JP2000230932A - Method for processing carbon nanotube - Google Patents
Method for processing carbon nanotubeInfo
- Publication number
- JP2000230932A JP2000230932A JP11033368A JP3336899A JP2000230932A JP 2000230932 A JP2000230932 A JP 2000230932A JP 11033368 A JP11033368 A JP 11033368A JP 3336899 A JP3336899 A JP 3336899A JP 2000230932 A JP2000230932 A JP 2000230932A
- Authority
- JP
- Japan
- Prior art keywords
- carbon nanotube
- plating
- diameter
- nanotube
- carbon nanotubes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、電界放射のエミッター
やＳＴＭ，ＡＦＭのプローブなどの機能材料又は複合強
化材料などの構造用材料として期待出来るカーボンナノ
チューブの加工方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for processing carbon nanotubes which can be expected as structural materials such as functional materials such as field emission emitters, STM and AFM probes, and composite reinforcing materials.
【０００２】[0002]
【従来の技術および課題】近年ナノメーターの領域の物
質の研究が進み、その中でも特徴ある構造を有すす固体
炭素が注目されている。例えば、サッカーボール型Ｃ60
カーボンクラスターを初めとするフラーレン（ｆｕｌｌ
ｕｒｅｎｅ）や球面状黒鉛層からなるたまねぎ状構造を
した炭素粒子（Ｂｕｃｋｙ ｏｎｉｏｎ）が最近の固体
物理の分野で盛んに取り上げられている。また、１９９
１年にはフラーレン分子の関連物質として新しいタイプ
の炭素繊維であるカーボンナノチューブが発見された。
このカーボンナノチューブは直径１〜３０ｎｍ、長さ１
μｍ程度の繊維状のものであり、グラファイト構造を持
つシートが円筒状に丸まりこれが入れ子状に配置した構
造である。2. Description of the Related Art In recent years, research on substances in the nanometer range has been advanced, and among them, solid carbon having a characteristic structure has attracted attention. For example, soccer ball type C60
Fullerenes including carbon clusters
Carbon particles (Bucky onions) having an onion-like structure composed of a urene) or a spherical graphite layer have been actively taken up in the field of solid-state physics recently. 199
One year, a new type of carbon fiber, a carbon nanotube, was discovered as a related substance of fullerene molecules.
This carbon nanotube has a diameter of 1 to 30 nm and a length of 1
It is a fibrous material having a thickness of about μm, and has a structure in which a sheet having a graphite structure is rolled into a cylindrical shape and nested.
【０００３】これらの物質は科学的な側面だけでなく実
用材料として興味が持たれている。例えばＣ60結晶にＫ
をドープすることにより超伝導性を示すことが知られて
いる。また、カーボンナノチューブは究極の炭素繊維と
いえる構造を持っており、化学的特性、電子的特性、力
学的特性及び新機能の発現に大きな期待を寄せられてい
る。実際、電界放射のエミッターやＳＴＭ，ＡＦＭのプ
ローブとして用いた研究がなされている。更に、これら
の力学的特性は従来の炭素繊維を凌ぐ強度と剛性を持つ
と期待され、最近の研究では塑性変形の可能性も示され
ている。[0003] These substances are of interest not only for scientific aspects but also as practical materials. For example, K to C60 crystal
Is known to exhibit superconductivity by doping. Further, carbon nanotubes have a structure that can be said to be the ultimate carbon fiber, and are expected to exhibit chemical, electronic, mechanical and new functions. In fact, studies have been made on using it as an emitter for field emission and as a probe for STM and AFM. Furthermore, these mechanical properties are expected to have strength and rigidity exceeding conventional carbon fibers, and recent studies have shown the possibility of plastic deformation.
【０００４】さらに、カーボンナノチューブの作成方法
は、ＣＶＤ法、アーク法、レーザーアブレイション法の
３通りが現在行われており、この製法でカーボンナノチ
ューブを作り，遠心法、電気泳動法等で精製することに
より、ある程度カーボンナノチューブが作成できるよう
になってきた。の加工方法材料とする。[0004] Furthermore, three methods of producing carbon nanotubes are currently performed, namely, a CVD method, an arc method, and a laser ablation method. Carbon nanotubes are produced by this method and purified by a centrifugation method, an electrophoresis method or the like. This has made it possible to produce carbon nanotubes to some extent. Processing method material.
【０００５】ところが、このように作成されたカーボン
ナノチューブを加工しようにも、直径数ナノメートルと
いう微小なため、電子顕微鏡でも容易にみることができ
ないため、これを切断、接着等の加工をして実用化する
ことが困難であった。[0005] However, the carbon nanotubes produced in this manner cannot be easily seen even with an electron microscope because they have a small diameter of several nanometers. It was difficult to put it to practical use.
【０００６】そこで、この発明の目的は、カーボンナノ
チューブを電子顕微鏡で見える大きさまでメッキ等によ
り厚みを増し、その状態で加工し、その後エッチング等
なより、元の径にする加工方法を提供するものである。Accordingly, an object of the present invention is to provide a processing method of increasing the thickness of a carbon nanotube by plating or the like to a size that can be seen with an electron microscope, processing the carbon nanotube in that state, and then etching the carbon nanotube to obtain the original diameter. It is.
【０００７】[0007]
【課題を解決するための手段】本発明は、前記従来の欠
点を解決するためになされたもので、本発明の請求項１
記載のカーボンナノチューブの加工方法においては、平
均径ナノメートルのカーボンナノチューブに銀メッキま
たは無電解ニッケルメッキ等により厚さミクロンになる
までメッキ処理し、そのメッキされたカーボンナノチュ
ーブをＳＴＭ，ＡＴＭのプローブ基材に溶着し、先端部
分だけエッチング処理によりメッキ部を除去して直径ナ
ノメートルのプローブを作成するようにしたものであ
る。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional drawbacks.
In the method for processing carbon nanotubes described above, a carbon nanotube having an average diameter of nanometers is plated by silver plating or electroless nickel plating to a thickness of micron, and the plated carbon nanotube is subjected to STM or ATM probe base. The probe is welded to the material, and only the tip portion is etched to remove the plated portion to produce a nanometer probe.
【０００８】[0008]
【作用】本発明のカーボンナノチューブの加工方法にお
いては、カーボンナノチューブを電子顕微鏡で見える大
きさまでメッキ等により厚みを増し、その状態で加工
し、その後エッチング等なより、元の径にするので、容
易に加工でき、直径数ナノメートルのカーボンナノチュ
ーブの特性を発揮させることができる。In the method for processing carbon nanotubes of the present invention, the carbon nanotubes are increased in thickness by plating or the like to a size that can be seen with an electron microscope, processed in that state, and then returned to the original diameter by etching or the like. And can exhibit the characteristics of carbon nanotubes having a diameter of several nanometers.
【０００９】[0009]
【実施例】まず、カーボンナノチューブの作成方法は、
ＣＶＤ法、アーク法、レーザーアブレイション法の３通
りにより行い、得られたカーボンナノチューブの煤を、
遠心法、電気泳動法等で精製する。First, a method for producing carbon nanotubes is as follows.
Performed by the CVD method, the arc method, and the laser ablation method, and obtained the soot of the carbon nanotube,
Purify by centrifugation, electrophoresis, etc.
【００１０】次に、得られたカーボンナノチューブの径
を太くするためメタライジングするわけであるが、メタ
ライジング方法としては、真空下での金属蒸着あるいは
それに類する方法とメッキによる方法の二つがあげられ
る。Next, metallizing is performed to increase the diameter of the obtained carbon nanotube. There are two metallizing methods: metal deposition under vacuum or a method similar thereto, and plating. .
【００１１】本実施例ではメタライジング法としてはメ
ッキ法を使用した。所で、かかる無電解メッキは、洗浄
等の細かい工程を略すると次の三工程に従って実施し
た、即ち、（１）前処理（２）触媒付与・活性化処理
（３）無電解メッキ処理である。無電解メッキ処理で
は、例えば塩化ニッケルと還元剤とを組合せた液で処理
し、ニッケル無電解メッキ層を形成せしめることにな
る。In this embodiment, a plating method is used as the metallizing method. Incidentally, such electroless plating is performed in accordance with the following three steps if fine steps such as cleaning are omitted, that is, (1) pretreatment, (2) catalyst application / activation treatment, and (3) electroless plating treatment. . In the electroless plating process, for example, a nickel electroless plating layer is formed by treating with a solution in which nickel chloride and a reducing agent are combined.
【００１２】かくして得られた無電解メッキ層を数ミク
ロン施したカーボンナノチューブを電子顕微鏡で見なが
ら、ＳＴＭまたはＡＦＭのプローブ基材にマニュプレー
タの操作で容易に溶着し、その後プローブに必要な先端
部分だけエッチング処理してメッキを剥がすことによ
り、先端径数ナノメートルという極細のプローブを作成
できた。ここで、例えばチタン入り銀ろうのような活性
金属を前処理として入れておくと、ＳＴＭまたはＡＦＭ
のプローブ基材への溶着が容易となる。While observing the thus obtained carbon nanotubes coated with the electroless plating layer by several microns with an electron microscope, the carbon nanotubes are easily welded to the STM or AFM probe base material by manipulator operation, and then only the tip necessary for the probe is formed. By peeling off the plating by etching, an extremely fine probe with a tip diameter of several nanometers could be made. Here, if an active metal such as silver solder containing titanium is added as a pretreatment, STM or AFM is used.
Is easily welded to the probe base material.
【００１３】[0013]
【発明の効果】以上の説明から明らかなように、本発明
のカーボンナノチューブの加工方法においては、カーボ
ンナノチューブを電子顕微鏡で見える大きさまでメッキ
等により厚みを増し、その状態で加工し、その後エッチ
ング等なより、元の径にするので、容易に加工でき、直
径数ナノメートルのカーボンナノチューブの特性を発揮
させることができる加工方法を提供できる。As is apparent from the above description, in the method for processing carbon nanotubes of the present invention, the thickness of carbon nanotubes is increased by plating or the like to a size that can be seen with an electron microscope, processed in that state, and then etched. In particular, since the original diameter is used, it is possible to provide a processing method that can be easily processed and can exhibit the characteristics of carbon nanotubes having a diameter of several nanometers.
─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成１１年２月１７日（１９９９．２．１
７）[Submission date] February 17, 1999 (1999.2.1
7)
【手続補正１】[Procedure amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００４[Correction target item name] 0004
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【０００４】さらに、カーボンナノチューブの作成方法
は、ＣＶＤ法、アーク法、レーザーアブレイション法の
３通りが現在行われており、この製法でカーボンナノチ
ューブを作り，遠心法、電気泳動法等で精製することに
より、ある程度カーボンナノチューブが作成できるよう
になってきた。[0004] Furthermore, three methods of producing carbon nanotubes are currently performed, namely, a CVD method, an arc method, and a laser ablation method. Carbon nanotubes are produced by this method and purified by a centrifugation method, an electrophoresis method or the like. This has made it possible to produce carbon nanotubes to some extent.
Claims (1)
ーブに銀メッキまたは無電解ニッケルメッキ等により厚
さミクロンになるまでメッキ処理し、そのメッキされた
カーボンナノチューブをＳＴＭまたはＡＦＭのプローブ
基材に溶着し、先端部分だけエッチング処理によりメッ
キ部を除去して直径ナノメートルのプローブを作成する
ことを特徴とするカーボンナノチューブの加工方法。1. A carbon nanotube having an average diameter of nanometers is plated by silver plating or electroless nickel plating to a thickness of micron until the plated carbon nanotube is welded to an STM or AFM probe base material. A method for processing a carbon nanotube, wherein a plating part is removed by etching only a tip part to form a nanometer-diameter probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11033368A JP2000230932A (en) | 1999-02-10 | 1999-02-10 | Method for processing carbon nanotube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11033368A JP2000230932A (en) | 1999-02-10 | 1999-02-10 | Method for processing carbon nanotube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000230932A true JP2000230932A (en) | 2000-08-22 |
Family
ID=12384653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11033368A Withdrawn JP2000230932A (en) | 1999-02-10 | 1999-02-10 | Method for processing carbon nanotube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000230932A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002022499A1 (en) * | 2000-09-18 | 2002-03-21 | President And Fellows Of Harvard College | Fabrication of nanotube microscopy tips |
| WO2004102582A1 (en) * | 2003-03-05 | 2004-11-25 | University Of Florida | Carbon nanotube-based probes, related devices and methods of forming the same |
| KR20080053571A (en) * | 2006-12-11 | 2008-06-16 | 광주과학기술원 | Method for analysing nano-structure using electron microscope |
| KR101185009B1 (en) | 2004-12-24 | 2012-09-21 | 재단법인 포항산업과학연구원 | Manufacturing method of metal composite carbon nano tube |
-
1999
- 1999-02-10 JP JP11033368A patent/JP2000230932A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002022499A1 (en) * | 2000-09-18 | 2002-03-21 | President And Fellows Of Harvard College | Fabrication of nanotube microscopy tips |
| WO2004102582A1 (en) * | 2003-03-05 | 2004-11-25 | University Of Florida | Carbon nanotube-based probes, related devices and methods of forming the same |
| KR101185009B1 (en) | 2004-12-24 | 2012-09-21 | 재단법인 포항산업과학연구원 | Manufacturing method of metal composite carbon nano tube |
| KR20080053571A (en) * | 2006-12-11 | 2008-06-16 | 광주과학기술원 | Method for analysing nano-structure using electron microscope |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20060509 |