HK1133090A1 - Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method - Google Patents
Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating methodInfo
- Publication number
- HK1133090A1 HK1133090A1 HK09111097.0A HK09111097A HK1133090A1 HK 1133090 A1 HK1133090 A1 HK 1133090A1 HK 09111097 A HK09111097 A HK 09111097A HK 1133090 A1 HK1133090 A1 HK 1133090A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- immersion
- exposure apparatus
- recovery system
- liquid recovery
- device fabricating
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B27/00—Photographic printing apparatus
- G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
- G03B27/52—Details
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Health & Medical Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Microscoopes, Condenser (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US88182607P | 2007-01-23 | 2007-01-23 | |
US12/010,162 US8004651B2 (en) | 2007-01-23 | 2008-01-22 | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method |
PCT/JP2008/051328 WO2008091014A2 (fr) | 2007-01-23 | 2008-01-23 | Système de récupération de liquide, appareil d'exposition par immersion, procédé d'exposition par immersion et procédé de fabrication de dispositif |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1133090A1 true HK1133090A1 (en) | 2010-03-12 |
Family
ID=39640853
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK09111097.0A HK1133090A1 (en) | 2007-01-23 | 2009-11-27 | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method |
HK19101855.1A HK1259450A1 (zh) | 2007-01-23 | 2019-02-01 | 液體回收系統、浸入式曝光裝置、浸入式曝光方法和設備製造方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK19101855.1A HK1259450A1 (zh) | 2007-01-23 | 2019-02-01 | 液體回收系統、浸入式曝光裝置、浸入式曝光方法和設備製造方法 |
Country Status (8)
Country | Link |
---|---|
US (2) | US8004651B2 (fr) |
EP (3) | EP2653924B1 (fr) |
JP (7) | JP5136080B2 (fr) |
KR (5) | KR101644479B1 (fr) |
CN (1) | CN101589341B (fr) |
HK (2) | HK1133090A1 (fr) |
TW (4) | TWI468872B (fr) |
WO (1) | WO2008091014A2 (fr) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4884180B2 (ja) * | 2006-11-21 | 2012-02-29 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
US8004651B2 (en) * | 2007-01-23 | 2011-08-23 | Nikon Corporation | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method |
US8134685B2 (en) * | 2007-03-23 | 2012-03-13 | Nikon Corporation | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method |
NL1036306A1 (nl) | 2007-12-20 | 2009-06-23 | Asml Netherlands Bv | Lithographic apparatus and in-line cleaning apparatus. |
NL2003226A (en) * | 2008-08-19 | 2010-03-09 | Asml Netherlands Bv | Lithographic apparatus, drying device, metrology apparatus and device manufacturing method. |
US8896806B2 (en) | 2008-12-29 | 2014-11-25 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
US8953143B2 (en) * | 2009-04-24 | 2015-02-10 | Nikon Corporation | Liquid immersion member |
EP2521163A1 (fr) | 2009-12-28 | 2012-11-07 | Nikon Corporation | Elément d'immersion dans un liquide, procédé de fabrication d'élément d'immersion dans un liquide, appareil d'exposition et procédé de fabrication de dispositif |
US9256137B2 (en) * | 2011-08-25 | 2016-02-09 | Nikon Corporation | Exposure apparatus, liquid holding method, and device manufacturing method |
US9323160B2 (en) | 2012-04-10 | 2016-04-26 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium |
US9268231B2 (en) | 2012-04-10 | 2016-02-23 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium |
US9823580B2 (en) * | 2012-07-20 | 2017-11-21 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method for manufacturing device, program, and recording medium |
US9568828B2 (en) * | 2012-10-12 | 2017-02-14 | Nikon Corporation | Exposure apparatus, exposing method, device manufacturing method, program, and recording medium |
US9494870B2 (en) | 2012-10-12 | 2016-11-15 | Nikon Corporation | Exposure apparatus, exposing method, device manufacturing method, program, and recording medium |
US9651873B2 (en) | 2012-12-27 | 2017-05-16 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium |
US9720331B2 (en) | 2012-12-27 | 2017-08-01 | Nikon Corporation | Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium |
US9352073B2 (en) | 2013-01-22 | 2016-05-31 | Niko Corporation | Functional film |
US9057955B2 (en) | 2013-01-22 | 2015-06-16 | Nikon Corporation | Functional film, liquid immersion member, method of manufacturing liquid immersion member, exposure apparatus, and device manufacturing method |
WO2014132923A1 (fr) | 2013-02-28 | 2014-09-04 | 株式会社ニコン | Film glissant, élément sur lequel est formé un film glissant et procédé de fabrication de ce dernier |
JP6369472B2 (ja) * | 2013-10-08 | 2018-08-08 | 株式会社ニコン | 液浸部材、露光装置及び露光方法、並びにデバイス製造方法 |
CN105116688B (zh) * | 2015-09-01 | 2017-06-23 | 浙江大学 | 一种用于浸没式光刻机的浸没液体控制装置 |
KR102649164B1 (ko) | 2017-12-15 | 2024-03-20 | 에이에스엠엘 네델란즈 비.브이. | 유체 핸들링 구조체, 리소그래피 장치, 유체 핸들링 구조체를 사용하는 방법 및 리소그래피 장치를 사용하는 방법 |
TWI672794B (zh) * | 2018-06-11 | 2019-09-21 | 睿明科技股份有限公司 | 微元件對位組裝方法及其裝置 |
JP6610726B2 (ja) * | 2018-07-11 | 2019-11-27 | 株式会社ニコン | 液浸部材、露光装置及び露光方法、並びにデバイス製造方法 |
US10948707B2 (en) * | 2019-02-05 | 2021-03-16 | Molecular Devices, Llc | Liquid immersion microscope objective assembly and related systems and methods |
US10948830B1 (en) | 2019-12-23 | 2021-03-16 | Waymo Llc | Systems and methods for lithography |
CN112255891B (zh) * | 2020-10-29 | 2023-03-07 | 浙江启尔机电技术有限公司 | 一种浸没流场的初始建立方法及用此建立方法的光刻方法 |
CN112684665B (zh) * | 2020-12-25 | 2024-06-25 | 浙江启尔机电技术有限公司 | 一种浸液供给回收装置 |
CN112684671B (zh) * | 2020-12-29 | 2024-06-11 | 浙江启尔机电技术有限公司 | 一种浸液供给回收***以及浸没流场初始建立方法 |
CN113189849B (zh) * | 2021-04-22 | 2023-08-11 | 中国科学院光电技术研究所 | 一种近场光刻浸没***及其浸没单元和接口模组 |
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EP3203321A1 (fr) | 2004-06-10 | 2017-08-09 | Nikon Corporation | Appareil d'exposition, procédé d'exposition et procédé de production d'un dispositif |
KR20170010906A (ko) | 2004-06-10 | 2017-02-01 | 가부시키가이샤 니콘 | 노광 장치, 노광 방법, 및 디바이스 제조 방법 |
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WO2007129753A1 (fr) * | 2006-05-10 | 2007-11-15 | Nikon Corporation | Appareil d'exposition et procédé de fabrication du dispositif |
US20080043211A1 (en) * | 2006-08-21 | 2008-02-21 | Nikon Corporation | Apparatus and methods for recovering fluid in immersion lithography |
US8004651B2 (en) * | 2007-01-23 | 2011-08-23 | Nikon Corporation | Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method |
-
2008
- 2008-01-22 US US12/010,162 patent/US8004651B2/en not_active Expired - Fee Related
- 2008-01-23 EP EP13175873.2A patent/EP2653924B1/fr not_active Not-in-force
- 2008-01-23 CN CN2008800028211A patent/CN101589341B/zh not_active Expired - Fee Related
- 2008-01-23 TW TW97102471A patent/TWI468872B/zh not_active IP Right Cessation
- 2008-01-23 EP EP08704110.9A patent/EP2106574B1/fr not_active Not-in-force
- 2008-01-23 KR KR1020157007668A patent/KR101644479B1/ko active IP Right Grant
- 2008-01-23 WO PCT/JP2008/051328 patent/WO2008091014A2/fr active Application Filing
- 2008-01-23 KR KR1020147018011A patent/KR101563447B1/ko active IP Right Grant
- 2008-01-23 TW TW105133974A patent/TWI610147B/zh not_active IP Right Cessation
- 2008-01-23 TW TW103120153A patent/TWI567506B/zh not_active IP Right Cessation
- 2008-01-23 KR KR1020187018095A patent/KR20180074815A/ko not_active Application Discontinuation
- 2008-01-23 KR KR1020167020386A patent/KR101873344B1/ko active IP Right Grant
- 2008-01-23 TW TW106134357A patent/TW201804263A/zh unknown
- 2008-01-23 EP EP18163585.5A patent/EP3407137A1/fr not_active Withdrawn
- 2008-01-23 JP JP2008013034A patent/JP5136080B2/ja not_active Expired - Fee Related
- 2008-01-23 KR KR1020097016520A patent/KR101496478B1/ko active IP Right Grant
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2009
- 2009-11-27 HK HK09111097.0A patent/HK1133090A1/xx not_active IP Right Cessation
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2011
- 2011-08-18 US US13/137,472 patent/US8891059B2/en not_active Expired - Fee Related
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2012
- 2012-03-30 JP JP2012082663A patent/JP5338938B2/ja not_active Expired - Fee Related
- 2012-07-17 JP JP2012158936A patent/JP5136715B2/ja not_active Expired - Fee Related
- 2012-11-15 JP JP2012251115A patent/JP5263441B2/ja not_active Expired - Fee Related
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2013
- 2013-08-07 JP JP2013164586A patent/JP2013239741A/ja active Pending
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2014
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2016
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2019
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