IL134757A0 - Transport system - Google Patents

Transport system

Info

Publication number
IL134757A0
IL134757A0 IL13475798A IL13475798A IL134757A0 IL 134757 A0 IL134757 A0 IL 134757A0 IL 13475798 A IL13475798 A IL 13475798A IL 13475798 A IL13475798 A IL 13475798A IL 134757 A0 IL134757 A0 IL 134757A0
Authority
IL
Israel
Prior art keywords
transport system
floor
machining center
facilities
machining
Prior art date
Application number
IL13475798A
Other languages
English (en)
Original Assignee
Infineon Technologies Ag
Ortner C L S Gmbh Cleanroom Lo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag, Ortner C L S Gmbh Cleanroom Lo filed Critical Infineon Technologies Ag
Publication of IL134757A0 publication Critical patent/IL134757A0/xx

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • B65G37/02Flow-sheets for conveyor combinations in warehouses, magazines or workshops
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Threshing Machine Elements (AREA)
IL13475798A 1997-08-29 1998-08-27 Transport system IL134757A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19737839A DE19737839C2 (de) 1997-08-29 1997-08-29 Transportsystem
PCT/DE1998/002516 WO1999012192A2 (de) 1997-08-29 1998-08-27 Transportsystem

Publications (1)

Publication Number Publication Date
IL134757A0 true IL134757A0 (en) 2001-04-30

Family

ID=7840645

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13475798A IL134757A0 (en) 1997-08-29 1998-08-27 Transport system

Country Status (10)

Country Link
EP (1) EP1021823B1 (ja)
JP (1) JP3393858B2 (ja)
KR (1) KR100374085B1 (ja)
CN (1) CN1133200C (ja)
AT (1) ATE265742T1 (ja)
AU (1) AU1020099A (ja)
DE (1) DE19737839C2 (ja)
IL (1) IL134757A0 (ja)
TW (1) TW434173B (ja)
WO (1) WO1999012192A2 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1159829A (ja) * 1997-08-08 1999-03-02 Mitsubishi Electric Corp 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法
DE19913628A1 (de) * 1999-03-25 2000-10-05 Siemens Ag Anlage zur Fertigung von Halbleiterprodukten
US6354781B1 (en) 1999-11-01 2002-03-12 Chartered Semiconductor Manufacturing Company Semiconductor manufacturing system
DE10013833A1 (de) * 2000-03-16 2001-09-20 Dresden Ev Inst Festkoerper Vorrichtung zum vertikalen Transportieren von Produkten
DE10157192A1 (de) * 2001-11-23 2003-06-12 Ortner C L S Gmbh Lagereinrichtung
US6946343B2 (en) * 2003-04-03 2005-09-20 United Microelectronics Corp. Manufacturing method of an integrated chip
DE102007058650B3 (de) * 2007-12-04 2009-07-30 Horst-Walter Hauer Druckereianlage
FR3078957B1 (fr) * 2018-03-19 2021-05-21 Fives Cinetic Systeme de transfert de pieces pour atelier

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2613072C3 (de) * 1976-03-26 1987-07-30 Siemens AG, 1000 Berlin und 8000 München Implantierbare Elektrode
DE2618237C2 (de) * 1976-04-26 1987-01-08 Inventio Ag, Hergiswil, Nidwalden Förderanlage für Horizontal- und Vertikaltransport
DE3320742A1 (de) * 1983-06-09 1984-12-13 BMD Badische Maschinenfabrik Durlach GmbH, 7500 Karlsruhe Etagenfoerderer fuer eine giessereianlage
DE3630780A1 (de) * 1986-09-10 1988-03-24 Trapp & Partner Ag Fuer Neue T Zwischenspeicher zur zeitweisen lagerung von gegenstaenden
US4917227A (en) * 1986-09-11 1990-04-17 Kabushiki Kaisha Toshiba Conveyance system for article container case
FI86834C (fi) * 1988-05-11 1992-10-26 Tamglass Eng Oy Mellanlagringssystem foer glasskivpar i en vindruteproduktionslinje
US4986715A (en) * 1988-07-13 1991-01-22 Tokyo Electron Limited Stock unit for storing carriers
JPH06143067A (ja) * 1992-10-29 1994-05-24 Sando Yakuhin Kk 高品質製品の製造プラント
JPH06179506A (ja) * 1992-12-14 1994-06-28 Daifuku Co Ltd 搬送及び床置き保管装置
US5351801A (en) * 1993-06-07 1994-10-04 Board Of Regents - Univ. Of Nebraska Automated laboratory conveyor system
US5344365A (en) * 1993-09-14 1994-09-06 Sematech, Inc. Integrated building and conveying structure for manufacturing under ultraclean conditions
JPH1070055A (ja) * 1996-08-28 1998-03-10 Sony Corp 半導体装置生産用クリーンルーム

Also Published As

Publication number Publication date
AU1020099A (en) 1999-03-22
WO1999012192A2 (de) 1999-03-11
JP2001515269A (ja) 2001-09-18
TW434173B (en) 2001-05-16
KR20010023503A (ko) 2001-03-26
EP1021823A2 (de) 2000-07-26
ATE265742T1 (de) 2004-05-15
JP3393858B2 (ja) 2003-04-07
DE19737839C2 (de) 2001-03-08
CN1133200C (zh) 2003-12-31
EP1021823B1 (de) 2004-04-28
KR100374085B1 (ko) 2003-03-03
WO1999012192A3 (de) 1999-09-23
DE19737839A1 (de) 1999-03-11
CN1278361A (zh) 2000-12-27

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