CN109813586A - A kind of axial rotating device - Google Patents
A kind of axial rotating device Download PDFInfo
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- CN109813586A CN109813586A CN201910145691.7A CN201910145691A CN109813586A CN 109813586 A CN109813586 A CN 109813586A CN 201910145691 A CN201910145691 A CN 201910145691A CN 109813586 A CN109813586 A CN 109813586A
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- needle point
- live spindle
- transfer needle
- diameter
- angle
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- 238000012546 transfer Methods 0.000 claims abstract description 33
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 20
- 239000000463 material Substances 0.000 claims description 19
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 14
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 238000003780 insertion Methods 0.000 claims description 2
- 230000037431 insertion Effects 0.000 claims description 2
- 238000002360 preparation method Methods 0.000 abstract description 8
- 238000005516 engineering process Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 3
- 230000006641 stabilisation Effects 0.000 abstract description 2
- 238000011105 stabilization Methods 0.000 abstract description 2
- 239000000523 sample Substances 0.000 description 26
- 238000011160 research Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013068 control sample Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Sampling And Sample Adjustment (AREA)
Abstract
The present invention relates to focused ion beam two-beam instrument sample preparation fields, and in particular to a kind of axial rotating device.Device includes: transfer needle point: for shifting sample；Shift needle point grain-clamping table: for clamping transfer needle point, transfer needle point can axial-rotation setting in transfer needle point grain-clamping table；Live spindle: front end setting is in inverted " t " type groove, and transfer needle point is fixed in the slot；Rotating handle: connecting with live spindle, drives live spindle rotation, so that mobilization needle point rotates.Apparatus of the present invention rotate needle point by the way that needle point is fixed in live spindle and rotates rotating handle, rotation angle is accurately controlled by angle console, and angle console is connected through a screw thread with live spindle, it ensure that the stabilization walked around, whole device, which is met, prepares the current demand of any direction sample preparation in sample in focused ion beam two-beam instrument, the flexibility ratio for increasing focused ion beam two-beam instrument sample making technology, breaches standard sample method at this stage.
Description
Technical field
The present invention relates to focused ion beam two-beam instrument sample preparation fields, and in particular to one kind is in focused ion beam two-beam
Instrument prepares the axial rotating device that specified region samples rotation can be achieved in sample.
Background technique
High energy ion beam is focused on sample surfaces by focused ion beam double-beam system, is led under the booster action of gas with various
It crosses change ion beam current size and realizes the functions such as material imaging, cutting, pattern etching, thin-film material deposition respectively, it can be to material
The processing of nanoscale is carried out, and then prepares sample for the modern means of testing such as transmission electron microscope, scanning electron microscope, atom-probe.
Focused ion beam double-beam system can be widely applied to micro image observation, the preparation of transmission electron microscope sample, three-dimensional original
The preparation of sub- probe sample, specific region depositing thin films etc..
The sample perpendicular to sample surfaces can only be obtained by conventional focused ion beam two-beam instrument sample making technology, for half
Conductor etc. is complex-shaped, the small particular sample of size, cannot achieve using conventional focused ion beam two-beam instrument preparation method
Selection to sample preparation direction.
Develop later, the conventional focused ion beam two-beam instrument of grasp at present since domestic focused ion beam prepares sample technology
The research unit of sample making technology only has 2-3 house.Therefore controllable sample with realize the device observed and processed at any angle and
Technology still belongs to blank.In external focused ion beam double-beam system sample making course can control sample with realize at any angle observation and
The technology of processing has already appeared in the research structure of part, but complicated there is apparatus structure and cost of manufacture is expensive lacks
Point.
Summary of the invention
It is simple, it can be achieved that turning to the specified region samples item extracted that the purpose of the present invention is to provide a kind of structures
Move the axial rotating device with axial angle controllable rotating.
The technical solution for realizing the aim of the invention is as follows:
A kind of axial rotating device, described device include:
Shift needle point: for shifting sample；
Shift needle point grain-clamping table: for clamping transfer needle point, the transfer needle point can be axial in transfer needle point grain-clamping table
Rotary setting；
Live spindle: front end setting is in inverted " t " type groove, and the transfer needle point is fixed in the slot；
Rotating handle: connecting with the live spindle, drives live spindle rotation, so that mobilization needle point rotates.
The transfer needle point includes the cylinder of rear end and the circular cone of front end, the point diameter of tapered segment less than 500 nanometers,
For accepting the micro-nano size material taken out, column part diameter is 1.0mm-1.2mm.
Further include bottom fixed link, is provided with T-slot in the transfer needle point grain-clamping table, wherein the transverse groove of T-slot is
Cylindrical hole is threaded hole with the vertically disposed vertical slot of transverse groove for transfer needle point insertion；The bottom fixed link is ladder-like
External screw thread, the top of bottom fixed link and erecting for transfer needle point grain-clamping table is arranged in cylindrical shaft, the lesser portion perimeter of upper diameter
It is threadedly engaged to threaded hole, to realize the adjusting of transfer needle point grain-clamping table height；The lower part of the bottom fixed link and focusing
Ion beam/scanning electron microscope double-beam system rotating base connection.
The shape of bottom fixed link lower part is matched with the shape of rotating base coupling part.
It further include angle console and device pedestal；The live spindle is the multi-diameter shaft with two-stage step, including according to
First part, second part and the Part III of secondary connection, the diameter of the first part, second part and Part III is successively
Reduce；Setting is in inverted " t " type groove in the first part, and the transfer needle point is fixed in the slot, outside the second part
Week setting external screw thread, vertical threaded hole is arranged in inside；The Part III periphery is external screw thread；The angle console setting
Lateral internal thread hole cooperates with the external screw thread of live spindle second part；Described device pedestal top is with externally threaded circle
Cylindricality, the vertical threaded hole cooperation with live spindle second part, realizes the adjusting of height；The rotating handle connects for tail end
The Part III of the cylinder of one ellipsoid rotation handle, one threaded hole of cylinder front end setting, threaded hole and live spindle is threadedly engaged
It is fixed.
The length of the first part of the live spindle is 25mm-27mm, diameter 5.5mm-6.5mm, circle described in front end
The length of post holes is 4.0mm-6.0mm, and the length of the second part is 10mm-12mm, and the length of the Part III is
5.0mm-7.0mm。
The diameter of the rotating handle column part is 3.0mm-4.0mm, length 18mm-20mm, the spiral shell of rotating handle
The depth of pit is greater than the length of live spindle Part III.
Further include angle instruction disk and pointer, angle console is set close to the side of rotating handle, the angle refers to
Show that disk and pointer include pointer ring, the pointer ring set is located on the Part III of live spindle.
The material of the pointer ring is stainless steel, and the material of the whole device other parts is hard aluminium alloy.
The bottom of described device pedestal is cylindrical body, and the size of bottom cylindrical body is that diameter is 22mm-24mm, is highly
6mm-8mm。
Compared with prior art, the present invention its remarkable advantage:
Apparatus of the present invention rotate needle point by the way that needle point is fixed in live spindle and rotates rotating handle, by angle control
Platform processed accurately controls rotation angle, and angle console is connected through a screw thread with live spindle, ensure that the stabilization walked around, entirely
Device, which is met, prepares the current demand of any direction sample preparation in sample in focused ion beam two-beam instrument, increase focus from
The flexibility ratio of beamlet two-beam instrument sample making technology, breaches standard sample method at this stage, and for the material of film-form
It can be sampled, widen the range of research material significantly.
Present invention is further described in detail with reference to the accompanying drawing.
Detailed description of the invention
Fig. 1 the application axial rotating device assembling schematic diagram.
Description of symbols:
1- shifts needle point, and 2- shifts needle point grain-clamping table, 3- live spindle, 4- angle console, 5- angle instruction disk and finger
Needle, 6- rotating handle, 7- device pedestal, the bottom 8- fixed link, 9- pointer ring.
Specific embodiment
As shown in Figure 1, the present invention provide it is a kind of for extracting in rotary-focusing ion beam two-beam instrument sample making course
The axial rotating device of specified region samples item, device include: transfer needle point 1, transfer needle point grain-clamping table 2, live spindle 3, angle
Spend console 4, angle instruction disk and pointer 5, rotating handle 6, device pedestal 7.
The transfer needle point 1 is made of cylinder and front end circular cone, and the point diameter of tapered segment is used for less than 500 nanometers
The micro-nano size material taken out is accepted, column part diameter is 1.0mm~1.2mm.
2 bottom fixed link of the transfer needle point grain-clamping table, 8 one end and focused ion beam/scanning electron microscope double-beam system rotate bottom
Seat connection, one end connect with the needle point grain-clamping table main body by screw thread and clamp the transfer needle point；With instrument rotating base
Its shape of coupling part will reserve attachment device with pedestal and match, highly according to instrument it needs to be determined that.
Described device overall material is hard aluminium alloy.
The live spindle 3 is made of three sections of cylinders, first segment body length be 25mm~27mm, diameter be 5.5mm~
6.5mm, front end have a lateral cylindrical hole to be slightly larger than the diameter of the transfer needle point for placing needle point sample, diameter, and length is
There are a threaded hole M2 in 4.0mm~6.0mm, cylindrical hole middle part top, and screw screws in threaded hole for fixing needle point sample.
The second segment body length of the live spindle 3 is 10mm~12mm, and is equipped with M5 external screw thread.
The third section body length of the live spindle 3 is 5.0mm~7.0mm, and is equipped with M2 external screw thread.
4 side of angle console is transversely provided with outside M5 of the threaded hole M5 for connecting the live spindle second half section
Screw thread.
4 other side of angle console is vertically equipped with a threaded hole M5, and the threaded hole is for connecting described device bottom
Threaded post on seat 7 simultaneously controls the height of the live spindle 3 by control screw-in degree.
6 main body of rotating handle is that a diameter is 3.0mm~4.0mm, and length is the cylinder of 18mm~20mm, and tail end connects
One ellipsoid rotates handle.
There is a threaded hole M2 in 6 front end of rotating handle, and depth is slightly larger than half section of live spindle of the external screw thread
The length of M2.
The angle indicator is an annulus, and internal diameter is 2.0mm~2.2mm, for across the of the live spindle 3
The external screw thread M2 of three sections of cylinders.
The angle indicator material is stainless steel.
Described device base bottom is that a diameter is 22mm~24mm, is highly the cylindrical body of 6mm~8mm.
There is a threaded post M5 on the cylindrical body, the threaded post height is slightly larger than the spiral shell in the angle console
Pit M5 depth.
The course of work is as follows: material is sticked to transfer needle point front end by the nanometer hand in operation focused ion beam two-beam instrument,
Needle point will be shifted by manual operation to be clamped on transfer needle point grain-clamping table, and the threaded post M5 on device pedestal is screwed in into angle control
The threaded hole M5 of platform vertical direction processed simultaneously controls screw-in depth and makes to shift needle point tail portion and be capable of clamping aperture in live spindle front end
In, the external screw thread M5 of live spindle is screwed in into the threaded hole M5 on angle console, the external screw thread M2 being followed by and rotating handle phase
Connect and clamp pointer, micro-nano size material is rotated to by required angle by rotation rotating handle, after the completion with focus from
The other end of nanometer hand connection micro-nano size material in beamlet two-beam instrument, is interrupted micro-nano size material and is turned using the particle beams
The connection of needle point is moved, control nanometer hand removes material, and sample is processed into instrument.
Claims (10)
1. a kind of axial rotating device, which is characterized in that described device includes:
It shifts needle point (1): for shifting sample；
Shift needle point grain-clamping table (2): for clamping transfer needle point (1), the transfer needle point (1) is in transfer needle point grain-clamping table (2)
In can axial-rotation setting；
Live spindle (3): front end setting is in inverted " t " type groove, and the transfer needle point (1) is fixed in the slot；
Rotating handle (6): connecting with the live spindle (3), live spindle (3) rotation is driven, thus mobilization needle point (1)
Rotation.
2. the apparatus according to claim 1, which is characterized in that transfer needle point (1) includes cylinder and the front end of rear end
Circular cone, the point diameter of tapered segment less than 500 nanometers, for accept take out micro-nano size material, column part diameter
For 1.0mm-1.2mm.
3. the apparatus according to claim 1, which is characterized in that it further include bottom fixed link (8), the transfer needle point clamping
Platform is provided with T-slot in (2), and wherein the transverse groove of T-slot is cylindrical hole, vertical with transverse groove to set for transfer needle point (1) insertion
The vertical slot set is threaded hole；The bottom fixed link (8) is stepped cylinder axis, the lesser portion perimeter setting of upper diameter
External screw thread, the top of bottom fixed link and the vertical threaded hole of transfer needle point grain-clamping table (2) are threadedly engaged, to realize transfer needle
The adjusting of sharp grain-clamping table (2) height；The lower part of the bottom fixed link (8) and focused ion beam/scanning electron microscope double-beam system revolve
Turn pedestal connection.
4. device according to claim 3, which is characterized in that the shape of bottom fixed link (8) lower part and rotation bottom
The shape matching of seat coupling part.
5. the apparatus according to claim 1, which is characterized in that further include angle console (4) and device pedestal (7)；Institute
Stating live spindle (3) is the multi-diameter shaft with two-stage step, including sequentially connected first part, second part and third portion
Point, the diameter of the first part, second part and Part III is sequentially reduced；Setting is in inverted " t " type in the first part
Slot, the transfer needle point (1) are fixed in the slot, and external screw thread is arranged in the second part periphery, and vertical spiral shell is arranged in inside
Pit；The Part III periphery is external screw thread；Lateral internal thread hole is arranged in the angle console (4), with live spindle (3)
The external screw thread of second part cooperates；Described device pedestal (7) top is with externally threaded cylinder, with live spindle (3) the
The vertical threaded hole cooperation of two parts, realizes the adjusting of height；The rotating handle (6) is that tail end connects ellipsoid rotation handle
Cylinder, a threaded hole is arranged in cylinder front end, and the Part III of threaded hole and live spindle (3) is threadedly engaged fixation.
6. device according to claim 5, which is characterized in that the length of the first part of the live spindle (3) is
25mm-27mm, diameter 5.5mm-6.5mm, the length of cylindrical hole described in front end are 4.0mm-6.0mm, the second part
Length is 10mm-12mm, and the length of the Part III is 5.0mm-7.0mm.
7. device according to claim 5, which is characterized in that the diameter of rotating handle (6) column part is
The depth of 3.0mm-4.0mm, length 18mm-20mm, the threaded hole of rotating handle (6) are greater than live spindle (3) Part III
Length.
8. device according to claim 5, which is characterized in that further include angle instruction disk and pointer (5), be arranged in angle
For console (4) close to the side of rotating handle (6), the angle instruction disk and pointer (5) include pointer ring (9), the pointer
Ring (9) is set on the Part III of live spindle (3).
9. device according to claim 8, which is characterized in that the material of the pointer ring (9) is stainless steel, described entire
The material of device other parts is hard aluminium alloy.
10. device according to claim 5, which is characterized in that the bottom of described device pedestal (7) is cylindrical body, bottom
The size of cylindrical body is that diameter is 22mm-24mm, is highly 6mm-8mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910145691.7A CN109813586A (en) | 2019-02-27 | 2019-02-27 | A kind of axial rotating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910145691.7A CN109813586A (en) | 2019-02-27 | 2019-02-27 | A kind of axial rotating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109813586A true CN109813586A (en) | 2019-05-28 |
Family
ID=66607647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910145691.7A Pending CN109813586A (en) | 2019-02-27 | 2019-02-27 | A kind of axial rotating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109813586A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023279454A1 (en) * | 2021-07-08 | 2023-01-12 | 长鑫存储技术有限公司 | Sample rotation system and method |
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|---|---|---|---|---|
| GB8729262D0 (en) * | 1987-12-15 | 1988-01-27 | Vg Instr Group | Sample treatment apparatus |
| JP2001066231A (en) * | 1999-08-31 | 2001-03-16 | Hitachi Ltd | Apparatus and method for forming sample |
| JP2001311681A (en) * | 2000-04-28 | 2001-11-09 | Nippon Steel Corp | Method for preparing sample for transmission electron microscope observation and sampling apparatus |
| US20040178355A1 (en) * | 2003-03-13 | 2004-09-16 | Jorgen Rasmussen | Sample manipulation system |
| US20040246465A1 (en) * | 2003-05-06 | 2004-12-09 | Kouji Iwasaki | Micro-sample pick-up apparatus and micro-sample pick-up method |
| JP2007115666A (en) * | 2005-09-20 | 2007-05-10 | Hironari Miyazaki | Sample holder |
| US8440982B1 (en) * | 2011-12-19 | 2013-05-14 | Korea Basic Science Institute | Cryo transfer holder for transmission electron microscope |
| CN105758876A (en) * | 2016-04-17 | 2016-07-13 | 北京工业大学 | Double-shaft tilting sample holder for transmission electron microscope |
| CN109243951A (en) * | 2018-08-28 | 2019-01-18 | 南京理工大学 | One kind being suitable for three-dimensional atom probe and focused ion beam double-beam system sample stage |
| CN209992257U (en) * | 2019-02-27 | 2020-01-24 | 南京理工大学 | Axial rotating device |
-
2019
- 2019-02-27 CN CN201910145691.7A patent/CN109813586A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8729262D0 (en) * | 1987-12-15 | 1988-01-27 | Vg Instr Group | Sample treatment apparatus |
| JP2001066231A (en) * | 1999-08-31 | 2001-03-16 | Hitachi Ltd | Apparatus and method for forming sample |
| JP2001311681A (en) * | 2000-04-28 | 2001-11-09 | Nippon Steel Corp | Method for preparing sample for transmission electron microscope observation and sampling apparatus |
| US20040178355A1 (en) * | 2003-03-13 | 2004-09-16 | Jorgen Rasmussen | Sample manipulation system |
| US20040246465A1 (en) * | 2003-05-06 | 2004-12-09 | Kouji Iwasaki | Micro-sample pick-up apparatus and micro-sample pick-up method |
| JP2007115666A (en) * | 2005-09-20 | 2007-05-10 | Hironari Miyazaki | Sample holder |
| US8440982B1 (en) * | 2011-12-19 | 2013-05-14 | Korea Basic Science Institute | Cryo transfer holder for transmission electron microscope |
| CN105758876A (en) * | 2016-04-17 | 2016-07-13 | 北京工业大学 | Double-shaft tilting sample holder for transmission electron microscope |
| CN109243951A (en) * | 2018-08-28 | 2019-01-18 | 南京理工大学 | One kind being suitable for three-dimensional atom probe and focused ion beam double-beam system sample stage |
| CN209992257U (en) * | 2019-02-27 | 2020-01-24 | 南京理工大学 | Axial rotating device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023279454A1 (en) * | 2021-07-08 | 2023-01-12 | 长鑫存储技术有限公司 | Sample rotation system and method |
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