is a problem that the heat shrinkage rate is significantly larger than that at a temperature lower than the non-recrystallization temperature.
【００１６】さらに、これらの従来技術は製品寸法が１
００mm程度の長さのリードフレーム素材に適用されるも
のであり、一定の張力以下でテンションアニールを行い
未再結晶温度での熱収縮を防止できれば板形状について
配慮する必要はない。ところが、シャドウマスク素材は
大型ディスプレイやブラウン管に使用されるため６００
〜８００mm以上の寸法で厳しい板形状の管理が必要とさ
れ、従来技術を転用し張力を小さくすれば板形状が悪化
する問題があった。Furthermore, these prior arts have a product size of 1
It is applied to a lead frame material having a length of about 00 mm. If tension annealing is performed at a certain tension or less to prevent thermal shrinkage at a non-recrystallization temperature, there is no need to consider the shape of the plate. However, since shadow mask materials are used for large displays and cathode ray tubes, 600
Strict control of the plate shape is required for dimensions of up to 800 mm or more, and there is a problem that the plate shape is deteriorated if the conventional technology is diverted to reduce the tension.
【００１７】すなわち、高張力では増加する熱収縮と低
張力では劣化する板形状の両特性をともに改善すること
がシャドウマスク素材に要求されるようになり、シャド
ウマスクにおける高精度のエッチング孔を熱処理と成型
後も得るための、原板の歪み取り焼鈍における対策が求
められている。That is, it is required for a shadow mask material to improve both the characteristics of the heat shrinkage which increases at a high tension and the plate shape which deteriorates at a low tension, and a high-precision etching hole in the shadow mask is heat-treated. In order to obtain even after molding, a countermeasure in strain relief annealing of the original sheet is required.
【００１８】本発明は上記の実情を鑑みて、シャドウマ
スク用として好適な板形状や耐熱収縮性およびエッチン
グ性に優れた鋼板の製造方法を提供することを目的とす
るものである。The present invention has been made in view of the above circumstances, and has as its object to provide a method of manufacturing a steel sheet which is suitable for a shadow mask and which has excellent heat shrinkage resistance and etching properties.
【００１９】[0019]
【課題を解決するための手段】本願発明者らは、先に、
Ｎｉを３２〜３８ｗｔ．％含むＦｅ−Ｎｉ系合金もしく
はＮｉを２３〜３８ｗｔ．％、Ｃｏを７ｗｔ．％以下含
むＦｅ−Ｎｉ−Ｃｏ系合金を図６に示す領域の斜線部内
で示される温度・張力条件で行なう低熱膨張合金の製造
方法について出願した（特願平７−２５５１５０）。こ
の方法を用いることにより、従来よりも板形状および耐
熱収縮性に優れた低熱膨張合金を製造することが出来た
が、本願発明者らのその後の実験によれば、より優れた
特性を安定して得るためには、未だ不十分であることが
判明した。Means for Solving the Problems The present inventors have previously described
Ni is 32 to 38 wt. % Fe-Ni alloy or Ni in an amount of 23 to 38 wt. %, 7 wt. An application was made for a method for producing a low-thermal-expansion alloy in which a Fe-Ni-Co-based alloy containing not more than 0.1% was used under the temperature and tension conditions shown in the shaded area in the region shown in FIG. By using this method, it was possible to produce a low thermal expansion alloy having a better plate shape and heat shrinkage resistance than before, but according to subsequent experiments by the inventors of the present application, it was found that more excellent characteristics were stabilized. Proved to be inadequate to obtain
【００２０】そこで本発明者らはＦｅ−Ｎｉ系低熱膨張
合金薄板の板形状と再結晶焼鈍後の熱収縮におよぼす歪
み取り焼鈍条件の影響についてさらに種々の検討を行っ
た。その結果、テンションアニールによる歪み取り焼鈍
において、鋼板温度と鋼板に付与される張力が複合的に
関わりあって残留応力が発生し、鋼板の平坦度を劣化さ
せたり、シャドウマスク成型工程の再結晶焼鈍後に熱収
縮を生じさせることが明らかとなった。Therefore, the present inventors have further conducted various studies on the effect of the strain relief annealing conditions on the sheet shape of the Fe—Ni-based low thermal expansion alloy sheet and the thermal shrinkage after recrystallization annealing. As a result, in strain relief annealing by tension annealing, the steel sheet temperature and the tension applied to the steel sheet are combined and residual stress is generated, deteriorating the flatness of the steel sheet, or recrystallization annealing in the shadow mask forming step. It was later found to cause heat shrinkage.
【００２１】すなわち、本発明は上記のような知見に基
づいてなされたものであり、Ｎｉを３２〜３８wt% 含む
Ｆｅ−Ｎｉ系合金を、冷間圧延後、鋼板温度５５０〜６
９０℃、張力５〜２０kgf/mm2 の条件で、１回以上の歪
み取り焼鈍を実施し、引き続いて鋼板温度５５０〜６９
０℃、張力０. １〜８kgf/mm2 の条件で歪み取り焼鈍を
実施することを特徴とする板形状および耐熱収縮性に優
れたＦｅ- Ｎｉ系低熱膨張合金薄板の製造方法もしく
は、Ｎｉを２３〜３８wt% 、Ｃｏを７wt% 以下含み、か
つＮｉ＋Ｃｏを３０〜３８wt% とするＦｅ−Ｎｉ−Ｃｏ
系合金を、冷間圧延後、鋼板温度５５０〜６９０℃、張
力５〜２０kgf/mm2 の条件で、１回以上の歪み取り焼鈍
を実施し、引き続いて鋼板温度５５０〜６９０℃、張力
０. １〜８kgf/mm2 の条件で歪み取り焼鈍を実施するこ
とを特徴とする板形状および耐熱収縮性に優れたＦｅ-
Ｎｉ系低熱膨張合金薄板の製造方法である。That is, the present invention has been made on the basis of the above-described findings. After cold rolling an Fe-Ni-based alloy containing 32 to 38 wt% of Ni, the steel sheet temperature is reduced to 550 to 6%.
Under a condition of 90 ° C. and a tension of 5 to 20 kgf / mm 2 , at least one strain relief annealing is performed, and subsequently, a steel sheet temperature of 550 to 69
0 ° C., a method of manufacturing plate-shaped and heat shrinkage resistance superior Fe- Ni-based low thermal expansion alloy sheet which comprises carrying out the stress relief annealing under the condition of tension 0. 1~8kgf / mm 2 or, the Ni Fe-Ni-Co containing 23 to 38% by weight, 7% by weight or less of Co, and 30 to 38% by weight of Ni + Co
After cold rolling, the alloy is subjected to at least one strain relief annealing under the conditions of a steel sheet temperature of 550 to 690 ° C. and a tension of 5 to 20 kgf / mm 2 , and subsequently, a steel sheet temperature of 550 to 690 ° C. and a tension of 0.5. excellent plate-shaped and heat shrinkage resistance which comprises carrying out the stress relief annealing under the condition of 1~8kgf / mm 2 Fe-
This is a method for producing a Ni-based low thermal expansion alloy thin plate.
【００２２】[0022]
【発明の実施の形態】以下に本発明を詳細に説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail.
【００２３】図２は、はテンションアニールでの均熱時
間が５〜６０秒間および冷却速度が２０℃／秒以上の条
件で、鋼板に付与される張力と急峻度の関係を示した図
である。FIG. 2 is a diagram showing the relationship between the tension applied to the steel sheet and the steepness under the condition that the soaking time in tension annealing is 5 to 60 seconds and the cooling rate is 20 ° C./sec or more. .
【００２４】ここで、急峻度は鋼板の平坦度を表すパラ
メータで、耳波および中伸びの高さとピッチを測定し次
式により求めた。Here, the steepness is a parameter indicating the flatness of the steel sheet, and the height and pitch of the ear wave and the middle elongation are measured and obtained by the following equation.
【００２５】 急峻度（％）＝高さ（mm）／ピッチ（mm）×１００ 図２から鋼板温度570 ℃、610 ℃、650 ℃いずれの場合
も張力が増加すると急峻度は改善され、逆に低張力の場
合には急峻度が劣ることが分かる。高張力ほど急峻度が
低下する傾向は、鋼板の冷間圧延後において板幅方向に
存在する中伸びなどの歪みが、張力を付与されることに
よって局部的な降伏伸びを生じ均一に伸ばされるためと
考えられる。また、570 ℃、610 ℃、650 ℃と３種の鋼
板温度の異なる鋼板を比較すると、急峻度の増加には張
力と鋼板温度が複合して関係し、鋼板温度が低いほど急
峻度は増す傾向が見られる。Steepness (%) = height (mm) / pitch (mm) × 100 From FIG. 2, the steepness is improved when the tension is increased at any of the steel plate temperatures of 570 ° C., 610 ° C., and 650 ° C. It can be seen that the steepness is poor when the tension is low. The tendency for the steepness to decrease as the tension increases is that strain such as medium elongation existing in the sheet width direction after cold rolling of the steel sheet causes local yield elongation by applying tension, so that the sheet is uniformly stretched. it is conceivable that. Comparing the three types of steel sheets with different temperatures, 570 ° C, 610 ° C, and 650 ° C, the increase in steepness is related to the combination of tension and the steel plate temperature. Can be seen.
【００２６】続いて、張力と熱収縮の関係を調べた。図
３はテンションアニールでの均熱時間が５〜６０秒間お
よび冷却速度が２０℃／秒以上の条件で、張力と熱収縮
の関係を示した図である。図３において、熱収縮率は鋼
板の板幅中央部と鋼板端部から１００mmの部分から、鋼
板の長手方向に３００mml ×１００mmw ×全厚の試験片
を採取し、シャドウマスクの成型前の焼鈍工程をシミュ
レートした８５０〜９００℃×３０分間の熱処理を行
い、熱処理前後の試験片の長さの差をノギスにて測定す
ることで求めた。ここで、８５０〜９００℃の加熱温度
はアンバー材が再結晶し軟化する温度域である。図から
張力が増加する程、熱収縮率は増す傾向である。また、
鋼板温度が高い程、熱収縮率が増加する傾向も見られ
た。Subsequently, the relationship between tension and heat shrinkage was examined. FIG. 3 is a diagram showing the relationship between tension and heat shrinkage under conditions where the soaking time in tension annealing is 5 to 60 seconds and the cooling rate is 20 ° C./sec or more. In FIG. 3, the heat shrinkage rate was 300 mml × 100 mmw × full thickness in the longitudinal direction of the steel sheet from the center of the steel sheet and 100 mm from the end of the steel sheet. Was performed at 850 to 900 ° C. for 30 minutes to simulate the above, and the difference between the lengths of the test pieces before and after the heat treatment was measured by a caliper. Here, the heating temperature of 850 to 900 ° C. is a temperature range in which the invar material is recrystallized and softened. From the figure, the heat shrinkage tends to increase as the tension increases. Also,
There was also a tendency that the higher the temperature of the steel sheet, the higher the heat shrinkage rate.
【００２７】張力と急峻度の関係はマクロな残留応力が
問題になるのに対し、熱収縮の発生にはミクロな残留応
力（転位の蓄積）が関与すると考えられる。すなわち、
高張力ほど熱収縮率が増加する現象の詳細なメカニズム
は不明であるが、張力が付与されることによって、結晶
粒界や結晶粒内外での塑性変形の差によるミクロな残留
応力が結晶粒に蓄積され、シャドウマスク製造工程の再
結晶焼鈍において粒が再結晶される際にミクロな残留応
力が解放され熱収縮を引き起こすと考えられる。なお、
ミクロな残留応力の発生源として １）結晶粒の異方性によるもの、（結晶の熱膨張係数、
弾性定数などの異方性や結晶粒間の方位差）、 ２）結晶粒内外での塑性変形によるもの、 ３）不純物、析出物、あるいは変態による異相の出現、
がある（引用：米谷茂：残留応力の発生と対策, P13
［養賢堂］）。The relationship between the tension and the steepness is a problem of macro residual stress, whereas micro shrinkage (accumulation of dislocations) is considered to be involved in the occurrence of thermal contraction. That is,
The detailed mechanism of the phenomenon in which the thermal contraction rate increases as the tension increases is unknown, but micro tension is applied to the crystal grains due to the difference in plastic deformation between the crystal grain boundaries and inside and outside the crystal grains. It is considered that when the particles are accumulated and recrystallized in the recrystallization annealing in the shadow mask manufacturing process, micro residual stress is released, and thermal shrinkage is caused. In addition,
Sources of micro residual stress 1) Due to anisotropy of crystal grains, (Coefficient of thermal expansion of crystal,
Anisotropy such as elastic constant and misorientation between crystal grains), 2) plastic deformation inside and outside the crystal grains, 3) appearance of impurities, precipitates, or different phases due to transformation,
(Quotation: Shigeru Yoneya: Generation of residual stress and countermeasures, P13
[Yokendo]).
【００２８】以上の結果をもとに、歪み取り焼鈍におけ
る張力、温度と急峻度、熱収縮率について更なる検討を
重ねたところ、歪み取り焼鈍を２回以上行い、最終歪み
取り焼鈍とそれ以外の歪み取り焼鈍のそれぞれについ
て、鋼板温度、張力を制御して行なうことにより、板形
状、耐熱収縮性の問題が解決されることがわかった。以
下に歪み取り焼鈍条件について詳細に説明する。Based on the above results, further studies were conducted on the tension, temperature and steepness, and heat shrinkage rate in the strain relief annealing. The strain relief annealing was performed twice or more, and the final strain relief annealing was performed. It was found that by controlling the steel sheet temperature and tension for each of the strain relief annealing, the problems of the sheet shape and heat shrinkage were solved. Hereinafter, the strain relief annealing conditions will be described in detail.
【００２９】歪み取り焼鈍の条件は鋼板形状と耐熱収縮
性をともに満足させるために、鋼板形状矯正のための歪
み取り焼鈍と熱収縮率低下のための歪み取り焼鈍を組み
合わせて行うものとする。すなわち、最終の歪み取り焼
鈍以外の歪み取り焼鈍は鋼板形状矯正が目的であって、
鋼板温度は５５０〜６９０℃、張力は５〜２０kgf/mm 2
の条件で行うものとする。５５０℃未満では歪み取り焼
鈍の効果が少ないため急峻度が増大し鋼板の平坦度が損
なわれ、６９０℃を超える温度では鋼板が軟化するから
である。また、張力が５kgf/mm2 未満では急峻度が過大
となり２０kgf/mm2 を超える張力では鋼板が塑性変形す
る場合がある。The conditions of the strain relief annealing are steel plate shape and heat shrinkage.
Strain to correct the shape of the steel sheet to satisfy both properties
Combination of strip annealing and strain relief annealing to reduce thermal shrinkage
It shall be performed together. That is, the final strain relief burning
The purpose of strain relief annealing other than dulling is to correct the shape of the steel sheet,
Steel plate temperature is 550-690 ° C, tension is 5-20kgf / mm Two
Under the following conditions. If the temperature is less than 550 ° C, bake out
Because the effect of the dulling is small, the steepness increases and the flatness of the steel sheet is lost
In other words, if the temperature exceeds 690 ° C, the steel sheet softens
It is. The tension is 5kgf / mmTwoIf less than, the steepness is excessive
20kgf / mmTwoWhen the tension exceeds the limit, the steel plate is plastically deformed.
In some cases.
【００３０】また、最終の歪み取り焼鈍は熱収縮率低下
を目的とする。よって鋼板温度は５５０〜６９０℃、張
力は０. １〜８kgf/mm2 の条件で行う。５５０℃未満で
は歪み取り焼鈍の効果が少ないため熱収縮率を低下させ
ることが出来ない。６９０℃を超える温度では鋼板が軟
化するとともに冷却の際に熱応力が発生し熱収縮率が増
加する。張力が０. １kgf/mm2 未満では張力を鋼板に均
一に付与することが困難であり、８kgf/mm2 を超える張
力では熱収縮率が過大となる。The final strain relief annealing aims at lowering the heat shrinkage. Therefore, the steel plate temperature is set to 550 to 690 ° C. and the tension is set to 0.1 to 8 kgf / mm 2 . If the temperature is lower than 550 ° C., the effect of annealing for removing strain is small, so that the heat shrinkage cannot be reduced. At a temperature exceeding 690 ° C., the steel sheet is softened and thermal stress is generated during cooling, so that the thermal shrinkage increases. When the tension is less than 0.1 kgf / mm 2 , it is difficult to uniformly apply the tension to the steel sheet, and when the tension exceeds 8 kgf / mm 2 , the heat shrinkage becomes excessive.
【００３１】なお、本発明では焼鈍温度を鋼板温度で表
すものとする。加熱炉の温度は鋼板温度と数十〜百数十
℃のバイアスがあることが一般的であり、また季節によ
ってそのバイアスが異なる。従って、今回のようなミク
ロな残留応力に対応するためには温度管理を厳密に行う
必要があり、鋼板温度を用いた。この鋼板温度の測定に
は放射温度計を利用することでオンライン計測が可能で
あるが、予めダミー材となる鋼板表面にスポット溶接で
熱電対を取り付け測温することでも計測できる。In the present invention, the annealing temperature is represented by the steel sheet temperature. The temperature of the heating furnace generally has a bias of several tens to one hundred and several tens of degrees Celsius with the temperature of the steel sheet, and the bias varies depending on the season. Therefore, in order to cope with the micro residual stress as in this case, it is necessary to strictly control the temperature, and the steel sheet temperature was used. This steel sheet temperature can be measured online by using a radiation thermometer, but it can also be measured by attaching a thermocouple to the surface of the steel sheet serving as the dummy material in advance by spot welding and measuring the temperature.
【００３２】この際の均熱時間として５〜６０秒間が望
ましい。５秒未満では歪み取り焼鈍の効果が認められ
ず、６０秒を過大に超えると鋼板が軟化するからであ
る。The soaking time is preferably 5 to 60 seconds. If the time is less than 5 seconds, the effect of the strain relief annealing is not recognized, and if it exceeds 60 seconds, the steel sheet is softened.
【００３３】冷却速度として２０〜３００℃／秒が望ま
しい。２０℃／秒未満の遅い冷却速度では、再結晶によ
る鋼板の軟化が生じ、一方、３００℃／秒を超える冷却
速度では熱応力が発生し熱収縮率が増加する。The cooling rate is preferably from 20 to 300 ° C./sec. At a slow cooling rate of less than 20 ° C./sec, the steel sheet softens due to recrystallization, while at a cooling rate exceeding 300 ° C./sec, thermal stress is generated and the thermal shrinkage increases.
【００３４】次に本発明の成分限定理由について述べ
る。まず、本材料に必須な成分としてＮｉを３２〜３８
wt% 含むものとする。これは、製品性能を低下させる電
子部品の寸法変化や位置ずれが起こらないような十分な
低熱膨張特性を得るためである。これにより、室温〜１
００℃の平均熱膨張係数が２．０×１０-6／℃以下であ
るような合金薄板を得ることができる。Next, the reasons for limiting the components of the present invention will be described. First, as an essential component of the present material, Ni is added in the range of 32 to 38.
wt%. This is to obtain a sufficiently low thermal expansion characteristic that does not cause dimensional change or misalignment of the electronic component that degrades product performance. Thereby, room temperature to 1
An alloy sheet having an average coefficient of thermal expansion at 00 ° C. of 2.0 × 10 −6 / ° C. or less can be obtained.
【００３５】また、７wt％以下のＣｏを添加した場合で
も同様の低熱膨張性を得ることができるが、この場合に
は（Ｎｉ＋Ｃｏ）を３０〜３８wt％とする必要がある。
なお、Ｃｏは７wt％を超えて添加するとエッチング性の
著しい低下をもたらすため、これを上限とする。The same low thermal expansion can be obtained when Co of 7 wt% or less is added, but in this case, (Ni + Co) must be 30 to 38 wt%.
Note that if Co is added in excess of 7 wt%, the etching property will be significantly reduced.
【００３６】さらに、本合金はＳｉ≦０．０７wt％、Ｍ
ｎ≦０．５wt％の範囲で含有しても効果は損なわれな
い。Ｓｉは本合金の溶製時に脱酸元素として用いるもの
であるが、０. ０７% を超えるとシャドウマスクのプレ
ス成型前の焼鈍時に合金表面にＳｉの酸化膜が形成さ
れ、この酸化膜によりプレス成型時の金型とのなじみが
悪くなり、合金が金型をかじるようになる。従って、Ｓ
ｉ量は０. ０７% 以下であることが望ましい。Ｓｉ量を
さらに低減することにより合金板と金型とのなじみをさ
らに良くすることができ、本発明では０wt％を含むもの
とする。Further, this alloy has Si ≦ 0.07 wt%, M
Even if it is contained in the range of n ≦ 0.5 wt%, the effect is not impaired. Si is used as a deoxidizing element when the present alloy is melted. However, if it exceeds 0.07%, an oxide film of Si is formed on the surface of the alloy during annealing before press molding of the shadow mask. It becomes less familiar with the mold during molding, and the alloy comes to bite the mold. Therefore, S
The i amount is desirably 0.07% or less. By further reducing the amount of Si, the conformity between the alloy plate and the mold can be further improved. In the present invention, it is assumed that the alloy contains 0 wt%.
【００３７】Ｍｎは高Ｎｉ鋼において製造性の観点から
重要な元素であり、不純物であるＳと結びつき熱間加工
性を良好にするため、０. １wt% 以上添加されることが
望ましい。しかし、０.５wt%を越えると高Ｎｉ鋼のもつ
本来の物理的特性が損なわれるばかりでなく、最終的な
冷圧・焼鈍時に酸化膜が表面に形成されやすくなる。ま
た、Ｍｎは高い黒色度を有する黒化膜の形成のためには
有害な元素であり、Ｍｎ量が０. ５w%を超えるとＭｎを
含むスピネル酸化物が形成され、黒色度の優れた黒化膜
が形成されにくくなるため、０. ５w%以下が望ましい。
なお、このＭｎ量は０. ５w%以下で低ければ低いほど黒
色度は高まり、熱輻射率も高くすることができる。Mn is an important element from the viewpoint of manufacturability in high Ni steel, and is preferably added in an amount of 0.1 wt% or more in order to improve the hot workability in combination with S as an impurity. However, if the content exceeds 0.5% by weight, not only the original physical properties of the high Ni steel are impaired, but also an oxide film is likely to be formed on the surface at the time of final cold pressure and annealing. Further, Mn is a harmful element for forming a blackened film having a high blackness. If the Mn content exceeds 0.5 w%, a spinel oxide containing Mn is formed, and black having excellent blackness is formed. Since it is difficult to form an oxide film, the content is preferably 0.5 w% or less.
The lower the Mn content is 0.5 w% or less, the higher the blackness and the higher the heat radiation rate.
【００３８】次に、上記のような歪み取り焼鈍条件を満
足し低熱膨張特性が得られる製品原板を製造する方法を
述べる。歪み取り焼鈍工程に至る工程は特に規定しな
い。Ｆｅ−Ｎｉ系合金およびＦｅ−Ｎｉ−Ｃｏ系合金薄
板を製造する常法でよい。一例を述べると下記のとおり
である。Next, a method for producing a product base sheet which satisfies the above-described strain relief annealing conditions and obtains low thermal expansion characteristics will be described. The process leading to the strain relief annealing process is not particularly defined. A conventional method for producing Fe-Ni-based alloys and Fe-Ni-Co-based alloy thin plates may be used. An example is as follows.
【００３９】溶解後、インゴットもしくは連続鋳造によ
り鋼塊とする。インゴットの場合必要であれば分解圧延
を行なう。また、インゴットもしくは連続鋳造スラブの
段階で均熱処理を行い、成分偏析を軽減しておくことが
望ましい。次いで所定の温度に加熱後熱間圧延を行な
う。加熱温度は１０５０〜１２５０℃が好ましく、３０
分以上の保持が推奨される。得られた熱延版を酸洗後、
冷間圧延する。鋼塊から最終板厚までの圧下率を９９．
９％以上とすることが望ましい。また、中間焼鈍を実施
する際には７５０℃以上することが望まれる。After melting, a steel ingot is formed by ingot or continuous casting. In the case of an ingot, if necessary, disassembly rolling is performed. In addition, it is desirable to perform soaking treatment at the stage of the ingot or the continuous casting slab to reduce component segregation. Next, hot rolling is performed after heating to a predetermined temperature. The heating temperature is preferably from 1050 to 1250 ° C,
A retention of at least a minute is recommended. After pickling the obtained hot-rolled plate,
Cold roll. The rolling reduction from the ingot to the final thickness is 99.
It is desirable to set it to 9% or more. When performing the intermediate annealing, it is desired that the temperature be 750 ° C. or higher.
【００４０】本発明は、エッチング加工される電子部品
用Ｆｅ−Ｎｉ系合金薄板全般を対象とするが、特に、高
精度のエッチング加工と低熱膨張性が要求されるシャド
ウマスク用素材として好適である。低熱膨張特性のＦｅ
−Ｎｉ系合金薄板を素材とするシャドウマスクは熱膨張
による位置ずれが少ないので、これを用いたブラウン管
の画像は一段と鮮明になる。The present invention is intended for general thin Fe-Ni alloys for electronic parts to be etched, and is particularly suitable as a material for a shadow mask requiring high-precision etching and low thermal expansion. . Fe with low thermal expansion characteristics
Since a shadow mask made of a Ni-based alloy thin plate has a small displacement due to thermal expansion, an image of a CRT using the shadow mask becomes clearer.
【００４１】[0041]
【実施例】以下に、本発明鋼をシャドウマスク用素材と
して使用する場合の実施例を示す。The following is an example in which the steel of the present invention is used as a material for a shadow mask.
【００４２】本発明例および比較例の合金鋼の化学組成
を表１に示す。成分組成は、シャドウマスク用素材とし
て必要な低熱膨張特性、黒化処理性およびプレス成形性
が得られるものとし、鋼Ｎｏ．Ａ〜Ｃの３種類を溶製し
た。Table 1 shows the chemical compositions of the alloy steels of the present invention and comparative examples. The composition of the steel is such that low thermal expansion characteristics, blackening properties and press moldability required for a shadow mask material can be obtained. Three types of AC were melted.
【００４３】[0043]
【表１】 [Table 1]
【００４４】次に表１に示す成分組成で溶製した鋼塊を
１１５０〜１２５０℃×１〜５０時間の熱処理後に分塊
圧延し、１１００℃×１〜５時間の熱処理後に熱間圧延
して厚さ２．０mmの熱延鋼板を得た。さらに冷間圧延と
７５０℃以上の焼鈍と所定の歪み取り焼鈍を行い、板厚
０．１２〜０．２２mmの薄板Ｎｏ．１〜２７を製造し
た。Ｎｏ．１〜２０が本発明例であり、Ｎｏ．２１〜２
７が比較例である。Next, a steel ingot smelted with the composition shown in Table 1 was subjected to heat treatment at 1150-1250 ° C. × 1-50 hours, and then subjected to slab rolling, followed by heat rolling at 1100 ° C. × 1-5 hours and hot rolled. A hot-rolled steel sheet having a thickness of 2.0 mm was obtained. Further, cold rolling, annealing at 750 ° C. or higher, and predetermined strain relief annealing were performed to obtain a thin plate having a thickness of 0.12 to 0.22 mm. 1-27 were produced. No. Nos. 1 to 20 are examples of the present invention. 21-2
7 is a comparative example.
【００４５】表２に、Ｎｏ．１〜２７の薄板についてテ
ンションアニールによる歪み取り焼鈍条件を示し、板形
状および熱収縮率を評価した結果を示す。本発明例のＮ
ｏ．１〜２０では急峻度が０. ５％以下の良好な板形
状、０. ０８％以下の熱収縮率を示し、歪み取り焼鈍後
に再結晶による軟化も生じなかった。歪み取り焼鈍を３
回繰り返した場合でも特許請求範囲内の歪み取り焼鈍条
件では良好な板形状と耐熱収縮性が得られた。一方、比
較として用いた鋼板ではそれぞれ以下の問題が発生し
た。すなわち、Ｎｏ．２１鋼板では第一回歪み取り焼鈍
の温度が低く急峻度が基準値を超えた。Ｎｏ．２２鋼板
では第一回歪み取り焼鈍の張力が低く急峻度が過大とな
った。Ｎｏ．２３鋼板とＮｏ．２４鋼板では最終歪み取
り焼鈍の張力が高いため熱収縮率が０. ０８％を超え
た。Ｎｏ．２５鋼板では最終歪み取り焼鈍時の鋼板温度
が高く熱応力が発生し熱収縮率が０. ０８％を超えた。
Ｎｏ．２６鋼板とＮｏ．２７鋼板はいずれも１回のみの
歪み取り焼鈍を実施したものであるが、Ｎｏ．２６鋼板
では張力が高すぎるため耐熱収縮性が劣化し、Ｎｏ．２
７鋼板では張力が低く急峻度が高った。Ｎｏ．２６鋼
板、Ｎｏ．２７鋼板いずれも１回のみの歪み取り焼鈍で
は問題があることが示されている。Table 2 shows that The conditions for strain relief annealing by tension annealing for thin sheets Nos. 1 to 27 are shown, and the results of evaluating the plate shape and the heat shrinkage are shown. N of the present invention example
o. Nos. 1 to 20 exhibited a good plate shape with a steepness of 0.5% or less and a heat shrinkage of 0.08% or less, and did not undergo softening due to recrystallization after strain relief annealing. 3 for strain relief annealing
Even when the process was repeated twice, good plate shape and heat shrink resistance were obtained under the strain relief annealing conditions within the scope of the claims. On the other hand, the steel plate used for comparison had the following problems. That is, No. In the case of No. 21 steel plate, the temperature of the first strain relief annealing was low, and the steepness exceeded the reference value. No. In the case of No. 22 steel plate, the tension of the first strain relief annealing was low and the steepness was excessive. No. No. 23 steel sheet and No. 23. In the case of No. 24 steel plate, the heat shrinkage exceeded 0.08% because of the high tension in final strain relief annealing. No. In the case of the 25 steel sheet, the temperature of the steel sheet at the time of final strain relief annealing was so high that thermal stress was generated, and the thermal shrinkage exceeded 0.08%.
No. No. 26 steel sheet and No. 26. No. 27 steel plate was subjected to only one strain relief annealing. In the case of No. 26 steel sheet, the heat resistance shrinkage deteriorated because the tension was too high. 2
Seven steel sheets had low tension and high steepness. No. 26 steel sheet, No. It is shown that there is a problem with only one strain relief annealing for all 27 steel plates.
【００４６】[0046]
【表２】 [Table 2]
【００４７】また、表３は、特願平７−２５５１５０に
記載した実施例であり、表１の鋼について、表３中に示
す条件でテンションアニールを実施した結果である。ま
た、図４および５は、それぞれ、表２および表３に示さ
れる熱収縮率のデータを整理して示したものである。図
４および図５から明らかなように、本発明によれば、一
回焼鈍に比較して、低い熱収縮率が、安定して得られる
ことがわかる。Table 3 is an example described in Japanese Patent Application No. 7-255150, and is a result of tension annealing performed on the steel of Table 1 under the conditions shown in Table 3. FIGS. 4 and 5 show the data of the heat shrinkage rates shown in Tables 2 and 3, respectively. As is clear from FIGS. 4 and 5, according to the present invention, a lower heat shrinkage can be stably obtained as compared with the single annealing.
【００４８】[0048]
【表３】 [Table 3]
【００４９】[0049]
【発明の効果】本発明によれば、板形状および耐熱収縮
性に優れたFe-Ni系低熱膨張合金薄板の製造方法を提供
することができ、特にテレビジョンやコンピュータディ
スプレイに使用されるシャドウマスク用素材として好適
である。According to the present invention, it is possible to provide a method for producing an Fe-Ni-based low-thermal-expansion alloy thin plate having an excellent plate shape and heat-shrinkage resistance, particularly a shadow mask used for a television or a computer display. It is suitable as a material for use.
【図１】シャドウマスクにおけるプレス型のセット状態
を示した模式図である。FIG. 1 is a schematic view showing a setting state of a press die in a shadow mask.
【図２】張力と急峻度の関係を示す図である。FIG. 2 is a diagram showing a relationship between tension and steepness.
【図３】張力と熱収縮率の関係を示す図である。FIG. 3 is a diagram showing the relationship between tension and heat shrinkage.
【図４】本願発明による熱収縮率のバラツキを示す図で
ある。FIG. 4 is a view showing a variation in a heat shrinkage rate according to the present invention.
【図５】特願平７−２５５１５０による熱収縮率のバラ
ツキを示す図である。FIG. 5 is a diagram showing a variation in a heat shrinkage rate according to Japanese Patent Application No. 7-255150.
【図６】特願平７−２５５１５０に示される最適鋼板温
度および張力を示す図である。FIG. 6 is a diagram showing the optimum steel sheet temperature and tension shown in Japanese Patent Application No. 7-255150.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｊ 9/14 Ｈ０１Ｊ 9/14 Ｇ 29/07 29/07 Ａ 31/20 31/20 Ａ (72)発明者 尾崎 大介 東京都千代田区丸の内一丁目１番２号 日 本鋼管株式会社内 (72)発明者 丸山 俊明 東京都千代田区丸の内一丁目１番２号 日 本鋼管株式会社内 (72)発明者 井上 正 東京都千代田区丸の内一丁目１番２号 日 本鋼管株式会社内──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 6 Identification number Agency reference number FI Technical indication location H01J 9/14 H01J 9/14 G 29/07 29/07 A 31/20 31/20 A (72 ) Inventor Daisuke Ozaki 1-2-1, Marunouchi, Chiyoda-ku, Tokyo Nihon Kokan Co., Ltd. (72) Inventor Toshiaki Maruyama 1-2-1, Marunouchi, Chiyoda-ku, Tokyo Nihon Kokan Co., Ltd. (72) Invention Person Tadashi Inoue 1-2-1, Marunouchi, Chiyoda-ku, Tokyo Nihon Kokan Co., Ltd.
Claims (2)
合金を、冷間圧延後、鋼板温度５５０〜６９０℃、張力
５〜２０kgf/mm2 の条件で、１回以上の歪み取り焼鈍を
実施し、引き続いて鋼板温度５５０〜６９０℃、張力
０. １〜８kgf/mm2 の条件で歪み取り焼鈍を実施するこ
とを特徴とする板形状および耐熱収縮性に優れたＦｅ-
Ｎｉ系低熱膨張合金薄板の製造方法。1. After cold rolling an Fe-Ni alloy containing 32 to 38 wt% of Ni, at least one strain relief annealing is performed at a steel sheet temperature of 550 to 690 ° C. and a tension of 5 to 20 kgf / mm 2. Fe- excellent in sheet shape and heat shrink resistance characterized by performing strain relief annealing under the conditions of a steel sheet temperature of 550 to 690 ° C and a tension of 0.1 to 8 kgf / mm 2.
A method for producing a Ni-based low thermal expansion alloy sheet.
下含み、かつＮｉ＋Ｃｏを３０〜３８wt% とするＦｅ−
Ｎｉ−Ｃｏ系合金を、冷間圧延後、鋼板温度５５０〜６
９０℃、張力５〜２０kgf/mm2 の条件で、１回以上の歪
み取り焼鈍を実施し、引き続いて鋼板温度５５０〜６９
０℃、張力０. １〜８kgf/mm2 の条件で歪み取り焼鈍を
実施することを特徴とする板形状および耐熱収縮性に優
れたＦｅ- Ｎｉ系低熱膨張合金薄板の製造方法。2. Fe- containing 23 to 38% by weight of Ni, 7% by weight or less of Co, and 30 to 38% by weight of Ni + Co.
After cold rolling the Ni-Co alloy, the steel sheet temperature is 550-6.
Under a condition of 90 ° C. and a tension of 5 to 20 kgf / mm 2 , at least one strain relief annealing is performed, and subsequently, a steel sheet temperature of 550 to 69
0 ° C., the plate shape and excellent in heat shrinkable Fe- Ni-based method for producing a low thermal expansion alloy sheet which comprises carrying out the stress relief annealing under the condition of tension 0. 1~8kgf / mm 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22371996A JPH1060525A (en) | 1996-08-26 | 1996-08-26 | Production of low thermal expansion alloy thin sheet excellent in sheet shape and thermal shrinkage resistance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22371996A JPH1060525A (en) | 1996-08-26 | 1996-08-26 | Production of low thermal expansion alloy thin sheet excellent in sheet shape and thermal shrinkage resistance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1060525A true JPH1060525A (en) | 1998-03-03 |
Family
ID=16802612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22371996A Pending JPH1060525A (en) | 1996-08-26 | 1996-08-26 | Production of low thermal expansion alloy thin sheet excellent in sheet shape and thermal shrinkage resistance |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1060525A (en) |
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1996
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| WO2018235862A1 (en) * | 2017-06-20 | 2018-12-27 | 日立金属株式会社 | Method for producing thin plate for metal masks, and thin plate for metal masks |
| JPWO2018235862A1 (en) * | 2017-06-20 | 2020-04-23 | 日立金属株式会社 | Method for manufacturing thin plate for metal mask and thin plate for metal mask |
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