ID16032A - Sistem distribusi rangkaian katub untuk gas ultra dengan kemurnian tinggi - Google Patents

Sistem distribusi rangkaian katub untuk gas ultra dengan kemurnian tinggi

Info

Publication number
ID16032A
ID16032A ID970532A ID970532A ID16032A ID 16032 A ID16032 A ID 16032A ID 970532 A ID970532 A ID 970532A ID 970532 A ID970532 A ID 970532A ID 16032 A ID16032 A ID 16032A
Authority
ID
Indonesia
Prior art keywords
coupler
couplers
gas
katub
distribution system
Prior art date
Application number
ID970532A
Other languages
English (en)
Inventor
Bryce Evans
Helen Rebenne
Joshua Collins
Russell Rogers
Original Assignee
Aeroquip Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aeroquip Corp filed Critical Aeroquip Corp
Publication of ID16032A publication Critical patent/ID16032A/id

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/44—Details of seats or valve members of double-seat valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/44—Details of seats or valve members of double-seat valves
    • F16K1/443—Details of seats or valve members of double-seat valves the seats being in series
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L29/00—Joints with fluid cut-off means
    • F16L29/04—Joints with fluid cut-off means with a cut-off device in each of the two pipe ends, the cut-off devices being automatically opened when the coupling is applied
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
    • F17C2205/0146—Two or more vessels characterised by the presence of fluid connection between vessels with details of the manifold
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0341—Filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0382—Constructional details of valves, regulators
    • F17C2205/0385—Constructional details of valves, regulators in blocks or units
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/014—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/05—Ultrapure fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0337—Heat exchange with the fluid by cooling
    • F17C2227/0358—Heat exchange with the fluid by cooling by expansion
    • F17C2227/036—"Joule-Thompson" effect
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/044—Methods for emptying or filling by purging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/0439—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0636—Flow or movement of content
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/03—Dealing with losses
    • F17C2260/035—Dealing with losses of fluid
    • F17C2260/036—Avoiding leaks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2265/00—Effects achieved by gas storage or gas handling
    • F17C2265/01—Purifying the fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87917—Flow path with serial valves and/or closures
    • Y10T137/88062—Coaxial oppositely directed seats

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Lift Valve (AREA)
ID970532A 1996-02-21 1997-02-21 Sistem distribusi rangkaian katub untuk gas ultra dengan kemurnian tinggi ID16032A (id)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/604,727 US5664759A (en) 1996-02-21 1996-02-21 Valved coupling for ultra high purity gas distribution systems

Publications (1)

Publication Number Publication Date
ID16032A true ID16032A (id) 1997-08-28

Family

ID=24420781

Family Applications (1)

Application Number Title Priority Date Filing Date
ID970532A ID16032A (id) 1996-02-21 1997-02-21 Sistem distribusi rangkaian katub untuk gas ultra dengan kemurnian tinggi

Country Status (9)

Country Link
US (2) US5664759A (id)
EP (1) EP0860640A1 (id)
JP (1) JPH1047515A (id)
KR (1) KR970062444A (id)
CN (1) CN1164758A (id)
ID (1) ID16032A (id)
IL (1) IL120237A0 (id)
SG (1) SG46769A1 (id)
TW (1) TW413293U (id)

Families Citing this family (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6227223B1 (en) * 1995-03-13 2001-05-08 Provacon, Inc. Valve and actuator in combination
US5664759A (en) * 1996-02-21 1997-09-09 Aeroquip Corporation Valved coupling for ultra high purity gas distribution systems
US5810031A (en) * 1996-02-21 1998-09-22 Aeroquip Corporation Ultra high purity gas distribution component with integral valved coupling and methods for its use
US6062246A (en) * 1997-04-08 2000-05-16 Hitachi Metals Ltd. Mass flow controller and operating method thereof
US6158454A (en) * 1998-04-14 2000-12-12 Insync Systems, Inc. Sieve like structure for fluid flow through structural arrangement
LU90367B1 (en) * 1999-03-05 2000-09-06 Ceodeux Ultra Pure Equipment T Gas cylinder valve
US6186177B1 (en) 1999-06-23 2001-02-13 Mks Instruments, Inc. Integrated gas delivery system
KR100373486B1 (ko) * 2000-01-27 2003-02-25 링크플러스(주) 웹문서처리방법
JP3751505B2 (ja) * 2000-06-07 2006-03-01 株式会社テージーケー 可変容量圧縮機用制御弁の真空室形成方法
FR2811735B1 (fr) * 2000-07-11 2002-09-20 Asco Joucomatic Vanne commande pneumatique
US6349744B1 (en) 2000-10-13 2002-02-26 Mks Instruments, Inc. Manifold for modular gas box system
DE10060726A1 (de) 2000-12-07 2002-06-27 Messer Griesheim Gmbh Kompaktgasentnahmesystem
US6857447B2 (en) 2002-06-10 2005-02-22 Advanced Technology Materials, Inc. Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
US6991671B2 (en) 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
US8002880B2 (en) 2002-12-10 2011-08-23 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
TWI386578B (zh) * 2003-01-17 2013-02-21 Applied Materials Inc 避免一質量流量控制器涉及一質量流量控制器陣列中之干擾的方法
JP4871490B2 (ja) * 2003-11-07 2012-02-08 シーケーディ株式会社 パージユニット及びその製造方法
US7051749B2 (en) 2003-11-24 2006-05-30 Advanced Technology Materials, Inc. Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications
DE10358085C5 (de) * 2003-12-10 2012-06-28 Danfoss A/S Kältemittel-Ventilanordnung
US20050258390A1 (en) * 2004-05-18 2005-11-24 Johnson Controls Technology Company Valve system
JP3930872B2 (ja) 2004-06-17 2007-06-13 株式会社カワサキプレシジョンマシナリ 弁装置
US8075668B2 (en) 2005-03-29 2011-12-13 Dresser-Rand Company Drainage system for compressor separators
JP5121188B2 (ja) * 2006-08-29 2013-01-16 キヤノン株式会社 圧力制御弁、圧力制御弁の製造方法、及び圧力制御弁を搭載した燃料電池システム
MX2009002982A (es) * 2006-09-19 2009-05-25 Dresser Rand Co Sello de tambor separador rotatorio.
US8302779B2 (en) 2006-09-21 2012-11-06 Dresser-Rand Company Separator drum and compressor impeller assembly
EP2066948A4 (en) 2006-09-25 2012-01-11 Dresser Rand Co ACCESS COVER FOR PRESSURED BOND DRAWER
WO2008039446A2 (en) 2006-09-25 2008-04-03 Dresser-Rand Company Fluid deflector for fluid separator devices
WO2008039732A2 (en) 2006-09-25 2008-04-03 Dresser-Rand Company Axially moveable spool connector
EP2066988A4 (en) 2006-09-25 2012-01-04 Dresser Rand Co COUPLING PROTECTION SYSTEM
EP2066983B1 (en) 2006-09-25 2013-12-11 Dresser-Rand Company Compressor mounting system
CA2663868C (en) 2006-09-26 2015-11-10 William C. Maier Improved static fluid separator device
BRPI0908051A2 (pt) 2008-03-05 2015-08-11 Dresser Rand Co Conjunto compressor que inclui separador e bomba ejetora
US7922218B2 (en) 2008-06-25 2011-04-12 Dresser-Rand Company Shear ring casing coupler device
US8079805B2 (en) 2008-06-25 2011-12-20 Dresser-Rand Company Rotary separator and shaft coupler for compressors
US8062400B2 (en) 2008-06-25 2011-11-22 Dresser-Rand Company Dual body drum for rotary separators
DE102008031024A1 (de) * 2008-06-30 2009-12-31 Wabco Gmbh Ventil
US8210804B2 (en) 2009-03-20 2012-07-03 Dresser-Rand Company Slidable cover for casing access port
US8087901B2 (en) 2009-03-20 2012-01-03 Dresser-Rand Company Fluid channeling device for back-to-back compressors
US8061972B2 (en) 2009-03-24 2011-11-22 Dresser-Rand Company High pressure casing access cover
EP2478229B1 (en) 2009-09-15 2020-02-26 Dresser-Rand Company Improved density-based compact separator
FR2950950B1 (fr) * 2009-10-01 2012-12-07 Staubli Sa Ets Element femelle de raccord rapide et raccord rapide incorporant un tel element
US20110097216A1 (en) * 2009-10-22 2011-04-28 Dresser-Rand Company Lubrication system for subsea compressor
US9095856B2 (en) 2010-02-10 2015-08-04 Dresser-Rand Company Separator fluid collector and method
DE102010010298A1 (de) * 2010-03-04 2011-09-08 Voith Patent Gmbh Wärmekraftmaschine
US8544500B2 (en) * 2010-05-18 2013-10-01 Ckd Corporation Coupling apparatus for chemical fluid flow channel
WO2012009159A2 (en) 2010-07-15 2012-01-19 Dresser-Rand Company Radial vane pack for rotary separators
WO2012009158A2 (en) 2010-07-15 2012-01-19 Dresser-Rand Company Enhanced in-line rotary separator
US8657935B2 (en) 2010-07-20 2014-02-25 Dresser-Rand Company Combination of expansion and cooling to enhance separation
WO2012012143A2 (en) 2010-07-21 2012-01-26 Dresser-Rand Company Multiple modular in-line rotary separator bundle
JP5936144B2 (ja) 2010-09-09 2016-06-15 ドレッサー ランド カンパニーＤｒｅｓｓｅｒ−Ｒａｎｄ Ｃｏｍｐａｎｙ 洗浄可能に制御された排水管
US9024493B2 (en) 2010-12-30 2015-05-05 Dresser-Rand Company Method for on-line detection of resistance-to-ground faults in active magnetic bearing systems
US8994237B2 (en) 2010-12-30 2015-03-31 Dresser-Rand Company Method for on-line detection of liquid and potential for the occurrence of resistance to ground faults in active magnetic bearing systems
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
WO2012138545A2 (en) 2011-04-08 2012-10-11 Dresser-Rand Company Circulating dielectric oil cooling system for canned bearings and canned electronics
WO2012166236A1 (en) 2011-05-27 2012-12-06 Dresser-Rand Company Segmented coast-down bearing for magnetic bearing systems
US8851756B2 (en) 2011-06-29 2014-10-07 Dresser-Rand Company Whirl inhibiting coast-down bearing for magnetic bearing systems
US9126139B2 (en) 2012-05-29 2015-09-08 Entegris, Inc. Carbon adsorbent for hydrogen sulfide removal from gases containing same, and regeneration of adsorbent
DE102012021094A1 (de) * 2012-10-26 2014-04-30 Daimler Ag Ventileinrichtung für ein Brennstoffzellensystem
CN102927351A (zh) * 2012-11-13 2013-02-13 济南大学 水封阀开度无级调节气动控制***
US20140137961A1 (en) * 2012-11-19 2014-05-22 Applied Materials, Inc. Modular chemical delivery system
JP6415889B2 (ja) * 2014-08-01 2018-10-31 株式会社堀場エステック 流量制御装置、流量制御装置用プログラム、及び、流量制御方法
CN107208821B (zh) * 2015-01-16 2019-07-02 株式会社开滋Sct 阻断阀和原料容器用阻断阀
JP6941507B2 (ja) * 2017-08-31 2021-09-29 株式会社キッツエスシーティー アクチュエータ用電磁弁の取付構造とアクチュエータ付きバルブ
US11590333B2 (en) * 2018-01-22 2023-02-28 Saint-Gobain Performance Plastics Corporation Tubular coupling
US10944206B1 (en) 2018-12-17 2021-03-09 OPDO Connectors, LLC Electrical connector system with a latch that permits rotation of connector housings into electrical connection
WO2020164805A1 (en) * 2019-02-11 2020-08-20 Eaton Intelligent Power Limited Pressure relief assembly and a valve assembly that uses the pressure relief assembly
CN110107702A (zh) * 2019-05-31 2019-08-09 浙江伯特利科技有限公司 一种带备用阀的截止阀

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1000945A (en) * 1910-03-28 1911-08-15 William T Ray Valve.
US1082512A (en) * 1910-11-08 1913-12-30 George E Llewellyn Apparatus for the manufacture of plate-ice.
US2120677A (en) * 1932-06-06 1938-06-14 Hydraulic Brake Co Valved coupling for hydraulic brakes
US2335832A (en) * 1942-03-02 1943-11-30 Bendix Westinghouse Automotive Fluid coupling
US2372820A (en) * 1943-04-29 1945-04-03 Mccord Corp Conduit connector for fluid pressure control
US2758611A (en) * 1955-03-17 1956-08-14 Ind Molasses Corp Pressure line coupling device
US2933333A (en) * 1955-09-26 1960-04-19 Crane Co Pipe coupling
US2868563A (en) * 1956-06-05 1959-01-13 Wayne L Wood Fluid line coupling device
US3134395A (en) * 1960-02-18 1964-05-26 Nat Tank Co Manifold valve
US3168906A (en) * 1963-02-04 1965-02-09 Brown Steel Tank Company Disconnectible coupling
US3245428A (en) * 1963-11-08 1966-04-12 Berg Mfg & Sales Co Flexible seal for use in a gladhand assembly
US3391951A (en) * 1966-12-07 1968-07-09 Weatherhead Co Diaphragm sealed coupling
FR2034123A1 (id) * 1969-02-07 1970-12-11 Quercia Flaminaire
US3831984A (en) * 1971-11-08 1974-08-27 Parker Hannifin Corp Quick disconnect coupling
US3874410A (en) * 1972-08-11 1975-04-01 Parker Hannifin Corp Coupler valve assembly
US3902694A (en) * 1974-03-05 1975-09-02 Morley V Friedell Swinging spherical gate valve and double seal quick disconnect coupling
US4089341A (en) * 1975-01-08 1978-05-16 G. Kendall Parmelee Connector method and apparatus for coupling two systems together while excluding the environment from the system interiors
US4164959A (en) * 1977-04-15 1979-08-21 The Salk Institute For Biological Studies Metering valve
US4543992A (en) * 1983-12-23 1985-10-01 Trw Inc. Fluid coupling assembly
FR2581732A1 (fr) * 1985-05-10 1986-11-14 Fremy Raoul Dispositif d'arret pour fluides a double obturateur tournant
US4741354A (en) * 1987-04-06 1988-05-03 Spire Corporation Radial gas manifold
FR2630524B1 (fr) * 1988-04-20 1990-08-03 Parker Hannifin Rak Sa Coupleur a clapets a douille exterieure mobile
US4949745A (en) * 1988-12-27 1990-08-21 Air-Lock, Incorporated Clean air connector
FR2648537B1 (fr) * 1989-06-16 1991-10-18 Sames Sa Dispositif de raccordement de deux parties de conduit
US4989638A (en) * 1989-12-21 1991-02-05 Allied-Signal Substantially leak-free disconnection apparatus
US4995589A (en) * 1990-01-29 1991-02-26 Sequioa Controls Company, Ltd. Bellows valve
US5002086A (en) * 1990-05-11 1991-03-26 Fluoroware, Inc. Plastic control valve
US5139225A (en) * 1990-11-05 1992-08-18 Micron Technology, Inc. Pneumatically controlled multiple valve system for fluid transfer
US5307568A (en) * 1991-09-09 1994-05-03 Tokyo Electron Limited Gas supply system
US5215120A (en) * 1991-11-20 1993-06-01 Precision General, Inc. Apparatus and method for reducing valve emissions
US5368062A (en) * 1992-01-29 1994-11-29 Kabushiki Kaisha Toshiba Gas supplying system and gas supplying apparatus
US5295507A (en) * 1992-01-29 1994-03-22 Eli Lilly And Company Containment valve that allows contamination free transfer
US5316033A (en) * 1992-07-04 1994-05-31 Gustav Schumacher Coupling for connecting hydraulic lines
US5379793A (en) * 1993-09-07 1995-01-10 Powell; Johathan S. Ventless transfer valve and method for using same
US5638862A (en) * 1995-10-20 1997-06-17 Vemco Corporation Diaphragm valve
US5664759A (en) * 1996-02-21 1997-09-09 Aeroquip Corporation Valved coupling for ultra high purity gas distribution systems
US5810031A (en) * 1996-02-21 1998-09-22 Aeroquip Corporation Ultra high purity gas distribution component with integral valved coupling and methods for its use

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US5664759A (en) 1997-09-09
KR970062444A (ko) 1997-09-12
EP0860640A1 (en) 1998-08-26
JPH1047515A (ja) 1998-02-20
SG46769A1 (en) 1998-02-20
TW413293U (en) 2000-11-21
IL120237A0 (en) 1997-06-10
CN1164758A (zh) 1997-11-12
US5863023A (en) 1999-01-26

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