JP1684469S - 基板処理装置用天井ヒータ - Google Patents

基板処理装置用天井ヒータ

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Publication number
JP1684469S
JP1684469S JP2020020257F JP2020020257F JP1684469S JP 1684469 S JP1684469 S JP 1684469S JP 2020020257 F JP2020020257 F JP 2020020257F JP 2020020257 F JP2020020257 F JP 2020020257F JP 1684469 S JP1684469 S JP 1684469S
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JP
Japan
Prior art keywords
substrate processing
processing equipment
ceiling heater
ceiling
heater
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Active
Application number
JP2020020257F
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English (en)
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Publication date
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Priority to JP2020020257F priority Critical patent/JP1684469S/ja
Priority to TW110301195F priority patent/TWD217778S/zh
Priority to US29/773,979 priority patent/USD959393S1/en
Application granted granted Critical
Publication of JP1684469S publication Critical patent/JP1684469S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

本願物品は、基板を処理する基板処理装置において、基板処理装置の処理室を加熱するためのヒータユニットの天井部に設置される天井ヒータである。
JP2020020257F 2020-09-24 2020-09-24 基板処理装置用天井ヒータ Active JP1684469S (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2020020257F JP1684469S (ja) 2020-09-24 2020-09-24 基板処理装置用天井ヒータ
TW110301195F TWD217778S (zh) 2020-09-24 2021-03-09 基板處理裝置用置頂式加熱器
US29/773,979 USD959393S1 (en) 2020-09-24 2021-03-12 Ceiling heater for substrate processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020020257F JP1684469S (ja) 2020-09-24 2020-09-24 基板処理装置用天井ヒータ

Publications (1)

Publication Number Publication Date
JP1684469S true JP1684469S (ja) 2021-05-10

Family

ID=75801969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020020257F Active JP1684469S (ja) 2020-09-24 2020-09-24 基板処理装置用天井ヒータ

Country Status (3)

Country Link
US (1) USD959393S1 (ja)
JP (1) JP1684469S (ja)
TW (1) TWD217778S (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1684468S (ja) * 2020-09-24 2021-05-10 基板処理装置用天井ヒータ
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication

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US2417977A (en) * 1943-03-04 1947-03-25 French Jeannette Cook stove and range
USD312126S (en) * 1988-02-10 1990-11-13 Redring Electric Limited Electric heater element for use in a radiant heater for a glass ceramic hob
USD312127S (en) * 1988-02-10 1990-11-13 Redring Electric Limited Electric heater element for use in a radiant heater for a glass ceramic hob
USD323385S (en) * 1990-02-10 1992-01-21 Ceramaspeed Limited Radiant stove heater
AU112298S (en) * 1990-07-15 1991-09-30 E G O Elektro Gerate Blanc U Fischer A set of radiant heaters
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JP4276813B2 (ja) * 2002-03-26 2009-06-10 株式会社日立国際電気 熱処理装置および半導体製造方法
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USD517743S1 (en) * 2003-12-09 2006-03-21 Le Creuset Of America, Inc. Hotpad
WO2006060134A2 (en) * 2004-11-15 2006-06-08 Cree, Inc. Restricted radiated heating assembly for high temperature processing
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JP1560719S (ja) * 2015-12-01 2016-10-11
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WO2018100850A1 (ja) * 2016-12-01 2018-06-07 株式会社日立国際電気 基板処理装置、天井ヒータおよび半導体装置の製造方法
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Also Published As

Publication number Publication date
USD959393S1 (en) 2022-08-02
TWD217778S (zh) 2022-03-21

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