HK1140271A1 - Method of manufacturing a micromechanical part - Google Patents

Method of manufacturing a micromechanical part

Info

Publication number
HK1140271A1
HK1140271A1 HK10106607.0A HK10106607A HK1140271A1 HK 1140271 A1 HK1140271 A1 HK 1140271A1 HK 10106607 A HK10106607 A HK 10106607A HK 1140271 A1 HK1140271 A1 HK 1140271A1
Authority
HK
Hong Kong
Prior art keywords
manufacturing
micromechanical part
micromechanical
Prior art date
Application number
HK10106607.0A
Other languages
English (en)
Inventor
Rudolf Dinger
Thierry Ravenel
Original Assignee
Swatch Group Res & Dev Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Swatch Group Res & Dev Ltd filed Critical Swatch Group Res & Dev Ltd
Publication of HK1140271A1 publication Critical patent/HK1140271A1/xx

Links

Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0002—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe
    • G04D3/0017—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe for components of gearworks
    • G04D3/002—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe for components of gearworks for gear wheels or gears
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B81C3/008—Aspects related to assembling from individually processed components, not covered by groups B81C3/001 - B81C3/002
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/008—Manufacture of substrate-free structures separating the processed structure from a mother substrate
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B13/00—Gearwork
    • G04B13/02—Wheels; Pinions; Spindles; Pivots
    • G—PHYSICS
    • G04—HOROLOGY
    • G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
    • G04B15/00—Escapements
    • G04B15/14—Component parts or constructional details, e.g. construction of the lever or the escape wheel
    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D1/00—Gripping, holding, or supporting devices
    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0002—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe
    • G04D3/0028—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe for components of the escape mechanism
    • G04D3/0033—Watchmakers' or watch-repairers' machines or tools for working materials for mechanical working other than with a lathe for components of the escape mechanism for lever wheels
    • G—PHYSICS
    • G04—HOROLOGY
    • G04D—APPARATUS OR TOOLS SPECIALLY DESIGNED FOR MAKING OR MAINTAINING CLOCKS OR WATCHES
    • G04D3/00—Watchmakers' or watch-repairers' machines or tools for working materials
    • G04D3/0069—Watchmakers' or watch-repairers' machines or tools for working materials for working with non-mechanical means, e.g. chemical, electrochemical, metallising, vapourising; with electron beams, laser beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/035—Microgears
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/11—Treatments for avoiding stiction of elastic or moving parts of MEMS
    • B81C2201/112—Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49579—Watch or clock making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49579—Watch or clock making
    • Y10T29/49581—Watch or clock making having arbor, pinion, or balance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
HK10106607.0A 2008-07-10 2010-07-07 Method of manufacturing a micromechanical part HK1140271A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP08160143.7A EP2145857B1 (fr) 2008-07-10 2008-07-10 Procédé de fabrication d'une pièce micromécanique

Publications (1)

Publication Number Publication Date
HK1140271A1 true HK1140271A1 (en) 2010-10-08

Family

ID=40280669

Family Applications (1)

Application Number Title Priority Date Filing Date
HK10106607.0A HK1140271A1 (en) 2008-07-10 2010-07-07 Method of manufacturing a micromechanical part

Country Status (8)

Country Link
US (1) US8354032B2 (zh)
EP (1) EP2145857B1 (zh)
JP (1) JP5342351B2 (zh)
KR (1) KR101253808B1 (zh)
CN (1) CN101625542B (zh)
CH (1) CH699110A1 (zh)
HK (1) HK1140271A1 (zh)
TW (1) TWI520897B (zh)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH699109A1 (fr) * 2008-07-10 2010-01-15 Swatch Group Res & Dev Ltd Procédé de fabrication d'une pièce micromécanique.
EP2189854A1 (fr) * 2008-11-21 2010-05-26 Nivarox-FAR S.A. Procédé de fabrication d'une pièce de micromécanique
US9201398B2 (en) * 2010-07-19 2015-12-01 Nivarox-Far S.A. Oscillating mechanism with an elastic pivot and mobile element for transmitting energy
JP2012063162A (ja) * 2010-09-14 2012-03-29 Seiko Instruments Inc 時計用歯車及び時計
EP2450755B1 (fr) * 2010-11-04 2015-01-21 Nivarox-FAR S.A. Echappement synchrone pour mécanisme d'horlogerie
EP2503404B1 (fr) * 2011-03-23 2019-05-01 Patek Philippe SA Genève Procédé de fabrication d'un composant mécanique, notamment horloger
EP2581794A1 (fr) * 2011-10-14 2013-04-17 The Swatch Group Research and Development Ltd. Ensemble fonctionnel de micromécanique
EP2549339A1 (fr) * 2011-07-21 2013-01-23 The Swatch Group Research and Development Ltd. Ensemble fonctionnel de micromécanique
US9770771B2 (en) 2011-12-22 2017-09-26 Csem Centre Suisse D'electronique Et De Microtechnique Sa-Recherche Et Developpement Method for freeing a micromechanical part and a micromechanical part comprising sacrificial fasteners
EP2607971A1 (fr) * 2011-12-22 2013-06-26 The Swatch Group Research and Development Ltd. Procédé de réalisation d'un composant
CN104062892B (zh) * 2013-03-20 2016-08-31 天津海鸥表业集团有限公司 一种手表擒纵轮片的续料装置
EP2799939A1 (fr) * 2013-04-30 2014-11-05 Universo S.A. Support pour le traitement de pièces de micromécanique
CH709082B1 (fr) * 2013-12-20 2018-12-14 Rolex Sa Procédé de fabrication d'un composant horloger.
CH709729A2 (fr) * 2014-06-03 2015-12-15 Swatch Group Res & Dev Ltd Pièce d'habillage à base de verre photostructurable.
EP2952979B1 (fr) 2014-06-03 2017-03-01 Nivarox-FAR S.A. Composant horloger à base de verre photostructurable
EP3002637B1 (fr) * 2014-09-29 2018-11-28 Richemont International S.A. Système horloger avec des propriétés tribologiques améliorées
JP6560250B2 (ja) * 2014-12-12 2019-08-14 シチズン時計株式会社 時計部品および時計部品の製造方法
HK1209578A2 (zh) * 2015-02-17 2016-04-01 Master Dynamic Ltd 矽游絲
JP6919166B2 (ja) * 2016-09-14 2021-08-18 セイコーエプソン株式会社 機械部品の製造方法、及び時計の製造方法
JP6743619B2 (ja) * 2016-09-23 2020-08-19 セイコーエプソン株式会社 機械部品の製造方法、及び時計の製造方法
EP3339979B1 (fr) * 2016-12-20 2023-12-06 Montres Jaquet Droz SA Cadran de montre à decor tridimensionnel
EP3412625A1 (fr) 2017-06-05 2018-12-12 Nivarox-FAR S.A. Procede de fabrication d'une piece micromecanique
JP7087873B2 (ja) * 2018-09-20 2022-06-21 セイコーエプソン株式会社 時計部品の製造方法
KR102607863B1 (ko) 2018-12-03 2023-12-01 삼성전자주식회사 음원 분리 장치 및 음원 분리 방법
EP3670440A1 (fr) * 2018-12-21 2020-06-24 Rolex Sa Procédé de fabrication d'un composant horloger
EP3670441A1 (fr) 2018-12-21 2020-06-24 Rolex Sa Procédé de fabrication d'un composant horloger
EP3907565A1 (fr) 2020-05-07 2021-11-10 Patek Philippe SA Genève Procede de fabrication d'un composant horloger en silicium
EP4016198A1 (fr) * 2020-12-15 2022-06-22 Patek Philippe SA Genève Procédé d'assemblage d'une première et d'au moins une seconde pièces mécaniques ou micromécaniques dans un mécanisme et composant monobloc pour la mise en oeuvre du procédé
EP4312084A1 (fr) 2022-07-26 2024-01-31 Nivarox-FAR S.A. Procede de fabrication d'un spiral en silicium

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
FR2731715B1 (fr) * 1995-03-17 1997-05-16 Suisse Electronique Microtech Piece de micro-mecanique et procede de realisation
DE19709136A1 (de) * 1997-03-06 1998-09-10 Inst Mikrotechnik Mainz Gmbh Verfahren zur Herstellung und Magazinierung von Mikrobauteilen, Magazin und Montageverfahren für Mikrobauteile
AU734809B2 (en) * 1997-06-16 2001-06-21 Robert Bosch Gmbh Method and device for vacuum-coating a substrate
JPH1148342A (ja) * 1997-08-05 1999-02-23 Sumitomo Heavy Ind Ltd マイクロマシンの製造方法
US6171972B1 (en) * 1998-03-17 2001-01-09 Rosemount Aerospace Inc. Fracture-resistant micromachined devices
US6962514B2 (en) * 2002-08-08 2005-11-08 Applied Materials, Inc. Method and apparatus used in fabrication of MEMS stacks
DE10241450A1 (de) * 2002-09-06 2004-03-18 Robert Bosch Gmbh Verfahren zur Herstellung eines Bauteils mit einem Sensorelement, insbesondere eines Verformungssensors
EP1445670A1 (fr) * 2003-02-06 2004-08-11 ETA SA Manufacture Horlogère Suisse Spiral de résonateur balancier-spiral et son procédé de fabrication
EP1709847A1 (en) * 2004-01-15 2006-10-11 International Business Machines Corporation Micro-electromechanical sub-assembly having an on-chip transfer mechanism
JP4530261B2 (ja) * 2004-03-31 2010-08-25 セイコーインスツル株式会社 電鋳部品及び電鋳部品の製造方法
US20060196845A1 (en) * 2005-03-04 2006-09-07 Honeywell International Inc. Quartz Tuning-Fork Resonators and Production Method
EP1722281A1 (fr) * 2005-05-12 2006-11-15 ETA SA Manufacture Horlogère Suisse Organe d'affichage analogique en matériau cristallin, pièce d'horlogerie pourvue d'un tel organe d'affichage, et procédé pour sa fabrication
DE602006004055D1 (de) * 2005-06-28 2009-01-15 Eta Sa Mft Horlogere Suisse Verstärktes mikromechanisches teil
EP1921042A1 (fr) 2006-11-10 2008-05-14 ETA SA Manufacture Horlogère Suisse Procédé de fabrication de pièces de micromécanique multiniveaux en silicium et pièces ainsi obtenues

Also Published As

Publication number Publication date
CN101625542B (zh) 2012-10-03
TW201014779A (en) 2010-04-16
EP2145857B1 (fr) 2014-03-19
US8354032B2 (en) 2013-01-15
JP2010019844A (ja) 2010-01-28
TWI520897B (zh) 2016-02-11
JP5342351B2 (ja) 2013-11-13
CN101625542A (zh) 2010-01-13
KR101253808B1 (ko) 2013-04-12
CH699110A1 (fr) 2010-01-15
EP2145857A1 (fr) 2010-01-20
KR20100007751A (ko) 2010-01-22
US20100005659A1 (en) 2010-01-14

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