IL134757A0 - Transport system - Google Patents
Transport systemInfo
- Publication number
- IL134757A0 IL134757A0 IL13475798A IL13475798A IL134757A0 IL 134757 A0 IL134757 A0 IL 134757A0 IL 13475798 A IL13475798 A IL 13475798A IL 13475798 A IL13475798 A IL 13475798A IL 134757 A0 IL134757 A0 IL 134757A0
- Authority
- IL
- Israel
- Prior art keywords
- transport system
- floor
- machining center
- facilities
- machining
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
- B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Threshing Machine Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19737839A DE19737839C2 (de) | 1997-08-29 | 1997-08-29 | Transportsystem |
PCT/DE1998/002516 WO1999012192A2 (de) | 1997-08-29 | 1998-08-27 | Transportsystem |
Publications (1)
Publication Number | Publication Date |
---|---|
IL134757A0 true IL134757A0 (en) | 2001-04-30 |
Family
ID=7840645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL13475798A IL134757A0 (en) | 1997-08-29 | 1998-08-27 | Transport system |
Country Status (10)
Country | Link |
---|---|
EP (1) | EP1021823B1 (ja) |
JP (1) | JP3393858B2 (ja) |
KR (1) | KR100374085B1 (ja) |
CN (1) | CN1133200C (ja) |
AT (1) | ATE265742T1 (ja) |
AU (1) | AU1020099A (ja) |
DE (1) | DE19737839C2 (ja) |
IL (1) | IL134757A0 (ja) |
TW (1) | TW434173B (ja) |
WO (1) | WO1999012192A2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1159829A (ja) * | 1997-08-08 | 1999-03-02 | Mitsubishi Electric Corp | 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法 |
DE19913628A1 (de) * | 1999-03-25 | 2000-10-05 | Siemens Ag | Anlage zur Fertigung von Halbleiterprodukten |
US6354781B1 (en) | 1999-11-01 | 2002-03-12 | Chartered Semiconductor Manufacturing Company | Semiconductor manufacturing system |
DE10013833A1 (de) * | 2000-03-16 | 2001-09-20 | Dresden Ev Inst Festkoerper | Vorrichtung zum vertikalen Transportieren von Produkten |
DE10157192A1 (de) * | 2001-11-23 | 2003-06-12 | Ortner C L S Gmbh | Lagereinrichtung |
US6946343B2 (en) * | 2003-04-03 | 2005-09-20 | United Microelectronics Corp. | Manufacturing method of an integrated chip |
DE102007058650B3 (de) * | 2007-12-04 | 2009-07-30 | Horst-Walter Hauer | Druckereianlage |
FR3078957B1 (fr) * | 2018-03-19 | 2021-05-21 | Fives Cinetic | Systeme de transfert de pieces pour atelier |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2613072C3 (de) * | 1976-03-26 | 1987-07-30 | Siemens AG, 1000 Berlin und 8000 München | Implantierbare Elektrode |
DE2618237C2 (de) * | 1976-04-26 | 1987-01-08 | Inventio Ag, Hergiswil, Nidwalden | Förderanlage für Horizontal- und Vertikaltransport |
DE3320742A1 (de) * | 1983-06-09 | 1984-12-13 | BMD Badische Maschinenfabrik Durlach GmbH, 7500 Karlsruhe | Etagenfoerderer fuer eine giessereianlage |
DE3630780A1 (de) * | 1986-09-10 | 1988-03-24 | Trapp & Partner Ag Fuer Neue T | Zwischenspeicher zur zeitweisen lagerung von gegenstaenden |
US4917227A (en) * | 1986-09-11 | 1990-04-17 | Kabushiki Kaisha Toshiba | Conveyance system for article container case |
FI86834C (fi) * | 1988-05-11 | 1992-10-26 | Tamglass Eng Oy | Mellanlagringssystem foer glasskivpar i en vindruteproduktionslinje |
US4986715A (en) * | 1988-07-13 | 1991-01-22 | Tokyo Electron Limited | Stock unit for storing carriers |
JPH06143067A (ja) * | 1992-10-29 | 1994-05-24 | Sando Yakuhin Kk | 高品質製品の製造プラント |
JPH06179506A (ja) * | 1992-12-14 | 1994-06-28 | Daifuku Co Ltd | 搬送及び床置き保管装置 |
US5351801A (en) * | 1993-06-07 | 1994-10-04 | Board Of Regents - Univ. Of Nebraska | Automated laboratory conveyor system |
US5344365A (en) * | 1993-09-14 | 1994-09-06 | Sematech, Inc. | Integrated building and conveying structure for manufacturing under ultraclean conditions |
JPH1070055A (ja) * | 1996-08-28 | 1998-03-10 | Sony Corp | 半導体装置生産用クリーンルーム |
-
1997
- 1997-08-29 DE DE19737839A patent/DE19737839C2/de not_active Expired - Fee Related
-
1998
- 1998-08-24 TW TW087113905A patent/TW434173B/zh active
- 1998-08-27 JP JP2000509104A patent/JP3393858B2/ja not_active Expired - Fee Related
- 1998-08-27 WO PCT/DE1998/002516 patent/WO1999012192A2/de active IP Right Grant
- 1998-08-27 IL IL13475798A patent/IL134757A0/xx unknown
- 1998-08-27 AU AU10200/99A patent/AU1020099A/en not_active Abandoned
- 1998-08-27 AT AT98952508T patent/ATE265742T1/de not_active IP Right Cessation
- 1998-08-27 EP EP98952508A patent/EP1021823B1/de not_active Expired - Lifetime
- 1998-08-27 CN CN988108267A patent/CN1133200C/zh not_active Expired - Fee Related
- 1998-08-27 KR KR10-2000-7002149A patent/KR100374085B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
AU1020099A (en) | 1999-03-22 |
WO1999012192A2 (de) | 1999-03-11 |
JP2001515269A (ja) | 2001-09-18 |
TW434173B (en) | 2001-05-16 |
KR20010023503A (ko) | 2001-03-26 |
EP1021823A2 (de) | 2000-07-26 |
ATE265742T1 (de) | 2004-05-15 |
JP3393858B2 (ja) | 2003-04-07 |
DE19737839C2 (de) | 2001-03-08 |
CN1133200C (zh) | 2003-12-31 |
EP1021823B1 (de) | 2004-04-28 |
KR100374085B1 (ko) | 2003-03-03 |
WO1999012192A3 (de) | 1999-09-23 |
DE19737839A1 (de) | 1999-03-11 |
CN1278361A (zh) | 2000-12-27 |
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