IL140195A0 - Integrated roller transport pod and asynchronous conveyor - Google Patents
Integrated roller transport pod and asynchronous conveyorInfo
- Publication number
- IL140195A0 IL140195A0 IL14019599A IL14019599A IL140195A0 IL 140195 A0 IL140195 A0 IL 140195A0 IL 14019599 A IL14019599 A IL 14019599A IL 14019599 A IL14019599 A IL 14019599A IL 140195 A0 IL140195 A0 IL 140195A0
- Authority
- IL
- Israel
- Prior art keywords
- roller transport
- transport pod
- integrated roller
- asynchronous conveyor
- asynchronous
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G61/00—Use of pick-up or transfer devices or of manipulators for stacking or de-stacking articles not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
- B65G13/02—Roller-ways having driven rollers
- B65G13/04—Roller-ways having driven rollers all rollers driven
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
- B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Intermediate Stations On Conveyors (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Control Of Conveyors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/103,479 US6223886B1 (en) | 1998-06-24 | 1998-06-24 | Integrated roller transport pod and asynchronous conveyor |
PCT/US1999/014425 WO1999067158A2 (en) | 1998-06-24 | 1999-06-24 | Integrated roller transport pod and asynchronous conveyor |
Publications (1)
Publication Number | Publication Date |
---|---|
IL140195A0 true IL140195A0 (en) | 2002-02-10 |
Family
ID=22295415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL14019599A IL140195A0 (en) | 1998-06-24 | 1999-06-24 | Integrated roller transport pod and asynchronous conveyor |
Country Status (10)
Country | Link |
---|---|
US (2) | US6223886B1 (zh) |
EP (1) | EP1334051A2 (zh) |
JP (1) | JP2003524544A (zh) |
KR (1) | KR100432380B1 (zh) |
CN (1) | CN1231401C (zh) |
AU (1) | AU4720399A (zh) |
CA (1) | CA2335054A1 (zh) |
IL (1) | IL140195A0 (zh) |
TW (1) | TW430630B (zh) |
WO (1) | WO1999067158A2 (zh) |
Families Citing this family (62)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6942738B1 (en) * | 1996-07-15 | 2005-09-13 | Semitool, Inc. | Automated semiconductor processing system |
US6223886B1 (en) * | 1998-06-24 | 2001-05-01 | Asyst Technologies, Inc. | Integrated roller transport pod and asynchronous conveyor |
US6533101B2 (en) | 1998-06-24 | 2003-03-18 | Asyst Technologies, Inc. | Integrated transport carrier and conveyor system |
US6240335B1 (en) * | 1998-12-14 | 2001-05-29 | Palo Alto Technologies, Inc. | Distributed control system architecture and method for a material transport system |
US6692196B1 (en) * | 1999-02-19 | 2004-02-17 | The Procter & Gamble Company | Apparatus for manufacturing hygienic articles |
US6308818B1 (en) * | 1999-08-02 | 2001-10-30 | Asyst Technologies, Inc. | Transport system with integrated transport carrier and directors |
EP1332349A4 (en) * | 2000-07-07 | 2008-12-17 | Semitool Inc | AUTOMATED PROCESSING SYSTEM |
ES2260289T3 (es) * | 2000-09-22 | 2006-11-01 | Mikael Jarvenkyla | Cadena de produccion para productos alimenticios. |
FR2819497B1 (fr) * | 2001-01-15 | 2003-08-08 | Prodel Holding | Installation pour la circulation de palettes porte-pieces et palette pour cette installation |
WO2002059738A1 (en) * | 2001-01-26 | 2002-08-01 | Asyst Technologies, Inc. | Control system for transfer and buffering |
US6821082B2 (en) * | 2001-10-30 | 2004-11-23 | Freescale Semiconductor, Inc. | Wafer management system and methods for managing wafers |
US6726429B2 (en) | 2002-02-19 | 2004-04-27 | Vertical Solutions, Inc. | Local store for a wafer processing station |
US20040080852A1 (en) * | 2002-10-18 | 2004-04-29 | Seagate Technology Llc | Disc caddy feeder system with caddy gripper for data storage devices |
US7165303B2 (en) * | 2002-12-16 | 2007-01-23 | Seagate Technology Llc | Disc cassette delidder and feeder system for data storage devices |
US7077264B2 (en) * | 2003-01-27 | 2006-07-18 | Applied Material, Inc. | Methods and apparatus for transporting substrate carriers |
EP1750299B1 (en) * | 2003-01-27 | 2008-06-11 | Applied Materials, Inc. | Apparatus for transporting substrate carriers |
US6990721B2 (en) * | 2003-03-21 | 2006-01-31 | Brooks Automation, Inc. | Growth model automated material handling system |
DE10321915B3 (de) * | 2003-05-15 | 2005-06-09 | Siemens Ag | Steigung für ein Behälter-Fördersystem, insbesondere eine Flughafen-Gepäckförderanlage |
DE10348091A1 (de) * | 2003-10-16 | 2005-05-19 | Kolbus Gmbh & Co. Kg | Förderer mit profilierten Seitenwangen |
US20050095087A1 (en) * | 2003-10-30 | 2005-05-05 | Sullivan Robert P. | Automated material handling system |
CN1307685C (zh) * | 2003-12-05 | 2007-03-28 | 财团法人工业技术研究院 | 互锁运动控制方法 |
JP4473272B2 (ja) | 2004-07-22 | 2010-06-02 | 平田機工株式会社 | 搬送装置 |
JP2006191039A (ja) * | 2005-01-05 | 2006-07-20 | Samsung Sdi Co Ltd | トレイ移送装置 |
JP2009500267A (ja) * | 2005-07-11 | 2009-01-08 | アシスト テクノロジーズ インコーポレイテッド | 半導体コンテナ用のベルトコンベア |
CN100388455C (zh) * | 2005-09-29 | 2008-05-14 | 中芯国际集成电路制造(上海)有限公司 | 具有安全挡板的晶舟盒导轨传动装置 |
JP2009515368A (ja) * | 2005-11-07 | 2009-04-09 | ブルックス オートメーション インコーポレイテッド | 小容積キャリヤ搬送体、積載ポート、バッファーシステム |
US20080107507A1 (en) * | 2005-11-07 | 2008-05-08 | Bufano Michael L | Reduced capacity carrier, transport, load port, buffer system |
US8267634B2 (en) | 2005-11-07 | 2012-09-18 | Brooks Automation, Inc. | Reduced capacity carrier, transport, load port, buffer system |
US8365919B2 (en) * | 2005-12-29 | 2013-02-05 | Shin-Etsu Polymer Co., Ltd. | Substrate storage container |
US7281623B1 (en) * | 2006-04-18 | 2007-10-16 | Aquest Systems Corporation | Transport system including vertical rollers |
US20070289843A1 (en) * | 2006-04-18 | 2007-12-20 | Barry Kitazumi | Conveyor System Including Offset Section |
US8376130B2 (en) * | 2006-07-10 | 2013-02-19 | Muratec Automation Co., Ltd. | Direct drive modular belt conveyor, cartridge, and quick connect-disconnect constant velocity drive shaft, for high speed FOUP transport |
CN101578700B (zh) * | 2006-08-18 | 2012-11-14 | 布鲁克斯自动化公司 | 容量减少的载物台,传送,装载端口,缓冲*** |
US20080050208A1 (en) * | 2006-08-25 | 2008-02-28 | Barry Kitazumi | High speed transporter including horizontal belt |
TW200909318A (en) * | 2006-08-25 | 2009-03-01 | Aquest Systems Corp | Conveyor transfer system |
US9834378B2 (en) * | 2006-12-22 | 2017-12-05 | Brooks Automation, Inc. | Loader and buffer for reduced lot size |
WO2008142766A1 (ja) * | 2007-05-21 | 2008-11-27 | Hirata Corporation | ワーク保持ユニット及びコンベア装置 |
JP5169023B2 (ja) * | 2007-05-23 | 2013-03-27 | 村田機械株式会社 | 搬送システム |
US8096408B2 (en) * | 2008-04-07 | 2012-01-17 | Muratec Automation Co., Ltd. | Segmented material conveyor system, threshold assembly and method for making and using the same |
KR20110009687A (ko) * | 2008-06-20 | 2011-01-28 | 무라텍 오토메이션 가부시키가이샤 | 컨베이어 시스템으로 그리고 컨베이어 시스템으로부터의 다이렉트 로딩 |
DE102008045370B4 (de) * | 2008-09-02 | 2010-07-08 | Grenzebach Maschinenbau Gmbh | Verfahren und Vorrichtung zum Transport großflächiger, dünner Glasplatten |
FR2944266B1 (fr) * | 2009-04-08 | 2014-04-11 | Philippe Moutie | Dispositif de stockage et systeme de transport ameliore |
KR101215220B1 (ko) | 2009-09-23 | 2012-12-24 | 크린팩토메이션 주식회사 | Foup 반송용 컨베이어 |
KR101642853B1 (ko) * | 2009-11-27 | 2016-07-26 | 가부시키가이샤 다이후쿠 | 천정 반송차 |
CN101811623B (zh) * | 2010-04-07 | 2012-10-03 | 友达光电股份有限公司 | 输送装置 |
JP5827069B2 (ja) * | 2011-08-11 | 2015-12-02 | 平田機工株式会社 | 搬送装置 |
US8827618B2 (en) * | 2011-12-02 | 2014-09-09 | Brooks Automation, Inc. | Transport system |
KR20130117143A (ko) * | 2012-04-17 | 2013-10-25 | 삼성전자주식회사 | 호이스트 장치 |
CN104176430A (zh) * | 2013-05-28 | 2014-12-03 | 北京中电科电子装备有限公司 | 工件传输装置 |
WO2015064268A1 (ja) * | 2013-10-28 | 2015-05-07 | 村田機械株式会社 | コンベヤ装置 |
KR102174332B1 (ko) * | 2014-07-30 | 2020-11-04 | 삼성전자주식회사 | 반도체 제조 라인의 스토커 및 상기 스토커를 이용하여 웨이퍼를 이송하는 방법 |
TWI554464B (zh) * | 2015-06-22 | 2016-10-21 | 盟立自動化股份有限公司 | 運輸裝置及使用該運輸裝置之運輸系統 |
KR102394712B1 (ko) * | 2015-09-09 | 2022-05-04 | 삼성전자주식회사 | 이송 시스템 및 이에 포함된 이송 유닛 |
CN107321718A (zh) * | 2017-08-14 | 2017-11-07 | 惠科股份有限公司 | 显示面板置放架传送装置 |
JP6868223B2 (ja) * | 2018-05-18 | 2021-05-12 | 株式会社ダイフク | カーブコンベヤ |
DE102019125207A1 (de) * | 2019-09-19 | 2021-03-25 | Markus Steckling | Vorrichtung und Verfahren zur Produktion von Kleinteilen |
CN110980162B (zh) * | 2019-12-20 | 2021-04-30 | 安徽天兵电子科技股份有限公司 | 一种电路板的加工输送装置 |
KR20210094273A (ko) | 2020-01-21 | 2021-07-29 | 에스케이하이닉스 주식회사 | 이송용 컨베이어 장치 및 그것의 동작 방법 |
CN112705971A (zh) * | 2020-12-16 | 2021-04-27 | 福建中维动力科技股份有限公司 | 一种用于重卡板状零件翻转定位装置的进料机构 |
US20220406638A1 (en) * | 2021-06-17 | 2022-12-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Hash overhead hoist transport rail system and methods of operating the same |
US12046497B2 (en) * | 2022-08-02 | 2024-07-23 | Visera Technologies Company Ltd. | Transfer system for wafer cassettes |
CN116177175B (zh) * | 2023-01-31 | 2024-01-30 | 果***造(上海)技术股份有限公司 | 一种接驳装置及输送线体 |
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US6223886B1 (en) * | 1998-06-24 | 2001-05-01 | Asyst Technologies, Inc. | Integrated roller transport pod and asynchronous conveyor |
US6308818B1 (en) * | 1999-08-02 | 2001-10-30 | Asyst Technologies, Inc. | Transport system with integrated transport carrier and directors |
-
1998
- 1998-06-24 US US09/103,479 patent/US6223886B1/en not_active Expired - Fee Related
-
1999
- 1999-06-23 TW TW088110577A patent/TW430630B/zh not_active IP Right Cessation
- 1999-06-24 IL IL14019599A patent/IL140195A0/xx unknown
- 1999-06-24 KR KR10-2000-7014827A patent/KR100432380B1/ko not_active IP Right Cessation
- 1999-06-24 JP JP2000555819A patent/JP2003524544A/ja active Pending
- 1999-06-24 WO PCT/US1999/014425 patent/WO1999067158A2/en not_active Application Discontinuation
- 1999-06-24 EP EP99930726A patent/EP1334051A2/en not_active Withdrawn
- 1999-06-24 CN CNB998077453A patent/CN1231401C/zh not_active Expired - Fee Related
- 1999-06-24 AU AU47203/99A patent/AU4720399A/en not_active Abandoned
- 1999-06-24 CA CA002335054A patent/CA2335054A1/en not_active Abandoned
-
2001
- 2001-02-08 US US09/781,060 patent/US6494308B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO1999067158A9 (en) | 2000-04-06 |
US6223886B1 (en) | 2001-05-01 |
KR100432380B1 (ko) | 2004-05-22 |
KR20010072645A (ko) | 2001-07-31 |
WO1999067158A3 (en) | 2003-05-30 |
TW430630B (en) | 2001-04-21 |
JP2003524544A (ja) | 2003-08-19 |
CA2335054A1 (en) | 1999-12-29 |
EP1334051A2 (en) | 2003-08-13 |
WO1999067158A2 (en) | 1999-12-29 |
US20010008201A1 (en) | 2001-07-19 |
US6494308B2 (en) | 2002-12-17 |
AU4720399A (en) | 2000-01-10 |
CN1231401C (zh) | 2005-12-14 |
CN1461280A (zh) | 2003-12-10 |
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