HK1062331A1 - Magnetic sensor, production process of the magnetic sensor and magnetic array suitable for the production process - Google Patents
Magnetic sensor, production process of the magnetic sensor and magnetic array suitable for the production processInfo
- Publication number
- HK1062331A1 HK1062331A1 HK04105206A HK04105206A HK1062331A1 HK 1062331 A1 HK1062331 A1 HK 1062331A1 HK 04105206 A HK04105206 A HK 04105206A HK 04105206 A HK04105206 A HK 04105206A HK 1062331 A1 HK1062331 A1 HK 1062331A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- production process
- magnetic sensor
- magnetic
- array suitable
- sensor
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 2
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N52/00—Hall-effect devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F13/00—Apparatus or processes for magnetising or demagnetising
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/30—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE]
- H01F41/302—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates for applying nanostructures, e.g. by molecular beam epitaxy [MBE] for applying spin-exchange-coupled multilayers, e.g. nanostructured superlattices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/32—Spin-exchange-coupled multilayers, e.g. nanostructured superlattices
- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3295—Spin-exchange coupled multilayers wherein the magnetic pinned or free layers are laminated without anti-parallel coupling within the pinned and free layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49034—Treating to affect magnetic properties
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002308376 | 2002-10-23 | ||
JP2003359790A JP3835447B2 (ja) | 2002-10-23 | 2003-10-20 | 磁気センサ、同磁気センサの製造方法及び同製造方法に適したマグネットアレイ |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1062331A1 true HK1062331A1 (en) | 2004-10-29 |
Family
ID=32473624
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK04105206A HK1062331A1 (en) | 2002-10-23 | 2004-07-15 | Magnetic sensor, production process of the magnetic sensor and magnetic array suitable for the production process |
Country Status (8)
Country | Link |
---|---|
US (4) | US7075395B2 (zh) |
JP (1) | JP3835447B2 (zh) |
KR (1) | KR100548087B1 (zh) |
CN (1) | CN1291237C (zh) |
AU (2) | AU2003257500B2 (zh) |
CA (1) | CA2445896C (zh) |
HK (1) | HK1062331A1 (zh) |
TW (1) | TWI244785B (zh) |
Families Citing this family (58)
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KR20040073515A (ko) * | 2001-12-27 | 2004-08-19 | 마츠시타 덴끼 산교 가부시키가이샤 | 방위 센서와 그 제조 방법 |
SE523321C2 (sv) * | 2002-06-20 | 2004-04-13 | Covial Device Ab | Sätt och anordning för avkänning och indikering av akustisk emission |
JP4016857B2 (ja) * | 2002-10-18 | 2007-12-05 | ヤマハ株式会社 | 磁気センサ及びその製造方法 |
US7054114B2 (en) * | 2002-11-15 | 2006-05-30 | Nve Corporation | Two-axis magnetic field sensor |
US7473656B2 (en) * | 2003-10-23 | 2009-01-06 | International Business Machines Corporation | Method for fast and local anneal of anti-ferromagnetic (AF) exchange-biased magnetic stacks |
JP4557134B2 (ja) * | 2004-03-12 | 2010-10-06 | ヤマハ株式会社 | 磁気センサの製造方法、同磁気センサの製造方法に使用されるマグネットアレイ及び同マグネットアレイの製造方法 |
JP4453485B2 (ja) * | 2004-08-19 | 2010-04-21 | 株式会社デンソー | 磁石装置 |
JP2006066821A (ja) * | 2004-08-30 | 2006-03-09 | Yamaha Corp | 磁気抵抗効果素子を備えた磁気センサ |
TWI278650B (en) | 2004-09-28 | 2007-04-11 | Yamaha Corp | Magnetic sensor using giant magnetoresistive elements and method for manufacturing the same |
JP4614061B2 (ja) * | 2004-09-28 | 2011-01-19 | ヤマハ株式会社 | 巨大磁気抵抗効果素子を用いた磁気センサ及び同磁気センサの製造方法 |
US7505233B2 (en) * | 2004-12-15 | 2009-03-17 | International Business Machines Corporation | Magnetic sensor |
KR100950615B1 (ko) * | 2005-03-17 | 2010-04-01 | 야마하 가부시키가이샤 | 3축 자기 센서 및 그 제조 방법 |
EP1860450B1 (en) | 2005-03-17 | 2011-06-08 | Yamaha Corporation | Magnetic sensor and manufacturing method thereof |
JP4507932B2 (ja) * | 2005-03-23 | 2010-07-21 | ヤマハ株式会社 | 巨大磁気抵抗効果素子を備える磁気センサ |
US20090295385A1 (en) * | 2005-05-11 | 2009-12-03 | Audrius Brazdeikis | Magneto Sensor System and Method of Use |
WO2006122203A1 (en) * | 2005-05-11 | 2006-11-16 | The University Of Houston System | An intraluminal magneto sensor system and method of use |
WO2006122202A1 (en) * | 2005-05-11 | 2006-11-16 | The University Of Houston System | An intraluminal mutlifunctional sensor system and method of use |
US7257882B2 (en) * | 2005-05-19 | 2007-08-21 | International Business Machines Corporation | Multilayer coil assembly and method of production |
JP4573736B2 (ja) * | 2005-08-31 | 2010-11-04 | 三菱電機株式会社 | 磁界検出装置 |
JP4288676B2 (ja) * | 2005-09-30 | 2009-07-01 | 日立金属株式会社 | 磁気エンコーダー |
JP2007218700A (ja) * | 2006-02-15 | 2007-08-30 | Tdk Corp | 磁気センサおよび電流センサ |
DE602007009492D1 (de) * | 2006-02-23 | 2010-11-11 | Nxp Bv | Magnetoresistive sensorvorrichtung und verfahren zur herstellung einer solchen magnetoresistiven sensorvorrichtung |
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FR2955942B1 (fr) * | 2010-01-29 | 2013-01-04 | Centre Nat Rech Scient | Magnetometre integre et son procede de fabrication |
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CN202119390U (zh) * | 2011-03-03 | 2012-01-18 | 江苏多维科技有限公司 | 一种独立封装的桥式磁场角度传感器 |
CN202013413U (zh) | 2011-04-06 | 2011-10-19 | 江苏多维科技有限公司 | 单一芯片桥式磁场传感器 |
CN102226836A (zh) * | 2011-04-06 | 2011-10-26 | 江苏多维科技有限公司 | 单一芯片桥式磁场传感器及其制备方法 |
CN102226835A (zh) * | 2011-04-06 | 2011-10-26 | 江苏多维科技有限公司 | 单一芯片双轴磁场传感器及其制备方法 |
TWI580992B (zh) * | 2011-11-18 | 2017-05-01 | 富克有限公司 | 用於決定電線的位置和方向的系統、方法、及測試儀器 |
TW201327956A (zh) * | 2011-12-28 | 2013-07-01 | Ind Tech Res Inst | 磁感應器 |
US9427172B2 (en) * | 2011-12-30 | 2016-08-30 | Mediguide Ltd. | Roll detection and six degrees of freedom sensor assembly |
JP6089572B2 (ja) * | 2012-10-18 | 2017-03-08 | ヤマハ株式会社 | 磁気抵抗効果素子のリセット回路 |
JP5924694B2 (ja) * | 2013-02-04 | 2016-05-25 | 三菱電機株式会社 | 磁界検出装置、電流検出装置、半導体集積回路、および、磁界検出方法 |
JP5924695B2 (ja) * | 2013-02-04 | 2016-05-25 | 三菱電機株式会社 | 磁界検出装置、電流検出装置、半導体集積回路、および、磁界検出方法 |
CN104793155B (zh) * | 2014-01-21 | 2017-12-08 | 上海矽睿科技有限公司 | 一种磁传感装置及该装置的制备工艺 |
CN104949694B (zh) * | 2014-03-26 | 2017-07-07 | 中国科学院宁波材料技术与工程研究所 | 一种磁扭型磁电传感器 |
JP6228663B2 (ja) * | 2014-04-07 | 2017-11-08 | アルプス電気株式会社 | 電流検知装置 |
CN104280700B (zh) * | 2014-09-28 | 2017-09-08 | 江苏多维科技有限公司 | 一种单芯片差分自由层推挽式磁场传感器电桥及制备方法 |
US10145906B2 (en) | 2015-12-17 | 2018-12-04 | Analog Devices Global | Devices, systems and methods including magnetic structures |
CN205581283U (zh) * | 2016-04-11 | 2016-09-14 | 江苏多维科技有限公司 | 一种具有初始化线圈封装的磁电阻传感器 |
DE102016211981A1 (de) * | 2016-06-30 | 2018-01-04 | Robert Bosch Gmbh | Spulenanordnung und zugehörige Messanordnung |
JP6583208B2 (ja) * | 2016-10-14 | 2019-10-02 | 株式会社デンソー | 磁気検出素子 |
JP6390728B2 (ja) * | 2017-02-22 | 2018-09-19 | Tdk株式会社 | 磁気センサとその製造方法 |
JP6885797B2 (ja) * | 2017-06-12 | 2021-06-16 | 昭和電工株式会社 | 磁気センサ及び磁気センサの製造方法 |
JP7203490B2 (ja) | 2017-09-29 | 2023-01-13 | 昭和電工株式会社 | 磁気センサ集合体及び磁気センサ集合体の製造方法 |
JP6508381B1 (ja) * | 2018-03-22 | 2019-05-08 | Tdk株式会社 | 磁気センサ装置 |
JP7020258B2 (ja) * | 2018-04-06 | 2022-02-16 | 村田機械株式会社 | 位置検出システムおよび走行システム |
JP6886222B2 (ja) * | 2019-03-19 | 2021-06-16 | Tdk株式会社 | 磁気センサ |
CN110568385B (zh) * | 2019-08-02 | 2021-03-30 | 潍坊歌尔微电子有限公司 | 一种磁传感器的制造方法及磁传感器 |
JP7070532B2 (ja) * | 2019-11-19 | 2022-05-18 | Tdk株式会社 | 磁気センサ |
CN114121400B (zh) * | 2021-11-19 | 2023-07-14 | 中国科学院合肥物质科学研究院 | 一种简化的永磁体仿星器装置 |
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-
2003
- 2003-10-20 JP JP2003359790A patent/JP3835447B2/ja not_active Expired - Fee Related
- 2003-10-21 CA CA002445896A patent/CA2445896C/en not_active Expired - Fee Related
- 2003-10-21 US US10/689,041 patent/US7075395B2/en not_active Expired - Lifetime
- 2003-10-22 AU AU2003257500A patent/AU2003257500B2/en not_active Ceased
- 2003-10-23 CN CNB200310119837XA patent/CN1291237C/zh not_active Expired - Fee Related
- 2003-10-23 TW TW092129429A patent/TWI244785B/zh not_active IP Right Cessation
- 2003-10-23 KR KR1020030074300A patent/KR100548087B1/ko not_active IP Right Cessation
-
2004
- 2004-06-24 US US10/874,324 patent/US7167345B2/en not_active Expired - Lifetime
- 2004-06-24 US US10/874,224 patent/US6940701B2/en not_active Expired - Lifetime
- 2004-07-15 HK HK04105206A patent/HK1062331A1/xx not_active IP Right Cessation
-
2005
- 2005-05-10 US US11/125,100 patent/US7598835B2/en not_active Expired - Fee Related
-
2008
- 2008-09-12 AU AU2008216997A patent/AU2008216997A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
CN1291237C (zh) | 2006-12-20 |
JP3835447B2 (ja) | 2006-10-18 |
US20040130323A1 (en) | 2004-07-08 |
US20040231135A1 (en) | 2004-11-25 |
US20040233588A1 (en) | 2004-11-25 |
US7075395B2 (en) | 2006-07-11 |
US20050212632A1 (en) | 2005-09-29 |
CA2445896C (en) | 2008-03-11 |
JP2004163419A (ja) | 2004-06-10 |
US6940701B2 (en) | 2005-09-06 |
CA2445896A1 (en) | 2004-04-23 |
KR100548087B1 (ko) | 2006-02-02 |
CN1503001A (zh) | 2004-06-09 |
KR20040036625A (ko) | 2004-04-30 |
US7598835B2 (en) | 2009-10-06 |
TW200414575A (en) | 2004-08-01 |
TWI244785B (en) | 2005-12-01 |
US7167345B2 (en) | 2007-01-23 |
AU2008216997A1 (en) | 2008-10-16 |
AU2003257500A1 (en) | 2004-05-13 |
AU2003257500B2 (en) | 2008-10-23 |
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