JP2001066231A - Apparatus and method for forming sample - Google Patents
Apparatus and method for forming sampleInfo
- Publication number
- JP2001066231A JP2001066231A JP24460399A JP24460399A JP2001066231A JP 2001066231 A JP2001066231 A JP 2001066231A JP 24460399 A JP24460399 A JP 24460399A JP 24460399 A JP24460399 A JP 24460399A JP 2001066231 A JP2001066231 A JP 2001066231A
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- Japan
- Prior art keywords
- sample
- drive shaft
- sample stage
- arm
- entry type
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- Analysing Materials By The Use Of Radiation (AREA)
- Sampling And Sample Adjustment (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、イオンビームと移
送手段を利用して、試料片から所望の微小試料を摘出
し、試料ホルダに固定し、分析や観察に好適な形状に加
工する試料作成装置およびそれを用いた試料作成方法に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for preparing a sample in which a desired minute sample is extracted from a sample piece using an ion beam and a transfer means, fixed to a sample holder, and processed into a shape suitable for analysis and observation. The present invention relates to an apparatus and a sample preparation method using the same.
【０００２】[0002]
【従来の技術】半導体デバイスの高集積化に伴い、その
製造もしくは検査工程で扱われる分析や観察の対象物が
ますます微小化されてきており、それらの分析もしくは
観察手段として、走査型電子顕微鏡（以下ＳＥＭ）に代
わって、より観察分解能が高い透過型電子顕微鏡（以下
ＴＥＭ）が有力な手段となってきている。2. Description of the Related Art As semiconductor devices become more highly integrated, the objects to be analyzed and observed in the manufacturing or inspection process are becoming increasingly smaller, and a scanning electron microscope is used as a means of analyzing or observing them. A transmission electron microscope (hereinafter, TEM) having a higher observation resolution has become an effective means instead of (hereinafter, SEM).
【０００３】従来のＴＥＭ用試料の作成方法としては、
研磨やイオンシニングなどを用いた方法がよく知られて
いる。しかし最近では集束イオンビーム（以下ＦＩＢ）
加工を利用する方法が定着しつつある。この方法は、ま
ず観察すべき領域を含むおよそ３×０．１×０．５mm
（０．５mmはウェハの厚さ）の大きさの短冊状ペレット
を、ウェハ等の試料からダイシング装置を用いて切り出
し、この短冊状のペレットの観察領域を、さらに厚さ
０．１μm程度の薄壁状にＦＩＢ加工してＴＥＭ試料と
する。このＴＥＭ試料をＴＥＭ試料ホルダに移載し、さ
らにＴＥＭステージに搭載し、ＴＥＭ装置に導入して薄
壁面に電子線を照射して観察する。[0003] Conventional methods for preparing a TEM sample include:
Methods using polishing or ion thinning are well known. However, recently, focused ion beam (FIB)
Methods using processing are becoming established. This method involves first approx. 3 x 0.1 x 0.5 mm including the area to be observed.
A rectangular pellet having a size of (0.5 mm is the thickness of the wafer) is cut out from a sample such as a wafer using a dicing apparatus, and the observation area of the rectangular pellet is further thinned to a thickness of about 0.1 μm. FIB processing is performed on the wall to form a TEM sample. The TEM sample is transferred to a TEM sample holder, further mounted on a TEM stage, introduced into a TEM device, and irradiated with an electron beam on a thin wall surface for observation.
【０００４】この手法に関しては、例えば、論文集マイ
クロスコピー オブ セミコンダクティング マテリア
ルズ（Microscopy of Semiconducting Material
s），1989,Institute of Physics Series No.100.,
p.501-506において説明されている。[0004] With respect to this method, for example, Microscopy of Semiconducting Material
s), 1989, Institute of Physics Series No. 100.,
This is described in pages 501-506.
【０００５】最近では、ＦＩＢ装置とＴＥＭ装置の両方
で兼用できる試料ステージが用いられている。図１３は
従来例のサイドエントリ型の試料ステージの概略形状で
あり、握り部１３の先に、外筒部９が取り付けられ、そ
の先端にＦＩＢ加工したＴＥＭ試料４８を固定治具４９
で固定している。Recently, a sample stage that can be used for both the FIB apparatus and the TEM apparatus has been used. FIG. 13 is a schematic view of a conventional side entry type sample stage, in which an outer cylindrical portion 9 is attached to the tip of a grip portion 13, and a FIB-processed TEM sample 48 is fixed to a tip of the outer jig 49.
It is fixed with.
【０００６】この試料ステージは図１４に示すように、
ＦＩＢ装置２４内に導入され、試料ステージ微動機構３
７により試料の位置が調整される。ＦＩＢ加工時には試
料の薄壁部に平行にＦＩＢを照射し、ＴＥＭ観察時には
薄壁面に垂直に電子線を照射するため、この試料ステー
ジはＦＩＢ加工時とＴＥＭ観察時とで９０度軸回転させ
て用いる。このような試料ステージにより、ＦＩＢ装置
２４内で加工した試料を直ちにＴＥＭ装置内に持ち込ん
で観察することが可能であるが、ＦＩＢ加工を利用して
も一試料の加工時間は３時間から５時間を要している。[0006] As shown in FIG.
The sample stage fine movement mechanism 3 introduced into the FIB device 24
7 adjusts the position of the sample. In FIB processing, FIB is irradiated parallel to the thin wall of the sample, and in TEM observation, electron beam is irradiated perpendicularly to the thin wall. Therefore, this sample stage is rotated by 90 degrees between FIB processing and TEM observation. Used. With such a sample stage, a sample processed in the FIB device 24 can be immediately brought into the TEM device for observation. However, even if FIB processing is used, the processing time of one sample is 3 hours to 5 hours. Is required.
【０００７】上述のＦＩＢとＴＥＭの兼用ステージにつ
いては特開平６−１０３９４７号公報に記載されてい
る。またイオンビームを用いてウェハ内に作成した特定
の微小試料をプローブにより摘出する方法として、特許
公報第２７７４８８４号がある。[0007] The above-mentioned FIB / TEM stage is described in Japanese Patent Application Laid-Open No. 6-103947. Japanese Patent Publication No. 2774884 discloses a method for extracting a specific minute sample formed in a wafer using an ion beam with a probe.
【０００８】またウェハ内にＴＥＭ観察用の薄膜のみを
集束イオンビームを用いて作成し、この薄膜のみをガラ
ス製のニードルを用いてＴＥＭメッシュ上に搬送しＴＥ
Ｍ試料とする方法が、例えばマテリアル リサーチ ソ
サエティー シンポジウムプロシーディング（Material
Research Society Symposium Proceeding），１９
９７，ｖｏｌ．４８０．，ｐ１９−２７に記載されてい
る。Further, only a thin film for TEM observation is formed in a wafer by using a focused ion beam, and only this thin film is transported on a TEM mesh using a glass needle, and then the TE film is formed.
The method using M sample is, for example, Material Research Society Symposium Proceedings (Material
Research Society Symposium Proceeding), 19
97, vol. 480. , P19-27.
【０００９】[0009]
【発明が解決しようとする課題】従来においては、分析
や観察、計測に好適な試料、特にＴＥＭ試料を作成する
場合、以下のような問題を抱えていた。Conventionally, when preparing a sample suitable for analysis, observation, and measurement, particularly, a TEM sample, there were the following problems.
【００１０】ＴＥＭ試料を作成するには、イオンシニン
グや研磨機もしくはダイシング装置やＦＩＢ装置などの
複数の装置が必要となるほか、試料作成には多大な時間
と神経を尖らして行わなければならない熟練技能的な煩
雑な手作業を必要としていた。また微小試料をプローブ
により摘出する方法および作成したＴＥＭ試料をＴＥＭ
メッシュ上に搬送する方法では、作成されたＴＥＭ試料
がプローブに保持された状態であるため、ＴＥＭ装置へ
の導入が非常に困難である他、落下、紛失等の事故発生
の危険性がある。またＴＥＭ観察後、別の試料と交換す
る際にも同様の危険性を伴う。[0010] In order to prepare a TEM sample, a plurality of devices such as an ion thinning machine, a polishing machine, a dicing device, and an FIB device are required. In addition, the sample preparation must be performed with a great amount of time and nerves. It required skilled and complicated manual labor. In addition, a method for extracting a micro sample with a probe and a
In the method of transporting the TEM sample on the mesh, since the prepared TEM sample is held by the probe, it is very difficult to introduce the TEM sample into the TEM device, and there is a risk of occurrence of an accident such as dropping or loss. In addition, the same danger is involved when replacing with another sample after TEM observation.
【００１１】上記問題点に鑑み、本発明の目的は、試料
作成から分析や観察、計測までの作業が簡便で、試料作
成が一つの装置ででき、作成試料の分析装置への受け渡
しが容易な試料作成装置および方法を提供することにあ
る。さらに、試料作成から分析や観察、計測までの時間
を短縮でき、分析や観察の能率を向上できる試料作成装
置および方法を提供することにある。In view of the above problems, it is an object of the present invention to simplify the operations from sample preparation to analysis, observation, and measurement, to perform sample preparation with one device, and to easily transfer the prepared sample to an analyzer. An object of the present invention is to provide an apparatus and a method for preparing a sample. Another object of the present invention is to provide a sample preparation apparatus and method capable of shortening the time from sample preparation to analysis, observation, and measurement, and improving the efficiency of analysis and observation.
【００１２】[0012]
【課題を解決するための手段】上記本発明の目的は、集
束イオンビームもしくは投射イオンビームのいずれかの
照射光学系と、上記イオンビームの照射によって発生す
る二次粒子を検出する二次粒子検出手段と、上記イオン
ビームの照射領域にデポジション膜を形成する原料ガス
を供給するデポジション用ガス供給源と、試料片の一部
を分離した摘出試料を試料ホルダに移し変える移送手段
と、上記試料片を載置するサイドエントリ型試料ステー
ジと、上記サイドエントリ型試料ステージを搭載して微
動させる試料ステージ微動手段からなる試料作成装置に
おいて、上記サイドエントリ型試料ステージの試料設置
部を試料ステージの軸方向成分を含む方向に移動可動と
する手段と、上記試料設置部を試料ステージの軸方向に
垂直な成分を含む回転軸をもって回転可能とする手段を
もうけることによって達成される。SUMMARY OF THE INVENTION It is an object of the present invention to provide an irradiation optical system for either a focused ion beam or a projected ion beam and a secondary particle detection for detecting a secondary particle generated by the irradiation of the ion beam. Means, a deposition gas supply source for supplying a source gas for forming a deposition film in the irradiation region of the ion beam, transfer means for transferring an extracted sample obtained by separating a part of a sample piece to a sample holder, and In a sample preparation apparatus including a side entry type sample stage on which a sample piece is mounted, and a sample stage fine movement unit for mounting and finely moving the side entry type sample stage, a sample setting portion of the side entry type sample stage is provided as a sample stage. Means for moving and moving in a direction including an axial component, and a component perpendicular to the axial direction of the sample stage in the sample setting section. With a rotating shaft is achieved by providing means for rotatable.
【００１３】特に上記目的は、上記試料設置部をサイド
エントリ型試料ステージから分離可能とし、試料設置部
が試料設置面の垂線を中心とする回転自由度を有し、さ
らにサイドエントリ型試料ステージ軸中心に対して概略
平行に直進移動する直進自由度を有した構成とすること
によって、容易に達成できる。In particular, it is an object of the present invention to make the sample setting section separable from a side entry type sample stage, the sample setting section has a rotational degree of freedom about a perpendicular to the sample setting surface, and further has a side entry type sample stage shaft. This can be easily achieved by adopting a configuration having a degree of freedom of rectilinear movement that moves rectilinearly substantially parallel to the center.
【００１４】本手段を採る試料作成は以下のような手順
を踏んで行う。まず操作者は、前述の自由度を有するサ
イドエントリ型試料ステージに試料片を貼り付ける。試
料片の固定作業は、試料設置部が回転自由度を有してい
ることから、試料片の断面の方向や接着の際の位置ずれ
を気にすることなく行える。さらにサイドエントリ型試
料ステージは直進自由度をも有していることから、一辺
が数mmオーダの試料片をいずれの方向および位置からで
もＦＩＢ加工することが容易である。この結果、従来に
おいては経験と勘に頼っていた試料片の切り出しおよび
試料片の固定作業が、操作者を選ばず誰にでも行えるよ
うになる。従って所望の観察部位を有する試料から、例
えばＴＥＭ観察に適した状態の微小試料への加工を短時
間で確実におこなえるようになる。The preparation of a sample using this means is performed according to the following procedure. First, the operator attaches the sample piece to the side entry type sample stage having the above-mentioned degree of freedom. The work of fixing the sample piece can be performed without worrying about the direction of the cross section of the sample piece or the positional deviation at the time of bonding, since the sample setting portion has a degree of freedom of rotation. Furthermore, since the side entry type sample stage also has a degree of freedom of linear movement, it is easy to perform FIB processing on a sample piece having a side on the order of several mm from any direction and position. As a result, the operation of cutting out the sample piece and fixing the sample piece, which has conventionally depended on experience and intuition, can be performed by anyone, regardless of the operator. Therefore, processing from a sample having a desired observation site to a minute sample suitable for TEM observation, for example, can be reliably performed in a short time.
【００１５】試料片を固定後、試料設置部をサイドエン
トリ型試料ステージに結合し、試料ステージ微動手段に
装填し、真空容器内へ導入する。試料ステージ微動手段
は、真空容器内を大気に暴露することなく、サイドエン
トリ型試料ステージの真空容器からの出し入れが可能で
ある。After fixing the sample piece, the sample setting section is connected to the side entry type sample stage, loaded into the sample stage fine movement means, and introduced into the vacuum vessel. The sample stage fine movement means can move the side entry type sample stage into and out of the vacuum vessel without exposing the inside of the vacuum vessel to the atmosphere.
【００１６】この後、試料片の所望の観察部位を含む領
域を、所望の大きさにＦＩＢ加工して摘出し、移送手段
によって一旦保持後、サイドエントリ型試料ステージを
引き抜き、ＴＥＭホルダを搭載した別のサイドエントリ
型試料ステージを導入する。サイドエントリ型試料ステ
ージの交換後、移送手段に保持されている微小試料片
を、デポジション膜を形成することでＴＥＭホルダに固
着する。上記固着後、真空容器から引き抜き、ＴＥＭ装
置へ装填することでＴＥＭ観察が行える。Thereafter, a region including a desired observation site of the sample piece is FIB-processed to a desired size and extracted, and once held by a transfer means, the side entry type sample stage is pulled out and a TEM holder is mounted. Introduce another side entry type sample stage. After the replacement of the side entry type sample stage, the minute sample piece held by the transfer means is fixed to the TEM holder by forming a deposition film. After the fixing, the TEM can be observed by pulling out from the vacuum vessel and loading the TEM device.
【００１７】このようなＴＥＭ試料の作成に代表される
微小試料片の作成に様々効果をもたらすサイドエントリ
型試料ステージは、以下の構成を採ることで実現でき
る。A side entry type sample stage which produces various effects in the preparation of a small sample typified by the preparation of such a TEM sample can be realized by adopting the following configuration.
【００１８】単一の駆動軸の真空側の端がネジの形状と
し、この駆動軸と回転自在な部材を介して、駆動軸の中
心軸廻りの回転自由度を拘束した腕を結合する。この腕
の所定の位置に試料片を載置する試料設置部が配される
ように、ワイヤ等の回転運動伝達媒体を巻きまわした第
１のプーリを、腕に対して回転自在となるように回転部
材を介して結合させる。このプーリと対をなす位置に、
先の回転運動伝達媒体を巻きまわした第２のプーリを、
同様に腕に対して回転自在となるように回転部材を介し
て結合する。第１のプーリと第２のプーリの間で巻きま
わされた回転伝達媒体の一方と一端を固定した第２の腕
を配する。A single drive shaft has a screw-shaped end on the vacuum side, and an arm that restricts the degree of freedom of rotation about the center axis of the drive shaft is connected to the drive shaft via a rotatable member. A first pulley wound around a rotational motion transmitting medium such as a wire is rotatable with respect to the arm so that a sample setting portion for mounting a sample piece is disposed at a predetermined position of the arm. The connection is made via a rotating member. At the position that makes a pair with this pulley,
The second pulley around which the rotary motion transmission medium is wound,
Similarly, they are connected via a rotating member so as to be rotatable with respect to the arm. A second arm fixed to one end and one end of the rotation transmission medium wound between the first pulley and the second pulley is arranged.
【００１９】第２の腕の他端は駆動軸のネジと嵌合する
ネジの形状としており、駆動軸のネジと噛み合わせる。
第２の腕は腕と同様に駆動軸の中心軸廻りの回転自由度
を拘束する。駆動軸は真空シールを介して回転および直
進自在に、上記腕は直進自在に保持する外筒部で覆う。The other end of the second arm has a shape of a screw that fits with the screw of the drive shaft, and meshes with the screw of the drive shaft.
The second arm restricts the freedom of rotation about the center axis of the drive shaft similarly to the arm. The drive shaft is rotatable and rectilinear through a vacuum seal, and the arm is covered with an outer cylinder that holds the rectilinear motion.
【００２０】以上が回転、直進の２自由度を有するサイ
ドエントリ型試料ステージの極基本的な構成である。こ
のような２自由度を有するサイドエントリ型試料ステー
ジは様々な用途が考えられる。例えば試料設置部を複数
設置することで、複数の試料片を一度にＦＩＢ加工する
ことができるようになる。また別の例では、一方に試料
片を載置する第１ステージとし、他方を例えばＴＥＭホ
ルダを載置する第２ステージで試料設置部を構成するこ
とで一層使い勝手が改善できる。The above is the extremely basic configuration of the side entry type sample stage having two degrees of freedom, rotation and straight traveling. The side entry type sample stage having such two degrees of freedom has various applications. For example, by installing a plurality of sample setting sections, a plurality of sample pieces can be subjected to FIB processing at one time. In another example, the usability can be further improved by configuring the sample setting unit with the first stage on which the sample piece is mounted on one side and the second stage on which the TEM holder is mounted, for example, on the other side.
【００２１】また別の構成としては次のような構造を採
るサイドエントリ型試料ステージがある。腕および駆動
軸および外筒部の構成は上述の構成と同様であり、変更
点のみについて記載することとする。試料設置部の円周
を歯車形状例えばかさ歯車形状とする。駆動軸の真空側
の端の形状を前述のかさ歯車と噛み合う第２のかさ歯車
形状とする。As another configuration, there is a side entry type sample stage having the following structure. The configurations of the arm, the drive shaft, and the outer cylinder are the same as those described above, and only the differences will be described. The circumference of the sample setting portion is formed in a gear shape, for example, a bevel gear shape. The shape of the end on the vacuum side of the drive shaft is a second bevel gear that meshes with the above-described bevel gear.
【００２２】また別の構成としては次のような構造を採
るサイドエントリ型試料ステージがある。腕および駆動
軸および外筒部の構成は上述の構成と同様であり、変更
点のみについて記載することとする。試料設置部の第１
のプーリと第２のプーリ間をベルト等の回転運動伝達媒
体で結合するまでは前述の構成と同じである。第２のプ
ーリの円周を歯車形状例えばかさ歯車形状とする。駆動
軸の真空側の端の形状を前述のかさ歯車と噛み合う第２
のかさ歯車形状とする。As another configuration, there is a side entry type sample stage having the following structure. The configurations of the arm, the drive shaft, and the outer cylinder are the same as those described above, and only the differences will be described. First of sample setting part
The configuration is the same as that described above until the pulley and the second pulley are connected by a rotational motion transmission medium such as a belt. The circumference of the second pulley has a gear shape, for example, a bevel gear shape. The shape of the end on the vacuum side of the drive shaft is the second meshing with the bevel gear.
Bevel gear shape.
【００２３】また別の構成としては、次のような構造を
採るサイドエントリ型試料ステージがある。腕および駆
動軸および外筒部の構成は上述の構成と同様であり、変
更点のみについて記載することとする。試料設置部の駆
動軸側の端面に突出部を設ける。突出部の形状は問わな
い。駆動軸の真空側の端面に、駆動軸の回転中心軸から
偏芯した位置に、自由端が前述した突出部の面と駆動軸
の中心軸と平行な姿勢で接触する回転軸を配する。この
駆動軸の回転中心軸に対して偏芯した回転軸を有する構
成は、試料設置部の回転方向を一部の構造の変更で容易
に対応できる。すなわち試料設置部の回転中心を、駆動
軸の回転中心軸に対して水平にひいた垂線と平行に配し
た構成とした場合、試料設置部は駆動軸の中心軸から見
てピッチングの方向に回転移動させることができる。ま
た駆動軸の中心軸に対して平行に回転中心を配した構成
ではヨーイングの方向に回転移動させることができる。As another configuration, there is a side entry type sample stage having the following structure. The configurations of the arm, the drive shaft, and the outer cylinder are the same as those described above, and only the differences will be described. A protruding part is provided on the end face on the drive shaft side of the sample setting part. The shape of the protruding portion does not matter. A rotary shaft whose free end is in contact with the above-described protruding surface in a posture parallel to the central axis of the drive shaft is disposed at a position eccentric from the rotational center axis of the drive shaft on the vacuum-side end surface of the drive shaft. This configuration having a rotation axis that is eccentric with respect to the rotation center axis of the drive shaft can easily cope with the rotation direction of the sample setting unit by partially changing the structure. In other words, when the rotation center of the sample setting part is arranged parallel to the perpendicular drawn to the rotation center axis of the drive shaft, the sample setting part rotates in the pitching direction when viewed from the center axis of the drive shaft. Can be moved. In a configuration in which the rotation center is arranged in parallel with the center axis of the drive shaft, the drive shaft can be rotated and moved in the yawing direction.
【００２４】以上述べてきたサイドエントリ型試料ステ
ージは、集束イオンビーム、透過型電子顕微鏡、走査型
電子顕微鏡、走査プローブ顕微鏡、オージェ電子分光分
析装置、電子プローブＸ線微少分析装置、電子エネルギ
欠損分析装置、二次イオン質量分析装置、二次中性子イ
オン化質量分析装置、Ｘ線光電子分光分析装置、または
プローブを用いた電気計測装置のうちのいずれかに装填
できる構成とすることで、試料面分析や観察が容易かつ
速やかにできるようになる。The above-described side entry type sample stage includes a focused ion beam, a transmission electron microscope, a scanning electron microscope, a scanning probe microscope, an Auger electron spectrometer, an electron probe X-ray micro analyzer, an electron energy defect analysis. A sample surface analysis and / or a secondary ion mass spectrometer, a secondary neutron ionization mass spectrometer, an X-ray photoelectron spectroscopy analyzer, or a probe-based electrical measurement device Observation becomes easy and quick.
【００２５】[0025]
【発明の実施の形態】（実施例１）図１（ａ）は本発明
の一実施例の試料作成装置におけるサイドエントリ型試
料ステージの縦断面図であり、同図（ｂ）は上面図であ
る。また図２は第１の実施例のサイドエントリ型試料ス
テージを構成する基本部品を階層毎に示した鳥瞰図でで
ある。なお、以下本明細書に示す符号において、同一の
符号を用いた部材は同等の機能を有する部材であること
を示す。(Embodiment 1) FIG. 1A is a longitudinal sectional view of a side entry type sample stage in a sample preparation apparatus according to one embodiment of the present invention, and FIG. 1B is a top view. is there. FIG. 2 is a bird's-eye view showing the basic components constituting the side entry type sample stage of the first embodiment for each layer. In the following, in the reference numerals shown in the present specification, members using the same reference numerals indicate members having equivalent functions.
【００２６】第１の実施例の構成を図２を用いて説明す
る。なお、図２は構成を説明するのが主目的であって、
各々の部品の縮尺比は正確ではない。The structure of the first embodiment will be described with reference to FIG. FIG. 2 is mainly for explaining the configuration.
The scale ratio of each part is not accurate.
【００２７】試料片（図示せず）を設置する試料設置部
１は第１のプーリ２に容易に分離できるように保持す
る。本実施例では試料設置部１はプーリ２とねじ結合す
る構造である。第１のプーリ２は直進移動する第１の腕
４に、回転自在な部材（本実施例では自己潤滑性のある
軸受け３ａ）を介して保持する。第１のプーリ２および
第２のプーリ５の外周には回転運動伝達媒体（本実施例
ではワイヤ６）を巻きまわす。上記第２のプーリ５も、
直進移動する第１の腕４に回転自在な部材（本実施例で
は自己潤滑性のある軸受け３ｂ）を介して回転自在に保
持する。A sample setting section 1 for setting a sample piece (not shown) is held on a first pulley 2 so as to be easily separated. In this embodiment, the sample setting unit 1 has a structure in which the sample setting unit 1 is screwed to the pulley 2. The first pulley 2 is held by a first arm 4 that moves linearly via a rotatable member (in this embodiment, a bearing 3a having self-lubricating properties). A rotational motion transmitting medium (a wire 6 in this embodiment) is wound around the outer periphery of the first pulley 2 and the second pulley 5. The second pulley 5 also
The first arm 4 that moves linearly is rotatably held via a rotatable member (in this embodiment, a self-lubricating bearing 3b).
【００２８】ワイヤ６の一部を、端部がねじ（７ａ）加
工された第２の腕７と結合させる。駆動軸８には上記第
２の腕７の端部に設けたねじ部７ａと嵌合するねじ部８
ａが加工してあり、駆動軸８と第２の腕７を上記のねじ
部７ａおよび８ａで接続する。A part of the wire 6 is connected to the second arm 7 whose end is threaded (7a). The drive shaft 8 has a screw portion 8 fitted to a screw portion 7a provided at an end of the second arm 7.
a is processed, and the drive shaft 8 and the second arm 7 are connected by the above-mentioned screw portions 7a and 8a.
【００２９】この時、第１の腕４と駆動軸８は回転自在
な部材（図示せず）を介して押圧させている。これら第
１、第２の腕４および７は回転方向の自由度を規制させ
て外筒９内に挿入し、駆動軸８は回転および直進自在な
軸受け１４および真空シール（図示せず）を介在させて
外筒９内に挿入する。At this time, the first arm 4 and the drive shaft 8 are pressed via a rotatable member (not shown). The first and second arms 4 and 7 are inserted into the outer cylinder 9 while restricting the degree of freedom in the rotational direction, and the drive shaft 8 is provided with a bearing 14 and a vacuum seal (not shown) that can rotate and move straight. Then, it is inserted into the outer cylinder 9.
【００３０】駆動軸８の端部は外筒９から突出する。突
出した駆動軸８には歯車１０ａを固定し、駆動軸８の端
面には直進移動のアクチュエータである微少送り機構１
１を押圧させている。歯車１０ａと噛み合う別の歯車１
０ｂを、駆動軸８と平行に配し、歯車１０ｂ）に回転移
動用のつまみ１２を固定する。図示していないが、これ
ら歯車１０ａ、１０ｂは回転自在な部材を介して保持さ
れていることは言うまでもない。The end of the drive shaft 8 projects from the outer cylinder 9. A gear 10 a is fixed to the protruding drive shaft 8, and a fine feed mechanism 1 which is a linearly moving actuator is provided on an end face of the drive shaft 8.
1 is pressed. Another gear 1 meshing with the gear 10a
0b is arranged in parallel with the drive shaft 8, and the knob 12 for rotational movement is fixed to the gear 10b). Although not shown, it goes without saying that the gears 10a and 10b are held via rotatable members.
【００３１】以上が回転、直進の２自由度を有するサイ
ドエントリ型試料ステージの基本的な構成である。以下
図１を用いて動作を説明する。The above is the basic configuration of the side entry type sample stage having two degrees of freedom, rotation and straight traveling. The operation will be described below with reference to FIG.
【００３２】微少送り機構１１を用いて駆動軸８を直進
移動させる。駆動軸８の直進移動は第１および第２の腕
４および７に伝達されることで、第１の腕４に設置した
試料設置部１は回転することなく直進移動する。The drive shaft 8 is moved linearly using the fine feed mechanism 11. The linear movement of the drive shaft 8 is transmitted to the first and second arms 4 and 7, so that the sample setting unit 1 installed on the first arm 4 moves straight without rotating.
【００３３】試料設置部１の回転移動は、つまみ１２を
回し歯車１０ａ、１０ｂを介して駆動軸８を回転運動さ
せることでなされる。駆動軸８の回転運動を駆動軸８の
ねじ８ａと噛み合ったネジ７ａによって回転方向を規制
された第２の腕７の直進運動に変換する。第２の腕７の
直進運動は、第２の腕７の一端がワイヤ６と結合してい
ることから、プーリ２に巻きまわしたワイヤ６を引っ張
る作用をする。引っ張られたワイヤ６は、摩擦によって
プーリ２を回転運動させることによって、試料設置部１
を試料ステージの軸方向に垂直な成分を含む回転軸をも
って回転可能とする。The rotation of the sample setting unit 1 is performed by turning the knob 12 and rotating the drive shaft 8 via the gears 10a and 10b. The rotational motion of the drive shaft 8 is converted into a linear motion of the second arm 7 whose rotation direction is regulated by the screw 7a meshed with the screw 8a of the drive shaft 8. The linear movement of the second arm 7 acts to pull the wire 6 wound around the pulley 2 because one end of the second arm 7 is connected to the wire 6. The pulled wire 6 rotates the pulley 2 by friction, so that the sample setting unit 1
Can be rotated with a rotation axis including a component perpendicular to the axial direction of the sample stage.
【００３４】以上述べてきたように単一の駆動軸８の直
進および回転運動の簡易な操作によって試料設置部１は
直進移動および回転移動することができる。As described above, the sample setting section 1 can move linearly and rotationally by a simple operation of linearly moving and rotating the single drive shaft 8.
【００３５】（実施例２）図３は別の実施例のサイドエ
ントリ型試料ステージを示している。同図（ａ）は縦断
面図であり、（ｂ）は上面図である。本実施例におい
て、駆動部２０は実施例１と同じであることから、本図
では駆動部２０を省略して示している。また腕４および
駆動軸８および外筒９部の構成は実施例１と同様であ
り、変更点のみについて記載する。(Embodiment 2) FIG. 3 shows a side entry type sample stage of another embodiment. FIG. 1A is a longitudinal sectional view, and FIG. 1B is a top view. In this embodiment, since the driving unit 20 is the same as that of the first embodiment, the driving unit 20 is not shown in FIG. The constructions of the arm 4, the drive shaft 8, and the outer cylinder 9 are the same as those in the first embodiment, and only the differences will be described.
【００３６】試料設置部１の円周を歯車形状（例えばか
さ歯車２５ｂ）形状とする。駆動軸８の真空側の端の形
状を前述のかさ歯車２５ｂと噛み合う第２のかさ歯車２
５ａ形状とする。これにより駆動軸８を回転すること
で、互いに噛み合ったかさ歯車２５ａ、２５ｂで駆動軸
８の回転の運動方向が変化され、試料設置部１は回転移
動する。直進移動は実施例１の方法で行える。The circumference of the sample setting section 1 is formed in a gear shape (for example, bevel gear 25b). The shape of the end on the vacuum side of the drive shaft 8 is changed to the second bevel gear 2 that meshes with the bevel gear 25b.
5a shape. By rotating the drive shaft 8, the direction of rotation of the drive shaft 8 is changed by the bevel gears 25a and 25b meshing with each other, and the sample setting unit 1 is rotated. The straight movement can be performed by the method of the first embodiment.
【００３７】（実施例３）図４は別の実施例のサイドエ
ントリ型試料ステージを示している。同図（ａ）は縦断
面図であり、同図（ｂ）は上面図である。駆動部は実施
例１と同じであることから、本図でも駆動部を省略して
示している。腕４および駆動軸８および外筒９部の構
成、およびも試料設置部１の第１のプーリ２と第２のプ
ーリ５との間をベルト等の回転運動伝達媒体で結合する
までは実施例１と同様であり、以下では変更点のみにつ
いて記載する。(Embodiment 3) FIG. 4 shows a side entry type sample stage of another embodiment. FIG. 1A is a longitudinal sectional view, and FIG. 1B is a top view. Since the driving unit is the same as that of the first embodiment, the driving unit is not shown in FIG. Example of the structure of the arm 4, the drive shaft 8 and the outer cylinder 9, and also the connection between the first pulley 2 and the second pulley 5 of the sample setting unit 1 by a rotational motion transmission medium such as a belt. 1, and only the changes will be described below.
【００３８】本実施例では第２のプーリ５の円周を歯車
形状例えばかさ歯車２６ａとする。また、駆動軸８の真
空側の端の形状を上記第２のプーリに形成したかさ歯車
２６ａと噛み合う第２のかさ歯車２６ｂ形状とする。こ
れにより駆動軸８を回転することで、互いに噛み合った
かさ歯車２６ａおよび２６ｂで駆動軸８の回転の運動方
向が変化され、第２のプーリ５が回転し、摩擦によって
ワイヤ６を介して試料設置部１が回転移動する。直進移
動は前述の実施例１と同様の方法で行える。In this embodiment, the circumference of the second pulley 5 has a gear shape, for example, a bevel gear 26a. In addition, the shape of the end of the drive shaft 8 on the vacuum side is a second bevel gear 26b that meshes with the bevel gear 26a formed on the second pulley. By rotating the drive shaft 8, the direction of rotation of the drive shaft 8 is changed by the bevel gears 26a and 26b meshing with each other, the second pulley 5 rotates, and the sample is set via the wire 6 by friction. The unit 1 rotates. The straight movement can be performed in the same manner as in the first embodiment.
【００３９】（実施例４）上記実施例１ないし３のよう
な、２自由度を有するサイドエントリ型試料ステージは
様々な用途が考えられる。図５に示すサイドエントリ型
試料ステージのように、試料設置部１を複数（本実施例
では２個）設置することで、複数の試料片を一度にＦＩ
Ｂ加工することができるようになり、サイドエントリ型
ステージの抜き差しおよびそれに伴う真空の排気、リー
クおよび試料片１５の交換などの時間が一度ですむこと
から大幅な所要時間の短縮が実現できる。(Embodiment 4) The side entry type sample stage having two degrees of freedom as in the above embodiments 1 to 3 can be used in various applications. As shown in the side entry type sample stage shown in FIG. 5, a plurality of (two in this embodiment) sample setting sections 1 are set, so that a plurality of sample pieces can be
B processing can be performed, and the time required for removing and inserting the side entry type stage and evacuation and leaking of the side entry and replacement of the sample piece 15 can be reduced once, so that the required time can be greatly reduced.
【００４０】（実施例５）図６（ａ）に示す縦断面図の
ように、一方は試料片を載置する第１ステージ１ａと
し、他方を例えばＴＥＭホルダ２１を載置する第２ステ
ージ１ｂとした試料設置部１とすることで、なお一層の
使い勝手の改善が実現できる。ここで、同図（ｂ）は上
面図である。(Embodiment 5) As shown in the vertical sectional view of FIG. 6A, one is a first stage 1a on which a sample piece is mounted, and the other is a second stage 1b on which a TEM holder 21 is mounted. By using the sample installation unit 1 described above, further improvement in usability can be realized. Here, FIG. 2B is a top view.
【００４１】また図６は試料設置部１を微少送り機構１
１を駆動して外筒９内まで退避させた状態を示してい
る。本サイドエントリ型試料ステージは、外筒９の観察
位置の形状をＦＩＢ加工およびＴＥＭ観察が可能な形状
とし、またプーリ２を試料片用の第１ステージ１ａの直
下に配し、片持ち梁状の試料設置部１の他端にＴＥＭホ
ルダ２１を積載する第２ステージ１ｂを配した構成とし
ている。ここでプーリ２は第１ステージ１ａ直下の位置
に制限されるものではなく、任意の位置でも問題無いこ
とは当然である。FIG. 6 shows that the sample setting unit 1 is moved to the fine feed mechanism 1.
1 shows a state where the actuator 1 is driven and retracted into the outer cylinder 9. In this side entry type sample stage, the shape of the observation position of the outer cylinder 9 is set to a shape that allows FIB processing and TEM observation, and the pulley 2 is arranged directly below the first stage 1a for the sample piece to form a cantilever beam. The second stage 1b on which the TEM holder 21 is mounted is arranged at the other end of the sample setting section 1. Here, the pulley 2 is not limited to a position directly below the first stage 1a, and it is natural that there is no problem at an arbitrary position.
【００４２】ＦＩＢ加工時には、微少送り機構１１を駆
動し、試料片を固定した第１ステージ１ａを観察位置ま
で直進移動させる。この際プーリ２が腕４と共に薄く構
成した外筒９部からはみ出すが、微小試料片（図示せ
ず）摘出の際のＦＩＢ加工には何ら不都合は生じない。At the time of FIB processing, the fine feed mechanism 11 is driven, and the first stage 1a on which the sample is fixed is moved straight to the observation position. At this time, the pulley 2 protrudes from the thin outer tube 9 together with the arm 4, but there is no inconvenience in the FIB processing at the time of extracting a small sample piece (not shown).
【００４３】ＦＩＢ加工終了後、微小試料片２２を移送
手段（図示せず）に保持させている間、駆動軸８を大気
側に所定の量だけ直進移動、すなわち試料設置部１を退
避させる。所定の位置まで移動後、駆動軸８をプーリ２
が１８０度回転するまで回転させ、ＴＥＭホルダ２１を
積載した第２ステージ１ｂを観察位置まで回転移動させ
る。After the end of the FIB processing, while the micro sample piece 22 is being held by the transfer means (not shown), the drive shaft 8 is moved straight by a predetermined amount toward the atmosphere, that is, the sample setting section 1 is retracted. After moving to the predetermined position, the drive shaft 8 is connected to the pulley 2
Is rotated by 180 degrees, and the second stage 1b on which the TEM holder 21 is mounted is rotated to the observation position.
【００４４】外筒９部の側面には、ＴＥＭホルダ２１の
回転軌道に干渉しない程度に開口部２３を設けているの
で回転移動が可能である。所定の位置まで回転移動した
ら、必要に応じて直進移動させＴＥＭホルダ２１の所望
の位置に、移送手段１８によって微小試料を移載する。
またＴＥＭ観察の際は、ＴＥＭホルダ２１を積載した第
２ステージ１ｂを直進移動させ、外筒９部に押圧させる
ことで、より安定した観察が行える。Since the opening 23 is provided on the side surface of the outer cylinder 9 so as not to interfere with the rotation orbit of the TEM holder 21, it can be rotated. After rotating to a predetermined position, the micro-sample is transferred by the transfer means 18 to a desired position of the TEM holder 21 by moving straight ahead as required.
Further, at the time of TEM observation, more stable observation can be performed by moving the second stage 1b on which the TEM holder 21 is loaded in a straight line and pressing the outer stage 9 against the second stage 1b.
【００４５】以上述べてきたように試料片用の第１ステ
ージ１ａとＴＥＭホルダ２１用の第２ステージ１ｂを設
けた本実施例を採ることによって、サイドエントリ型試
料ステージの抜き差し作業が不要となり確実に試料片１
５からの微小試料片２２の摘出およびＴＥＭホルダ２１
への移送、固着が行える。また外筒９部の形状をＦＩＢ
装置とＴＥＭ装置とで共用できる形状とすることで、Ｔ
ＥＭホルダ２１に移載した微小試料片２２をそのまま例
えばＴＥＭ試料にＦＩＢ加工を施すこともでき、より試
料作成の簡易化および作成時間の短縮化が実現できる。As described above, by adopting the present embodiment in which the first stage 1a for the sample piece and the second stage 1b for the TEM holder 21 are employed, the work of removing and inserting the side entry type sample stage becomes unnecessary, thus ensuring the reliability. Sample piece 1
Of Micro Sample Piece 22 from TEM Holder 5 and TEM Holder 21
Transfer and fixation. The shape of the outer cylinder 9 is FIB
By using a shape that can be shared by the device and the TEM device,
The micro sample piece 22 transferred to the EM holder 21 can be directly subjected to FIB processing, for example, on a TEM sample, so that the sample preparation can be further simplified and the preparation time can be shortened.
【００４６】さらにこのサイドエントリ型試料ステージ
をそのままＴＥＭ装置１９に装填することで、操作者が
直に作業するのは試料片の接着作業のみとなり、真空容
器１７内にサイドエントリ型試料ステージを導入した後
は、微小試料片２２の摘出およびＴＥＭホルダ２１への
移載、さらにＦＩＢ加工、ＴＥＭ試料の作成まで一貫し
て同一の装置内で行え、操作者はこのサイドエントリ型
試料ステージの抜き差し作業だけでＴＥＭ観察までを行
える。本実施例によれば、従来ＴＥＭ観察まで数日の時
間と熟練した操作者を要していた工程は、操作者を選ば
ず大幅な時間短縮および安全で確実に行えるようにな
る。Further, by directly loading the side entry type sample stage into the TEM device 19, the operator directly works only on the work of bonding the sample pieces, and introduces the side entry type sample stage into the vacuum vessel 17. After that, the micro sample piece 22 is extracted and transferred to the TEM holder 21, and the FIB processing and the TEM sample creation can be performed consistently in the same apparatus. The operator can insert and remove this side entry type sample stage. It is possible to perform TEM observation only by itself. According to the present embodiment, the process that conventionally required several days and a skilled operator until the TEM observation can be performed without any operator, greatly shortening the time, and safely and reliably.
【００４７】（実施例６）図７は別の実施例のサイドエ
ントリ型試料ステージを示している。同図（ａ）は縦断
面図であり、（ｂ）は上面図である。本実施例において
も、駆動部は第１の実施例と同じであることから、本図
では駆動部を省略して示している。腕４および駆動軸８
および外筒９部の構成はこれまでの実施例の構成と同様
であり、変更点のみについて記載する。(Embodiment 6) FIG. 7 shows a side entry type sample stage of another embodiment. FIG. 1A is a longitudinal sectional view, and FIG. 1B is a top view. Also in this embodiment, the driving unit is the same as that of the first embodiment, and therefore, the driving unit is omitted in this figure. Arm 4 and drive shaft 8
The configuration of the outer cylinder 9 is the same as that of the previous embodiments, and only the differences will be described.
【００４８】本実施例では、試料設置部１の駆動軸８側
の端面に突出部２７を設ける。突出部２７の形状は問わ
ない。また、駆動軸８の真空側の端面に、駆動軸８の回
転中心軸から偏芯した位置に、自由端が前述した突出部
２７の面と駆動軸８の中心軸と平行な姿勢で接触する回
転軸２８を配する。In this embodiment, a protruding portion 27 is provided on the end face of the sample setting section 1 on the drive shaft 8 side. The shape of the protrusion 27 does not matter. Further, the free end contacts the vacuum-side end surface of the drive shaft 8 at a position eccentric from the rotation center axis of the drive shaft 8 in a posture parallel to the above-described surface of the protruding portion 27 and the center axis of the drive shaft 8. A rotation shaft 28 is provided.
【００４９】試料設置部１の回転移動は、駆動軸８を回
転することで回転軸２８が偏芯回転し、回転軸２８の自
由端が接触した突出部２７が回転軸２８の偏芯量と回転
量に応じて回転移動する。すなわち試料設置部１が回転
移動する。The rotation of the sample setting section 1 is as follows. By rotating the drive shaft 8, the rotation shaft 28 is eccentrically rotated. Rotate and move according to the amount of rotation. That is, the sample setting unit 1 rotates.
【００５０】本実施例で示すサイドエントリ型試料ステ
ージは、試料設置部１の回転移動量に制約があるが、試
料設置部１の回転方向を一部の構造の変更で容易に対応
できる点がこれまでの実施例には無い特徴がある。The side entry type sample stage shown in this embodiment is limited in the amount of rotational movement of the sample setting unit 1, but the rotation direction of the sample setting unit 1 can be easily coped with by partially changing the structure. There are features not found in the previous embodiments.
【００５１】（実施例７）図８は試料設置部１の回転方
向を９０度変えた実施例のサイドエントリ型試料ステー
ジを示している。同図（ａ）は縦断面図であり、同図
（ｂ）は上面図である。(Embodiment 7) FIG. 8 shows a side entry type sample stage in which the rotation direction of the sample setting section 1 is changed by 90 degrees. FIG. 1A is a longitudinal sectional view, and FIG. 1B is a top view.
【００５２】本実施例のように、試料設置部１の回転中
心２９を、駆動軸８の回転中心軸に対して水平にひいた
垂線と平行に配した構成とした場合、試料設置部１は駆
動軸８の中心軸から見てピッチングの方向に回転移動さ
せることができる。また図では示していないが駆動軸８
の中心軸に対して平行に回転中心を配した構成ではヨー
イングの方向に回転移動させることができる。As in the present embodiment, when the rotation center 29 of the sample setting unit 1 is arranged parallel to a perpendicular drawn horizontally to the rotation center axis of the drive shaft 8, the sample setting unit 1 When viewed from the center axis of the drive shaft 8, the drive shaft 8 can be rotated and moved in a pitching direction. Although not shown in the drawing, the drive shaft 8
In the configuration in which the center of rotation is arranged in parallel to the central axis of, it is possible to rotate and move in the yawing direction.
【００５３】なお、以上説明してきた実施例では駆動部
２０の自動化を念頭においた構成であるため、図１に示
したように回転運動を歯車１０ａ、１０ｂを介して微少
送り機構１１と並行に配したつまみ１２を用いて行って
いる。自動化には、微少送り機構１１およびつまみ１２
を各々モータ等の駆動源（図示せず）に換装することで
何ら寸法的に変更することなく自動化が実現できる。In the embodiment described above, since the configuration is based on the automation of the drive unit 20, the rotational movement is performed in parallel with the fine feed mechanism 11 via the gears 10a and 10b as shown in FIG. This is performed using the knob 12 arranged. For automation, a fine feed mechanism 11 and a knob 12
Are replaced with drive sources (not shown) such as motors, thereby realizing automation without any dimensional change.
【００５４】（実施例８）完全な手動駆動で構わない場
合は、握り部１３を細くした方が取り扱い易いことは言
うまでもない。その際、図９に示す構成でも本発明の目
的は達成される。図９は第１の実施例の駆動部のみを変
更したサイドエントリ型試料ステージの縦断面図を示し
ている。(Embodiment 8) It is needless to say that the handle 13 can be easily handled by making the grip portion 13 thinner when completely manual driving is sufficient. At this time, the object of the present invention is achieved even with the configuration shown in FIG. FIG. 9 is a longitudinal sectional view of a side entry type sample stage in which only the driving section of the first embodiment is changed.
【００５５】本実施例では、駆動部２０の直径を細くす
るために、回転駆動用のつまみ１２と微少送り機構１１
を直列に配している点がこれまでの実施例と異なってい
る。回転つまみ１２は駆動軸８と直進のみの自由度があ
るように回転自由度を規制した直進軸受け３１を介して
結合している。さらに回転つまみ１２は外筒９部と回転
自在な軸受け１４を介して押圧している。回転つまみ１
２の端部に微少送り機構１１が結合しており、微少送り
機構１１の直進移動部は駆動軸８の端部と押圧してい
る。In this embodiment, in order to reduce the diameter of the drive section 20, a rotary drive knob 12 and a fine feed mechanism 11 are provided.
Are different from the previous embodiments in that they are arranged in series. The rotary knob 12 is coupled to the drive shaft 8 via a linear bearing 31 whose rotational degree of freedom is regulated so that there is only a degree of freedom of linear movement. Further, the rotary knob 12 presses the outer cylinder 9 via a rotatable bearing 14. Rotary knob 1
The fine feed mechanism 11 is connected to the end of the drive shaft 8, and the linearly moving portion of the fine feed mechanism 11 presses the end of the drive shaft 8.
【００５６】駆動軸８の直進移動はこれまでの実施例と
同様に微少送り機構１１を駆動することで、回転つまみ
１２が回転することなく駆動軸８のみが直進移動するこ
とで行われる。駆動軸８の回転運動は回転つまみ１２を
回転することで、微少送り機構１１毎駆動軸８を回転移
動させることで伝達される。本実施例の構成を採ること
で握り部１３の直径を３０mm程度にすることができ、装
置の取り回しが容易になる。The linear movement of the drive shaft 8 is performed by driving the fine feed mechanism 11 as in the previous embodiments, so that only the drive shaft 8 moves straight without rotating the rotary knob 12. The rotational motion of the drive shaft 8 is transmitted by rotating the rotary knob 12 and rotating the drive shaft 8 for each fine feed mechanism 11. By adopting the configuration of the present embodiment, the diameter of the grip 13 can be reduced to about 30 mm, and the handling of the device becomes easy.
【００５７】以上では第１の実施例の駆動部２０を変更
した例を説明したが、本実施例の構成は実施例２ないし
６のいずれの実施例においても適用可能である。なお、
これまで説明してきた様々なサイドエントリ型試料ステ
ージにおいて、握り部１３に回転つまみ１２の回転方向
と、試料設置部１の回転方向の関係がわかるようにマー
クを入れておくことで、なお一層の使い易さが達成でき
る。In the above, an example in which the driving unit 20 of the first embodiment is changed has been described. However, the configuration of the present embodiment is applicable to any of the second to sixth embodiments. In addition,
In the various side entry type sample stages described so far, the grip portion 13 is further marked by making a mark so that the relationship between the rotation direction of the rotary knob 12 and the rotation direction of the sample setting portion 1 can be understood. Ease of use can be achieved.
【００５８】（実施例９）図１０は本発明の一実施例の
試料作成装置の鳥瞰図である。前記実施例で述べてきた
サイドエントリ型試料ステージは、図１０に示す試料作
成装置で使用する。(Embodiment 9) FIG. 10 is a bird's-eye view of a sample preparation apparatus according to an embodiment of the present invention. The side entry type sample stage described in the above embodiment is used in the sample preparation apparatus shown in FIG.
【００５９】この装置３８は、集束イオンビームもしく
は投射イオンビームのいずれかのイオンビーム３３の照
射光学系３２と、上記イオンビーム３３の照射によって
発生する二次粒子を検出する二次粒子検出器３４と、上
記イオンビーム３３の照射領域にデポジション膜を形成
する原料ガスを供給するデポジション用ガス供給源３５
と、試料片１５の一部を摘出した微小試料片２２を試料
ホルダ３６に移し変える移送手段１８と、サイドエント
リ型試料ステージを搭載して微動させる試料ステージ微
動手段３７から構成される。The device 38 comprises an irradiation optical system 32 for irradiating an ion beam 33 of either a focused ion beam or a projected ion beam, and a secondary particle detector 34 for detecting secondary particles generated by the irradiation of the ion beam 33. And a deposition gas supply source 35 for supplying a source gas for forming a deposition film in the irradiation region of the ion beam 33.
And a transfer means 18 for transferring a small sample piece 22 from which a part of the sample piece 15 has been extracted to a sample holder 36, and a sample stage fine movement means 37 for mounting and finely moving a side entry type sample stage.
【００６０】試料作成装置３８にはさらに、イオンビー
ム３３の照射光学系３２を制御するイオンビーム制御部
３９、二次粒子検出器３４への印加電圧の調整などを行
う二次粒子検出器制御部４０、デポジション用ガス供給
源３５の温度調整やバルブの開閉などを制御するデポジ
ションガス用ガス供給源制御手段４１、試料ステージ微
動手段３７を制御するためのステージ制御部４２、移送
手段１８を駆動するための移送手段制御部４３、試料片
１５や移送手段１８などを画像表示する画像表示部４４
などを有し、これらの制御部は計算処理部４５によって
コントロールされる。The sample preparation device 38 further includes an ion beam control unit 39 for controlling the irradiation optical system 32 of the ion beam 33 and a secondary particle detector control unit for adjusting the voltage applied to the secondary particle detector 34. 40, a deposition gas supply source control unit 41 for controlling the temperature adjustment of the deposition gas supply source 35 and opening / closing of the valve, a stage control unit 42 for controlling the sample stage fine movement unit 37, and the transfer unit 18. A transfer unit control unit 43 for driving, an image display unit 44 for displaying an image of the sample piece 15, the transfer unit 18, and the like.
These control units are controlled by the calculation processing unit 45.
【００６１】本発明のサイドエントリ型試料ステージを
採る試料作成は以下の手順を踏んで行う。まず操作者
は、前述の自由度を有するサイドエントリ型試料ステー
ジの試料設置部１に試料片１５を貼り付ける。この際、
試料設置部１をサイドエントリ型試料ステージから分離
して行ってもよいように、試料設置面には基準線（図示
せず）を彫っており、試料片１５固定の際の方向の目安
となる。また複数の試料設置部１に予め複数の試料片１
５を固定しておくことで、作業効率を上げることもで
き、結果として作業時間の短縮化が実現できる。A sample using the side entry type sample stage of the present invention is prepared according to the following procedure. First, the operator attaches the sample piece 15 to the sample setting section 1 of the side entry type sample stage having the above-described flexibility. On this occasion,
A reference line (not shown) is engraved on the sample setting surface so that the sample setting unit 1 may be separated from the side entry type sample stage, and serves as a guide in the direction when the sample piece 15 is fixed. . In addition, a plurality of sample pieces 1
By fixing 5, work efficiency can be increased, and as a result, work time can be shortened.
【００６２】試料片１５の固定作業は、試料設置部１は
回転自由度を有していることから、試料片１５の断面の
方向や接着の際の位置ずれを気にすることなく行える。
さらに直進自由度をも有していることから、一辺が数mm
オーダの試料片１５のいずれの方向および位置でもＦＩ
Ｂ加工することが容易に可能である。The work of fixing the sample piece 15 can be performed without concern for the direction of the cross section of the sample piece 15 and the positional deviation at the time of bonding since the sample setting section 1 has a degree of freedom of rotation.
Furthermore, it has several degrees of freedom because it has a straightness of freedom.
In any direction and position of the specimen 15 of the order, the FI
B processing is easily possible.
【００６３】この結果、従来経験と勘に頼っていた試料
片１５の切り出しおよび試料片１５の固定作業が、操作
者を選ばず誰にでも行えるようになる。これにより、短
時間で確実に所望の観察部位の例えばＴＥＭ試料の作成
がおこなえるようになる。As a result, the work of cutting out the sample piece 15 and fixing the sample piece 15, which has conventionally depended on experience and intuition, can be performed by any person regardless of the operator. This makes it possible to reliably create a desired observation site, for example, a TEM sample in a short time.
【００６４】試料片１５の固定後、試料設置部１をサイ
ドエントリ型試料ステージに結合し、試料ステージ微動
手段に装填し、真空容器１７内へ導入する。After fixing the sample piece 15, the sample setting section 1 is connected to the side entry type sample stage, loaded into the sample stage fine movement means, and introduced into the vacuum vessel 17.
【００６５】試料ステージ微動手段は、真空容器１７内
を大気に暴露することなく、サイドエントリ型試料ステ
ージの真空容器１７からの出し入れが可能である。The sample stage fine movement means can move the side entry type sample stage into and out of the vacuum vessel 17 without exposing the inside of the vacuum vessel 17 to the atmosphere.
【００６６】この後、試料片１５の所望の観察部位を含
む領域を、所望の大きさにＦＩＢ加工して摘出し、移送
手段１８によって一旦保持後、サイドエントリ型試料ス
テージを引き抜き、ＴＥＭホルダ２１を搭載した別のサ
イドエントリ型試料ステージを導入する。サイドエント
リ型試料ステージの交換後、移送手段１８に保持されて
いる微小試料片１５をＴＥＭホルダ２１にデポジション
膜を形成することで固着する。Thereafter, a region including a desired observation site of the sample piece 15 is extracted by FIB processing to a desired size, extracted and temporarily held by the transfer means 18, then the side entry type sample stage is pulled out, and the TEM holder 21 is pulled out. Introduce another side entry type sample stage equipped with. After the replacement of the side entry type sample stage, the minute sample piece 15 held by the transfer means 18 is fixed to the TEM holder 21 by forming a deposition film.
【００６７】微小試料片の固着後、サイドエントリ型試
料ステージを真空容器１７から引き抜き、ＴＥＭ装置１
９（図示せず）へ装填することでＴＥＭ観察が行える。
このとき、図６の実施例のサイドエントリ型試料ステー
ジを用いれば、このサイドエントリ型試料ステージの交
換操作は不要となり、試料設置部１を回転させるだけの
操作でよい。After the micro sample piece is fixed, the side entry type sample stage is pulled out of the vacuum vessel 17 and the TEM device 1
9 (not shown) enables TEM observation.
At this time, if the side entry type sample stage of the embodiment in FIG. 6 is used, the replacement operation of the side entry type sample stage becomes unnecessary, and only the operation of rotating the sample setting unit 1 is sufficient.
【００６８】また以上説明してきた実施例では、説明上
ＴＥＭ試料の作成、観察を一例として説明してきたが、
ＴＥＭに限定される物ではなく、集束イオンビーム、透
過型電子顕微鏡、走査型電子顕微鏡、走査プローブ顕微
鏡、オージェ電子分光分析装置、電子プローブＸ線微少
分析装置、電子エネルギ欠損分析装置、二次イオン質量
分析装置、二次中性子イオン化質量分析装置、Ｘ線光電
子分光分析装置、またはプローブを用いた電気計測装置
のうちのいずれかに装填できる構成とすることで、試料
面分析や観察が容易にできるようになることは当然であ
る。In the embodiments described above, the preparation and observation of a TEM sample have been described as an example for the purpose of explanation.
Not limited to TEM, focused ion beam, transmission electron microscope, scanning electron microscope, scanning probe microscope, Auger electron spectrometer, electron probe X-ray micro analyzer, electron energy defect analyzer, secondary ion Sample surface analysis and observation can be facilitated by adopting a configuration that can be loaded into any of a mass spectrometer, a secondary neutron ionization mass spectrometer, an X-ray photoelectron spectrometer, or an electric measurement device using a probe. Of course.
【００６９】（実施例１０）以上述べてきたサイドエン
トリ型試料ステージを保管する保管庫４６を設けてもよ
い。図１１は保管庫４６に挿入したサイドエントリ型試
料ステージの状態を示した鳥瞰図である。前述したよう
に試料片１５の試料設置部１への固定をまとめて行った
場合などに、試料片１５の物理的あるいは化学的汚染を
防ぐ目的で、内部が真空雰囲気の保管庫に保管する。保
管庫４６の上面は内部が見えるように透明の蓋４７で構
成しているので、保管されているサイドエントリ型試料
ステージの状態を随時確認できる。この保管庫４６を準
備することによって、複数のサイドエントリ型試料ステ
ージを、保管場所をとらず、清浄な雰囲気下で保管する
ことができる。(Embodiment 10) A storage 46 for storing the side entry type sample stage described above may be provided. FIG. 11 is a bird's-eye view showing a state of the side entry type sample stage inserted into the storage 46. As described above, when the sample pieces 15 are fixed to the sample setting section 1 collectively, the sample pieces 15 are stored in a storage having a vacuum atmosphere for the purpose of preventing physical or chemical contamination of the sample pieces 15. Since the upper surface of the storage 46 is constituted by the transparent lid 47 so that the inside can be seen, the state of the stored side entry type sample stage can be checked at any time. By preparing the storage 46, a plurality of side entry type sample stages can be stored in a clean atmosphere without requiring a storage place.
【００７０】（実施例１１）またＦＩＢ装置２４と前述
した各種の分析装置、計測装置が離れた場所にある場
合、図１２に示す携帯型保管庫の実施例を用いてもよ
い。携帯型保管庫５０は、イオンビーム３３によって所
望の分析手段、観察手段または計測手段に適する形状に
ＦＩＢ加工した試料片１５を載置するサイドエントリ型
試料ステージを、前述の各種の分析装置、計測装置まで
運ぶ際、試料設置部１付近のみを真空雰囲気下に密閉す
る機能を有しており、軽量であり、運搬が容易である。(Embodiment 11) When the FIB device 24 and the various analyzers and measuring devices described above are located at remote locations, the embodiment of a portable storage shown in FIG. 12 may be used. The portable storage 50 is provided with a side entry type sample stage on which a sample piece 15 that has been FIB processed into a shape suitable for a desired analysis unit, observation unit or measurement unit by the ion beam 33 is mounted. When transported to the apparatus, it has a function of sealing only the vicinity of the sample setting section 1 under a vacuum atmosphere, and is lightweight and easy to transport.
【００７１】携帯型保管庫５０は透明の部材で構成する
ことによって、試料設置部１の状態が把握できるように
なっており、運搬中の取り扱いに注意を促す。携帯型保
管庫５０の代表的な使い方は、ＦＩＢ装置２４からサイ
ドエントリ型試料ステージを引き抜いた後、速やかに携
帯型保管庫５０に試料設置部１を含む先端部を挿入す
る。The portable storage 50 is made of a transparent member so that the state of the sample setting section 1 can be grasped, and attention is paid to handling during transportation. A typical use of the portable storage 50 is to immediately insert the tip including the sample setting unit 1 into the portable storage 50 after pulling out the side entry type sample stage from the FIB device 24.
【００７２】サイドエントリ型試料ステージの外筒９に
は、真空シール１６部材が配されており、この真空シー
ル１６部材を利用して携帯型保管庫５０の内部を気密に
保持する。挿入後、排気装置５１と接続する弁５２を操
作して携帯型保管庫５０の内部を適宜な時間排気する。The outer cylinder 9 of the side entry type sample stage is provided with a vacuum seal 16 member, and the inside of the portable storage 50 is kept airtight by using the vacuum seal 16 member. After the insertion, the inside of the portable storage 50 is evacuated for an appropriate time by operating the valve 52 connected to the exhaust device 51.
【００７３】排気後、弁５２を操作して携帯型保管庫５
０の内部を密閉させ、弁５２と排気装置５１を分離し、
携帯型保管庫５０を弁５２毎上述した例えば分析装置ま
で運搬する。運搬後、弁５２を操作し、携帯型保管庫５
０の内部を大気圧にしてから速やかに分析装置へ装填す
る。この際サイドエントリ型試料ステージを保持する台
５３などに固定した状態で行う方が安全であることは言
うまでもない。After the exhaust, the valve 52 is operated to operate the portable storage 5.
, The valve 52 and the exhaust device 51 are separated,
The portable storage 50 is transported together with the valve 52 to, for example, the above-described analyzer. After transportation, the valve 52 is operated, and the portable storage 5
After the inside of 0 is set to atmospheric pressure, it is immediately loaded into the analyzer. At this time, it is needless to say that it is safer to perform the measurement in a state in which the sample stage is fixed to the table 53 holding the side entry type sample stage.
【００７４】この携帯型保管庫５０を用いることによっ
て、貴重な試料を汚染することなく、また落下、破損な
どの事故を未然に防ぐことができ、軽量であることから
楽に持ち運びすることができる。By using this portable storage 50, it is possible to prevent a valuable sample from being contaminated, to prevent accidents such as dropping or breakage, and to carry it easily because it is lightweight.
【００７５】以上述べてきた保管庫４６および携帯型保
管庫５０の内部は真空雰囲気に限定されることはなく、
例えば清浄な乾燥雰囲気下にあっても構わない。さらに
保管庫４６自体を恒温層として内部の温度を常時一定に
制御する構成としても何ら問題はない。The interiors of the storage 46 and the portable storage 50 described above are not limited to a vacuum atmosphere.
For example, it may be in a clean dry atmosphere. Further, there is no problem even when the storage 46 itself is used as a constant temperature layer and the internal temperature is constantly controlled.
【００７６】[0076]
【発明の効果】試料片を積載し、ＦＩＢ装置に装填する
サイドエントリ型試料ステージの試料設置部に直進と回
転の２自由度を持たせたことによって、一辺が数mmオー
ダの試料片の任意の断面位置からの微小試料の摘出およ
びＦＩＢ加工が可能となる。According to the present invention, the sample mounting portion of the side entry type sample stage on which the sample pieces are loaded and loaded into the FIB apparatus has two degrees of freedom of linear movement and rotation. It is possible to extract a small sample from the cross-sectional position and perform FIB processing.
【００７７】また試料片用とＴＥＭホルダ用の試料設置
部を設けたことで、サイドエントリ型試料ステージの抜
き差し作業が不要となり確実に試料片からの微小試料の
摘出およびＴＥＭホルダへの移送、固着およびＦＩＢ加
工の試料作成作業が一貫して可能となり、より試料作成
の簡易化および作成時間の短縮化が実現できる。Further, the provision of the sample setting sections for the sample piece and the TEM holder eliminates the need for the work of removing and inserting the side entry type sample stage, thereby reliably removing the small sample from the sample piece and transferring and fixing the sample to the TEM holder. In addition, the sample preparation work of the FIB processing can be performed consistently, and the sample preparation can be further simplified and the preparation time can be reduced.
【図１】本発明の第１の実施例を示す縦断面図および上
面図。FIG. 1 is a longitudinal sectional view and a top view showing a first embodiment of the present invention.
【図２】本発明の第１の実施例のサイドエントリ型試料
ステージの基本構成を示す鳥瞰図。FIG. 2 is a bird's-eye view showing a basic configuration of a side entry type sample stage according to the first embodiment of the present invention.
【図３】本発明の第２の実施例を示す縦断面図および上
面図。FIG. 3 is a longitudinal sectional view and a top view showing a second embodiment of the present invention.
【図４】本発明の第３の実施例を示す縦断面図および上
面図。FIG. 4 is a longitudinal sectional view and a top view showing a third embodiment of the present invention.
【図５】本発明の第４の実施例の鳥瞰図。FIG. 5 is a bird's-eye view of a fourth embodiment of the present invention.
【図６】本発明の第５の実施例を示す縦断面図および上
面図。FIG. 6 is a longitudinal sectional view and a top view showing a fifth embodiment of the present invention.
【図７】本発明の第６の実施例を示す縦断面図および上
面図。FIG. 7 is a longitudinal sectional view and a top view showing a sixth embodiment of the present invention.
【図８】本発明の第７の実施例を示す縦断面図および上
面図。FIG. 8 is a longitudinal sectional view and a top view showing a seventh embodiment of the present invention.
【図９】本発明の第８の実施例を示す縦断面図。FIG. 9 is a longitudinal sectional view showing an eighth embodiment of the present invention.
【図１０】本発明のサイドエントリ型試料ステージを搭
載した試料作成装置の鳥瞰図。FIG. 10 is a bird's-eye view of a sample preparation apparatus equipped with the side entry type sample stage of the present invention.
【図１１】本発明のサイドエントリ型試料ステージを収
納した保管庫の鳥瞰図。FIG. 11 is a bird's-eye view of a storage housing the side entry type sample stage of the present invention.
【図１２】本発明の別の保管庫の実施例を示す縦断面
図。FIG. 12 is a longitudinal sectional view showing another embodiment of the storage of the present invention.
【図１３】従来のサイドエントリ型試料ステージを示す
外観図。FIG. 13 is an external view showing a conventional side entry type sample stage.
【図１４】従来のＦＩＢ装置を示す鳥瞰図。FIG. 14 is a bird's-eye view showing a conventional FIB device.
１…試料設置部、１ａ…第１ステージ、１ｂ…第２ステ
ージ、２…プーリ、３…軸受け、４…腕、５…第２のプ
ーリ、６…ワイヤ、７…第２の腕、８…駆動軸、８ａ…
ねじ、９…外筒、１０ａ…歯車、１０ｂ…歯車、１１…
微少送り機構、１２…つまみ、１３…握り部、１４…軸
受け、１５…試料片、１６…真空シール、１７…真空容
器、１８…移送手段、１９…ＴＥＭ装置、２０…駆動
部、２１…ＴＥＭホルダ、２２…微小試料片、２３…開
口部、２４…ＦＩＢ装置、２５ａ…歯車、２５ｂ…歯
車、２６ａ…かさ歯車、２６ｂ…かさ歯車、２７…突出
部、２８…回転軸、２９…回転中心、３０…駆動源、３
１…直進軸受け、３２…照射光学系、３３…イオンビー
ム、３４…二次粒子検出器、３５…デポジション用ガス
供給源、３６…試料ホルダ、３７…試料ステージ微動手
段、３８…試料作成装置、３９…イオンビーム制御部、
４０…二次粒子検出器制御部、４１…デポジション用ガ
ス供給源制御部、４２…ステージ制御部、４３…移送手
段制御部、４４…画像表示部、４５…計算処理部、４６
…保管庫、４７…蓋、４８…ＴＥＭ試料、４９…固定治
具、５０…携帯型保管庫、５１…排気装置、５２…弁、
５３…台。DESCRIPTION OF SYMBOLS 1 ... Sample setting part, 1a ... 1st stage, 1b ... 2nd stage, 2 ... Pulley, 3 ... Bearing, 4 ... Arm, 5 ... Second pulley, 6 ... Wire, 7 ... 2nd arm, 8 ... Drive shaft, 8a ...
Screw, 9 ... outer cylinder, 10a ... gear, 10b ... gear, 11 ...
Fine feed mechanism, 12 knob, 13 grip part, 14 bearing, 15 sample piece, 16 vacuum seal, 17 vacuum container, 18 transfer means, 19 TEM device, 20 drive unit, 21 TEM Holder, 22: small sample piece, 23: opening, 24: FIB device, 25a: gear, 25b: gear, 26a: bevel gear, 26b: bevel gear, 27: protrusion, 28: rotating shaft, 29: rotation center , 30 ... drive source, 3
DESCRIPTION OF SYMBOLS 1 ... Linear bearing, 32 ... Irradiation optical system, 33 ... Ion beam, 34 ... Secondary particle detector, 35 ... Deposition gas supply source, 36 ... Sample holder, 37 ... Sample stage fine movement means, 38 ... Sample preparation device , 39 ... ion beam control unit,
Reference numeral 40: secondary particle detector control unit, 41: deposition gas supply source control unit, 42: stage control unit, 43: transfer unit control unit, 44: image display unit, 45: calculation processing unit, 46
... storage, 47 ... lid, 48 ... TEM sample, 49 ... fixing jig, 50 ... portable storage, 51 ... exhaust device, 52 ... valve,
53 ... units.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｈ０１Ｊ 37/20 Ｈ０１Ｊ 37/20 Ｃ ５Ｆ０４５ 37/305 37/305 Ａ Ｈ０１Ｌ 21/3065 Ｈ０１Ｌ 21/31 Ｂ 21/31 21/66 Ｎ 21/66 Ｇ０１Ｎ 23/225 // Ｇ０１Ｎ 23/225 23/227 23/227 1/28 Ｗ Ｎ Ｈ０１Ｌ 21/302 Ｄ (72)発明者 富松 聡 東京都国分寺市東恋ケ窪一丁目280番地 株式会社日立製作所中央研究所内 (72)発明者 小池 英巳 茨城県ひたちなか市市毛882番地 株式会 社日立製作所計測器グループ内 (72)発明者 江花 智 東京都国分寺市東恋ケ窪一丁目280番地 株式会社日立製作所中央研究所内 Ｆターム(参考） 2G001 AA01 AA03 AA05 AA10 BA05 BA06 BA07 BA08 BA09 BA11 CA01 CA03 CA05 CA10 GA06 PA01 PA02 QA02 QA10 RA04 RA08 4M106 AA20 BA02 BA03 DH25 DH33 DJ02 DJ04 DJ06 5C001 AA01 AA02 AA03 AA05 AA06 BB07 CC03 CC04 CC08 5C034 BB06 BB07 5F004 AA16 BA17 BB01 BB15 BB18 BC08 EA39 5F045 EK20 EM02 EM10 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) H01J 37/20 H01J 37/20 C 5F045 37/305 37/305 A H01L 21/3065 H01L 21/31 B 21 / 31 21/66 N 21/66 G01N 23/225 // G01N 23/225 23/227 23/227 1/28 W N H01L 21/302 D (72) Inventor Satoshi Tomimatsu 1-280 Higashi Koigakubo, Kokubunji-shi, Tokyo Address: Central Research Laboratory, Hitachi, Ltd. (72) Inventor Hidemi Koike 882, Ma, Hitachinaka-shi, Ibaraki Pref. Within the Measuring Instruments Group, Hitachi, Ltd. F-term in Hitachi Central Research Laboratory (reference) 2G001 AA01 AA03 AA05 AA10 BA05 BA06 BA07 BA08 BA09 BA11 CA01 CA03 CA05 CA10 GA06 PA01 PA02 QA02 QA10 RA04 RA08 4M10 6 AA20 BA02 BA03 DH25 DH33 DJ02 DJ04 DJ06 5C001 AA01 AA02 AA03 AA05 AA06 BB07 CC03 CC04 CC08 5C034 BB06 BB07 5F004 AA16 BA17 BB01 BB15 BB18 BC08 EA39 5F045 EK20 EM02 EM10
Claims (16)
ムのいずれかのイオンビーム照射光学系と、上記イオン
ビームの照射によって発生する二次粒子を検出する二次
粒子検出手段と、上記イオンビームの照射領域にデポジ
ション膜を形成する原料ガスを供給するデポジション用
ガス供給源と、試料片の一部を分離した摘出試料を試料
ホルダに移し変える移送手段と、サイドエントリ型試料
ステージと、上記試料ステージを微動させる試料ステー
ジ微動手段を少なくとも有する試料作成装置において、
上記サイドエントリ型試料ステージの試料片を載置する
試料設置部を試料ステージの軸方向成分を含む方向に移
動可能とする手段と、上記試料設置部を試料ステージの
軸方向に垂直な成分を含む回転軸をもって回転可能とす
る手段を有することを特徴とする試料作成装置。1. An ion beam irradiation optical system of either a focused ion beam or a projected ion beam, a secondary particle detecting means for detecting a secondary particle generated by irradiation of the ion beam, and an irradiation area of the ion beam. A deposition gas supply source for supplying a raw material gas for forming a deposition film, transfer means for transferring an extracted sample obtained by separating a part of a sample piece to a sample holder, a side entry type sample stage, and the sample stage In a sample preparation apparatus having at least a sample stage fine movement means for finely moving
Means for moving a sample setting portion for mounting the sample piece of the side entry type sample stage in a direction including an axial component of the sample stage; and a device including the sample setting portion including a component perpendicular to the axial direction of the sample stage. A sample preparation apparatus, comprising: means for enabling rotation with a rotation axis.
ムのいずれかのイオンビーム照射光学系と、上記イオン
ビームの照射によって発生する二次粒子を検出する二次
粒子検出手段と、上記イオンビームの照射領域にデポジ
ション膜を形成する原料ガスを供給するデポジション用
ガス供給源と、試料片の一部を分離した摘出試料を試料
ホルダに移し変える移送手段と、サイドエントリ型試料
ステージと、上記試料ステージを微動させる試料ステー
ジ微動手段を少なくとも有する試料作成装置において、
上記サイドエントリ型試料ステージの試料片を載置する
試料設置部を、上記サイドエントリ型試料ステージの中
心軸に対して平行に直進移動および上記中心軸に対して
垂直方向を回転軸として回転移動させる手段を有するこ
とを特徴とする試料作成装置。2. An ion beam irradiation optical system of either a focused ion beam or a projected ion beam, a secondary particle detecting means for detecting a secondary particle generated by irradiation of the ion beam, and an irradiation area of the ion beam. A deposition gas supply source for supplying a raw material gas for forming a deposition film, transfer means for transferring an extracted sample obtained by separating a part of a sample piece to a sample holder, a side entry type sample stage, and the sample stage In a sample preparation apparatus having at least a sample stage fine movement means for finely moving
The sample setting section on which the sample piece of the side entry type sample stage is mounted is moved straight in parallel with the central axis of the side entry type sample stage and rotationally moved about the direction perpendicular to the central axis as a rotation axis. A sample preparation apparatus comprising:
試料ステージは上記試料設置部の直進移動部材に上記試
料設置部の回転移動部材を積載した構成からなり、上記
試料設置部の直進移動および回転移動を、大気側から真
空側へ導入する回転および直進移動可能な単一の駆動軸
で行うことを特徴とする試料作成装置。3. The sample stage according to claim 2, wherein the side entry type sample stage has a configuration in which a rotationally moving member of the sample setting section is mounted on a linearly moving member of the sample setting section. A sample preparation apparatus characterized in that the movement is performed by a single drive shaft capable of rotating and moving in a straight line, which moves from the atmosphere side to the vacuum side.
ントリ型試料ステージは、他端がネジ形状を有し上記サ
イドエントリ型試料ステージの中心軸に対して概ね平行
に直進移動および上記中心軸廻りに回転する駆動軸と、
上記駆動軸と回転自在に結合し、上記中心軸廻りの回転
自由度を規制した腕と、試料設置部と、上記腕に回転自
在に結合しワイヤまたはベルト等の回転運動伝達媒体を
円周上に巻きまわして上記試料設置部を保持する第１の
プーリと、上記第１のプーリと対をなし、上記腕に回転
自在に保持し、かつ上記回転運動伝達媒体を円周上に巻
きまわした第２のプーリと、一方の端が上記回転伝達媒
体の一部と結合し、他端が上記駆動軸の上記ネジ形状と
噛み合うネジ形状を有し、上記中心軸廻りの回転自由度
を規制し、上記腕に直進自在に保持された第２の腕と、
上記駆動軸を真空シールを介して回転および直進自在に
保持し、かつ上記腕を直進自在に保持する外筒部からな
ることを特徴とする試料作成装置。4. The side entry type sample stage according to claim 2, wherein the other side of the side entry type sample stage has a screw shape, and moves linearly and substantially parallel to a center axis of the side entry type sample stage. A drive shaft that rotates
An arm that is rotatably connected to the drive shaft and restricts the degree of freedom of rotation about the central axis; a sample setting section; and a rotatable motion transmitting medium such as a wire or a belt that is rotatably connected to the arm. A first pulley that holds the sample setting section by being wound around the arm, and a pair with the first pulley, which is rotatably held on the arm, and that the rotational motion transmission medium is wound around the circumference. The second pulley has one end coupled to a part of the rotation transmission medium, and the other end having a screw shape that meshes with the screw shape of the drive shaft, and restricts the rotational degree of freedom about the center axis. A second arm held straight on the arm,
A sample preparation apparatus comprising: an outer cylinder portion that holds the drive shaft so as to rotate and move straight through a vacuum seal and holds the arm so as to move straight.
ントリ型試料ステージは、他端が歯車形状を有し、上記
中心軸に対して概ね平行に直進移動および上記中心軸廻
りに回転する駆動軸と、上記駆動軸と回転自在に結合
し、上記中心軸廻りの回転自由度を規制した腕と、試料
設置部と、上記腕に回転自在に結合し、ワイヤまたはベ
ルト等の回転運動伝達媒体を円周上に巻きまわして上記
試料設置部を保持する第１のプーリと、上記第１のプー
リと対をなし、かつ外周上に上記駆動軸の歯車形状と噛
み合う歯車形状を有し、上記腕に回転自在に保持し、上
記回転運動伝達媒体を円周上に巻きまわした第２のプー
リと、上記駆動軸を真空シールを介して回転および直進
自在に、かつ上記腕を直進自在に保持する外筒部からな
ることを特徴とする試料作成装置。5. The drive shaft according to claim 2, wherein the side entry type sample stage has a gear shape at the other end, and moves linearly substantially parallel to the center axis and rotates about the center axis. And an arm that is rotatably coupled to the drive shaft and restricts the degree of freedom of rotation about the central axis, a sample setting unit, and rotatably coupled to the arm, and transmits a rotational motion transmission medium such as a wire or a belt. A first pulley wound around the circumference to hold the sample setting portion, a gear paired with the first pulley, and having a gear shape meshing with the gear shape of the drive shaft on the outer periphery; And a second pulley around which the rotational motion transmitting medium is wound around the circumference, the drive shaft being rotatable and rectilinear via a vacuum seal, and the arm being rectilinear. It is characterized by comprising an outer cylinder Fee generating apparatus.
ントリ型試料ステージは、他端が歯車形状を有し、上記
中心軸に対して概ね平行に直進移動および上記中心軸廻
りに回転する駆動軸と、上記駆動軸と回転自在に結合
し、上記中心軸廻りの回転自由度を規制した腕と、試料
設置部と、上記腕に回転自在に結合し円周上に上記駆動
軸の上記歯車形状と噛み合う歯車形状を有した上記試料
設置部を保持する従動歯車と、上記駆動軸を真空シール
を介して回転および直進自在に、かつ上記腕を直進自在
に保持する外筒部からなることを特徴とする試料作成装
置。6. A drive shaft according to claim 2, wherein the other end of the side-entry type sample stage has a gear shape, and moves linearly substantially parallel to the center axis and rotates about the center axis. An arm that is rotatably coupled to the drive shaft and restricts the degree of freedom of rotation about the central axis; a sample setting section; and the gear shape of the drive shaft rotatably coupled to the arm and connected to the arm. A driven gear that holds the sample setting portion having a gear shape that meshes with the outer cylindrical portion that holds the drive shaft rotatably and rectilinearly via a vacuum seal and holds the arm rectilinearly. Sample preparation device.
ントリ型試料ステージは、上記中心軸に対して概ね平行
に直進移動および上記中心軸廻りに回転する駆動軸と、
上記駆動軸に上記駆動軸の中心軸と偏芯する位置に結合
した回転軸と、上記駆動軸と回転自在に結合し上記中心
軸廻りの回転方向を規制した腕と、試料設置部と、上記
試料設置部を保持し、上記腕に回転自在に結合し、上記
回転軸の自由端と接触する突出部を設けたカムと、上記
駆動軸を真空シールを介して回転および直進自在に、か
つ上記腕を直進自在に保持する外筒部からなることを特
徴とする試料作成装置。7. The drive shaft according to claim 2, wherein the side entry type sample stage moves linearly substantially parallel to the center axis and rotates about the center axis.
A rotating shaft coupled to the drive shaft at a position eccentric to the center axis of the drive shaft, an arm rotatably coupled to the drive shaft and regulating a rotation direction around the central axis, a sample setting unit, A cam holding a sample setting portion, rotatably coupled to the arm, and having a protrusion that comes into contact with a free end of the rotary shaft, and a rotatable and linearly movable drive shaft via a vacuum seal, and A sample preparation device comprising an outer cylindrical portion for holding an arm so as to be able to move straight.
試料ステージは、上記カムと上記腕の回転自在な結合方
向を変更することで上記試料設置部の回転移動方向を選
択できることを特徴とする試料作成装置。8. The sample according to claim 7, wherein the side entry type sample stage can select a rotational movement direction of the sample setting section by changing a rotatable coupling direction of the cam and the arm. Creating device.
装置において、上記サイドエントリ型試料ステージは少
なくとも２つ以上の試料設置部を備えたことを特徴とす
る試料作成装置。9. The sample preparation apparatus according to claim 1, wherein said side entry type sample stage has at least two or more sample installation sections.
上記サイドエントリ型試料ステージの一方の試料設置部
が上記試料片を載置する第１の試料ステージであり、他
方の試料設置部が、上記試料片からの摘出試料を載置す
る試料ホルダである第２の試料ステージからなる試料設
置部または他方の試料設置部が上記摘出試料を載置する
上記試料ホルダを着脱できる第２試料ステージからなる
ことを特徴とする試料作成装置。10. A sample preparation apparatus according to claim 9,
One sample setting part of the side entry type sample stage is a first sample stage on which the sample piece is mounted, and the other sample setting part is a sample holder for mounting a sample extracted from the sample piece. A sample preparation apparatus, characterized in that the sample setting section comprising the second sample stage or the other sample setting section comprises a second sample stage to which the sample holder for mounting the extracted sample can be attached and detached.
観察位置にある上記第１試料ステージに搭載した試料片
をイオンビームによって摘出試料に加工し、移送手段に
よって上記摘出試料を一旦保持し、上記第１試料ステー
ジと上記第２試料ステージから構成した上記試料設置部
を回転することで上記観察位置に上記第２試料ステージ
を回転移動させ、上記摘出試料を上記移送手段によって
上記第２試料ステージに結合した上記試料ホルダに移設
し、上記イオンビームによって所望の分析手段、観察手
段または計測手段に適する形状にさらに加工することを
特徴とする試料作成方法。11. A sample preparation apparatus according to claim 10,
A sample piece mounted on the first sample stage at the observation position is processed into an extirpated sample by an ion beam, and the extirpated sample is temporarily held by a transfer means, and the first sample stage and the second sample stage are configured. The second sample stage is rotated and moved to the observation position by rotating the sample setting unit, and the extracted sample is transferred to the sample holder connected to the second sample stage by the transfer means, and the desired sample is moved by the ion beam. And further processing the sample into a shape suitable for the analysis means, observation means or measurement means.
記観察手段または上記計測手段が、集束イオンビーム装
置、透過型電子顕微鏡、走査型電子顕微鏡、走査プロー
ブ顕微鏡、オージェ電子分光分析装置、電子プローブＸ
線微少分析装置、電子エネルギ欠損分析装置、二次イオ
ン質量分析装置、二次中性子イオン化質量分析装置、Ｘ
線光電子分光分析装置、またはプローブを用いた電気計
測装置のうちのいずれかであることを特徴とする試料解
析方法。12. The apparatus according to claim 11, wherein said analyzing means, said observing means, or said measuring means is a focused ion beam device, a transmission electron microscope, a scanning electron microscope, a scanning probe microscope, an Auger electron spectroscopic analyzer, and an electronic probe. X
X-ray micro analyzer, electron energy defect analyzer, secondary ion mass analyzer, secondary neutron ionization mass analyzer, X
A sample analysis method, which is one of a line photoelectron spectroscopy analyzer and an electrical measurement device using a probe.
リ型試料ステージが、集束イオンビーム装置、投射イオ
ンビーム装置、透過型電子顕微鏡、走査型電子顕微鏡、
走査プローブ顕微鏡、オージェ電子分光分析装置、電子
プローブＸ線微少分析装置、電子エネルギ欠損分析装
置、二次イオン質量分析装置、二次中性子イオン化質量
分析装置、Ｘ線光電子分光分析装置、またはプローブを
用いた電気計測装置のうちの少なくとも一つ以上に装填
できることを特徴とする試料作成装置。13. The apparatus according to claim 10, wherein the side entry type sample stage is a focused ion beam device, a projection ion beam device, a transmission electron microscope, a scanning electron microscope,
Scanning probe microscope, Auger electron spectrometer, electron probe X-ray micro analyzer, electron energy defect analyzer, secondary ion mass spectrometer, secondary neutron ionization mass spectrometer, X-ray photoelectron spectrometer, or probe A sample preparation device capable of being loaded into at least one or more of the electric measurement devices.
記載の試料作成装置において、上記サイドエントリ型試
料ステージを保管する保管庫を有しており、上記保管庫
が、真空雰囲気下または乾燥乾燥雰囲気下、およびまた
は恒温雰囲気下で保管する保管庫であることを特徴とす
る試料作成装置。14. The sample preparation apparatus according to claim 1, further comprising a storage for storing said side entry type sample stage, wherein said storage is under a vacuum atmosphere or dry and dry. A sample preparation device characterized by being a storage for storing under an atmosphere and / or a constant temperature atmosphere.
試料設置部を含む上記サイドエントリ型試料ステージの
一部を密閉する保管庫であることを特徴とする試料作成
装置。15. The sample preparation apparatus according to claim 14, wherein the storage is a storage that seals a part of the side entry type sample stage including the sample setting section.
バイスまたは光デバイスの少なくとも一部であって、請
求項１から９および１３のいずれか記載の試料作成装置
を、上記デバイスの製造工程において使用することを特
徴とするデバイスの製造方法。16. The sample preparation device according to claim 1, wherein the sample piece is at least a part of an electronic device, a magnetic device, or an optical device, and is used in a process of manufacturing the device. A method for manufacturing a device, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24460399A JP4534273B2 (en) | 1999-08-31 | 1999-08-31 | Sample preparation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24460399A JP4534273B2 (en) | 1999-08-31 | 1999-08-31 | Sample preparation device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001066231A true JP2001066231A (en) | 2001-03-16 |
| JP2001066231A5 JP2001066231A5 (en) | 2006-07-20 |
| JP4534273B2 JP4534273B2 (en) | 2010-09-01 |
Family
ID=17121194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24460399A Expired - Fee Related JP4534273B2 (en) | 1999-08-31 | 1999-08-31 | Sample preparation device |
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| Country | Link |
|---|---|
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005259707A (en) * | 2005-04-04 | 2005-09-22 | Hitachi Ltd | Minute sample processing/observing method and device |
| JP2006226863A (en) * | 2005-02-18 | 2006-08-31 | Japan Synchrotron Radiation Research Inst | Device for conducting operations of transferring rectilinearly, rotating, grasping, pushing out and releasing sample support, by uniaxial rotation rectilinear transfer type transfer rod |
| WO2006092975A1 (en) * | 2005-03-04 | 2006-09-08 | Sii Nanotechnology Inc. | Processing stage, focused beam processing apparatus, and focused beam processing method |
| JP2009049021A (en) * | 2008-12-01 | 2009-03-05 | Hitachi Ltd | Minute sample processing observation method and device |
| WO2010122717A1 (en) * | 2009-04-22 | 2010-10-28 | 株式会社 日立ハイテクノロジーズ | Sample holder, method for use of the sample holder, and charged particle device |
| JP2012073265A (en) * | 2011-11-14 | 2012-04-12 | Hitachi Ltd | Minute sample processing observation method and device thereof |
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Citations (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4830860A (en) * | 1971-08-25 | 1973-04-23 | ||
| JPS4914284Y1 (en) * | 1969-12-29 | 1974-04-09 | ||
| JPS51124368A (en) * | 1975-04-23 | 1976-10-29 | Hitachi Ltd | Sample rotating device for corpuscular ray equipment |
| JPS5478967A (en) * | 1977-12-07 | 1979-06-23 | Hitachi Ltd | Test piece fine moving unit of scanning type electronic microscope |
| JPS593857A (en) * | 1982-06-30 | 1984-01-10 | Hitachi Ltd | Sample-rotating device for particle ray device |
| JPS595868U (en) * | 1982-07-02 | 1984-01-14 | 株式会社日立製作所 | Sample device in particle beam equipment |
| JPS5916064U (en) * | 1982-07-21 | 1984-01-31 | 株式会社日立製作所 | Sample rotation device in particle beam equipment |
| JPS61107645A (en) * | 1984-10-31 | 1986-05-26 | Internatl Precision Inc | Sample holder of transmission electron microscope |
| JPS61200657A (en) * | 1985-03-01 | 1986-09-05 | Hitachi Ltd | Sample slightly-moving device for electron microscope or the like |
| JPS6244942A (en) * | 1985-08-23 | 1987-02-26 | Jeol Ltd | Rotary inclination sample holder |
| JPH02278643A (en) * | 1989-02-28 | 1990-11-14 | Eaton Corp | Ion implantation equipment |
| JPH03147238A (en) * | 1989-10-17 | 1991-06-24 | Philips Gloeilampenfab:Nv | Vacuum system having housing allowing vacuum drawing, object holder, object carrier allowing mounting and dismounting said holder |
| JPH04120437A (en) * | 1990-09-12 | 1992-04-21 | Hitachi Ltd | Method and apparatus for slicing sample |
| JPH04248237A (en) * | 1991-01-23 | 1992-09-03 | Hitachi Ltd | Specimen switch-over device for electron microscope |
| JPH04328233A (en) * | 1991-04-26 | 1992-11-17 | Hitachi Ltd | Electron microscope |
| JPH0668828A (en) * | 1991-10-24 | 1994-03-11 | Hitachi Ltd | Sample holder for electron microscope |
| JPH0887972A (en) * | 1994-09-20 | 1996-04-02 | Hitachi Ltd | Sample holder |
| JPH1064473A (en) * | 1996-06-13 | 1998-03-06 | Hitachi Ltd | Observing system for evaluation/treatment of sample |
| WO1999005506A1 (en) * | 1997-07-22 | 1999-02-04 | Hitachi, Ltd. | Method and apparatus for preparing samples |
| JPH11108810A (en) * | 1997-10-01 | 1999-04-23 | Hitachi Ltd | Method and device for analyzing sample |
| JPH11108813A (en) * | 1997-10-03 | 1999-04-23 | Hitachi Ltd | Method and device for preparing sample |
| JPH11233054A (en) * | 1998-02-16 | 1999-08-27 | Jeol Ltd | Specimen rotating apparatus in charged particle beam apparatus |
-
1999
- 1999-08-31 JP JP24460399A patent/JP4534273B2/en not_active Expired - Fee Related
Patent Citations (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4914284Y1 (en) * | 1969-12-29 | 1974-04-09 | ||
| JPS4830860A (en) * | 1971-08-25 | 1973-04-23 | ||
| JPS51124368A (en) * | 1975-04-23 | 1976-10-29 | Hitachi Ltd | Sample rotating device for corpuscular ray equipment |
| JPS5478967A (en) * | 1977-12-07 | 1979-06-23 | Hitachi Ltd | Test piece fine moving unit of scanning type electronic microscope |
| JPS593857A (en) * | 1982-06-30 | 1984-01-10 | Hitachi Ltd | Sample-rotating device for particle ray device |
| JPS595868U (en) * | 1982-07-02 | 1984-01-14 | 株式会社日立製作所 | Sample device in particle beam equipment |
| JPS5916064U (en) * | 1982-07-21 | 1984-01-31 | 株式会社日立製作所 | Sample rotation device in particle beam equipment |
| JPS61107645A (en) * | 1984-10-31 | 1986-05-26 | Internatl Precision Inc | Sample holder of transmission electron microscope |
| JPS61200657A (en) * | 1985-03-01 | 1986-09-05 | Hitachi Ltd | Sample slightly-moving device for electron microscope or the like |
| JPS6244942A (en) * | 1985-08-23 | 1987-02-26 | Jeol Ltd | Rotary inclination sample holder |
| JPH02278643A (en) * | 1989-02-28 | 1990-11-14 | Eaton Corp | Ion implantation equipment |
| JPH03147238A (en) * | 1989-10-17 | 1991-06-24 | Philips Gloeilampenfab:Nv | Vacuum system having housing allowing vacuum drawing, object holder, object carrier allowing mounting and dismounting said holder |
| JPH04120437A (en) * | 1990-09-12 | 1992-04-21 | Hitachi Ltd | Method and apparatus for slicing sample |
| JPH04248237A (en) * | 1991-01-23 | 1992-09-03 | Hitachi Ltd | Specimen switch-over device for electron microscope |
| JPH04328233A (en) * | 1991-04-26 | 1992-11-17 | Hitachi Ltd | Electron microscope |
| JPH0668828A (en) * | 1991-10-24 | 1994-03-11 | Hitachi Ltd | Sample holder for electron microscope |
| JPH0887972A (en) * | 1994-09-20 | 1996-04-02 | Hitachi Ltd | Sample holder |
| JPH1064473A (en) * | 1996-06-13 | 1998-03-06 | Hitachi Ltd | Observing system for evaluation/treatment of sample |
| WO1999005506A1 (en) * | 1997-07-22 | 1999-02-04 | Hitachi, Ltd. | Method and apparatus for preparing samples |
| JPH11108810A (en) * | 1997-10-01 | 1999-04-23 | Hitachi Ltd | Method and device for analyzing sample |
| JPH11108813A (en) * | 1997-10-03 | 1999-04-23 | Hitachi Ltd | Method and device for preparing sample |
| JPH11233054A (en) * | 1998-02-16 | 1999-08-27 | Jeol Ltd | Specimen rotating apparatus in charged particle beam apparatus |
Cited By (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006226863A (en) * | 2005-02-18 | 2006-08-31 | Japan Synchrotron Radiation Research Inst | Device for conducting operations of transferring rectilinearly, rotating, grasping, pushing out and releasing sample support, by uniaxial rotation rectilinear transfer type transfer rod |
| WO2006092975A1 (en) * | 2005-03-04 | 2006-09-08 | Sii Nanotechnology Inc. | Processing stage, focused beam processing apparatus, and focused beam processing method |
| US8598485B2 (en) | 2005-03-04 | 2013-12-03 | Sii Nano Technology Inc. | Stage for working, focused beam working apparatus and focused beam working method |
| JP2005259707A (en) * | 2005-04-04 | 2005-09-22 | Hitachi Ltd | Minute sample processing/observing method and device |
| JP3874011B2 (en) * | 2005-04-04 | 2007-01-31 | 株式会社日立製作所 | Microsample processing observation method and apparatus |
| JP2009049021A (en) * | 2008-12-01 | 2009-03-05 | Hitachi Ltd | Minute sample processing observation method and device |
| WO2010122717A1 (en) * | 2009-04-22 | 2010-10-28 | 株式会社 日立ハイテクノロジーズ | Sample holder, method for use of the sample holder, and charged particle device |
| JP2010257617A (en) * | 2009-04-22 | 2010-11-11 | Hitachi High-Technologies Corp | Sample holder, usage of this sample holder, and charged particle device |
| US8853648B2 (en) | 2009-04-22 | 2014-10-07 | Hitachi High-Technologies Corporation | Sample holder, method for use of the sample holder, and charged particle device |
| US8581207B2 (en) | 2010-11-17 | 2013-11-12 | Korea Basic Science Institute | Specimen holder with 3-axis movement for TEM 3D analysis |
| NL2007649A (en) * | 2010-11-17 | 2012-05-22 | Korea Basic Science Inst | Specimen holder with 3-axis movement for tem 3d analysis. |
| JP2012073265A (en) * | 2011-11-14 | 2012-04-12 | Hitachi Ltd | Minute sample processing observation method and device thereof |
| JP2013149507A (en) * | 2012-01-20 | 2013-08-01 | Hitachi High-Technologies Corp | Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy method |
| WO2013108711A1 (en) * | 2012-01-20 | 2013-07-25 | 株式会社日立ハイテクノロジーズ | Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy |
| CN104067369A (en) * | 2012-01-20 | 2014-09-24 | 株式会社日立高新技术 | Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy |
| US8963102B2 (en) | 2012-01-20 | 2015-02-24 | Hitachi High-Technologies Corporation | Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy |
| JP2013171824A (en) * | 2012-02-23 | 2013-09-02 | Melbil Co Ltd | Specimen holder storage device |
| JP2014192108A (en) * | 2013-03-28 | 2014-10-06 | Jeol Ltd | Holder, charged particle beam device, and vacuum device |
| WO2015083270A1 (en) * | 2013-12-05 | 2015-06-11 | 株式会社日立製作所 | Sample holder and analytical vacuum device |
| JPWO2015083270A1 (en) * | 2013-12-05 | 2017-03-16 | 株式会社日立製作所 | Sample holder and vacuum analyzer |
| EP3038131A1 (en) * | 2014-12-22 | 2016-06-29 | FEI Company | Improved specimen holder for a charged particle microscope |
| US9741527B2 (en) | 2014-12-22 | 2017-08-22 | Fei Company | Specimen holder for a charged particle microscope |
| CN111684564A (en) * | 2018-01-05 | 2020-09-18 | 亨尼茨公司 | Vacuum transfer assembly |
| CN111684564B (en) * | 2018-01-05 | 2023-09-15 | 亨尼茨公司 | Vacuum transfer assembly |
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