GB9815931D0 - Method and apparatus for anisotropic etching - Google Patents

Method and apparatus for anisotropic etching

Info

Publication number
GB9815931D0
GB9815931D0 GBGB9815931.2A GB9815931A GB9815931D0 GB 9815931 D0 GB9815931 D0 GB 9815931D0 GB 9815931 A GB9815931 A GB 9815931A GB 9815931 D0 GB9815931 D0 GB 9815931D0
Authority
GB
United Kingdom
Prior art keywords
anisotropic etching
anisotropic
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB9815931.2A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Surface Technology Systems Ltd
Original Assignee
Surface Technology Systems Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Surface Technology Systems Ltd filed Critical Surface Technology Systems Ltd
Priority to GBGB9815931.2A priority Critical patent/GB9815931D0/en
Publication of GB9815931D0 publication Critical patent/GB9815931D0/en
Priority to EP99934921A priority patent/EP1099244B1/en
Priority to PCT/GB1999/002368 priority patent/WO2000005749A2/en
Priority to DE69934986T priority patent/DE69934986T2/en
Priority to AT99934921T priority patent/ATE352868T1/en
Priority to KR1020017001053A priority patent/KR100639841B1/en
Priority to US09/744,212 priority patent/US7141504B1/en
Priority to JP2000561646A priority patent/JP4698024B2/en
Ceased legal-status Critical Current

Links

GBGB9815931.2A 1998-07-23 1998-07-23 Method and apparatus for anisotropic etching Ceased GB9815931D0 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GBGB9815931.2A GB9815931D0 (en) 1998-07-23 1998-07-23 Method and apparatus for anisotropic etching
EP99934921A EP1099244B1 (en) 1998-07-23 1999-07-23 Method for anisotropic etching
PCT/GB1999/002368 WO2000005749A2 (en) 1998-07-23 1999-07-23 Method and apparatus for anisotropic etching
DE69934986T DE69934986T2 (en) 1998-07-23 1999-07-23 PROCESS FOR ANISOTROPIC CORES
AT99934921T ATE352868T1 (en) 1998-07-23 1999-07-23 PROCESS FOR ANISOTROPIC ETCHING
KR1020017001053A KR100639841B1 (en) 1998-07-23 1999-07-23 Method and apparatus for anisotropic etching
US09/744,212 US7141504B1 (en) 1998-07-23 1999-07-23 Method and apparatus for anisotropic etching
JP2000561646A JP4698024B2 (en) 1998-07-23 1999-07-23 Method and apparatus for anisotropic etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9815931.2A GB9815931D0 (en) 1998-07-23 1998-07-23 Method and apparatus for anisotropic etching

Publications (1)

Publication Number Publication Date
GB9815931D0 true GB9815931D0 (en) 1998-09-23

Family

ID=10835948

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9815931.2A Ceased GB9815931D0 (en) 1998-07-23 1998-07-23 Method and apparatus for anisotropic etching

Country Status (1)

Country Link
GB (1) GB9815931D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)