IT1204420B - SUPER-PURIFIER FOR NITROGEN AND RELATED PURIFICATION PROCESS - Google Patents
SUPER-PURIFIER FOR NITROGEN AND RELATED PURIFICATION PROCESSInfo
- Publication number
- IT1204420B IT1204420B IT20963/86A IT2096386A IT1204420B IT 1204420 B IT1204420 B IT 1204420B IT 20963/86 A IT20963/86 A IT 20963/86A IT 2096386 A IT2096386 A IT 2096386A IT 1204420 B IT1204420 B IT 1204420B
- Authority
- IT
- Italy
- Prior art keywords
- purifier
- super
- nitrogen
- purification process
- related purification
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
- C01B21/0405—Purification or separation processes
- C01B21/0494—Combined chemical and physical processing
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
- C01B21/0405—Purification or separation processes
- C01B21/0433—Physical processing only
- C01B21/045—Physical processing only by adsorption in solids
- C01B21/0483—Physical processing only by adsorption in solids in getters
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0001—Separation or purification processing
- C01B2210/0003—Chemical processing
- C01B2210/0004—Chemical processing by oxidation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0001—Separation or purification processing
- C01B2210/0009—Physical processing
- C01B2210/0014—Physical processing by adsorption in solids
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0001—Separation or purification processing
- C01B2210/0009—Physical processing
- C01B2210/0014—Physical processing by adsorption in solids
- C01B2210/0023—Physical processing by adsorption in solids in getters
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2210/00—Purification or separation of specific gases
- C01B2210/0042—Making ultrapure specific gas
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Separation Of Gases By Adsorption (AREA)
- Gas Separation By Absorption (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Treating Waste Gases (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60140628A JPS623006A (en) | 1985-06-28 | 1985-06-28 | Nitrogen super purification facilities and purification process |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8620963A0 IT8620963A0 (en) | 1986-06-27 |
IT1204420B true IT1204420B (en) | 1989-03-01 |
Family
ID=15273115
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT20963/86A IT1204420B (en) | 1985-06-28 | 1986-06-27 | SUPER-PURIFIER FOR NITROGEN AND RELATED PURIFICATION PROCESS |
Country Status (10)
Country | Link |
---|---|
JP (1) | JPS623006A (en) |
KR (1) | KR930006690B1 (en) |
BE (1) | BE904998A (en) |
CA (1) | CA1300346C (en) |
DE (1) | DE3621013C2 (en) |
FR (1) | FR2584062B1 (en) |
GB (1) | GB2177080B (en) |
IT (1) | IT1204420B (en) |
NL (1) | NL192104C (en) |
SE (1) | SE463149B (en) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1227219B (en) * | 1988-09-26 | 1991-03-27 | Getters Spa | APPARATUS AND RELATED METHOD TO REMOVE GASEOUS IMPURITIES FROM INERT GASES AND ENSURE EXTREMELY LOW HYDROGEN LEVELS |
DE3835825C1 (en) * | 1988-10-21 | 1990-03-08 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De | |
FR2642678A1 (en) * | 1989-02-07 | 1990-08-10 | Air Liquide | Process for producing a gaseous atmosphere in contact with a metal at high temperature |
DE3926015A1 (en) * | 1989-08-05 | 1991-02-07 | Messer Griesheim Gmbh | METHOD FOR THE FINE PURIFICATION OF GASES |
IT1237944B (en) * | 1990-01-05 | 1993-06-19 | Getters Spa | METHOD FOR DETERMINING THE END OF THE USEFUL LIFE OF AN INERT GAS PURIFIER AND RELATED EQUIPMENT |
IT1246358B (en) * | 1990-07-12 | 1994-11-17 | Getters Spa | PROCESS TO ELIMINATE IMPURITIES FROM A WATER GAS |
IT1244006B (en) * | 1990-11-02 | 1994-06-28 | Getters Spa | PURIFICATION PROCESS OF AMMONIA. |
IT1270875B (en) * | 1993-04-29 | 1997-05-13 | Getters Spa | HYDROGEN PURIFICATION PROCEDURE AND RELATIVE PURIFIER |
US5238469A (en) * | 1992-04-02 | 1993-08-24 | Saes Pure Gas, Inc. | Method and apparatus for removing residual hydrogen from a purified gas |
US6436352B1 (en) | 1993-04-29 | 2002-08-20 | Saes Getter, S.P.A. | Hydrogen purification |
JPH1157371A (en) * | 1997-08-11 | 1999-03-02 | Taiyo Toyo Sanso Co Ltd | Production of ultraclean air |
EP1028798B1 (en) | 1997-10-15 | 2002-01-02 | SAES PURE GAS, Inc. | Gas purification system with safety device and method for purifying gases |
US6068685A (en) * | 1997-10-15 | 2000-05-30 | Saes Pure Gas, Inc. | Semiconductor manufacturing system with getter safety device |
US6299670B1 (en) * | 1999-06-10 | 2001-10-09 | Saes Pure Gas, Inc. | Integrated heated getter purifier system |
KR100356611B1 (en) * | 2000-08-10 | 2002-10-18 | 주식회사 아토 | Purification Method and Apparatus for Nitrogen |
ITMI20010930A1 (en) | 2001-05-07 | 2002-11-07 | Getters Spa | METHOD FOR THE MEASUREMENT OF THE CONCENTRATION OF HYDROGEN AND METHANE IN NITROGEN BY IONIC MOBILITY SPETROSCOPY |
ITMI20011193A1 (en) | 2001-06-06 | 2002-12-06 | Getters Spa | METHOD FOR MEASUREMENT USING IONIC MOBILITY SPECTROSCOPY OF THE CONCENTRATION OF WATER IN ARGON, HYDROGEN, NITROGEN AND HELIUM |
JP4918255B2 (en) * | 2005-12-22 | 2012-04-18 | ウチヤ・サーモスタット株式会社 | Nitrogen gas generator |
CN110759323A (en) * | 2018-07-27 | 2020-02-07 | 隆基绿能科技股份有限公司 | Gas purification reactor and gas purification method |
CN112978692B (en) * | 2021-03-04 | 2022-08-05 | 北京高麦克仪器科技有限公司 | 780 helium purifier |
JP7210803B1 (en) * | 2022-10-04 | 2023-01-23 | レール・リキード-ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | gas purifier |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3535074A (en) * | 1965-10-29 | 1970-10-20 | Hitachi Ltd | Method and apparatus for purifying crude inert gases |
BE792561A (en) * | 1972-12-11 | 1973-03-30 | Getters Spa | Gas purifier - esp for rare gases and hydrogen with regeneration system for absorber cartridges |
IT1115156B (en) * | 1979-04-06 | 1986-02-03 | Getters Spa | ZR-FE ALLOYS FOR HYDROGEN ABSORPTION AT LOW TEMPERATURES |
DE3137569A1 (en) * | 1981-09-22 | 1983-04-21 | Leybold-Heraeus GmbH, 5000 Köln | METHOD AND DEVICE FOR PRODUCING HIGH PURITY NITROGEN |
JPS6020323A (en) * | 1983-07-15 | 1985-02-01 | Toshiba Corp | Disk device |
-
1985
- 1985-06-28 JP JP60140628A patent/JPS623006A/en active Granted
-
1986
- 1986-06-23 DE DE3621013A patent/DE3621013C2/en not_active Expired - Lifetime
- 1986-06-23 CA CA000512229A patent/CA1300346C/en not_active Expired - Fee Related
- 1986-06-23 FR FR8609026A patent/FR2584062B1/en not_active Expired - Lifetime
- 1986-06-26 KR KR1019860005146A patent/KR930006690B1/en not_active IP Right Cessation
- 1986-06-26 GB GB8615619A patent/GB2177080B/en not_active Expired
- 1986-06-26 BE BE2/61004A patent/BE904998A/en not_active IP Right Cessation
- 1986-06-27 IT IT20963/86A patent/IT1204420B/en active
- 1986-06-27 NL NL8601692A patent/NL192104C/en not_active IP Right Cessation
- 1986-06-27 SE SE8602870A patent/SE463149B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR930006690B1 (en) | 1993-07-22 |
NL192104B (en) | 1996-10-01 |
FR2584062B1 (en) | 1990-12-21 |
CA1300346C (en) | 1992-05-12 |
KR870000237A (en) | 1987-02-17 |
GB2177080A (en) | 1987-01-14 |
SE463149B (en) | 1990-10-15 |
NL192104C (en) | 1997-02-04 |
FR2584062A1 (en) | 1987-01-02 |
DE3621013A1 (en) | 1987-01-08 |
GB2177080B (en) | 1989-08-31 |
IT8620963A0 (en) | 1986-06-27 |
BE904998A (en) | 1986-10-16 |
GB8615619D0 (en) | 1986-07-30 |
NL8601692A (en) | 1987-01-16 |
SE8602870D0 (en) | 1986-06-27 |
DE3621013C2 (en) | 1996-02-15 |
SE8602870L (en) | 1986-12-29 |
JPS623006A (en) | 1987-01-09 |
JPH0456763B2 (en) | 1992-09-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970528 |