JP2000157826A - Chemical filter, method for judging replacement timing therefor and air purifying apparatus - Google Patents
Chemical filter, method for judging replacement timing therefor and air purifying apparatusInfo
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- JP2000157826A JP2000157826A JP10336246A JP33624698A JP2000157826A JP 2000157826 A JP2000157826 A JP 2000157826A JP 10336246 A JP10336246 A JP 10336246A JP 33624698 A JP33624698 A JP 33624698A JP 2000157826 A JP2000157826 A JP 2000157826A
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- Prior art keywords
- filter
- adsorbent
- impurities
- physical adsorption
- impregnated
- Prior art date
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- Separation Of Gases By Adsorption (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、クリーンルームや
半導体装置の製造装置の空調システム等に適用されるケ
ミカルフィルター及びその交換判定法並びに気体浄化装
置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical filter applied to an air conditioning system of a clean room or a semiconductor device manufacturing apparatus, a method for determining replacement of the chemical filter, and a gas purifying apparatus.
【０００２】[0002]
【従来の技術】ＵＬＳＩ等の半導体装置の製造において
は、クリーンルーム、クリーンベンチ、クリーントンネ
ル等により、空気の清浄度、温度、湿度、振動、磁場ま
で厳しく管理された環境が不可欠である。また、このよ
うなクリーン化された環境下で使用される半導体装置の
製造装置には、装置自体にもクリーン化のための手段が
必要とされるものが多い。このようなクリーン化の要求
は次世代デバイスの製造では一層厳しくなり、優れたク
リーン化技術の開発がますます重要になってきている。2. Description of the Related Art In the manufacture of semiconductor devices such as ULSIs, an environment in which the cleanliness of air, temperature, humidity, vibration, and magnetic field are strictly controlled by a clean room, a clean bench, a clean tunnel, and the like is indispensable. In addition, many semiconductor device manufacturing devices used in such a clean environment require a means for cleaning the device itself. The demand for such cleanliness has become more severe in the production of next-generation devices, and the development of superior cleanliness technology has become increasingly important.
【０００３】空気の清浄度については、半導体装置の素
子の微細化に伴い、空気中の塵埃等の固体状不純物（パ
ーティクル）がまず初めに顕在化した。そして、これら
の空気中の塵埃等を除去するために、ＨＥＰＡフィルタ
やＵＬＰＡフィルタ等のパーティクル除去用のフィルタ
が用いられてきた。As for the cleanliness of air, solid-state impurities (particles) such as dust in the air have first become apparent with miniaturization of elements of semiconductor devices. Then, in order to remove the dust and the like in the air, a filter for removing particles such as a HEPA filter or an ULPA filter has been used.
【０００４】一方、素子の微細化に伴い、半導体装置の
製造においても新しい製造方法や装置が導入され、従来
は問題にされていなかった、洗浄工程やフォトレジスト
工程等で使用される化学物質（例えば、ＨＦやＨＣｌ、
Ｈ2ＳＯ4、Ｈ3ＢＯ3等の酸性ガス、ＮＨ3やアミン等の
塩基性ガス、有機性ガス）が、半導体の製造工程に悪影
響を与えるようになり、また、人体に健康上の問題を起
こしたりする虞があることが知られている。On the other hand, with the miniaturization of elements, new manufacturing methods and apparatuses have been introduced also in the manufacture of semiconductor devices, and chemical substances used in a cleaning process, a photoresist process, etc., which have not been a problem in the past, have been introduced. For example, HF, HCl,
Acid gases such as H 2 SO 4 and H 3 BO 3 , basic gases such as NH 3 and amines, and organic gases) adversely affect the semiconductor manufacturing process, and also pose a health problem to the human body. It is known that there is a risk of causing
【０００５】これらのガス状不純物は、前述のＨＥＰＡ
フィルタやＵＬＰＡフィルタ等のパーティクル除去用の
フィルタでは除去できない。そこで、これらガス状不純
物を除去するためにケミカルフィルタが用いられてい
る。[0005] These gaseous impurities are the same as those of the aforementioned HEPA.
It cannot be removed by a filter for removing particles such as a filter or a ULPA filter. Therefore, a chemical filter is used to remove these gaseous impurities.
【０００６】このケミカルフィルタには、ＨＦやＨＣ
ｌ、Ｈ2ＳＯ4、Ｈ3ＢＯ3等の酸性ガスと、ＮＨ3やアミ
ン等の塩基性ガスと、有機性ガスの全てを一種のフィル
タで除去できるものがない。そのため、酸性ガスやアル
カリ性ガス等のイオン性不純物を除去するためのフィル
タや、有機性ガスを除去するためのフィルタ等の異なる
タイプのフィルタを除去対象ごとに用いていた。[0006] This chemical filter includes HF and HC.
There is no filter that can remove all of an acidic gas such as 1, H 2 SO 4 and H 3 BO 3 , a basic gas such as NH 3 and an amine, and an organic gas with a kind of filter. Therefore, different types of filters, such as a filter for removing ionic impurities such as an acidic gas and an alkaline gas, and a filter for removing an organic gas, are used for each object to be removed.
【０００７】ここで、イオン性不純物とは、酸性ガスや
イオン性ガス等の酸性あるいはアルカリ性を示す極性の
大きい物質をいう。有機性不純物とは、固体表面に付着
しやすい有機物からなる比較的極性の小さい物質をい
う。[0007] Here, the ionic impurities refer to substances having a large polarity showing acidic or alkaline properties, such as acidic gas and ionic gas. The organic impurities are relatively small polar substances made of organic substances that easily adhere to the solid surface.
【０００８】イオン性不純物を除去できるフィルタは、
ガス状不純物をそのイオン性の中和により除去するもの
である。以下、このフィルタを「中和フィルタ」とい
う。この中和フィルタには、酸用と塩基用の２種類あ
り、目的とする不純物ガスの極性によって使い分ける。
一般には、繊維状のイオン交換樹脂からなるものが使用
されている。その他の中和フィルタとしては、活性炭に
その物理吸着能を利用して酸性または塩基性の材料を添
着してなるケミカルフィルタ（以下「添着型活性炭フィ
ルタ」という。）がある。この添着型活性炭フィルタ
は、酸性またはアルカリ性のイオン性不純物を、活性炭
に添着された酸性または塩基性材料との中和反応を伴う
化学吸着により除去する。[0008] A filter capable of removing ionic impurities includes:
It is to remove gaseous impurities by neutralizing their ionicity. Hereinafter, this filter is referred to as a “neutralization filter”. There are two types of neutralizing filters, one for acid and one for base, which are used depending on the polarity of the target impurity gas.
In general, those made of a fibrous ion exchange resin are used. As another neutralizing filter, there is a chemical filter (hereinafter, referred to as an "impregnated activated carbon filter") in which activated carbon is impregnated with an acidic or basic material by utilizing its physical adsorption ability. This impregnated activated carbon filter removes acidic or alkaline ionic impurities by chemical adsorption involving a neutralization reaction with an acidic or basic material impregnated on activated carbon.
【０００９】有機性不純物を除去するフィルタは、ガス
状不純物を物理吸着により除去するものである。以下、
このフィルタを「物理吸着フィルタ」という。この物理
吸着フィルタの吸着材としては活性炭が一般的である。
活性炭を用いた物理吸着フィルタは、その強力な物理吸
着能によって非極性あるいは極性の比較的小さい不純物
を除去する。The filter for removing organic impurities removes gaseous impurities by physical adsorption. Less than,
This filter is called a “physical adsorption filter”. Activated carbon is generally used as an adsorbent for this physical adsorption filter.
A physical adsorption filter using activated carbon removes nonpolar or relatively small impurities due to its strong physical adsorption capability.
【００１０】従来、イオン性不純物と有機性不純物とが
混在する環境において両方の不純物を除去する場合は、
中和フィルタと吸着フィルタの両方が用いられている。
例えば、図７に示すように、中和フィルタと吸着フィル
タを単層で千鳥格子状に配置したものや、特開平７−２
０４４３９号公報に記載のような積層したものも知られ
ている。Conventionally, when removing both impurities in an environment where ionic impurities and organic impurities are mixed,
Both a neutralization filter and an adsorption filter are used.
For example, as shown in FIG. 7, a single-layer arrangement of a neutralization filter and an adsorption filter in a staggered lattice pattern,
A laminated structure as described in JP-A-04439 is also known.
【００１１】[0011]
【発明が解決しようとする課題】従来、イオン性不純物
と有機性不純物とが混在する環境において２種類のケミ
カルフィルタを用いて空気中の不純物を除去する際の最
も重要な問題は、フィルタの交換時期の判定が困難なこ
とである。Conventionally, the most important problem in removing impurities in air using two types of chemical filters in an environment where ionic impurities and organic impurities coexist is to replace the filter. It is difficult to determine the timing.
【００１２】図７に示す千鳥格子状に２種類のケミカル
フィルタを配置する従来技術においても、特開平７−２
０４４３９号公報に記載のような２種類のケミカルフィ
ルタを積層する技術においても、２種類のケミカルフィ
ルタのそれぞれの交換時期を判定するために、イオン性
不純物と有機性不純物の両方についての除去効率を測定
しなければならない。その際、有機性不純物の測定は、
時間と手間がかかるため、フィルタの寿命予測が非常に
困難である。そのため、測定結果が得られた時には既に
最適な交換時期が過ぎてしまい、フィルタの性能が低下
してガス状不純物が透過してしまったり、このような事
態を避けるために早めにフィルタを交換した場合は、ま
だ使用可能なフィルタを廃棄することになるためランニ
ングコストが高くなるといった問題が生じていた。In the prior art in which two types of chemical filters are arranged in a staggered pattern as shown in FIG.
In the technique of laminating two types of chemical filters as described in Japanese Patent No. 04439, the removal efficiency of both ionic impurities and organic impurities is determined in order to determine the replacement time of each of the two types of chemical filters. Must be measured. At that time, measurement of organic impurities
Since it takes time and effort, it is very difficult to predict the life of the filter. Therefore, when the measurement result is obtained, the optimal replacement time has already passed, and the performance of the filter has deteriorated and gaseous impurities have permeated, and the filter has been replaced early to avoid such a situation. In such a case, there is a problem in that the running cost is increased because the filter that can still be used is discarded.
【００１３】これは、酸性ガスや塩基性ガス等のイオン
性不純物についてはｐｐｂオーダーの非常に低濃度まで
リアルタイムの測定が可能であるのに対し、有機性不純
物についてはこのような低濃度までリアルタイムに測定
することができないからである。現状では、ｐｐｂオー
ダーの非常に低濃度の有機性不純物のガス濃度をリアル
タイムに測定できるだけの感度を有する測定装置は知ら
れていない。まして、測定装置は省スペース化のために
小型であることが求められており、特に製造装置に装着
する場合は小型であることが必須であり、しかも半導体
装置の製造に何ら影響を与えないという要求まで満たす
測定装置は皆無である。This is because real-time measurement is possible up to a very low concentration of ppb order for ionic impurities such as acid gas and basic gas, whereas real-time measurement is possible up to such low concentration for organic impurities. It is because it cannot measure. At present, there is no known measuring device having a sensitivity enough to measure a gas concentration of a very low concentration of organic impurities on the order of ppb in real time. Furthermore, the measuring device is required to be small in order to save space. In particular, when the measuring device is mounted on a manufacturing device, it is essential that the measuring device be small, and furthermore, it does not affect the manufacture of the semiconductor device at all. There are no measuring devices to meet the demand.
【００１４】現在、有機性不純物の測定には、ケミカル
フィルタを透過した有機性不純物を吸着材に一度捕集
し、脱着を行った後に分析を行うなど、測定のためには
長時間を要する前処理工程が必要である。At present, when measuring the organic impurities, the organic impurities that have passed through the chemical filter are once collected by the adsorbent, and then analyzed after desorption is performed. A processing step is required.
【００１５】そこで本発明の目的は、有機性不純物とイ
オン性不純物のいずれも効率よく除去でき、且つ交換の
判定が容易なケミカルフィルタ及び気体浄化装置を提供
することである。また、本発明の目的は、フィルタの交
換時期を簡易かつ正確に判定でき、ランニングコストを
低減できるケミカルフィルタの交換判定法を提供するこ
とである。SUMMARY OF THE INVENTION It is an object of the present invention to provide a chemical filter and a gas purifying apparatus which can efficiently remove both organic impurities and ionic impurities and can easily determine whether or not replacement is necessary. Another object of the present invention is to provide a method for determining the replacement of a chemical filter, which can easily and accurately determine the replacement time of a filter and reduce the running cost.
【００１６】[0016]
【課題を解決するための手段】本発明者は、上記の目的
を達成するために種々の検討を重ねた結果、本発明を完
成した。Means for Solving the Problems The present inventor has made various studies in order to achieve the above object, and as a result, completed the present invention.
【００１７】本発明は、異なるタイプのフィルタが積層
されてなる、気体雰囲気中の不純物を除去するケミカル
フィルタであって、上流側に、物理吸着能を有する吸着
材を含む物理吸着フィルタを配置し、下流側に、物理吸
着能を有する吸着材を基材とし、該基材に酸性または塩
基性の中和剤を添着してなる添着型吸着材を含む添着型
中和フィルタを配置し、添着型中和フィルタの寿命が物
理吸着フィルタの寿命以上になるように、添着型中和フ
ィルタの添着型吸着材と物理吸着フィルタの吸着材との
重量比が調整されていることを特徴とするケミカルフィ
ルタに関する。According to the present invention, there is provided a chemical filter for removing impurities in a gaseous atmosphere, in which a filter of a different type is laminated, wherein a physical adsorption filter including an adsorbent having a physical adsorption ability is arranged on the upstream side. On the downstream side, an impregnated neutralizing filter including an impregnated adsorbent obtained by impregnating an acidic or basic neutralizing agent with the adsorbent having a physical adsorption capacity as a base material is disposed. Wherein the weight ratio between the adsorbent of the impregnated neutralizing filter and the adsorbent of the physical adsorption filter is adjusted so that the life of the neutralizing filter is longer than the life of the physical adsorption filter. Regarding filters.
【００１８】また本発明は、異なるタイプのフィルタが
積層されてなる、気体雰囲気中の不純物を除去するケミ
カルフィルタであって、上流側に、物理吸着能を有する
吸着材を含む物理吸着フィルタを配置し、下流側に、物
理吸着能を有する吸着材を基材とし、該基材に酸性の中
和剤を添着してなる添着型吸着材を含む添着型中和フィ
ルタ、及び物理吸着能を有する吸着材を基材とし、該基
材に塩基性の中和剤を添着してなる添着型吸着材を含む
添着型中和フィルタを配置し、添着型中和フィルタの寿
命が物理吸着フィルタの寿命以上になるように、添着型
中和フィルタの添着型吸着材と物理吸着フィルタの吸着
材との重量比が調整されていることを特徴とするケミカ
ルフィルタに関する。According to the present invention, there is provided a chemical filter for removing impurities in a gaseous atmosphere, in which a filter of a different type is laminated, wherein a physical adsorption filter including an adsorbent having a physical adsorption capacity is arranged on the upstream side. And, on the downstream side, an adsorbent having physical adsorption ability is used as a base material, and an impregnation type neutralization filter including an impregnation type adsorbent obtained by impregnating an acidic neutralizing agent to the base material, and having a physical adsorption ability An adsorbent is used as a base material, and an impregnated neutralizing filter including an impregnated adsorbent obtained by impregnating a basic neutralizing agent on the base material is disposed, and the life of the impregnated neutralizing filter is equal to the life of the physical adsorption filter. As described above, the present invention relates to a chemical filter characterized in that the weight ratio between the adsorbent of the impregnated neutralizing filter and the adsorbent of the physical adsorption filter is adjusted.
【００１９】また本発明は、ガス状有機性不純物とガス
状イオン性不純物の両方を含有する気体雰囲気に対して
使用されている上記のケミカルフィルタの交換判定法で
あって、一方のみのガス状イオン性不純物の濃度を測定
することによって該ケミカルフィルタの交換時期を判定
することを特徴とするケミカルフィルタの交換判定法に
関する。The present invention also relates to the above-mentioned method for determining the replacement of a chemical filter used for a gaseous atmosphere containing both gaseous organic impurities and gaseous ionic impurities. The present invention relates to a method for determining the replacement of a chemical filter, which comprises determining the replacement time of the chemical filter by measuring the concentration of ionic impurities.
【００２０】また本発明は、上記のケミカルフィルタ
と、該ケミカルフィルタの上流側の不純物濃度を測定す
る不純物濃度測定器と、下流側の不純物濃度を測定する
不純物濃度測定器と、これら不純物濃度測定器により得
られた上流側と下流側の不純物濃度の測定値を比較する
比較器と、該比較器からの測定結果を出力する出力器を
有する気体浄化装置に関する。The present invention also provides a chemical filter as described above, an impurity concentration measuring device for measuring an impurity concentration on the upstream side of the chemical filter, an impurity concentration measuring device for measuring an impurity concentration on the downstream side, and an impurity concentration measuring device for measuring the impurity concentration. The present invention relates to a comparator for comparing the measured values of the impurity concentration on the upstream side and the downstream side obtained by the device, and a gas purification device having an output device for outputting the measurement result from the comparator.
【００２１】[0021]
【発明の実施の形態】以下、本発明の実施の形態を挙げ
て詳細に説明する。Embodiments of the present invention will be described below in detail.
【００２２】本発明のケミカルフィルタの積層構成は、
図１に示すように、矢印方向に流れる空気の上流側に、
物理吸着能を有する吸着材を含む物理吸着フィルタ（以
下「物理吸着フィルタ」という。）１を配置し、下流側
に、物理吸着能を有する吸着材を基材とし、この基材に
酸性または塩基性の中和剤を添着してなる添着型吸着材
を含む中和フィルタ（以下「添着型中和フィルタ」とい
う。）２を配置する。The laminated structure of the chemical filter of the present invention is as follows.
As shown in FIG. 1, on the upstream side of the air flowing in the direction of the arrow,
A physical adsorption filter (hereinafter referred to as “physical adsorption filter”) 1 including an adsorbent having physical adsorption capacity is disposed, and an adsorbent having physical adsorption capacity is used as a base material on the downstream side. Filter (hereinafter referred to as “attached neutralizing filter”) 2 including an impregnated adsorbent formed by adhering a neutralizing agent.
【００２３】本発明に用いられる物理吸着フィルタの吸
着材としては、物理吸着能を有する材料であればよく、
一般に使用されている各種吸着材を用いることができ
る。具体例としては、活性炭、アルミナ、ゼオライト、
ポリシリコン等が挙げられる。これらの中でも活性炭が
好ましい。The adsorbent of the physical adsorption filter used in the present invention may be any material having physical adsorption ability.
Various adsorbents generally used can be used. Specific examples include activated carbon, alumina, zeolite,
Polysilicon and the like can be mentioned. Among them, activated carbon is preferred.
【００２４】この吸着材は、粉末状、ペレット状、フレ
ーク状、繊維状の各種の形態で使用できる。吸着材が粉
末状やペレット状やフレーク状の場合はポリエステル等
の合成繊維あるいは天然繊維からなる通気性シート間に
保持したものを、活性炭繊維や活性炭微粒子含有ポリエ
ステル繊維等の吸着性繊維の場合はその織布自体を、フ
ィルタ材料として用いることができる。また、特に好ま
しい形態としては、粉末状、特に球形粒子状の吸着材を
発泡体構造物に担持したフィルタ材料を用いたケミカル
フィルタが挙げられる。このケミカルフィルタに用いら
れる発泡体構造物としてはポリウレタン等からなる発泡
体樹脂材料が挙げられる。この発泡体構造物に担持され
た吸着材をフィルタ材料に用いたケミカルフィルタは、
吸着材が担持されているためフィルタからの発塵が少な
く、また通気性に優れるため圧力損失が低く、しかもそ
の入り組んだ構造によりガスが非直線的に通過するため
ガスと吸着材の接触率が高く、さらに、軽量であるため
交換時の作業が容易であるといった多くの利点を有す
る。The adsorbent can be used in various forms such as powder, pellet, flake, and fiber. When the adsorbent is in the form of powder, pellets, or flakes, the material held between air-permeable sheets made of synthetic fibers or natural fibers such as polyester, and adsorbent fibers such as activated carbon fibers or activated carbon fine particle-containing polyester fibers are used. The woven fabric itself can be used as a filter material. Further, as a particularly preferred embodiment, a chemical filter using a filter material in which an adsorbent in the form of a powder, particularly a spherical particle is supported on a foamed structure is exemplified. Examples of the foam structure used for the chemical filter include a foam resin material made of polyurethane or the like. A chemical filter using the adsorbent supported by the foam structure as a filter material,
Since the adsorbent is carried, there is little dust from the filter, and because of its excellent air permeability, the pressure loss is low.Moreover, the complicated structure allows the gas to pass non-linearly, so that the contact ratio between the gas and the adsorbent is low. It has many advantages, such as being high and light, so that the work at the time of replacement is easy.
【００２５】下流側に配置される添着型中和フィルタ
は、物理吸着能を有する吸着材（物理吸着材）にその物
理吸着能を利用して酸性または塩基性の中和剤を添着し
た添着型吸着材をフィルタ材料としている。The impregnated neutralizing filter disposed on the downstream side is an impregnated neutralizing filter in which an adsorbent (physical adsorbent) having physical adsorption capacity is impregnated with an acidic or basic neutralizing agent by utilizing the physical adsorption capacity. The adsorbent is used as a filter material.
【００２６】この基材となる物理吸着材としては、前記
の物理吸着フィルタに用いられる物理吸着材を使用する
ことができる。好ましい吸着材は活性炭である。これら
の各種形態の吸着材表面に中和剤が添着された構成物が
添着型中和フィルタのフィルタ材料として使用できる。
この物理吸着材は、粉末状、ペレット状、フレーク状、
繊維状の各種の形態で使用でき、吸着材が粉末状やペレ
ット状やフレーク状の場合はポリエステル等の合成繊維
あるいは天然繊維からなる通気性シート間に保持したも
のを、活性炭繊維等の吸着繊維の場合はその織布自体
を、添着型中和フィルタの基材として用いることができ
る。特に好ましい基材としての物理吸着材は、粉末状、
特に球形粒子状の吸着材を発泡体構造物に担持したもの
であり、この発泡体構造物としてはポリウレタン等から
なる発泡体樹脂材料が好ましい。The physical adsorbent used for the above-mentioned physical adsorbent filter can be used as the physical adsorbent serving as the base material. The preferred adsorbent is activated carbon. A composition in which a neutralizing agent is attached to the surface of the adsorbent in these various forms can be used as a filter material of an impregnated neutralizing filter.
This physical adsorbent is in the form of powder, pellet, flake,
It can be used in various fibrous forms.If the adsorbent is in the form of powder, pellets, or flakes, the adsorbent held between air-permeable sheets made of synthetic fibers such as polyester or natural fibers and activated carbon fibers In this case, the woven fabric itself can be used as a base material of the impregnated neutralizing filter. Physical adsorbent as a particularly preferred substrate, powder,
In particular, a spherical particulate adsorbent is carried on a foamed structure, and a foamed resin material made of polyurethane or the like is preferable as the foamed structure.
【００２７】物理吸着材に添着される中和剤としては、
気体雰囲気中の酸性や塩基性のガス状イオン性不純物を
中和し得る物質であればよい。酸性ガス不純物に対して
は、Ｈ2ＣＯ3、ＮａＯＨ、ＫＯＨ、Ｎａ2ＣＯ3、Ｋ2Ｃ
Ｏ3等が挙げられ、塩基性ガス不純物に対しては、Ｈ3Ｐ
Ｏ4、Ｈ2ＳＯ4等が挙げられる。As the neutralizing agent to be attached to the physical adsorbent,
Any substance can be used as long as it can neutralize acidic or basic gaseous ionic impurities in a gas atmosphere. H 2 CO 3 , NaOH, KOH, Na 2 CO 3 , K 2 C
O 3 and the like. For basic gas impurities, H 3 P
O 4 and H 2 SO 4 are exemplified.
【００２８】これらの中和剤を物理吸着材に添着する方
法としては、例えば、中和剤あるいは中和剤の溶液に浸
した後に遠心分離法等の各種の固液分離法で余剰の中和
剤を除去する方法が挙げられる。中和剤の添着量は、環
境中の温度や湿度、不純物濃度等の種々の条件に応じて
適宜設定される。As a method of attaching these neutralizing agents to the physical adsorbent, for example, after immersion in the neutralizing agent or a solution of the neutralizing agent, excess neutralization is performed by various solid-liquid separation methods such as centrifugation. There is a method of removing the agent. The amount of the neutralizing agent to be added is appropriately set according to various conditions such as the temperature, humidity, and impurity concentration in the environment.
【００２９】上記のような本発明の構成によれば、イオ
ン性不純物と有機性不純物の両方を効率よく除去できる
とともに、イオン性不純物の除去効率のみの測定により
ケミカルフィルタ全体の寿命を判定できる。イオン性不
純物には、ｐｐｂオーダーの非常に低濃度まで検出感度
を有し、しかもリアルタイムに測定可能な測定手段があ
るため、除去効率の測定を簡易かつ正確にリアルタイム
で実施できる。その結果、フィルタ交換時期の判定をタ
イミング良く正確に行うことができ、フィルタの寿命を
多く残したまま交換をしたり、交換時に寿命が既に過ぎ
てしまい不純物を透過させてしまったりすることなく、
フィルタの寿命の限界近くまで使用できるため、ケミカ
ルフィルタのランニングコストを大幅に低減できる。According to the configuration of the present invention as described above, both the ionic impurities and the organic impurities can be efficiently removed, and the lifetime of the entire chemical filter can be determined by measuring only the removal efficiency of the ionic impurities. Since ionic impurities have a detection sensitivity up to a very low concentration on the order of ppb and have a measuring means capable of measuring in real time, the removal efficiency can be measured simply and accurately in real time. As a result, it is possible to accurately determine the filter replacement time in a timely and accurate manner, without replacing the filter while leaving a long life of the filter, and without having to pass the impurities because the life has already expired at the time of replacement.
Since the filter can be used up to the limit of the life of the filter, the running cost of the chemical filter can be greatly reduced.
【００３０】以下、図２〜図５を参照しながら本発明の
作用を説明するとともに、より具体的な本発明の実施の
形態を説明する。Hereinafter, the operation of the present invention will be described with reference to FIGS. 2 to 5, and more specific embodiments of the present invention will be described.
【００３１】図２〜図５に示す不純物の除去効率の経時
変化の測定は以下のケミカルフィルタを用いておこなっ
た。The measurement of the change over time in the impurity removal efficiency shown in FIGS. 2 to 5 was performed using the following chemical filter.
【００３２】物理吸着フィルタとしては、直径：約０．
２〜１ｍｍ、平均粒径：約０．５ｍｍの球状活性炭をポ
リウレタンフォームに担持したものを吸着材としたケミ
カルフィルタを用いた（ＮＩＴＴＡ社製、商品名：ギガ
ソーブＴ２Ｏ−Ｌ）。このフィルタの厚みは約２０ｍ
ｍ、吸着材重量は約３．２ｋｇ／ｍ2とした。The physical adsorption filter has a diameter of about 0.1 mm.
A chemical filter using an adsorbent with spherical activated carbon having an average particle size of about 0.5 mm and having a mean particle size of about 0.5 mm was used (manufactured by NITTA, trade name: Gigasorb T2O-L). The thickness of this filter is about 20m
m and the weight of the adsorbent were about 3.2 kg / m 2 .
【００３３】添着型中和フィルタとしては、直径：約
０．２〜１ｍｍ、平均粒径：約０．５ｍｍの球状活性炭
を基材とし、その表面にＨ3ＰＯ4を添着した活性炭をポ
リウレタンフォームに担持したものを吸着材としたケミ
カルフィルタを使用した（ＮＩＴＴＡ社製、商品名：ギ
ガソーブＴ２Ｏ−Ａ）。このフィルタの厚みは約２０ｍ
ｍ、吸着材重量は約３．２ｋｇ／ｍ2とした。As the impregnated neutralizing filter, a spherical activated carbon having a diameter of about 0.2 to 1 mm and an average particle diameter of about 0.5 mm is used as a base material, and activated carbon impregnated with H 3 PO 4 on its surface is made of polyurethane foam. A chemical filter using an adsorbent with a substance supported on a surface was used (manufactured by NITTA, trade name: Gigasorb T2O-A). The thickness of this filter is about 20m
m and the weight of the adsorbent were about 3.2 kg / m 2 .
【００３４】試験条件としては、供給ガスとして、クリ
ーンルームエアー中にそれぞれアンモニア単独、有機系
ガス（トルエン）単独、及びこれらの両方を、不純物と
して混入させたものを用いた。有機系ガスの測定方法
は、フィルタの通過前後の有機系ガスを吸着剤に捕集し
脱着を行った後にＧＣ−ＭＳにより分析した。アンモニ
アの測定は、日本カノマックス（株）製のＮＨ3モニタ
リングシステム（ＡＭＳ１）を用いた。検出は蛍光分析
であり、検出感度の下限は０．０１ｐｐｂである。As test conditions, as the supply gas, ammonia alone, organic gas (toluene) alone, and a mixture of both of them as impurities were used in clean room air. The method of measuring the organic gas was such that the organic gas before and after passing through the filter was collected by an adsorbent, desorbed, and then analyzed by GC-MS. The ammonia was measured using an NH 3 monitoring system (AMS1) manufactured by Kanomax Japan. Detection is fluorescence analysis, and the lower limit of detection sensitivity is 0.01 ppb.
【００３５】図２は、物理吸着フィルタのみを用いた場
合における空気中のイオン性不純物（アンモニア）およ
び有機性不純物（トルエン）の除去効率の経時変化を示
すグラフである。なお、測定は、いずれか一方の不純物
のみを含む空気を用いて行った。このように、物理吸着
フィルタのみでは、空気中のイオン性不純物はほとんど
除去されず、有機性不純物のみが除去されることがわか
る。FIG. 2 is a graph showing the change over time in the removal efficiency of ionic impurities (ammonia) and organic impurities (toluene) in air when only a physical adsorption filter is used. Note that the measurement was performed using air containing only one of the impurities. Thus, it can be seen that the ionic impurities in the air are hardly removed by the physical adsorption filter alone, and only the organic impurities are removed.
【００３６】図３は、添着型中和フィルタのみを用いた
場合において空気中にイオン性不純物（アンモニア）の
みが含まれているときのイオン性不純物の除去効率の経
時変化を示すグラフである。この図から、添着型中和フ
ィルタは十分なイオン性不純物の除去機能を有すること
がわかる。FIG. 3 is a graph showing the change over time in the removal efficiency of ionic impurities when only ionic impurities (ammonia) are contained in the air when only the impregnated neutralizing filter is used. From this figure, it can be seen that the impregnated neutralizing filter has a sufficient function of removing ionic impurities.
【００３７】図４は、添着型中和フィルタのみを用いた
場合において空気中に有機性不純物（トルエン）のみが
含まれているときの有機性不純物の除去効率の経時変化
を示すグラフである。この図から、添着型中和フィルタ
は、イオン性不純物ほどではないが有機性不純物に対し
ても除去機能を有することがわかる。FIG. 4 is a graph showing the change over time in the removal efficiency of organic impurities when only the organic impurities (toluene) are contained in the air when only the impregnated neutralizing filter is used. From this figure, it can be seen that the impregnated neutralizing filter has a function of removing organic impurities as well as ionic impurities.
【００３８】図５は、添着型中和フィルタのみを用いた
場合における空気中のイオン性不純物および有機性不純
物の除去効率の経時変化を示すグラフである。実線は空
気中にイオン性不純物と有機性不純物が共存する場合、
点線は一方の不純物のみが含まれる場合であり、ａ1及
びａ2はイオン性不純物、ｂ1及びｂ2は有機性不純物の
除去効率を示す。その際、各フィルタは各実験において
同じ不純物除去性能のものを用いた。また、ａ1及びｂ1
の測定の際の不純物を含む空気は、ａ2及びｂ2の測定に
それぞれ用いたイオン性不純物および有機性不純物と同
じ不純物が共存したものである。この図から、添着型中
和フィルタは、空気中にイオン性不純物と有機性不純物
の両方が含まれる場合は、ほぼ同時期に両者の除去効率
が低下し、また、早くから除去効率が低下していること
がわかる。図示はしなかったが、有機性不純物の量を減
らすと、ａ1とｂ1の関係は変わらずにイオン性不純物と
有機性不純物の除去効率の低下が遅くなることがわかっ
た。FIG. 5 is a graph showing the change over time in the removal efficiency of ionic impurities and organic impurities in air when only the impregnated neutralizing filter is used. The solid line indicates that when ionic impurities and organic impurities coexist in air,
The dotted line shows a case contains only one impurity, a 1 and a 2 are ionic impurities, b 1 and b 2 show the removal efficiency of the organic impurities. At that time, each filter used had the same impurity removal performance in each experiment. A 1 and b 1
The air containing impurities at the time of measurement is the same as the ionic impurity and the organic impurity used for the measurement of a 2 and b 2 respectively. From this figure, the impregnated neutralization filter shows that when both ionic impurities and organic impurities are contained in the air, the removal efficiency of both decreases at almost the same time, and the removal efficiency decreases early. You can see that there is. Although not shown, it was found that when the amount of the organic impurities was reduced, the relationship between a 1 and b 1 did not change, and the reduction in the removal efficiency of the ionic impurities and the organic impurities became slow.
【００３９】本発明者は、添着型中和フィルタは、空気
中にイオン性不純物と有機性不純物の両方が含まれる場
合、ほぼ同時期に両方の不純物の除去効率が低下する現
象に着目した。すなわち、この現象は、一方の不純物の
除去効率のみを測定するだけで、この添着型中和フィル
タ全体の寿命が判定できることを示している。そして本
発明者は、ケミカルフィルタの構成として添着型中和フ
ィルタの上流側に物理吸着フィルタを配置することによ
り、イオン性不純物と有機性不純物の両方が効率よく除
去可能となるとともに、このケミカルフィルタの交換判
定法として一方のイオン性不純物のみの除去効率を測定
することにより、ケミカルフィルタ全体の交換時期をタ
イミング良く正確に判定できることを見い出した。The inventor of the present invention has focused on the phenomenon that, when air contains both ionic impurities and organic impurities, the efficiency of removing both impurities is reduced substantially at the same time. In other words, this phenomenon indicates that the lifetime of the whole of the impregnated neutralizing filter can be determined only by measuring the removal efficiency of one impurity. By disposing a physical adsorption filter on the upstream side of the impregnation type neutralization filter as a configuration of the chemical filter, both the ionic impurities and the organic impurities can be efficiently removed, and the chemical filter It has been found that by measuring the removal efficiency of only one ionic impurity as a replacement determination method, the replacement timing of the entire chemical filter can be accurately determined with good timing.
【００４０】図５（ａ1、ｂ1）に示すように、添着型中
和フィルタのみではイオン性不純物および有機性不純物
のいずれの除去効率も早くから低下してしまうが、上流
側に物理吸着フィルタを配置することにより、イオン性
不純物および有機性不純物のいずれに対しても除去効率
の低下を遅らせる、すなわち寿命を延ばすことができ
る。上流側の物理吸着フィルタが活性を有している間
は、下流側の添着型中和フィルタにはイオン性不純物の
みの負荷がかかるため、最大、図３（図５のａ2）に示
す状態まで寿命を延ばすことができる。As shown in FIG. 5 (a 1 , b 1 ), the removal efficiency of both the ionic impurities and the organic impurities is reduced from the early stage by using only the impregnated neutralizing filter. Is provided, the reduction of the removal efficiency of both ionic impurities and organic impurities can be delayed, that is, the life can be prolonged. While the upstream physical adsorption filter is active, the downstream impregnated neutralization filter is loaded with only ionic impurities, so that the state shown in FIG. 3 (a 2 in FIG. 5) is at a maximum. Life can be extended up to.
【００４１】但し、物理吸着フィルタの吸着材量が多す
ぎると、物理吸着フィルタの活性があるうちに添着型中
和フィルタの活性が低下してしまい、この時点でフィル
タを交換するとランニングコストを上げてしまうことに
なる。したがって、添着型中和フィルタの寿命が物理吸
着フィルタの寿命以上になるように、添着型中和フィル
タの添着型吸着材と物理吸着フィルタの吸着材との重量
比を調整することが好ましい。However, if the amount of the adsorbent of the physical adsorption filter is too large, the activity of the impregnated neutralizing filter is reduced while the physical adsorption filter is active. If the filter is replaced at this time, the running cost increases. Would be. Therefore, it is preferable to adjust the weight ratio between the adsorbent of the impregnated neutralizing filter and the adsorbent of the physical adsorption filter so that the life of the impregnated neutralizing filter is longer than the life of the physical adsorption filter.
【００４２】添着型中和フィルタの寿命が物理吸着フィ
ルタの寿命より長い場合は、物理吸着フィルタの活性が
低下した後、すなわち寿命がきた後であっても、物理吸
着フィルタを透過した有機性不純物は添着型中和フィル
タによって除去される。そして、添着型中和フィルタの
活性が低下した時点でフィルタを交換することになる。
その結果、物理吸着フィルタ及び添着型中和フィルタの
いずれについても、その活性が低下した後に交換するこ
とになるため、フィルタ全体を効率的に使用することが
できる。添着型中和フィルタの寿命と物理吸着フィルタ
の寿命が同じ場合は、添着型中和フィルタの寿命を、イ
オン性不純物のみ含有する気体に対して有する本来の寿
命まで最大限に延長することができ、かつ物理吸着フィ
ルタの寿命がきたときは添着型中和フィルタも寿命に達
しているため、最もランニングコストを低減することが
できる。When the life of the impregnated neutralization filter is longer than the life of the physical adsorption filter, the organic impurities that have passed through the physical adsorption filter even after the activity of the physical adsorption filter has decreased, that is, even after the life has expired. Is removed by an impregnated neutralizing filter. Then, when the activity of the impregnated neutralizing filter is reduced, the filter is replaced.
As a result, since both the physical adsorption filter and the impregnated neutralizing filter need to be replaced after their activities have been reduced, the entire filter can be used efficiently. If the life of the impregnated neutralizing filter is the same as the life of the physical adsorption filter, the life of the impregnated neutralizing filter can be extended to the original life of the gas containing only ionic impurities. When the life of the physical adsorption filter comes to an end, the impregnated neutralizing filter has reached the end of its life, so that the running cost can be reduced most.
【００４３】ここで、フィルタの寿命と交換時期である
が、本実施の形態においては図５に示すように、添着型
中和フィルタは、初期状態では有機性不純物を９０％以
上除去できるため、上流側に配置した物理吸着フィルタ
の不純物除去効率が低下して有機性不純物が物理吸着フ
ィルタを透過してもフィルタ全体としては実質的な不純
物の除去は行えている。このため、添着型中和フィルタ
は、イオン性不純物を９５％以上除去できる状態であれ
ば、有機性不純物の除去も８０％程度行える状態にあ
る。この状態で、上流側の物理吸着フィルタの除去効率
が７５％程度に低下しても、有機性不純物は上流側と下
流側の二つのフィルタで９５％除去できる。Here, the life of the filter and the replacement time are as follows. In this embodiment, as shown in FIG. 5, the impregnated neutralizing filter can remove 90% or more of organic impurities in an initial state. Even if the impurity removal efficiency of the physical adsorption filter disposed on the upstream side decreases and organic impurities pass through the physical adsorption filter, substantial impurities can be removed as a whole filter. For this reason, the impregnated neutralization filter is in a state where it can remove organic impurities by about 80% as long as it can remove 95% or more of ionic impurities. In this state, even if the removal efficiency of the physical adsorption filter on the upstream side is reduced to about 75%, the organic impurities can be removed by 95% by the two filters on the upstream side and the downstream side.
【００４４】添着型中和フィルタは、図５からわかるよ
うに、イオン性不純物の除去効率が初期値からの劣化が
生じた以降、急速に除去効率が低下する。この劣化が生
じた時点でフィルタを交換するようにすれば、交換時の
添着型中和フィルタの有機性不純物の除去効率は９０％
程度であるため、物理吸着フィルタの除去効率が５０％
程度に低下していても、有機性不純物は上流側と下流側
の二つのフィルタで９５％除去できる。As can be seen from FIG. 5, in the impregnated neutralizing filter, the removal efficiency of the ionic impurities rapidly decreases after the deterioration from the initial value occurs. If the filter is replaced when this deterioration occurs, the removal efficiency of organic impurities of the impregnated neutralizing filter at the time of replacement is 90%.
, The removal efficiency of the physical adsorption filter is 50%
Even if it is reduced to a small extent, the organic impurities can be removed by 95% with the two filters upstream and downstream.
【００４５】フィルタ交換の最適なタイミングは、フィ
ルタを設置する環境のイオン性不純物と有機性不純物の
量とそれらの許容値により変わる。そのため、上流側の
物理吸着フィルタの活性炭量及び下流側の添着型中和フ
ィルタの活性炭と添着剤（中和剤）の量を環境に応じて
最適化しておくことが重要である。各フィルタを環境に
応じて最適化しておくことにより、下流側の添着型中和
フィルタのイオン性不純物の除去効率を測定することで
フィルタ全体の交換時期を決定することができる。The optimal timing of filter replacement depends on the amount of ionic impurities and organic impurities in the environment in which the filter is installed and their allowable values. Therefore, it is important to optimize the amount of activated carbon of the physical adsorption filter on the upstream side and the amounts of activated carbon and the impregnating agent (neutralizing agent) of the impregnated neutralization filter on the downstream side according to the environment. By optimizing each filter according to the environment, the replacement time of the entire filter can be determined by measuring the removal efficiency of ionic impurities of the downstream impregnated neutralization filter.
【００４６】本発明における物理吸着フィルタと添着型
中和フィルタの吸着材の重量比は、添着型中和フィルタ
の寿命が物理吸着フィルタの寿命以上になる範囲内で、
気体雰囲気中の不純物量比によって適宜選択される。有
機性不純物が多い場合は物理吸着フィルタの吸着材量を
多くし、イオン性不純物が多い場合は添着型中和フィル
タの添着型吸着材あるいは添着材（中和剤）の量を多く
する。実際には、フィルタの面積には制限があるため、
吸着材の量が多いほどフィルタの厚さを大きくすること
になる。The weight ratio of the adsorbent between the physical adsorption filter and the impregnated neutralizing filter in the present invention is set so that the life of the impregnated neutralizing filter is longer than the life of the physical adsorption filter.
It is appropriately selected depending on the impurity amount ratio in the gas atmosphere. When the amount of organic impurities is large, the amount of the adsorbent of the physical adsorption filter is increased. When the amount of ionic impurities is large, the amount of the impregnated adsorbent or the adhering material (neutralizing agent) of the impregnated neutralizing filter is increased. In practice, the area of the filter is limited,
The greater the amount of adsorbent, the greater the thickness of the filter.
【００４７】本発明の積層構成は、上述の通り、上流側
に物理吸着フィルタを配置し、下流側に添着型中和フィ
ルタを配置することが必要であるが、本発明の積層構成
とは逆に、上流側に添着型中和フィルタを配置し、下流
側に物理吸着フィルタを配置すると次のような問題が起
きる。すなわち、上流側の添着型中和フィルタはイオン
性不純物と有機性不純物の両方を吸着するため、除去対
象がイオン性不純物のみの場合に比べて飽和吸着量に達
する時間が短くなる、つまり、中和フィルタとして求め
られるイオン性不純物除去性能の低下が早くなる。ま
た、上流側の添着型中和フィルタで有機性不純物が除去
されるため下流側の物理吸着フィルタの寿命は長くな
る。これらの結果、下流側の物理吸着フィルタが十分な
除去性能を有していながら、フィルタの交換が必要とな
り、ランニングコストが高くなるという問題が生じる。
このような問題を避けるためにも、本発明の上記積層構
成にする必要がある。As described above, in the laminated structure of the present invention, it is necessary to dispose a physical adsorption filter on the upstream side and dispose an impregnated neutralizing filter on the downstream side. In addition, if an impregnated neutralizing filter is arranged on the upstream side and a physical adsorption filter is arranged on the downstream side, the following problem occurs. That is, since the impregnated neutralization filter on the upstream side adsorbs both ionic impurities and organic impurities, the time to reach the saturated adsorption amount is shorter than that in the case where only the ionic impurities are removed, that is, The ionic impurity removal performance required for the sum filter is rapidly reduced. In addition, since organic impurities are removed by the impregnated neutralization filter on the upstream side, the life of the physical adsorption filter on the downstream side is extended. As a result, while the physical adsorption filter on the downstream side has a sufficient removal performance, the filter needs to be replaced, which causes a problem that the running cost is increased.
In order to avoid such a problem, it is necessary to adopt the above-mentioned laminated structure of the present invention.
【００４８】本発明の他の積層構成として、上流側に物
理吸着フィルタを配置し、下流側に、酸性中和剤を添着
した添着型中和フィルタ、および塩基性中和剤を添着し
た添着型中和フィルタを配置してもよい。この構成は、
気体雰囲気中のイオン性不純物として酸性不純物と塩基
性不純物の両方を除去する場合に有効である。この構成
によれば、気体雰囲気中の有機性、酸性、塩基性のいず
れの不純物を除去することができ、フィルタ交換の判定
については酸性および塩基性の不純物の除去効率のみの
測定によって行うことができる。As another laminated constitution of the present invention, a physical adsorption filter is arranged on the upstream side and an impregnated neutralizing filter impregnated with an acidic neutralizing agent on the downstream side, and an impregnated neutralizing filter impregnated with a basic neutralizing agent. A neutralization filter may be provided. This configuration,
This is effective in removing both acidic impurities and basic impurities as ionic impurities in a gas atmosphere. According to this configuration, any of the organic, acidic, and basic impurities in the gaseous atmosphere can be removed, and the filter replacement can be determined by measuring only the removal efficiency of the acidic and basic impurities. it can.
【００４９】本発明は、有機性不純物とイオン性不純物
の両方を含む気体雰囲気中のこれら両方の不純物を除去
する場合に有効に適用される。これらの不純物の多く
は、大気中の化学汚染物質であったり、各種製造プロセ
スから発するものである。The present invention is effectively applied to the case where both impurities are removed in a gas atmosphere containing both organic impurities and ionic impurities. Many of these impurities are chemical pollutants in the atmosphere or originate from various manufacturing processes.
【００５０】本発明における除去対象であるイオン性不
純物は、添着型中和フィルタの吸着材に添着された中和
剤により中和され得る酸性または塩基性の不純物であ
る。酸性不純物としては、ＨＦ、ＨＣｌ、Ｈ2ＳＯ4、Ｃ
Ｈ3ＣＯＯＨ、Ｈ3ＢＯ3等が挙げられる。塩着性不純物
としては、アンモニア、アミン等が挙げられる。The ionic impurities to be removed in the present invention are acidic or basic impurities which can be neutralized by the neutralizing agent attached to the adsorbent of the impregnated neutralizing filter. The acidic impurities include HF, HCl, H 2 SO 4 , C
H 3 COOH, H 3 BO 3 and the like can be mentioned. Examples of the salting impurities include ammonia and amine.
【００５１】本発明における除去対象である有機性不純
物は、物理吸着フィルタ及び添着型中和フィルタに用い
られた吸着材によって物理吸着され得るものであり、比
較的極性の小さい或いは非極性の有機物からなる不純物
である。このような不純物は、各種化学汚染物質や、半
導体装置等の各種製造プロセスから発する有機物が挙げ
られる。例えば、メタノール、エタノール、トルエン等
の各種有機溶剤や有機系洗浄液、フォトレジスト材料、
フォトレジスト溶剤、フォトレジスト剥離剤、現像液、
ジオクチルフタレート等の可塑剤、その他フォトレジス
ト工程から発する有機シロキサン等の有機物などがあ
る。The organic impurities to be removed in the present invention can be physically adsorbed by the adsorbent used in the physical adsorption filter and the impregnation type neutralization filter, and are formed from relatively small or non-polar organic substances. Impurities. Such impurities include various chemical contaminants and organic substances generated from various manufacturing processes of semiconductor devices and the like. For example, various organic solvents such as methanol, ethanol, and toluene and organic cleaning liquids, photoresist materials,
Photoresist solvent, photoresist stripper, developer,
There are plasticizers such as dioctyl phthalate, and other organic substances such as organic siloxane generated from a photoresist process.
【００５２】なお、本発明が適用される気体雰囲気に
は、上記中和剤と中和し得ない比較的極性の小さい或い
は非極性の無機性不純物が含まれていてもよい。例え
ば、ＮＯ 2等のＮＯx、ＳＯ2等のＳＯx等が挙げられる。
このような無機性不純物は、有機性不純物と同様に物理
吸着により除去され、また、フィルタの交換の判定のた
めに除去効率を測定しなくてもよい。The gas atmosphere to which the present invention is applied
Have a relatively small polarity that cannot be neutralized with the neutralizing agent.
May contain a non-polar inorganic impurity. example
If NO TwoNO such asx, SOTwoSOxAnd the like.
Such inorganic impurities are physically similar to organic impurities.
It is removed by adsorption, and the filter replacement
Therefore, the removal efficiency does not need to be measured.
【００５３】本発明は、上記の不純物を含む、クリーン
ルーム環境における空気の清浄化に効果的に適用され
る。また、本発明が適用される気体雰囲気は、このよう
な空気に限定されず、本発明に使用されたケミカルカル
フィルタ材料を少なくともフィルタ寿命の間は劣化させ
ない各種ガス状物質の清浄化にも適用できる。The present invention is effectively applied to the purification of air in a clean room environment containing the above impurities. Further, the gas atmosphere to which the present invention is applied is not limited to such air, and is also applicable to cleaning of various gaseous substances that do not deteriorate the chemical filter material used in the present invention at least for the life of the filter. it can.
【００５４】本発明のケミカルフィルタは、図６に示す
基本構成を有する気体浄化装置に適用することができ
る。本発明の気体浄化装置は、ケミカルフィルタの上流
側の不純物濃度を測定するための不純物濃度測定器３
と、下流側の不純物濃度を測定するための不純物濃度測
定器４と、これら不純物濃度測定器により得られた上流
側と下流側の不純物濃度の測定値を比較する比較器５
と、該比較器からの測定結果を出力する出力器６を有す
る。不純物濃度測定器３により得られた測定値と不純物
濃度測定器４により得られた測定値は、比較器５におい
て比較され、その比較結果が経時的に出力器６により出
力される。この出力器から得られる除去効率が所定の値
に達した時点でフィルタの交換を行う。本発明の気体浄
化装置には、不純物の種類に応じて最適な測定装置を選
択し、不純物が複数ある場合はそれらに対応する複数種
の測定装置を設けてもよい。また、不純物濃度測定装置
は、イオン性不純物の測定装置であることが必要である
が、これに加えて有機性不純物の測定装置を設けてもよ
い。イオン性不純物の測定装置としては、高感度でリア
ルタイムな測定が可能なものであれば特に制限はなく、
イオンクロマトグラフ等の各種市販の装置を用いること
ができる。The chemical filter of the present invention can be applied to a gas purifying apparatus having the basic configuration shown in FIG. The gas purifying apparatus of the present invention comprises an impurity concentration measuring device 3 for measuring the impurity concentration on the upstream side of the chemical filter.
And an impurity concentration measuring device 4 for measuring the impurity concentration on the downstream side, and a comparator 5 for comparing the measured values of the impurity concentration on the upstream side and the downstream side obtained by these impurity concentration measuring devices.
And an output unit 6 for outputting a measurement result from the comparator. The measured value obtained by the impurity concentration measuring device 3 and the measured value obtained by the impurity concentration measuring device 4 are compared in a comparator 5, and the comparison result is output by an output device 6 with time. When the removal efficiency obtained from this output device reaches a predetermined value, the filter is replaced. In the gas purifying apparatus of the present invention, an optimal measuring device may be selected according to the type of impurity, and when there are a plurality of impurities, a plurality of types of measuring devices corresponding to the impurities may be provided. Further, the impurity concentration measuring device needs to be a measuring device for ionic impurities, but in addition to this, a measuring device for organic impurities may be provided. There is no particular limitation on the ionic impurity measuring device as long as it can perform high-sensitivity, real-time measurement.
Various commercially available devices such as an ion chromatograph can be used.
【００５５】本発明のケミカルフィルタは、目的に応じ
て適宜選択され、各種用途に適用できる。例えば、クリ
ーンルームの空調システムに設置され、クリーンルーム
内に送風される空気中の不純物を除去するために用いる
ことができる。例えばクリーンルームの吸気口等の外気
の通過部分や、空気清浄装置のフィルタ部分等に設置さ
れる。また、半導体装置の製造装置に設置され、装置内
に入る空気中の不純物を除去するために用いることがで
きる。例えば半導体露光装置等の半導体デバイス製造装
置のエア導入口部分などに設置される。The chemical filter of the present invention is appropriately selected according to the purpose and can be applied to various uses. For example, it can be installed in an air conditioning system of a clean room and used to remove impurities in air blown into the clean room. For example, it is installed in a portion where outside air passes, such as an intake port of a clean room, or a filter portion of an air cleaning device. Further, it can be installed in a semiconductor device manufacturing apparatus and used for removing impurities in air entering the apparatus. For example, it is installed at an air inlet portion of a semiconductor device manufacturing apparatus such as a semiconductor exposure apparatus.
【００５６】また、本発明のケミカルフィルタは、従来
のパーティクルフィルタと組み合わせてもよく、これに
より、塵埃等の固体状不純物とガス状不純物を同時に除
去できる。下流側にパーティクルフィルタを設置した場
合は、ケミカルフィルタからの発塵の虞がある場合、こ
れを防止することも可能となる。また、空気中に固体状
不純物が多く含まれる場合は、上流側にパーティクルフ
ィルタを配置することが好ましく、これにより下流側の
ケミカルフィルタの目詰まりを防止することができる。Further, the chemical filter of the present invention may be combined with a conventional particle filter, so that solid impurities such as dust and gaseous impurities can be removed at the same time. When a particle filter is installed on the downstream side, if there is a risk of dust generation from the chemical filter, this can be prevented. When a large amount of solid impurities is contained in the air, it is preferable to arrange a particle filter on the upstream side, whereby clogging of the chemical filter on the downstream side can be prevented.
【００５７】[0057]
【発明の効果】以上の説明から明らかなように本発明に
よれば、イオン性不純物と有機性不純物の両方を効率よ
く除去できるとともに、一方のイオン性不純物の除去効
率の測定によりケミカルフィルタ全体の寿命を判定でき
るため、除去効率の測定を簡易かつ正確にリアルタイム
で実施できる。その結果、フィルタ交換時期の判定をタ
イミング良く正確に行うことができ、ケミカルフィルタ
のランニングコストを大幅に低減できる。As is apparent from the above description, according to the present invention, both the ionic impurities and the organic impurities can be efficiently removed, and the overall efficiency of the chemical filter can be measured by measuring the removal efficiency of one of the ionic impurities. Since the life can be determined, the removal efficiency can be measured simply and accurately in real time. As a result, it is possible to accurately determine the filter replacement time with good timing, and to greatly reduce the running cost of the chemical filter.
【図１】本発明のケミカルフィルタの一実施形態の模式
的斜視図である。FIG. 1 is a schematic perspective view of one embodiment of a chemical filter of the present invention.
【図２】物理吸着フィルタのみを用いた場合における空
気中のイオン性不純物および有機性不純物の除去効率の
経時変化を示すグラフである。FIG. 2 is a graph showing a change over time in the removal efficiency of ionic impurities and organic impurities in air when only a physical adsorption filter is used.
【図３】添着型中和フィルタのみを用いた場合において
空気中にイオン性不純物のみが含まれているときのイオ
ン性不純物の除去効率の経時変化を示すグラフである。FIG. 3 is a graph showing a change over time in the removal efficiency of ionic impurities when only ionic impurities are contained in air when only an impregnated neutralizing filter is used.
【図４】添着型中和フィルタのみを用いた場合において
空気中に有機性不純物のみが含まれているときの有機性
不純物の除去効率の経時変化を示すグラフである。FIG. 4 is a graph showing a change over time in the removal efficiency of organic impurities when only organic impurities are contained in air when only an impregnated neutralizing filter is used.
【図５】添着型中和フィルタのみを用いた場合における
空気中のイオン性不純物および有機性不純物の除去効率
の経時変化を示すグラフである。実線は空気中にイオン
性不純物と有機性不純物が共存する場合、点線は一方の
不純物のみが含まれる場合であり、ａ1及びａ2はイオン
性不純物、ｂ1及びｂ2は有機性不純物の除去効率を示
す。FIG. 5 is a graph showing a change with time in the removal efficiency of ionic impurities and organic impurities in air when only an impregnated neutralizing filter is used. The solid line is the case of coexistence of ionic impurities and organic impurities in the air, the dotted line shows a case contains only one impurity, a 1 and a 2 are ionic impurities, b 1 and b 2 of organic impurities The removal efficiency is shown.
【図６】本発明の気体清浄化装置の基本構成を説明する
ための概略図である。FIG. 6 is a schematic diagram for explaining a basic configuration of the gas cleaning device of the present invention.
【図７】従来のケミカルフィルタの模式的説明図であ
る。FIG. 7 is a schematic explanatory view of a conventional chemical filter.
１ 物理吸着フィルタ ２ 添着型中和フィルタ ３、４ 不純物濃度測定器 ５ 比較器 ６ 出力器 DESCRIPTION OF SYMBOLS 1 Physical adsorption filter 2 Impregnation type neutralization filter 3, 4 Impurity concentration measuring device 5 Comparator 6 Output device
Claims (15)
る、気体雰囲気中の不純物を除去するケミカルフィルタ
であって、 上流側に、物理吸着能を有する吸着材を含む物理吸着フ
ィルタを配置し、 下流側に、物理吸着能を有する吸着材を基材とし、該基
材に酸性または塩基性の中和剤を添着してなる添着型吸
着材を含む添着型中和フィルタを配置し、 添着型中和フィルタの寿命が物理吸着フィルタの寿命以
上になるように、添着型中和フィルタの添着型吸着材と
物理吸着フィルタの吸着材との重量比が調整されている
ことを特徴とするケミカルフィルタ。Claims: 1. A chemical filter for removing impurities in a gaseous atmosphere, comprising a stack of filters of different types, wherein a physical adsorption filter including an adsorbent having physical adsorption capacity is arranged on the upstream side, and On the side, an impregnated neutralizing filter including an impregnated adsorbent obtained by impregnating an acidic or basic neutralizing agent with the adsorbent having a physical adsorption ability as a base material is disposed. A chemical filter, wherein the weight ratio between the adsorbent of the impregnated neutralizing filter and the adsorbent of the physical adsorption filter is adjusted so that the life of the sum filter is longer than the life of the physical adsorption filter.
る、気体雰囲気中の不純物を除去するケミカルフィルタ
であって、 上流側に、物理吸着能を有する吸着材を含む物理吸着フ
ィルタを配置し、 下流側に、物理吸着能を有する吸着材を基材とし、該基
材に酸性の中和剤を添着してなる添着型吸着材を含む添
着型中和フィルタ、及び物理吸着能を有する吸着材を基
材とし、該基材に塩基性の中和剤を添着してなる添着型
吸着材を含む添着型中和フィルタを配置し、 添着型中和フィルタの寿命が物理吸着フィルタの寿命以
上になるように、添着型中和フィルタの添着型吸着材と
物理吸着フィルタの吸着材との重量比が調整されている
ことを特徴とするケミカルフィルタ。2. A chemical filter for removing impurities in a gaseous atmosphere, comprising a stack of filters of different types, wherein a physical adsorption filter including an adsorbent having a physical adsorption capacity is arranged on an upstream side, and a downstream side. On the side, an adsorbent having physical adsorption capacity is used as a base material, an impregnation type neutralization filter including an impregnation type adsorbent obtained by impregnating an acidic neutralizing agent to the base material, and an adsorbent material having physical adsorption capacity An impregnated neutralizing filter including an impregnated adsorbent obtained by impregnating a basic neutralizing agent on the substrate is disposed as a base material, and the life of the impregnated neutralizing filter is longer than the life of the physical adsorption filter. Thus, the chemical filter is characterized in that the weight ratio between the adsorbent of the impregnated neutralizing filter and the adsorbent of the physical adsorption filter is adjusted.
ス状イオン性不純物の両方を除去可能な請求項１又は２
記載のケミカルフィルタ。3. The method according to claim 1, wherein both gaseous organic impurities and gaseous ionic impurities in the gaseous atmosphere can be removed.
Chemical filter as described.
和剤と中和し得る酸性ガス又は塩基性ガスである請求項
３記載のケミカルフィルタ。4. The chemical filter according to claim 3, wherein the gaseous ionic impurity is an acidic gas or a basic gas that can be neutralized with the neutralizing agent attached.
る請求項１〜４のいずれか１項に記載のケミカルフィル
タ。5. The chemical filter according to claim 1, wherein the adsorbent having physical adsorption ability is activated carbon.
フィルタの添着型吸着材のそれぞれが、発泡体樹脂材料
に担持されていることを特徴とする請求項１〜５のいず
れか１項に記載のケミカルフィルタ。6. The method according to claim 1, wherein each of the adsorbent of the physical adsorption filter and the impregnated adsorbent of the impregnated neutralization filter are supported on a foam resin material. Chemical filter according to 1.
れ、クリーンルーム内に送風される空気中の不純物を除
去する請求項１〜６のいずれか１項に記載のケミカルフ
ィルタ。7. The chemical filter according to claim 1, which is installed in an air conditioning system of a clean room and removes impurities in air blown into the clean room.
内に入る空気中の不純物を除去する請求項１〜６のいず
れか１項に記載のケミカルフィルタ。8. The chemical filter according to claim 1, wherein the chemical filter is installed in a semiconductor device manufacturing apparatus and removes impurities in air entering the apparatus.
純物の両方を含有する気体雰囲気に対して使用されてい
る請求項１又は２記載のケミカルフィルタの交換判定法
であって、一方のみのガス状イオン性不純物の濃度を測
定することによって該ケミカルフィルタの交換時期を判
定することを特徴とするケミカルフィルタの交換判定
法。9. The method according to claim 1, wherein the method is used for a gas atmosphere containing both gaseous organic impurities and gaseous ionic impurities. A method for determining the replacement of a chemical filter, comprising determining the replacement time of the chemical filter by measuring the concentration of gaseous ionic impurities.
中和剤と中和し得る酸性ガスあるいは塩基性ガスである
請求項９記載のケミカルフィルタの交換判定法。10. The method according to claim 9, wherein the gaseous ionic impurities are an acidic gas or a basic gas that can be neutralized with the neutralizing agent to which the gaseous ionic impurities are attached.
る吸着材が活性炭である請求項９又は１０記載のケミカ
ルフィルタの交換判定法。11. The method according to claim 9, wherein the adsorbent having physical adsorption capacity of the chemical filter is activated carbon.
フィルタの吸着材と添着型中和フィルタの添着型吸着材
のそれぞれが、発泡体樹脂材料に担持されている請求項
９、１０又は１１記載のケミカルフィルタの交換判定
法。12. The chemical according to claim 9, 10 or 11, wherein each of the adsorbent of the physical adsorption filter and the impregnated adsorbent of the impregnated neutralization filter constituting the chemical filter is supported on a foam resin material. Filter replacement judgment method.
空調システムに設置され、クリーンルーム内に送風され
る空気中の不純物を除去するために使用されている請求
項９〜１２のいずれか１項に記載のケミカルフィルタの
交換判定法。13. The chemical filter according to claim 9, wherein the chemical filter is installed in an air conditioning system of a clean room, and is used for removing impurities in air blown into the clean room. Exchange judgment method.
装置に設置され、装置内に入る空気中の不純物を除去す
るために使用されている請求項９〜１２のいずれか１項
に記載のケミカルフィルタの交換判定法。14. The chemical filter according to claim 9, wherein the chemical filter is installed in an apparatus for manufacturing a semiconductor device, and is used for removing impurities in air entering the apparatus. Exchange decision method.
タと、該ケミカルフィルタの上流側の不純物濃度を測定
する不純物濃度測定器と、下流側の不純物濃度を測定す
る不純物濃度測定器と、これら不純物濃度測定器により
得られた上流側と下流側の不純物濃度の測定値を比較す
る比較器と、該比較器からの測定結果を出力する出力器
を有する気体浄化装置。15. The chemical filter according to claim 1 or 2, an impurity concentration measuring device for measuring an impurity concentration on an upstream side of the chemical filter, an impurity concentration measuring device for measuring an impurity concentration on a downstream side, and these impurities. A gas purifying device comprising: a comparator for comparing measured values of impurity concentrations on an upstream side and a downstream side obtained by a concentration measuring device; and an output device for outputting a measurement result from the comparator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10336246A JP2980124B1 (en) | 1998-11-26 | 1998-11-26 | Chemical filter and its replacement determination method, and gas purification device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10336246A JP2980124B1 (en) | 1998-11-26 | 1998-11-26 | Chemical filter and its replacement determination method, and gas purification device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2980124B1 JP2980124B1 (en) | 1999-11-22 |
| JP2000157826A true JP2000157826A (en) | 2000-06-13 |
Family
ID=18297158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10336246A Expired - Fee Related JP2980124B1 (en) | 1998-11-26 | 1998-11-26 | Chemical filter and its replacement determination method, and gas purification device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2980124B1 (en) |
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