HK89997A - A magnetic field generating apparatus and a plasma generating apparatus for use therewith - Google Patents
A magnetic field generating apparatus and a plasma generating apparatus for use therewithInfo
- Publication number
- HK89997A HK89997A HK89997A HK89997A HK89997A HK 89997 A HK89997 A HK 89997A HK 89997 A HK89997 A HK 89997A HK 89997 A HK89997 A HK 89997A HK 89997 A HK89997 A HK 89997A
- Authority
- HK
- Hong Kong
- Prior art keywords
- generating apparatus
- magnetic field
- use therewith
- field generating
- plasma generating
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32192—Microwave generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
- H01J37/32678—Electron cyclotron resonance
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019900008939A KR930004713B1 (ko) | 1990-06-18 | 1990-06-18 | 변조방식을 이용한 플라즈마 발생장치 및 방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
HK89997A true HK89997A (en) | 1997-08-01 |
Family
ID=19300212
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK89997A HK89997A (en) | 1990-06-18 | 1997-06-26 | A magnetic field generating apparatus and a plasma generating apparatus for use therewith |
Country Status (7)
Country | Link |
---|---|
US (1) | US5087857A (xx) |
JP (1) | JPH0783016B2 (xx) |
KR (1) | KR930004713B1 (xx) |
DE (1) | DE4027341A1 (xx) |
GB (1) | GB2245416B (xx) |
HK (1) | HK89997A (xx) |
TW (1) | TW198764B (xx) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2546405B2 (ja) * | 1990-03-12 | 1996-10-23 | 富士電機株式会社 | プラズマ処理装置ならびにその運転方法 |
JP2584389B2 (ja) * | 1992-06-10 | 1997-02-26 | 栄電子工業 株式会社 | Ecrプラズマエッチング加工方法 |
JP2933802B2 (ja) * | 1992-06-22 | 1999-08-16 | 松下電器産業株式会社 | ドライエッチング方法およびその装置 |
JPH06342769A (ja) * | 1992-08-21 | 1994-12-13 | Nissin Electric Co Ltd | エッチング方法及び装置 |
JP2584396B2 (ja) * | 1992-10-08 | 1997-02-26 | 栄電子工業 株式会社 | Ecrプラズマ処理方法 |
JP2693899B2 (ja) * | 1992-10-09 | 1997-12-24 | 栄電子工業株式会社 | Ecrプラズマ加工方法 |
JP3252507B2 (ja) * | 1993-01-29 | 2002-02-04 | ソニー株式会社 | プラズマ処理装置 |
JP3036296B2 (ja) * | 1993-05-25 | 2000-04-24 | 富士通株式会社 | プラズマディスプレイ装置の電源装置 |
US5534108A (en) * | 1993-05-28 | 1996-07-09 | Applied Materials, Inc. | Method and apparatus for altering magnetic coil current to produce etch uniformity in a magnetic field-enhanced plasma reactor |
KR100327346B1 (ko) | 1999-07-20 | 2002-03-06 | 윤종용 | 선택적 폴리머 증착을 이용한 플라즈마 식각방법 및 이를이용한 콘택홀 형성방법 |
US6566272B2 (en) | 1999-07-23 | 2003-05-20 | Applied Materials Inc. | Method for providing pulsed plasma during a portion of a semiconductor wafer process |
US8617351B2 (en) * | 2002-07-09 | 2013-12-31 | Applied Materials, Inc. | Plasma reactor with minimal D.C. coils for cusp, solenoid and mirror fields for plasma uniformity and device damage reduction |
US8048806B2 (en) * | 2000-03-17 | 2011-11-01 | Applied Materials, Inc. | Methods to avoid unstable plasma states during a process transition |
US20070048882A1 (en) * | 2000-03-17 | 2007-03-01 | Applied Materials, Inc. | Method to reduce plasma-induced charging damage |
US6472822B1 (en) | 2000-04-28 | 2002-10-29 | Applied Materials, Inc. | Pulsed RF power delivery for plasma processing |
JP4009087B2 (ja) * | 2001-07-06 | 2007-11-14 | アプライド マテリアルズ インコーポレイテッド | 半導体製造装置における磁気発生装置、半導体製造装置および磁場強度制御方法 |
US7374636B2 (en) * | 2001-07-06 | 2008-05-20 | Applied Materials, Inc. | Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactor |
TWI283899B (en) * | 2002-07-09 | 2007-07-11 | Applied Materials Inc | Capacitively coupled plasma reactor with magnetic plasma control |
US7458335B1 (en) | 2002-10-10 | 2008-12-02 | Applied Materials, Inc. | Uniform magnetically enhanced reactive ion etching using nested electromagnetic coils |
US7422654B2 (en) * | 2003-02-14 | 2008-09-09 | Applied Materials, Inc. | Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor |
US6942813B2 (en) * | 2003-03-05 | 2005-09-13 | Applied Materials, Inc. | Method of etching magnetic and ferroelectric materials using a pulsed bias source |
US7179754B2 (en) * | 2003-05-28 | 2007-02-20 | Applied Materials, Inc. | Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energy |
US7521000B2 (en) * | 2003-08-28 | 2009-04-21 | Applied Materials, Inc. | Process for etching photomasks |
US7879510B2 (en) * | 2005-01-08 | 2011-02-01 | Applied Materials, Inc. | Method for quartz photomask plasma etching |
US8293430B2 (en) * | 2005-01-27 | 2012-10-23 | Applied Materials, Inc. | Method for etching a molybdenum layer suitable for photomask fabrication |
US7829243B2 (en) * | 2005-01-27 | 2010-11-09 | Applied Materials, Inc. | Method for plasma etching a chromium layer suitable for photomask fabrication |
US7790334B2 (en) * | 2005-01-27 | 2010-09-07 | Applied Materials, Inc. | Method for photomask plasma etching using a protected mask |
EP1753011B1 (de) * | 2005-08-13 | 2012-10-03 | HÜTTINGER Elektronik GmbH + Co. KG | Verfahren zur Erzeugung von Ansteuersignalen für HF-Leistungsgeneratoren |
DE102006052061B4 (de) * | 2006-11-04 | 2009-04-23 | Hüttinger Elektronik Gmbh + Co. Kg | Verfahren zur Ansteuerung von zumindest zwei HF-Leistungsgeneratoren |
US7786019B2 (en) * | 2006-12-18 | 2010-08-31 | Applied Materials, Inc. | Multi-step photomask etching with chlorine for uniformity control |
US10460913B2 (en) * | 2016-09-28 | 2019-10-29 | Hitachi High-Technologies Corporation | Plasma processing apparatus and plasma processing method |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2217415A (en) * | 1939-12-29 | 1940-10-08 | Gen Electric | Discharge apparatus |
BE517412A (xx) * | 1952-02-05 | |||
FR91221E (xx) * | 1963-03-08 | 1968-08-28 | ||
GB1525393A (en) * | 1974-10-02 | 1978-09-20 | Daido Steel Co Ltd | Heat treating apparatus and method |
DE3580953D1 (de) * | 1984-08-31 | 1991-01-31 | Anelva Corp | Entladungsvorrichtung. |
JPS6393881A (ja) * | 1986-10-08 | 1988-04-25 | Anelva Corp | プラズマ処理装置 |
JPH0620048B2 (ja) * | 1987-01-30 | 1994-03-16 | 富士電機株式会社 | 乾式薄膜加工装置 |
US4818916A (en) * | 1987-03-06 | 1989-04-04 | The Perkin-Elmer Corporation | Power system for inductively coupled plasma torch |
DE3810197A1 (de) * | 1987-03-27 | 1988-10-13 | Mitsubishi Electric Corp | Plasma-bearbeitungseinrichtung |
US4911814A (en) * | 1988-02-08 | 1990-03-27 | Nippon Telegraph And Telephone Corporation | Thin film forming apparatus and ion source utilizing sputtering with microwave plasma |
JPH0233187A (ja) * | 1988-07-22 | 1990-02-02 | Mitsubishi Electric Corp | ラスター水平位置制御装置 |
JPH02174229A (ja) * | 1988-12-27 | 1990-07-05 | Sumitomo Metal Ind Ltd | プラズマ装置およびその使用方法 |
-
1990
- 1990-06-18 KR KR1019900008939A patent/KR930004713B1/ko not_active IP Right Cessation
- 1990-07-27 JP JP2201077A patent/JPH0783016B2/ja not_active Expired - Lifetime
- 1990-07-31 US US07/560,756 patent/US5087857A/en not_active Expired - Lifetime
- 1990-08-29 DE DE4027341A patent/DE4027341A1/de not_active Ceased
- 1990-10-10 GB GB9022039A patent/GB2245416B/en not_active Expired - Fee Related
- 1990-11-13 TW TW079109533A patent/TW198764B/zh active
-
1997
- 1997-06-26 HK HK89997A patent/HK89997A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR930004713B1 (ko) | 1993-06-03 |
JPH0783016B2 (ja) | 1995-09-06 |
DE4027341A1 (de) | 1991-12-19 |
GB2245416A (en) | 1992-01-02 |
US5087857A (en) | 1992-02-11 |
GB9022039D0 (en) | 1990-11-21 |
GB2245416B (en) | 1994-11-16 |
TW198764B (xx) | 1993-01-21 |
KR920001640A (ko) | 1992-01-30 |
JPH0448726A (ja) | 1992-02-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PF | Patent in force | ||
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20081010 |