GB9823364D0 - Method and apparatus for anisotropic etching - Google Patents
Method and apparatus for anisotropic etchingInfo
- Publication number
- GB9823364D0 GB9823364D0 GBGB9823364.6A GB9823364A GB9823364D0 GB 9823364 D0 GB9823364 D0 GB 9823364D0 GB 9823364 A GB9823364 A GB 9823364A GB 9823364 D0 GB9823364 D0 GB 9823364D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- anisotropic etching
- anisotropic
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9823364.6A GB9823364D0 (en) | 1998-10-27 | 1998-10-27 | Method and apparatus for anisotropic etching |
PCT/GB1999/002368 WO2000005749A2 (en) | 1998-07-23 | 1999-07-23 | Method and apparatus for anisotropic etching |
AT99934921T ATE352868T1 (en) | 1998-07-23 | 1999-07-23 | PROCESS FOR ANISOTROPIC ETCHING |
US09/744,212 US7141504B1 (en) | 1998-07-23 | 1999-07-23 | Method and apparatus for anisotropic etching |
KR1020017001053A KR100639841B1 (en) | 1998-07-23 | 1999-07-23 | Method and apparatus for anisotropic etching |
JP2000561646A JP4698024B2 (en) | 1998-07-23 | 1999-07-23 | Method and apparatus for anisotropic etching |
DE69934986T DE69934986T2 (en) | 1998-07-23 | 1999-07-23 | PROCESS FOR ANISOTROPIC CORES |
EP99934921A EP1099244B1 (en) | 1998-07-23 | 1999-07-23 | Method for anisotropic etching |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB9823364.6A GB9823364D0 (en) | 1998-10-27 | 1998-10-27 | Method and apparatus for anisotropic etching |
Publications (1)
Publication Number | Publication Date |
---|---|
GB9823364D0 true GB9823364D0 (en) | 1998-12-23 |
Family
ID=10841269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GBGB9823364.6A Ceased GB9823364D0 (en) | 1998-07-23 | 1998-10-27 | Method and apparatus for anisotropic etching |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB9823364D0 (en) |
-
1998
- 1998-10-27 GB GBGB9823364.6A patent/GB9823364D0/en not_active Ceased
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |