JP2000505944A - 低温試料ホルダを含む粒子光学装置 - Google Patents
低温試料ホルダを含む粒子光学装置Info
- Publication number
- JP2000505944A JP2000505944A JP10528584A JP52858498A JP2000505944A JP 2000505944 A JP2000505944 A JP 2000505944A JP 10528584 A JP10528584 A JP 10528584A JP 52858498 A JP52858498 A JP 52858498A JP 2000505944 A JP2000505944 A JP 2000505944A
- Authority
- JP
- Japan
- Prior art keywords
- sample holder
- sample
- cooling
- particle
- conduit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2001—Maintaining constant desired temperature
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Microscoopes, Condenser (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1. 装置の中で調査されるべき試料(34)を支持する操作可能な試料ホルダ (7)と、冷却導管手段を通じて上記試料に接続される冷源を設けられた上記試 料を冷却する冷却装置(22,28)とを含む粒子光学装置であって、 上記試料ホルダと別個に取り付けられ、試料ホルダ(7)との間で試料(34 )を移す運搬ユニット(13)を設けられることを特徴とする粒子光学装置。 2. 光学要素の粒子光学柱状部を含み、運搬ユニット(13)は上記粒子光学 柱状部の側壁(17)を通じ試料ホルダ(7)との間で試料(34)を移すよう 配置される、請求項1記載の粒子光学装置。 3. 上記冷却導管手段(22,30)は上記装置の内側に配置される試料ホル ダ(7)の端(20)と冷源(28)との間に独立に設けられる、請求項1又は 2記載の粒子光学装置。 4. 上記冷却導管手段(22,30)は上記装置の内側に配置された試料ホル ダの端(20)に恒久的に接続される、請求項3記載の粒子光学装置。 5. 上記冷却導管手段(22,30)は上記装置の内側に配置された試料ホル ダの端(20)に接続される柔軟な熱導管(30)を含む、請求項1乃至4のう ちいずれか1項記載の粒子光学装置。 6. 柔軟な熱導管(42)に対する上記試料ホルダの変位が減少するよう柔軟 な熱導管(42)を変位させる変位手段(44,4 6)を設けられた、請求項5記載の粒子光学装置。 7. 上記変位手段(44,46)は上記試料ホルダと別個の、その回転軸が上 記試料ホルダの回転軸と略一致する回転ユニット(44)を含み、柔軟な熱導管 (30)の一端は該回転ユニットに接続され、一方他端は装置の内側に配置され る試料ホルダ(20)の端に接続される、請求項6記載の粒子光学装置。 8. 上記試料ホルダは上記装置の内側に配置される端と上記装置の外側に配置 される端との間に熱絶縁部(32)を設けられる、請求項1乃至7のうちいずれ か1項記載の粒子光学装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP96203667 | 1996-12-23 | ||
EP96203667.9 | 1996-12-23 | ||
PCT/IB1997/001539 WO1998028776A2 (en) | 1996-12-23 | 1997-12-08 | Particle-optical apparatus including a low-temperature specimen holder |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2000505944A true JP2000505944A (ja) | 2000-05-16 |
Family
ID=8224745
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10528584A Ceased JP2000505944A (ja) | 1996-12-23 | 1997-12-08 | 低温試料ホルダを含む粒子光学装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5986270A (ja) |
EP (2) | EP1102304B1 (ja) |
JP (1) | JP2000505944A (ja) |
DE (1) | DE69739785D1 (ja) |
WO (1) | WO1998028776A2 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007026815A (ja) * | 2005-07-14 | 2007-02-01 | Kyoto Univ | トップエントリ式試料ステージ傾斜装置 |
JP2007299753A (ja) * | 2006-05-01 | 2007-11-15 | Fei Co | 温度スイッチを備える粒子−光学装置 |
JP2009014719A (ja) * | 2007-06-29 | 2009-01-22 | Fei Co | マニピュレータへのサンプル取付け方法 |
JP2011525037A (ja) * | 2008-06-20 | 2011-09-08 | カール ツァイス エヌティーエス エルエルシー | イオン源、システムおよび方法 |
JP2014521976A (ja) * | 2011-08-05 | 2014-08-28 | イー エイ フィシオネ インストルメンツ インコーポレーテッド | 改良型低温試料ホルダ |
JP2015068832A (ja) * | 2013-09-30 | 2015-04-13 | エフ イー アイ カンパニFei Company | 荷電粒子顕微鏡用の極低温試料の調製 |
WO2015053020A1 (ja) * | 2013-10-07 | 2015-04-16 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置および荷電粒子線装置用試料保持装置 |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3663056B2 (ja) * | 1998-07-23 | 2005-06-22 | 株式会社日立製作所 | 電子顕微鏡用試料加熱ホルダ及び試料観察方法 |
NL1020936C2 (nl) * | 2002-06-25 | 2003-12-30 | Univ Delft Tech | Preparaathouder voor een elektronenmicroscoop, samenstel van een preparaathouder en een elektronenmicroscoop en werkwijze voor het reduceren van thermische drift in een elektronenmicroscoop. |
NL1021376C1 (nl) * | 2002-09-02 | 2004-03-03 | Fei Co | Werkwijze voor het verkrijgen van een deeltjes-optische afbeelding van een sample in een deeltjes-optisch toestel. |
US7557360B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7554096B2 (en) * | 2003-10-16 | 2009-06-30 | Alis Corporation | Ion sources, systems and methods |
US7557358B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US9159527B2 (en) | 2003-10-16 | 2015-10-13 | Carl Zeiss Microscopy, Llc | Systems and methods for a gas field ionization source |
US7557359B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7554097B2 (en) * | 2003-10-16 | 2009-06-30 | Alis Corporation | Ion sources, systems and methods |
US7786451B2 (en) | 2003-10-16 | 2010-08-31 | Alis Corporation | Ion sources, systems and methods |
US7557361B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7786452B2 (en) | 2003-10-16 | 2010-08-31 | Alis Corporation | Ion sources, systems and methods |
KR20050040434A (ko) * | 2003-10-28 | 2005-05-03 | 삼성전자주식회사 | 집속 이온빔 장치의 시편 냉각 시스템 |
EP1852889A3 (en) * | 2006-05-01 | 2007-12-05 | FEI Company | Particle-optical apparatus with temperature switch |
EP1883095A1 (en) * | 2006-07-26 | 2008-01-30 | FEI Company | Transfer mechanism for transferring a specimen |
US7742310B2 (en) * | 2006-09-29 | 2010-06-22 | Hewlett-Packard Development Company, L.P. | Sequencer |
US7397666B2 (en) * | 2006-10-25 | 2008-07-08 | Hewlett-Packard Development Company, L.P. | Wedge lock |
US7804068B2 (en) * | 2006-11-15 | 2010-09-28 | Alis Corporation | Determining dopant information |
US7884326B2 (en) * | 2007-01-22 | 2011-02-08 | Fei Company | Manipulator for rotating and translating a sample holder |
EP2009421A1 (en) * | 2007-06-29 | 2008-12-31 | FEI Company | Method for separating a lamella for TEM inspection from a core sample |
EP2009420A1 (en) * | 2007-06-29 | 2008-12-31 | FEI Company | Method for attaching a sample to a manipulator |
EP2031633B1 (en) | 2007-08-27 | 2012-09-19 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle device with a gas ion source with high mechanical stability |
EP2051280A1 (en) * | 2007-10-18 | 2009-04-22 | The Regents of the University of California | Motorized manipulator for positioning a TEM specimen |
EP2182544A1 (en) | 2008-10-31 | 2010-05-05 | FEI Company | Charged-particle optical system with dual specimen loading options |
JP5250470B2 (ja) * | 2009-04-22 | 2013-07-31 | 株式会社日立ハイテクノロジーズ | 試料ホールダ,該試料ホールダの使用法、及び荷電粒子装置 |
EP2278306A1 (en) * | 2009-07-13 | 2011-01-26 | Fei Company | Method for inspecting a sample |
EP2316565A1 (en) | 2009-10-26 | 2011-05-04 | Fei Company | A micro-reactor for observing particles in a fluid |
US8336405B2 (en) * | 2010-07-28 | 2012-12-25 | E.A. Fischione Instruments, Inc. | Cryogenic specimen holder |
EP2458354A1 (en) | 2010-11-24 | 2012-05-30 | Fei Company | Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus |
US20120286175A1 (en) * | 2011-05-12 | 2012-11-15 | Gatan, Inc. | Cooled manipulator tip for removal of frozen material |
US20130256558A1 (en) * | 2012-03-29 | 2013-10-03 | Christian Dietl | Apparatus for contaminants being deposited thereon |
JP5732006B2 (ja) | 2012-06-28 | 2015-06-10 | 株式会社日立ハイテクノロジーズ | 試料冷却ホルダー及び冷却源容器 |
EP2765591B1 (en) | 2013-02-08 | 2016-07-13 | FEI Company | Sample preparation stage |
EP3032564A1 (en) * | 2014-12-11 | 2016-06-15 | FEI Company | Improved cryogenic specimen holder for a charged particle microscope |
JP6471254B1 (ja) * | 2018-04-10 | 2019-02-13 | 株式会社メルビル | 試料ホルダー |
WO2021008679A1 (en) * | 2019-07-12 | 2021-01-21 | Kiutra Gmbh | Sample transfer apparatus and method for transferring a sample holder into and out of a vacuum chamber |
US20220404247A1 (en) * | 2021-06-21 | 2022-12-22 | Fei Company | Vibration-free cryogenic cooling |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3761709A (en) * | 1971-03-16 | 1973-09-25 | Jeol Ltd | Method and apparatus for observing biological specimens using a scanning electron microscope |
US3915118A (en) * | 1973-09-17 | 1975-10-28 | Etec Corp | Specimen coating device for an SEM |
JPS5478076A (en) * | 1977-12-05 | 1979-06-21 | Hitachi Ltd | Frozen sample observation device of scanning electron microscope and similar unit |
US4262194A (en) * | 1979-12-18 | 1981-04-14 | The United States Of America As Represented By The Department Of Health, Education & Welfare | High resolution electron microscope cold stage |
US4591722A (en) * | 1982-04-20 | 1986-05-27 | The University Court Of The University Of Glasgow | Low temperature stage for microanalysis |
US4516435A (en) * | 1983-10-31 | 1985-05-14 | The United States Of America As Represented By The United States National Aeronautics And Space Administration | Precision manipulator heating and cooling apparatus for use in UHV systems with sample transfer capability |
JPH0374036A (ja) * | 1989-08-11 | 1991-03-28 | Jeol Ltd | 電子顕微鏡における試料交換装置 |
NL8902568A (nl) * | 1989-10-17 | 1991-05-16 | Philips Nv | Vacuuem systeem voorzien van een evacueerbaar huis, een objecthouder en een losneembaar daarmee gekoppelde objectdrager. |
-
1997
- 1997-12-08 WO PCT/IB1997/001539 patent/WO1998028776A2/en not_active Application Discontinuation
- 1997-12-08 DE DE69739785T patent/DE69739785D1/de not_active Expired - Lifetime
- 1997-12-08 EP EP01200763A patent/EP1102304B1/en not_active Expired - Lifetime
- 1997-12-08 JP JP10528584A patent/JP2000505944A/ja not_active Ceased
- 1997-12-08 EP EP97913390A patent/EP0901686A2/en not_active Withdrawn
- 1997-12-15 US US08/990,870 patent/US5986270A/en not_active Expired - Lifetime
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007026815A (ja) * | 2005-07-14 | 2007-02-01 | Kyoto Univ | トップエントリ式試料ステージ傾斜装置 |
JP4679279B2 (ja) * | 2005-07-14 | 2011-04-27 | 日本電子株式会社 | トップエントリ式試料ステージ傾斜装置 |
JP2007299753A (ja) * | 2006-05-01 | 2007-11-15 | Fei Co | 温度スイッチを備える粒子−光学装置 |
JP2009014719A (ja) * | 2007-06-29 | 2009-01-22 | Fei Co | マニピュレータへのサンプル取付け方法 |
JP2011525037A (ja) * | 2008-06-20 | 2011-09-08 | カール ツァイス エヌティーエス エルエルシー | イオン源、システムおよび方法 |
JP2014521976A (ja) * | 2011-08-05 | 2014-08-28 | イー エイ フィシオネ インストルメンツ インコーポレーテッド | 改良型低温試料ホルダ |
JP2015068832A (ja) * | 2013-09-30 | 2015-04-13 | エフ イー アイ カンパニFei Company | 荷電粒子顕微鏡用の極低温試料の調製 |
WO2015053020A1 (ja) * | 2013-10-07 | 2015-04-16 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置および荷電粒子線装置用試料保持装置 |
JP2015076147A (ja) * | 2013-10-07 | 2015-04-20 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置および荷電粒子線装置用試料保持装置 |
US10068745B2 (en) | 2013-10-07 | 2018-09-04 | Hitachi High-Technologies Corporation | Charged particle beam device and sample holder for charged particle beam device |
Also Published As
Publication number | Publication date |
---|---|
US5986270A (en) | 1999-11-16 |
EP1102304A3 (en) | 2006-05-31 |
WO1998028776A2 (en) | 1998-07-02 |
EP1102304B1 (en) | 2010-02-24 |
WO1998028776A3 (en) | 1998-09-17 |
EP0901686A2 (en) | 1999-03-17 |
DE69739785D1 (de) | 2010-04-08 |
EP1102304A2 (en) | 2001-05-23 |
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