HK1182146A1 - 成膜方法和成膜裝置 - Google Patents
成膜方法和成膜裝置Info
- Publication number
- HK1182146A1 HK1182146A1 HK13109527.8A HK13109527A HK1182146A1 HK 1182146 A1 HK1182146 A1 HK 1182146A1 HK 13109527 A HK13109527 A HK 13109527A HK 1182146 A1 HK1182146 A1 HK 1182146A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- film formation
- formation method
- formation apparatus
- film
- formation
- Prior art date
Links
- 230000015572 biosynthetic process Effects 0.000 title 2
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2011/072586 WO2013046440A1 (ja) | 2011-09-30 | 2011-09-30 | 成膜方法及び成膜装置 |
PCT/JP2012/069714 WO2013046918A1 (ja) | 2011-09-30 | 2012-08-02 | 成膜方法及び成膜装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1182146A1 true HK1182146A1 (zh) | 2013-11-22 |
Family
ID=46060762
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK13109036.2A HK1181823A1 (zh) | 2011-09-30 | 2013-08-02 | 成膜方法及成膜裝置 |
HK13109527.8A HK1182146A1 (zh) | 2011-09-30 | 2013-08-15 | 成膜方法和成膜裝置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK13109036.2A HK1181823A1 (zh) | 2011-09-30 | 2013-08-02 | 成膜方法及成膜裝置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20140205762A1 (zh) |
EP (1) | EP2762604B1 (zh) |
JP (1) | JP4906014B1 (zh) |
KR (1) | KR101312752B1 (zh) |
CN (2) | CN103140598B (zh) |
HK (2) | HK1181823A1 (zh) |
TW (2) | TWI412617B (zh) |
WO (2) | WO2013046440A1 (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5036827B2 (ja) * | 2008-09-05 | 2012-09-26 | 株式会社シンクロン | 成膜方法及び撥油性基材 |
KR101959975B1 (ko) * | 2012-07-10 | 2019-07-16 | 삼성디스플레이 주식회사 | 유기층 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
EP2975155A1 (en) | 2014-07-15 | 2016-01-20 | Essilor International (Compagnie Generale D'optique) | A process for physical vapor deposition of a material layer on surfaces of a plurality of substrates |
WO2016107689A1 (en) * | 2014-12-31 | 2016-07-07 | Essilor International (Compagnie Générale d'Optique) | Systems and methods with improved thermal evaporation of optical coatings onto ophthalmic lens substrates |
JP6445959B2 (ja) * | 2015-12-16 | 2018-12-26 | 株式会社オプトラン | 成膜装置および成膜方法 |
CN209065995U (zh) * | 2018-10-15 | 2019-07-05 | 株式会社新柯隆 | 成膜装置 |
CN110230034B (zh) * | 2019-05-20 | 2024-04-16 | 江苏光腾光学有限公司 | 光学镀膜多角度伞架及包含该伞架的镀膜机 |
CN110643954B (zh) * | 2019-10-21 | 2024-03-01 | 上海新柯隆真空设备制造有限公司 | 镀膜设备、离子源、以及栅极结构 |
US20220380889A1 (en) * | 2021-06-01 | 2022-12-01 | Ascentool, Inc. | Versatile Vacuum Deposition Sources and System thereof |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL134255A0 (en) * | 2000-01-27 | 2001-04-30 | V I P Vacuum Ion Plasma Techno | System and method for deposition of coatings on a substrate |
JP2005232534A (ja) * | 2004-02-19 | 2005-09-02 | Akira Yamada | フッ化物膜の成膜方法 |
JP2006022368A (ja) * | 2004-07-07 | 2006-01-26 | Shinko Seiki Co Ltd | 表面処理装置および表面処理方法 |
JP2006233275A (ja) * | 2005-02-24 | 2006-09-07 | Japan Science & Technology Agency | 薄膜形成装置 |
JPWO2010018639A1 (ja) * | 2008-08-15 | 2012-01-26 | 株式会社シンクロン | 蒸着装置及び薄膜デバイスの製造方法 |
JP5036827B2 (ja) * | 2008-09-05 | 2012-09-26 | 株式会社シンクロン | 成膜方法及び撥油性基材 |
JP4688230B2 (ja) | 2008-10-09 | 2011-05-25 | 株式会社シンクロン | 成膜方法 |
JP4823293B2 (ja) * | 2008-10-31 | 2011-11-24 | 株式会社シンクロン | 成膜方法及び成膜装置 |
JP2010242174A (ja) * | 2009-04-07 | 2010-10-28 | Canon Inc | 薄膜形成方法 |
JP2012032690A (ja) * | 2010-08-02 | 2012-02-16 | Seiko Epson Corp | 光学物品およびその製造方法 |
-
2011
- 2011-09-30 KR KR1020127001275A patent/KR101312752B1/ko active IP Right Grant
- 2011-09-30 WO PCT/JP2011/072586 patent/WO2013046440A1/ja active Application Filing
- 2011-09-30 EP EP11838997.2A patent/EP2762604B1/en active Active
- 2011-09-30 CN CN201180019919.XA patent/CN103140598B/zh active Active
- 2011-09-30 US US13/700,527 patent/US20140205762A1/en not_active Abandoned
- 2011-09-30 JP JP2011546501A patent/JP4906014B1/ja active Active
- 2011-11-09 TW TW100140847A patent/TWI412617B/zh active
-
2012
- 2012-08-02 CN CN201280003215.8A patent/CN103154298B/zh active Active
- 2012-08-02 WO PCT/JP2012/069714 patent/WO2013046918A1/ja active Application Filing
- 2012-08-28 TW TW101131112A patent/TWI604075B/zh active
-
2013
- 2013-08-02 HK HK13109036.2A patent/HK1181823A1/zh not_active IP Right Cessation
- 2013-08-15 HK HK13109527.8A patent/HK1182146A1/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US20140205762A1 (en) | 2014-07-24 |
CN103140598A (zh) | 2013-06-05 |
WO2013046918A1 (ja) | 2013-04-04 |
TWI412617B (zh) | 2013-10-21 |
EP2762604A1 (en) | 2014-08-06 |
WO2013046440A1 (ja) | 2013-04-04 |
EP2762604A4 (en) | 2015-08-26 |
TWI604075B (zh) | 2017-11-01 |
HK1181823A1 (zh) | 2013-11-15 |
TW201313933A (zh) | 2013-04-01 |
KR101312752B1 (ko) | 2013-09-27 |
TW201315826A (zh) | 2013-04-16 |
JPWO2013046440A1 (ja) | 2015-03-26 |
CN103140598B (zh) | 2014-03-26 |
KR20130084967A (ko) | 2013-07-26 |
JP4906014B1 (ja) | 2012-03-28 |
CN103154298B (zh) | 2016-10-05 |
EP2762604B1 (en) | 2020-04-01 |
CN103154298A (zh) | 2013-06-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20210807 |