IT1401746B1 - Attuatore elettromagnetico integrato, in particolare micro-pompa elettromagnetica per un dispositivo microfluidico basato su tecnologia mems, e relativo procedimento di fabbricazione - Google Patents

Attuatore elettromagnetico integrato, in particolare micro-pompa elettromagnetica per un dispositivo microfluidico basato su tecnologia mems, e relativo procedimento di fabbricazione

Info

Publication number
IT1401746B1
IT1401746B1 ITTO2010A000664A ITTO20100664A IT1401746B1 IT 1401746 B1 IT1401746 B1 IT 1401746B1 IT TO2010A000664 A ITTO2010A000664 A IT TO2010A000664A IT TO20100664 A ITTO20100664 A IT TO20100664A IT 1401746 B1 IT1401746 B1 IT 1401746B1
Authority
IT
Italy
Prior art keywords
pump
device based
microfluidic device
manufacturing procedure
mems technology
Prior art date
Application number
ITTO2010A000664A
Other languages
English (en)
Inventor
Natalia Maria Rita Spinella
Piero Giorgio Fallica
Lucio Renna
Clelia Galati
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITTO2010A000664A priority Critical patent/IT1401746B1/it
Priority to US13/194,583 priority patent/US20120024389A1/en
Publication of ITTO20100664A1 publication Critical patent/ITTO20100664A1/it
Application granted granted Critical
Publication of IT1401746B1 publication Critical patent/IT1401746B1/it

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/4902—Electromagnet, transformer or inductor
    • Y10T29/49071—Electromagnet, transformer or inductor by winding or coiling

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
ITTO2010A000664A 2010-07-30 2010-07-30 Attuatore elettromagnetico integrato, in particolare micro-pompa elettromagnetica per un dispositivo microfluidico basato su tecnologia mems, e relativo procedimento di fabbricazione IT1401746B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ITTO2010A000664A IT1401746B1 (it) 2010-07-30 2010-07-30 Attuatore elettromagnetico integrato, in particolare micro-pompa elettromagnetica per un dispositivo microfluidico basato su tecnologia mems, e relativo procedimento di fabbricazione
US13/194,583 US20120024389A1 (en) 2010-07-30 2011-07-29 Integrated electromagnetic actuator, in particular electromagnetic micro-pump for a microfluidic device based on mems technology, and manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2010A000664A IT1401746B1 (it) 2010-07-30 2010-07-30 Attuatore elettromagnetico integrato, in particolare micro-pompa elettromagnetica per un dispositivo microfluidico basato su tecnologia mems, e relativo procedimento di fabbricazione

Publications (2)

Publication Number Publication Date
ITTO20100664A1 ITTO20100664A1 (it) 2012-01-31
IT1401746B1 true IT1401746B1 (it) 2013-08-02

Family

ID=43662154

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2010A000664A IT1401746B1 (it) 2010-07-30 2010-07-30 Attuatore elettromagnetico integrato, in particolare micro-pompa elettromagnetica per un dispositivo microfluidico basato su tecnologia mems, e relativo procedimento di fabbricazione

Country Status (2)

Country Link
US (1) US20120024389A1 (it)
IT (1) IT1401746B1 (it)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10364143B2 (en) * 2014-12-18 2019-07-30 Stmicroelectronics S.R.L. Integrated micro-electromechanical device of semiconductor material having a diaphragm, such as a pressure sensor and an actuator
US10136563B2 (en) * 2015-06-25 2018-11-20 International Business Machines Corporation Active perforation for advanced server cooling
US10295948B2 (en) * 2016-04-14 2019-05-21 Ricoh Company, Ltd. Image forming apparatus
US20170355591A1 (en) * 2016-06-08 2017-12-14 Infineon Technologies Ag Microelectromechanical device and a method of manufacturing a microelectromechanical device
JP2022553270A (ja) * 2019-10-18 2022-12-22 ヒールテル・（グアンジョウ）・メディカル・テクノロジー・カンパニー・リミテッド 流体を注入するためのシステム及び方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2930324A (en) * 1955-10-03 1960-03-29 Ohio Commw Eng Co Magnetic pump
JPS60138940A (ja) * 1983-12-27 1985-07-23 Toshiba Corp 半導体装置の製造方法
US5477082A (en) * 1994-01-11 1995-12-19 Exponential Technology, Inc. Bi-planar multi-chip module
US6116863A (en) * 1997-05-30 2000-09-12 University Of Cincinnati Electromagnetically driven microactuated device and method of making the same
US20020098122A1 (en) * 2001-01-22 2002-07-25 Angad Singh Active disposable microfluidic system with externally actuated micropump
JP4576058B2 (ja) * 2001-01-31 2010-11-04 オリンパス株式会社 変位検出機能を備えた可変形状鏡
US20030175947A1 (en) * 2001-11-05 2003-09-18 Liu Robin Hui Enhanced mixing in microfluidic devices
US6786708B2 (en) * 2002-07-18 2004-09-07 The Regents Of The University Of Michigan Laminated devices and methods of making same
US6756708B2 (en) * 2002-08-29 2004-06-29 Harris Corporation Electronic circuit incorporating a micro-electromechanical energy storage device
US7090471B2 (en) * 2003-01-15 2006-08-15 California Institute Of Technology Integrated electrostatic peristaltic pump method and apparatus
DE102004042987A1 (de) * 2004-09-06 2006-03-23 Roche Diagnostics Gmbh Push-Pull betriebene Pumpe für ein mikrofluidisches System
WO2007114912A2 (en) * 2006-03-30 2007-10-11 Wayne State University Check valve diaphragm micropump
KR100708013B1 (ko) * 2006-04-24 2007-04-16 이용구 마그네틱 척
DE102008006832A1 (de) * 2008-01-30 2009-08-13 Eads Deutschland Gmbh Elektromagnetischer Membran-Mikroaktor
DE102008022504B4 (de) * 2008-05-07 2012-11-29 Airbus Operations Gmbh Schaltbarer Vortexgenerator und damit gebildetes Array sowie Verwendungen derselben
TWI392639B (zh) * 2008-10-31 2013-04-11 Univ Nat Pingtung Sci & Tech 電磁式微幫浦
US20100219217A1 (en) * 2009-02-27 2010-09-02 Andochick Scott E Magnetic holder

Also Published As

Publication number Publication date
ITTO20100664A1 (it) 2012-01-31
US20120024389A1 (en) 2012-02-02

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